AU1891299A - Illuminating device and exposure apparatus - Google Patents
Illuminating device and exposure apparatusInfo
- Publication number
- AU1891299A AU1891299A AU18912/99A AU1891299A AU1891299A AU 1891299 A AU1891299 A AU 1891299A AU 18912/99 A AU18912/99 A AU 18912/99A AU 1891299 A AU1891299 A AU 1891299A AU 1891299 A AU1891299 A AU 1891299A
- Authority
- AU
- Australia
- Prior art keywords
- exposure apparatus
- illuminating device
- illuminating
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10-7452 | 1998-01-19 | ||
JP745298 | 1998-01-19 | ||
JP10-38960 | 1998-02-20 | ||
JP3896098 | 1998-02-20 | ||
PCT/JP1999/000160 WO1999036832A1 (fr) | 1998-01-19 | 1999-01-19 | Dispositif d'eclairement et appareil de sensibilisation |
Publications (1)
Publication Number | Publication Date |
---|---|
AU1891299A true AU1891299A (en) | 1999-08-02 |
Family
ID=26341747
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU18912/99A Abandoned AU1891299A (en) | 1998-01-19 | 1999-01-19 | Illuminating device and exposure apparatus |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU1891299A (fr) |
WO (1) | WO1999036832A1 (fr) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6628370B1 (en) * | 1996-11-25 | 2003-09-30 | Mccullough Andrew W. | Illumination system with spatially controllable partial coherence compensating for line width variances in a photolithographic system |
US6741394B1 (en) | 1998-03-12 | 2004-05-25 | Nikon Corporation | Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus |
WO2003023832A1 (fr) * | 2001-09-07 | 2003-03-20 | Nikon Corporation | Procede et systeme d'exposition, et procede de construction de dispositif associe |
JP4268813B2 (ja) * | 2003-02-14 | 2009-05-27 | 大日本印刷株式会社 | 露光方法及び露光装置 |
JP5225433B2 (ja) * | 2004-06-04 | 2013-07-03 | キヤノン株式会社 | 照明光学系及び露光装置 |
US7173688B2 (en) * | 2004-12-28 | 2007-02-06 | Asml Holding N.V. | Method for calculating an intensity integral for use in lithography systems |
JP2008544531A (ja) * | 2005-06-21 | 2008-12-04 | カール ツァイス エスエムテー アーゲー | 瞳ファセットミラー上に減衰素子を備えた二重ファセット照明光学系 |
JP4310349B2 (ja) * | 2007-04-20 | 2009-08-05 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
US7843549B2 (en) * | 2007-05-23 | 2010-11-30 | Asml Holding N.V. | Light attenuating filter for correcting field dependent ellipticity and uniformity |
JP5182588B2 (ja) * | 2008-04-29 | 2013-04-17 | 株式会社ニコン | オプティカルインテグレータ、照明光学系、露光装置、およびデバイス製造方法 |
KR101653009B1 (ko) * | 2008-07-14 | 2016-08-31 | 가부시키가이샤 니콘 | 조명 광학계, 노광 장치, 및 노광 방법 |
JP4921512B2 (ja) | 2009-04-13 | 2012-04-25 | キヤノン株式会社 | 露光方法、露光装置およびデバイス製造方法 |
CN109196423B (zh) * | 2016-05-06 | 2021-08-27 | 株式会社尼康 | 光束扫描装置 |
JP6761306B2 (ja) * | 2016-08-30 | 2020-09-23 | キヤノン株式会社 | 照明光学系、リソグラフィ装置、及び物品製造方法 |
JP6740107B2 (ja) * | 2016-11-30 | 2020-08-12 | Hoya株式会社 | マスクブランク、転写用マスク及び半導体デバイスの製造方法 |
JP7446068B2 (ja) * | 2019-09-03 | 2024-03-08 | キヤノン株式会社 | 露光装置、および、物品の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0540240A (ja) * | 1991-08-08 | 1993-02-19 | Matsushita Electric Ind Co Ltd | 照明光学系 |
JP3277589B2 (ja) * | 1992-02-26 | 2002-04-22 | 株式会社ニコン | 投影露光装置及び方法 |
JPH09223661A (ja) * | 1996-02-15 | 1997-08-26 | Nikon Corp | 露光装置 |
-
1999
- 1999-01-19 WO PCT/JP1999/000160 patent/WO1999036832A1/fr active Application Filing
- 1999-01-19 AU AU18912/99A patent/AU1891299A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO1999036832A1 (fr) | 1999-07-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |