AU2002351289A1 - Complex microdevices and appparatus and methods for fabricating such devices - Google Patents

Complex microdevices and appparatus and methods for fabricating such devices

Info

Publication number
AU2002351289A1
AU2002351289A1 AU2002351289A AU2002351289A AU2002351289A1 AU 2002351289 A1 AU2002351289 A1 AU 2002351289A1 AU 2002351289 A AU2002351289 A AU 2002351289A AU 2002351289 A AU2002351289 A AU 2002351289A AU 2002351289 A1 AU2002351289 A1 AU 2002351289A1
Authority
AU
Australia
Prior art keywords
appparatus
fabricating
methods
devices
microdevices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002351289A
Inventor
Christopher A. Bang
Adam L. Cohen
John D. Evans
Michael S. Lockard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Memgen Corp
Original Assignee
Memgen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/309,521 external-priority patent/US7259640B2/en
Application filed by Memgen Corp filed Critical Memgen Corp
Publication of AU2002351289A1 publication Critical patent/AU2002351289A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H01P11/001—Manufacturing waveguides or transmission lines of the waveguide type
    • H01P11/005—Manufacturing coaxial lines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P3/00—Waveguides; Transmission lines of the waveguide type
    • H01P3/02—Waveguides; Transmission lines of the waveguide type with two longitudinal conductors
    • H01P3/06—Coaxial lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P5/00—Coupling devices of the waveguide type
    • H01P5/12—Coupling devices having more than two ports
    • H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
    • H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers
    • H01P5/183—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers at least one of the guides being a coaxial line
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
AU2002351289A 2001-12-06 2002-12-06 Complex microdevices and appparatus and methods for fabricating such devices Abandoned AU2002351289A1 (en)

Applications Claiming Priority (35)

Application Number Priority Date Filing Date Title
US34037201P 2001-12-06 2001-12-06
US60/340,372 2001-12-06
US36426102P 2002-03-13 2002-03-13
US60/364,261 2002-03-13
US37918202P 2002-05-07 2002-05-07
US37913002P 2002-05-07 2002-05-07
US37913302P 2002-05-07 2002-05-07
US37917702P 2002-05-07 2002-05-07
US37913502P 2002-05-07 2002-05-07
US37918402P 2002-05-07 2002-05-07
US60/379,130 2002-05-07
US60/379,184 2002-05-07
US60/379,135 2002-05-07
US60/379,177 2002-05-07
US60/379,182 2002-05-07
US60/379,133 2002-05-07
US39253102P 2002-06-27 2002-06-27
US60/392,531 2002-06-27
US41537402P 2002-10-01 2002-10-01
US41537102P 2002-10-01 2002-10-01
US60/415,374 2002-10-01
US60/415,371 2002-10-01
US42200702P 2002-10-29 2002-10-29
US60/422,007 2002-10-29
US42298202P 2002-11-01 2002-11-01
US60/422,982 2002-11-01
US42948402P 2002-11-26 2002-11-26
US42948302P 2002-11-26 2002-11-26
US60/429,484 2002-11-26
US60/429,483 2002-11-26
US60/430,809 2002-12-02
US43080902P 2002-12-03 2002-12-03
US10/309,521 US7259640B2 (en) 2001-12-03 2002-12-03 Miniature RF and microwave components and methods for fabricating such components
US10/309,521 2002-12-03
PCT/US2002/039146 WO2003050852A2 (en) 2001-12-06 2002-12-06 Complex microdevices and appparatus and methods for fabricating such devices

Publications (1)

Publication Number Publication Date
AU2002351289A1 true AU2002351289A1 (en) 2003-06-23

Family

ID=27586045

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002351289A Abandoned AU2002351289A1 (en) 2001-12-06 2002-12-06 Complex microdevices and appparatus and methods for fabricating such devices

Country Status (3)

Country Link
EP (1) EP1495482A2 (en)
AU (1) AU2002351289A1 (en)
WO (1) WO2003050852A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008011466A1 (en) * 2006-07-19 2008-01-24 University Of Florida Research Foundation, Inc. Method and apparatus for electromagnetic actuation
CN104466317B (en) * 2014-11-18 2017-03-08 中国电子科技集团公司第十研究所 GaAs bimodule band-pass filter and preparation method thereof
US11789253B2 (en) * 2020-09-01 2023-10-17 Beijing Voyager Technology Co., Ltd. Capacitance sensing in a MEMS mirror structure
CN114839398A (en) * 2022-04-27 2022-08-02 东南大学 Capacitive flexible acceleration sensor and preparation method thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3920645A1 (en) * 1989-06-23 1991-01-10 Fraunhofer Ges Forschung DEVICE FOR MEASURING MECHANICAL FORCES AND EFFECTS
JPH0594937A (en) * 1991-10-01 1993-04-16 Sumitomo Electric Ind Ltd Formation method of fine structure body
US5591910A (en) * 1994-06-03 1997-01-07 Texas Instruments Incorporated Accelerometer
EP1015669B1 (en) * 1997-04-04 2010-11-17 University Of Southern California Electroplating method for forming a multilayer structure
US6718605B2 (en) * 1997-09-08 2004-04-13 The Regents Of The University Of Michigan Single-side microelectromechanical capacitive accelerometer and method of making same

Also Published As

Publication number Publication date
WO2003050852A2 (en) 2003-06-19
WO2003050852A3 (en) 2004-11-11
EP1495482A2 (en) 2005-01-12

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase