ATE363453T1 - Torsionsfeder für mems-struktur - Google Patents

Torsionsfeder für mems-struktur

Info

Publication number
ATE363453T1
ATE363453T1 AT03002836T AT03002836T ATE363453T1 AT E363453 T1 ATE363453 T1 AT E363453T1 AT 03002836 T AT03002836 T AT 03002836T AT 03002836 T AT03002836 T AT 03002836T AT E363453 T1 ATE363453 T1 AT E363453T1
Authority
AT
Austria
Prior art keywords
torsion spring
beams
mems structure
present
connection bar
Prior art date
Application number
AT03002836T
Other languages
English (en)
Inventor
Hee-Moon Jeong
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of ATE363453T1 publication Critical patent/ATE363453T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/007—For controlling stiffness, e.g. ribs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Springs (AREA)
AT03002836T 2002-02-07 2003-02-07 Torsionsfeder für mems-struktur ATE363453T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2002-0007052A KR100465162B1 (ko) 2002-02-07 2002-02-07 멤스 구조물용 비틀림스프링

Publications (1)

Publication Number Publication Date
ATE363453T1 true ATE363453T1 (de) 2007-06-15

Family

ID=27656407

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03002836T ATE363453T1 (de) 2002-02-07 2003-02-07 Torsionsfeder für mems-struktur

Country Status (6)

Country Link
US (1) US6921952B2 (de)
EP (1) EP1338553B1 (de)
JP (1) JP2003231096A (de)
KR (1) KR100465162B1 (de)
AT (1) ATE363453T1 (de)
DE (1) DE60314027T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7177068B2 (en) * 2002-12-20 2007-02-13 Robert Bosch Gmbh Apparatus, method and system for providing enhanced mechanical protection for thin beams
DE102007051820A1 (de) 2007-04-02 2008-10-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches Bauelement mit erhöhter Steifigkeit
JP4980990B2 (ja) * 2008-06-25 2012-07-18 パナソニック株式会社 可動構造体及びそれを用いたマイクロミラー素子
TWM378928U (en) * 2009-07-29 2010-04-21 Pixart Imaging Inc Mems device and spring element of mems
CN102086017B (zh) * 2009-12-03 2014-11-26 原相科技股份有限公司 微机电元件及微机电弹簧元件
US8739627B2 (en) 2011-10-26 2014-06-03 Freescale Semiconductor, Inc. Inertial sensor with off-axis spring system
EP2972557A4 (de) * 2013-03-14 2016-11-02 Raviv Erlich Mems-scharniere mit verbesserter drehbarkeit
SG10201408210UA (en) 2013-11-22 2015-06-29 Agency Science Tech & Res Energy harvesting device and method for forming the same
US9822835B1 (en) 2014-02-20 2017-11-21 Hrl Laboratories, Llc Torsion springs with changeable stiffness
DE102018207783B4 (de) * 2018-05-17 2022-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Array aus MEMS mit jeweils einem beweglichen Strukturelement

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3326989B2 (ja) * 1994-08-25 2002-09-24 株式会社豊田中央研究所 振動子とその調整方法および角速度センサ
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
KR19980055040U (ko) * 1996-12-31 1998-10-07 박병재 범퍼의 범퍼빔 구조
US5969465A (en) * 1997-04-01 1999-10-19 Xros, Inc. Adjusting operating characteristics of micromachined torsional oscillators
US6249073B1 (en) * 1999-01-14 2001-06-19 The Regents Of The University Of Michigan Device including a micromechanical resonator having an operating frequency and method of extending same
JP2001004952A (ja) * 1999-06-24 2001-01-12 Victor Co Of Japan Ltd 光偏向子
WO2001053872A1 (en) * 2000-01-18 2001-07-26 Cornell Research Foundation, Inc. Single crystal silicon micromirror and array
US6668628B2 (en) * 2002-03-29 2003-12-30 Xerox Corporation Scanning probe system with spring probe

Also Published As

Publication number Publication date
EP1338553A3 (de) 2005-10-05
JP2003231096A (ja) 2003-08-19
EP1338553A2 (de) 2003-08-27
EP1338553B1 (de) 2007-05-30
KR100465162B1 (ko) 2005-01-13
US20030227114A1 (en) 2003-12-11
DE60314027T2 (de) 2007-11-22
KR20030067173A (ko) 2003-08-14
US6921952B2 (en) 2005-07-26
DE60314027D1 (de) 2007-07-12

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Legal Events

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