CN100338153C - Method for producing stripping thin film - Google Patents

Method for producing stripping thin film Download PDF

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Publication number
CN100338153C
CN100338153C CNB031085423A CN03108542A CN100338153C CN 100338153 C CN100338153 C CN 100338153C CN B031085423 A CNB031085423 A CN B031085423A CN 03108542 A CN03108542 A CN 03108542A CN 100338153 C CN100338153 C CN 100338153C
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China
Prior art keywords
film
thin films
stripping
mentioned
manufacture method
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Expired - Fee Related
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CNB031085423A
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Chinese (zh)
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CN1532231A (en
Inventor
宫原裕之
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TDK Corp
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TDK Corp
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Abstract

The present invention provides a method for manufacturing a stripping thin film which can prevent dust or foreign matters from entering gaps of ceramic capacitors, and the incidence rate of abnormality of the ceramic capacitors can be rapidly lowered. In the method, polyester thin films are continuously conveyed, and at least one side of each polyester thin film is coated with stripping liquid; stripping liquid coating surfaces on the polyester thin films are cleaned before the polyester thin films are dried and coiled in a roller shape; in addition, in the method for manufacturing stripping thin films of the step of cutting thin films into predetermined width, and the thin films are obtained after the steps that polyester thin films are continuously conveyed, at least one side of each polyester thin film is coated with stripping liquid, and the polyester thin films are dried and coiled in a roller shape; after the thin films with predetermined width are obtained, stripping liquid coating surfaces on the polyester thin films are cleaned.

Description

The manufacture method of stripping film
Technical field
The present invention is the manufacture method of relevant stripping film, specifically be the dust or the foreign matter of sneaking in the manufacturing processed of employed stripping film about can suitably get rid of ceramic condenser and make the time, can reduce the manufacture method of the stripping film of bad incidence whereby fast.
Background technology
The ceramic electronic component of ceramic condenser etc. is for example on flexible support body (stripping film), utilize coating such as scraping blade method to comprise ceramic coatings such as ceramics powder, organic binder bond, plasticizer, the solvent thin slice (position sintered ceramic media sheet) of making a living that is shaped, utilize the mesh printing to form the step manufacturing of electrodes such as palladium, silver, nickel thereon.Especially obtain to have the occasion of the ceramic condenser of lamination structure, according to predetermined lamination structure lamination in addition piecewise, borrow pressurization to cut off step acquisition ceramic green substrate the livings thin slice that obtained.Binding agent in the above ceramic green substrate that obtains is burnt,, obtain ceramic electronic component with 1000 ℃~1400 ℃ sintering.
In addition, the other technologies of making ceramic electronic component have scheme to make the flexible support body be positioned at the method (the Japanese Patent spy opens clear 63-188926 communique etc.) of top as giving birth to the hot transfer printing of thin slice, on the flexible support body, only repeat to give birth to the forming step of thin slice, and obtain the method for laminate giving birth to the step that prints electrode on the thin slice according to the lamination number of necessity.
Summary of the invention
The ceramic electronic component of lamination step that must above several steps, especially give birth in the manufacturing of substrate capacitance device at multilayer ceramic, sneaking into of dirt such as dust or foreign matter can cause one of big problem points, and above-mentioned dirt is sneaked into and prevent to constitute one of important lime light on being made.The laminated sheet electrical condenser has the lamination structure of above-mentioned alternate multilayer lamination dielectric layer and electrode layer, in addition, be number millimeter very little size in length and breadth simultaneously,, still can cause very high defective products production rate even therefore minute dust etc. is sneaked into the occasion of each interlayer.
Particularly, coated with ceramic coating forms the step of dielectric layer on stripping film, or form on it in step of electrode layer, when dust or foreign matter taking place on the peel ply adhering to, as do not remove the ceramic condenser that the long-pending step of repeat layer obtained and can cause the bad incidence of high injection.
Therefore the purpose of this invention is to provide and to eliminate the problems referred to above, suitably prevent sneaking into of dust between the laminated layer of ceramic condenser or foreign matter, can reduce the manufacture method of the stripping film of bad incidence whereby fast.
In order to solve above-mentioned problem, the manufacture method of the present invention's stripping film is to apply on the single face at least of the polyester film of carrying continuously after the stripper liquid, drying is wound in the manufacture method of stripping film of roller shape step, it is characterized in that: after the above-mentioned drying, before the coiling of above-mentioned roller shape, clean the stripper liquid applicator surface of above-mentioned polyester film.
In addition, the manufacture method of other stripping films of the present invention is included on the single face at least of polyester film of continuous conveying after the coating stripper liquid, after drying is wound into the roller shape, severing becomes in the stripping film manufacture method of step of preset width, it is characterized by: after the severing of above-mentioned preset width, clean the stripper liquid applicator surface of above-mentioned polyester film.
In the manufacture method of the present invention's stripping film, can clean the two sides of above-mentioned polyester film effectively.
According to the present invention, after peel ply forms, on stripper liquid applicator surface, use ceramic condenser that imposes clean stripping film and make and the occasion comparison of using not clean stripping film can especially reduce the bad incidence of injection of electrical condenser at least.
Description of drawings
Fig. 1 is the sketch chart of one of expression contact ablution of the present invention embodiment.
Fig. 2 is the sketch chart of one of the contactless ablution of expression the present invention embodiment.
Nomenclature
1 film
2 clean material (tNonwovens)
3 outlet rollers
4 wind up rolls
5,6 deflector rolls
7 edulcoration devices
Embodiment
Below, specifically implement kenel according to the present invention and be described in detail as follows.
Among the present invention, the stripper liquid of coating silicone resin etc. on resin films such as polyester, dry back forms after the peel ply, cleans the stripper liquid applicator surface of polyester film.Whereby, can prevent from really to spray bad occurrence cause and can obviously reduce bad incidence to sneaking into of the dust of ceramic condenser inside or foreign matter etc. when causing making.
Cleaning is to carry polyester film continuously, is forming peel ply on the single face at least, is wound in the manufacturing step of roller shape stripping film, and coating is forced from agent liquid, dry, suitably in addition dry sclerosis forms after the peel ply, carries out before being wound into roller shape.Being rolled into roller shape is in thereafter, moves to the step of other setting, emits once more the manufacturing step of borrowing coating and printing to form the ceramic condenser of medium layer and electrode layer is provided on the peel ply surface.Therefore, cleaning is with after forming at peel ply, and the moment of the reeling behavior of advancing is good.
In addition, when the device width of coating stripping film is wide than the device width of coating media layer, the application width of co-ordination medium layer carries out the stripping film severing is become the step of cracking of preset width after forming the stripping film coiling, can borrow this moment the step of cracking clean after severing becomes preset width.And in order really to get rid of sneaking into of dust or foreign matter, before the moment of the applying step of medium layer etc., to clean as far as possible to good.
Peel ply forms the cleaning of polyester film (stripping film) of back and must carry out with respect to the face of stripper coated side, cleans but preferably carry out the two sides.That is, must carry out cleaning of two sides when the two sides forms peel ply certainly, it is good also can cleaning its two sides when still only single face forms peel ply.But though prevent sneaking into of dust etc. as only cleaning minimum when forming the peel ply single face during single face, when but dust or foreign matter etc. adhere to a side that does not form peel ply, having the anxiety of polluting once more on the peel ply between through steps such as coilings, is good to carry out cleaning of two sides therefore.
Ceramic condenser is that coated with ceramic coating forms medium layer on the peel ply of stripping film, layer prints electrode on this medium layer, at least repeat the formation step of this once above bilayer, lamination medium layer and electrode layer are made on the peel ply of stripping film, but in the present invention, preferably as above-mentioned, after peel ply forms, coiling was cleaned the peel ply surface before moment, can be cleaned effectively.
Method of cleaning can contact, contactless one of them, the contactless ablution that for example can use contact ablution that Fig. 1 represents or Fig. 2 to represent.Fig. 1 and Fig. 2 are the pattern diagram that the film that peel ply is set is carried in expression.The occasion of the contact that Fig. 1 represents, clean material is generally tNonwovens, notes making the unlikely generation slight crack of film.Specifically as shown, so that tNonwovens 2 is wound into roller shape feed rolls 3 with having; Coiling is sent the wind up roll 4 of tNonwovens 2 usefulness; And the device that tNonwovens 2 is pressed on deflector roll 5 grades of film 1 surperficial usefulness is good.The peel ply at least that this device must only be arranged on film forms on the side, but is good to be arranged on its two sides as shown in Figure 1.In addition, deflector roll 5 be with change position-adjustable with respect to film 1 push intensity be configured to goodly, by the change of position, unlikelyly cause in the scope of scar at peel ply or polyester film surface, can be easily trap dust etc. effectively.
In addition, the contactless occasion that Fig. 2 represents continues handle thin films 1 by deflector roll 6 as shown, for example uses the decontaminating apparatus 7 of web scrubber etc. to clean.Illustrated web scrubber possesses high speed jet mechanism and vacuum attraction mechanism, will its attraction be removed the method for cleaning of mode attached to the dust or the foreign bodies removal of the particle size of film surface with the high-velocity jet air.
In addition, the method for cleaning arbitrarily of diagram is for the size minimum as the laminated wafer electrical condenser, and the lifting of several layers goods precision etc. is very effective.
(embodiment)
Embodiment 1
The modulation of<stripper liquid 〉
So as to the following cooperation content of expression, it is that (SHIN-ETSU HANTOTAI's chemical industry (thigh) is made for the sclerotic type silicone of the catalyst kenel that makes its addition reaction that the mixture of polydimethylsiloxane with vinyl and hydrosilanes based compound is added platinum.KS-847 (H)) is dissolved in the mixed solvent of butanone (MEK) and toluene, the solid content concentration of integral body is modulated into into the stripper liquid (silicone resin solution) of 3.0 weight %.
SHIN-ETSU HANTOTAI's chemical industry (thigh) system trade(brand)name: KS-847H 300g
(solids content concn 30%, resin 90g)
Platinum catalyst CAT-PL-50T (SHIN-ETSU HANTOTAI's chemical industry (thigh) system) 3.0g
MEK/ butanone=50/50 (weight ratio) solution 2700g
The modulation of<medium layer coating 〉
After the powder such as the barium titanate about sintering particle diameter 0.1 μ m~1.0 μ m, chromic oxide, yttrium oxide, manganous carbonate, barium carbonate, lime carbonate, silicon oxide, as BaTiO 3100 moles of % mix forming conversion Cr 2O 3Be that 0.3 mole of %, conversion MnO are that 0.4 mole of %, conversion BaO are that 2.4 moles of %, conversion CaO are 1.6 moles of %, conversion SiO 2Be 4 moles of %, conversion Y 2O 3Be the composition of 0.1 mole of %, borrow shredder to mix 24 hours, dry back obtains the medium raw material.Cooperate these medium raw material 100 parts by weight, allyl resin 5 parts by weight, methylene dichloride 40 parts by weight, acetone 25 parts by weight, mineral turpentine 6 parts by weight, use commercially available φ 10mm zirconium grain to mix 24 hours, obtain media ceramic coating (medium layer coating) by the crucible pallet.
The making of<stripping film 〉
It is the width 100mm of 0.15 μ m, the two-way extension polyethylene terephthalate (PET film) of thickness 38 μ m that above-mentioned stripper liquid is formed coating thickness with the dry back of bar varnishing machine coating, with 110 ℃ of Heating temperatures carry out 40 second drying and sclerous reaction.Subsequently, the contact ablution that utilizes Fig. 1 to represent uses tNonwovens (Fuji's weaving (thigh) system, POLYPAS) to carry out the two-sided clean back of film and reels, and obtains the stripping film that is wound into roller shape.
The formation of<medium layer 〉
Secondly, use the method that scrawls on the stripper liquid applicator surface of stripping film, apply the medium layer coating that dry dielectric thickness afterwards forms 8 μ m, after 70 ℃ of following dry 20 seconds, be wound into roller shape and form medium layer (living substrate).
The printing of<electrode layer 〉
Secondly, pattern prints electrode on above-mentioned medium layer.It is the material of main composition that electrode is to use with nickel, copper.Electrode pattern shows each electrode is become towards laterally reaching the longitudinal interval assortment.
<peel off the lamination step 〉
Carry out above medium layer and form after step and the electrode layer print steps, stripping media layer and electrode layer from the stripping film.Make 75 above-mentioned living substrates that obtain, with the lamination number of 75 layers of these laminations with electrode.
The making of<multilayer ceramic sheet test film 〉
The multilayer ceramic sheet is pressed, cuts off, obtained whereby to weighing apparatus after going out the living substrate of the above-mentioned lamination that obtains.With the multilayer ceramic sheet that obtained with 280 ℃ of unstickings knots that carry out 12 hours, and in the reduction surrounding environment with 1300 ℃ of sintering that carry out 2 hours.On the laminate that is obtained behind the sintering, form terminal electrode.The material of terminal electrode is to be main composition with copper.This mixed gas surrounding environment that places nitrogen and hydrogen with 800 ℃ of heat dryings that carry out 30 minutes, is electroplated and obtained multilayer ceramic sheet test film.
Embodiment 2
The contact ablution that replaces tNonwovens is made lamination ceramic plate test film similarly to Example 1 except the jet-propelled contactless ablution (web scrubber) that use Fig. 2 represents.
Embodiment 3
The formation step of peel ply is to use the PET film of 1000mm width, peel ply formed the back in case after the roller of the film of coilings borrows the slitter severing to become the 100mm width, be wound into once more to carry out cleaning equally before the roller shape and make lamination ceramic plate test film in addition similarly to Example 1.
Embodiment 4
The formation step of peel ply is to use the PET film of 1000mm width, peel ply formed the back in case after the roller of the film of coilings borrows the slitter severing to become the 100mm width, be wound into once more to carry out cleaning equally before the roller shape and make lamination ceramic plate test film in addition similarly to Example 2.
Comparative example
Except not cleaning fully, other are all identical with embodiment 1, make lamination ceramic plate test film.
Spray fraction defective
Use corporate system high-drag meter HP-4329A, give 10V, its resistance value of mensuration after 30 seconds with 20 ℃.Insulation resistance is bad for spraying below 1000 Ω, and each test film is to represent as the injection fraction defective with the ratio with respect to the bad generation number of injection of the sample number of supplying with test.It the results are shown in following table.
Table 1
Clean implementation condition Spray fraction defective
Embodiment
1 Before reeling, dry back implements to clean Less than 2.0%
Embodiment 2 Before reeling, dry back implements to clean Less than 2.0%
Embodiment 3 Implement behind the severing preset width to clean Less than 2.0%
Embodiment 4 Implement behind the severing preset width to clean Less than 2.0%
Comparative example Do not implement to clean 10%
The invention effect
As described above, the manufacture method of the stripping film according to the present invention can suitably prevent sneaking into of dust between the laminated layer of ceramic capacitor or foreign matter, reduces significantly whereby bad incidence.

Claims (3)

1. the manufacture method of a stripping film, be to comprise on the single face at least of polyester film of continuous conveying the dry manufacture method that is wound into the stripping film of roller shape step after the coating stripper liquid, it is characterized by: after the above-mentioned drying, before the coiling of above-mentioned roller shape, by utilizing contact ablution or the jet-propelled contactless ablution of cleaning material, clean the stripper liquid applicator surface of above-mentioned polyester film.
2. the manufacture method of a stripping film, be included on the single face at least of polyester film of continuous conveying after the coating stripper liquid, after drying is wound into the roller shape, severing becomes the stripping film manufacture method of the step of preset width, it is characterized by: after the severing of above-mentioned preset width, by utilizing contact ablution or the jet-propelled contactless ablution of cleaning material, clean the stripper liquid applicator surface of above-mentioned polyester film.
3. as the manufacture method of claim 1 or 2 stripping films of putting down in writing, wherein clean the two sides of above-mentioned polyester film.
CNB031085423A 2003-03-26 2003-03-26 Method for producing stripping thin film Expired - Fee Related CN100338153C (en)

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CNB031085423A CN100338153C (en) 2003-03-26 2003-03-26 Method for producing stripping thin film

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Application Number Priority Date Filing Date Title
CNB031085423A CN100338153C (en) 2003-03-26 2003-03-26 Method for producing stripping thin film

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CN1532231A CN1532231A (en) 2004-09-29
CN100338153C true CN100338153C (en) 2007-09-19

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112725914B (en) * 2020-12-24 2022-01-28 西南科技大学 Membrane silk collection device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634774A1 (en) * 1988-07-29 1990-02-02 Norsolor Sa Strippable paint compositions and their application to the protection and cleaning of surfaces
JP2002052671A (en) * 2000-08-07 2002-02-19 Tdk Corp Release film and method for manufacturing the same
WO2002015251A1 (en) * 2000-08-14 2002-02-21 Tokyo Electron Limited Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
JP2002154181A (en) * 2000-11-20 2002-05-28 Mitsubishi Polyester Film Copp Mold release film
JP2003071375A (en) * 2001-08-31 2003-03-11 Tdk Corp Producing method of strippable film

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634774A1 (en) * 1988-07-29 1990-02-02 Norsolor Sa Strippable paint compositions and their application to the protection and cleaning of surfaces
JP2002052671A (en) * 2000-08-07 2002-02-19 Tdk Corp Release film and method for manufacturing the same
WO2002015251A1 (en) * 2000-08-14 2002-02-21 Tokyo Electron Limited Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
JP2002154181A (en) * 2000-11-20 2002-05-28 Mitsubishi Polyester Film Copp Mold release film
JP2003071375A (en) * 2001-08-31 2003-03-11 Tdk Corp Producing method of strippable film

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