BR0208242A - Processos de tratamento por plasma de uma superfìcie a tratar de um objeto ou partìculas e de formação de pós e, dispositivo para a realização de um processo de tratamento de superfìcie - Google Patents

Processos de tratamento por plasma de uma superfìcie a tratar de um objeto ou partìculas e de formação de pós e, dispositivo para a realização de um processo de tratamento de superfìcie

Info

Publication number
BR0208242A
BR0208242A BR0208242-0A BR0208242A BR0208242A BR 0208242 A BR0208242 A BR 0208242A BR 0208242 A BR0208242 A BR 0208242A BR 0208242 A BR0208242 A BR 0208242A
Authority
BR
Brazil
Prior art keywords
surface treatment
plasma
particles
carrying
powder formation
Prior art date
Application number
BR0208242-0A
Other languages
English (en)
Inventor
Pavel Koulik
Mikha L Samsonov
Alexander Cherepanov
Evguenii Petrov
Original Assignee
Apit Corp S A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Apit Corp S A filed Critical Apit Corp S A
Publication of BR0208242A publication Critical patent/BR0208242A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32321—Discharge generated by other radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Cleaning In General (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

"PROCESSOS DE TRATAMENTO POR PLASMA DE UMA SUPERFìCIE A TRATAR DE UM OBJETO OU PARTìCULAS E DE FORMAçãO DE PóS E, DISPOSITIVO PARA A REALIZAçãO DE UM PROCESSO DE TRATAMENTO DE SUPERFìCIE." Um processo de tratamento por plasma de uma superfície a tratar de um objeto ou partículas, compreende a criação de um plasma e a aplicação do plasma contra a superfície a tratar, é caracterizado em que se excita a superfície a tratar ou que se faz vibrar acusticamente o plasma para criar um movimento ondulatório da superfície a tratar ou para criar um movimento ondulatório relativo entre o plasma e a superfície a tratar.
BR0208242-0A 2001-03-27 2002-03-26 Processos de tratamento por plasma de uma superfìcie a tratar de um objeto ou partìculas e de formação de pós e, dispositivo para a realização de um processo de tratamento de superfìcie BR0208242A (pt)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP01810318 2001-03-27
EP01120974 2001-08-31
EP01810915 2001-09-20
PCT/IB2002/001001 WO2002076511A2 (fr) 2001-03-27 2002-03-26 Procédé de traitement de surface par plasma et dispositif pour la mise en oeuvre du procédé

Publications (1)

Publication Number Publication Date
BR0208242A true BR0208242A (pt) 2004-04-13

Family

ID=27224223

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0208242-0A BR0208242A (pt) 2001-03-27 2002-03-26 Processos de tratamento por plasma de uma superfìcie a tratar de um objeto ou partìculas e de formação de pós e, dispositivo para a realização de um processo de tratamento de superfìcie

Country Status (10)

Country Link
EP (1) EP1374276B1 (pt)
JP (1) JP2004527077A (pt)
CN (1) CN100437883C (pt)
AT (1) ATE373314T1 (pt)
AU (1) AU2002242923A1 (pt)
BR (1) BR0208242A (pt)
DE (1) DE60222391T2 (pt)
ES (1) ES2294112T3 (pt)
MX (1) MXPA03008615A (pt)
WO (1) WO2002076511A2 (pt)

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US8399795B2 (en) * 2007-05-11 2013-03-19 Force Technology Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves
NL1033958C2 (nl) * 2007-06-11 2008-12-12 Omve Netherlands B V Werkwijze voor het desinfecteren van kunststof flessen etc.
CN101974298A (zh) * 2010-11-11 2011-02-16 复旦大学 用氩等离子体处理金属表面方法
WO2012113568A1 (de) * 2011-02-25 2012-08-30 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Desinfektionseinrichtung, behälter, verwendung eines behälters und desinfektionsverfahren zur desinfektion eines behälters, insbesondere für einen lebensmittelbehälter
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US20190093226A1 (en) * 2016-04-08 2019-03-28 Sio2 Medical Products, Inc. Method for applying a pecvd lubricity layer with a moving gas inlet
CN106944419A (zh) * 2017-05-12 2017-07-14 中国工程物理研究院核物理与化学研究所 一种去除表面氚污染的等离子体去污***

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Also Published As

Publication number Publication date
EP1374276B1 (fr) 2007-09-12
EP1374276A2 (fr) 2004-01-02
AU2002242923A1 (en) 2002-10-08
DE60222391D1 (de) 2007-10-25
WO2002076511A2 (fr) 2002-10-03
ES2294112T3 (es) 2008-04-01
CN1511333A (zh) 2004-07-07
WO2002076511A3 (fr) 2003-04-17
MXPA03008615A (es) 2005-03-07
DE60222391T2 (de) 2008-06-05
JP2004527077A (ja) 2004-09-02
CN100437883C (zh) 2008-11-26
ATE373314T1 (de) 2007-09-15

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Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]

Free format text: REFERENTE A(S) 8A E 9A ANUIDADE(S)

B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: REFERENTE AO DESPACHO 8.6 PUBLICADO NA RPI 2103 DE 26/04/2011.