AU2003252992A1 - Acoustic resonators - Google Patents

Acoustic resonators

Info

Publication number
AU2003252992A1
AU2003252992A1 AU2003252992A AU2003252992A AU2003252992A1 AU 2003252992 A1 AU2003252992 A1 AU 2003252992A1 AU 2003252992 A AU2003252992 A AU 2003252992A AU 2003252992 A AU2003252992 A AU 2003252992A AU 2003252992 A1 AU2003252992 A1 AU 2003252992A1
Authority
AU
Australia
Prior art keywords
acoustic resonators
resonators
acoustic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003252992A
Inventor
Carl Brancher
Rajkumar Jakkaraju
Christine Janet Shearer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trikon Technologies Ltd
Original Assignee
Trikon Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0218762A external-priority patent/GB0218762D0/en
Priority claimed from GB0227981A external-priority patent/GB0227981D0/en
Application filed by Trikon Technologies Ltd filed Critical Trikon Technologies Ltd
Publication of AU2003252992A1 publication Critical patent/AU2003252992A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
AU2003252992A 2002-08-13 2003-08-11 Acoustic resonators Abandoned AU2003252992A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US40272802P 2002-08-13 2002-08-13
GB0218762.3 2002-08-13
GB0218762A GB0218762D0 (en) 2002-08-13 2002-08-13 Acoustic resonators
US60/402,728 2002-08-13
GB0227981.8 2002-11-30
GB0227981A GB0227981D0 (en) 2002-11-30 2002-11-30 Acoustic resonators
PCT/GB2003/003504 WO2004015862A2 (en) 2002-08-13 2003-08-11 Acoustic resonators

Publications (1)

Publication Number Publication Date
AU2003252992A1 true AU2003252992A1 (en) 2004-02-25

Family

ID=31721069

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003252992A Abandoned AU2003252992A1 (en) 2002-08-13 2003-08-11 Acoustic resonators

Country Status (5)

Country Link
JP (2) JP5116945B2 (en)
AU (1) AU2003252992A1 (en)
DE (1) DE10393038B4 (en)
GB (1) GB2406582A (en)
WO (1) WO2004015862A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6944922B2 (en) * 2002-08-13 2005-09-20 Trikon Technologies Limited Method of forming an acoustic resonator
JP5983164B2 (en) * 2012-08-07 2016-08-31 旭硝子株式会社 Glass substrate with Ti film, glass substrate with metal film using the same, glass substrate with Ti film, method for producing glass substrate with metal film using the same, and method for evaluating flatness of glass substrate surface
CN104767500B (en) * 2014-01-03 2018-11-09 佛山市艾佛光通科技有限公司 Cavity type thin film bulk acoustic wave resonator and preparation method thereof

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4482833A (en) * 1981-04-01 1984-11-13 Westinghouse Electric Corp. Method for obtaining oriented gold and piezoelectric films
US4502932A (en) * 1983-10-13 1985-03-05 The United States Of America As Represented By The United States Department Of Energy Acoustic resonator and method of making same
JPS61170561A (en) * 1985-01-25 1986-08-01 Nippon Telegr & Teleph Corp <Ntt> Formation of high melting point metal film
JP2659394B2 (en) * 1988-05-09 1997-09-30 三井東圧化学株式会社 Semiconductor thin film manufacturing method
KR960000190B1 (en) * 1992-11-09 1996-01-03 엘지전자주식회사 Semiconductor manufacturing method and apparatus thereof
US5587620A (en) * 1993-12-21 1996-12-24 Hewlett-Packard Company Tunable thin film acoustic resonators and method for making the same
JPH10308393A (en) * 1997-05-02 1998-11-17 Tokyo Electron Ltd Manufacture and manufacturing device of semiconductor device
JP3813740B2 (en) * 1997-07-11 2006-08-23 Ｔｄｋ株式会社 Substrates for electronic devices
US6060818A (en) * 1998-06-02 2000-05-09 Hewlett-Packard Company SBAR structures and method of fabrication of SBAR.FBAR film processing techniques for the manufacturing of SBAR/BAR filters
JP2000160337A (en) * 1998-11-30 2000-06-13 Hitachi Ltd Magnetron sputtering device
JP2000273629A (en) * 1999-03-18 2000-10-03 Ulvac Japan Ltd Formation of low resistance metallic thin film
GB2349392B (en) * 1999-04-20 2003-10-22 Trikon Holdings Ltd A method of depositing a layer
JP4327942B2 (en) * 1999-05-20 2009-09-09 Ｔｄｋ株式会社 Thin film piezoelectric element
US6349454B1 (en) * 1999-07-29 2002-02-26 Agere Systems Guardian Corp. Method of making thin film resonator apparatus
JP4021601B2 (en) * 1999-10-29 2007-12-12 株式会社東芝 Sputtering apparatus and film forming method
JP2001313429A (en) * 2000-04-27 2001-11-09 Tdk Corp Laminated thin film and manufacturing method for the same, and electronic device
US7378001B2 (en) * 2000-07-27 2008-05-27 Aviza Europe Limited Magnetron sputtering
JP4016583B2 (en) * 2000-08-31 2007-12-05 株式会社村田製作所 Piezoelectric thin film resonator, filter and electronic device
US6377137B1 (en) * 2000-09-11 2002-04-23 Agilent Technologies, Inc. Acoustic resonator filter with reduced electromagnetic influence due to die substrate thickness
JP2002374145A (en) * 2001-06-15 2002-12-26 Ube Electronics Ltd Piezoelectric thin-film resonator
US6828713B2 (en) * 2002-07-30 2004-12-07 Agilent Technologies, Inc Resonator with seed layer
US20040021529A1 (en) * 2002-07-30 2004-02-05 Bradley Paul D. Resonator with protective layer

Also Published As

Publication number Publication date
JP2005536098A (en) 2005-11-24
JP5074540B2 (en) 2012-11-14
GB0501682D0 (en) 2005-03-02
WO2004015862A3 (en) 2004-10-14
JP5116945B2 (en) 2013-01-09
JP2010161781A (en) 2010-07-22
DE10393038B4 (en) 2013-11-07
DE10393038T5 (en) 2005-07-28
WO2004015862A2 (en) 2004-02-19
GB2406582A (en) 2005-04-06

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase