AU2001273976A1 - Multi beam charged particle device - Google Patents

Multi beam charged particle device

Info

Publication number
AU2001273976A1
AU2001273976A1 AU2001273976A AU7397601A AU2001273976A1 AU 2001273976 A1 AU2001273976 A1 AU 2001273976A1 AU 2001273976 A AU2001273976 A AU 2001273976A AU 7397601 A AU7397601 A AU 7397601A AU 2001273976 A1 AU2001273976 A1 AU 2001273976A1
Authority
AU
Australia
Prior art keywords
charged particle
multi beam
particle device
beam charged
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001273976A
Inventor
Pavel Adamec
Ralf Degenhardt
Hans-Peter Feuerbaum
Harry Munack
Dieter Winkler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Original Assignee
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH filed Critical ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Publication of AU2001273976A1 publication Critical patent/AU2001273976A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
AU2001273976A 2000-04-27 2001-04-27 Multi beam charged particle device Abandoned AU2001273976A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP00108973.9A EP1150327B1 (en) 2000-04-27 2000-04-27 Multi beam charged particle device
EP00108973 2000-04-27
PCT/EP2001/004787 WO2001084592A1 (en) 2000-04-27 2001-04-27 Multi beam charged particle device

Publications (1)

Publication Number Publication Date
AU2001273976A1 true AU2001273976A1 (en) 2001-11-12

Family

ID=8168566

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001273976A Abandoned AU2001273976A1 (en) 2000-04-27 2001-04-27 Multi beam charged particle device

Country Status (4)

Country Link
US (1) US6943349B2 (en)
EP (1) EP1150327B1 (en)
AU (1) AU2001273976A1 (en)
WO (1) WO2001084592A1 (en)

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US10347460B2 (en) 2017-03-01 2019-07-09 Dongfang Jingyuan Electron Limited Patterned substrate imaging using multiple electron beams
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Also Published As

Publication number Publication date
WO2001084592A1 (en) 2001-11-08
EP1150327B1 (en) 2018-02-14
EP1150327A1 (en) 2001-10-31
US6943349B2 (en) 2005-09-13
US20030168606A1 (en) 2003-09-11

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