ATE122162T1 - Belichtungsvorrichtung. - Google Patents

Belichtungsvorrichtung.

Info

Publication number
ATE122162T1
ATE122162T1 AT91919413T AT91919413T ATE122162T1 AT E122162 T1 ATE122162 T1 AT E122162T1 AT 91919413 T AT91919413 T AT 91919413T AT 91919413 T AT91919413 T AT 91919413T AT E122162 T1 ATE122162 T1 AT E122162T1
Authority
AT
Austria
Prior art keywords
exposure device
exposure
Prior art date
Application number
AT91919413T
Other languages
English (en)
Inventor
Holger Vogt
Heinz Kueck
Guenther Hess
Andreas Gehner
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Priority claimed from EP91919413A external-priority patent/EP0610184B1/de
Application granted granted Critical
Publication of ATE122162T1 publication Critical patent/ATE122162T1/de

Links

AT91919413T 1991-10-30 1991-10-30 Belichtungsvorrichtung. ATE122162T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP91919413A EP0610184B1 (de) 1991-10-30 1991-10-30 Belichtungsvorrichtung

Publications (1)

Publication Number Publication Date
ATE122162T1 true ATE122162T1 (de) 1995-05-15

Family

ID=8209204

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91919413T ATE122162T1 (de) 1991-10-30 1991-10-30 Belichtungsvorrichtung.

Country Status (1)

Country Link
AT (1) ATE122162T1 (de)

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Legal Events

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