AT353519B - Einrichtung zur buendelung des primaerionen- strahls - Google Patents

Einrichtung zur buendelung des primaerionen- strahls

Info

Publication number
AT353519B
AT353519B AT162278A AT162278A AT353519B AT 353519 B AT353519 B AT 353519B AT 162278 A AT162278 A AT 162278A AT 162278 A AT162278 A AT 162278A AT 353519 B AT353519 B AT 353519B
Authority
AT
Austria
Prior art keywords
primaerion
concentrating
primaerion beam
Prior art date
Application number
AT162278A
Other languages
English (en)
Other versions
ATA162278A (de
Inventor
Friedrich Dr Ruedenauer
Wolfgang Dr Steiger
Original Assignee
Oesterr Studien Atomenergie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oesterr Studien Atomenergie filed Critical Oesterr Studien Atomenergie
Priority to AT162278A priority Critical patent/AT353519B/de
Priority to EP19790100668 priority patent/EP0004064B1/de
Priority to DE7979100668T priority patent/DE2963139D1/de
Publication of ATA162278A publication Critical patent/ATA162278A/de
Application granted granted Critical
Publication of AT353519B publication Critical patent/AT353519B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
AT162278A 1978-03-07 1978-03-07 Einrichtung zur buendelung des primaerionen- strahls AT353519B (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT162278A AT353519B (de) 1978-03-07 1978-03-07 Einrichtung zur buendelung des primaerionen- strahls
EP19790100668 EP0004064B1 (de) 1978-03-07 1979-03-06 Einrichtung an einer Ionenmikrosonde zur Bündelung des Primärionenstrahls
DE7979100668T DE2963139D1 (en) 1978-03-07 1979-03-06 Apparatus in an ion microprobe for concentrating the primary ion beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT162278A AT353519B (de) 1978-03-07 1978-03-07 Einrichtung zur buendelung des primaerionen- strahls

Publications (2)

Publication Number Publication Date
ATA162278A ATA162278A (de) 1979-04-15
AT353519B true AT353519B (de) 1979-11-26

Family

ID=3517394

Family Applications (1)

Application Number Title Priority Date Filing Date
AT162278A AT353519B (de) 1978-03-07 1978-03-07 Einrichtung zur buendelung des primaerionen- strahls

Country Status (3)

Country Link
EP (1) EP0004064B1 (de)
AT (1) AT353519B (de)
DE (1) DE2963139D1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243960A (ja) * 1984-05-18 1985-12-03 Hitachi Ltd イオンマイクロビ−ム装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3445650A (en) * 1965-10-11 1969-05-20 Applied Res Lab Double focussing mass spectrometer including a wedge-shaped magnetic sector field
NL7304298A (de) * 1973-03-28 1974-10-01

Also Published As

Publication number Publication date
DE2963139D1 (en) 1982-08-12
EP0004064B1 (de) 1982-06-23
ATA162278A (de) 1979-04-15
EP0004064A3 (en) 1979-10-03
EP0004064A2 (de) 1979-09-19

Similar Documents

Publication Publication Date Title
BE873330A (fr) Procede de branchement
SE7905825L (sv) Festorgan for platar
BE875305A (fr) Procede de branchement
MX7652E (es) Procedimiento de descafeinizacion
BR7906362A (pt) Dispositivo alargador
FI792256A (fi) Provroer foer mikrobiologiska undersoekningar
BR7901580A (pt) Dispositivo de ligacao
RO79166A (ro) Regulator-coboritor de presiune
NL7903405A (nl) Spaninrichting.
DE2917203A1 (de) Vorrichtung zur fokussierungsermittlung
BR7902763A (pt) Dispositivo de valvula de comporta
AT355527B (de) Drehsiebeinrichtung
FR2442596B1 (fr) Succedane de massepain
NO150328C (no) Forbindelsesstykke
BR7901252A (pt) Meio de fixacao rapida
AR220181A1 (es) Dispositivo de apriete
SE7904426L (sv) Anblasningsbotten for virvelskiktapparater
IT1124094B (it) Procedimento per utilizzare i rifiuti
AT353519B (de) Einrichtung zur buendelung des primaerionen- strahls
AT363545B (de) Einrichtung zur ueberwachung des polradwinkels
ES253465Y (es) Dispositivo de conexion por apriete perfeccionado
AT374264B (de) Einrichtung zur energieeinsparung
DK200979A (da) Haeder for phenolharpikslime
PL211773A1 (pl) Urzadzenie do montazu
DD136542A1 (de) Vorrichtung zur kraftanlenkung

Legal Events

Date Code Title Description
EFA Change in the company name
ELJ Ceased due to non-payment of the annual fee