ATE438197T1 - Ein halterungssystem und ein verfahren zum modulieren von substratformen - Google Patents

Ein halterungssystem und ein verfahren zum modulieren von substratformen

Info

Publication number
ATE438197T1
ATE438197T1 AT03768879T AT03768879T ATE438197T1 AT E438197 T1 ATE438197 T1 AT E438197T1 AT 03768879 T AT03768879 T AT 03768879T AT 03768879 T AT03768879 T AT 03768879T AT E438197 T1 ATE438197 T1 AT E438197T1
Authority
AT
Austria
Prior art keywords
chuck body
recess
recesses
support region
support system
Prior art date
Application number
AT03768879T
Other languages
English (en)
Inventor
Byung-Jin Choi
Ronald Voisin
Sidlgata Sreenivasan
Michael Watts
Daniel Babbs
Mario Meissl
Hillman Bailey
Norman Schumaker
Original Assignee
Molecular Imprints Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/293,224 external-priority patent/US7019819B2/en
Priority claimed from US10/316,963 external-priority patent/US6980282B2/en
Application filed by Molecular Imprints Inc filed Critical Molecular Imprints Inc
Application granted granted Critical
Publication of ATE438197T1 publication Critical patent/ATE438197T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/62—Holders for the original
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Toxicology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Mathematical Physics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Manufacturing Optical Record Carriers (AREA)
AT03768879T 2002-11-13 2003-11-12 Ein halterungssystem und ein verfahren zum modulieren von substratformen ATE438197T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/293,224 US7019819B2 (en) 2002-11-13 2002-11-13 Chucking system for modulating shapes of substrates
US10/316,963 US6980282B2 (en) 2002-12-11 2002-12-11 Method for modulating shapes of substrates
PCT/US2003/036012 WO2004044651A1 (en) 2002-11-13 2003-11-12 A chucking system and method for modulating shapes of substrates

Publications (1)

Publication Number Publication Date
ATE438197T1 true ATE438197T1 (de) 2009-08-15

Family

ID=32314388

Family Applications (3)

Application Number Title Priority Date Filing Date
AT10183090T ATE549743T1 (de) 2002-11-13 2003-11-12 Ein lithographiesystem mit einem halterungssystem
AT09163924T ATE540427T1 (de) 2002-11-13 2003-11-12 Ein verfahren um formen von substraten zu modulieren
AT03768879T ATE438197T1 (de) 2002-11-13 2003-11-12 Ein halterungssystem und ein verfahren zum modulieren von substratformen

Family Applications Before (2)

Application Number Title Priority Date Filing Date
AT10183090T ATE549743T1 (de) 2002-11-13 2003-11-12 Ein lithographiesystem mit einem halterungssystem
AT09163924T ATE540427T1 (de) 2002-11-13 2003-11-12 Ein verfahren um formen von substraten zu modulieren

Country Status (9)

Country Link
EP (3) EP2261966B1 (de)
JP (1) JP4391420B2 (de)
KR (1) KR101056505B1 (de)
AT (3) ATE549743T1 (de)
AU (1) AU2003291477A1 (de)
DE (2) DE20320446U1 (de)
MY (1) MY133312A (de)
TW (1) TWI302228B (de)
WO (1) WO2004044651A1 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
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US7019819B2 (en) 2002-11-13 2006-03-28 Molecular Imprints, Inc. Chucking system for modulating shapes of substrates
US7442336B2 (en) 2003-08-21 2008-10-28 Molecular Imprints, Inc. Capillary imprinting technique
JP4937750B2 (ja) * 2003-05-14 2012-05-23 モレキュラー・インプリンツ・インコーポレーテッド インプリント・リソグラフィ・プロセス中にテンプレートを移動させるための方法、システム、ホルダ、アセンブリ
US7019835B2 (en) * 2004-02-19 2006-03-28 Molecular Imprints, Inc. Method and system to measure characteristics of a film disposed on a substrate
US20050275311A1 (en) * 2004-06-01 2005-12-15 Molecular Imprints, Inc. Compliant device for nano-scale manufacturing
US20050270516A1 (en) * 2004-06-03 2005-12-08 Molecular Imprints, Inc. System for magnification and distortion correction during nano-scale manufacturing
JP4574240B2 (ja) 2004-06-11 2010-11-04 キヤノン株式会社 加工装置、加工方法、デバイス製造方法
US7635263B2 (en) 2005-01-31 2009-12-22 Molecular Imprints, Inc. Chucking system comprising an array of fluid chambers
JP3958344B2 (ja) 2005-06-07 2007-08-15 キヤノン株式会社 インプリント装置、インプリント方法及びチップの製造方法
US7927089B2 (en) 2005-06-08 2011-04-19 Canon Kabushiki Kaisha Mold, apparatus including mold, pattern transfer apparatus, and pattern forming method
EP1958025B1 (de) * 2005-12-08 2011-05-18 Molecular Imprints, Inc. Verfahren zum ausstossen von zwischen einem substrat und einer form befindlichen gas
JP4667524B2 (ja) * 2006-04-03 2011-04-13 モレキュラー・インプリンツ・インコーポレーテッド 流体チャンバのアレイを備えるチャック・システム
US8215946B2 (en) * 2006-05-18 2012-07-10 Molecular Imprints, Inc. Imprint lithography system and method
EP2548972A1 (de) 2006-06-14 2013-01-23 Verinata Health, Inc Verfahren zur Diagnose fötaler Missbildungen
NL2003380A (en) * 2008-10-17 2010-04-20 Asml Netherlands Bv Imprint lithography apparatus and method.
US8652393B2 (en) 2008-10-24 2014-02-18 Molecular Imprints, Inc. Strain and kinetics control during separation phase of imprint process
US8309008B2 (en) * 2008-10-30 2012-11-13 Molecular Imprints, Inc. Separation in an imprint lithography process
KR101319353B1 (ko) * 2009-12-23 2013-10-16 엘지디스플레이 주식회사 평판 표시 소자의 제조 장치 및 방법
TWI576229B (zh) * 2010-04-27 2017-04-01 分子壓模公司 奈米壓印之安全分離技術
JP6004738B2 (ja) * 2011-09-07 2016-10-12 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
JP5938218B2 (ja) * 2012-01-16 2016-06-22 キヤノン株式会社 インプリント装置、物品の製造方法およびインプリント方法
JP6252098B2 (ja) 2012-11-01 2017-12-27 信越化学工業株式会社 角形金型用基板
CN105934711B (zh) * 2013-11-08 2019-10-25 佳能纳米技术公司 用于改进的覆盖纠正的低接触式压印光刻术模板卡盘***
JP6333031B2 (ja) * 2014-04-09 2018-05-30 キヤノン株式会社 インプリント装置および物品の製造方法
KR102394754B1 (ko) 2014-04-22 2022-05-04 에베 그룹 에. 탈너 게엠베하 나노구조를 엠보싱하기 위한 방법 및 장치
JP6497761B2 (ja) * 2015-02-23 2019-04-10 エム キューブド テクノロジーズ，インコーポレーテッドＭ Ｃｕｂｅｄ Ｔｅｃｈｎｏｌｏｇｉｅｓ， Ｉｎｃ． 静電チャック用薄膜電極
US11454883B2 (en) * 2016-11-14 2022-09-27 Canon Kabushiki Kaisha Template replication
US10996560B2 (en) * 2017-07-31 2021-05-04 Canon Kabushiki Kaisha Real-time correction of template deformation in nanoimprint lithography
JP7134717B2 (ja) * 2018-05-31 2022-09-12 キヤノン株式会社 インプリント装置、インプリント方法および物品製造方法
CN109895235B (zh) * 2019-03-01 2023-09-15 佛山三劦智能科技有限公司 一种陶瓷自动注浆成型的模具夹具
JP7507641B2 (ja) 2020-09-08 2024-06-28 キヤノン株式会社 成形装置及び物品の製造方法
CN113370078A (zh) * 2021-06-28 2021-09-10 徐州超杰电动车配件有限公司 一种电动车配件用的加工操作台

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US5772905A (en) 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
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JPH10172897A (ja) * 1996-12-05 1998-06-26 Nikon Corp 基板アダプタ，基板保持装置及び基板保持方法
JPH11111819A (ja) 1997-09-30 1999-04-23 Asahi Kasei Micro Syst Co Ltd ウェハーの固定方法及び露光装置
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JP2000340510A (ja) * 1999-05-31 2000-12-08 Matsushita Electric Ind Co Ltd プラズマ処理装置およびプラズマ処理方法
CA2399908A1 (en) * 2000-02-10 2001-08-16 Todd Dickinson Array of individual arrays as substrate for bead-based simultaneous processing of samples and manufacturing method therefor
CN1260778C (zh) * 2000-12-04 2006-06-21 株式会社荏原制作所 基片加工方法

Also Published As

Publication number Publication date
TW200411340A (en) 2004-07-01
AU2003291477A8 (en) 2004-06-03
MY133312A (en) 2007-11-30
EP2261966A3 (de) 2010-12-29
DE60328626D1 (de) 2009-09-10
JP4391420B2 (ja) 2009-12-24
TWI302228B (en) 2008-10-21
EP1567913B1 (de) 2009-07-29
ATE549743T1 (de) 2012-03-15
KR101056505B1 (ko) 2011-08-11
EP2099066B1 (de) 2012-01-04
DE20320446U1 (de) 2005-01-27
ATE540427T1 (de) 2012-01-15
WO2004044651A1 (en) 2004-05-27
KR20050086591A (ko) 2005-08-30
EP1567913A4 (de) 2008-08-13
EP2261966B1 (de) 2012-03-14
EP2099066A1 (de) 2009-09-09
EP2261966A2 (de) 2010-12-15
WO2004044651B1 (en) 2004-08-05
AU2003291477A1 (en) 2004-06-03
JP2006506814A (ja) 2006-02-23
EP1567913A1 (de) 2005-08-31

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