ATE157465T1 - Lichtfilter für die mikroelektronik - Google Patents
Lichtfilter für die mikroelektronikInfo
- Publication number
- ATE157465T1 ATE157465T1 AT88901669T AT88901669T ATE157465T1 AT E157465 T1 ATE157465 T1 AT E157465T1 AT 88901669 T AT88901669 T AT 88901669T AT 88901669 T AT88901669 T AT 88901669T AT E157465 T1 ATE157465 T1 AT E157465T1
- Authority
- AT
- Austria
- Prior art keywords
- microelectronics
- light filter
- filters
- resin
- substrates
- Prior art date
Links
- 238000004377 microelectronic Methods 0.000 title abstract 3
- 239000011347 resin Substances 0.000 abstract 2
- 229920005989 resin Polymers 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Optical Filters (AREA)
- Silicon Polymers (AREA)
- Glass Compositions (AREA)
- Microscoopes, Condenser (AREA)
- Gyroscopes (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/002,107 US4876165A (en) | 1982-09-30 | 1987-01-12 | Light filters for microelectronics |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE157465T1 true ATE157465T1 (de) | 1997-09-15 |
Family
ID=21699277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT88901669T ATE157465T1 (de) | 1987-01-12 | 1988-01-12 | Lichtfilter für die mikroelektronik |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0298116B1 (de) |
JP (1) | JPH01501973A (de) |
KR (1) | KR960005891B1 (de) |
AT (1) | ATE157465T1 (de) |
DE (1) | DE3856007T2 (de) |
WO (1) | WO1988005180A1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0434273B1 (de) * | 1989-12-22 | 1997-08-20 | Texas Instruments Incorporated | Filter für elektromagnetische Strahlung und Herstellungsverfahren |
DE4021556A1 (de) * | 1990-07-06 | 1992-01-09 | Draegerwerk Ag | Vorrichtung zur messung der konzentration von gas- und/oder dampffoermigen komponenten eines gasgemisches |
EP0821813A4 (de) * | 1995-04-17 | 1998-08-26 | Brewer Science Inc | Modifiziertes maleinsäureanhydrid-styrol copolymer sowie verwandte polymere für anwendungen in farbfiltern |
JP4111281B2 (ja) * | 1997-04-15 | 2008-07-02 | 共同印刷株式会社 | 液晶表示用カラーフィルタ |
JP2002278056A (ja) * | 2001-03-16 | 2002-09-27 | Sumitomo Chem Co Ltd | 着色感光性樹脂組成物 |
US20040157140A1 (en) * | 2001-05-15 | 2004-08-12 | Hirotoshi Kamata | Photosensitive coloring composition, color filter using the composition and method of producing the same |
AU2002350394A1 (en) * | 2001-11-15 | 2003-06-10 | Silicon Vision Ag | Colour-filter array for an optical-image sensor |
JP4657147B2 (ja) * | 2006-05-24 | 2011-03-23 | 住友化学株式会社 | 着色感光性樹脂組成物、カラーフィルタ、イメージセンサおよびカメラシステム |
JP5472300B2 (ja) | 2009-06-15 | 2014-04-16 | Jsr株式会社 | 感放射線性樹脂組成物、及びレジストパターン形成方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4345011A (en) * | 1978-01-30 | 1982-08-17 | Eastman Kodak Company | Color imaging devices and color filter arrays using photo-bleachable dyes |
JPS55126487A (en) * | 1979-03-26 | 1980-09-30 | Fuji Photo Film Co Ltd | Colored-picture forming method |
US4315978A (en) * | 1980-03-06 | 1982-02-16 | Eastman Kodak Company | Solid-state color imaging device having a color filter array using a photocrosslinkable barrier |
NL8103146A (nl) * | 1980-07-03 | 1982-02-01 | Dainippon Screen Mfg | Werkwijze voor het vervaardigen van streepzeven. |
JPS5840507A (ja) * | 1981-09-02 | 1983-03-09 | Sharp Corp | 固体撮像素子におけるカラ−フイルタ−の製造方法 |
US4355087A (en) * | 1981-09-04 | 1982-10-19 | Eastman Kodak Company | Color imaging device having a color filter array using a metal salt of a long-chain fatty acid as a barrier |
JPS58100108A (ja) * | 1981-12-10 | 1983-06-14 | Victor Co Of Japan Ltd | 色フイルタ素子 |
JPS6033506A (ja) * | 1983-08-04 | 1985-02-20 | Seiko Instr & Electronics Ltd | カラ−固体撮像素子の製造方法 |
JPH0690324B2 (ja) * | 1984-03-02 | 1994-11-14 | 東レ株式会社 | カラ−フイルタ用耐熱着色ペ−スト |
JPS60184204A (ja) * | 1984-03-02 | 1985-09-19 | Toray Ind Inc | カラ−フイルタ用耐熱性着色ペ−スト |
JPS60237403A (ja) * | 1984-05-10 | 1985-11-26 | Toppan Printing Co Ltd | カラ−フィルタ−およびその製造方法 |
JPS6177804A (ja) * | 1984-09-25 | 1986-04-21 | Kyodo Printing Co Ltd | カラ−フィルタの製造方法 |
JPS6199102A (ja) * | 1984-10-17 | 1986-05-17 | Sanyo Kokusaku Pulp Co Ltd | カラ−フイルタ−の製法 |
JPH0782124B2 (ja) * | 1985-02-05 | 1995-09-06 | 共同印刷株式会社 | カラーフィルタの製造方法 |
JPH0690325B2 (ja) * | 1985-05-08 | 1994-11-14 | 東レ株式会社 | カラ−フイルタ |
JPS62150202A (ja) * | 1985-12-24 | 1987-07-04 | Seiko Epson Corp | カラ−フイルタ−の製造方法 |
FR2595148B1 (fr) * | 1986-02-28 | 1988-04-29 | Commissariat Energie Atomique | Filtres colores, leur procede de fabrication et solution utilisable pour la mise en oeuvre de ce procede |
-
1988
- 1988-01-12 DE DE3856007T patent/DE3856007T2/de not_active Expired - Fee Related
- 1988-01-12 KR KR1019880701098A patent/KR960005891B1/ko not_active IP Right Cessation
- 1988-01-12 AT AT88901669T patent/ATE157465T1/de not_active IP Right Cessation
- 1988-01-12 JP JP63501695A patent/JPH01501973A/ja active Pending
- 1988-01-12 WO PCT/US1988/000042 patent/WO1988005180A1/en active IP Right Grant
- 1988-01-12 EP EP88901669A patent/EP0298116B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0298116B1 (de) | 1997-08-27 |
KR960005891B1 (ko) | 1996-05-03 |
EP0298116A1 (de) | 1989-01-11 |
WO1988005180A1 (en) | 1988-07-14 |
KR890700856A (ko) | 1989-04-27 |
EP0298116A4 (de) | 1990-06-26 |
DE3856007T2 (de) | 1998-02-05 |
JPH01501973A (ja) | 1989-07-06 |
DE3856007D1 (de) | 1997-10-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |