ATE467268T1 - Quartzresonator mit sehr kleinen abmessungen - Google Patents
Quartzresonator mit sehr kleinen abmessungenInfo
- Publication number
- ATE467268T1 ATE467268T1 AT04104267T AT04104267T ATE467268T1 AT E467268 T1 ATE467268 T1 AT E467268T1 AT 04104267 T AT04104267 T AT 04104267T AT 04104267 T AT04104267 T AT 04104267T AT E467268 T1 ATE467268 T1 AT E467268T1
- Authority
- AT
- Austria
- Prior art keywords
- zone
- arms
- small dimensions
- quartz resonator
- resonator
- Prior art date
Links
- 239000010453 quartz Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02133—Means for compensation or elimination of undesirable effects of stress
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04104267A EP1633042B1 (de) | 2004-09-03 | 2004-09-03 | Quartzresonator mit sehr kleinen Abmessungen |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE467268T1 true ATE467268T1 (de) | 2010-05-15 |
Family
ID=34929536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04104267T ATE467268T1 (de) | 2004-09-03 | 2004-09-03 | Quartzresonator mit sehr kleinen abmessungen |
Country Status (6)
Country | Link |
---|---|
US (1) | US7253554B2 (de) |
EP (1) | EP1633042B1 (de) |
JP (1) | JP4646744B2 (de) |
CN (1) | CN100593283C (de) |
AT (1) | ATE467268T1 (de) |
DE (1) | DE602004027033D1 (de) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100533646C (zh) * | 2004-06-01 | 2009-08-26 | 佳能株式会社 | 图像显示装置 |
JP4277818B2 (ja) | 2005-03-22 | 2009-06-10 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイス |
JP4415389B2 (ja) * | 2005-04-27 | 2010-02-17 | セイコーエプソン株式会社 | 圧電デバイス |
JP4442521B2 (ja) * | 2005-06-29 | 2010-03-31 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイス |
JP4595913B2 (ja) * | 2006-09-21 | 2010-12-08 | 株式会社大真空 | 音叉型圧電振動デバイス |
JP2008249489A (ja) * | 2007-03-30 | 2008-10-16 | Tdk Corp | 角速度センサ素子および角速度センサ装置 |
EP2017960B1 (de) * | 2007-07-19 | 2009-12-30 | ETA SA Manufacture Horlogère Suisse | Piezoelektrischer Resonator mit optimierten Bewegungsfähigkeiten |
JP5089298B2 (ja) * | 2007-08-31 | 2012-12-05 | リバーエレテック株式会社 | 音叉型屈曲振動子 |
US7802466B2 (en) * | 2007-11-28 | 2010-09-28 | Sierra Sensors Gmbh | Oscillating sensor and fluid sample analysis using an oscillating sensor |
EP2071721B1 (de) * | 2007-12-13 | 2011-02-23 | ETA SA Manufacture Horlogère Suisse | Piezoelektrischer Resonator in einer kleinen Verpackung |
WO2009143492A1 (en) * | 2008-05-23 | 2009-11-26 | Statek Corporation | Piezoelectric resonator |
US8067880B2 (en) * | 2008-12-27 | 2011-11-29 | Seiko Epson Corporation | Flexural vibration element and electronic component |
JP5350101B2 (ja) * | 2009-06-30 | 2013-11-27 | 京セラクリスタルデバイス株式会社 | 音叉型屈曲水晶振動子 |
TWI398097B (zh) | 2009-11-18 | 2013-06-01 | Wafer Mems Co Ltd | 音叉型石英晶體諧振器 |
TWI420811B (zh) * | 2009-11-18 | 2013-12-21 | Wafer Mems Co Ltd | 音叉型石英晶體諧振器 |
CN103152007B (zh) * | 2009-12-02 | 2016-12-28 | 威华微机电股份有限公司 | 音叉型石英晶体谐振器 |
CN103199817B (zh) * | 2009-12-02 | 2015-11-18 | 威华微机电股份有限公司 | 音叉型石英晶体谐振器 |
JP2011151562A (ja) * | 2010-01-21 | 2011-08-04 | Kyocera Kinseki Corp | 音叉型屈曲水晶振動素子 |
JP5482250B2 (ja) * | 2010-02-02 | 2014-05-07 | セイコーエプソン株式会社 | 振動体および振動デバイス |
JP5479931B2 (ja) * | 2010-02-03 | 2014-04-23 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動子、発振器、電子機器および電波時計 |
JP2011176701A (ja) * | 2010-02-25 | 2011-09-08 | Kyocera Kinseki Corp | 音叉型屈曲水晶振動素子 |
US20110215680A1 (en) * | 2010-03-05 | 2011-09-08 | Seiko Epson Corporation | Resonator element, resonator, oscillator, and electronic device |
JP5085679B2 (ja) * | 2010-03-15 | 2012-11-28 | 日本電波工業株式会社 | 圧電振動片および圧電デバイス |
JP5592812B2 (ja) * | 2011-01-27 | 2014-09-17 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、および電波時計 |
JP5839919B2 (ja) | 2011-09-28 | 2016-01-06 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、および電波時計 |
JP5819151B2 (ja) * | 2011-09-28 | 2015-11-18 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器および電波時計 |
JP5902546B2 (ja) * | 2012-04-25 | 2016-04-13 | 京セラクリスタルデバイス株式会社 | 音叉型屈曲水晶振動素子 |
JP6080449B2 (ja) * | 2012-09-18 | 2017-02-15 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
JP2014123911A (ja) * | 2012-12-21 | 2014-07-03 | Daishinku Corp | 音叉型水晶振動片 |
CN110663176A (zh) * | 2017-05-25 | 2020-01-07 | 株式会社村田制作所 | 谐振器以及谐振装置 |
EP3468036A1 (de) * | 2017-10-03 | 2019-04-10 | Micro Crystal AG | Piezoelektrischer resonator kleiner grösse |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5360594A (en) * | 1976-11-11 | 1978-05-31 | Seiko Epson Corp | Electronic watch |
JPS55162612A (en) * | 1979-06-05 | 1980-12-18 | Citizen Watch Co Ltd | Tuning fork type crystal resonator |
FR2467487A1 (fr) * | 1979-10-15 | 1981-04-17 | Ebauches Sa | Resonateur piezoelectrique |
JPS5862917A (ja) * | 1981-10-08 | 1983-04-14 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
JP3811226B2 (ja) * | 1996-07-26 | 2006-08-16 | トヨタ自動車株式会社 | 水晶振動子及びその製造方法 |
US6018212A (en) * | 1996-11-26 | 2000-01-25 | Ngk Insulators, Ltd. | Vibrator, vibratory gyroscope, and vibration adjusting method |
US6651498B1 (en) * | 1997-10-06 | 2003-11-25 | Ngk Insulators, Ltd. | Vibratory gyroscope, vibrator used in this gyroscope, method for analyzing vibration of the vibrator, method for supporting the vibrator, and method for manufacturing the vibratory gyroscope |
EP1788702A3 (de) * | 2000-12-25 | 2008-01-16 | Seiko Epson Corporation | Schwingelement, Vibrator, Oszillator und elektronisches Gerät |
JP2003069368A (ja) * | 2001-08-22 | 2003-03-07 | Seiko Epson Corp | 圧電デバイスと圧電振動片の接合方法、及び圧電デバイスを利用した携帯電話装置ならびに圧電デバイスを利用した電子機器 |
JP2003087078A (ja) * | 2001-09-07 | 2003-03-20 | Citizen Watch Co Ltd | 水晶振動子構造体 |
JP2004129181A (ja) * | 2002-10-03 | 2004-04-22 | Herutsu Kk | 水晶振動子の電極構造 |
JP2004200914A (ja) * | 2002-12-17 | 2004-07-15 | Seiko Epson Corp | 圧電デバイス、及び圧電デバイスを利用した携帯電話装置、電子機器 |
JP2005291937A (ja) * | 2004-03-31 | 2005-10-20 | Kyocera Kinseki Corp | 慣性センサ素子 |
-
2004
- 2004-09-03 AT AT04104267T patent/ATE467268T1/de not_active IP Right Cessation
- 2004-09-03 EP EP04104267A patent/EP1633042B1/de active Active
- 2004-09-03 DE DE602004027033T patent/DE602004027033D1/de active Active
- 2004-11-08 US US10/982,790 patent/US7253554B2/en active Active
-
2005
- 2005-08-31 CN CN200510093862A patent/CN100593283C/zh active Active
- 2005-09-02 JP JP2005254444A patent/JP4646744B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
EP1633042B1 (de) | 2010-05-05 |
US20060049722A1 (en) | 2006-03-09 |
CN1744432A (zh) | 2006-03-08 |
JP4646744B2 (ja) | 2011-03-09 |
EP1633042A1 (de) | 2006-03-08 |
JP2006074793A (ja) | 2006-03-16 |
CN100593283C (zh) | 2010-03-03 |
US7253554B2 (en) | 2007-08-07 |
DE602004027033D1 (de) | 2010-06-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |