AU2003284655A1 - Method for producing closed cell cellular material for use in polishing, cellular sheet for polishing, laminate for polishing and polishing method, method for producing laminate for polishing, and grooved polishing pad - Google Patents

Method for producing closed cell cellular material for use in polishing, cellular sheet for polishing, laminate for polishing and polishing method, method for producing laminate for polishing, and grooved polishing pad

Info

Publication number
AU2003284655A1
AU2003284655A1 AU2003284655A AU2003284655A AU2003284655A1 AU 2003284655 A1 AU2003284655 A1 AU 2003284655A1 AU 2003284655 A AU2003284655 A AU 2003284655A AU 2003284655 A AU2003284655 A AU 2003284655A AU 2003284655 A1 AU2003284655 A1 AU 2003284655A1
Authority
AU
Australia
Prior art keywords
polishing
laminate
producing
grooved
closed cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003284655A
Inventor
Tsuyoshi Furukawa
Yoshinori Masaki
Kazuhiko Yagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002363711A external-priority patent/JP2004200222A/en
Priority claimed from JP2003158839A external-priority patent/JP2004358596A/en
Priority claimed from JP2003169895A external-priority patent/JP2005001083A/en
Priority claimed from JP2003299565A external-priority patent/JP2005066749A/en
Priority claimed from JP2003360785A external-priority patent/JP2004188584A/en
Priority claimed from JP2003373167A external-priority patent/JP2004203024A/en
Priority claimed from JP2003373168A external-priority patent/JP2004188586A/en
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Publication of AU2003284655A1 publication Critical patent/AU2003284655A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C44/00—Shaping by internal pressure generated in the material, e.g. swelling or foaming ; Producing porous or cellular expanded plastics articles
    • B29C44/34—Auxiliary operations
    • B29C44/3469—Cell or pore nucleation
    • B29C44/348—Cell or pore nucleation by regulating the temperature and/or the pressure, e.g. suppression of foaming until the pressure is rapidly decreased
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
    • B29C48/03—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor characterised by the shape of the extruded material at extrusion
    • B29C48/07—Flat, e.g. panels
    • B29C48/08—Flat, e.g. panels flexible, e.g. films
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C48/00—Extrusion moulding, i.e. expressing the moulding material through a die or nozzle which imparts the desired form; Apparatus therefor
    • B29C48/25—Component parts, details or accessories; Auxiliary operations
    • B29C48/36—Means for plasticising or homogenising the moulding material or forcing it through the nozzle or die
    • B29C48/375—Plasticisers, homogenisers or feeders comprising two or more stages
    • B29C48/38—Plasticisers, homogenisers or feeders comprising two or more stages using two or more serially arranged screws in the same barrel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
AU2003284655A 2002-11-25 2003-11-25 Method for producing closed cell cellular material for use in polishing, cellular sheet for polishing, laminate for polishing and polishing method, method for producing laminate for polishing, and grooved polishing pad Abandoned AU2003284655A1 (en)

Applications Claiming Priority (23)

Application Number Priority Date Filing Date Title
JP2002340700 2002-11-25
JP2002341240 2002-11-25
JP2002-340700 2002-11-25
JP2002-341240 2002-11-25
JP2002361551 2002-12-13
JP2002-361551 2002-12-13
JP2002-363711 2002-12-16
JP2002363711A JP2004200222A (en) 2002-12-16 2002-12-16 Isolated foam material for polishing
JP2003091297 2003-03-28
JP2003-091297 2003-03-28
JP2003158839A JP2004358596A (en) 2003-06-04 2003-06-04 Manufacturing method of laminated product for polishing
JP2003-158839 2003-06-04
JP2003169895A JP2005001083A (en) 2003-06-13 2003-06-13 Polishing laminate and polishing method
JP2003-169895 2003-06-13
JP2003299565A JP2005066749A (en) 2003-08-25 2003-08-25 Laminated element for polishing, and polishing method
JP2003-299565 2003-08-25
JP2003-360785 2003-10-21
JP2003360785A JP2004188584A (en) 2002-11-25 2003-10-21 Polishing pad with groove
JP2003373167A JP2004203024A (en) 2002-12-13 2003-10-31 Manufacturing method of closed cell foam body for polishing
JP2003-373168 2003-10-31
JP2003-373167 2003-10-31
JP2003373168A JP2004188586A (en) 2002-11-25 2003-10-31 Foam sheet for polishing
PCT/JP2003/014964 WO2004054779A1 (en) 2002-11-25 2003-11-25 Method for producing closed cell cellular material for use in polishing, cellular sheet for polishing, laminate for polishing and polishing method, method for producing laminate for polishing, and grooved polishing pad

Publications (1)

Publication Number Publication Date
AU2003284655A1 true AU2003284655A1 (en) 2004-07-09

Family

ID=32601280

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003284655A Abandoned AU2003284655A1 (en) 2002-11-25 2003-11-25 Method for producing closed cell cellular material for use in polishing, cellular sheet for polishing, laminate for polishing and polishing method, method for producing laminate for polishing, and grooved polishing pad

Country Status (2)

Country Link
AU (1) AU2003284655A1 (en)
WO (1) WO2004054779A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4884726B2 (en) 2005-08-30 2012-02-29 東洋ゴム工業株式会社 Manufacturing method of laminated polishing pad
MY157714A (en) 2007-01-15 2016-07-15 Rohm & Haas Elect Mat Polishing pad and a method for manufacturing the same
JP4593643B2 (en) 2008-03-12 2010-12-08 東洋ゴム工業株式会社 Polishing pad
KR101819539B1 (en) * 2011-11-29 2018-01-17 캐보트 마이크로일렉트로닉스 코포레이션 Polishing pad with foundation layer and polishing surface layer
TWI556910B (en) * 2013-10-01 2016-11-11 三芳化學工業股份有限公司 Composite polishing pad and method for making the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY114512A (en) * 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
JP2000326235A (en) * 1999-05-17 2000-11-28 Inst Of Physical & Chemical Res Grinding wheel for elid and surface grinding machine therewith
JP3649385B2 (en) * 2000-01-12 2005-05-18 東洋ゴム工業株式会社 Thermoplastic elastomer microporous foam, method for producing the same, and abrasive sheet
JP4591980B2 (en) * 2000-02-22 2010-12-01 東洋ゴム工業株式会社 Polishing pad and manufacturing method thereof
JP2002201301A (en) * 2000-10-18 2002-07-19 Mitsui Chemicals Inc Foam of urethane-based thermoplastic elastomer composition, and method for producing the same
CN1217981C (en) * 2000-12-08 2005-09-07 可乐丽股份有限公司 Thermoplastic polyurethane foam, process for production thereof and polishing pads made of the foam
JP4444522B2 (en) * 2001-03-13 2010-03-31 東レコーテックス株式会社 Polishing pad
JP2002307293A (en) * 2001-04-09 2002-10-23 Rodel Nitta Co Polishing cloth
JP3851135B2 (en) * 2001-10-17 2006-11-29 ニッタ・ハース株式会社 Polishing pad

Also Published As

Publication number Publication date
WO2004054779A1 (en) 2004-07-01

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase