ATE516598T1 - Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtung - Google Patents
Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtungInfo
- Publication number
- ATE516598T1 ATE516598T1 AT07112029T AT07112029T ATE516598T1 AT E516598 T1 ATE516598 T1 AT E516598T1 AT 07112029 T AT07112029 T AT 07112029T AT 07112029 T AT07112029 T AT 07112029T AT E516598 T1 ATE516598 T1 AT E516598T1
- Authority
- AT
- Austria
- Prior art keywords
- controlling
- photoelectric conversion
- production process
- conversion device
- mark
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000006243 chemical reaction Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
- H02S50/00—Monitoring or testing of PV systems, e.g. load balancing or fault identification
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54406—Marks applied to semiconductor devices or parts comprising alphanumeric information
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54413—Marks applied to semiconductor devices or parts comprising digital information, e.g. bar codes, data matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54433—Marks applied to semiconductor devices or parts containing identification or tracking information
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Sustainable Energy (AREA)
- Electromagnetism (AREA)
- Photovoltaic Devices (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27490799A JP2001102604A (ja) | 1999-09-28 | 1999-09-28 | 光電変換装置の製造工程管理方法 |
JP28566499A JP4414521B2 (ja) | 1999-10-06 | 1999-10-06 | 光電変換装置および光電変換装置の品質管理システム |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE516598T1 true ATE516598T1 (de) | 2011-07-15 |
Family
ID=26551246
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00104449T ATE500615T1 (de) | 1999-09-28 | 2000-03-06 | Methode zur steuerung des herstellungsverfahrens einer photoelektrischen umwandlungsvorrichtung |
AT07112029T ATE516598T1 (de) | 1999-09-28 | 2000-03-06 | Verfahren zur steuerung des herstellungsprozesses einer photoelektrischen wandlervorrichtung |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00104449T ATE500615T1 (de) | 1999-09-28 | 2000-03-06 | Methode zur steuerung des herstellungsverfahrens einer photoelektrischen umwandlungsvorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6578764B1 (de) |
EP (2) | EP1868249B1 (de) |
AT (2) | ATE500615T1 (de) |
AU (1) | AU776867C (de) |
DE (1) | DE60045678D1 (de) |
ES (1) | ES2360031T3 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4091310B2 (ja) * | 2001-02-15 | 2008-05-28 | 株式会社カネカ | シリコン薄膜太陽電池の製造方法 |
TWI342459B (en) * | 2004-03-26 | 2011-05-21 | Chimei Innolux Corp | Glass substrate |
CN100377074C (zh) * | 2004-03-27 | 2008-03-26 | 鸿富锦精密工业(深圳)有限公司 | 玻璃基板 |
WO2007099138A1 (de) | 2006-02-28 | 2007-09-07 | Q-Cells Ag | Solarzellenmarkierverfahren und solarzelle |
DE102007032283A1 (de) | 2007-07-11 | 2009-01-15 | Stein, Wilhelm, Dr. | Dünnschichtsolarzellen-Modul und Verfahren zu dessen Herstellung |
KR101301664B1 (ko) * | 2007-08-06 | 2013-08-29 | 주성엔지니어링(주) | 박막형 태양전지 제조방법 및 그 방법에 의해 제조된박막형 태양전지 |
US20100047954A1 (en) * | 2007-08-31 | 2010-02-25 | Su Tzay-Fa Jeff | Photovoltaic production line |
KR20090047388A (ko) * | 2007-08-31 | 2009-05-12 | 어플라이드 머티어리얼스, 인코포레이티드 | 다양한 크기의 광전지 소자 형성을 위한 생산 라인 모듈 |
EP3333280A1 (de) | 2007-09-12 | 2018-06-13 | Flisom AG | Verfahren zur herstellung eines verbindungsschichtes mit zusammensetzungsgradierung |
US20090188603A1 (en) * | 2008-01-25 | 2009-07-30 | Applied Materials, Inc. | Method and apparatus for controlling laminator temperature on a solar cell |
JP2009206279A (ja) * | 2008-02-27 | 2009-09-10 | Sharp Corp | 薄膜太陽電池およびその製造方法 |
US7981778B2 (en) * | 2009-07-22 | 2011-07-19 | Applied Materials, Inc. | Directional solid phase crystallization of thin amorphous silicon for solar cell applications |
WO2010027712A2 (en) * | 2008-08-26 | 2010-03-11 | Applied Materials, Inc. | Laser material removal methods and apparatus |
DE102008043750A1 (de) * | 2008-11-14 | 2010-05-20 | Q-Cells Se | Verfahren zur Makierung/Codierung einer Solarzelle und Solarzelle |
KR101520044B1 (ko) * | 2009-01-30 | 2015-05-14 | 삼성에스디아이 주식회사 | 태양전지 모듈 및 이의 제조 방법 |
WO2010091025A2 (en) * | 2009-02-04 | 2010-08-12 | Applied Materials, Inc. | Metrology and inspection suite for a solar production line |
US20100330711A1 (en) * | 2009-06-26 | 2010-12-30 | Applied Materials, Inc. | Method and apparatus for inspecting scribes in solar modules |
US20110005458A1 (en) * | 2009-07-13 | 2011-01-13 | Applied Materials, Inc. | Method and apparatus for improving scribe accuracy in solar cell modules |
US20110008947A1 (en) * | 2009-07-13 | 2011-01-13 | Applied Materials, Inc. | Apparatus and method for performing multifunction laser processes |
US20110065227A1 (en) * | 2009-09-15 | 2011-03-17 | Applied Materials, Inc. | Common laser module for a photovoltaic production line |
DE102010060908A1 (de) * | 2010-11-30 | 2012-05-31 | Q-Cells Se | Verfahren zur Kennzeichnung von Wafersolarzellen oder zur Kennzeichnung von Vorprodukten von Wafersolarzellen |
CN103000752A (zh) * | 2011-09-19 | 2013-03-27 | 无锡尚德太阳能电力有限公司 | 薄膜太阳电池划线机及其方法 |
NL2014040B1 (en) * | 2014-12-23 | 2016-10-12 | Stichting Energieonderzoek Centrum Nederland | Method of making a curent collecting grid for solar cells. |
WO2018079257A1 (ja) * | 2016-10-26 | 2018-05-03 | 株式会社カネカ | 光電変換素子 |
DE102019006090A1 (de) * | 2019-08-29 | 2021-03-04 | Azur Space Solar Power Gmbh | Markierungsverfahren |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3576540A (en) * | 1967-11-20 | 1971-04-27 | Sundstrand Corp | Plural machine tool and part handling control system |
US4446362A (en) * | 1979-05-21 | 1984-05-01 | Rca Corporation | Workpiece with abraded machine-readable marking therein and method of making |
US4327283A (en) * | 1979-09-24 | 1982-04-27 | Rca Corporation | Workpiece with machine-readable marking recessed therein and method of making same |
JPS603164A (ja) * | 1983-06-21 | 1985-01-09 | Sanyo Electric Co Ltd | 光起電力装置の製造方法 |
US4510673A (en) * | 1983-06-23 | 1985-04-16 | International Business Machines Corporation | Laser written chip identification method |
JPS61263172A (ja) * | 1985-05-16 | 1986-11-21 | Fuji Electric Co Ltd | 薄膜太陽電池の製造方法 |
CA2011296A1 (en) * | 1989-05-15 | 1990-11-15 | Douglas C. Bossen | Presence/absence bar code |
JPH0437085A (ja) * | 1990-06-01 | 1992-02-07 | Hitachi Ltd | プリント配線板およびその製造方法 |
JPH0451156A (ja) | 1990-06-19 | 1992-02-19 | Canon Inc | 加熱定着方法及びトナー |
US5501744A (en) * | 1992-01-13 | 1996-03-26 | Photon Energy, Inc. | Photovoltaic cell having a p-type polycrystalline layer with large crystals |
IT1272036B (it) * | 1993-11-05 | 1997-06-11 | Marelli Autronica | Sistema di registraziome per una linea di produzione. |
JP2867904B2 (ja) | 1994-12-26 | 1999-03-10 | 株式会社デンソー | 2次元コード読取装置 |
JP3188158B2 (ja) * | 1995-09-01 | 2001-07-16 | シャープ株式会社 | 透明体の処理工程における管理システム |
JPH09278494A (ja) * | 1996-04-15 | 1997-10-28 | Corning Japan Kk | ガラス基板へのマーキング方法 |
EP0850779B1 (de) * | 1996-12-27 | 2001-05-02 | Omron Corporation | Verfahren zur Beschriftung eines Gegenstands, dass ein Laserstrahl verwendet |
JP3915851B2 (ja) | 1996-12-27 | 2007-05-16 | オムロン株式会社 | レーザビームを用いてマーキングするための方法、並びに、表示パネルの製造工程においてガラス基板に識別情報をマーキングするための方法 |
JP3805889B2 (ja) * | 1997-06-20 | 2006-08-09 | 株式会社カネカ | 太陽電池モジュールおよびその製造方法 |
-
2000
- 2000-03-06 EP EP07112029A patent/EP1868249B1/de not_active Expired - Lifetime
- 2000-03-06 EP EP00104449A patent/EP1089346B1/de not_active Expired - Lifetime
- 2000-03-06 DE DE60045678T patent/DE60045678D1/de not_active Expired - Lifetime
- 2000-03-06 AT AT00104449T patent/ATE500615T1/de not_active IP Right Cessation
- 2000-03-06 ES ES00104449T patent/ES2360031T3/es not_active Expired - Lifetime
- 2000-03-06 AT AT07112029T patent/ATE516598T1/de not_active IP Right Cessation
- 2000-03-07 US US09/521,193 patent/US6578764B1/en not_active Expired - Lifetime
- 2000-03-08 AU AU20725/00A patent/AU776867C/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP1089346A3 (de) | 2006-05-17 |
ES2360031T3 (es) | 2011-05-31 |
EP1868249A2 (de) | 2007-12-19 |
EP1868249A3 (de) | 2008-11-12 |
AU776867C (en) | 2005-06-16 |
DE60045678D1 (de) | 2011-04-14 |
AU776867B2 (en) | 2004-09-23 |
EP1089346A2 (de) | 2001-04-04 |
ATE500615T1 (de) | 2011-03-15 |
EP1089346B1 (de) | 2011-03-02 |
AU2072500A (en) | 2001-03-29 |
EP1868249B1 (de) | 2011-07-13 |
US6578764B1 (en) | 2003-06-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |