AU2002237106A1 - Deposition process - Google Patents

Deposition process

Info

Publication number
AU2002237106A1
AU2002237106A1 AU2002237106A AU2002237106A AU2002237106A1 AU 2002237106 A1 AU2002237106 A1 AU 2002237106A1 AU 2002237106 A AU2002237106 A AU 2002237106A AU 2002237106 A AU2002237106 A AU 2002237106A AU 2002237106 A1 AU2002237106 A1 AU 2002237106A1
Authority
AU
Australia
Prior art keywords
deposition process
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002237106A
Inventor
Avi Bendavid
Terence John Kinder
Phil J. Martin
Edward Preston
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific and Industrial Research Organization CSIRO
Original Assignee
Commonwealth Scientific and Industrial Research Organization CSIRO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific and Industrial Research Organization CSIRO filed Critical Commonwealth Scientific and Industrial Research Organization CSIRO
Publication of AU2002237106A1 publication Critical patent/AU2002237106A1/en
Abandoned legal-status Critical Current

Links

AU2002237106A 2001-03-05 2002-03-05 Deposition process Abandoned AU2002237106A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPR3536 2001-03-05

Publications (1)

Publication Number Publication Date
AU2002237106A1 true AU2002237106A1 (en) 2002-09-19

Family

ID=

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