AUPR353601A0 - Deposition process - Google Patents

Deposition process

Info

Publication number
AUPR353601A0
AUPR353601A0 AUPR3536A AUPR353601A AUPR353601A0 AU PR353601 A0 AUPR353601 A0 AU PR353601A0 AU PR3536 A AUPR3536 A AU PR3536A AU PR353601 A AUPR353601 A AU PR353601A AU PR353601 A0 AUPR353601 A0 AU PR353601A0
Authority
AU
Australia
Prior art keywords
deposition process
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AUPR3536A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific and Industrial Research Organization CSIRO
Original Assignee
Commonwealth Scientific and Industrial Research Organization CSIRO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific and Industrial Research Organization CSIRO filed Critical Commonwealth Scientific and Industrial Research Organization CSIRO
Priority to AUPR3536A priority Critical patent/AUPR353601A0/en
Publication of AUPR353601A0 publication Critical patent/AUPR353601A0/en
Priority to PCT/AU2002/000246 priority patent/WO2002070776A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
AUPR3536A 2001-03-05 2001-03-05 Deposition process Abandoned AUPR353601A0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AUPR3536A AUPR353601A0 (en) 2001-03-05 2001-03-05 Deposition process
PCT/AU2002/000246 WO2002070776A1 (en) 2001-03-05 2002-03-05 Deposition process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPR3536A AUPR353601A0 (en) 2001-03-05 2001-03-05 Deposition process

Publications (1)

Publication Number Publication Date
AUPR353601A0 true AUPR353601A0 (en) 2001-03-29

Family

ID=3827545

Family Applications (1)

Application Number Title Priority Date Filing Date
AUPR3536A Abandoned AUPR353601A0 (en) 2001-03-05 2001-03-05 Deposition process

Country Status (2)

Country Link
AU (1) AUPR353601A0 (en)
WO (1) WO2002070776A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9997338B2 (en) * 2005-03-24 2018-06-12 Oerlikon Surface Solutions Ag, Pfäffikon Method for operating a pulsed arc source
ES2374832T3 (en) * 2005-03-24 2012-02-22 Oerlikon Trading Ag, Trübbach LAYER OF HARD MATERIAL.
CN101368260A (en) 2007-09-14 2009-02-18 山特维克知识产权股份有限公司 A method and apparatus for depositing a coating onto a substrate
ES2774167T3 (en) * 2008-09-02 2020-07-17 Oerlikon Surface Solutions Ag Pfaeffikon Coating device for coating a substrate, as well as a method for coating a substrate
DE102010028558A1 (en) * 2010-05-04 2011-11-10 Walter Ag PVD hybrid process for the deposition of mixed crystal layers
EP2653583B1 (en) 2012-04-20 2021-03-10 Oerlikon Surface Solutions AG, Pfäffikon Coating method for depositing a coating system on a substrate
DE102015004856A1 (en) 2015-04-15 2016-10-20 Oerlikon Metaplas Gmbh Bipolar arc coating process
WO2020187744A1 (en) 2019-03-15 2020-09-24 Nanofilm Technologies International Pte Ltd Improved coating processes

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2202237A (en) * 1987-03-12 1988-09-21 Vac Tec Syst Cathodic arc plasma deposition of hard coatings
JP2627861B2 (en) * 1993-10-22 1997-07-09 アネルバ株式会社 Method and apparatus for forming Ti-TiN laminated film
DE4405477A1 (en) * 1994-02-21 1995-08-24 Hauzer Holding PVD process for the deposition of multi-component hard material layers
DE19547305A1 (en) * 1995-12-18 1997-06-19 Univ Sheffield Coating metal substrates with titanium aluminium nitride for coating steel
US6117279A (en) * 1998-11-12 2000-09-12 Tokyo Electron Limited Method and apparatus for increasing the metal ion fraction in ionized physical vapor deposition

Also Published As

Publication number Publication date
WO2002070776A1 (en) 2002-09-12

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