ATE301303T1 - Verfahren und vorrichtung zur regelung des druckes in vakuumprozessoren - Google Patents

Verfahren und vorrichtung zur regelung des druckes in vakuumprozessoren

Info

Publication number
ATE301303T1
ATE301303T1 AT02028407T AT02028407T ATE301303T1 AT E301303 T1 ATE301303 T1 AT E301303T1 AT 02028407 T AT02028407 T AT 02028407T AT 02028407 T AT02028407 T AT 02028407T AT E301303 T1 ATE301303 T1 AT E301303T1
Authority
AT
Austria
Prior art keywords
pressure
controlling
reaction chamber
disclosed apparatus
disclosed
Prior art date
Application number
AT02028407T
Other languages
English (en)
Inventor
Brian K Mcmillan
Michael Barnes
Farro F Kaveh
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of ATE301303T1 publication Critical patent/ATE301303T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2559—Self-controlled branched flow systems
    • Y10T137/2564—Plural inflows
    • Y10T137/2572—One inflow supplements another
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Drying Of Semiconductors (AREA)
  • Control Of Fluid Pressure (AREA)
AT02028407T 1998-03-31 1999-03-30 Verfahren und vorrichtung zur regelung des druckes in vakuumprozessoren ATE301303T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/053,530 US6142163A (en) 1996-03-29 1998-03-31 Method and apparatus for pressure control in vacuum processors

Publications (1)

Publication Number Publication Date
ATE301303T1 true ATE301303T1 (de) 2005-08-15

Family

ID=21984910

Family Applications (2)

Application Number Title Priority Date Filing Date
AT02028407T ATE301303T1 (de) 1998-03-31 1999-03-30 Verfahren und vorrichtung zur regelung des druckes in vakuumprozessoren
AT99915129T ATE240544T1 (de) 1998-03-31 1999-03-30 Verfahren und vorrichtung zur druckregelung in vakuumanlagen

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT99915129T ATE240544T1 (de) 1998-03-31 1999-03-30 Verfahren und vorrichtung zur druckregelung in vakuumanlagen

Country Status (9)

Country Link
US (1) US6142163A (de)
EP (2) EP1306737B1 (de)
JP (1) JP4382984B2 (de)
KR (1) KR100528229B1 (de)
AT (2) ATE301303T1 (de)
DE (2) DE69907890T2 (de)
ES (2) ES2197633T3 (de)
TW (1) TW425592B (de)
WO (1) WO1999050730A1 (de)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6445980B1 (en) * 1999-07-10 2002-09-03 Mykrolis Corporation System and method for a variable gain proportional-integral (PI) controller
US6814096B2 (en) * 2000-12-15 2004-11-09 Nor-Cal Products, Inc. Pressure controller and method
US20020147510A1 (en) * 2001-01-29 2002-10-10 Francis Robert Henry Process for rapidly controlling a process variable without overshoot using a time domain polynomial feedback controller.
KR20040024854A (ko) * 2001-04-24 2004-03-22 셀레리티 그룹 아이엔씨 질량유량 제어장치를 위한 시스템 및 방법
US6655408B2 (en) * 2001-06-13 2003-12-02 Applied Materials, Inc. Tunable ramp rate circuit for a mass flow controller
ES2256142T3 (es) * 2001-11-23 2006-07-16 Siemens Aktiengesellschaft Metodo para la regulacion continua de una posicion de una valvula de regulacion.
KR100452318B1 (ko) * 2002-01-17 2004-10-12 삼성전자주식회사 압력조절시스템 및 이를 이용하는 압력조절방법
KR100863782B1 (ko) * 2002-03-08 2008-10-16 도쿄엘렉트론가부시키가이샤 기판처리장치 및 기판처리방법
US6986361B2 (en) * 2002-04-23 2006-01-17 Mendoza Michael J Compressed air flow controller
GB0214273D0 (en) * 2002-06-20 2002-07-31 Boc Group Plc Apparatus for controlling the pressure in a process chamber and method of operating same
KR20050031109A (ko) * 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
US6926775B2 (en) 2003-02-11 2005-08-09 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces
US7115520B2 (en) * 2003-04-07 2006-10-03 Unaxis Usa, Inc. Method and apparatus for process control in time division multiplexed (TDM) etch process
CN100382249C (zh) * 2003-04-07 2008-04-16 优利讯美国有限公司 时分复用(tdm)蚀刻工艺中的过程控制方法及设备
US7381650B2 (en) * 2003-04-07 2008-06-03 Unaxis Usa Inc. Method and apparatus for process control in time division multiplexed (TDM) etch processes
US7282239B2 (en) * 2003-09-18 2007-10-16 Micron Technology, Inc. Systems and methods for depositing material onto microfeature workpieces in reaction chambers
US7258892B2 (en) 2003-12-10 2007-08-21 Micron Technology, Inc. Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
GB0401396D0 (en) * 2004-01-22 2004-02-25 Boc Group Plc Pressure control method
US8133554B2 (en) 2004-05-06 2012-03-13 Micron Technology, Inc. Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces
US7699932B2 (en) 2004-06-02 2010-04-20 Micron Technology, Inc. Reactors, systems and methods for depositing thin films onto microfeature workpieces
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7369920B2 (en) * 2006-03-21 2008-05-06 Mks Instruments, Inc. Pressure control system with optimized performance
US7643909B2 (en) * 2006-03-30 2010-01-05 Mks Instruments, Inc. Highly responsive master-slave valve positioning
JP4961223B2 (ja) * 2007-01-31 2012-06-27 株式会社日立ハイテクノロジーズ プラズマ処理装置の圧力制御方法
US20080216901A1 (en) * 2007-03-06 2008-09-11 Mks Instruments, Inc. Pressure control for vacuum processing system
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
WO2014153201A1 (en) 2013-03-14 2014-09-25 Alterg, Inc. Method of gait evaluation and training with differential pressure system
US10342461B2 (en) 2007-10-15 2019-07-09 Alterg, Inc. Method of gait evaluation and training with differential pressure system
KR101485887B1 (ko) * 2007-12-05 2015-01-26 히다치 조센 가부시키가이샤 진공 용기의 압력 제어 방법 및 압력 제어 장치
CN101981668A (zh) * 2008-03-26 2011-02-23 东京毅力科创株式会社 处理腔室的排气流量的控制方法以及处理装置
WO2012129125A2 (en) 2011-03-18 2012-09-27 Alterg, Inc. Differential air pressure systems and methods of using and calibrating such systems for mobility impaired users
DE102011103748A1 (de) 2011-05-31 2012-12-06 Ipsen International Gmbh Verfahren zur Steuerung von Vakuumpumpen in einer Industrieofenanlage
US9267605B2 (en) 2011-11-07 2016-02-23 Lam Research Corporation Pressure control valve assembly of plasma processing chamber and rapid alternating process
JP5881467B2 (ja) * 2012-02-29 2016-03-09 株式会社フジキン ガス分流供給装置及びこれを用いたガス分流供給方法
JP6061545B2 (ja) * 2012-08-10 2017-01-18 株式会社日立国際電気 半導体装置の製造方法、基板処理方法および基板処理装置
KR101620395B1 (ko) 2014-03-19 2016-05-23 아이케이씨코리아 주식회사 복수의 진자식 자동압력제어밸브의 압력제어방법
JP6996289B2 (ja) * 2016-12-26 2022-01-17 株式会社島津製作所 バルブ装置
JP6828446B2 (ja) * 2017-01-12 2021-02-10 株式会社島津製作所 バルブ制御装置
JP6375486B1 (ja) * 2017-09-27 2018-08-22 イノビータ ピーティーイー リミテッド 処理チャンバの圧力制御方法及び処理チャンバの圧力制御装置
WO2019079655A1 (en) 2017-10-18 2019-04-25 Alterg, Inc. SYSTEM FOR COLLECTING AND ANALYZING APPROPRIATE DATA AND METHODS OF OPERATING DRIVING SYSTEMS WITH RELIEF
WO2019089850A1 (en) 2017-10-31 2019-05-09 Alterg, Inc. System for unweighting a user related methods of exercise
JP6969465B2 (ja) * 2018-03-20 2021-11-24 株式会社島津製作所 目標開度推定器および圧力調整真空バルブ

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2811345C2 (de) * 1978-03-16 1986-12-11 Knorr-Bremse AG, 8000 München Druckregler für pneumatische Drücke, insbesondere in Fahrzeugen
US4394871A (en) * 1980-12-31 1983-07-26 The Boeing Company Programmable pressure regulator for titanium superplastic forming apparatus
JPS6011622A (ja) * 1983-06-30 1985-01-21 Honda Motor Co Ltd 電磁弁手段のデユ−テイ比制御方法
EP0173715B1 (de) * 1984-02-13 1992-04-22 SCHMITT, Jerome J. III Verfahren und vorrichtung für gasstrahlniederschlag von leitfähigen und dielektrischen dünnen festfilmen und so hergestellte erzeugnisse
US4720807A (en) * 1985-05-20 1988-01-19 Vacuum General, Inc. Adaptive pressure control system
US4702273A (en) * 1986-03-07 1987-10-27 Parker Hannifin Corporation Electrically controlled starter air valve
ATE66308T1 (de) * 1986-05-02 1991-08-15 Leybold Ag Verfahren zur regelung und/oder steuerung des druckes in einem rezipienten.
US4911103A (en) * 1987-07-17 1990-03-27 Texas Instruments Incorporated Processing apparatus and method
US5220940A (en) * 1988-04-07 1993-06-22 David Palmer Flow control valve with venturi
US4949670A (en) * 1988-11-04 1990-08-21 Tegal Corporation Method and apparatus for low pressure plasma
US5031674A (en) * 1989-03-03 1991-07-16 Eaton Corporation Fluid flow control method and apparatus for minimizing particle contamination
US5020564A (en) * 1989-06-29 1991-06-04 Allied-Signal Inc. Doser system for regulating pressure in a control chamber of a test stand
US5020176A (en) * 1989-10-20 1991-06-04 Angel Echevarria Co., Inc. Control system for fluid-filled beds
US4961441A (en) * 1989-11-13 1990-10-09 Salter Stuart C Method and system for controlling a pressure regulator
JP2825172B2 (ja) * 1992-07-10 1998-11-18 東京エレクトロン株式会社 減圧処理装置および減圧処理方法
US5534069A (en) * 1992-07-23 1996-07-09 Canon Kabushiki Kaisha Method of treating active material
US5292370A (en) * 1992-08-14 1994-03-08 Martin Marietta Energy Systems, Inc. Coupled microwave ECR and radio-frequency plasma source for plasma processing
US5624394A (en) * 1994-10-28 1997-04-29 Iolab Corporation Vacuum system and a method of operating a vacuum system
US5803107A (en) * 1996-03-29 1998-09-08 Lam Research Corporation Method and apparatus for pressure control in vacuum processors
US5939414A (en) * 1996-10-31 1999-08-17 Merck & Co., Inc. Benzodiazepine hydrazide derivatives as inhibitors of HIV integrase
US5935982A (en) * 1997-02-28 1999-08-10 The University Of North Carolina At Chapel Hill Methods of treating retroviral infection and compounds useful therefor
US6063198A (en) * 1998-01-21 2000-05-16 Applied Materials, Inc. High pressure release device for semiconductor fabricating equipment
EP1069111A4 (de) * 1998-03-26 2001-06-06 Shionogi & Co Indol derivate mit antiviraler aktivität

Also Published As

Publication number Publication date
DE69907890D1 (de) 2003-06-18
KR20010042381A (ko) 2001-05-25
DE69907890T2 (de) 2004-02-19
JP4382984B2 (ja) 2009-12-16
TW425592B (en) 2001-03-11
EP1306737A2 (de) 2003-05-02
US6142163A (en) 2000-11-07
KR100528229B1 (ko) 2005-11-15
WO1999050730A1 (en) 1999-10-07
JP2002510083A (ja) 2002-04-02
EP1306737B1 (de) 2005-08-03
ES2242820T3 (es) 2005-11-16
DE69926551D1 (de) 2005-09-08
ATE240544T1 (de) 2003-05-15
ES2197633T3 (es) 2004-01-01
EP1066550B1 (de) 2003-05-14
EP1306737A3 (de) 2003-05-28
DE69926551T2 (de) 2006-06-08
EP1066550A1 (de) 2001-01-10

Similar Documents

Publication Publication Date Title
ATE301303T1 (de) Verfahren und vorrichtung zur regelung des druckes in vakuumprozessoren
DE59807507D1 (de) Verfahren und Vorrichtung zur Regelung des Saugvermögens von Vakuumpumpen
ATE412250T1 (de) Plasmabehandlungsvorrichtung mit dynamischer gaszuführsteuerung
DE60005849D1 (de) Verfahren und vorrichtung zum bertreiben eines digitalen massendurchflussreglers
AU2002307547A1 (en) System and method for configuring and asapting a mass flow controller
EP1517357A3 (de) Überwachung der Dimensionen von an unterschiedlichen Stellen befindlichen Strukturen während der Behandlung eines Substrates
DE60001977D1 (de) Verfahren und vorrichtung für einen digitalen massendurchflussregler
TW200514866A (en) Processing apparatus and method
DE59504010D1 (de) Verfahren und vorrichtung zur ansteuerung eines elektromagnetischen ventils
EP1017085A3 (de) Gerät zur Herstellung einer Halbleitervorrichtung mit Vakuumsystem
TW200636856A (en) Semiconductor processing apparatus and method
DE3069231D1 (en) Control of the atmosphere in an enclosure
GB0214273D0 (en) Apparatus for controlling the pressure in a process chamber and method of operating same
DE69934520D1 (de) Vorrichtung zur kontrollierten belueftung eines raumes
NO995582L (no) Fremgangsmåte og apparat for behandling av vannsystemer
EP0814494A3 (de) Gerät und Verfahren zur Ionenstrahlbearbeitung
WO2002095788A3 (en) Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber
WO2004093165A3 (en) A method and apparatus for process control in time division multiplexed tdm etch processes
ATE247293T1 (de) Methode zur positionierung eines stellgliedes
DE69823887D1 (de) Vorrichtung zur Regelung des Durchflusses einer Flüssigkeit
TW200511423A (en) A method and apparatus for process control in time division multiplexed (TDM) etch processes
ATE99403T1 (de) Verfahren zum steuern einer waermequelle.
TW367433B (en) Control process and device for the operation of a surface treatment system
WO2002100134A3 (de) Bestückkopf mit einer pneumatischen drucksteuereinrichtung sowie verfahren zum betrieb des bestückkopfes
IT1272247B (it) Regolatore elettronico di pressione, per la regolazione della pressione di immisione di un fluido in un impianto servito

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties