ATE343661T1 - Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter - Google Patents

Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter

Info

Publication number
ATE343661T1
ATE343661T1 AT00919156T AT00919156T ATE343661T1 AT E343661 T1 ATE343661 T1 AT E343661T1 AT 00919156 T AT00919156 T AT 00919156T AT 00919156 T AT00919156 T AT 00919156T AT E343661 T1 ATE343661 T1 AT E343661T1
Authority
AT
Austria
Prior art keywords
plastic container
electrode
dlc
dlc film
wall
Prior art date
Application number
AT00919156T
Other languages
English (en)
Inventor
Yuuji Yamashita
Tsuyoshi M Kage
Shigeki Mori
Original Assignee
Mitsubishi Shoji Plastics Corp
Hokkai Can
Kirin Brewery
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29980699A external-priority patent/JP3901888B2/ja
Priority claimed from JP2000048386A external-priority patent/JP4159223B2/ja
Application filed by Mitsubishi Shoji Plastics Corp, Hokkai Can, Kirin Brewery filed Critical Mitsubishi Shoji Plastics Corp
Application granted granted Critical
Publication of ATE343661T1 publication Critical patent/ATE343661T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/045Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Chemical Vapour Deposition (AREA)
AT00919156T 1999-05-19 2000-04-21 Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter ATE343661T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP13921199 1999-05-19
JP29980699A JP3901888B2 (ja) 1999-05-19 1999-10-21 ダイヤモンドライクカーボン膜コーティングプラスチック容器の製造装置及びその製造方法
JP2000048386A JP4159223B2 (ja) 2000-02-24 2000-02-24 Dlc膜および炭素膜コーティングプラスチック容器

Publications (1)

Publication Number Publication Date
ATE343661T1 true ATE343661T1 (de) 2006-11-15

Family

ID=27317815

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00919156T ATE343661T1 (de) 1999-05-19 2000-04-21 Dlc-film, dlc-beschichteter plastikbehälter und verfahren und vorrichtung zur herstellung solcher behälter

Country Status (10)

Country Link
US (1) US7166336B1 (de)
EP (1) EP1197581B1 (de)
KR (2) KR100610130B1 (de)
CN (1) CN1174115C (de)
AT (1) ATE343661T1 (de)
AU (1) AU768043B2 (de)
DE (1) DE60031544T2 (de)
ES (1) ES2275502T3 (de)
HK (1) HK1045542B (de)
WO (1) WO2000071780A1 (de)

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* Cited by examiner, † Cited by third party
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WO2001047777A1 (fr) * 1999-12-27 2001-07-05 Mitsubishi Shoji Plastics Corporation Conteneur en pet pour aliments et boissons contenant de la resine recyclee et presentant un film de revetement en cda forme sur la surface du film
DE60234142D1 (de) * 2001-03-27 2009-12-10 Nipro Corp Albuminlösung enthaltender Kunststoffbehälter
JP4241050B2 (ja) * 2001-04-19 2009-03-18 日精エー・エス・ビー機械株式会社 ガスバリア性合成樹脂製容器及びその製造装置並びに物品入りガスバリア性合成樹脂製容器
JP4132982B2 (ja) * 2002-05-28 2008-08-13 麒麟麦酒株式会社 Dlc膜コーティングプラスチック容器の製造装置
CN100337881C (zh) * 2002-05-28 2007-09-19 麒麟麦酒株式会社 包覆有dlc薄膜的塑料容器及其制造设备和制造方法
DE102004020185B4 (de) * 2004-04-22 2013-01-17 Schott Ag Verfahren und Vorrichtung für die Innenbeschichtung von Hohlkörpern sowie Verwendung der Vorrichtung
FR2872148B1 (fr) * 2004-06-24 2006-09-22 Sidel Sas Machine de traitement de bouteilles equipee d'une cartouche de raccordement interchangeable
CN101223299B (zh) * 2005-07-12 2010-12-01 三菱重工食品包装机械株式会社 在容器内表面形成覆膜的覆膜形成装置及内表面覆膜容器的制造方法
US20100211180A1 (en) * 2006-03-21 2010-08-19 Jet Engineering, Inc. Tetrahedral Amorphous Carbon Coated Medical Devices
US8950614B2 (en) * 2007-08-14 2015-02-10 Toyo Seikan Kaisha, Ltd. Biodegradable resin container with a vacuum-evaporated film and method of forming a vacuum-evaporated film
JP5073545B2 (ja) * 2008-03-26 2012-11-14 東京エレクトロン株式会社 プラズマ処理装置、プラズマ処理方法
US8062470B2 (en) * 2008-05-12 2011-11-22 Yuri Glukhoy Method and apparatus for application of thin coatings from plasma onto inner surfaces of hollow containers
US20090284421A1 (en) * 2008-05-16 2009-11-19 Yuri Glukhoy RF antenna assembly having an antenna with transversal magnetic field for generation of inductively coupled plasma
WO2010095011A1 (en) 2009-02-18 2010-08-26 Council Of Scientific & Industrial Research Process to deposit diamond like carbon as protective coating on inner surface of a shaped object.
US20110001103A1 (en) * 2009-07-01 2011-01-06 Chi-Kuang Chen Elevating mechanism for measuring concentrations of medicines
CN103717194B (zh) * 2011-07-28 2018-02-27 泰尔茂株式会社 红细胞保存容器
KR101644425B1 (ko) 2015-09-22 2016-08-01 정순태 내열 음료용기 제조방법
WO2018226370A1 (en) * 2017-06-08 2018-12-13 Applied Materials, Inc. High-density low temperature carbon films for hardmask and other patterning applications
KR102229237B1 (ko) * 2017-08-31 2021-03-18 새한프라텍 주식회사 우수한 가스 배리어성을 갖는 플라스틱 용기 및 그 제조방법
WO2019199681A1 (en) 2018-04-09 2019-10-17 Applied Materials, Inc. Carbon hard masks for patterning applications and methods related thereto
KR20220037456A (ko) 2019-07-01 2022-03-24 어플라이드 머티어리얼스, 인코포레이티드 플라즈마 결합 재료들을 최적화하는 것에 의한 막 특성들의 조절
US11664226B2 (en) 2020-06-29 2023-05-30 Applied Materials, Inc. Methods for producing high-density carbon films for hardmasks and other patterning applications
US11664214B2 (en) 2020-06-29 2023-05-30 Applied Materials, Inc. Methods for producing high-density, nitrogen-doped carbon films for hardmasks and other patterning applications
CN115613004A (zh) * 2021-07-12 2023-01-17 北京印刷学院 内壁镀膜的塑料管及制备方法

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JPS634068A (ja) 1986-06-23 1988-01-09 Nec Corp ダイヤモンド状カ−ボン膜
US4809876A (en) * 1987-08-27 1989-03-07 Aluminum Company Of America Container body having improved gas barrier properties
US5637353A (en) * 1990-09-27 1997-06-10 Monsanto Company Abrasion wear resistant coated substrate product
JPH06280012A (ja) 1993-03-29 1994-10-04 Canon Inc 炭素被膜の製造方法
JPH0853116A (ja) * 1994-08-11 1996-02-27 Kirin Brewery Co Ltd 炭素膜コーティングプラスチック容器
JP2788412B2 (ja) * 1994-08-11 1998-08-20 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
JP3072269B2 (ja) 1997-02-19 2000-07-31 麒麟麦酒株式会社 炭素膜コーティングプラスチック容器の製造装置および製造方法
WO1998037259A1 (fr) 1997-02-19 1998-08-27 Kirin Beer Kabushiki Kaisha Procede et appareil pour produire un recipient plastique presentant un pelliculage en carbone
JP3669138B2 (ja) 1998-03-05 2005-07-06 日新電機株式会社 プラズマcvd法、プラズマcvd装置及び電極
JP3698887B2 (ja) * 1998-03-16 2005-09-21 株式会社アルバック ダイヤモンド状炭素膜の製造装置
FR2776540B1 (fr) * 1998-03-27 2000-06-02 Sidel Sa Recipient en matiere a effet barriere et procede et appareil pour sa fabrication
WO2001047777A1 (fr) * 1999-12-27 2001-07-05 Mitsubishi Shoji Plastics Corporation Conteneur en pet pour aliments et boissons contenant de la resine recyclee et presentant un film de revetement en cda forme sur la surface du film
JP2001240115A (ja) * 2000-02-24 2001-09-04 Mitsubishi Shoji Plast Kk 乾燥固体食品用プラスチック容器
JP4492985B2 (ja) * 2000-02-24 2010-06-30 三菱商事プラスチック株式会社 液体医薬品用プラスチック容器及び液体医薬品の保存回収方法
FR2812666B1 (fr) * 2000-08-01 2003-08-08 Sidel Sa Revetement barriere comportant une couche protectrice, procede d'obtention d'un tel revetement et recipient muni d'un tel revetement
FR2812665B1 (fr) * 2000-08-01 2003-08-08 Sidel Sa Procede de depot de revetement par plasma, dispositif de mise en oeuvre du procede et revetement obtenu par un tel procede
TW497098B (en) * 2000-11-04 2002-08-01 Li-Shin Jou Optical recording medium and recording method
WO2002051707A1 (fr) * 2000-12-25 2002-07-04 Mitsubishi Shoji Plastics Corporation Appareil de production de recipients plastiques a revetement de cda et procede associe
JP4241050B2 (ja) * 2001-04-19 2009-03-18 日精エー・エス・ビー機械株式会社 ガスバリア性合成樹脂製容器及びその製造装置並びに物品入りガスバリア性合成樹脂製容器
CN100337881C (zh) * 2002-05-28 2007-09-19 麒麟麦酒株式会社 包覆有dlc薄膜的塑料容器及其制造设备和制造方法
JP4149748B2 (ja) * 2002-06-24 2008-09-17 三菱商事プラスチック株式会社 ロータリー型量産用cvd成膜装置及びプラスチック容器内表面へのcvd膜成膜方法

Also Published As

Publication number Publication date
EP1197581B1 (de) 2006-10-25
HK1045542B (zh) 2005-06-03
KR20020019440A (ko) 2002-03-12
CN1351676A (zh) 2002-05-29
DE60031544T2 (de) 2007-08-02
AU768043B2 (en) 2003-11-27
CN1174115C (zh) 2004-11-03
DE60031544D1 (de) 2006-12-07
WO2000071780A1 (fr) 2000-11-30
HK1045542A1 (en) 2002-11-29
US7166336B1 (en) 2007-01-23
EP1197581A4 (de) 2002-10-30
KR100610130B1 (ko) 2006-08-09
AU3987900A (en) 2000-12-12
EP1197581A1 (de) 2002-04-17
ES2275502T3 (es) 2007-06-16
KR100549033B1 (ko) 2006-02-02
KR20050105285A (ko) 2005-11-03

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