ATE72301T1 - Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas. - Google Patents
Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas.Info
- Publication number
- ATE72301T1 ATE72301T1 AT88106497T AT88106497T ATE72301T1 AT E72301 T1 ATE72301 T1 AT E72301T1 AT 88106497 T AT88106497 T AT 88106497T AT 88106497 T AT88106497 T AT 88106497T AT E72301 T1 ATE72301 T1 AT E72301T1
- Authority
- AT
- Austria
- Prior art keywords
- pump
- adapting
- temperature
- specific gas
- faces
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000005057 refrigeration Methods 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP88106497A EP0338113B1 (de) | 1988-04-22 | 1988-04-22 | Verfahren zur Adaption einer zweistufigen Refrigerator-Kryopumpe auf ein betimmtes Gas |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE72301T1 true ATE72301T1 (de) | 1992-02-15 |
Family
ID=8198909
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT88106497T ATE72301T1 (de) | 1988-04-22 | 1988-04-22 | Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4953359A (de) |
EP (1) | EP0338113B1 (de) |
JP (1) | JP2668261B2 (de) |
AT (1) | ATE72301T1 (de) |
DE (1) | DE3868264D1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6022195A (en) | 1988-09-13 | 2000-02-08 | Helix Technology Corporation | Electronically controlled vacuum pump with control module |
US5157928A (en) * | 1988-09-13 | 1992-10-27 | Helix Technology Corporation | Electronically controlled cryopump |
US6318093B2 (en) | 1988-09-13 | 2001-11-20 | Helix Technology Corporation | Electronically controlled cryopump |
US4918930A (en) * | 1988-09-13 | 1990-04-24 | Helix Technology Corporation | Electronically controlled cryopump |
US5305612A (en) * | 1992-07-06 | 1994-04-26 | Ebara Technologies Incorporated | Cryopump method and apparatus |
US6902378B2 (en) * | 1993-07-16 | 2005-06-07 | Helix Technology Corporation | Electronically controlled vacuum pump |
JP4927642B2 (ja) * | 2007-05-28 | 2012-05-09 | キヤノンアネルバ株式会社 | 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ |
JP4686572B2 (ja) * | 2008-05-14 | 2011-05-25 | 住友重機械工業株式会社 | クライオポンプ、真空排気システム、及びその診断方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3338063A (en) * | 1966-01-17 | 1967-08-29 | 500 Inc | Cryopanels for cryopumps and cryopumps incorporating them |
FR1553094A (de) * | 1967-11-30 | 1969-01-10 | ||
US4356701A (en) * | 1981-05-22 | 1982-11-02 | Helix Technology Corporation | Cryopump |
US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
IL71403A (en) * | 1983-04-04 | 1991-01-31 | Helix Tech Corp | Cryopump with rapid cooldown and increased pressure stability |
FR2572794B1 (fr) * | 1984-11-06 | 1987-06-12 | Commissariat Energie Atomique | Procede pour augmenter la capacite d'absorption d'une pompe de cryopompage et pompe de cryopompage associee |
US4667477A (en) * | 1985-03-28 | 1987-05-26 | Hitachi, Ltd. | Cryopump and method of operating same |
DE3512614A1 (de) * | 1985-04-06 | 1986-10-16 | Leybold-Heraeus GmbH, 5000 Köln | Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe |
US4679401A (en) * | 1985-07-03 | 1987-07-14 | Helix Technology Corporation | Temperature control of cryogenic systems |
DE3680335D1 (de) * | 1986-06-23 | 1991-08-22 | Leybold Ag | Kryopumpe und verfahren zum betrieb dieser kryopumpe. |
-
1988
- 1988-04-22 AT AT88106497T patent/ATE72301T1/de not_active IP Right Cessation
- 1988-04-22 DE DE8888106497T patent/DE3868264D1/de not_active Expired - Fee Related
- 1988-04-22 EP EP88106497A patent/EP0338113B1/de not_active Expired - Lifetime
-
1989
- 1989-04-14 US US07/338,606 patent/US4953359A/en not_active Expired - Fee Related
- 1989-04-19 JP JP1097712A patent/JP2668261B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01305173A (ja) | 1989-12-08 |
EP0338113B1 (de) | 1992-01-29 |
JP2668261B2 (ja) | 1997-10-27 |
EP0338113A1 (de) | 1989-10-25 |
DE3868264D1 (de) | 1992-03-12 |
US4953359A (en) | 1990-09-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2182339A1 (en) | Thermostatically Controlled Intercooler System for a Multiple Stage Compressor and Method | |
JPS5620980A (en) | Low temperature air separation method of and apparatus for production of high pressure oxygen | |
CA2179676A1 (en) | Cryogenic Pump System | |
BG104002A (en) | Method for the liquefaction of natural gas by cascade cooling | |
ATE72301T1 (de) | Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas. | |
WO1995018345A1 (fr) | Procede et appareil de liquefaction d'un gaz naturel | |
MY101481A (en) | Method of and apparatus for cooling and liquefying at least one low boiling point gas such for instance as natural gas | |
DE60123143D1 (de) | Vorrichtung zur Verflüssigung von Dampf unter Druck | |
MXPA02007469A (es) | Sistema de recuperacion de vapor que usa un compresor impulsado con un tuboexpansor. | |
DE3172221D1 (en) | Producing power from a cryogenic liquid | |
CA2044566A1 (en) | Process for the disposal of carbon dioxide | |
GB2122868B (en) | Expansion of tobacco | |
ES319333A1 (es) | Un metodo de transportar metano o gas natural. | |
JPS5715200A (en) | Boil off gas processing method | |
TW333602B (en) | Method of and plant for reliquefying gaseous helium the invention relates to a method of reliquefying gaseous helium produced when transferring liquid helium from a donor container to a receiver container. | |
JPS5743095A (en) | Storage method and system of evaporated gas in liquefied gas storage facility | |
JPS55123306A (en) | Vaporization of liquefied natural gas and its energy recovering method | |
CA2202818A1 (en) | Thermostatically controlled intercooler system for a multiple stage compressor and method | |
KR840001684Y1 (ko) | 진공식 냉장기 | |
FR2077442A1 (en) | Air fractionation process - for nitrogen and oxygen production | |
SU953263A1 (ru) | Криогенна откачна система | |
JPS6133487Y2 (de) | ||
FR2714720B3 (fr) | Procédé et appareil de liquéfaction d'un gaz naturel. | |
KR940008790A (ko) | 액체산소를 이용한 자동 연소 절단 방법 | |
MY124427A (en) | Method and apparatus for liquefaction of a natural gas |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
REN | Ceased due to non-payment of the annual fee |