ATE72301T1 - Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas. - Google Patents

Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas.

Info

Publication number
ATE72301T1
ATE72301T1 AT88106497T AT88106497T ATE72301T1 AT E72301 T1 ATE72301 T1 AT E72301T1 AT 88106497 T AT88106497 T AT 88106497T AT 88106497 T AT88106497 T AT 88106497T AT E72301 T1 ATE72301 T1 AT E72301T1
Authority
AT
Austria
Prior art keywords
pump
adapting
temperature
specific gas
faces
Prior art date
Application number
AT88106497T
Other languages
English (en)
Inventor
Hans-Ulrich Dr Haefner
Hans-Joachim Dr Forth
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Application granted granted Critical
Publication of ATE72301T1 publication Critical patent/ATE72301T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
AT88106497T 1988-04-22 1988-04-22 Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas. ATE72301T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88106497A EP0338113B1 (de) 1988-04-22 1988-04-22 Verfahren zur Adaption einer zweistufigen Refrigerator-Kryopumpe auf ein betimmtes Gas

Publications (1)

Publication Number Publication Date
ATE72301T1 true ATE72301T1 (de) 1992-02-15

Family

ID=8198909

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88106497T ATE72301T1 (de) 1988-04-22 1988-04-22 Verfahren zur adaption einer zweistufigen refrigerator-kryopumpe auf ein betimmtes gas.

Country Status (5)

Country Link
US (1) US4953359A (de)
EP (1) EP0338113B1 (de)
JP (1) JP2668261B2 (de)
AT (1) ATE72301T1 (de)
DE (1) DE3868264D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6022195A (en) 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US5157928A (en) * 1988-09-13 1992-10-27 Helix Technology Corporation Electronically controlled cryopump
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
US5305612A (en) * 1992-07-06 1994-04-26 Ebara Technologies Incorporated Cryopump method and apparatus
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
JP4927642B2 (ja) * 2007-05-28 2012-05-09 キヤノンアネルバ株式会社 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ
JP4686572B2 (ja) * 2008-05-14 2011-05-25 住友重機械工業株式会社 クライオポンプ、真空排気システム、及びその診断方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3338063A (en) * 1966-01-17 1967-08-29 500 Inc Cryopanels for cryopumps and cryopumps incorporating them
FR1553094A (de) * 1967-11-30 1969-01-10
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
IL71403A (en) * 1983-04-04 1991-01-31 Helix Tech Corp Cryopump with rapid cooldown and increased pressure stability
FR2572794B1 (fr) * 1984-11-06 1987-06-12 Commissariat Energie Atomique Procede pour augmenter la capacite d'absorption d'une pompe de cryopompage et pompe de cryopompage associee
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
DE3680335D1 (de) * 1986-06-23 1991-08-22 Leybold Ag Kryopumpe und verfahren zum betrieb dieser kryopumpe.

Also Published As

Publication number Publication date
JPH01305173A (ja) 1989-12-08
EP0338113B1 (de) 1992-01-29
JP2668261B2 (ja) 1997-10-27
EP0338113A1 (de) 1989-10-25
DE3868264D1 (de) 1992-03-12
US4953359A (en) 1990-09-04

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Legal Events

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REN Ceased due to non-payment of the annual fee