AU1315701A - Method for the production of single isotope silicon SI-28 - Google Patents

Method for the production of single isotope silicon SI-28

Info

Publication number
AU1315701A
AU1315701A AU13157/01A AU1315701A AU1315701A AU 1315701 A AU1315701 A AU 1315701A AU 13157/01 A AU13157/01 A AU 13157/01A AU 1315701 A AU1315701 A AU 1315701A AU 1315701 A AU1315701 A AU 1315701A
Authority
AU
Australia
Prior art keywords
production
single isotope
isotope silicon
silicon
isotope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU13157/01A
Inventor
Andrei Dmitrievich Bulanov
Grigory Grigorievich Devyatykh
Evgeny Mikhailovich Dianov
Anotoly Vladimirovich Gusev
Hans-Joachim Pohl
Alexandr Mikhailovich Prokhorov
Petr Gennadievich Sennikov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INSTITUT KHIMII VYSOKOCHISTYKH VESCHESTV ROSSIISKOI AKADEMII NAUK
Original Assignee
INST KHIM VYSOKOCHISTYKH VESCH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INST KHIM VYSOKOCHISTYKH VESCH filed Critical INST KHIM VYSOKOCHISTYKH VESCH
Publication of AU1315701A publication Critical patent/AU1315701A/en
Abandoned legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/02Silicon
    • C01B33/021Preparation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24Deposition of silicon only
AU13157/01A 1999-10-07 2000-10-04 Method for the production of single isotope silicon SI-28 Abandoned AU1315701A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
RU99120835/12A RU2155158C1 (en) 1999-10-07 1999-10-07 METHOD OF PREPARING MONOISOTOPIC SILICON Si28
RO99120835 1999-10-07
PCT/RU2000/000401 WO2001025148A1 (en) 1999-10-07 2000-10-04 Method for the production of single isotope silicon si-28

Publications (1)

Publication Number Publication Date
AU1315701A true AU1315701A (en) 2001-05-10

Family

ID=20225436

Family Applications (1)

Application Number Title Priority Date Filing Date
AU13157/01A Abandoned AU1315701A (en) 1999-10-07 2000-10-04 Method for the production of single isotope silicon SI-28

Country Status (8)

Country Link
JP (1) JP2003511330A (en)
KR (1) KR20010101102A (en)
CN (1) CN1327434A (en)
AU (1) AU1315701A (en)
DE (1) DE10083318B4 (en)
HK (1) HK1042464A1 (en)
RU (1) RU2155158C1 (en)
WO (1) WO2001025148A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO319447B1 (en) * 2002-07-05 2005-08-15 Scatec As Method for separation of isotopes
CN101937859B (en) * 2010-08-11 2015-02-11 上海华虹宏力半导体制造有限公司 Method for detecting Cu content in oxide-nitride-oxide (ONO) manufacturing process
CN102502648A (en) * 2011-11-06 2012-06-20 云南省化工研究院 Method for preparing solar grade polycrystalline silicon
JP6408221B2 (en) * 2014-01-24 2018-10-17 イビデン株式会社 Reactor components
CN105271238B (en) * 2015-11-18 2017-10-20 浙江工业大学 A kind of method that utilization mechanochemical reaction prepares silicon powder

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3050366A (en) * 1959-07-15 1962-08-21 Du Pont Production of silane by the use of a zinc catalyst
JPS53106626A (en) * 1977-03-02 1978-09-16 Komatsu Mfg Co Ltd Method of making high purity rod silicon and appratus therefor
FR2462782A1 (en) * 1979-08-03 1981-02-13 Thomson Csf PROCESS FOR PRODUCING A LAYER CONTAINING SILICON AND PHOTOELECTRIC CONVERSION DEVICE USING THE SAME
US4374111A (en) * 1980-11-21 1983-02-15 Allied Corporation Production of silane
DE3409172A1 (en) * 1984-03-13 1985-09-26 D. Swarovski & Co., Wattens, Tirol METHOD FOR PRODUCING SILANE
US4664938A (en) * 1985-05-06 1987-05-12 Phillips Petroleum Company Method for deposition of silicon
RU2036143C1 (en) * 1992-02-27 1995-05-27 Акционерное общество открытого типа "Всероссийский алюминиево-магниевый институт" Method for reducing silicon
RU2077483C1 (en) * 1995-04-28 1997-04-20 Всероссийский научно-исследовательский институт химической технологии Method of preparing monosilane
RU2116963C1 (en) * 1997-06-06 1998-08-10 Институт физики полупроводников СО РАН Silicon production process
RU2137710C1 (en) * 1998-09-03 1999-09-20 Петранин Николай Павлович Monoisotope silicon production process

Also Published As

Publication number Publication date
KR20010101102A (en) 2001-11-14
CN1327434A (en) 2001-12-19
RU2155158C1 (en) 2000-08-27
HK1042464A1 (en) 2002-08-16
WO2001025148A1 (en) 2001-04-12
DE10083318B4 (en) 2006-10-26
DE10083318T1 (en) 2002-04-25
JP2003511330A (en) 2003-03-25

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase