AU2001292756A1 - Surface particle detector - Google Patents

Surface particle detector

Info

Publication number
AU2001292756A1
AU2001292756A1 AU2001292756A AU9275601A AU2001292756A1 AU 2001292756 A1 AU2001292756 A1 AU 2001292756A1 AU 2001292756 A AU2001292756 A AU 2001292756A AU 9275601 A AU9275601 A AU 9275601A AU 2001292756 A1 AU2001292756 A1 AU 2001292756A1
Authority
AU
Australia
Prior art keywords
particle counter
scanner
conduit
particle
airstream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001292756A
Inventor
Daniel Duggan
Donald G. Lutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PENTAGON TECHNOLOGIES GROUP Inc
Original Assignee
PENTAGON TECHNOLOGIES GROUP IN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PENTAGON TECHNOLOGIES GROUP IN filed Critical PENTAGON TECHNOLOGIES GROUP IN
Publication of AU2001292756A1 publication Critical patent/AU2001292756A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/00584—Control arrangements for automatic analysers
    • G01N35/00722—Communications; Identification
    • G01N35/00732—Identification of carriers, materials or components in automatic analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N2001/222—Other features
    • G01N2001/2223—Other features aerosol sampling devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Electro-optical investigation, e.g. flow cytometers
    • G01N2015/1486—Counting the particles

Abstract

A surface particle detector that includes a scanner slidable over a surface, a particle counter for counting particles passed therethrough, and a conduit connected between the scanner and the particle counter. The particle counter includes a pump for creating an airstream for drawing particles from the surface, through the scanner and conduit, to the particle counter, and back to the scanner. A sensor measures the airstream flow rate, and a controller controls the pump speed based upon the sensed airstream flow rate. The conduit attaches to the particle counter via a first connector, which contains electronic indicia identifying the type of scanner attached to the other end of the conduit. The controller controls the particle counter in response to the detected electronic indicia. The particle counter also includes a removable filter cartridge with a filter element that captures the counted particles for laboratory analysis.
AU2001292756A 2000-09-13 2001-09-12 Surface particle detector Abandoned AU2001292756A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US23226700P 2000-09-13 2000-09-13
US60232267 2000-09-13
US09952900 2001-09-11
US09/952,900 US7010991B2 (en) 2000-09-13 2001-09-11 Surface particle detector
PCT/US2001/029162 WO2002023155A2 (en) 2000-09-13 2001-09-12 Surface particle detector

Publications (1)

Publication Number Publication Date
AU2001292756A1 true AU2001292756A1 (en) 2002-03-26

Family

ID=26925822

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001292756A Abandoned AU2001292756A1 (en) 2000-09-13 2001-09-12 Surface particle detector

Country Status (8)

Country Link
US (1) US7010991B2 (en)
EP (1) EP1325303B1 (en)
JP (1) JP3920216B2 (en)
KR (1) KR100633724B1 (en)
CN (1) CN100439898C (en)
AT (1) ATE541201T1 (en)
AU (1) AU2001292756A1 (en)
WO (1) WO2002023155A2 (en)

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CN103276368A (en) * 2013-04-28 2013-09-04 上海华力微电子有限公司 Particle pollution monitoring system and chemical vapor deposition device
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JP7046819B2 (en) * 2016-02-24 2022-04-04 ベクトン ディキンソン フランス Systems and methods for inspecting transparent cylinders
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US10712355B2 (en) * 2017-06-20 2020-07-14 Pentagon Technologies Group, Inc. High resolution surface particle detector
US10695804B2 (en) * 2018-01-25 2020-06-30 Applied Materials, Inc. Equipment cleaning apparatus and method
CN108279205A (en) * 2018-03-15 2018-07-13 天津天河分析仪器有限公司 A kind of surface particle analyzer and its test method
WO2020051131A1 (en) 2018-09-04 2020-03-12 Particle Measuring Systems, Inc. Detecting nanoparticles on production equipment and surfaces
US11029295B2 (en) * 2018-10-11 2021-06-08 Tintoria Piana Us, Inc. Voctron: a low weight portable air sampling device
US11215546B2 (en) * 2019-10-07 2022-01-04 Particle Measuring Systems, Inc. Antimicrobial particle detectors
EP4257948A1 (en) 2022-04-04 2023-10-11 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Method and system for inspecting a surface

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Also Published As

Publication number Publication date
EP1325303B1 (en) 2012-01-11
EP1325303A2 (en) 2003-07-09
KR100633724B1 (en) 2006-10-13
US20020083780A1 (en) 2002-07-04
JP2004512503A (en) 2004-04-22
WO2002023155A2 (en) 2002-03-21
KR20030034179A (en) 2003-05-01
CN1531646A (en) 2004-09-22
JP3920216B2 (en) 2007-05-30
ATE541201T1 (en) 2012-01-15
EP1325303A4 (en) 2007-07-25
US7010991B2 (en) 2006-03-14
CN100439898C (en) 2008-12-03
WO2002023155A3 (en) 2002-06-13

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