ATE91531T1 - Mit einem zweistufigen refrigerator betriebene kryopumpe. - Google Patents

Mit einem zweistufigen refrigerator betriebene kryopumpe.

Info

Publication number
ATE91531T1
ATE91531T1 AT89103453T AT89103453T ATE91531T1 AT E91531 T1 ATE91531 T1 AT E91531T1 AT 89103453 T AT89103453 T AT 89103453T AT 89103453 T AT89103453 T AT 89103453T AT E91531 T1 ATE91531 T1 AT E91531T1
Authority
AT
Austria
Prior art keywords
baffle
cryopump
plates
powered
stage refrigerator
Prior art date
Application number
AT89103453T
Other languages
English (en)
Inventor
Ulrich Dr Haefner
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Application granted granted Critical
Publication of ATE91531T1 publication Critical patent/ATE91531T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
AT89103453T 1989-02-28 1989-02-28 Mit einem zweistufigen refrigerator betriebene kryopumpe. ATE91531T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89103453A EP0384922B1 (de) 1989-02-28 1989-02-28 Mit einem zweistufigen Refrigerator betriebene Kryopumpe

Publications (1)

Publication Number Publication Date
ATE91531T1 true ATE91531T1 (de) 1993-07-15

Family

ID=8201020

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89103453T ATE91531T1 (de) 1989-02-28 1989-02-28 Mit einem zweistufigen refrigerator betriebene kryopumpe.

Country Status (5)

Country Link
US (1) US5000007A (de)
EP (1) EP0384922B1 (de)
JP (1) JP2731276B2 (de)
AT (1) ATE91531T1 (de)
DE (1) DE58904918D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
WO1994000212A1 (en) * 1992-06-24 1994-01-06 Extek Cryogenics Inc. Cryopump
CA2367818C (en) * 2001-01-18 2010-05-11 Electric Power Research Institute, Inc. Method and apparatus for renewable mercury sorption
US6905534B2 (en) * 2001-04-16 2005-06-14 Electric Power Research Institute, Inc. Method and apparatus for removing vapor phase contaminants from a flue gas stream
CA2381610C (en) * 2001-04-16 2010-07-06 Electric Power Research Institute, Inc. Method and apparatus for removing vapor phase contaminants from a flue gas stream
US20050274128A1 (en) * 2004-06-10 2005-12-15 Genesis Cryopump with enhanced hydrogen pumping
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
EP1966548A2 (de) * 2005-12-19 2008-09-10 Behr GmbH & Co. KG Sorptionswärmeübertragerwand und sorptionswärmeübertrager
JP2010196632A (ja) * 2009-02-26 2010-09-09 Sumitomo Heavy Ind Ltd クライオポンプ
CH703216A1 (de) * 2010-05-27 2011-11-30 Hsr Ag Vorrichtung zur Verhinderung des Memory-Effekts bei Kryopumpen.
JP5398780B2 (ja) * 2011-05-12 2014-01-29 住友重機械工業株式会社 クライオポンプ
US20130008189A1 (en) * 2011-05-12 2013-01-10 Sumitomo Heavy Industries, Ltd. Cryopump and Method of Manufacturing the Same
CN103742389B (zh) * 2013-10-18 2015-12-23 石狮市台瑞精密机械有限公司 一种真空低温泵中的组合冷板
US10145371B2 (en) 2013-10-22 2018-12-04 Taiwan Semiconductor Manufacturing Co., Ltd. Ultra high vacuum cryogenic pumping apparatus with nanostructure material
US9751041B2 (en) * 2015-05-15 2017-09-05 Exxonmobil Upstream Research Company Apparatus and system for swing adsorption processes related thereto
JP6871751B2 (ja) * 2017-02-07 2021-05-12 住友重機械工業株式会社 クライオポンプ
JP2018127943A (ja) * 2017-02-08 2018-08-16 住友重機械工業株式会社 クライオポンプ
CN207111346U (zh) * 2017-07-03 2018-03-16 京东方科技集团股份有限公司 低温泵

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH628959A5 (en) * 1978-04-18 1982-03-31 Balzers Hochvakuum Cryopump with a fitted refrigerating machine
US4212170A (en) * 1979-04-16 1980-07-15 Oerlikon Buhrle USA Incorporated Cryopump
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4546613A (en) * 1983-04-04 1985-10-15 Helix Technology Corporation Cryopump with rapid cooldown and increased pressure
US4530213A (en) * 1983-06-28 1985-07-23 Air Products And Chemicals, Inc. Economical and thermally efficient cryopump panel and panel array
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
IT1201263B (it) * 1985-03-26 1989-01-27 Galileo Spa Off Pompa criogenica a refrigeratore con geometria degli scherma atta a raggiungere elevata efficienza e durata prolungata
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
JPH07100963B2 (ja) * 1985-12-26 1995-11-01 清水建設株式会社 コンクリ−ト補強部材
JPS6430745A (en) * 1987-07-10 1989-02-01 Iton Ag Multiplayer board consisting of aerated concrete and manufacture thereof
JPH01150532A (ja) * 1987-12-08 1989-06-13 Kenji Tsunoda 多軸方向に補強された補強芯地を有する加工製品
JPH01229852A (ja) * 1988-03-02 1989-09-13 Toray Ind Inc 複合材料用補強基材
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber

Also Published As

Publication number Publication date
EP0384922B1 (de) 1993-07-14
JPH03981A (ja) 1991-01-07
US5000007A (en) 1991-03-19
JP2731276B2 (ja) 1998-03-25
EP0384922A1 (de) 1990-09-05
DE58904918D1 (de) 1993-08-19

Similar Documents

Publication Publication Date Title
ATE91531T1 (de) Mit einem zweistufigen refrigerator betriebene kryopumpe.
RU96116849A (ru) Устройство индикации
FI935249A0 (fi) Anordning foer separering av partiklar, saerskilt olje- eller fettpartiklar
DE59106003D1 (de) Hochdruckentladungslampe.
ATE265535T1 (de) Pharmazeutische zusammensetzung gegen durch papillomaviren verursachte tumoren und infektionen
DE59003512D1 (de) Hochdruckentladungslampe.
DE69015168D1 (de) Kältemittelkompressorkonstruktion.
DE59009592D1 (de) Hochdruckentladungslampe.
NL191524C (nl) Projectiescherm met omsluitende kast.
DE69103942D1 (de) Hochdruck-Metalldampfentladungslampe.
DE69117933D1 (de) Förder- und trennvorrichtung
KR880010459A (ko) 음극선관
ATE71219T1 (de) Behaelter fuer metallische oder metallisierte blaettchen zur verwendung als elektromagnetischer taeuschreflektor.
DE68918954D1 (de) Taumelscheibenkompressor.
DK1015735T3 (da) Snegletransportør til transport af flydende emner og/eller klumper af emner
DE59008768D1 (de) Hochdruckentladungslampe.
OA07824A (fr) Compositions pesticides huileuses à base de virus entomopathogènes.
ATE152820T1 (de) Leuchtenabdeckung, insbesondere für leuchtstofflampen
DE69015731D1 (de) Gasentladungstafel.
NL194018B (nl) Ontladingslamp met hoge intensiteit.
RU1772549C (ru) Воздушна турбохолодильна машина
SE9301624L (sv) Avdunstningsanläggning
IT218398Z2 (it) Compressori frigoriferi perfezionati.
TH40644EX (th) พัดลมระบายอากาศ
TH38571EX (th) เครื่องฟอกอากาศ

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee