ATE371957T1 - Halbleiteranordnungen mit feldformungsgebieten - Google Patents
Halbleiteranordnungen mit feldformungsgebietenInfo
- Publication number
- ATE371957T1 ATE371957T1 AT02712149T AT02712149T ATE371957T1 AT E371957 T1 ATE371957 T1 AT E371957T1 AT 02712149 T AT02712149 T AT 02712149T AT 02712149 T AT02712149 T AT 02712149T AT E371957 T1 ATE371957 T1 AT E371957T1
- Authority
- AT
- Austria
- Prior art keywords
- voltage
- insulating layer
- resistive path
- trench
- sustaining zone
- Prior art date
Links
- 238000007493 shaping process Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000010276 construction Methods 0.000 abstract 1
- 230000005684 electric field Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/405—Resistive arrangements, e.g. resistive or semi-insulating field plates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/408—Electrodes ; Multistep manufacturing processes therefor with an insulating layer with a particular dielectric or electrostatic property, e.g. with static charges or for controlling trapped charges or moving ions, or with a plate acting on the insulator potential or the insulator charges, e.g. for controlling charges effect or potential distribution in the insulating layer, or with a semi-insulating layer contacting directly the semiconductor surface
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41766—Source or drain electrodes for field effect devices with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
Landscapes
- Microelectronics & Electronic Packaging (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Bipolar Transistors (AREA)
- Element Separation (AREA)
- Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0104342.1A GB0104342D0 (en) | 2001-02-22 | 2001-02-22 | Semiconductor devices |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE371957T1 true ATE371957T1 (de) | 2007-09-15 |
Family
ID=9909252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02712149T ATE371957T1 (de) | 2001-02-22 | 2002-02-15 | Halbleiteranordnungen mit feldformungsgebieten |
Country Status (8)
Country | Link |
---|---|
US (1) | US6605862B2 (de) |
EP (1) | EP1368837B1 (de) |
JP (1) | JP4125126B2 (de) |
KR (1) | KR100900852B1 (de) |
AT (1) | ATE371957T1 (de) |
DE (1) | DE60222099T2 (de) |
GB (1) | GB0104342D0 (de) |
WO (1) | WO2002067332A2 (de) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6803626B2 (en) * | 2002-07-18 | 2004-10-12 | Fairchild Semiconductor Corporation | Vertical charge control semiconductor device |
US6787872B2 (en) * | 2001-06-26 | 2004-09-07 | International Rectifier Corporation | Lateral conduction superjunction semiconductor device |
US7166890B2 (en) | 2003-10-21 | 2007-01-23 | Srikant Sridevan | Superjunction device with improved ruggedness |
DE102004007197B4 (de) | 2004-02-13 | 2012-11-08 | Infineon Technologies Ag | Hochsperrendes Halbleiterbauelement mit niedriger Durchlassspannung |
DE102004046697B4 (de) * | 2004-09-24 | 2020-06-10 | Infineon Technologies Ag | Hochspannungsfestes Halbleiterbauelement mit vertikal leitenden Halbleiterkörperbereichen und einer Grabenstruktur sowie Verfahren zur Herstellung desselben |
TWI278090B (en) * | 2004-10-21 | 2007-04-01 | Int Rectifier Corp | Solderable top metal for SiC device |
US7812441B2 (en) | 2004-10-21 | 2010-10-12 | Siliconix Technology C.V. | Schottky diode with improved surge capability |
US7834376B2 (en) | 2005-03-04 | 2010-11-16 | Siliconix Technology C. V. | Power semiconductor switch |
US9419092B2 (en) * | 2005-03-04 | 2016-08-16 | Vishay-Siliconix | Termination for SiC trench devices |
WO2007011270A1 (en) * | 2005-07-15 | 2007-01-25 | Telefonaktiebolaget L M Ericsson (Publ) | An arrangement for peak-field suppression |
US8461648B2 (en) | 2005-07-27 | 2013-06-11 | Infineon Technologies Austria Ag | Semiconductor component with a drift region and a drift control region |
US8110868B2 (en) | 2005-07-27 | 2012-02-07 | Infineon Technologies Austria Ag | Power semiconductor component with a low on-state resistance |
DE102005046711B4 (de) | 2005-09-29 | 2007-12-27 | Infineon Technologies Austria Ag | Verfahren zur Herstellung eines vertikalen MOS-Halbleiterbauelementes mit dünner Dielektrikumsschicht und tiefreichenden vertikalen Abschnitten |
US8368165B2 (en) | 2005-10-20 | 2013-02-05 | Siliconix Technology C. V. | Silicon carbide Schottky diode |
US7659588B2 (en) * | 2006-01-26 | 2010-02-09 | Siliconix Technology C. V. | Termination for a superjunction device |
US8080848B2 (en) | 2006-05-11 | 2011-12-20 | Fairchild Semiconductor Corporation | High voltage semiconductor device with lateral series capacitive structure |
JP2009545885A (ja) * | 2006-07-31 | 2009-12-24 | ヴィシェイ−シリコニックス | SiCショットキーダイオード用モリブデンバリア金属および製造方法 |
US7691734B2 (en) * | 2007-03-01 | 2010-04-06 | International Business Machines Corporation | Deep trench based far subcollector reachthrough |
US20080296636A1 (en) * | 2007-05-31 | 2008-12-04 | Darwish Mohamed N | Devices and integrated circuits including lateral floating capacitively coupled structures |
TW200921912A (en) * | 2007-11-05 | 2009-05-16 | Anpec Electronics Corp | Power transistor capable of decreasing capacitance between gate and drain |
US8193565B2 (en) * | 2008-04-18 | 2012-06-05 | Fairchild Semiconductor Corporation | Multi-level lateral floating coupled capacitor transistor structures |
US8203181B2 (en) | 2008-09-30 | 2012-06-19 | Infineon Technologies Austria Ag | Trench MOSFET semiconductor device and manufacturing method therefor |
US8022474B2 (en) * | 2008-09-30 | 2011-09-20 | Infineon Technologies Austria Ag | Semiconductor device |
KR101171886B1 (ko) * | 2009-07-31 | 2012-08-07 | 에스케이하이닉스 주식회사 | 매립게이트를 구비한 반도체장치 및 그 제조 방법 |
US8624302B2 (en) * | 2010-02-05 | 2014-01-07 | Fairchild Semiconductor Corporation | Structure and method for post oxidation silicon trench bottom shaping |
WO2012060014A1 (ja) * | 2010-11-05 | 2012-05-10 | 富士通株式会社 | 半導体装置及び半導体装置の製造方法 |
CN102566842B (zh) * | 2010-12-06 | 2014-10-29 | 乐金显示有限公司 | 静电电容型触摸屏面板 |
US8716788B2 (en) * | 2011-09-30 | 2014-05-06 | Infineon Technologies Austria Ag | Semiconductor device with self-charging field electrodes |
US9391149B2 (en) * | 2013-06-19 | 2016-07-12 | Infineon Technologies Austria Ag | Semiconductor device with self-charging field electrodes |
CN105529369B (zh) * | 2016-03-08 | 2019-05-14 | 中国电子科技集团公司第二十四研究所 | 一种半导体元胞结构和功率半导体器件 |
DE102017114568B4 (de) * | 2017-06-29 | 2021-11-25 | Infineon Technologies Austria Ag | Leistungshalbleitervorrichtung mit unterschiedlichen gatekreuzungen und verfahren zum herstellen davon |
JP2019091822A (ja) * | 2017-11-15 | 2019-06-13 | 株式会社東芝 | 半導体装置 |
TW201937607A (zh) | 2018-02-23 | 2019-09-16 | 力智電子股份有限公司 | 溝槽式閘極金氧半場效電晶體 |
JP7374795B2 (ja) * | 2020-02-05 | 2023-11-07 | 株式会社東芝 | 半導体装置 |
CN114093951A (zh) * | 2021-11-12 | 2022-02-25 | 济南市半导体元件实验所 | 一种抗emi的超结vdmos器件及制备方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2089119A (en) | 1980-12-10 | 1982-06-16 | Philips Electronic Associated | High voltage semiconductor devices |
US4933739A (en) * | 1988-04-26 | 1990-06-12 | Eliyahou Harari | Trench resistor structures for compact semiconductor memory and logic devices |
US5744851A (en) * | 1992-01-27 | 1998-04-28 | Harris Corporation | Biasing of island-surrounding material to suppress reduction of breakdown voltage due to field plate acting on buried layer/island junction between high and low impurity concentration regions |
US5895951A (en) * | 1996-04-05 | 1999-04-20 | Megamos Corporation | MOSFET structure and fabrication process implemented by forming deep and narrow doping regions through doping trenches |
DE19848828C2 (de) | 1998-10-22 | 2001-09-13 | Infineon Technologies Ag | Halbleiterbauelement mit kleiner Durchlaßspannung und hoher Sperrfähigkeit |
WO2000068997A1 (en) * | 1999-05-06 | 2000-11-16 | C.P. Clare Corporation | Mosfet with field reducing trenches in body region |
GB0003186D0 (en) | 2000-02-12 | 2000-04-05 | Koninkl Philips Electronics Nv | A semiconductor device |
GB0003184D0 (en) | 2000-02-12 | 2000-04-05 | Koninkl Philips Electronics Nv | A semiconductor device and a method of fabricating material for a semiconductor device |
-
2001
- 2001-02-22 GB GBGB0104342.1A patent/GB0104342D0/en not_active Ceased
-
2002
- 2002-02-07 US US10/068,921 patent/US6605862B2/en not_active Expired - Fee Related
- 2002-02-15 JP JP2002566557A patent/JP4125126B2/ja not_active Expired - Fee Related
- 2002-02-15 AT AT02712149T patent/ATE371957T1/de not_active IP Right Cessation
- 2002-02-15 EP EP02712149A patent/EP1368837B1/de not_active Expired - Lifetime
- 2002-02-15 KR KR1020027014099A patent/KR100900852B1/ko not_active IP Right Cessation
- 2002-02-15 DE DE60222099T patent/DE60222099T2/de not_active Expired - Lifetime
- 2002-02-15 WO PCT/IB2002/000478 patent/WO2002067332A2/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1368837B1 (de) | 2007-08-29 |
WO2002067332A2 (en) | 2002-08-29 |
JP4125126B2 (ja) | 2008-07-30 |
US6605862B2 (en) | 2003-08-12 |
JP2004519848A (ja) | 2004-07-02 |
GB0104342D0 (en) | 2001-04-11 |
WO2002067332A3 (en) | 2003-02-20 |
KR20020092439A (ko) | 2002-12-11 |
EP1368837A2 (de) | 2003-12-10 |
DE60222099T2 (de) | 2008-05-21 |
US20020130358A1 (en) | 2002-09-19 |
KR100900852B1 (ko) | 2009-06-04 |
DE60222099D1 (de) | 2007-10-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE371957T1 (de) | Halbleiteranordnungen mit feldformungsgebieten | |
CN105322002B (zh) | 反向传导igbt | |
US7800175B2 (en) | Vertical power semiconductor device with high breakdown voltage corresponding to edge termination and device regions | |
GB0107408D0 (en) | Field effect transistor structure and method of manufacture | |
DE59914922D1 (de) | Leistungshalbleiterbauelement | |
WO2003003464A3 (en) | Hv-soi ldmos device with integrated diode to improve reliability and avalanche ruggedness | |
CN103872099B (zh) | 具有阶梯状边缘终端的半导体器件,以及用于制造半导体器件的方法 | |
AU2002338615A1 (en) | Power semiconductor devices and methods of forming same | |
TW200739750A (en) | Lateral power devices with self-biasing electrodes | |
GB0028031D0 (en) | Trench-gate field-effect transistors and their manufacture | |
EP1267415A3 (de) | Leistungshalbleiterbauelement mit RESURF-Schicht | |
US8378392B2 (en) | Trench MOSFET with body region having concave-arc shape | |
JP2010098123A (ja) | 半導体装置 | |
CN102569354A (zh) | 绝缘栅型双极晶体管及其制造方法 | |
WO2002031880A3 (en) | Trench dmos transistor with embedded trench schottky rectifier | |
US8008717B2 (en) | Semiconductor device | |
EP1096574A3 (de) | Leistungs-MOSFET mit einer Graben-Gateelektrode und Verfahren zu dessen Herstellung | |
JP2009060136A (ja) | 完全空乏領域化ボディ領域を有するロングチャネルトレンチゲート型パワーmosfet | |
TW200518206A (en) | Metal-oxide-semiconductor device formed in silicon-on-insulator | |
CN107482051B (zh) | 一种变禁带宽度的超结vdmos器件 | |
GB0103715D0 (en) | Semicondutor devices and their peripheral termination | |
US20080191273A1 (en) | Mosfet device having improved avalanche capability | |
TW200731535A (en) | Semiconductor device | |
US20140054683A1 (en) | Trench devices having improved breakdown voltages and method for manufacturing same | |
JP2006012967A (ja) | 半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |