ATE474073T1 - Beschichtungsanlage mit eingangsschleuse sowie vorrichtung dafür - Google Patents
Beschichtungsanlage mit eingangsschleuse sowie vorrichtung dafürInfo
- Publication number
- ATE474073T1 ATE474073T1 AT04719416T AT04719416T ATE474073T1 AT E474073 T1 ATE474073 T1 AT E474073T1 AT 04719416 T AT04719416 T AT 04719416T AT 04719416 T AT04719416 T AT 04719416T AT E474073 T1 ATE474073 T1 AT E474073T1
- Authority
- AT
- Austria
- Prior art keywords
- shutter
- latch
- lock
- coating system
- input lock
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2007—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member specially adapted operating means therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
- F16K1/205—Special features or arrangements of the sealing the sealing being arranged on the valve member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
- F16K1/18—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps
- F16K1/20—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with pivoted discs or flaps with axis of rotation arranged externally of valve member
- F16K1/2042—Special features or arrangements of the sealing
- F16K1/2085—Movable sealing bodies
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/24—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with valve members that, on opening of the valve, are initially lifted from the seat and next are turned around an axis parallel to the seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Geochemistry & Mineralogy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Operating, Guiding And Securing Of Roll- Type Closing Members (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Lock And Its Accessories (AREA)
- Physical Vapour Deposition (AREA)
- Sampling And Sample Adjustment (AREA)
- Shutters For Cameras (AREA)
- Photographic Developing Apparatuses (AREA)
- Charge And Discharge Circuits For Batteries Or The Like (AREA)
- Nozzles (AREA)
- Secondary Cells (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Surface Treatment Of Glass (AREA)
- Specific Sealing Or Ventilating Devices For Doors And Windows (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP0314749 | 2003-12-22 | ||
PCT/EP2004/002542 WO2005064038A1 (en) | 2003-12-22 | 2004-03-11 | Coating plant with a charging lock and device therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE474073T1 true ATE474073T1 (de) | 2010-07-15 |
Family
ID=34717119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04719416T ATE474073T1 (de) | 2003-12-22 | 2004-03-11 | Beschichtungsanlage mit eingangsschleuse sowie vorrichtung dafür |
Country Status (10)
Country | Link |
---|---|
US (2) | US7479189B2 (de) |
EP (1) | EP1716268B1 (de) |
JP (1) | JP4448825B2 (de) |
KR (1) | KR100692585B1 (de) |
CN (1) | CN1745192B (de) |
AT (1) | ATE474073T1 (de) |
DE (1) | DE602004028165D1 (de) |
PL (1) | PL1716268T3 (de) |
TW (1) | TWI250047B (de) |
WO (1) | WO2005064038A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8352400B2 (en) | 1991-12-23 | 2013-01-08 | Hoffberg Steven M | Adaptive pattern recognition based controller apparatus and method and human-factored interface therefore |
US7966078B2 (en) | 1999-02-01 | 2011-06-21 | Steven Hoffberg | Network media appliance system and method |
FR2966546B1 (fr) * | 2010-10-22 | 2013-08-23 | Snecma | Vanne d'isolement commandee a etancheite renforcee |
KR102138675B1 (ko) * | 2013-11-19 | 2020-07-28 | 세메스 주식회사 | 기판처리장치 |
FR3032769B1 (fr) * | 2015-02-18 | 2017-10-13 | Perolo Sas | Clapet de fond de cuve |
CN105805321B (zh) * | 2016-01-22 | 2019-03-05 | 上海鸿研物流技术有限公司 | 阀门 |
JP3211970U (ja) * | 2016-04-07 | 2017-08-17 | オルボテック リミテッド | ドナー取扱装置 |
WO2019063073A1 (en) * | 2017-09-27 | 2019-04-04 | Applied Materials, Inc. | LOCKING VALVE FOR VACUUM SEALING, VACUUM CHAMBER AND VACUUM PROCESSING SYSTEM |
CN111279107A (zh) * | 2017-11-23 | 2020-06-12 | 应用材料公司 | 用于真空密封的锁定阀、真空腔室和真空处理*** |
CN108745423B (zh) * | 2018-06-21 | 2021-01-26 | 江苏中科睿赛环境工程有限公司 | 蜂窝催化剂浸渍晾干*** |
CA3090238A1 (en) * | 2019-08-16 | 2021-02-16 | Gabe Coscarella | Backwater valve |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US774206A (en) * | 1904-05-31 | 1904-11-08 | Charles G Seaman | Sash-fastener. |
US1924557A (en) * | 1929-07-22 | 1933-08-29 | Johnson Metal Products Company | Casement window operator |
US2970347A (en) * | 1957-05-16 | 1961-02-07 | Gen Am Transport | Hatch plugs |
GB1070331A (en) * | 1963-05-14 | 1967-06-01 | Allen & Hanburys Ltd | Improvements relating to pressure or vacuum vessels |
US3539212A (en) * | 1968-06-26 | 1970-11-10 | Alexandr Pavlovich Poltorak | Lock for a quick opening cover of a pressure-resistant shell |
US3837566A (en) * | 1972-07-31 | 1974-09-24 | Gte Automatic Electric Lab Inc | Self-locking coin receptacle |
US5313738A (en) * | 1991-01-22 | 1994-05-24 | Mdt Corporation | Closure for doors used with small and medium sized pressure vessels |
US5184422A (en) * | 1991-12-10 | 1993-02-09 | American Ingredients Company | Swing away manway assembly |
US5752796A (en) * | 1996-01-24 | 1998-05-19 | Muka; Richard S. | Vacuum integrated SMIF system |
TW344847B (en) * | 1996-08-29 | 1998-11-11 | Tokyo Electron Co Ltd | Substrate treatment system, substrate transfer system, and substrate transfer method |
US5815996A (en) * | 1997-01-31 | 1998-10-06 | Granger; Timothy L. | Interior-mounted cover for roof ventilator |
DE29706556U1 (de) * | 1997-04-11 | 1997-07-10 | Leybold Systems GmbH, 63450 Hanau | Handlingsvorrichtung zum Be- und Entladen einer evakuierbaren Behandlungskammer |
DE59805566D1 (de) * | 1997-04-11 | 2002-10-24 | Leybold Systems Gmbh | Verfahren und Vorrichtung zum Be- und Entladen einer evakuierbaren Behandlungskammer |
DE29716440U1 (de) * | 1997-09-12 | 1997-12-11 | Balzers Ag, Balzers | Sputterstation |
ES2188200T3 (es) * | 1998-07-30 | 2003-06-16 | Armando Cauduro | Escotilla para vehiculo. |
GB0005754D0 (en) * | 2000-03-11 | 2000-05-03 | Banham Patent Locks Ltd | Lock |
DE10202826B4 (de) * | 2002-01-24 | 2005-05-04 | Wittenstein Motion Control Gmbh | Vorrichtung zum Betätigen von Türen von Fahrzeugen |
FR2841588B1 (fr) * | 2002-06-26 | 2007-03-16 | Airbus France | Porte a ouverture rapide |
-
2004
- 2004-03-11 DE DE602004028165T patent/DE602004028165D1/de not_active Expired - Lifetime
- 2004-03-11 EP EP04719416A patent/EP1716268B1/de not_active Expired - Lifetime
- 2004-03-11 WO PCT/EP2004/002542 patent/WO2005064038A1/en not_active Application Discontinuation
- 2004-03-11 US US10/547,718 patent/US7479189B2/en not_active Expired - Fee Related
- 2004-03-11 PL PL04719416T patent/PL1716268T3/pl unknown
- 2004-03-11 KR KR1020057013920A patent/KR100692585B1/ko active IP Right Grant
- 2004-03-11 AT AT04719416T patent/ATE474073T1/de not_active IP Right Cessation
- 2004-03-11 CN CN200480003300XA patent/CN1745192B/zh not_active Expired - Fee Related
- 2004-03-11 JP JP2005518676A patent/JP4448825B2/ja not_active Expired - Fee Related
- 2004-03-15 TW TW093106817A patent/TWI250047B/zh not_active IP Right Cessation
-
2007
- 2007-12-13 US US11/955,876 patent/US20080086948A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
PL1716268T3 (pl) | 2010-12-31 |
US20080086948A1 (en) | 2008-04-17 |
CN1745192B (zh) | 2010-08-18 |
CN1745192A (zh) | 2006-03-08 |
TWI250047B (en) | 2006-03-01 |
US20060162659A1 (en) | 2006-07-27 |
DE602004028165D1 (de) | 2010-08-26 |
US7479189B2 (en) | 2009-01-20 |
WO2005064038A1 (en) | 2005-07-14 |
JP2006522727A (ja) | 2006-10-05 |
EP1716268A1 (de) | 2006-11-02 |
TW200529934A (en) | 2005-09-16 |
JP4448825B2 (ja) | 2010-04-14 |
KR20060034621A (ko) | 2006-04-24 |
EP1716268B1 (de) | 2010-07-14 |
KR100692585B1 (ko) | 2007-03-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |