ATE354782T1 - Optische freiform-oberflächen-messvorrichtung und verfahren - Google Patents

Optische freiform-oberflächen-messvorrichtung und verfahren

Info

Publication number
ATE354782T1
ATE354782T1 AT04788506T AT04788506T ATE354782T1 AT E354782 T1 ATE354782 T1 AT E354782T1 AT 04788506 T AT04788506 T AT 04788506T AT 04788506 T AT04788506 T AT 04788506T AT E354782 T1 ATE354782 T1 AT E354782T1
Authority
AT
Austria
Prior art keywords
measuring
measuring apparatus
measurement
distance
predetermined measurement
Prior art date
Application number
AT04788506T
Other languages
English (en)
Inventor
Rens Henselmans
Petrus Carolus Johann Rosielle
Original Assignee
Tno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tno filed Critical Tno
Application granted granted Critical
Publication of ATE354782T1 publication Critical patent/ATE354782T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068—Auto-alignment of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT04788506T 2003-09-29 2004-09-29 Optische freiform-oberflächen-messvorrichtung und verfahren ATE354782T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP03078094A EP1519144A1 (de) 2003-09-29 2003-09-29 Vorrichtung und Verfahren zur optischen Vermessung einer freigeformten Oberfläche

Publications (1)

Publication Number Publication Date
ATE354782T1 true ATE354782T1 (de) 2007-03-15

Family

ID=34178555

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04788506T ATE354782T1 (de) 2003-09-29 2004-09-29 Optische freiform-oberflächen-messvorrichtung und verfahren

Country Status (11)

Country Link
US (1) US7492468B2 (de)
EP (2) EP1519144A1 (de)
AT (1) ATE354782T1 (de)
CY (1) CY1107631T1 (de)
DE (1) DE602004004916T2 (de)
DK (1) DK1668318T3 (de)
ES (1) ES2281838T3 (de)
PL (1) PL1668318T3 (de)
PT (1) PT1668318E (de)
SI (1) SI1668318T1 (de)
WO (1) WO2005031255A1 (de)

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WO2007087301A2 (en) * 2006-01-23 2007-08-02 Zygo Corporation Interferometer system for monitoring an object
DE102007024197B4 (de) 2007-05-24 2017-01-05 Robert Bosch Gmbh Vorrichtung und Verfahren zur Formmessung von Freiform-Flächen
EP2037214A1 (de) * 2007-09-14 2009-03-18 Leica Geosystems AG Verfahren und Messgerät zum vermessen von Oberflächen
US8243281B2 (en) * 2007-09-25 2012-08-14 Carl Zeiss Smt Gmbh Method and system for measuring a surface of an object
US20090090023A1 (en) * 2007-10-01 2009-04-09 Kyle Daniel Rackiewicz Snakebite protective footwear
CN101408405B (zh) * 2007-10-09 2011-01-26 财团法人工业技术研究院 光学式非球面测量***及其平台
DE102008018143A1 (de) * 2008-04-10 2009-10-15 Trioptics Gmbh Vorrichtung und Verfahren zur topographischen Vermessung von Oberflächen von Gegenständen
GB2464509C (en) 2008-10-17 2014-05-21 Taylor Hobson Ltd Surface measurement instrument and method
US8120781B2 (en) * 2008-11-26 2012-02-21 Zygo Corporation Interferometric systems and methods featuring spectral analysis of unevenly sampled data
EP2236978B8 (de) 2009-04-01 2013-12-04 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Optische Messvorrichtung und Verfahren zur Bestimmung der Form eines Objekts und eine Maschine zum Formen des Objekts
DE102011011065B4 (de) 2011-02-11 2013-04-04 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
CN102252611B (zh) * 2011-05-09 2013-11-27 深圳市澎湃图像技术有限公司 几何定位方法
JP2013213802A (ja) * 2012-03-09 2013-10-17 Canon Inc 計測装置
DE102012017015B4 (de) 2012-08-20 2015-03-19 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
US9212901B2 (en) * 2013-04-17 2015-12-15 Corning Incorporated Apparatus and methods for performing wavefront-based and profile-based measurements of an aspheric surface
JP2015052536A (ja) * 2013-09-06 2015-03-19 キヤノン株式会社 計測装置
DE102014007203A1 (de) * 2014-05-19 2015-11-19 Luphos Gmbh Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts
DE102014007201B4 (de) * 2014-05-19 2016-03-10 Luphos Gmbh Vorrichtung und Verfahren zur geometrischen Vermessung eines Objekts
EP3608626A1 (de) * 2018-08-10 2020-02-12 Taylor Hobson Limited Vorrichtung und verfahren zur geometrischen vermessung eines objekts
NL2022539B1 (en) 2019-02-08 2020-08-19 Dutch United Instr B V Positioning system for positioning an object

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575942A (en) * 1982-10-18 1986-03-18 Hitachi, Ltd. Ultra-precision two-dimensional moving apparatus
DE3914849A1 (de) * 1989-05-05 1990-11-08 Mauser Werke Oberndorf Messeinrichtung
DE4114244A1 (de) * 1991-05-02 1992-11-05 Mauser Werke Oberndorf Messeinrichtung
US5699621A (en) * 1996-02-21 1997-12-23 Massachusetts Institute Of Technology Positioner with long travel in two dimensions
US5640270A (en) * 1996-03-11 1997-06-17 Wyko Corporation Orthogonal-scanning microscope objective for vertical-scanning and phase-shifting interferometry
US6008901A (en) * 1997-08-22 1999-12-28 Canon Kabushiki Kaisha Shape measuring heterodyne interferometer with multiplexed photodetector aaray or inclined probe head
JP2001056213A (ja) * 1999-08-20 2001-02-27 Canon Inc 面形状測定装置および測定方法
JP3792675B2 (ja) * 2003-06-05 2006-07-05 ファナック株式会社 微細位置決め装置及び工具補正方法
JP4474150B2 (ja) * 2003-11-28 2010-06-02 キヤノン株式会社 偏心測定方法
KR100568206B1 (ko) * 2004-02-13 2006-04-05 삼성전자주식회사 스테이지장치

Also Published As

Publication number Publication date
WO2005031255A1 (en) 2005-04-07
DE602004004916T2 (de) 2007-11-22
DK1668318T3 (da) 2007-06-18
PL1668318T3 (pl) 2007-07-31
EP1668318B1 (de) 2007-02-21
DE602004004916D1 (de) 2007-04-05
US20060290942A1 (en) 2006-12-28
EP1668318A1 (de) 2006-06-14
US7492468B2 (en) 2009-02-17
SI1668318T1 (sl) 2007-08-31
ES2281838T3 (es) 2007-10-01
PT1668318E (pt) 2007-05-31
EP1519144A1 (de) 2005-03-30
CY1107631T1 (el) 2013-04-18

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