BR112015008211A2 - circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio - Google Patents

circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio

Info

Publication number
BR112015008211A2
BR112015008211A2 BR112015008211A BR112015008211A BR112015008211A2 BR 112015008211 A2 BR112015008211 A2 BR 112015008211A2 BR 112015008211 A BR112015008211 A BR 112015008211A BR 112015008211 A BR112015008211 A BR 112015008211A BR 112015008211 A2 BR112015008211 A2 BR 112015008211A2
Authority
BR
Brazil
Prior art keywords
medium
transistor
analyte
integrated circuit
sensitive apparatus
Prior art date
Application number
BR112015008211A
Other languages
English (en)
Other versions
BR112015008211B1 (pt
Inventor
Marcelis Bout
Hendrik Klootwijk Johan
Mescher Marleen
De Graaf Pascal
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of BR112015008211A2 publication Critical patent/BR112015008211A2/pt
Publication of BR112015008211B1 publication Critical patent/BR112015008211B1/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
    • H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
    • H01L29/0669—Nanowires or nanotubes
    • H01L29/0673—Nanowires or nanotubes oriented parallel to a substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1025—Channel region of field-effect devices
    • H01L29/1029—Channel region of field-effect devices of field-effect transistors
    • H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4141—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4145—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Nanotechnology (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Thin Film Transistor (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

resumo circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio revela-se um circuito integrado (100) compreendendo um substrato semicondutor (110); uma camada de isolamento (120) sobre o dito substrato; um primeiro transistor (140a) sobre a dita camada de isolamento, o primeiro transistor compreendendo uma região de canal funcionalizado exposta (146a) entre uma região de origem (142a) e uma região de drenagem (144) para percepção de um analito em um meio; um segundo transistor (140b) sobre a dita camada de isolamento, o segundo transistor compreendendo uma região de canal exposta (146b) entre uma região de origem (142b) e uma região de drenagem (144) para percepção de um potencial do dito meio; e um gerador de influência de tensão (150) acoplado de maneira condutora ao substrato semicondutor para prover uma tensão de influência aos ditos transistores, o dito gerador de influência de tensão sendo responsivo ao segundo transistor. aparelho sensível compreendendo tal ci e um método de medição de analito utilizando tal ci também são revelados. 1/1
BR112015008211A 2012-10-16 2013-10-11 circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio BR112015008211B1 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261714400P 2012-10-16 2012-10-16
PCT/IB2013/059296 WO2014060916A1 (en) 2012-10-16 2013-10-11 Integrated circuit with sensing transistor array, sensing apparatus and measuring method

Publications (2)

Publication Number Publication Date
BR112015008211A2 true BR112015008211A2 (pt) 2017-07-04
BR112015008211B1 BR112015008211B1 (pt) 2020-05-19

Family

ID=49911749

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112015008211A BR112015008211B1 (pt) 2012-10-16 2013-10-11 circuito integrado, aparelho sensível, e, método de medição de um analito de interesse em um meio

Country Status (7)

Country Link
US (1) US10302590B2 (pt)
EP (1) EP2909616A1 (pt)
JP (1) JP6353454B2 (pt)
CN (1) CN104737008B (pt)
BR (1) BR112015008211B1 (pt)
RU (1) RU2650087C2 (pt)
WO (1) WO2014060916A1 (pt)

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US10067070B2 (en) * 2015-11-06 2018-09-04 Applied Materials, Inc. Particle monitoring device
EP3442804A4 (en) * 2016-09-23 2019-12-25 Hewlett-Packard Development Company, L.P. FLUID EJECTION DEVICE AND PARTICLE DETECTOR
US10447202B2 (en) * 2017-02-08 2019-10-15 Texas Instruments Incorporated Apparatus for communication across a capacitively coupled channel
JP6740949B2 (ja) * 2017-03-31 2020-08-19 日立金属株式会社 ガスセンサ
US11531027B2 (en) * 2017-12-01 2022-12-20 University Of Florida Research Foundation, Inc. Low cost disposable medical sensor fabricated on glass, paper or plastics
FR3077926B1 (fr) * 2018-02-15 2023-04-14 St Microelectronics Crolles 2 Sas Dispositif de detection, en particulier incorpore dans un ph-metre, et procede de realisation correspondant.
WO2020061509A2 (en) * 2018-09-21 2020-03-26 Teralytic Inc. Extensible, multimodal sensor fusion platform for remote, proximal terrain sensing
CN114674897B (zh) * 2022-03-28 2023-06-06 深圳大学 一种用于检测单细胞外pH值的探针型有机电化学晶体管传感器及其制备方法、检测方法
EP4332562A1 (en) * 2022-09-02 2024-03-06 IQ Biozoom Sp. z o.o. A mesfet biosensor and a biosensing kit

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WO2004003535A1 (en) * 2002-06-27 2004-01-08 Nanosys Inc. Planar nanowire based sensor elements, devices, systems and methods for using and making same
US20060263255A1 (en) * 2002-09-04 2006-11-23 Tzong-Ru Han Nanoelectronic sensor system and hydrogen-sensitive functionalization
RU2257567C1 (ru) * 2004-05-19 2005-07-27 Воронежский государственный технический университет Твердотельный интегральный датчик газов
US20060188934A1 (en) * 2005-02-22 2006-08-24 Ying-Lan Chang System and method for implementing a high-sensitivity sensor with improved stability
TWI287041B (en) * 2005-04-27 2007-09-21 Jung-Tang Huang An ultra-rapid DNA sequencing method with nano-transistors array based devices
FR2886459B1 (fr) * 2005-05-31 2007-08-24 Thales Sa Reseau de transistors fet a nanotube ou nanofil semi-conducteur et dispositif electronique correspondant, pour la detection d'analytes
US8349604B2 (en) 2006-06-15 2013-01-08 University Of South Florida Nano-based device for detection of disease biomarkers and other target molecules
KR100799577B1 (ko) * 2006-08-31 2008-01-30 한국전자통신연구원 가스 및 생화학물질 감지용 센서 제조 방법과 그 센서를포함하는 집적회로 및 그 제조 방법
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Also Published As

Publication number Publication date
US10302590B2 (en) 2019-05-28
JP6353454B2 (ja) 2018-07-04
CN104737008B (zh) 2017-06-09
RU2015118418A (ru) 2016-12-10
RU2650087C2 (ru) 2018-04-06
US20150276667A1 (en) 2015-10-01
BR112015008211B1 (pt) 2020-05-19
CN104737008A (zh) 2015-06-24
EP2909616A1 (en) 2015-08-26
WO2014060916A1 (en) 2014-04-24
JP2016502644A (ja) 2016-01-28

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06U Preliminary requirement: requests with searches performed by other patent offices: procedure suspended [chapter 6.21 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 11/10/2013, OBSERVADAS AS CONDICOES LEGAIS.