ATE516598T1 - Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtung - Google Patents

Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtung

Info

Publication number
ATE516598T1
ATE516598T1 AT07112029T AT07112029T ATE516598T1 AT E516598 T1 ATE516598 T1 AT E516598T1 AT 07112029 T AT07112029 T AT 07112029T AT 07112029 T AT07112029 T AT 07112029T AT E516598 T1 ATE516598 T1 AT E516598T1
Authority
AT
Austria
Prior art keywords
controlling
photoelectric conversion
production process
conversion device
mark
Prior art date
Application number
AT07112029T
Other languages
English (en)
Inventor
Masafumi Hiraishi
Kazunori Sawai
Original Assignee
Kaneka Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP27490799A external-priority patent/JP2001102604A/ja
Priority claimed from JP28566499A external-priority patent/JP4414521B2/ja
Application filed by Kaneka Corp filed Critical Kaneka Corp
Application granted granted Critical
Publication of ATE516598T1 publication Critical patent/ATE516598T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
    • H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54406—Marks applied to semiconductor devices or parts comprising alphanumeric information
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54413—Marks applied to semiconductor devices or parts comprising digital information, e.g. bar codes, data matrix
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54433—Marks applied to semiconductor devices or parts containing identification or tracking information
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Sustainable Energy (AREA)
  • Electromagnetism (AREA)
  • Photovoltaic Devices (AREA)
  • Light Receiving Elements (AREA)
AT07112029T 1999-09-28 2000-03-06 Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtung ATE516598T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP27490799A JP2001102604A (ja) 1999-09-28 1999-09-28 光電変換装置の製造工程管理方法
JP28566499A JP4414521B2 (ja) 1999-10-06 1999-10-06 光電変換装置および光電変換装置の品質管理システム

Publications (1)

Publication Number Publication Date
ATE516598T1 true ATE516598T1 (de) 2011-07-15

Family

ID=26551246

Family Applications (2)

Application Number Title Priority Date Filing Date
AT00104449T ATE500615T1 (de) 1999-09-28 2000-03-06 Methode zur steuerung des herstellungsverfahrens einer photoelektrischen umwandlungsvorrichtung
AT07112029T ATE516598T1 (de) 1999-09-28 2000-03-06 Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT00104449T ATE500615T1 (de) 1999-09-28 2000-03-06 Methode zur steuerung des herstellungsverfahrens einer photoelektrischen umwandlungsvorrichtung

Country Status (6)

Country Link
US (1) US6578764B1 (de)
EP (2) EP1868249B1 (de)
AT (2) ATE500615T1 (de)
AU (1) AU776867C (de)
DE (1) DE60045678D1 (de)
ES (1) ES2360031T3 (de)

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JP4091310B2 (ja) * 2001-02-15 2008-05-28 株式会社カネカ シリコン薄膜太陽電池の製造方法
TWI342459B (en) * 2004-03-26 2011-05-21 Chimei Innolux Corp Glass substrate
CN100377074C (zh) * 2004-03-27 2008-03-26 鸿富锦精密工业（深圳）有限公司 玻璃基板
WO2007099138A1 (de) 2006-02-28 2007-09-07 Q-Cells Ag Solarzellenmarkierverfahren und solarzelle
DE102007032283A1 (de) 2007-07-11 2009-01-15 Stein, Wilhelm, Dr. Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung
KR101301664B1 (ko) * 2007-08-06 2013-08-29 주성엔지니어링(주) 박막형 태양전지 제조방법 및 그 방법에 의해 제조된박막형 태양전지
US20100047954A1 (en) * 2007-08-31 2010-02-25 Su Tzay-Fa Jeff Photovoltaic production line
KR20090047388A (ko) * 2007-08-31 2009-05-12 어플라이드 머티어리얼스, 인코포레이티드 다양한 크기의 광전지 소자 형성을 위한 생산 라인 모듈
EP3333280A1 (de) 2007-09-12 2018-06-13 Flisom AG Verfahren zur herstellung eines verbindungsschichtes mit zusammensetzungsgradierung
US20090188603A1 (en) * 2008-01-25 2009-07-30 Applied Materials, Inc. Method and apparatus for controlling laminator temperature on a solar cell
JP2009206279A (ja) * 2008-02-27 2009-09-10 Sharp Corp 薄膜太陽電池およびその製造方法
US7981778B2 (en) * 2009-07-22 2011-07-19 Applied Materials, Inc. Directional solid phase crystallization of thin amorphous silicon for solar cell applications
WO2010027712A2 (en) * 2008-08-26 2010-03-11 Applied Materials, Inc. Laser material removal methods and apparatus
DE102008043750A1 (de) * 2008-11-14 2010-05-20 Q-Cells Se Verfahren zur Makierung/Codierung einer Solarzelle und Solarzelle
KR101520044B1 (ko) * 2009-01-30 2015-05-14 삼성에스디아이 주식회사 태양전지 모듈 및 이의 제조 방법
WO2010091025A2 (en) * 2009-02-04 2010-08-12 Applied Materials, Inc. Metrology and inspection suite for a solar production line
US20100330711A1 (en) * 2009-06-26 2010-12-30 Applied Materials, Inc. Method and apparatus for inspecting scribes in solar modules
US20110005458A1 (en) * 2009-07-13 2011-01-13 Applied Materials, Inc. Method and apparatus for improving scribe accuracy in solar cell modules
US20110008947A1 (en) * 2009-07-13 2011-01-13 Applied Materials, Inc. Apparatus and method for performing multifunction laser processes
US20110065227A1 (en) * 2009-09-15 2011-03-17 Applied Materials, Inc. Common laser module for a photovoltaic production line
DE102010060908A1 (de) * 2010-11-30 2012-05-31 Q-Cells Se Verfahren zur Kennzeichnung von Wafersolarzellen oder zur Kennzeichnung von Vorprodukten von Wafersolarzellen
CN103000752A (zh) * 2011-09-19 2013-03-27 无锡尚德太阳能电力有限公司 薄膜太阳电池划线机及其方法
NL2014040B1 (en) * 2014-12-23 2016-10-12 Stichting Energieonderzoek Centrum Nederland Method of making a curent collecting grid for solar cells.
WO2018079257A1 (ja) * 2016-10-26 2018-05-03 株式会社カネカ 光電変換素子
DE102019006090A1 (de) * 2019-08-29 2021-03-04 Azur Space Solar Power Gmbh Markierungsverfahren

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JP3805889B2 (ja) * 1997-06-20 2006-08-09 株式会社カネカ 太陽電池モジュールおよびその製造方法

Also Published As

Publication number Publication date
EP1089346A3 (de) 2006-05-17
ES2360031T3 (es) 2011-05-31
EP1868249A2 (de) 2007-12-19
EP1868249A3 (de) 2008-11-12
AU776867C (en) 2005-06-16
DE60045678D1 (de) 2011-04-14
AU776867B2 (en) 2004-09-23
EP1089346A2 (de) 2001-04-04
ATE500615T1 (de) 2011-03-15
EP1089346B1 (de) 2011-03-02
AU2072500A (en) 2001-03-29
EP1868249B1 (de) 2011-07-13
US6578764B1 (en) 2003-06-17

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