ATE484006T1 - Verfahren zur herstellung eines farbfilters - Google Patents
Verfahren zur herstellung eines farbfiltersInfo
- Publication number
- ATE484006T1 ATE484006T1 AT07016460T AT07016460T ATE484006T1 AT E484006 T1 ATE484006 T1 AT E484006T1 AT 07016460 T AT07016460 T AT 07016460T AT 07016460 T AT07016460 T AT 07016460T AT E484006 T1 ATE484006 T1 AT E484006T1
- Authority
- AT
- Austria
- Prior art keywords
- photoresist layer
- color filter
- colored layer
- layer
- forming
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optical Filters (AREA)
- Materials For Photolithography (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Liquid Crystal (AREA)
- Compounds Of Unknown Constitution (AREA)
- Color Television Image Signal Generators (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006226934 | 2006-08-23 | ||
JP2006355572A JP5046639B2 (ja) | 2006-08-23 | 2006-12-28 | カラーフィルタの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE484006T1 true ATE484006T1 (de) | 2010-10-15 |
Family
ID=38683603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07016460T ATE484006T1 (de) | 2006-08-23 | 2007-08-22 | Verfahren zur herstellung eines farbfilters |
Country Status (5)
Country | Link |
---|---|
US (1) | US7914957B2 (de) |
EP (1) | EP1892562B1 (de) |
JP (1) | JP5046639B2 (de) |
AT (1) | ATE484006T1 (de) |
DE (1) | DE602007009613D1 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008241744A (ja) * | 2007-03-23 | 2008-10-09 | Fujifilm Corp | カラーフィルタの製造方法 |
JP2010078834A (ja) * | 2008-09-25 | 2010-04-08 | Fujifilm Corp | カラーフィルタ及びカラーフィルタの製造方法 |
JP5119108B2 (ja) * | 2008-09-25 | 2013-01-16 | 富士フイルム株式会社 | カラーフィルタの製造方法 |
JP2010085701A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | カラーフィルタの製造方法 |
JP2010085700A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | カラーフィルタの製造方法 |
JP2010085702A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | カラーフィルタの製造方法 |
JP2010085703A (ja) * | 2008-09-30 | 2010-04-15 | Fujifilm Corp | カラーフィルタの製造方法 |
RU2503043C2 (ru) * | 2009-02-09 | 2013-12-27 | Открытое Акционерное Общество "Пеленг" | Жидкостный теплоноситель-светофильтр твердотельных лазеров |
JP5699064B2 (ja) * | 2011-09-29 | 2015-04-08 | 富士フイルム株式会社 | カラーフィルタの製造方法 |
TWI463193B (zh) * | 2011-11-17 | 2014-12-01 | Au Optronics Corp | 彩色濾光片及液晶顯示器 |
TWI432898B (zh) * | 2011-12-05 | 2014-04-01 | Chi Mei Corp | 彩色濾光片用藍色感光性樹脂組成物及其應用 |
KR101556280B1 (ko) * | 2012-12-07 | 2015-09-30 | 제일모직 주식회사 | 컬러필터용 감광성 수지 조성물 및 이를 이용한 컬러필터 |
US10011672B2 (en) * | 2013-05-16 | 2018-07-03 | Samsung Sdi Co., Ltd. | Photosensitive resin composition for color filter and color filter using the same |
KR101798936B1 (ko) * | 2013-05-16 | 2017-11-17 | 제일모직 주식회사 | 컬러필터용 감광성 수지 조성물 및 이를 이용한 컬러필터 |
JP6246076B2 (ja) | 2014-06-05 | 2017-12-13 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法および半導体装置 |
CN108352391B (zh) * | 2015-11-16 | 2023-01-03 | 凸版印刷株式会社 | 固态成像器件的制造方法及固态成像器件、以及彩色滤光片的制造方法及彩色滤光片 |
CN105404050B (zh) * | 2016-01-04 | 2018-04-20 | 京东方科技集团股份有限公司 | 彩膜基板及其制作方法、显示装置 |
KR102468312B1 (ko) * | 2017-04-18 | 2022-11-17 | 도판 인사츠 가부시키가이샤 | 고체 촬상 소자 및 고체 촬상 소자의 제조 방법 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55146406A (en) | 1980-04-26 | 1980-11-14 | Dainippon Printing Co Ltd | Color separating filter |
JPS59146005A (ja) * | 1983-02-08 | 1984-08-21 | Canon Inc | カラ−フイルタ−の製造方法 |
JPH01296201A (ja) * | 1988-05-24 | 1989-11-29 | Fujitsu Ltd | カラーフィルタの製造方法 |
US5439582A (en) * | 1991-10-02 | 1995-08-08 | Nippon Paint Co., Ltd. | Process for producing multicolor display |
US5503952A (en) * | 1994-03-22 | 1996-04-02 | Shinto Paint Co., Ltd. | Method for manufacture of color filter and liquid crystal display |
JP2727966B2 (ja) * | 1994-06-06 | 1998-03-18 | 日本電気株式会社 | 半導体装置の製造方法 |
JP3427508B2 (ja) * | 1994-08-31 | 2003-07-22 | ジェイエスアール株式会社 | 着色ミクロパターンの形成方法 |
US5756400A (en) * | 1995-12-08 | 1998-05-26 | Applied Materials, Inc. | Method and apparatus for cleaning by-products from plasma chamber surfaces |
JPH10341012A (ja) * | 1997-06-09 | 1998-12-22 | Toshiba Corp | 固体撮像素子の製造方法 |
US6159862A (en) * | 1997-12-27 | 2000-12-12 | Tokyo Electron Ltd. | Semiconductor processing method and system using C5 F8 |
JP2001028432A (ja) * | 1999-07-14 | 2001-01-30 | Sony Corp | 光学素子の製造方法 |
JP4483003B2 (ja) * | 2000-03-07 | 2010-06-16 | ソニー株式会社 | カラーフィルタの製造方法及び固体撮像装置の製造方法 |
JP2002025979A (ja) * | 2000-07-03 | 2002-01-25 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
JP4133810B2 (ja) * | 2001-07-10 | 2008-08-13 | 東京エレクトロン株式会社 | ドライエッチング方法 |
US7084472B2 (en) * | 2002-07-09 | 2006-08-01 | Toppan Printing Co., Ltd. | Solid-state imaging device and manufacturing method therefor |
JP2005026394A (ja) * | 2003-07-01 | 2005-01-27 | Sumitomo Bakelite Co Ltd | ポジ型感光性樹脂組成物の硬化膜除去方法及びその方法を用いた半導体装置 |
JP4558296B2 (ja) * | 2003-09-25 | 2010-10-06 | 東京エレクトロン株式会社 | プラズマアッシング方法 |
JP4398753B2 (ja) * | 2004-02-23 | 2010-01-13 | 東洋インキ製造株式会社 | カラーフィルタ用着色組成物およびカラーフィルタ |
JP4463054B2 (ja) * | 2004-09-17 | 2010-05-12 | 東京応化工業株式会社 | ホトレジスト用剥離液およびこれを用いた基板の処理方法 |
US7686971B2 (en) * | 2004-11-24 | 2010-03-30 | Panasonic Corporation | Plasma processing apparatus and method |
-
2006
- 2006-12-28 JP JP2006355572A patent/JP5046639B2/ja active Active
-
2007
- 2007-08-22 AT AT07016460T patent/ATE484006T1/de not_active IP Right Cessation
- 2007-08-22 EP EP07016460A patent/EP1892562B1/de not_active Not-in-force
- 2007-08-22 DE DE602007009613T patent/DE602007009613D1/de active Active
- 2007-08-23 US US11/843,911 patent/US7914957B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1892562B1 (de) | 2010-10-06 |
EP1892562A1 (de) | 2008-02-27 |
DE602007009613D1 (de) | 2010-11-18 |
JP2008077038A (ja) | 2008-04-03 |
US20080053953A1 (en) | 2008-03-06 |
US7914957B2 (en) | 2011-03-29 |
JP5046639B2 (ja) | 2012-10-10 |
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Legal Events
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |