AU2002353584A1 - Apparatus for depositing - Google Patents

Apparatus for depositing

Info

Publication number
AU2002353584A1
AU2002353584A1 AU2002353584A AU2002353584A AU2002353584A1 AU 2002353584 A1 AU2002353584 A1 AU 2002353584A1 AU 2002353584 A AU2002353584 A AU 2002353584A AU 2002353584 A AU2002353584 A AU 2002353584A AU 2002353584 A1 AU2002353584 A1 AU 2002353584A1
Authority
AU
Australia
Prior art keywords
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002353584A
Inventor
Won-Gu Kang
Won-Yong Koh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Genitech Co Ltd
Original Assignee
Genitech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Genitech Co Ltd filed Critical Genitech Co Ltd
Publication of AU2002353584A1 publication Critical patent/AU2002353584A1/en
Abandoned legal-status Critical Current

Links

AU2002353584A 2001-11-08 2002-11-08 Apparatus for depositing Abandoned AU2002353584A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2001-69598 2001-11-08

Publications (1)

Publication Number Publication Date
AU2002353584A1 true AU2002353584A1 (en) 2003-05-19

Family

ID=

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