BE650653A - - Google Patents

Info

Publication number
BE650653A
BE650653A BE650653A BE650653A BE650653A BE 650653 A BE650653 A BE 650653A BE 650653 A BE650653 A BE 650653A BE 650653 A BE650653 A BE 650653A BE 650653 A BE650653 A BE 650653A
Authority
BE
Belgium
Application number
BE650653A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE650653A publication Critical patent/BE650653A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
BE650653A 1963-07-19 1964-07-16 BE650653A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US296320A US3244855A (en) 1963-07-19 1963-07-19 System for correcting the shift of an electron-gun beam from the desired region of impingement

Publications (1)

Publication Number Publication Date
BE650653A true BE650653A (xx) 1965-01-18

Family

ID=23141528

Family Applications (1)

Application Number Title Priority Date Filing Date
BE650653A BE650653A (xx) 1963-07-19 1964-07-16

Country Status (6)

Country Link
US (1) US3244855A (xx)
BE (1) BE650653A (xx)
DE (1) DE1295311B (xx)
FR (1) FR1409439A (xx)
GB (1) GB1061469A (xx)
NL (1) NL6408137A (xx)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3617684A (en) * 1970-02-24 1971-11-02 Datapax Computer Systems Corp Electronic trimming of microelectronic resistors
BE784250A (fr) * 1972-05-31 1972-09-18 Cockerill Dispositif de chauffage d'un produit metallique de grande longueur et de faible epaisseur.
FR2244014B1 (xx) * 1973-09-17 1976-10-08 Bosch Gmbh Robert
NL183553C (nl) * 1978-05-12 1988-11-16 Philips Nv Inrichting voor het richten van elektrisch geladen deeltjes naar een trefplaats.
US4551844A (en) * 1983-04-05 1985-11-05 Jersey Nuclear-Avco Isotopes, Inc. Demodulation of vapor density
DE3639683A1 (de) * 1986-11-20 1988-05-26 Leybold Ag Verdampferanordnung mit einem rechteckigen verdampfertiegel und mehreren elektronenkanonen
FR2634061B1 (fr) * 1988-07-06 1991-04-05 Commissariat Energie Atomique Evaporateur a bombardement electronique muni de moyens de recuperation des electrons retrodiffuses
EP2088612A1 (en) * 2007-12-21 2009-08-12 Applied Materials, Inc. Method of heating or cleaning a web or foil

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2640948A (en) * 1950-09-21 1953-06-02 High Voltage Engineering Corp Apparatus for utilizing a beam of high energy electrons in sterilization and in therapy
CH311812A (de) * 1951-11-05 1955-12-15 Zeiss Carl Fa Aufdampfeinrichtung.
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
FR1251425A (fr) * 1959-12-10 1961-01-20 Perfectionnements apportés aux moyens d'autorégulation de pompes d'injection pour moteurs, notamment à ceux susceptibles de faire varier l'avance de l'injection
US3112391A (en) * 1961-10-27 1963-11-26 Welding Research Inc Zeroing system for electron gun
US3146335A (en) * 1962-03-29 1964-08-25 United Aircraft Corp Focusing device for electron beams
US3152238A (en) * 1962-05-11 1964-10-06 United Aircraft Corp Electron beam centering apparatus

Also Published As

Publication number Publication date
US3244855A (en) 1966-04-05
DE1295311B (de) 1969-05-14
NL6408137A (xx) 1965-01-20
FR1409439A (fr) 1965-08-27
GB1061469A (en) 1967-03-15

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