ATE312059T1 - Verfahren zur rückgewinnung von oniumhydroxiden aus oniumverbindungen enthaltenden lösungen - Google Patents

Verfahren zur rückgewinnung von oniumhydroxiden aus oniumverbindungen enthaltenden lösungen

Info

Publication number
ATE312059T1
ATE312059T1 AT01977876T AT01977876T ATE312059T1 AT E312059 T1 ATE312059 T1 AT E312059T1 AT 01977876 T AT01977876 T AT 01977876T AT 01977876 T AT01977876 T AT 01977876T AT E312059 T1 ATE312059 T1 AT E312059T1
Authority
AT
Austria
Prior art keywords
onium
hydroxide
recovering
hydroxides
cation exchange
Prior art date
Application number
AT01977876T
Other languages
English (en)
Inventor
Takao Niinobe
Original Assignee
Sachem Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sachem Inc filed Critical Sachem Inc
Application granted granted Critical
Publication of ATE312059T1 publication Critical patent/ATE312059T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • B01D15/08—Selective adsorption, e.g. chromatography
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3092—Recovery of material; Waste processing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J49/00—Regeneration or reactivation of ion-exchangers; Apparatus therefor
    • B01J49/50—Regeneration or reactivation of ion-exchangers; Apparatus therefor characterised by the regeneration reagents
    • B01J49/53—Regeneration or reactivation of ion-exchangers; Apparatus therefor characterised by the regeneration reagents for cationic exchangers
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Water Supply & Treatment (AREA)
  • Analytical Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
AT01977876T 2000-10-20 2001-09-27 Verfahren zur rückgewinnung von oniumhydroxiden aus oniumverbindungen enthaltenden lösungen ATE312059T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/693,293 US6508940B1 (en) 2000-10-20 2000-10-20 Process for recovering onium hydroxides from solutions containing onium compounds
PCT/US2001/042429 WO2002034675A1 (en) 2000-10-20 2001-09-27 Process for recovering onium hydroxides from solutions containing onium compounds

Publications (1)

Publication Number Publication Date
ATE312059T1 true ATE312059T1 (de) 2005-12-15

Family

ID=24784083

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01977876T ATE312059T1 (de) 2000-10-20 2001-09-27 Verfahren zur rückgewinnung von oniumhydroxiden aus oniumverbindungen enthaltenden lösungen

Country Status (15)

Country Link
US (1) US6508940B1 (de)
EP (1) EP1337470B1 (de)
JP (1) JP4142432B2 (de)
KR (1) KR100676590B1 (de)
CN (1) CN1236454C (de)
AT (1) ATE312059T1 (de)
AU (1) AU2001296960A1 (de)
CA (1) CA2424110C (de)
DE (1) DE60115704T2 (de)
ES (1) ES2257448T3 (de)
HK (1) HK1059770A1 (de)
IL (2) IL155496A0 (de)
MY (1) MY117670A (de)
TW (1) TWI304795B (de)
WO (1) WO2002034675A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020158225A1 (en) * 2000-12-20 2002-10-31 Gyula Vigh Buffer compositions with volatile combustion products for use with gas-phase or vapor-phase element-specific detectors
WO2004101147A1 (de) * 2003-05-14 2004-11-25 Wp Engineering Limited Regenerationsverfahren für kationentauscher
US7972671B2 (en) * 2005-09-01 2011-07-05 Riordan Michael A Electret and card assembly and method of manufacture
US7572379B2 (en) * 2005-09-02 2009-08-11 Sachem, Inc. Removal of metal ions from onium hydroxides and onium salt solutions
JP5100104B2 (ja) * 2006-12-19 2012-12-19 日本錬水株式会社 タングステン酸アンモニウム水溶液の製造方法
TW201040133A (en) * 2009-05-01 2010-11-16 Mega Union Technology Inc Equipment for recycling tetramethyl ammonium hydroxide and method thereof
JP5483958B2 (ja) * 2009-06-03 2014-05-07 株式会社トクヤマ 水酸化テトラアルキルアンモニウムの製造方法
ES2656857T3 (es) 2011-02-10 2018-02-28 Nippon Soda Co., Ltd. Procedimiento para la producción de sal de amonio de fluorosulfonilimida
ES2668217T3 (es) 2011-03-03 2018-05-17 Nippon Soda Co., Ltd. Método de fabricación de sal de sufonilimida que contiene flúor
JP5808221B2 (ja) * 2011-10-28 2015-11-10 株式会社トクヤマ テトラアルキルアンモニウム塩溶液の製造方法
US20130175478A1 (en) * 2012-01-09 2013-07-11 Noble Ion Llc Reactive, non-corrosive, and dermal-friendly composition and methods for manufacturing
US9045446B2 (en) * 2012-07-05 2015-06-02 Arakawa Chemical Industries, Ltd. Method for producing epoxy compound
JP2016153373A (ja) * 2013-06-24 2016-08-25 株式会社トクヤマ 高濃度テトラアルキルアンモニウム塩溶液の製造方法
US9115050B2 (en) * 2013-12-30 2015-08-25 Sachem, Inc. Process for improved recovery of onium hydroxide from compositions containing process residues
CN110139829B (zh) * 2016-12-02 2023-10-13 埃科莱布美国股份有限公司 聚铝盐及其在制备高纯度胶体铝-二氧化硅复合颗粒和沸石中的用途
EP3364251A1 (de) * 2017-02-17 2018-08-22 GS Trading SA Gravurverfahren auf platten aus photopolymeren
WO2023166999A1 (ja) * 2022-03-03 2023-09-07 株式会社トクヤマ 精製第４級アンモニウム化合物水溶液の製造方法

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GB797295A (en) * 1955-09-21 1958-07-02 Ici Ltd Improvements in lubrication
US4394226A (en) * 1981-07-28 1983-07-19 Thiokol Corporation Electrolytic method for producing quaternary ammonium hydroxides
JPS60100690A (ja) 1983-11-02 1985-06-04 Tama Kagaku Kogyo Kk 水酸化第四アンモニウムの製造方法
JPS60131986A (ja) 1983-12-19 1985-07-13 Showa Denko Kk 高純度第４級アンモニウム水酸化物の製造方法
JPS60131985A (ja) 1983-12-19 1985-07-13 Showa Denko Kk 高純度第４級アンモニウム水酸化物の製造法
JPS61170588A (ja) 1985-01-25 1986-08-01 Tama Kagaku Kogyo Kk 水酸化第四アンモニウム水溶液の製造方法
US4880513A (en) 1986-06-20 1989-11-14 The Graver Company Method and apparatus for generating acid and base regenerants and the use thereof to regenerate ion-exchange resins
US4714530A (en) 1986-07-11 1987-12-22 Southwestern Analytical Chemicals, Inc. Method for producing high purity quaternary ammonium hydroxides
US4917781A (en) 1988-07-20 1990-04-17 Southwestern Analytical Chemicals, Inc. Process for preparing quaternary ammonium hydroxides
JPH0291089A (ja) * 1988-09-29 1990-03-30 Nippon Chem Ind Co Ltd 水酸化第四級ホスホニウムの製造方法
US4938854A (en) 1988-11-28 1990-07-03 Southwestern Analytical Chemicals, Inc. Method for purifying quaternary ammonium hydroxides
JP3109525B2 (ja) 1990-12-27 2000-11-20 クロリンエンジニアズ株式会社 水酸化テトラアルキルアンモニムの再生方法
US5352345A (en) 1991-05-07 1994-10-04 Alliedsignal Inc. Ion exchange resin regenerant waste recovery and recycling via bipolar membranes
JP3110513B2 (ja) 1991-10-16 2000-11-20 クロリンエンジニアズ株式会社 水酸化テトラアルキルアンモニムの再生方法
US5354434A (en) 1991-07-12 1994-10-11 Chlorine Engineers Corp. Ltd. Method for regenerating tetraalkylammonium hydroxide
DE69307659T2 (de) 1992-11-10 1997-09-04 Tama Chemicals Co Ltd Methode zur Behandlung von organischem quaternärem Ammonium-hydroxyd enthaltendem Abwasser
US5286354A (en) 1992-11-30 1994-02-15 Sachem, Inc. Method for preparing organic and inorganic hydroxides and alkoxides by electrolysis
JP3360365B2 (ja) 1993-07-29 2002-12-24 クロリンエンジニアズ株式会社 水酸化テトラアルキルアンモニムの再生方法
US5389211A (en) 1993-11-08 1995-02-14 Sachem, Inc. Method for producing high purity hydroxides and alkoxides
US5833832A (en) 1996-08-30 1998-11-10 Sachem, Inc. Preparation of onium hydroxides in an electrochemical cell
US5709790A (en) 1996-10-03 1998-01-20 Sachem, Inc. Electrochemical process for purifying hydroxide compounds
GB2319531B (en) * 1996-11-21 2001-03-07 Organo Corp Process for rejuvenation treatment of photoresist development waste
US6217743B1 (en) * 1997-02-12 2001-04-17 Sachem, Inc. Process for recovering organic hydroxides from waste solutions
JP3671644B2 (ja) 1998-01-05 2005-07-13 オルガノ株式会社 フォトレジスト現像廃液の再生処理方法及び装置
US5968338A (en) 1998-01-20 1999-10-19 Sachem, Inc. Process for recovering onium hydroxides from solutions containing onium compounds
JP3728945B2 (ja) * 1998-10-30 2005-12-21 オルガノ株式会社 フォトレジスト現像廃液からの現像液の回収再利用方法及び装置

Also Published As

Publication number Publication date
TWI304795B (en) 2009-01-01
DE60115704T2 (de) 2006-07-27
KR100676590B1 (ko) 2007-01-30
MY117670A (en) 2004-07-31
ES2257448T3 (es) 2006-08-01
IL155496A (en) 2006-07-05
AU2001296960A1 (en) 2002-05-06
US6508940B1 (en) 2003-01-21
JP2004512315A (ja) 2004-04-22
CN1469845A (zh) 2004-01-21
CA2424110A1 (en) 2002-05-02
CA2424110C (en) 2008-12-02
IL155496A0 (en) 2003-11-23
DE60115704D1 (de) 2006-01-12
EP1337470A1 (de) 2003-08-27
HK1059770A1 (en) 2004-07-16
EP1337470A4 (de) 2004-11-24
WO2002034675A1 (en) 2002-05-02
EP1337470B1 (de) 2005-12-07
KR20030059208A (ko) 2003-07-07
JP4142432B2 (ja) 2008-09-03
CN1236454C (zh) 2006-01-11

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