CH446097A - Control device for lapping machine, for checking the shape of the lapping surface - Google Patents

Control device for lapping machine, for checking the shape of the lapping surface

Info

Publication number
CH446097A
CH446097A CH1669765A CH1669765A CH446097A CH 446097 A CH446097 A CH 446097A CH 1669765 A CH1669765 A CH 1669765A CH 1669765 A CH1669765 A CH 1669765A CH 446097 A CH446097 A CH 446097A
Authority
CH
Switzerland
Prior art keywords
lapping
checking
shape
control device
machine
Prior art date
Application number
CH1669765A
Other languages
German (de)
Inventor
A Boettcher Stephen
Original Assignee
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Corp filed Critical Speedfam Corp
Publication of CH446097A publication Critical patent/CH446097A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B24B41/047—Grinding heads for working on plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
CH1669765A 1964-12-08 1965-12-03 Control device for lapping machine, for checking the shape of the lapping surface CH446097A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US416825A US3374582A (en) 1964-12-08 1964-12-08 Lapping machine

Publications (1)

Publication Number Publication Date
CH446097A true CH446097A (en) 1967-10-31

Family

ID=23651464

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1669765A CH446097A (en) 1964-12-08 1965-12-03 Control device for lapping machine, for checking the shape of the lapping surface

Country Status (5)

Country Link
US (1) US3374582A (en)
CH (1) CH446097A (en)
DE (1) DE1502592A1 (en)
FR (1) FR1455729A (en)
GB (1) GB1067807A (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3500589A (en) * 1967-07-25 1970-03-17 Fmc Corp Disc brake grinder
US4216629A (en) * 1978-09-15 1980-08-12 Degaeta Albert M Method and apparatus for producing balls
US4270314A (en) * 1979-09-17 1981-06-02 Speedfam Corporation Bearing mount for lapping machine pressure plate
WO1988006949A1 (en) * 1987-03-10 1988-09-22 Gruzinsky Politekhnichesky Institut Imeni V.I.Leni Machine tool for abrasive machining
US5123218A (en) * 1990-02-02 1992-06-23 Speedfam Corporation Circumferential pattern finishing method
US5187901A (en) * 1990-02-02 1993-02-23 Speedfam Corporation Circumferential pattern finishing machine
US5224304A (en) * 1991-11-07 1993-07-06 Speedfam Corporation Automated free abrasive machine for one side piece part machining
DE69316849T2 (en) * 1992-11-27 1998-09-10 Ebara Corp., Tokio/Tokyo Method and device for polishing a workpiece
US5635083A (en) * 1993-08-06 1997-06-03 Intel Corporation Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate
JPH07237120A (en) * 1994-02-22 1995-09-12 Nec Corp Wafer grinding device
US5733175A (en) * 1994-04-25 1998-03-31 Leach; Michael A. Polishing a workpiece using equal velocity at all points overlapping a polisher
US5607341A (en) * 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5533924A (en) * 1994-09-01 1996-07-09 Micron Technology, Inc. Polishing apparatus, a polishing wafer carrier apparatus, a replacable component for a particular polishing apparatus and a process of polishing wafers
US5899798A (en) * 1997-07-25 1999-05-04 Obsidian Inc. Low profile, low hysteresis force feedback gimbal system for chemical mechanical polishing
US5951382A (en) * 1997-12-01 1999-09-14 Lucent Technologies Inc. Chemical mechanical polishing carrier fixture and system
US5967885A (en) * 1997-12-01 1999-10-19 Lucent Technologies Inc. Method of manufacturing an integrated circuit using chemical mechanical polishing
US6386947B2 (en) 2000-02-29 2002-05-14 Applied Materials, Inc. Method and apparatus for detecting wafer slipouts
US7399217B1 (en) 2007-02-05 2008-07-15 P.R. Hoffman Machine Products Lapping machine
US8702473B1 (en) 2013-03-04 2014-04-22 Gordon Lyons Rock polishing systems and methods

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2079076A (en) * 1931-04-03 1937-05-04 Libbey Owens Ford Glass Co Truing apparatus for grinding wheels
FR913570A (en) * 1945-08-24 1946-09-13 Automatic equipment for pricking grinding wheels for pulp production
US2687603A (en) * 1951-06-26 1954-08-31 Crane Packing Co Method of lapping quartz crystals
DE1093251B (en) * 1956-01-05 1960-11-17 Karl Hack Dressing device for the end faces of the grinding wheels on spring end grinding machines
DE1110544B (en) * 1957-11-29 1961-07-06 Siemens Ag Single disc lapping machine for semiconductor wafers
US2968135A (en) * 1958-04-07 1961-01-17 Abrading Systems Company Lapping machine

Also Published As

Publication number Publication date
US3374582A (en) 1968-03-26
GB1067807A (en) 1967-05-03
FR1455729A (en) 1966-10-14
DE1502592A1 (en) 1969-08-07

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