ATE359384T1 - Verfahren zur herstellung eines zerstäubungstargets - Google Patents

Verfahren zur herstellung eines zerstäubungstargets

Info

Publication number
ATE359384T1
ATE359384T1 AT03714926T AT03714926T ATE359384T1 AT E359384 T1 ATE359384 T1 AT E359384T1 AT 03714926 T AT03714926 T AT 03714926T AT 03714926 T AT03714926 T AT 03714926T AT E359384 T1 ATE359384 T1 AT E359384T1
Authority
AT
Austria
Prior art keywords
coefficient
thermal expansion
target
producing
compound
Prior art date
Application number
AT03714926T
Other languages
English (en)
Inventor
Ruben Vermeersch
Lintelo Johannes Te
Original Assignee
Bekaert Sa Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32892840&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE359384(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Bekaert Sa Nv filed Critical Bekaert Sa Nv
Application granted granted Critical
Publication of ATE359384T1 publication Critical patent/ATE359384T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AT03714926T 2003-02-20 2003-02-20 Verfahren zur herstellung eines zerstäubungstargets ATE359384T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2003/050026 WO2004074541A1 (en) 2003-02-20 2003-02-20 A method of manufacturing a sputter target

Publications (1)

Publication Number Publication Date
ATE359384T1 true ATE359384T1 (de) 2007-05-15

Family

ID=32892840

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03714926T ATE359384T1 (de) 2003-02-20 2003-02-20 Verfahren zur herstellung eines zerstäubungstargets

Country Status (8)

Country Link
US (1) US20060175198A1 (de)
EP (1) EP1592823B1 (de)
JP (1) JP2006514160A (de)
CN (1) CN100471986C (de)
AT (1) ATE359384T1 (de)
AU (1) AU2003219135A1 (de)
DE (1) DE60313222T2 (de)
WO (1) WO2004074541A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2607091C (en) * 2005-05-05 2014-08-12 H.C. Starck Gmbh Coating process for manufacture or reprocessing of sputter targets and x-ray anodes
DE102006009749A1 (de) * 2006-03-02 2007-09-06 FNE Forschungsinstitut für Nichteisen-Metalle Freiberg GmbH Targetanordnung
US20080078268A1 (en) 2006-10-03 2008-04-03 H.C. Starck Inc. Process for preparing metal powders having low oxygen content, powders so-produced and uses thereof
US20080145688A1 (en) 2006-12-13 2008-06-19 H.C. Starck Inc. Method of joining tantalum clade steel structures
US8197894B2 (en) 2007-05-04 2012-06-12 H.C. Starck Gmbh Methods of forming sputtering targets
US8741158B2 (en) 2010-10-08 2014-06-03 Ut-Battelle, Llc Superhydrophobic transparent glass (STG) thin film articles
US8246903B2 (en) 2008-09-09 2012-08-21 H.C. Starck Inc. Dynamic dehydriding of refractory metal powders
JP5348394B2 (ja) * 2009-03-13 2013-11-20 三菱マテリアル株式会社 太陽電池用の（Ｚｎ，Ａｌ）Ｏ系透明電極層およびその形成に用いられるＺｎＯ−Ａｌ２Ｏ３系スパッタリングターゲット
JP5348399B2 (ja) * 2009-03-31 2013-11-20 三菱マテリアル株式会社 太陽電池用の（Ｚｎ，Ｇａ，Ａｌ）Ｏ系透明電極層およびその形成に用いられるＺｎＯ−Ｇａ２Ｏ３−Ａｌ系スパッタリングターゲット
EP2287356A1 (de) 2009-07-31 2011-02-23 Bekaert Advanced Coatings NV. Sputtertarget, Verfahren und Vorrichtung zur Herstellung von Sputtertargets
US11292919B2 (en) 2010-10-08 2022-04-05 Ut-Battelle, Llc Anti-fingerprint coatings
US9120183B2 (en) 2011-09-29 2015-09-01 H.C. Starck Inc. Methods of manufacturing large-area sputtering targets
WO2013122927A1 (en) 2012-02-14 2013-08-22 Tosoh Smd, Inc. Low deflection sputtering target assembly and methods of making same
JP6014451B2 (ja) * 2012-03-02 2016-10-25 住友化学株式会社 酸化亜鉛系焼結体の製造方法
US9771656B2 (en) * 2012-08-28 2017-09-26 Ut-Battelle, Llc Superhydrophobic films and methods for making superhydrophobic films
US20150239773A1 (en) 2014-02-21 2015-08-27 Ut-Battelle, Llc Transparent omniphobic thin film articles
CN106607667B (zh) * 2015-10-26 2018-05-08 宁波江丰电子材料股份有限公司 靶材组件的制造方法
BE1028481B1 (nl) * 2020-07-14 2022-02-14 Soleras Advanced Coatings Bv Sputterdoel met grote densiteit

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1992017622A1 (en) * 1991-04-08 1992-10-15 Tosoh Smd, Inc. Thermally compatible sputter target and backing plate assembly
DE4242079A1 (de) * 1992-12-14 1994-06-16 Leybold Ag Target für eine in einer evakuierbaren mit einem Prozeßgas flutbaren Prozeßkammer angeordneten Kathode
US5338999A (en) * 1993-05-05 1994-08-16 Motorola, Inc. Piezoelectric lead zirconium titanate device and method for forming same
US5836506A (en) * 1995-04-21 1998-11-17 Sony Corporation Sputter target/backing plate assembly and method of making same
EP0761838B1 (de) * 1995-08-18 2001-08-08 W.C. Heraeus GmbH & Co. KG Target für die Kathodenzerstäubung und Verfahren zur Herstellung eines solchen Targets
JP4046407B2 (ja) * 1998-04-01 2008-02-13 ヤマハ株式会社 スパッタ法及び配線形成法
JP3628554B2 (ja) * 1999-07-15 2005-03-16 株式会社日鉱マテリアルズ スパッタリングターゲット
JP2001262326A (ja) * 2000-03-16 2001-09-26 Nikko Materials Co Ltd 酸化インジウム−金属錫混合粉末及び同混合粉末を原料とするｉｔｏスパッタリングターゲット並びに同ターゲットの製造方法
US6596131B1 (en) * 2000-10-30 2003-07-22 Honeywell International Inc. Carbon fiber and copper support for physical vapor deposition target assembly and method of forming

Also Published As

Publication number Publication date
EP1592823B1 (de) 2007-04-11
WO2004074541A1 (en) 2004-09-02
DE60313222D1 (de) 2007-05-24
EP1592823A1 (de) 2005-11-09
JP2006514160A (ja) 2006-04-27
US20060175198A1 (en) 2006-08-10
CN1742111A (zh) 2006-03-01
CN100471986C (zh) 2009-03-25
DE60313222T2 (de) 2008-01-03
AU2003219135A1 (en) 2004-09-09

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