CH620793A5 - - Google Patents

Download PDF

Info

Publication number
CH620793A5
CH620793A5 CH1251377A CH1251377A CH620793A5 CH 620793 A5 CH620793 A5 CH 620793A5 CH 1251377 A CH1251377 A CH 1251377A CH 1251377 A CH1251377 A CH 1251377A CH 620793 A5 CH620793 A5 CH 620793A5
Authority
CH
Switzerland
Prior art keywords
layers
resonator
temperature
layer
resonator according
Prior art date
Application number
CH1251377A
Other languages
German (de)
English (en)
Inventor
Ewald Dr Benes
Dieter Dr Hammer
Original Assignee
List Hans
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by List Hans filed Critical List Hans
Publication of CH620793A5 publication Critical patent/CH620793A5/de

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/54Control of the diagnostic device
    • A61B8/546Control of the diagnostic device involving monitoring or regulation of device temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0907Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the compression mode type
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02007Details of bulk acoustic wave devices
    • H03H9/02086Means for compensation or elimination of undesirable effects
    • H03H9/02094Means for compensation or elimination of undesirable effects of adherence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02827Elastic parameters, strength or force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Pathology (AREA)
  • Animal Behavior & Ethology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biophysics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CH1251377A 1976-10-19 1977-10-13 CH620793A5 (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT778276A AT353506B (de) 1976-10-19 1976-10-19 Piezoelektrischer resonator

Publications (1)

Publication Number Publication Date
CH620793A5 true CH620793A5 (nl) 1980-12-15

Family

ID=3599428

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1251377A CH620793A5 (nl) 1976-10-19 1977-10-13

Country Status (6)

Country Link
US (1) US4166967A (nl)
JP (1) JPS5350991A (nl)
AT (1) AT353506B (nl)
CH (1) CH620793A5 (nl)
DE (1) DE2746712C3 (nl)
GB (1) GB1577692A (nl)

Families Citing this family (92)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4383194A (en) * 1979-05-01 1983-05-10 Toray Industries, Inc. Electro-acoustic transducer element
US4448546A (en) * 1980-11-28 1984-05-15 Novex, Inc. Digital temperature sensor
AT369900B (de) * 1981-05-20 1983-02-10 List Hans Messwertaufnehmer mit piezoelektrischem sensorelement
JPS5974498U (ja) * 1982-11-10 1984-05-21 株式会社山武 空調用挿入形温度センサの構造
US4479070A (en) * 1983-06-10 1984-10-23 Sperry Corporation Vibrating quartz diaphragm pressure sensor
FR2551611B1 (fr) * 1983-08-31 1986-10-24 Labo Electronique Physique Nouvelle structure de transducteur ultrasonore et appareil d'examen de milieux par echographie ultrasonore comprenant une telle structure
DE3430161A1 (de) * 1984-08-16 1986-02-27 Siemens AG, 1000 Berlin und 8000 München Poroese anpassungsschicht in einem ultraschallapplikator
NL8501908A (nl) * 1985-07-03 1987-02-02 Tno Tastsensor.
JPS62258597A (ja) * 1986-04-25 1987-11-11 Yokogawa Medical Syst Ltd 超音波トランスデユ−サ
US4961347A (en) * 1987-11-25 1990-10-09 Ishikawajima-Harima Heavy Industries Co., Ltd. Probe for ultrasonic flaw detectors
DE3920663A1 (de) * 1989-06-23 1991-01-10 Siemens Ag Breitstrahlender ultraschallwandler
EP0451306B1 (de) * 1990-04-09 1997-07-16 Siemens Aktiengesellschaft Frequenzselektiver Ultraschall-Schichtwandler
US5268610A (en) * 1991-12-30 1993-12-07 Xerox Corporation Acoustic ink printer
US5373268A (en) * 1993-02-01 1994-12-13 Motorola, Inc. Thin film resonator having stacked acoustic reflecting impedance matching layers and method
US5335209A (en) * 1993-05-06 1994-08-02 Westinghouse Electric Corp. Acoustic sensor and projector module having an active baffle structure
US5422533A (en) * 1994-03-09 1995-06-06 The United States Of America As Represented By The Secretary Of The Army Piezoelectric resonator
US5864261A (en) * 1994-05-23 1999-01-26 Iowa State University Research Foundation Multiple layer acoustical structures for thin-film resonator based circuits and systems
US5598051A (en) * 1994-11-21 1997-01-28 General Electric Company Bilayer ultrasonic transducer having reduced total electrical impedance
US5629906A (en) * 1995-02-15 1997-05-13 Hewlett-Packard Company Ultrasonic transducer
US5630949A (en) * 1995-06-01 1997-05-20 Tfr Technologies, Inc. Method and apparatus for fabricating a piezoelectric resonator to a resonant frequency
US5596239A (en) * 1995-06-29 1997-01-21 Motorola, Inc. Enhanced quality factor resonator
US5617065A (en) * 1995-06-29 1997-04-01 Motorola, Inc. Filter using enhanced quality factor resonator and method
US5696423A (en) * 1995-06-29 1997-12-09 Motorola, Inc. Temperature compenated resonator and method
US6135971A (en) * 1995-11-09 2000-10-24 Brigham And Women's Hospital Apparatus for deposition of ultrasound energy in body tissue
WO1998001732A1 (en) * 1996-07-09 1998-01-15 Panex Corporation Quartz transducer
US5873154A (en) * 1996-10-17 1999-02-23 Nokia Mobile Phones Limited Method for fabricating a resonator having an acoustic mirror
JP2002509644A (ja) * 1996-10-17 2002-03-26 ノキア モービル フォーンズ リミティド ガラス基板上に薄膜バルク音波共振器(fbar)を作る方法
US5872493A (en) 1997-03-13 1999-02-16 Nokia Mobile Phones, Ltd. Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror
US5910756A (en) * 1997-05-21 1999-06-08 Nokia Mobile Phones Limited Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators
US6049159A (en) * 1997-10-06 2000-04-11 Albatros Technologies, Inc. Wideband acoustic transducer
US6050943A (en) 1997-10-14 2000-04-18 Guided Therapy Systems, Inc. Imaging, therapy, and temperature monitoring ultrasonic system
US6081171A (en) * 1998-04-08 2000-06-27 Nokia Mobile Phones Limited Monolithic filters utilizing thin film bulk acoustic wave devices and minimum passive components for controlling the shape and width of a passband response
US5936150A (en) * 1998-04-13 1999-08-10 Rockwell Science Center, Llc Thin film resonant chemical sensor with resonant acoustic isolator
WO2000030554A1 (en) 1998-11-20 2000-06-02 Jones Joie P Methods for selectively dissolving and removing materials using ultra-high frequency ultrasound
DE19928176A1 (de) * 1999-06-19 2001-01-04 Bosch Gmbh Robert Piezoaktor
US6307302B1 (en) * 1999-07-23 2001-10-23 Measurement Specialities, Inc. Ultrasonic transducer having impedance matching layer
US6452310B1 (en) * 2000-01-18 2002-09-17 Texas Instruments Incorporated Thin film resonator and method
US6441703B1 (en) * 2000-01-18 2002-08-27 Texas Instruments Incorporated Multiple frequency acoustic reflector array and monolithic cover for resonators and method
US7914453B2 (en) 2000-12-28 2011-03-29 Ardent Sound, Inc. Visual imaging system for ultrasonic probe
US6509813B2 (en) * 2001-01-16 2003-01-21 Nokia Mobile Phones Ltd. Bulk acoustic wave resonator with a conductive mirror
JP4037825B2 (ja) * 2001-07-30 2008-01-23 インフィネオン テクノロジーズ アクチエンゲゼルシャフト 音響反射器を備える圧電性共振器装置
US7092659B2 (en) 2003-12-31 2006-08-15 Samsung Electronics Co., Ltd. Discharge methods and systems in electrophotography
US7393325B2 (en) 2004-09-16 2008-07-01 Guided Therapy Systems, L.L.C. Method and system for ultrasound treatment with a multi-directional transducer
US9011336B2 (en) * 2004-09-16 2015-04-21 Guided Therapy Systems, Llc Method and system for combined energy therapy profile
US7824348B2 (en) 2004-09-16 2010-11-02 Guided Therapy Systems, L.L.C. System and method for variable depth ultrasound treatment
US10864385B2 (en) 2004-09-24 2020-12-15 Guided Therapy Systems, Llc Rejuvenating skin by heating tissue for cosmetic treatment of the face and body
US7530958B2 (en) * 2004-09-24 2009-05-12 Guided Therapy Systems, Inc. Method and system for combined ultrasound treatment
US8535228B2 (en) 2004-10-06 2013-09-17 Guided Therapy Systems, Llc Method and system for noninvasive face lifts and deep tissue tightening
US8444562B2 (en) 2004-10-06 2013-05-21 Guided Therapy Systems, Llc System and method for treating muscle, tendon, ligament and cartilage tissue
US7530356B2 (en) * 2004-10-06 2009-05-12 Guided Therapy Systems, Inc. Method and system for noninvasive mastopexy
US20060111744A1 (en) 2004-10-13 2006-05-25 Guided Therapy Systems, L.L.C. Method and system for treatment of sweat glands
KR20170117205A (ko) 2004-10-06 2017-10-20 가이디드 테라피 시스템스, 엘.엘.씨. 초음파 치료 시스템
US9827449B2 (en) 2004-10-06 2017-11-28 Guided Therapy Systems, L.L.C. Systems for treating skin laxity
US8690778B2 (en) 2004-10-06 2014-04-08 Guided Therapy Systems, Llc Energy-based tissue tightening
US11235179B2 (en) 2004-10-06 2022-02-01 Guided Therapy Systems, Llc Energy based skin gland treatment
WO2006042163A2 (en) 2004-10-06 2006-04-20 Guided Therapy Systems, L.L.C. Method and system for cosmetic enhancement
US11883688B2 (en) 2004-10-06 2024-01-30 Guided Therapy Systems, Llc Energy based fat reduction
US9694212B2 (en) 2004-10-06 2017-07-04 Guided Therapy Systems, Llc Method and system for ultrasound treatment of skin
US8133180B2 (en) 2004-10-06 2012-03-13 Guided Therapy Systems, L.L.C. Method and system for treating cellulite
US7758524B2 (en) 2004-10-06 2010-07-20 Guided Therapy Systems, L.L.C. Method and system for ultra-high frequency ultrasound treatment
US11724133B2 (en) 2004-10-07 2023-08-15 Guided Therapy Systems, Llc Ultrasound probe for treatment of skin
US11207548B2 (en) 2004-10-07 2021-12-28 Guided Therapy Systems, L.L.C. Ultrasound probe for treating skin laxity
WO2006100457A1 (en) * 2005-03-22 2006-09-28 Aviza Technology Limited A method of forming a bragg reflector stack
EP1875327A2 (en) 2005-04-25 2008-01-09 Guided Therapy Systems, L.L.C. Method and system for enhancing computer peripheral saftey
JPWO2007004435A1 (ja) * 2005-06-30 2009-01-22 パナソニック株式会社 音響共振器及びフィルタ
US7859170B2 (en) * 2005-08-08 2010-12-28 Koninklijke Philips Electronics N.V. Wide-bandwidth matrix transducer with polyethylene third matching layer
EP1915753B1 (en) * 2005-08-08 2019-04-10 Koninklijke Philips N.V. Wide-bandwidth matrix transducer with polyethylene third matching layer
US8270251B2 (en) 2005-12-05 2012-09-18 Xact Downhole Telemetry Inc. Acoustic isolator
DE102006023165B4 (de) * 2006-05-17 2008-02-14 Infineon Technologies Ag Verfahren zur Herstellung eines akustischen Spiegels aus alternierend angeordneten Schichten hoher und niedriger akustischer Impedanz
US9566454B2 (en) * 2006-09-18 2017-02-14 Guided Therapy Systems, Llc Method and sysem for non-ablative acne treatment and prevention
US20150174388A1 (en) 2007-05-07 2015-06-25 Guided Therapy Systems, Llc Methods and Systems for Ultrasound Assisted Delivery of a Medicant to Tissue
TWI526233B (zh) 2007-05-07 2016-03-21 指導治療系統股份有限公司 利用聲波能量調製藥劑輸送及效能之系統
FR2919050B1 (fr) * 2007-07-20 2012-03-23 Centre Nat Rech Scient Jauge de contrainte de type structure resonante acoustique et capteur d'au moins un parametre physique utilisant une telle jauge de contrainte.
KR20110020293A (ko) 2008-06-06 2011-03-02 얼테라, 인크 코스메틱 치료 및 이미징 시스템 및 방법
CA2748362A1 (en) * 2008-12-24 2010-07-01 Michael H. Slayton Methods and systems for fat reduction and/or cellulite treatment
US8715186B2 (en) 2009-11-24 2014-05-06 Guided Therapy Systems, Llc Methods and systems for generating thermal bubbles for improved ultrasound imaging and therapy
US9504446B2 (en) 2010-08-02 2016-11-29 Guided Therapy Systems, Llc Systems and methods for coupling an ultrasound source to tissue
US9149658B2 (en) 2010-08-02 2015-10-06 Guided Therapy Systems, Llc Systems and methods for ultrasound treatment
US8857438B2 (en) 2010-11-08 2014-10-14 Ulthera, Inc. Devices and methods for acoustic shielding
AT511330B1 (de) 2011-06-03 2012-11-15 Piezocryst Advanced Sensorics Sensor für die messung von druck und/oder kraft
WO2013009785A2 (en) 2011-07-10 2013-01-17 Guided Therapy Systems, Llc. Systems and methods for improving an outside appearance of skin using ultrasound as an energy source
WO2013012641A1 (en) 2011-07-11 2013-01-24 Guided Therapy Systems, Llc Systems and methods for coupling an ultrasound source to tissue
US9263663B2 (en) 2012-04-13 2016-02-16 Ardent Sound, Inc. Method of making thick film transducer arrays
US9510802B2 (en) 2012-09-21 2016-12-06 Guided Therapy Systems, Llc Reflective ultrasound technology for dermatological treatments
CN113648551A (zh) 2013-03-08 2021-11-16 奥赛拉公司 用于多焦点超声治疗的装置和方法
US10561862B2 (en) 2013-03-15 2020-02-18 Guided Therapy Systems, Llc Ultrasound treatment device and methods of use
SG11201608691YA (en) 2014-04-18 2016-11-29 Ulthera Inc Band transducer ultrasound therapy
CN104568239B (zh) * 2014-12-09 2017-11-21 太原航空仪表有限公司 一种9mm压电激励小型振动筒压力传感器
KR102072353B1 (ko) * 2015-05-11 2020-01-31 메저먼트 스페셜티스, 인크. 금속성 보호 구조를 갖는 초음파 트랜스듀서들을 위한 임피던스 매칭층
MX2018007094A (es) 2016-01-18 2018-11-09 Ulthera Inc Dispositivo de ultrasonido compacto que tiene un arreglo de ultrasonido anular perifericamente conectado electricamente a una placa de circuito impreso flexible y un metodo de montaje del mismo.
FI3981466T3 (fi) 2016-08-16 2023-10-03 Ulthera Inc Järjestelmiä ja menetelmiä ihon kosmeettista ultraäänihoitoa varten
WO2019164836A1 (en) 2018-02-20 2019-08-29 Ulthera, Inc. Systems and methods for combined cosmetic treatment of cellulite with ultrasound

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2434255A (en) * 1948-01-13 Temperature compensated wave
US2430013A (en) * 1942-06-10 1947-11-04 Rca Corp Impedance matching means for mechanical waves
US3362501A (en) * 1966-09-15 1968-01-09 Magnaflux Corp Acoustic transmission section
US4016530A (en) * 1975-06-02 1977-04-05 Goll Jeffrey H Broadband electroacoustic converter
US3979565A (en) * 1975-08-11 1976-09-07 Westinghouse Electric Corporation Metal enclosed transducer assembly

Also Published As

Publication number Publication date
DE2746712A1 (de) 1978-04-20
ATA778276A (de) 1979-04-15
GB1577692A (en) 1980-10-29
US4166967A (en) 1979-09-04
JPS6217407B2 (nl) 1987-04-17
DE2746712B2 (de) 1979-05-17
JPS5350991A (en) 1978-05-09
DE2746712C3 (de) 1980-01-31
AT353506B (de) 1979-11-26

Similar Documents

Publication Publication Date Title
CH620793A5 (nl)
DE2052356B2 (de) Quarzresonator-Druckmesswertwandler
DE2526817A1 (de) Wandlerkopplung
DE10042915B9 (de) Akustooberflächenwellenbauelement und Kommunikationsgerät
DE2327176B2 (de) Quarzkristall-Resonator für Frequenzen über 1 MHz
EP3120123B1 (de) Piezoelektrisches messelement zur messung des dynamischen und statischen druckes und/oder der temperatur
DE2611780A1 (de) Ultraschallwandler und verfahren zu dessen herstellung
DE112009001424T5 (de) Asymmetrischer Komposit-Schallwellensensor
DE2701416A1 (de) In gekoppelter form schwingendes piezoelektrisches quarzelement
EP2288912B1 (de) Anordnung eines piezoakustischen resonators auf einem akustischen spiegel eines substrats, verfahren zum herstellen der anordnung und verwendung der anordnung
DE60301794T2 (de) Bauelement mit grenzflächenschallwellen aus lithiumtantalat
DE112013004642T5 (de) Dünnschichtige piezoelektrische Vorrichtung, piezoelektrisches Stellglied, piezoelektrischer Sensor, Festplattenlaufwerk und Tintenstrahldrucker
DE10202856B4 (de) Oberflächenakustikwellenvorrichtung
DE10241425A1 (de) Mit akustischen Wellen arbeitender Resonator mit Unterdrückung störender Nebenmoden
DE3031758C2 (de) Piezoelektrischer Einkristall und Oberflächenschallwellenelemente mit derartigen Einkristallen
US2669666A (en) Piezoelectric transducer
DE2246511B2 (de) Kristalldrehschwinger
DE1616355B1 (de) Elektromechanischer Wandler
DE2557603A1 (de) Akustisches oberflaechenwellengeraet und verfahren zum herstellen eines solchen geraetes
EP0069112B1 (de) Piezoelektrisches Element
DE1616685B1 (de) Elektromechanisches Filter
DE1616526A1 (de) Mechanischer Schwinger mit elektrostriktiver Anregung
Jen et al. Acoustic lenses employing PZT thin film transducers
DE102018131946A1 (de) Dünnfilm-SAW-Vorrichtung
DE2140548A1 (de) Akustooptischer lichtablenker

Legal Events

Date Code Title Description
PL Patent ceased