CN100363241C - Filling device for transmission case - Google Patents
Filling device for transmission case Download PDFInfo
- Publication number
- CN100363241C CN100363241C CNB2004100374491A CN200410037449A CN100363241C CN 100363241 C CN100363241 C CN 100363241C CN B2004100374491 A CNB2004100374491 A CN B2004100374491A CN 200410037449 A CN200410037449 A CN 200410037449A CN 100363241 C CN100363241 C CN 100363241C
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- CN
- China
- Prior art keywords
- filling device
- open
- filling
- opening
- work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 230000005540 biological transmission Effects 0.000 title claims description 17
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 claims abstract description 8
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 claims abstract description 8
- 239000004033 plastic Substances 0.000 claims abstract description 8
- 229920003023 plastic Polymers 0.000 claims abstract description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 13
- 239000004568 cement Substances 0.000 claims description 7
- 230000004308 accommodation Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 3
- 238000012546 transfer Methods 0.000 abstract description 6
- 238000012545 processing Methods 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 18
- 235000012431 wafers Nutrition 0.000 description 9
- 230000009471 action Effects 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000008034 disappearance Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
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- 235000009566 rice Nutrition 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- Packaging Frangible Articles (AREA)
Abstract
The present invention relates to a filling device of a transfer box, particularly to a filling device in a transfer box which is used by an SMIF system. The transfer box has a seat body, a cover body is covered above the seat body and containing space which can contain a light cover or a wafer is arranged in the cover body. A through hole is arranged in the seat body, and the filling device is penetrated in the through hole. A hollow passage is arranged in the filling device, and one end of the hollow passage is provided with a switching part which is composed of a plurality of hinges. The other end of the hollow passage far away from the switching part is provided with a guide inclined plane, which enables a gas filling tube to extend into the transfer box through the switching part for filling gas. When the gas filling tube is pulled out, the switching part can be automatically closed to reduce friction. Thus, scraps can be effectively prevented, and the filling device of a transfer box is integrally formed by using rubber or plastics, which can effectively reduce cost and is beneficial to processing so as to reduce processing cost.
Description
Technical field
The present invention relates to a kind of filling device that transmits box, especially refer to the filling device in the employed transmission box of SMIF system, it is provided with hollow channel in filling device, an and end of hollow channel is provided with the opening and closing part, makes appendix in gas replenishment process, but the generation that actv. is reduced friction, and then actv. prevents the generation of fines, and utilize rubber or plastic cement is integrally formed makes, can effectively reduce cost and be beneficial to processing, and make decrease machining cost.
Background technology
When entering 21st century, the human lives has entered in the field of digital Age, article arround many now human lives, apparatus all replaces with the digitalisation high-tech product, not only bring people many convenience, also enjoyed high-tech civilization and progress achievement simultaneously, and in the digitized epoch, most of electrical equipment, article, apparatus all can have relation with digital science and technology or control with high-tech IC chip, to reach the rapid of automation, certain purpose, so the human lives is among digital sciemtifec and technical sphere, then must be with more progressive digital knowledge, technology is controlled various high-tech products, for example: computing machine, TV, audio-visual devices, the building central management, automobile, aircraft or the like food, clothing, live, the Related product of row, apparatus; Wherein high-tech IC chip is considerable element, so someone declares that the IC chip is the rice of industry, because the IC chip is made up of the integrated circuit of superprecision, its manufacturing process is to utilize the mask version to use the board of high precision that the lamination operation that silicon wafer carries out high precision is finished in the environment of dust free room, manufacturing costs such as its board factory building are very high, therefore in the process of making wafer, the product yield can determine a semiconductor factory whether to make a profit, and the yield of therefore being devoted to improve product is the most important problem of the manager of each semiconductor factory.
A kind of by SMIF system that Hewlett-Packard proposed in US Patent the 4th, 532, No. 970 and the 4th, 534, have in No. 389 illustrated.The purpose of SMIF system is to be suffered particulate flux in the storage and transport process that reduces semi-crystal technology.The practice that can local reach this purpose comprises: guarantee mechanically that in storage and transport process the gaseous medium (for example air or nitrogen) around the wafer is unlikely the entering in the environment that is close to wafer of particulate that maintains static, guarantees with respect to wafer in the surrounding environment basically, and that the SMIF system can utilize is one a small amount of, the gas of no particulate, for object provides a clean environment, the motion of this gas, air flow line and external contamination thing are all controlled.
Yet, for fear of destroying wafer or mask version, the capital adopts the transmission box to come transfer wafers or mask version, and the filling unreactable gas is damaged to prevent the mask version from producing oxidation in transmitting box, see also Fig. 9, shown in 10, be the existing action diagram () of box when the filling gas that transmit, (2), find out by knowing among the figure, existing mask version box A is provided with open-work A1, and in open-work A1, be equipped with a filling device B, and filling device B is provided with a groove B1 and short slot B2, and filling device B is arranged with a spring C, when to transmission box A inflation, earlier appendix D is pushed in the set groove B1 of filling device B, and promotion filling device B moves short slot B2, and make spring C generation elastic deformation and have restoring force, again gas is fills up to by short slot B2 and transmits in the box A, when finishing, filling extracts appendix D out, and filling device B can revert to the preceding position of inflation by the restoring force of spring C and become a closure state, but above-mentioned filling device B is to utilize spring C and appendix D to produce mobile when using, and with gas filling to mask version A, but spring B can produce friction greatly with open-work A1 and filling device B, produce fines in the wipe contact process easily, and fines can destroy the cleanliness that transmits in the box A along with the inflation action, therefore and pollute and transmit the mask version in the box A and jeopardize quality and the yield of entire wafer in producing, and this kind practice is cooresponding numerous and diverse when assembling, and tooling cost is significantly risen.
The setting of the filling device of above-mentioned existing transmission box because of the disappearance on the structure design produces great harm and influence when using, is the inventor and the direction place of being engaged in the anxious desire improvement of this journey dealer institute.
Summary of the invention
The contriver is to collect related data because above-mentioned problem and disappearance, via assessing in many ways and consider, and to engage in the many years of experience of the industry accumulation, via constantly studying and revising, designs the filling device of this kind transmission box eventually.
Main purpose of the present invention is, a kind of filling device that transmits box is provided, utilize set hollow channel of filling device and opening and closing part, appendix can be stretched into by the opening and closing part transmit filling gas in the box, and this opening and closing part can be closed voluntarily when appendix is extracted out, with the generation of reducing friction, and then actv. prevents the generation of fines.
Secondary objective of the present invention is, a kind of filling device that transmits box is provided, and utilizes that rubber or plastic cement are integrally formed to be made, and can effectively reduce cost and be beneficial to processing, makes decrease machining cost.
Technical scheme of the present invention is as follows: a kind of filling device that transmits box, especially refer to the filling device in the employed transmission box of SMIF system, this transmission box has pedestal, and this pedestal top is coated with lid, and having in the lid can ccontaining mask version or the accommodation space of wafer, be provided with open-work in this pedestal, and in open-work, be equipped with filling device, wherein, this filling device is made by rubber or plastic cement, and the caliber of this filling device is greater than the aperture of open-work, and this filling device is provided with clip engine part in outer rim, makes clip engine part be fastened in the open-work inner edge, and has hollow channel in the filling device, and an end of hollow channel is provided with the opening and closing part, appendix can be stretched into by the opening and closing part transmit filling gas in the box, and this opening and closing part can be closed voluntarily when appendix is extracted out.
According to such scheme, utilize set hollow channel of filling device and opening and closing part, appendix can be stretched into by the opening and closing part transmit filling gas in the box, and this opening and closing part can be closed voluntarily when appendix is extracted out, with the generation of reducing friction, and then actv. prevents the generation of fines.
Description of drawings
Fig. 1 is a stereo appearance figure of the present invention.
Fig. 2 is a section-drawing of the present invention.
Fig. 3 transmits the three-dimensional exploded view before the box for the present invention is assembled in.
Fig. 4 transmits the stereo appearance figure behind the box for the present invention is assembled in.
Fig. 5 is the action section-drawing () of the present invention when filling gas.
Fig. 6 is the action section-drawing (two) of the present invention when filling gas.
Fig. 7 is the action section-drawing (three) of the present invention when filling gas.
Fig. 8 is the section-drawing of yet another embodiment of the invention.
Fig. 9 is the existing action diagram () of box when filling gas that transmit.
Figure 10 is the existing action diagram (two) of box when filling gas that transmit.
The component symbol explanation
1, lid 11, accommodation space 12, retainer
2, pedestal 21, open-work 3, filling device
31, hollow channel 33, clip engine part 32, opening and closing part
34, guide ramp 321, loose-leaf 4, appendix
41, end A, transmission box A1, open-work
B, filling device B1, groove B2, short slot
C, spring D, appendix
The specific embodiment
See also shown in Fig. 1,2, be provided with hollow channel 31 in the filling device 3 of the present invention, and an end of hollow channel 31 is provided with opening and closing part 32, and opening and closing part 32 is made up of the loose-leaf 321 of plural tool elastic displacement, and be provided with guide ramp 34 in the other end away from opening and closing part 32, and the outer rim of filling device 3 has clip engine part 33.
See also shown in Fig. 3,4, the present invention the time is earlier filling device 3 to be inserted the set open-work 21 of pedestal 2 in assembling, and make filling device 3 set clip engine parts 33 be fastened in open-work 21 inner edges, again lid 1 is covered in pedestal 2 tops, and utilize set retainer 12 button boxes of lid 1 in pedestal 2 belows, make its formation have the air-tightness of maintenance effect.
See also shown in Fig. 5,6,7, the present invention earlier inserts appendix 4 in the set hollow channel 31 of filling device 3, and because of the setting of guide ramp 34 can make appendix 4 insert more smoothly, utilize appendix 4 front ends to back down the set loose-leaf 321 in opening and closing part 32 again, make loose-leaf 321 generation elastic displacements and have restoring force, again with gas filling to the set accommodation space 11 of lid 1, treat after filling finishes appendix 4 to be extracted out, this moment, these opening and closing part 32 set loose-leaves 321 can restore to the original state according to restoring force.
See also shown in Figure 8, the end 41 of appendix 4 used in the present invention can make its profile be same as guide ramp 34, and desire is done to inflate when moving, utilize appendix 4 set ends 41 to develop guide ramp 34, make end 41 and guide ramp 34 be closed state, utilize the positive pressure of gas to open the effect that opening and closing part 32 set loose-leaves 321 reach filling again.
Moreover filling device 3 of the present invention can be rubber or plastic cement is integrally formed made, and effectively reduces cost, and assembling the time can directly utilize to try hard to recommend firmly to squeeze filling device 3 is snapped in the open-work 21, and then effectively reduces assembling man-hour, faster production.
Again, filling device 3 of the present invention is provided with guide ramp 34, makes in the insertion hollow channel 31 that appendix 4 can be more prone to.
To sum up, to transmit the filling device of box be that the key problem in technology that improves the existing structure deficiency is in the present invention:
(1), the present invention utilizes filling device 3 set hollow channel 31 and opening and closing part 32, make appendix 4 stretch into filling gas in the mask version box by opening and closing part 32, and this opening and closing part 32 can be closed voluntarily when appendix 4 is extracted out, with the generation of reducing friction.
(2), the present invention utilizes rubber or plastic cement that filling device 3 is integrally formed made, and effectively reduces cost, and can directly utilize to try hard to recommend firmly to squeeze during assembling filling device 3 is snapped in the open-work 21, and then effectively reduce assembling man-hour, faster production.
(3), the present invention utilizes the set guide ramp 34 of filling device 3, make in the insertion hollow channel 31 that appendix 4 can be more prone to.
Above-mentioned detailed description is at a kind of preferable possible embodiments explanation of the present invention, but this embodiment is not in order to limit claim scope of the present invention, all other do not break away from the equalization finished under the disclosed skill spirit to be changed and modifies change, all should be contained in the scope that the present invention contains.
Claims (6)
1. filling device that transmits box, be the filling device in the employed transmission box of SMIF system, this transmission box has pedestal, and this pedestal top is coated with lid, and having in the lid can ccontaining mask version or the accommodation space of wafer, be provided with open-work in this pedestal, and in open-work, be equipped with filling device, it is characterized in that, this filling device is made by rubber or plastic cement, and the caliber of this filling device is greater than the aperture of open-work, and this filling device is provided with clip engine part in outer rim, makes clip engine part be fastened in the open-work inner edge, and has hollow channel in the filling device, and an end of hollow channel is provided with the opening and closing part, appendix can be stretched into by the opening and closing part transmit filling gas in the box, and this opening and closing part can be closed voluntarily when appendix is extracted out.
2. the filling device of transmission box as claimed in claim 1 is characterized in that, this opening and closing part is made up of a plurality of loose-leaf.
3. the filling device of transmission box as claimed in claim 1 is characterized in that, an end of this hollow channel can further be provided with guide ramp.
4. the filling device of transmission box as claimed in claim 1 is characterized in that, this filling device can be one or more.
5. the filling device of transmission box as claimed in claim 1 is characterized in that, this filling device can be one of the forming made.
6. filling device that transmits box, be the filling device in the employed transmission box of SMIF system, this transmission box has pedestal, and the pedestal top is coated with lid, and having in the lid can ccontaining mask version or the accommodation space of wafer, be provided with open-work in this pedestal, and in open-work, be equipped with filling device, it is characterized in that, this filling device is made by rubber or plastic cement, and the caliber of this filling device is greater than the aperture of open-work, this filling device is provided with clip engine part in outer rim, make clip engine part be fastened in the open-work inner edge, and have hollow channel in the filling device, and an end of hollow channel is provided with the opening and closing part, and the other end away from the opening and closing part is provided with appendix, make hollow channel be air-tight state and appendix can be held in an end of hollow channel, but allow the positive pressure of appendix mat gas open the opening and closing part, and then reach the effect of filling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100374491A CN100363241C (en) | 2004-04-29 | 2004-04-29 | Filling device for transmission case |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100374491A CN100363241C (en) | 2004-04-29 | 2004-04-29 | Filling device for transmission case |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1689932A CN1689932A (en) | 2005-11-02 |
| CN100363241C true CN100363241C (en) | 2008-01-23 |
Family
ID=35345757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100374491A Expired - Lifetime CN100363241C (en) | 2004-04-29 | 2004-04-29 | Filling device for transmission case |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100363241C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101770968B (en) * | 2009-01-07 | 2011-08-17 | 家登精密工业股份有限公司 | Inflation valve and chip box configured with same |
| TWI409198B (en) * | 2010-12-27 | 2013-09-21 | Gudeng Prec Industral Co Ltd | A wafer container with at least one supporting module having a long slot |
| JP7519281B2 (en) | 2020-12-02 | 2024-07-19 | 信越ポリマー株式会社 | Substrate storage container |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6455404B2 (en) * | 2015-11-17 | 2019-01-23 | 株式会社ダイフク | Container transfer equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5320218A (en) * | 1992-04-07 | 1994-06-14 | Shinko Electric Co., Ltd. | Closed container to be used in a clean room |
| US5482161A (en) * | 1994-05-24 | 1996-01-09 | Fluoroware, Inc. | Mechanical interface wafer container |
| JPH08203993A (en) * | 1995-01-24 | 1996-08-09 | Shinko Electric Co Ltd | Gas supply system of carriable airtight container |
| JP2000311936A (en) * | 1999-04-26 | 2000-11-07 | Mitsubishi Materials Silicon Corp | Wafer accommodation method and wafer case used therefor |
| US6302927B1 (en) * | 1998-01-23 | 2001-10-16 | Tokyo Electron Limited | Method and apparatus for wafer processing |
| CN1371462A (en) * | 1999-09-20 | 2002-09-25 | S·C·流体公司 | Supercritical fluid drying system |
-
2004
- 2004-04-29 CN CNB2004100374491A patent/CN100363241C/en not_active Expired - Lifetime
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5320218A (en) * | 1992-04-07 | 1994-06-14 | Shinko Electric Co., Ltd. | Closed container to be used in a clean room |
| US5482161A (en) * | 1994-05-24 | 1996-01-09 | Fluoroware, Inc. | Mechanical interface wafer container |
| JPH08203993A (en) * | 1995-01-24 | 1996-08-09 | Shinko Electric Co Ltd | Gas supply system of carriable airtight container |
| US6302927B1 (en) * | 1998-01-23 | 2001-10-16 | Tokyo Electron Limited | Method and apparatus for wafer processing |
| JP2000311936A (en) * | 1999-04-26 | 2000-11-07 | Mitsubishi Materials Silicon Corp | Wafer accommodation method and wafer case used therefor |
| CN1371462A (en) * | 1999-09-20 | 2002-09-25 | S·C·流体公司 | Supercritical fluid drying system |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101770968B (en) * | 2009-01-07 | 2011-08-17 | 家登精密工业股份有限公司 | Inflation valve and chip box configured with same |
| TWI409198B (en) * | 2010-12-27 | 2013-09-21 | Gudeng Prec Industral Co Ltd | A wafer container with at least one supporting module having a long slot |
| JP7519281B2 (en) | 2020-12-02 | 2024-07-19 | 信越ポリマー株式会社 | Substrate storage container |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1689932A (en) | 2005-11-02 |
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