ATE194748T1 - Elektrodenlose lampe mit drehender birne - Google Patents

Elektrodenlose lampe mit drehender birne

Info

Publication number
ATE194748T1
ATE194748T1 AT93923758T AT93923758T ATE194748T1 AT E194748 T1 ATE194748 T1 AT E194748T1 AT 93923758 T AT93923758 T AT 93923758T AT 93923758 T AT93923758 T AT 93923758T AT E194748 T1 ATE194748 T1 AT E194748T1
Authority
AT
Austria
Prior art keywords
envelope
fill
electrodeless lamp
discharge
rotation
Prior art date
Application number
AT93923758T
Other languages
English (en)
Inventor
James T Dolan
Charles H Wood
Mohammed Kamarehi
James E Simpson
Brian Turner
Philip A Premysler
Michael G Ury
Original Assignee
Fusion Lighting Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/046,671 external-priority patent/US5493184A/en
Application filed by Fusion Lighting Inc filed Critical Fusion Lighting Inc
Application granted granted Critical
Publication of ATE194748T1 publication Critical patent/ATE194748T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/16—Circuit arrangements in which the lamp is fed by dc or by low-frequency ac, e.g. by 50 cycles/sec ac, or with network frequencies
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/24—Circuit arrangements in which the lamp is fed by high frequency ac, or with separate oscillator frequency

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Discharge Lamp (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
AT93923758T 1992-09-30 1993-09-30 Elektrodenlose lampe mit drehender birne ATE194748T1 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US95305692A 1992-09-30 1992-09-30
US97693892A 1992-11-18 1992-11-18
US4709093A 1993-04-16 1993-04-16
US08/046,671 US5493184A (en) 1990-10-25 1993-04-16 Electrodeless lamp with improved efficiency
PCT/US1993/009373 WO1994008439A1 (en) 1992-09-30 1993-09-30 Electrodeless lamp with bulb rotation

Publications (1)

Publication Number Publication Date
ATE194748T1 true ATE194748T1 (de) 2000-07-15

Family

ID=27489085

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93923758T ATE194748T1 (de) 1992-09-30 1993-09-30 Elektrodenlose lampe mit drehender birne

Country Status (11)

Country Link
EP (2) EP0663139B1 (de)
JP (1) JPH08502381A (de)
KR (1) KR950703844A (de)
AT (1) ATE194748T1 (de)
AU (2) AU685402B2 (de)
BR (1) BR9307138A (de)
CA (1) CA2144978A1 (de)
DE (1) DE69329032T2 (de)
HU (1) HU215880B (de)
RU (1) RU2143151C1 (de)
WO (1) WO1994008439A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5834895A (en) * 1990-10-25 1998-11-10 Fusion Lighting, Inc. Visible lamp including selenium
SK46296A3 (en) * 1993-10-15 1997-02-05 Fusion Lighting Inc Electrodeless lamp with improved efficiency
US5448135A (en) * 1993-10-28 1995-09-05 Fusion Lighting, Inc. Apparatus for coupling electromagnetic radiation from a waveguide to an electrodeless lamp
US5767626A (en) * 1995-12-06 1998-06-16 Fusion Systems Corporation Electrodeless lamp starting/operation with sources at different frequencies
US5818167A (en) * 1996-02-01 1998-10-06 Osram Sylvania Inc. Electrodeless high intensity discharge lamp having a phosphorus fill
AU720607B2 (en) 1996-05-31 2000-06-08 Fusion Lighting, Inc. Multiple reflection electrodeless lamp with sulfur or selenium fill and method for providing radiation using such a lamp
US6291936B1 (en) 1996-05-31 2001-09-18 Fusion Lighting, Inc. Discharge lamp with reflective jacket
US5838108A (en) * 1996-08-14 1998-11-17 Fusion Uv Systems, Inc. Method and apparatus for starting difficult to start electrodeless lamps using a field emission source
TW406280B (en) 1997-05-21 2000-09-21 Fusion Lighting Inc non-rotating electrodeless lamp containing molecular fill
RU2156517C1 (ru) * 1999-06-25 2000-09-20 Корчагин Юрий Владимирович Способ возбуждения и поддержания разряда в безэлектродной лампе и устройство для его осуществления
US6605484B2 (en) * 2001-11-30 2003-08-12 Axcelis Technologies, Inc. Process for optically erasing charge buildup during fabrication of an integrated circuit
DE102004036827B4 (de) 2004-07-29 2009-11-26 Eastman Kodak Co. Mikrowellenheizvorrichtung
EP2175474A3 (de) 2008-10-09 2012-02-08 uv-technik Speziallampen GmbH Plasmakolben und Verfahren zur Herstellung eines Plasmakolben
KR101241049B1 (ko) 2011-08-01 2013-03-15 주식회사 플라즈마트 플라즈마 발생 장치 및 플라즈마 발생 방법
KR101246191B1 (ko) 2011-10-13 2013-03-21 주식회사 윈텔 플라즈마 장치 및 기판 처리 장치
KR101332337B1 (ko) 2012-06-29 2013-11-22 태원전기산업 (주) 초고주파 발광 램프 장치
CN105814662B (zh) 2013-12-13 2019-05-03 Asml荷兰有限公司 辐射源、量测设备、光刻***和器件制造方法
CA3050512A1 (en) 2017-01-18 2018-08-09 Phoenix Llc High power ion beam generator systems and methods

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942058A (en) * 1975-04-21 1976-03-02 Gte Laboratories Incorporated Electrodeless light source having improved arc shaping capability
US4507587A (en) * 1982-05-24 1985-03-26 Fusion Systems Corporation Microwave generated electrodeless lamp for producing bright output
US4485332A (en) * 1982-05-24 1984-11-27 Fusion Systems Corporation Method & apparatus for cooling electrodeless lamps
JPS614153A (ja) * 1984-06-14 1986-01-10 フュージョン・システムズ・コーポレーション マイクロ波無電極光源装置用の無電極ランプ
US4954756A (en) * 1987-07-15 1990-09-04 Fusion Systems Corporation Method and apparatus for changing the emission characteristics of an electrodeless lamp
US4902935A (en) * 1988-06-29 1990-02-20 Fusion Systems Corporation Method and apparatus for evening out the temperature distribution of electrodeless lamp bulbs
US4887192A (en) * 1988-11-04 1989-12-12 Fusion Systems Corporation Electrodeless lamp having compound resonant structure
DE69125499T2 (de) * 1990-10-25 1997-07-17 Fusion Systems Corp., Rockville, Md. Hochleistungslampe

Also Published As

Publication number Publication date
AU5350894A (en) 1994-04-26
HU9500854D0 (en) 1995-05-29
RU2143151C1 (ru) 1999-12-20
HUT70733A (en) 1995-10-30
BR9307138A (pt) 1999-07-27
DE69329032T2 (de) 2001-03-22
KR950703844A (ko) 1995-09-20
AU685402B2 (en) 1998-01-22
EP0663139A1 (de) 1995-07-19
DE69329032D1 (de) 2000-08-17
AU6193298A (en) 1998-07-02
EP0942457A2 (de) 1999-09-15
JPH08502381A (ja) 1996-03-12
EP0942457A3 (de) 2001-04-04
CA2144978A1 (en) 1994-04-14
AU704234B2 (en) 1999-04-15
EP0663139A4 (de) 1997-03-19
EP0663139B1 (de) 2000-07-12
RU95110694A (ru) 1997-06-27
WO1994008439A1 (en) 1994-04-14
HU215880B (hu) 1999-03-29

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties