CH539950A - Verfahren und Einrichtung zum Gettern von Halbleitern - Google Patents

Verfahren und Einrichtung zum Gettern von Halbleitern

Info

Publication number
CH539950A
CH539950A CH1843171A CH1843171A CH539950A CH 539950 A CH539950 A CH 539950A CH 1843171 A CH1843171 A CH 1843171A CH 1843171 A CH1843171 A CH 1843171A CH 539950 A CH539950 A CH 539950A
Authority
CH
Switzerland
Prior art keywords
gettering
semiconductors
gettering semiconductors
Prior art date
Application number
CH1843171A
Other languages
English (en)
Inventor
Schweitzer Samuel
Ziffermayer Georg
Original Assignee
Bbc Brown Boveri & Cie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bbc Brown Boveri & Cie filed Critical Bbc Brown Boveri & Cie
Priority to CH1843171A priority Critical patent/CH539950A/de
Priority to DE2203123A priority patent/DE2203123C3/de
Priority to SE7216456A priority patent/SE380674B/xx
Priority to US00316520A priority patent/US3856472A/en
Publication of CH539950A publication Critical patent/CH539950A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/06—Gettering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/113—Nitrides of boron or aluminum or gallium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/114—Nitrides of silicon

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
CH1843171A 1971-12-20 1971-12-20 Verfahren und Einrichtung zum Gettern von Halbleitern CH539950A (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CH1843171A CH539950A (de) 1971-12-20 1971-12-20 Verfahren und Einrichtung zum Gettern von Halbleitern
DE2203123A DE2203123C3 (de) 1971-12-20 1972-01-24 Verfahren zum Gettern von Halbleitern
SE7216456A SE380674B (sv) 1971-12-20 1972-12-15 Sett for gettring av halvledare och anordning for genomforande av settet
US00316520A US3856472A (en) 1971-12-20 1972-12-19 Apparatus for the gettering of semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1843171A CH539950A (de) 1971-12-20 1971-12-20 Verfahren und Einrichtung zum Gettern von Halbleitern

Publications (1)

Publication Number Publication Date
CH539950A true CH539950A (de) 1973-07-31

Family

ID=4432932

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1843171A CH539950A (de) 1971-12-20 1971-12-20 Verfahren und Einrichtung zum Gettern von Halbleitern

Country Status (4)

Country Link
US (1) US3856472A (de)
CH (1) CH539950A (de)
DE (1) DE2203123C3 (de)
SE (1) SE380674B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4144099A (en) * 1977-10-31 1979-03-13 International Business Machines Corporation High performance silicon wafer and fabrication process
US4277303A (en) * 1978-08-07 1981-07-07 The Harshaw Chemical Company Getter for melt-grown scintillator ingot and method for growing the ingot
DE2855413A1 (de) * 1978-12-21 1980-07-10 Siemens Ag Speichermaterial fuer wasserstoff
US4401505A (en) * 1982-03-31 1983-08-30 The United States Of America As Represented By The Administrator National Aeronautics And Space Administration Method of increasing minority carrier lifetime in silicon web or the like
DE3219399C2 (de) * 1982-05-24 1984-05-10 Spindler & Hoyer GmbH & Co, 3400 Göttingen Bausatz zum Aufbau einer mikrooptischen Bank
US4727993A (en) * 1984-03-09 1988-03-01 Tegal Corporation Wafer cassette having multi-directional access
US4919278A (en) * 1988-06-13 1990-04-24 Howen Phillip J Holder for containers and covers
US5828502A (en) * 1994-09-26 1998-10-27 Afshari; Ali Optical bench system
US7201639B2 (en) * 2001-04-24 2007-04-10 Hitachi Global Storage Technologies Netherlands B.V. Powder for disks
US6619486B1 (en) * 2002-03-25 2003-09-16 Carlos J. Veloso Flipper/catcher integrated with guide pin for up-stacking of die-cut thermoformed parts
US20060043033A1 (en) * 2004-08-31 2006-03-02 Lynn James P Container stacker, stabilizer and aligner
US20150250309A1 (en) * 2014-03-06 2015-09-10 Kristina McLoud Pillow Holding Device
USD801087S1 (en) 2014-12-04 2017-10-31 Kristina McLoud Pillow holder
US10278528B1 (en) * 2018-03-15 2019-05-07 Jimmy Godsby Ball cap holder

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1127319A (en) * 1913-12-24 1915-02-02 Walter S Thompson Rack or holder.
US2187355A (en) * 1937-02-04 1940-01-16 Cushman S Sons Inc Apparatus for the manufacture of baked goods
GB849550A (en) * 1958-01-30 1960-09-28 Gen Electric Co Ltd Improvements in or relating to the heat treatment of silicon
US3007816A (en) * 1958-07-28 1961-11-07 Motorola Inc Decontamination process
US3128213A (en) * 1961-07-20 1964-04-07 Int Rectifier Corp Method of making a semiconductor device
DE1514807B2 (de) * 1964-04-15 1971-09-02 Texas Instruments Inc., Dallas. Tex. (V.St.A.) Verfahren zum herstellen einer planaren halbleiteranordnung
US3429818A (en) * 1965-02-12 1969-02-25 Tyco Laboratories Inc Method of growing crystals
NL6615376A (de) * 1966-11-01 1968-05-02

Also Published As

Publication number Publication date
DE2203123C3 (de) 1981-02-05
US3856472A (en) 1974-12-24
DE2203123A1 (de) 1973-07-05
SE380674B (sv) 1975-11-10
DE2203123B2 (de) 1980-05-29

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Legal Events

Date Code Title Description
PL Patent ceased