AT374303B - Elektronenmikroskop - Google Patents

Elektronenmikroskop

Info

Publication number: AT374303B
Authority: AT; Austria
Prior art keywords: electron microscope; microscope; electron
Prior art date: 1977-05-26

Application number

AT0373778A

Other languages

English (en)

Other versions

ATA373778A (de

Original Assignee

Philips Nv

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-05-26

Filing date

1978-05-23

Publication date

1984-04-10

1978-05-23 Application filed by Philips Nv filed Critical Philips Nv

1983-08-15 Publication of ATA373778A publication Critical patent/ATA373778A/de

1984-04-10 Application granted granted Critical

1984-04-10 Publication of AT374303B publication Critical patent/AT374303B/de

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Sources, Ion Sources (AREA)
Electron Tubes For Measurement (AREA)
Analysing Materials By The Use Of Radiation (AREA)

AT0373778A 1977-05-26 1978-05-23 Elektronenmikroskop AT374303B (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
NLAANVRAGE7705789,A NL175245C (nl)	1977-05-26	1977-05-26	Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.

Publications (2)

Publication Number	Publication Date
ATA373778A ATA373778A (de)	1983-08-15
AT374303B true AT374303B (de)	1984-04-10

Family

ID=19828618

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT0373778A AT374303B (de)	1977-05-26	1978-05-23	Elektronenmikroskop

Country Status (13)

Country	Link
US (1)	US4306149A (de)
JP (1)	JPS53147458A (de)
AT (1)	AT374303B (de)
AU (1)	AU518440B2 (de)
BR (1)	BR7803298A (de)
CA (1)	CA1110781A (de)
DE (1)	DE2822242A1 (de)
ES (1)	ES470151A1 (de)
FR (1)	FR2392493A1 (de)
GB (1)	GB1604898A (de)
IT (1)	IT1095832B (de)
NL (1)	NL175245C (de)
SE (1)	SE430281B (de)

Families Citing this family (38)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5842935B2 (ja) *	1978-04-07	1983-09-22	日本電子株式会社	走査電子顕微鏡等の対物レンズ
US4585942A (en) *	1983-03-17	1986-04-29	Jeol Ltd.	Transmission electron microscope
JPH0793119B2 (ja) *	1988-06-17	1995-10-09	日本電子株式会社	電子顕微鏡
DE3825103A1 (de) *	1988-07-23	1990-01-25	Zeiss Carl Fa	Verfahren zum beleuchten eines objektes in einem transmissions-elektronenmikroskop
NL8803153A (nl) *	1988-12-23	1990-07-16	Philips Nv	Elektronenbundel apparaat met dynamische focussering.
US5079428A (en) *	1989-08-31	1992-01-07	Bell Communications Research, Inc.	Electron microscope with an asymmetrical immersion lens
EP0417354A1 (de) *	1989-09-15	1991-03-20	Koninklijke Philips Electronics N.V.	Elektronenstrahlgerät mit Ausfladungskompensierung
JP2777840B2 (ja) *	1990-11-30	1998-07-23	セイコーインスツルメンツ株式会社	電子線装置
JP2651298B2 (ja) *	1991-10-29	1997-09-10	富士通株式会社	ビーム焦点調整器及び電子ビーム装置
JPH06215714A (ja) *	1992-06-05	1994-08-05	Hitachi Ltd	電界放出型透過電子顕微鏡
US5362964A (en) *	1993-07-30	1994-11-08	Electroscan Corporation	Environmental scanning electron microscope
US5412211A (en) *	1993-07-30	1995-05-02	Electroscan Corporation	Environmental scanning electron microscope
DE19945344A1 (de)	1999-09-22	2001-03-29	Leo Elektronenmikroskopie Gmbh	Teilchenoptisches Beleuchtungs- und Abbildungssystem mit einer Kondensor-Objektiv-Einfeldlinse
US7368727B2 (en)	2003-10-16	2008-05-06	Alis Technology Corporation	Atomic level ion source and method of manufacture and operation
US7557361B2 (en)	2003-10-16	2009-07-07	Alis Corporation	Ion sources, systems and methods
US7601953B2 (en)	2006-03-20	2009-10-13	Alis Corporation	Systems and methods for a gas field ion microscope
US7554097B2 (en)	2003-10-16	2009-06-30	Alis Corporation	Ion sources, systems and methods
US7485873B2 (en)	2003-10-16	2009-02-03	Alis Corporation	Ion sources, systems and methods
US7488952B2 (en)	2003-10-16	2009-02-10	Alis Corporation	Ion sources, systems and methods
US7786451B2 (en)	2003-10-16	2010-08-31	Alis Corporation	Ion sources, systems and methods
US7414243B2 (en) *	2005-06-07	2008-08-19	Alis Corporation	Transmission ion microscope
US9159527B2 (en)	2003-10-16	2015-10-13	Carl Zeiss Microscopy, Llc	Systems and methods for a gas field ionization source
US7321118B2 (en)	2005-06-07	2008-01-22	Alis Corporation	Scanning transmission ion microscope
US7786452B2 (en)	2003-10-16	2010-08-31	Alis Corporation	Ion sources, systems and methods
US7554096B2 (en)	2003-10-16	2009-06-30	Alis Corporation	Ion sources, systems and methods
US7511280B2 (en)	2003-10-16	2009-03-31	Alis Corporation	Ion sources, systems and methods
US7557358B2 (en)	2003-10-16	2009-07-07	Alis Corporation	Ion sources, systems and methods
US7557359B2 (en)	2003-10-16	2009-07-07	Alis Corporation	Ion sources, systems and methods
US7518122B2 (en)	2003-10-16	2009-04-14	Alis Corporation	Ion sources, systems and methods
US7495232B2 (en)	2003-10-16	2009-02-24	Alis Corporation	Ion sources, systems and methods
US7557360B2 (en)	2003-10-16	2009-07-07	Alis Corporation	Ion sources, systems and methods
US7521693B2 (en)	2003-10-16	2009-04-21	Alis Corporation	Ion sources, systems and methods
US8110814B2 (en)	2003-10-16	2012-02-07	Alis Corporation	Ion sources, systems and methods
US7511279B2 (en)	2003-10-16	2009-03-31	Alis Corporation	Ion sources, systems and methods
US7504639B2 (en)	2003-10-16	2009-03-17	Alis Corporation	Ion sources, systems and methods
JP4919404B2 (ja) *	2006-06-15	2012-04-18	株式会社リコー	電子顕微鏡、電子線ホログラム作成方法及び位相再生画像作成方法
US7804068B2 (en)	2006-11-15	2010-09-28	Alis Corporation	Determining dopant information
JP2014032835A (ja) *	2012-08-03	2014-02-20	Hitachi High-Technologies Corp	走査透過電子顕微鏡

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL145716B (nl) *	1964-06-06	1975-04-15	Philips Nv	Elektronenstraalapparaat.
US3500269A (en) *	1966-06-10	1970-03-10	Hitachi Ltd	Electron lens utilizing superconductive coils for an electron microscope or the like
DE1764442B1 (de) *	1968-06-06	1972-03-09	Hitachi Ltd	Elektronenmikroskop
JPS4936496B1 (de) *	1970-04-18	1974-10-01
US3748467A (en) *	1971-09-07	1973-07-24	Nibon Denshi K K	Scanning electron microscope
JPS5126227B2 (de) *	1971-09-21	1976-08-05
JPS5138578B2 (de) *	1972-10-23	1976-10-22
US3872305A (en) *	1972-12-06	1975-03-18	Jeol Ltd	Convertible scanning electron microscope

1977
- 1977-05-26 NL NLAANVRAGE7705789,A patent/NL175245C/xx not_active IP Right Cessation
1978
- 1978-05-22 DE DE19782822242 patent/DE2822242A1/de active Granted
- 1978-05-23 IT IT23715/78A patent/IT1095832B/it active
- 1978-05-23 AT AT0373778A patent/AT374303B/de not_active IP Right Cessation
- 1978-05-23 JP JP6154678A patent/JPS53147458A/ja active Granted
- 1978-05-23 BR BR787803298A patent/BR7803298A/pt unknown
- 1978-05-23 SE SE7805838A patent/SE430281B/sv not_active IP Right Cessation
- 1978-05-23 GB GB21387/78A patent/GB1604898A/en not_active Expired
- 1978-05-24 ES ES470151A patent/ES470151A1/es not_active Expired
- 1978-05-25 US US05/909,649 patent/US4306149A/en not_active Expired - Lifetime
- 1978-05-25 FR FR7815572A patent/FR2392493A1/fr active Granted
- 1978-05-25 CA CA304,092A patent/CA1110781A/en not_active Expired
- 1978-05-26 AU AU36543/78A patent/AU518440B2/en not_active Expired

Also Published As

Publication number	Publication date
DE2822242A1 (de)	1978-11-30
CA1110781A (en)	1981-10-13
ES470151A1 (es)	1979-09-16
FR2392493B1 (de)	1983-06-17
ATA373778A (de)	1983-08-15
NL7705789A (nl)	1978-11-28
AU518440B2 (en)	1981-10-01
GB1604898A (en)	1981-12-16
NL175245B (nl)	1984-05-01
JPS53147458A (en)	1978-12-22
FR2392493A1 (fr)	1978-12-22
IT1095832B (it)	1985-08-17
DE2822242C2 (de)	1990-05-31
SE7805838L (sv)	1978-11-27
SE430281B (sv)	1983-10-31
US4306149A (en)	1981-12-15
AU3654378A (en)	1979-11-29
JPH0357571B2 (de)	1991-09-02
NL175245C (nl)	1984-10-01
IT7823715A0 (it)	1978-05-23
BR7803298A (pt)	1979-02-13

Legal Events

Date	Code	Title	Description
1991-05-15	ELJ	Ceased due to non-payment of the annual fee
2002-03-15	ELA	Expired due to lapse of time

Publication	Publication Date	Title
AT374303B (de)	1984-04-10	Elektronenmikroskop
SE7804725L (sv)	1978-10-28	Fodoemne pa mjolkbasis
SE411827B (sv)	1980-02-04	Elektron/jonplasmakella
NL7811716A (nl)	1979-06-06	Elektronenmicroscoop.
SE7807339L (sv)	1979-01-02	Pincett
BE881301A (fr)	1980-07-23	Cathode en nickel-molybdene
NL7810809A (nl)	1979-05-03	Electronenbundelbelichtingsinrichting.
FR2410992B1 (fr)	1985-06-07	Aspirateur
NL188192C (nl)	1992-04-16	Elektronenmicroscoop.
SE7808406L (sv)	1979-02-06	Katod
BR7803904A (pt)	1979-01-09	Conjunto de envelope
FI781595A (fi)	1978-11-20	Form
AT384895B (de)	1988-01-25	Mikroskop
NL7808162A (nl)	1979-02-13	Elektronenbundelinrichting.
IT1096922B (it)	1985-08-26	Anodo
BE864245A (fr)	1978-06-16	Isolateur
DK224278A (da)	1978-11-28	Pincet
FR2327558A1 (fr)	1977-05-06	Microscope
JPS5368562A (en)	1978-06-19	Electron microscope
AT346620B (de)	1978-11-27	Mikroskopkondensor
SE7809266L (sv)	1979-03-06	Form
SE7804061L (sv)	1978-12-11	Kuvert
DD138741A5 (de)	1979-11-21	Vakuum-aluminiumloetofen
AT346619B (de)	1978-11-27	Mikroskopkondensor
FI762582A (fi)	1978-03-09	Korneamikroskop