ATE321429T1 - Breitbandiger miniaturwandler - Google Patents

Breitbandiger miniaturwandler

Info

Publication number
ATE321429T1
ATE321429T1 AT01959715T AT01959715T ATE321429T1 AT E321429 T1 ATE321429 T1 AT E321429T1 AT 01959715 T AT01959715 T AT 01959715T AT 01959715 T AT01959715 T AT 01959715T AT E321429 T1 ATE321429 T1 AT E321429T1
Authority
AT
Austria
Prior art keywords
miniature converter
broadband miniature
broadband
converter
film
Prior art date
Application number
AT01959715T
Other languages
German (de)
English (en)
Inventor
Michael Pedersen
Peter V Loeppert
Sung Bok Lee
Original Assignee
Knowles Electronics Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/910,110 external-priority patent/US6987859B2/en
Application filed by Knowles Electronics Llc filed Critical Knowles Electronics Llc
Application granted granted Critical
Publication of ATE321429T1 publication Critical patent/ATE321429T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Silicon Compounds (AREA)
  • Amplifiers (AREA)
  • Inorganic Insulating Materials (AREA)
  • Silicon Polymers (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
AT01959715T 2000-08-11 2001-08-10 Breitbandiger miniaturwandler ATE321429T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US63740100A 2000-08-11 2000-08-11
US09/910,110 US6987859B2 (en) 2001-07-20 2001-07-20 Raised microstructure of silicon based device

Publications (1)

Publication Number Publication Date
ATE321429T1 true ATE321429T1 (de) 2006-04-15

Family

ID=27092826

Family Applications (2)

Application Number Title Priority Date Filing Date
AT04076015T ATE392790T1 (de) 2000-08-11 2001-08-10 Erhobene mikrostrukturen
AT01959715T ATE321429T1 (de) 2000-08-11 2001-08-10 Breitbandiger miniaturwandler

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT04076015T ATE392790T1 (de) 2000-08-11 2001-08-10 Erhobene mikrostrukturen

Country Status (9)

Country Link
EP (2) EP1310136B1 (fr)
JP (3) JP4338395B2 (fr)
KR (1) KR100571967B1 (fr)
CN (2) CN101867858B (fr)
AT (2) ATE392790T1 (fr)
AU (1) AU2001281241A1 (fr)
DE (2) DE60133679T2 (fr)
DK (2) DK1469701T3 (fr)
WO (1) WO2002015636A2 (fr)

Families Citing this family (119)

* Cited by examiner, † Cited by third party
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US7434305B2 (en) 2000-11-28 2008-10-14 Knowles Electronics, Llc. Method of manufacturing a microphone
US7166910B2 (en) 2000-11-28 2007-01-23 Knowles Electronics Llc Miniature silicon condenser microphone
US8617934B1 (en) 2000-11-28 2013-12-31 Knowles Electronics, Llc Methods of manufacture of top port multi-part surface mount silicon condenser microphone packages
US7439616B2 (en) 2000-11-28 2008-10-21 Knowles Electronics, Llc Miniature silicon condenser microphone
US6859542B2 (en) 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
US7023066B2 (en) 2001-11-20 2006-04-04 Knowles Electronics, Llc. Silicon microphone
KR100437681B1 (ko) * 2002-04-15 2004-06-30 부전전자부품 주식회사 지향성 마이크로폰
DE10238523B4 (de) 2002-08-22 2014-10-02 Epcos Ag Verkapseltes elektronisches Bauelement und Verfahren zur Herstellung
US6781231B2 (en) 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
JP2004356707A (ja) * 2003-05-27 2004-12-16 Hosiden Corp 音響検出機構
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DE102004020204A1 (de) 2004-04-22 2005-11-10 Epcos Ag Verkapseltes elektrisches Bauelement und Verfahren zur Herstellung
US7346178B2 (en) * 2004-10-29 2008-03-18 Silicon Matrix Pte. Ltd. Backplateless silicon microphone
US7329933B2 (en) 2004-10-29 2008-02-12 Silicon Matrix Pte. Ltd. Silicon microphone with softly constrained diaphragm
JP4539450B2 (ja) 2004-11-04 2010-09-08 オムロン株式会社 容量型振動センサ及びその製造方法
KR100685092B1 (ko) * 2005-03-14 2007-02-22 주식회사 케이이씨 Ｍｅｍｓ 공정을 이용한 마이크로폰 및 그 제조 방법
US7885423B2 (en) 2005-04-25 2011-02-08 Analog Devices, Inc. Support apparatus for microphone diaphragm
US7449356B2 (en) 2005-04-25 2008-11-11 Analog Devices, Inc. Process of forming a microphone using support member
US7825484B2 (en) 2005-04-25 2010-11-02 Analog Devices, Inc. Micromachined microphone and multisensor and method for producing same
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US8059842B2 (en) 2005-09-09 2011-11-15 Yamaha Corporation Capacitor microphone
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KR100785803B1 (ko) * 2005-12-07 2007-12-13 한국전자통신연구원 판 스프링 구조를 갖는 초소형 마이크로 폰, 스피커 및이를 이용한 음성 인식／합성장치
DE102006001493B4 (de) * 2006-01-11 2007-10-18 Austriamicrosystems Ag MEMS-Sensor und Verfahren zur Herstellung
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JP5412031B2 (ja) * 2007-07-24 2014-02-12 ローム株式会社 Ｍｅｍｓセンサ
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JP6930101B2 (ja) * 2016-12-12 2021-09-01 オムロン株式会社 音響センサ及び静電容量型トランスデューサ
KR102322258B1 (ko) * 2017-05-19 2021-11-04 현대자동차 주식회사 마이크로폰 및 그 제조 방법
DE102017217151B3 (de) 2017-09-27 2019-01-03 Robert Bosch Gmbh Mikromechanischer Sensor
JP7067891B2 (ja) 2017-10-18 2022-05-16 Ｍｍｉセミコンダクター株式会社 トランスデューサ
DE112019005007T5 (de) 2018-10-05 2021-07-15 Knowles Electronics, Llc Akustikwandler mit einer Niederdruckzone und Membranen, die eine erhöhte Nachgiebigkeit aufweisen
CN112823532B (zh) 2018-10-05 2022-05-31 美商楼氏电子有限公司 具有入口防护部的麦克风设备
CN112789239A (zh) 2018-10-05 2021-05-11 美商楼氏电子有限公司 形成包括褶皱的mems振膜的方法
CN110657880B (zh) * 2019-09-19 2022-05-03 天津大学 一种基于共振空气腔的新型水听器
CN111405444B (zh) * 2020-03-20 2022-01-25 西人马联合测控（泉州）科技有限公司 一种振膜带孔的电容式麦克风及其制造方法
US11528546B2 (en) 2021-04-05 2022-12-13 Knowles Electronics, Llc Sealed vacuum MEMS die
US11540048B2 (en) 2021-04-16 2022-12-27 Knowles Electronics, Llc Reduced noise MEMS device with force feedback
US11649161B2 (en) 2021-07-26 2023-05-16 Knowles Electronics, Llc Diaphragm assembly with non-uniform pillar distribution
US11772961B2 (en) 2021-08-26 2023-10-03 Knowles Electronics, Llc MEMS device with perimeter barometric relief pierce
US11780726B2 (en) 2021-11-03 2023-10-10 Knowles Electronics, Llc Dual-diaphragm assembly having center constraint

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Also Published As

Publication number Publication date
CN1498513A (zh) 2004-05-19
DE60133679D1 (de) 2008-05-29
KR100571967B1 (ko) 2006-04-18
JP2004506394A (ja) 2004-02-26
JP2007116721A (ja) 2007-05-10
EP1469701A3 (fr) 2005-11-16
KR20030033026A (ko) 2003-04-26
EP1469701A2 (fr) 2004-10-20
EP1469701B1 (fr) 2008-04-16
JP2009153203A (ja) 2009-07-09
WO2002015636A2 (fr) 2002-02-21
JP5049312B2 (ja) 2012-10-17
DE60118208T2 (de) 2007-04-12
ATE392790T1 (de) 2008-05-15
JP4338395B2 (ja) 2009-10-07
EP1310136B1 (fr) 2006-03-22
DK1469701T3 (da) 2008-08-18
CN101867858A (zh) 2010-10-20
CN101867858B (zh) 2012-02-22
CN1498513B (zh) 2010-07-14
AU2001281241A1 (en) 2002-02-25
WO2002015636A3 (fr) 2002-10-24
DK1310136T3 (da) 2006-07-31
EP1310136A2 (fr) 2003-05-14
DE60133679T2 (de) 2009-06-10
DE60118208D1 (de) 2006-05-11

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