ATE159814T1 - Vorrichtung und verfahren zum prüfen von optischen elementen - Google Patents

Vorrichtung und verfahren zum prüfen von optischen elementen

Info

Publication number
ATE159814T1
ATE159814T1 AT93101739T AT93101739T ATE159814T1 AT E159814 T1 ATE159814 T1 AT E159814T1 AT 93101739 T AT93101739 T AT 93101739T AT 93101739 T AT93101739 T AT 93101739T AT E159814 T1 ATE159814 T1 AT E159814T1
Authority
AT
Austria
Prior art keywords
optical element
array
optical elements
degrees
angle
Prior art date
Application number
AT93101739T
Other languages
English (en)
Inventor
Moshe Lapidot
Shmuel Dr Liran
Amit Stekel
Original Assignee
Optomic Techn Corp Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optomic Techn Corp Ltd filed Critical Optomic Techn Corp Ltd
Application granted granted Critical
Publication of ATE159814T1 publication Critical patent/ATE159814T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G01M11/0264—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Geometry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Tests Of Electronic Circuits (AREA)
AT93101739T 1992-02-17 1993-02-04 Vorrichtung und verfahren zum prüfen von optischen elementen ATE159814T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL100972A IL100972A0 (en) 1992-02-17 1992-02-17 Device for testing optical elements

Publications (1)

Publication Number Publication Date
ATE159814T1 true ATE159814T1 (de) 1997-11-15

Family

ID=11063373

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93101739T ATE159814T1 (de) 1992-02-17 1993-02-04 Vorrichtung und verfahren zum prüfen von optischen elementen

Country Status (6)

Country Link
US (1) US5438405A (de)
EP (1) EP0556655B1 (de)
JP (1) JPH05346368A (de)
AT (1) ATE159814T1 (de)
DE (1) DE69314821D1 (de)
IL (1) IL100972A0 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3417738B2 (ja) * 1995-09-06 2003-06-16 ペンタックス株式会社 光学部材検査装置
JP3417737B2 (ja) * 1995-08-29 2003-06-16 ペンタックス株式会社 光学部材検査装置
US6437857B1 (en) * 1999-08-31 2002-08-20 Eastman Kodak Company Variable field angle and test pattern spatial frequency system for testing a lens
EP1605241A1 (de) 2004-06-09 2005-12-14 Automation & Robotics Apparat zur optischen Kontrolle von transparenten oder reflektierenden Proben
US7564556B2 (en) * 2007-04-02 2009-07-21 Taiwan Semiconductor Manufacturing Company Method and apparatus for lens contamination control
JP2015225059A (ja) * 2014-05-30 2015-12-14 株式会社リコー 光学素子検査装置および光学素子検査方法および光学素子検査システム
JP7046819B2 (ja) * 2016-02-24 2022-04-04 ベクトン ディキンソン フランス 透明シリンダを検査するためのシステムおよび方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3813173A (en) * 1972-02-22 1974-05-28 Corning Glass Works Defect sensing apparatus and method
US3788749A (en) * 1972-03-13 1974-01-29 N George Image quality rating system
GB1403911A (en) * 1972-07-26 1975-08-28 Sira Institute Method and apparatus for testing optical components
US3988068A (en) * 1974-05-09 1976-10-26 Itek Corporation Method and apparatus for detecting cosmetic defects in opthalmic lenses
DE3620129A1 (de) * 1986-06-14 1987-12-17 Zeiss Carl Fa Vorrichtung zum pruefen von bauteilen aus transparentem material auf oberflaechenfehler und einschluesse
DE3620108A1 (de) * 1986-06-14 1987-12-17 Zeiss Carl Fa Vorrichtung zum beleuchten von bauteilen aus transparentem material bei der fehlerpruefung
DE3620146A1 (de) * 1986-06-14 1987-12-17 Zeiss Carl Fa Verfahren zum pruefen von bauteilen aus transparentem material auf oberflaechenfehler und einschluesse

Also Published As

Publication number Publication date
US5438405A (en) 1995-08-01
JPH05346368A (ja) 1993-12-27
EP0556655A3 (en) 1993-10-13
DE69314821D1 (de) 1997-12-04
EP0556655A2 (de) 1993-08-25
EP0556655B1 (de) 1997-10-29
IL100972A0 (en) 1992-11-15

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Legal Events

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