WO2024124934A1 - Ghz high-frequency femtosecond laser pulse generation device and method thereof - Google Patents

Ghz high-frequency femtosecond laser pulse generation device and method thereof Download PDF

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WO2024124934A1
WO2024124934A1 PCT/CN2023/113337 CN2023113337W WO2024124934A1 WO 2024124934 A1 WO2024124934 A1 WO 2024124934A1 CN 2023113337 W CN2023113337 W CN 2023113337W WO 2024124934 A1 WO2024124934 A1 WO 2024124934A1
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frequency
pulse
femtosecond
enters
attenuator
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PCT/CN2023/113337
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French (fr)
Chinese (zh)
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赵裕兴
李立卫
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苏州德龙激光股份有限公司
苏州贝林激光有限公司
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Publication of WO2024124934A1 publication Critical patent/WO2024124934A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
    • H01S3/109—Frequency multiplication, e.g. harmonic generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking
    • H01S3/1115—Passive mode locking using intracavity saturable absorbers

Definitions

  • the invention relates to a GHz high-frequency femtosecond laser pulse generating device and a method thereof.
  • Femtosecond lasers have been widely used in the fields of fine micro-machining of materials, semiconductor industry, solar photovoltaic, scientific research, etc. due to their extremely high peak power and narrow pulse width.
  • One of the most important features of femtosecond laser processing is that it can achieve ultra-high precision micro-nano processing by suppressing the heat-affected zone.
  • the slow processing speed of femtosecond lasers is the bottleneck that limits their industrial applications.
  • the processing efficiency can be significantly improved without reducing the processing quality, thus overcoming the bottleneck of femtosecond processing.
  • the main method to obtain stable GHz femtosecond pulses is passive mode locking.
  • the cavity length of the mode-locked laser depends on the pulse repetition frequency. Therefore, the cavity length of the GHz femtosecond resonant cavity is very short ( ⁇ 150 mm). If a fiber laser is used to achieve GHz output, the cavity length needs to be controlled within 100 mm.
  • GHz femtosecond pulses can be obtained using solid-state mode-locked lasers and fiber-optic mode-locked lasers.
  • Patent Publication No. CN112864785B discloses a high-power GHz repetition frequency femtosecond laser generation system, which uses a solid-state laser to obtain GHz femtosecond pulses.
  • Solid-state lasers are easy to achieve passive mode locking within a cavity length of 150 mm, but due to fiber coupling problems, it is difficult to use fiber amplifiers for amplification. Therefore, the laser needs to be amplified by solid state, and full fiberization cannot be achieved.
  • the cavity length is difficult to control within 150 mm, and it is difficult to achieve intracavity dispersion compensation in a short cavity. Therefore, it is very difficult to use a fiber laser to directly generate a stable GHz femtosecond pulse laser.
  • the purpose of the present invention is to overcome the deficiencies of the prior art and provide a GHz high-frequency femtosecond laser pulse generating device and method.
  • GHz high-frequency femtosecond laser pulse generating device characterized in that: at least two frequency doubling units are arranged in sequence on the output optical path of the low-frequency femtosecond pulse generator;
  • the frequency doubling unit 1 includes a beam splitter 1, an attenuator 1, a delay 1 and a beam combiner 1.
  • the low-frequency femtosecond pulse generated by the low-frequency femtosecond pulse generator enters the beam splitter 1 and is divided into two paths, one of which passes through the attenuator 1 and enters the beam combiner 1, and the other passes through the delay 1 and enters the beam combiner 1, and the beam is combined to double the frequency of the femtosecond pulse.
  • Frequency doubling unit 2 includes beam splitter 2, attenuator 2, delay device 2 and beam combiner 2.
  • the femtosecond pulse output by beam combiner 1 of frequency doubling unit 1 enters beam splitter 2 and is divided into two paths, one of which passes through attenuator 2 and enters beam combiner 2, and the other passes through delay device 2 and enters beam combiner 2 for beam combining, and the frequency of the femtosecond pulse is doubled again.
  • the low-frequency femtosecond pulse generator comprises a pump source, a wavelength division multiplexer, a grating, a gain fiber and a saturable absorber mirror
  • the pump source is connected to the wavelength division multiplexer
  • the wavelength division multiplexer is connected to the grating
  • the grating is connected to the gain fiber
  • the gain fiber is connected to the saturable absorber mirror
  • the pump source outputs pump light through the wavelength division multiplexer and enters the laser cavity composed of the grating, the gain fiber and the saturable absorber mirror to achieve passive mode locking to generate femtosecond laser pulses.
  • the low-frequency femtosecond pulse generator is a femtosecond pulse generator with an output wavelength of 1030nm ⁇ 1064nm, an output power frequency of 50MHz ⁇ 500MHz, an output power of 1mW ⁇ 1W, and a pulse width of 100fs ⁇ 10ps.
  • the beam splitter 1 and the beam splitter 2 are optical fiber couplers with a splitting ratio of 40% to 60%.
  • the attenuator 1 and the attenuator 2 are optical fiber attenuators with an attenuation ratio of 10% to 90%.
  • the delay device 1 and the delay device 2 are single-mode optical fibers with an optical fiber mode field diameter of 6um to 15um.
  • the present invention discloses a GHz high-frequency femtosecond laser pulse generating device.
  • a low-frequency femtosecond pulse generator generates a low-frequency femtosecond pulse through passive mode locking of its saturable absorption mirror.
  • the low-frequency femtosecond pulse enters a beam splitter and is divided into two paths. One path passes through an attenuator and enters a beam combiner. The other path passes through a delay device and enters a beam combiner.
  • the delay time introduced by the delay device is the pulse period corresponding to the pulse frequency after the pulse frequency is doubled.
  • the attenuator device adjusts the pulse amplitude of the light so that the light pulses are highly consistent after beam combination and the pulses are stable.
  • the beam combiner combines the two laser beams to double the femtosecond pulse frequency.
  • the femtosecond pulse output by combiner 1 enters beam splitter 2 and is divided into two paths. One path passes through attenuator 2 and enters beam splitter 2, and the other passes through delayer 2 and enters beam splitter 2.
  • the delay time introduced by delayer 2 is the pulse period corresponding to the pulse frequency doubling.
  • Attenuator 2 adjusts the pulse amplitude of the light so that the light pulses are highly consistent and stable after combining.
  • Beam combiner 2 combines the two laser beams to double the femtosecond pulse frequency again.
  • the present invention has significant advantages and beneficial effects, which are specifically embodied in the following aspects:
  • the present invention adopts a low-frequency femtosecond pulse laser generator based on passive mode locking of a saturable absorption mirror.
  • the low-frequency femtosecond pulse passes through the frequency doubling unit more than twice to achieve GHz pulse output;
  • the low-frequency femtosecond pulse generator is 250MHz, and after passing through the frequency doubling unit 1, the pulse frequency becomes 500MHz;
  • the working principle of the frequency doubling unit 2 is the same as that of the frequency doubling unit 1, so through two frequency doubling units, 1GHz femtosecond pulse output is achieved;
  • a lower frequency femtosecond pulse generator can be used; the attenuator can achieve high consistency of pulses after beam combining and ensure pulse stability; through two or more frequency doubling units, GHz can be achieved.
  • Femtosecond laser pulses are subsequently amplified by fiber amplifiers to achieve high-power output, making high-power GHz femtosecond lasers all-fiber-based;
  • the present invention solves the problems of fusion caused by fiber length control, dispersion control in the cavity, and difficulty in starting and locking the laser at high frequency when the fiber laser directly generates femtosecond GHz pulses, thereby realizing the full fiberization of GHz lasers, which is more stable than solid femtosecond GHz lasers.
  • Figure 1 Schematic diagram of the structure of the device of the present invention.
  • a GHz high-frequency femtosecond laser pulse generating device is provided.
  • a frequency doubling unit 2 and a frequency doubling unit 3 are arranged in sequence on the output optical path of a low-frequency femtosecond pulse generator 1.
  • the frequency doubling unit 2 comprises a beam splitter 201, an attenuator 202, a delay 204 and a beam combiner 203.
  • the low-frequency femtosecond pulse generated by the low-frequency femtosecond pulse generator 1 is divided into two paths after entering the beam splitter 201, one of which passes through the attenuator 202 and enters the beam combiner 203, and the other passes through the delay 204 and enters the beam combiner 203, and the femtosecond pulse frequency is doubled.
  • the frequency doubling unit 23 comprises a beam splitter 2301, an attenuator 2302, a delay 2304 and a beam combiner 2303.
  • the femtosecond pulse output by the beam combiner 203 of the frequency doubling unit 2 enters the beam splitter 2301 and is divided into two paths, one of which passes through the attenuator 2302 and enters the beam combiner 2303, and the other passes through the delay 2304 and enters the beam combiner 2303 for beam combining, and the frequency of the femtosecond pulse is doubled again.
  • the low-frequency femtosecond pulse generator 1 comprises a pump source 101, a wavelength division multiplexer 102, a grating 103, a gain fiber 104 and a saturable absorber mirror 105.
  • the pump source 101 is connected to the wavelength division multiplexer 102, the wavelength division multiplexer 102 is connected to the grating 103, the grating 103 is connected to the gain fiber 104, the gain fiber 104 is connected to the saturable absorber mirror 105, and the pump source 101 outputs pump light which passes through the wavelength division multiplexer 102 and enters the laser cavity composed of the grating 103, the gain fiber 104 and the saturable absorber mirror 105, so as to realize passive mode locking and generate femtosecond laser pulses.
  • the low-frequency femtosecond pulse generator 1 is a femtosecond pulse generator with an output wavelength of 1030nm to 1064nm, an output power frequency of 50MHz to 500MHz, an output power of 1mW to 1W, and a pulse width of 100fs to 10ps.
  • Beam splitter 1 201 and beam splitter 2 301 are optical fiber couplers with a splitting ratio of 40% to 60%.
  • Attenuator 1 202 and attenuator 2 302 are optical fiber attenuators with an attenuation ratio of 10% to 90%.
  • Delay The first 204 and the second delay device 304 are single-mode optical fibers with a mode field diameter of 6um to 15um.
  • the low-frequency femtosecond pulse generator 1 generates low-frequency femtosecond pulses through passive mode locking of its saturable absorption mirror, and is divided into two paths after entering the beam splitter 201, one of which passes through the attenuator 202 and enters the beam combiner 203, and the other passes through the delayer 204 and enters the beam combiner 203.
  • the delay time introduced by the delayer 204 is the pulse period corresponding to the pulse frequency after the pulse frequency is doubled.
  • the attenuator 202 adjusts the pulse amplitude of the light so that the light pulses are highly consistent after beam combining and the pulses are stable.
  • the beam combiner 203 combines the two laser beams to double the femtosecond pulse frequency.
  • the femtosecond pulse output by the combiner 203 enters the beam splitter 301 and is divided into two paths, one of which passes through the attenuator 302 and enters the beam combiner 303, and the other passes through the delay 304 and enters the beam combiner 303.
  • the delay time introduced by the delay 304 is the pulse period corresponding to the pulse frequency after the pulse frequency is doubled.
  • the attenuator 302 adjusts the pulse amplitude of the light so that the light pulses after beam combining are highly consistent and the pulses are stable.
  • the beam combiner 303 combines the two laser beams to double the femtosecond pulse frequency again.
  • a low-frequency femtosecond pulse laser generator based on passive mode locking of a saturable absorber mirror is used.
  • the low-frequency femtosecond pulse passes through more than two frequency doubling units to achieve GHz pulse output.
  • the low-frequency femtosecond pulse generator is 250MHz.
  • the pulse frequency becomes 500MHz; the working principle of frequency doubling unit 2-3 is the same as that of frequency doubling unit 1-2, so 1GHz femtosecond pulse output is achieved through two frequency doubling units.
  • a lower frequency femtosecond pulse generator can be used.
  • the attenuator can achieve high consistency of pulses after beam combining and ensure pulse stability.
  • GHz femtosecond laser pulses are achieved, and high-power output is achieved by subsequently amplifying with a fiber amplifier, thus realizing full fiberization of high-power GHz femtosecond lasers.
  • the present invention solves the problems of fusion caused by fiber length control, dispersion control in the cavity, and difficulty in starting and locking the laser at high frequency when the fiber laser directly generates femtosecond GHz pulses, thereby realizing the full fiberization of the GHz laser, which is more stable than solid femtosecond GHz lasers.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
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Abstract

A GHz high-frequency femtosecond laser pulse generation device and a method thereof. At least two frequency multiplication units are sequentially arranged on an output light path of a low-frequency femtosecond pulse generator (1). A first frequency multiplication unit (2) comprises a first beam splitter (201), a first attenuator (202), a first delayer (204) and a first beam combiner (203). After entering the first beam splitter (201), low-frequency femtosecond pulses generated by the low-frequency femtosecond pulse generator (1) are divided into two paths, wherein one path enters the first beam combiner (203) via the first attenuator (202), and the other path enters the first beam combiner (203) via the first delayer (204), so as to achieve beam combining, thereby doubling the femtosecond pulse frequency. A second frequency doubling unit (3) comprises a second beam splitter (301), a second attenuator (302), a second delayer (304) and a second beam combiner (303). After entering the second beam splitter (301), the femtosecond pulses output by the first beam combiner (203) of the first frequency doubling unit (2) are divided into two paths, wherein one path enters the second beam combiner (303) via the second attenuator (302), and the other path enters the second beam combiner (303) via the second delayer (304), so as to achieve beam combining, thereby doubling the femtosecond pulse frequency again. Thus, GHz pulse output is achieved by means of two or more frequency multiplication units.

Description

GHz高频飞秒激光脉冲产生装置及其方法GHz high frequency femtosecond laser pulse generating device and method 技术领域Technical Field
本发明涉及一种GHz高频飞秒激光脉冲产生装置及其方法。The invention relates to a GHz high-frequency femtosecond laser pulse generating device and a method thereof.
背景技术Background technique
飞秒激光器以其极高的峰值功率、窄的脉冲宽度，在材料精细微加工、半导体行业、太阳能光伏、科学研究等领域得到了广泛的应用。飞秒激光加工最重要的特点之一是可通过抑制热影响区实现超高精度微纳加工。飞秒激光较慢的加工速度是限制其工业应用的瓶颈，通过采用GHz飞秒激光，并在脉冲串模式工作，可以在不降低加工质量的情况下显著提高加工效率，因此可以克服飞秒加工这一瓶颈。Femtosecond lasers have been widely used in the fields of fine micro-machining of materials, semiconductor industry, solar photovoltaic, scientific research, etc. due to their extremely high peak power and narrow pulse width. One of the most important features of femtosecond laser processing is that it can achieve ultra-high precision micro-nano processing by suppressing the heat-affected zone. The slow processing speed of femtosecond lasers is the bottleneck that limits their industrial applications. By using GHz femtosecond lasers and working in pulse train mode, the processing efficiency can be significantly improved without reducing the processing quality, thus overcoming the bottleneck of femtosecond processing.
获得稳定的GHz飞秒脉冲的主要方法为被动锁模，锁模激光器的腔长取决于脉冲重复频率，因此GHz飞秒谐振腔腔长非常短(<150毫米)，如果采用光纤激光器实现GHz输出，腔长需要在控制100mm以内。GHz飞秒脉冲获取可以采用固体锁模激光器和光纤锁模激光器两种。专利公开号CN112864785B公开了一种高功率GHz重复频率的飞秒激光产生***，采用固体激光器获得GHz飞秒脉冲，固体激光器容易在150毫米腔长内实现被动锁模，但是因光纤耦合问题较难采用光纤放大器放大，因此激光器需要采用固体放大，无法实现全光纤化。而锁模光纤激光器因腔内多个光纤器件(波分耦合器、增益光纤、光栅等)熔接长度问题，腔长很难控制在150毫米以内，同时短腔很难实现腔内色散补偿，因此采用光纤激光器直接产生稳定的GHz飞秒脉冲激光非常困难。 The main method to obtain stable GHz femtosecond pulses is passive mode locking. The cavity length of the mode-locked laser depends on the pulse repetition frequency. Therefore, the cavity length of the GHz femtosecond resonant cavity is very short (<150 mm). If a fiber laser is used to achieve GHz output, the cavity length needs to be controlled within 100 mm. GHz femtosecond pulses can be obtained using solid-state mode-locked lasers and fiber-optic mode-locked lasers. Patent Publication No. CN112864785B discloses a high-power GHz repetition frequency femtosecond laser generation system, which uses a solid-state laser to obtain GHz femtosecond pulses. Solid-state lasers are easy to achieve passive mode locking within a cavity length of 150 mm, but due to fiber coupling problems, it is difficult to use fiber amplifiers for amplification. Therefore, the laser needs to be amplified by solid state, and full fiberization cannot be achieved. However, due to the problem of the fusion length of multiple fiber devices (wavelength division couplers, gain fibers, gratings, etc.) in the cavity of the mode-locked fiber laser, the cavity length is difficult to control within 150 mm, and it is difficult to achieve intracavity dispersion compensation in a short cavity. Therefore, it is very difficult to use a fiber laser to directly generate a stable GHz femtosecond pulse laser.
发明内容Summary of the invention
本发明的目的是克服现有技术存在的不足，提供一种GHz高频飞秒激光脉冲产生装置及其方法。The purpose of the present invention is to overcome the deficiencies of the prior art and provide a GHz high-frequency femtosecond laser pulse generating device and method.
本发明的目的通过以下技术方案来实现：The purpose of the present invention is achieved through the following technical solutions:
GHz高频飞秒激光脉冲产生装置，其特征在于：低频飞秒脉冲发生器的输出光路上依次至少布置两个倍频单元；GHz high-frequency femtosecond laser pulse generating device, characterized in that: at least two frequency doubling units are arranged in sequence on the output optical path of the low-frequency femtosecond pulse generator;
倍频单元一包含分束器一、衰减器一、延迟器一及合束器一，低频飞秒脉冲发生器产生的低频飞秒脉冲进入分束器一后分为两路，其中一路经过衰减器一进入合束器一，另一路经过延迟器一进入合束器一，进行合束，飞秒脉冲频率翻倍；The frequency doubling unit 1 includes a beam splitter 1, an attenuator 1, a delay 1 and a beam combiner 1. The low-frequency femtosecond pulse generated by the low-frequency femtosecond pulse generator enters the beam splitter 1 and is divided into two paths, one of which passes through the attenuator 1 and enters the beam combiner 1, and the other passes through the delay 1 and enters the beam combiner 1, and the beam is combined to double the frequency of the femtosecond pulse.
倍频单元二包含分束器二、衰减器二、延迟器二及合束器二，倍频单元一的合束器一输出的飞秒脉冲进入分束器二后分为两路，其中一路经过衰减器二进入合束器二，另一路经过延迟器二进入合束器二，进行合束，飞秒脉冲频率再次翻倍。Frequency doubling unit 2 includes beam splitter 2, attenuator 2, delay device 2 and beam combiner 2. The femtosecond pulse output by beam combiner 1 of frequency doubling unit 1 enters beam splitter 2 and is divided into two paths, one of which passes through attenuator 2 and enters beam combiner 2, and the other passes through delay device 2 and enters beam combiner 2 for beam combining, and the frequency of the femtosecond pulse is doubled again.
进一步地，上述的GHz高频飞秒激光脉冲产生装置，其中，所述低频飞秒脉冲发生器包含泵浦源、波分复用器、光栅、增益光纤以及可饱和吸收镜，泵浦源连接波分复用器，波分复用器连接光栅，光栅连接增益光纤，增益光纤连接可饱和吸收镜，泵浦源输出泵浦光经过波分复用器，进入由光栅、增益光纤、可饱和吸收镜组成的激光腔，实现被动锁模产生飞秒激光脉冲。Furthermore, in the above-mentioned GHz high-frequency femtosecond laser pulse generating device, the low-frequency femtosecond pulse generator comprises a pump source, a wavelength division multiplexer, a grating, a gain fiber and a saturable absorber mirror, the pump source is connected to the wavelength division multiplexer, the wavelength division multiplexer is connected to the grating, the grating is connected to the gain fiber, the gain fiber is connected to the saturable absorber mirror, and the pump source outputs pump light through the wavelength division multiplexer and enters the laser cavity composed of the grating, the gain fiber and the saturable absorber mirror to achieve passive mode locking to generate femtosecond laser pulses.
进一步地，上述的GHz高频飞秒激光脉冲产生装置，其中，所述低频飞秒脉冲发生器为输出波长1030nm～1064nm、输出功率频率50MHz～500MHz、输出功率1mW～1W、脉冲宽度100fs～10ps的飞秒脉冲发生器。Furthermore, in the above-mentioned GHz high-frequency femtosecond laser pulse generating device, the low-frequency femtosecond pulse generator is a femtosecond pulse generator with an output wavelength of 1030nm~1064nm, an output power frequency of 50MHz~500MHz, an output power of 1mW~1W, and a pulse width of 100fs~10ps.
进一步地，上述的GHz高频飞秒激光脉冲产生装置，其中，所述分束器一和分束器二为分光比例40％～60％的光纤耦合器。 Furthermore, in the above-mentioned GHz high-frequency femtosecond laser pulse generating device, the beam splitter 1 and the beam splitter 2 are optical fiber couplers with a splitting ratio of 40% to 60%.
进一步地，上述的GHz高频飞秒激光脉冲产生装置，其中，所述衰减器一和衰减器二为衰减比例10％～90％的光纤衰减器。Furthermore, in the above-mentioned GHz high-frequency femtosecond laser pulse generating device, the attenuator 1 and the attenuator 2 are optical fiber attenuators with an attenuation ratio of 10% to 90%.
进一步地，上述的GHz高频飞秒激光脉冲产生装置，其中，所述延迟器一和延迟器二为光纤模场直径6um～15um的单模光纤。Furthermore, in the above-mentioned GHz high-frequency femtosecond laser pulse generating device, the delay device 1 and the delay device 2 are single-mode optical fibers with an optical fiber mode field diameter of 6um to 15um.
本发明GHz高频飞秒激光脉冲产生装置，低频飞秒脉冲发生器通过其可饱和吸收镜被动锁模产生低频飞秒脉冲，进入分束器一后分为两路，其中一路经过衰减器一进入合束器一，另一路经过延迟器一进入合束器一，延迟器一引入的延迟时间为脉冲频率倍频后对应的脉冲周期，衰减器一调节光的脉冲幅值，使合束后光脉冲高度一致，脉冲稳定，合束器一将两路激光合束实现飞秒脉冲频率翻倍；The present invention discloses a GHz high-frequency femtosecond laser pulse generating device. A low-frequency femtosecond pulse generator generates a low-frequency femtosecond pulse through passive mode locking of its saturable absorption mirror. The low-frequency femtosecond pulse enters a beam splitter and is divided into two paths. One path passes through an attenuator and enters a beam combiner. The other path passes through a delay device and enters a beam combiner. The delay time introduced by the delay device is the pulse period corresponding to the pulse frequency after the pulse frequency is doubled. The attenuator device adjusts the pulse amplitude of the light so that the light pulses are highly consistent after beam combination and the pulses are stable. The beam combiner combines the two laser beams to double the femtosecond pulse frequency.
合束器一输出的飞秒脉冲进入分束器二后分为两路，其中一路经过衰减器二进入合束器二，另一路经过延迟器二进入合束器二，延迟器二引入的延迟时间为脉冲频率倍频后对应的脉冲周期，衰减器二调节光的脉冲幅值，使合束后光脉冲高度一致，脉冲稳定，合束器二将两路激光合束实现飞秒脉冲频率再次翻倍。The femtosecond pulse output by combiner 1 enters beam splitter 2 and is divided into two paths. One path passes through attenuator 2 and enters beam splitter 2, and the other passes through delayer 2 and enters beam splitter 2. The delay time introduced by delayer 2 is the pulse period corresponding to the pulse frequency doubling. Attenuator 2 adjusts the pulse amplitude of the light so that the light pulses are highly consistent and stable after combining. Beam combiner 2 combines the two laser beams to double the femtosecond pulse frequency again.
本发明与现有技术相比具有显著的优点和有益效果，具体体现在以下方面：Compared with the prior art, the present invention has significant advantages and beneficial effects, which are specifically embodied in the following aspects:
①本发明采用基于可饱和吸收镜被动锁模低频飞秒脉冲激光发生器，低频飞秒脉冲通过两次以上倍频单元，实现GHz脉冲输出；低频飞秒脉冲发生器为250MHz，经过倍频单元一后，脉冲频率变为500MHz；倍频单元二工作原理与倍频单元一相同，因此通过两个倍频单元，实现1GHz飞秒脉冲输出；① The present invention adopts a low-frequency femtosecond pulse laser generator based on passive mode locking of a saturable absorption mirror. The low-frequency femtosecond pulse passes through the frequency doubling unit more than twice to achieve GHz pulse output; the low-frequency femtosecond pulse generator is 250MHz, and after passing through the frequency doubling unit 1, the pulse frequency becomes 500MHz; the working principle of the frequency doubling unit 2 is the same as that of the frequency doubling unit 1, so through two frequency doubling units, 1GHz femtosecond pulse output is achieved;
②通过增加倍频单元的数量，可以实现更高频率输出，同时为了获得1GHz频率，可以使用更低频率的飞秒脉冲发生器；衰减器可实现合束后脉冲高度一致，保证脉冲稳定性；通过两个及以上倍频单元，实现GHz 飞秒激光脉冲，后续通过采用光纤放大器进行放大实现高功率输出，实现高功率GHz飞秒激光器全光纤化；② By increasing the number of frequency doubling units, higher frequency output can be achieved. At the same time, in order to obtain a frequency of 1 GHz, a lower frequency femtosecond pulse generator can be used; the attenuator can achieve high consistency of pulses after beam combining and ensure pulse stability; through two or more frequency doubling units, GHz can be achieved. Femtosecond laser pulses are subsequently amplified by fiber amplifiers to achieve high-power output, making high-power GHz femtosecond lasers all-fiber-based;
③本发明解决了光纤激光器直接产生飞秒GHz脉冲存在的光纤长度控制引起的熔接问题、腔内色散控制问题及高频下激光器难以启动锁模问题，实现GHz激光器全光纤化，相比固体飞秒GHz激光器更加稳定。③ The present invention solves the problems of fusion caused by fiber length control, dispersion control in the cavity, and difficulty in starting and locking the laser at high frequency when the fiber laser directly generates femtosecond GHz pulses, thereby realizing the full fiberization of GHz lasers, which is more stable than solid femtosecond GHz lasers.
本发明的其他特征和优点将在随后的说明书阐述，并且，部分地从说明书中变得显而易见，或者通过实施本发明具体实施方式了解。本发明的目的和其他优点可通过在所写的说明书以及附图中所特别指出的结构来实现和获得。Other features and advantages of the present invention will be described in the following description, and partly become apparent from the description, or be understood by practicing the specific embodiments of the present invention. The purpose and other advantages of the present invention can be realized and obtained by the structures particularly pointed out in the written description and the drawings.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本发明实施例的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，应当理解，以下附图仅示出了本发明的某些实施例，因此不应被看作是对范围的限定，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他相关的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.
图1：本发明装置的结构示意图。Figure 1: Schematic diagram of the structure of the device of the present invention.
具体实施方式Detailed ways
下面将结合本发明实施例中附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。通常在此处附图中描述和示出的本发明实施例的组件可以以各种不同的配置来布置和设计。因此，以下对在附图中提供的本发明的实施例的详细描述并非旨在限制要求保护的本发明的范围，而是仅仅表示本发明的选定实施例。基于本发明的实施例，本领域技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例，都属于本发明保护 的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. The components of the embodiments of the present invention generally described and shown in the drawings herein may be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without making creative efforts are protected by the present invention. range.
应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步定义和解释。同时，在本发明的描述中，方位术语和次序术语等仅用于区分描述，而不能理解为指示或暗示相对重要性。It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, in the description of the present invention, directional terms and order terms are only used to distinguish the description and cannot be understood as indicating or implying relative importance.
如图1所示，GHz高频飞秒激光脉冲产生装置，低频飞秒脉冲发生器1的输出光路上依次布置倍频单元一2和倍频单元二3；倍频单元一2包含分束器一201、衰减器一202、延迟器一204及合束器一203，低频飞秒脉冲发生器1产生的低频飞秒脉冲进入分束器一201后分为两路，其中一路经过衰减器一202进入合束器一203，另一路经过延迟器一204进入合束器一203，进行合束，飞秒脉冲频率翻倍；As shown in FIG1 , a GHz high-frequency femtosecond laser pulse generating device is provided. A frequency doubling unit 2 and a frequency doubling unit 3 are arranged in sequence on the output optical path of a low-frequency femtosecond pulse generator 1. The frequency doubling unit 2 comprises a beam splitter 201, an attenuator 202, a delay 204 and a beam combiner 203. The low-frequency femtosecond pulse generated by the low-frequency femtosecond pulse generator 1 is divided into two paths after entering the beam splitter 201, one of which passes through the attenuator 202 and enters the beam combiner 203, and the other passes through the delay 204 and enters the beam combiner 203, and the femtosecond pulse frequency is doubled.
倍频单元二3包含分束器二301、衰减器二302、延迟器二304及合束器二303，倍频单元一2的合束器一203输出的飞秒脉冲进入分束器二301后分为两路，其中一路经过衰减器二302进入合束器二303，另一路经过延迟器二304进入合束器二303，进行合束，飞秒脉冲频率再次翻倍。The frequency doubling unit 23 comprises a beam splitter 2301, an attenuator 2302, a delay 2304 and a beam combiner 2303. The femtosecond pulse output by the beam combiner 203 of the frequency doubling unit 2 enters the beam splitter 2301 and is divided into two paths, one of which passes through the attenuator 2302 and enters the beam combiner 2303, and the other passes through the delay 2304 and enters the beam combiner 2303 for beam combining, and the frequency of the femtosecond pulse is doubled again.
低频飞秒脉冲发生器1包含泵浦源101、波分复用器102、光栅103、增益光纤104以及可饱和吸收镜105，泵浦源101连接波分复用器102，波分复用器102连接光栅103，光栅103连接增益光纤104，增益光纤104连接可饱和吸收镜105，泵浦源101输出泵浦光经过波分复用器102，进入由光栅103、增益光纤104、可饱和吸收镜105组成的激光腔，实现被动锁模产生飞秒激光脉冲。The low-frequency femtosecond pulse generator 1 comprises a pump source 101, a wavelength division multiplexer 102, a grating 103, a gain fiber 104 and a saturable absorber mirror 105. The pump source 101 is connected to the wavelength division multiplexer 102, the wavelength division multiplexer 102 is connected to the grating 103, the grating 103 is connected to the gain fiber 104, the gain fiber 104 is connected to the saturable absorber mirror 105, and the pump source 101 outputs pump light which passes through the wavelength division multiplexer 102 and enters the laser cavity composed of the grating 103, the gain fiber 104 and the saturable absorber mirror 105, so as to realize passive mode locking and generate femtosecond laser pulses.
低频飞秒脉冲发生器1为输出波长1030nm～1064nm、输出功率频率50MHz～500MHz、输出功率1mW～1W、脉冲宽度100fs～10ps的飞秒脉冲发生器。The low-frequency femtosecond pulse generator 1 is a femtosecond pulse generator with an output wavelength of 1030nm to 1064nm, an output power frequency of 50MHz to 500MHz, an output power of 1mW to 1W, and a pulse width of 100fs to 10ps.
分束器一201和分束器二301为分光比例40％～60％的光纤耦合器。衰减器一202和衰减器二302为衰减比例10～90％的光纤衰减器。延迟器 一204和延迟器二304为光纤模场直径6um～15um的单模光纤。Beam splitter 1 201 and beam splitter 2 301 are optical fiber couplers with a splitting ratio of 40% to 60%. Attenuator 1 202 and attenuator 2 302 are optical fiber attenuators with an attenuation ratio of 10% to 90%. Delay The first 204 and the second delay device 304 are single-mode optical fibers with a mode field diameter of 6um to 15um.
具体应用时，低频飞秒脉冲发生器1通过其可饱和吸收镜被动锁模产生低频飞秒脉冲，进入分束器一201后分为两路，其中一路经过衰减器一202进入合束器一203，另一路经过延迟器一204进入合束器一203，延迟器一204(一长度单模光纤)引入的延迟时间为脉冲频率倍频后对应的脉冲周期，衰减器一202调节光的脉冲幅值，使合束后光脉冲高度一致，脉冲稳定，合束器一203将两路激光合束实现飞秒脉冲频率翻倍；In specific applications, the low-frequency femtosecond pulse generator 1 generates low-frequency femtosecond pulses through passive mode locking of its saturable absorption mirror, and is divided into two paths after entering the beam splitter 201, one of which passes through the attenuator 202 and enters the beam combiner 203, and the other passes through the delayer 204 and enters the beam combiner 203. The delay time introduced by the delayer 204 (a length of single-mode optical fiber) is the pulse period corresponding to the pulse frequency after the pulse frequency is doubled. The attenuator 202 adjusts the pulse amplitude of the light so that the light pulses are highly consistent after beam combining and the pulses are stable. The beam combiner 203 combines the two laser beams to double the femtosecond pulse frequency.
合束器一203输出的飞秒脉冲进入分束器二301后分为两路，其中一路经过衰减器二302进入合束器二303，另一路经过延迟器二304进入合束器二303，延迟器二304引入的延迟时间为脉冲频率倍频后对应的脉冲周期，衰减器二302调节光的脉冲幅值，使合束后光脉冲高度一致，脉冲稳定，合束器二303将两路激光合束实现飞秒脉冲频率再次翻倍。The femtosecond pulse output by the combiner 203 enters the beam splitter 301 and is divided into two paths, one of which passes through the attenuator 302 and enters the beam combiner 303, and the other passes through the delay 304 and enters the beam combiner 303. The delay time introduced by the delay 304 is the pulse period corresponding to the pulse frequency after the pulse frequency is doubled. The attenuator 302 adjusts the pulse amplitude of the light so that the light pulses after beam combining are highly consistent and the pulses are stable. The beam combiner 303 combines the two laser beams to double the femtosecond pulse frequency again.
采用基于可饱和吸收镜被动锁模低频飞秒脉冲激光发生器，低频飞秒脉冲通过两次以上倍频单元，实现GHz脉冲输出。低频飞秒脉冲发生器为250MHz，经过倍频单元一2后，脉冲频率变为500MHz；倍频单元二3工作原理与倍频单元一2相同，因此通过两个倍频单元，实现1GHz飞秒脉冲输出。通过增加倍频单元的数量，可以实现更高频率输出，同时为了获得1GHz频率，可以使用更低频率的飞秒脉冲发生器。衰减器可实现合束后脉冲高度一致，保证脉冲稳定性。通过两个及以上倍频单元，实现GHz飞秒激光脉冲，后续通过采用光纤放大器进行放大实现高功率输出，实现高功率GHz飞秒激光器全光纤化。A low-frequency femtosecond pulse laser generator based on passive mode locking of a saturable absorber mirror is used. The low-frequency femtosecond pulse passes through more than two frequency doubling units to achieve GHz pulse output. The low-frequency femtosecond pulse generator is 250MHz. After passing through frequency doubling unit 1-2, the pulse frequency becomes 500MHz; the working principle of frequency doubling unit 2-3 is the same as that of frequency doubling unit 1-2, so 1GHz femtosecond pulse output is achieved through two frequency doubling units. By increasing the number of frequency doubling units, higher frequency output can be achieved. At the same time, in order to obtain a frequency of 1GHz, a lower frequency femtosecond pulse generator can be used. The attenuator can achieve high consistency of pulses after beam combining and ensure pulse stability. Through two or more frequency doubling units, GHz femtosecond laser pulses are achieved, and high-power output is achieved by subsequently amplifying with a fiber amplifier, thus realizing full fiberization of high-power GHz femtosecond lasers.
本发明解决了光纤激光器直接产生飞秒GHz脉冲存在的光纤长度控制引起的熔接问题、腔内色散控制问题及高频下激光器难以启动锁模问题，实现GHz激光器全光纤化，相比固体飞秒GHz激光器更加稳定。The present invention solves the problems of fusion caused by fiber length control, dispersion control in the cavity, and difficulty in starting and locking the laser at high frequency when the fiber laser directly generates femtosecond GHz pulses, thereby realizing the full fiberization of the GHz laser, which is more stable than solid femtosecond GHz lasers.
以上所述仅为本发明的优选实施例而已，并不用于限制本发明，对于 本领域的技术人员来说，本发明可以有各种更改和变化。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。应注意到：相似的标号和字母在下面的附图中表示类似项，因此，一旦某一项在一个附图中被定义，则在随后的附图中不需要对其进行进一步定义和解释。The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It is obvious to those skilled in the art that the present invention may be modified and varied in various ways. Any modification, equivalent substitution, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
上述仅为本发明的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明揭露的技术范围内，可轻易想到变化或替换，都应涵盖在本发明的保护范围之内。The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.
需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。 It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

Claims (7)

  1. GHz高频飞秒激光脉冲产生装置，其特征在于：低频飞秒脉冲发生器(1)的输出光路上依次至少布置两个倍频单元；A GHz high-frequency femtosecond laser pulse generating device, characterized in that at least two frequency doubling units are arranged in sequence on the output optical path of a low-frequency femtosecond pulse generator (1);
    倍频单元一(2)包含分束器一(201)、衰减器一(202)、延迟器一(204)及合束器一(203)，低频飞秒脉冲发生器(1)产生的低频飞秒脉冲进入分束器一(201)后分为两路，其中一路经过衰减器一(202)进入合束器一(203)，另一路经过延迟器一(204)进入合束器一(203)，进行合束，飞秒脉冲频率翻倍；The frequency doubling unit (2) comprises a beam splitter (201), an attenuator (202), a delay device (204) and a beam combiner (203). The low-frequency femtosecond pulse generated by the low-frequency femtosecond pulse generator (1) enters the beam splitter (201) and is divided into two paths, one of which passes through the attenuator (202) and enters the beam combiner (203), and the other passes through the delay device (204) and enters the beam combiner (203) to be combined, thereby doubling the frequency of the femtosecond pulse.
    倍频单元二(3)包含分束器二(301)、衰减器二(302)、延迟器二(304)及合束器二(303)，倍频单元一(2)的合束器一(203)输出的飞秒脉冲进入分束器二(301)后分为两路，其中一路经过衰减器二(302)进入合束器二(303)，另一路经过延迟器二(304)进入合束器二(303)，进行合束，飞秒脉冲频率再次翻倍。The frequency doubling unit 2 (3) comprises a beam splitter 2 (301), an attenuator 2 (302), a delay 2 (304) and a beam combiner 2 (303). The femtosecond pulse output by the beam combiner 1 (203) of the frequency doubling unit 1 (2) enters the beam splitter 2 (301) and is divided into two paths, one of which passes through the attenuator 2 (302) and enters the beam combiner 2 (303), and the other passes through the delay 2 (304) and enters the beam combiner 2 (303) for beam combining, and the frequency of the femtosecond pulse is doubled again.
  2. 根据权利要求1所述的GHz高频飞秒激光脉冲产生装置，其特征在于：所述低频飞秒脉冲发生器(1)包含泵浦源(101)、波分复用器(102)、光栅(103)、增益光纤(104)以及可饱和吸收镜(105)，泵浦源(101)连接波分复用器(102)，波分复用器(102)连接光栅(103)，光栅(103)连接增益光纤(104)，增益光纤(104)连接可饱和吸收镜(105)，泵浦源(101)输出泵浦光经过波分复用器(102)，进入由光栅(103)、增益光纤(104)、可饱和吸收镜(105)组成的激光腔，实现被动锁模产生飞秒激光脉冲。The GHz high-frequency femtosecond laser pulse generating device according to claim 1 is characterized in that: the low-frequency femtosecond pulse generator (1) comprises a pump source (101), a wavelength division multiplexer (102), a grating (103), a gain fiber (104) and a saturable absorber mirror (105), the pump source (101) is connected to the wavelength division multiplexer (102), the wavelength division multiplexer (102) is connected to the grating (103), the grating (103) is connected to the gain fiber (104), the gain fiber (104) is connected to the saturable absorber mirror (105), the pump source (101) outputs pump light which passes through the wavelength division multiplexer (102) and enters the laser cavity composed of the grating (103), the gain fiber (104) and the saturable absorber mirror (105), so as to realize passive mode locking to generate femtosecond laser pulses.
  3. 根据权利要求1或2所述的GHz高频飞秒激光脉冲产生装置，其特征在于：所述低频飞秒脉冲发生器(1)为输出波长1030nm～1064nm、输出功率频率50MHz～500MHz、输出功率1mW～1W、脉冲宽度100fs～10ps的飞秒脉冲发生器。 The GHz high-frequency femtosecond laser pulse generating device according to claim 1 or 2 is characterized in that the low-frequency femtosecond pulse generator (1) is a femtosecond pulse generator with an output wavelength of 1030nm to 1064nm, an output power frequency of 50MHz to 500MHz, an output power of 1mW to 1W, and a pulse width of 100fs to 10ps.
  4. 根据权利要求1所述的GHz高频飞秒激光脉冲产生装置，其特征在于：所述分束器一(201)和分束器二(301)为分光比例40％～60％的光纤耦合器。The GHz high-frequency femtosecond laser pulse generating device according to claim 1 is characterized in that: the beam splitter 1 (201) and the beam splitter 2 (301) are optical fiber couplers with a splitting ratio of 40% to 60%.
  5. 根据权利要求1所述的GHz高频飞秒激光脉冲产生装置，其特征在于：所述衰减器一(202)和衰减器二(302)为衰减比例10％～90％的光纤衰减器。The GHz high-frequency femtosecond laser pulse generating device according to claim 1 is characterized in that: the attenuator 1 (202) and the attenuator 2 (302) are optical fiber attenuators with an attenuation ratio of 10% to 90%.
  6. 根据权利要求1所述的GHz高频飞秒激光脉冲产生装置，其特征在于：所述延迟器一(204)和延迟器二(304)为光纤模场直径6um～15um的单模光纤。The GHz high-frequency femtosecond laser pulse generating device according to claim 1 is characterized in that the delay device 1 (204) and the delay device 2 (304) are single-mode optical fibers with an optical fiber mode field diameter of 6um to 15um.
  7. 权利要求1所述的装置实现GHz高频飞秒激光脉冲产生方法，其特征在于：低频飞秒脉冲发生器(1)通过其可饱和吸收镜被动锁模产生低频飞秒脉冲，进入分束器一(201)后分为两路，其中一路经过衰减器一(202)进入合束器一(203)，另一路经过延迟器一(204)进入合束器一(203)，延迟器一(204)引入的延迟时间为脉冲频率倍频后对应的脉冲周期，衰减器一(202)调节光的脉冲幅值，使合束后光脉冲高度一致，脉冲稳定，合束器一(203)将两路激光合束实现飞秒脉冲频率翻倍；The device described in claim 1 realizes a method for generating GHz high-frequency femtosecond laser pulses, characterized in that: a low-frequency femtosecond pulse generator (1) generates a low-frequency femtosecond pulse by passively locking the low-frequency femtosecond pulse through its saturable absorber mirror, and is divided into two paths after entering a beam splitter (201), one of which passes through an attenuator (202) and enters a beam combiner (203), and the other passes through a delayer (204) and enters a beam combiner (203). The delay time introduced by the delayer (204) is the pulse period corresponding to the pulse frequency after the pulse frequency is doubled. The attenuator (202) adjusts the pulse amplitude of the light so that the light pulses are highly consistent after beam combining and the pulses are stable. The beam combiner (203) combines the two laser beams to double the frequency of the femtosecond pulses.
    合束器一(203)输出的飞秒脉冲进入分束器二(301)后分为两路，其中一路经过衰减器二(302)进入合束器二(303)，另一路经过延迟器二(304)进入合束器二(303)，延迟器二(304)引入的延迟时间为脉冲频率倍频后对应的脉冲周期，衰减器二(302)调节光的脉冲幅值，使合束后光脉冲高度一致，脉冲稳定，合束器二(303)将两路激光合束实现飞秒脉冲频率再次翻倍。 The femtosecond pulse output by the beam combiner 1 (203) enters the beam splitter 2 (301) and is divided into two paths, one of which passes through the attenuator 2 (302) and enters the beam combiner 2 (303), and the other passes through the delayer 2 (304) and enters the beam combiner 2 (303). The delay time introduced by the delayer 2 (304) is the pulse period corresponding to the pulse frequency after the pulse frequency is doubled. The attenuator 2 (302) adjusts the pulse amplitude of the light so that the light pulses are highly consistent and the pulses are stable after the beam is combined. The beam combiner 2 (303) combines the two laser beams to double the femtosecond pulse frequency again.
PCT/CN2023/113337 2022-12-12 2023-08-16 Ghz high-frequency femtosecond laser pulse generation device and method thereof WO2024124934A1 (en)

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