WO2024122138A1 - Transport vehicle system - Google Patents

Transport vehicle system Download PDF

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Publication number
WO2024122138A1
WO2024122138A1 PCT/JP2023/032503 JP2023032503W WO2024122138A1 WO 2024122138 A1 WO2024122138 A1 WO 2024122138A1 JP 2023032503 W JP2023032503 W JP 2023032503W WO 2024122138 A1 WO2024122138 A1 WO 2024122138A1
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Prior art keywords
track
transport vehicle
transport
transported object
placement location
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PCT/JP2023/032503
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French (fr)
Japanese (ja)
Inventor
陽一 本告
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村田機械株式会社
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Publication of WO2024122138A1 publication Critical patent/WO2024122138A1/en

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  • the present invention relates to a transport vehicle system.
  • Patent Document 1 discloses a technology in which an overhead transport vehicle travels in the same direction on two tracks aligned vertically. Patent Document 1 discloses that by using two tracks, congestion of overhead transport vehicles can be suppressed.
  • the present invention provides a transport vehicle system that can improve the efficiency of transporting transported objects.
  • the transport vehicle system has a first track that is provided so that a placement location for the transported object is located below, a second track that is provided so that the placement location is located below, a plurality of transport vehicles that travel along the first track and the second track and transport the transported object, and a controller that controls the operation of each of the plurality of transport vehicles, and the transport vehicles have a gripping section that grips the transported object, a movement mechanism that moves the gripping section to just above the placement location, and a lifting mechanism that raises and lowers the gripping section located just above the placement location relative to the placement location, and the transport vehicles that are present at a transfer position on the first track for transferring the transported object to a specific placement location and the transport vehicles that are present at a transfer position on the second track for transferring the transported object to a specific placement location travel in different directions, and the orientation of the transported object gripped by each transport vehicle is the same.
  • each transport vehicle present at a transfer position on each track for transferring the transported object to a specific loading location has a different running direction, and the orientation of the transported object held by each transport vehicle is the same, so that the transported object can be loaded onto the loading location in the same orientation from either track, and by selectively using the first track and the second track, the transport distance can be shortened and the transport efficiency of the transported object can be improved.
  • the multiple transport vehicles may travel forward on one of the first track and the second track, and reverse on the other track.
  • transport vehicles having the same structure can be used on each track.
  • the second track may be provided below the first track.
  • the layout of the transport vehicle system can be space-saving.
  • the first track and the second track are connected to each other, and an access track along which the transport vehicles travel may be provided, and the transport vehicles may switch between traveling forward and traveling reverse on a switching track included in the access track.
  • transport vehicles that arrive at the destination faster can be used while balancing the number of transport vehicles between the first track and the second track.
  • the switching track may have a length that allows two or more transport vehicles to enter at once, and the controller may cause two or more transport vehicles to enter the switching track from one of the first track and the second track, and cause the transport vehicles that entered the switching track last to exit to the other track in order. According to this aspect, it is possible to realize the movement of transport vehicles between the first track and the second track in a shorter time.
  • FIG. 1 is a plan view showing a configuration example of a guided vehicle system according to an embodiment.
  • FIG. 2 is a front view showing a configuration example of a transport vehicle according to an embodiment.
  • 5A and 5B are diagrams illustrating the orientation of an object transported by a transport vehicle according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment.
  • FIG. 13 is a diagram illustrating an example of a switching trajectory according to the embodiment.
  • FIG. 2 is a front view showing an example of the configuration of a track and a transport vehicle according to the embodiment.
  • FIG. 2 is a front view showing an example of the configuration of a track and a transport vehicle according to the embodiment.
  • 5A to 5C are diagrams illustrating an example of transfer of a transported object according to the embodiment.
  • the transport vehicle system 1 is a plan view showing an example of the configuration of a transport vehicle system according to an embodiment.
  • the transport vehicle system 1 has a first track 10A, a second track 10B, a plurality of transport vehicles 20A, a plurality of transport vehicles 20B, a plurality of storage shelves 40, and a controller 50.
  • the transport vehicle system 1 is a system arranged in a manufacturing factory for semiconductor devices or the like.
  • the transport vehicles 20A and 20B are not distinguished from each other, they are simply referred to as "track 10".
  • transport vehicles 20A and 20B are not distinguished from each other, they are simply referred to as "transport vehicles 20".
  • the transport vehicle 20 traveling on the first track 10A is referred to as transport vehicle 20A
  • the transport vehicle 20 traveling on the second track 10B is referred to as transport vehicle 20B.
  • the track 10 is the travel area of the transport vehicle 20, and is, for example, a travel rail provided on the ceiling of a clean room, etc., and is provided adjacent to the processing device 100 (equipment port 101) and storage shelf 40.
  • the first track 10A and the second track 10B are provided so that the placement location of the transported object 90 (e.g., storage shelf 40, equipment port 101) is located below.
  • the track 10 provided higher is the first track 10A
  • the second track 10B is provided below the first track 10A.
  • the first track 10A and the second track 10B are provided in a position where they overlap in a plan view.
  • the first track 10A (solid line) and the second track 10B (dashed line) are illustrated shifted.
  • the transport vehicle 20 is a ceiling transport vehicle that travels along the track 10 based on commands from the controller 50 and transports transported objects 90 (e.g., containers, objects), such as FOUPs that contain semiconductor wafers used in the manufacture of semiconductor devices, or reticle pods that contain processing materials such as reticles.
  • the transport vehicle 20 travels along the track 10 while suspended from the track 10.
  • the transport vehicle 20 transmits its own status information to the controller 50 as appropriate.
  • the status information includes information on the current position, destination, running status, and status of the transported object 90, along with transport vehicle identification information that identifies the transport vehicle 20.
  • the running status is information indicating the current speed of the transport vehicle 20.
  • the status of the transported object 90 is information indicating the presence or absence, type, etc.
  • the controller 50 outputs commands to the transport vehicle 20 based on the status information from the transport vehicle 20.
  • the multiple transport vehicles 20 travel forward on one of the first track 10A and the second track 10B, and travel backward on the other.
  • the transport vehicle 20 has a forward and backward direction, and in FIG. 1 and other figures, the forward direction of the transport vehicle 20 is represented by a tapered tip.
  • the transport vehicle 20A travels forward (solid arrow in the figure), and the transport vehicle 20B travels backward (dashed arrow in the figure).
  • the storage shelf 40 is one of the locations where the transported object 90 transported by the transport vehicle 20 is placed, and stores the transported object 90 transported by the transport vehicle 20.
  • the controller 50 controls the operation of each of the transport vehicles 20. Specifically, the controller 50 controls the operation of the transport vehicles 20 in units of one or more islands (three islands in FIG. 1) based on instructions from a higher-level controller (not shown). For example, the higher-level controller issues the source (from) and destination (to) to the controller 50, and also determines whether the first track 10A or the second track 10B will be used. The controller 50 receives information on the source and destination from the higher-level controller, and information indicating whether the first track 10A or the second track 10B will be used.
  • the controller 50 based on the status of the track 10 (e.g., congestion, availability) and status information of the transport vehicles 20, the controller 50 identifies the transport vehicle 20 that will arrive faster from the source to the destination, and outputs a transport command to the identified transport vehicle 20.
  • the transport vehicle 20 that will arrive faster from the source to the destination, and outputs a transport command to the identified transport vehicle 20.
  • the processing device 100 is, for example, an exposure device, a coater developer, a film forming device, or an etching device, and performs various processes on the semiconductor wafers in the transported object 90 transported by the transport vehicle 20.
  • the equipment port 101 is one of the locations where the transported object 90 transported by the transport vehicle 20 is placed. For example, when the transported object 90 placed in the equipment port 101 is transferred to the processing device 100, the processing device 100 performs various processes on the semiconductor wafers contained therein. The transported object 90 is processed into a semiconductor wafer by the processing device 100 and then transferred to the equipment port 101.
  • FIG. 2 is a front view showing an example of the configuration of a transport vehicle according to an embodiment.
  • the transport vehicle 20 has a gripping unit 21, a lifting mechanism 22, and a moving mechanism 23.
  • the gripping unit 21 grips the transported object 90.
  • the gripping unit 21 is a device that grips and releases the flange portion 91 of the transported object 90.
  • the gripping unit 21 grips the flange portion 91 of the transported object 90 when the transport vehicle 20 retrieves the transported object 90 from a placement location such as the storage shelf 40 or the equipment port 101.
  • the gripping unit 21 releases the flange portion 91 of the transported object 90 when the transport vehicle 20 places the transported object 90 on a placement location such as the storage shelf 40 or the equipment port 101.
  • the moving mechanism 23 moves the gripping unit 21 to a position directly above the placement location.
  • the lifting mechanism 22 raises and lowers the gripping unit 21, which is located directly above the placement location, relative to the placement location.
  • the moving mechanism 23 is a device that moves the gripping unit 21 and the lifting mechanism 22 to both sides from the transport vehicle 20.
  • the moving mechanism 23 places the transported object 90 on a placement location such as a storage shelf 40 or an equipment port 101, or moves the gripping unit 21 and the lifting mechanism 22 to a position directly above a placement location where the transported object 90 can be retrieved from the placement location.
  • the lifting mechanism 22 is a device that raises and lowers the gripping unit 21 in the vertical direction.
  • the lifting mechanism 22 has a hoisting mechanism 22a and a belt 22b.
  • the hoisting mechanism 22a is held by the moving mechanism 23 and can vertically wind up and down the belt 22b.
  • the belt 22b hangs down from the winding mechanism 22a and holds the gripping part 21 at its lower end.
  • the lifting mechanism 22 can wind up and wind down the transported object 90 gripped by the gripping part 21 at least a distance to a placement location such as the storage shelf 40 or the equipment port 101.
  • the transport vehicle 20 can place the transported object 90 at a placement location by operating the moving mechanism 23 and the lifting mechanism 22, and release the flange portion 91 gripped by the gripping portion 21, and can retrieve the transported object 90 from the placement location by having the gripping portion 21 grip the flange portion 91.
  • both transport vehicles 20A and 20B can place the transported object 90 at a placement location such as the storage shelf 40 or equipment port 101, or retrieve it from the placement location.
  • FIG. 3 is a diagram for explaining the orientation of the transported object transported by the transport vehicle according to the embodiment.
  • the transport vehicle 20A present at the transfer position for transferring the transported object 90 to a specific placement location on the first track 10A and the transport vehicle 20B present at the transfer position for transferring the transported object 90 to a specific placement location on the second track 10B have different running directions, and the orientation of the transported object 90 held by each transport vehicle 20 is the same.
  • the transport vehicle 20A travels forward (solid arrow in the figure), and the transport vehicle 20B travels backward (dashed arrow in the figure).
  • the transported object 90 When the transported object 90 is placed on a placement location such as the storage shelf 40 or the equipment port 101, it is preferable that the transported object 90 is placed in the same orientation. Specifically, when the semiconductor wafer is processed by the processing device 100, it is assumed that the wafer is placed in a specific orientation. If the wafer is not placed in the specific orientation when the wafer is processed, the processing result will be different from the expected result. If the transported object 90 is not placed in the specified orientation, a mechanism is required to rotate it to the specified orientation. For this reason, the present embodiment is configured so that a mechanism for rotating the transported object 90 is not required.
  • the transport vehicle 20 is moved forward on one of the first track 10A and the second track 10B, and backward on the other, thereby improving the transport efficiency of the transported object 90.
  • the transport time does not differ significantly regardless of which track 10 is used (in detail, it takes more time to use the track 10 installed above, because the distance to raise and lower the transported object 90 is longer).
  • each transport vehicle 20 is moved forward and the transport vehicle 20B is moved backward, and each transport vehicle 20 is at a transfer position for transferring the transported object 90 to a specific placement location (the same placement location), the orientation of the transported object 90 held by each transport vehicle 20 is the same, so the transport time can be shortened.
  • the transport time is shortened if the transported object 90 is transported by the transport vehicle 20A.
  • the transport time is shortened if the transported object 90 is transported by the transport vehicle 20B. In this way, by having one of the transport vehicles 20 traveling on each track 10 travel forward and the other travel backward, the transport efficiency of the transported object 90 is improved.
  • the transport vehicle 20 may be able to travel between the first track 10A and the second track 10B.
  • the transport vehicle 20 When the transport vehicle 20 travels between the first track 10A and the second track 10B, it switches between forward travel and reverse travel in order not to use a mechanism for rotating the transported object 90 and to improve transport efficiency.
  • Figures 4A to 4E are diagrams for explaining an example of travel between tracks by the transport vehicle according to the embodiment.
  • the transport vehicle system 1 has an access track 15 that connects the first track 10A and the second track 10B and on which the transport vehicle 20 travels.
  • the transport vehicle 20 switches between forward travel and reverse travel on a switching track 15a included in the access track 15.
  • the transport vehicle 20 switches between forward travel and reverse travel by running by switchback on the switching track 15a, which is part of the access track 15.
  • the transport vehicle 20 (transport vehicle 20A traveling forward on the first track 10A) enters the access track 15. Then, as shown in Figure 4C, when the transport vehicle 20 travels to the switching track 15a, it switches from traveling forward to traveling backward. Thereafter, as shown in Figures 4D and 4E, the transport vehicle 20 travels backward on the access track 15, and travels backward on the second track 10B as transport vehicle 20B. In this way, the transport vehicle 20 switches between traveling forward and traveling backward on the access track 15 (switching track 15a) connecting the first track 10A and the second track 10B, thereby ensuring improved transport efficiency without using a mechanism to rotate the transported object 90.
  • 4A to 4E show an example of the transport vehicle 20 moving from the first track 10A to the second track 10B, but when moving from the second track 10B to the first track 10A, the vehicle also switches back from traveling backward to traveling forward.
  • the access track 15 provided for moving from the first track 10A to the second track 10B and the access track 15 provided for moving from the second track 10B to the first track 10A are provided in different locations and are not used together.
  • the transport vehicle 20 may select a route that avoids unavailable tracks 10 or congested tracks 10 and arrives at the destination faster than the travel route that passes through these tracks 10.
  • the switching track 15a may have a length that allows two or more transport vehicles 20 to enter at once.
  • the controller 50 causes two or more transport vehicles 20 to enter the switching track 15a from one of the tracks 10, the first track 10A and the second track 10B, and causes the transport vehicles 20 that entered the switching track 15a later to exit to the other track 10 in order.
  • FIG. 5 is a diagram showing an example of a switching track according to the embodiment.
  • the switching track 15a has a length that allows two or more transport vehicles 20A to enter at once from the first track 10A.
  • the controller 50 causes two or more transport vehicles 20A to enter the switching track 15a from the first track 10A, and causes the transport vehicles 20A that entered the switching track 15a later to exit to the second track 10B in order.
  • the transport vehicle system 1 by allowing two or more transport vehicles 20 to enter the switching track 15a at once, congestion on the track 10 can be suppressed, and the efficiency of transporting the transported object 90 by the transport vehicles 20 can be improved.
  • FIG. 6 is a front view showing an example of the configuration of the track and the transport vehicle according to the embodiment.
  • the first track 10A is arranged so that the storage shelf 40, which is one of the places where the transported object 90 is placed, is located directly below.
  • the transport vehicle 20A places the transported object 90 on the storage shelf 40 or retrieves the transported object 90 from the storage shelf 40 by operating the gripping unit 21 and the lifting mechanism 22 without operating the moving mechanism 23.
  • the first track 10A is arranged so that the device port 101, which is one of the places where the transported object 90 is placed, is located directly below.
  • the transport vehicle 20A operates the gripper 21 and the lifting mechanism 22 to place the transported object 90 on the equipment port 101 or to retrieve it from the equipment port 101 without operating the moving mechanism 23.
  • the second track 10B is provided so that the storage shelf 40 and the equipment port 101, which are the placement location of the transported object 90, are located below, as in FIG. 1 and other figures.
  • the transport vehicle 20B operates the gripper 21, the moving mechanism 23, and the lifting mechanism 22 to move the gripper 21 to directly above the placement location and raise and lower the gripper 21 located directly above the placement location relative to the placement location, thereby placing the transported object 90 on the placement location or retrieving it from the placement location.
  • FIG. 7 is a front view showing an example of the configuration of the track and the transport vehicle according to the embodiment.
  • FIG. 8 is a diagram for explaining an example of the transfer of the transported object in FIG. 7.
  • the first track 10A is provided so that the storage shelf 40, which is one of the storage locations for the transported object 90, is located directly below.
  • the transport vehicle 20A places the transported object 90 on the storage shelf 40 or retrieves it from the storage shelf 40 by operating the gripping unit 21 and the lifting mechanism 22 without operating the moving mechanism 23.
  • the second track 10B is provided so that the storage shelf 40, which is the storage location for the transported object 90, is located below.
  • the transport vehicle 20B operates the gripping unit 21, the moving mechanism 23, and the lifting mechanism 22 to move the gripping unit 21 directly above the placement location and raise and lower the gripping unit 21 located directly above the placement location relative to the placement location, thereby placing the transported object 90 on the placement location or retrieving it from the placement location.
  • the storage shelves 40 provided directly below the first track 10A, one of the opposing storage shelves 40 is a load grabbing zone for grabbing the transported object 90, and the other is a load unloading zone for unloading the transported object 90.
  • the transport vehicles 20A and 20B run on the first track 10A and the second track 10B in the order of the load grabbing zone and the load unloading zone.
  • the load grabbing zone is provided on the upstream side of the transport vehicle 20, and the load unloading zone is provided on the downstream side of the transport vehicle 20.
  • the transport vehicles 20A and 20B present at the transfer position for transferring the transported object 90 to a specific placement location have different travel directions, and the orientation of the transported object 90 grasped by each transport vehicle 20 is the same, so the transported object 90 can be placed at the placement location in the same orientation from any track 10, and the transport distance can be shortened by using the first track 10A and the second track 10B appropriately, and the transport efficiency of the transported object 90 can be improved.
  • the transport vehicle 20 travels forward on one of the first track 10A and the second track 10B, and travels backward on the other, so that the transport vehicle 20 having the same structure can be used on each track 10.
  • the second track 10B is provided below the first track 10A, so the layout of the transport vehicle system 1 can be kept space-saving.
  • the transport vehicles 20 switch between forward and reverse travel on the switching track 15a that connects the first track 10A and the second track 10B and may be included in the entry track 15 on which the transport vehicles 20 travel, so that the number of transport vehicles 20 can be balanced between the first track 10A and the second track 10B and the transport vehicles 20 that arrive at the destination faster can be used.
  • the switching track 15a is provided with a length that allows two or more transport vehicles 20 to enter at once, so that the transport vehicles 20 can travel between the first track 10A and the second track 10B in a shorter time.
  • a first track is provided so that a placement location for a transported object is located below the first track;
  • a second track is provided so that the placement location is located below the second track; a plurality of transport vehicles that travel along the first track and the second track and transport the transported object;
  • a controller for controlling the operation of each of the plurality of transport vehicles,
  • the transport vehicle is A gripping unit that grips the transported object;
  • a moving mechanism that moves the gripping unit to directly above the placement location; a lifting mechanism for lifting and lowering the gripping unit located directly above the placement location relative to the placement location,
  • a transport vehicle system in which the transport vehicle located at a transfer position on the first track for transferring the transported object to a specific loading location and the transport vehicle located at a transfer position on the second track for transferring the transported object to the specific loading location have different traveling directions, and the orientation of the transported object held by each transport vehicle is the same.
  • Supplementary Note 2 The multiple guided vehicles of the guided vehicle system described in Supplementary Note 1 travel forward on one of the first track and the second track, and travel backward on the other track.
  • Supplementary Note 3 The transport vehicle system described in Supplementary Note 1 or Supplementary Note 2, wherein the second track is arranged below the first track.
  • a track is provided that connects the first track and the second track and through which the transport vehicle travels, The transport vehicle system according to claim 2 or 3, wherein the transport vehicle switches between forward travel and reverse travel on a switching track included in the entry track.
  • the switching track has a length that allows two or more of the transport vehicles to enter at once,
  • Transport vehicle system 10 ... Track 10A ... First track 10B ... Second track 20, 20A, 20B ... Transport vehicle 40 ... Storage shelf 50 ... Controller 90 ... Transported object 100 ... Processing device 101 ... Equipment port

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Abstract

[Problem] To improve the transportation efficiency of an object to be transported. [Solution] A transport vehicle system 1 has: a first track 10A provided such that the placement location of an object 90 to be transported is located therebelow; a second track 10B; a plurality of transport vehicles 20 which travel along each of the first track 10A and the second track 10B, and transport the object 90 to be transported; and a controller 50 which controls the operation of each of the transport vehicles 20. The transport vehicles 20 comprise a gripping unit 21 that grips the object 90 to be transported, a movement mechanism 23 which moves the gripping unit 21 to immediately above the placement location, and a lift mechanism 22 that moves the gripping unit 21 located immediately above the placement location up and down with respect to the placement location. A transport vehicle 20 present at a specific delivery position on the first track 10A and a transport vehicle 20 present at a specific delivery position on the second track 10B are different in traveling direction and are the same in the orientation of the object 90 to be transported gripped by each transport vehicle 20.

Description

搬送車システムTransport vehicle system
　本発明は、搬送車システムに関する。 The present invention relates to a transport vehicle system.
　従来、半導体デバイスの製造工場等において、搬送指令に基づいて、半導体ウエハ又はレチクルを収容したＦＯＵＰ（Front　Opening　Unified　Pod）等の被搬送物を搬送する搬送車システムが知られている。搬送車システムでは、一つの態様として、被搬送物に処理を施す処理装置が配置された所定位置に、被搬送物が搬送される。特許文献１では、鉛直方向に並んだ２本の軌道を天井搬送車が同一の走行方向に走行する技術が開示されている。特許文献１では、２本の軌道を用いることで、天井搬送車の渋滞を抑制することができる。 Traditionally, in semiconductor device manufacturing plants and the like, there is known a transport vehicle system that transports transported objects such as FOUPs (Front Opening Unified Pods) containing semiconductor wafers or reticles based on a transport command. In one embodiment of the transport vehicle system, the transported object is transported to a predetermined position where a processing device that processes the transported object is located. Patent Document 1 discloses a technology in which an overhead transport vehicle travels in the same direction on two tracks aligned vertically. Patent Document 1 discloses that by using two tracks, congestion of overhead transport vehicles can be suppressed.
特許第６６４２５７７号公報Patent No. 6642577
　従来技術では、被搬送物の搬送元と搬送先とが物理的に近い位置にあったとしても、天井搬送車の走行方向を変更できるわけではないため、軌道を用いた物理的な最短ルートで被搬送物を搬送できない。この結果、従来技術では、被搬送物の搬送効率が低くなる場合がある。 　In conventional technology, even if the source and destination of the transported object are physically close to each other, the direction of travel of the overhead transport vehicle cannot be changed, so the object cannot be transported via the physically shortest route using a track. As a result, conventional technology can result in low efficiency in transporting the object.
　本発明は、被搬送物の搬送効率を向上させることができる搬送車システムを提供する。 The present invention provides a transport vehicle system that can improve the efficiency of transporting transported objects.
　本発明の態様に係る搬送車システムは、被搬送物の載置場所が下方に位置するように設けられる第１軌道と、載置場所が下方に位置するように設けられる第２軌道と、第１軌道及び第２軌道のそれぞれに沿って走行し、被搬送物を搬送する複数の搬送車と、複数の搬送車のそれぞれの動作を制御するコントローラと、を有し、搬送車は、被搬送物を把持する把持部と、載置場所の直上に把持部を移動させる移動機構と、載置場所の直上に位置する把持部を、載置場所に対して昇降させる昇降機構と、を備え、第１軌道において特定の載置場所に被搬送物を受け渡すための受渡し位置に存在する搬送車と、第２軌道において特定の載置場所に被搬送物を受け渡すための受渡し位置に存在する搬送車とは、走行方向が異なり、各搬送車によって把持される被搬送物の向きが同一である。 The transport vehicle system according to this aspect of the present invention has a first track that is provided so that a placement location for the transported object is located below, a second track that is provided so that the placement location is located below, a plurality of transport vehicles that travel along the first track and the second track and transport the transported object, and a controller that controls the operation of each of the plurality of transport vehicles, and the transport vehicles have a gripping section that grips the transported object, a movement mechanism that moves the gripping section to just above the placement location, and a lifting mechanism that raises and lowers the gripping section located just above the placement location relative to the placement location, and the transport vehicles that are present at a transfer position on the first track for transferring the transported object to a specific placement location and the transport vehicles that are present at a transfer position on the second track for transferring the transported object to a specific placement location travel in different directions, and the orientation of the transported object gripped by each transport vehicle is the same.
　本発明の態様に係る搬送車システムによれば、各軌道において特定の載置場所に被搬送物を受け渡すための受渡し位置に存在する各搬送車は、走行方向が異なり、各搬送車によって把持される被搬送物の向きが同一であるため、いずれの軌道からでも同じ向きで載置場所に被搬送物を載置することができ、第１軌道と第２軌道とを使い分けることで搬送距離を短くし、被搬送物の搬送効率を向上させることができる。 In the transport vehicle system according to this aspect of the present invention, each transport vehicle present at a transfer position on each track for transferring the transported object to a specific loading location has a different running direction, and the orientation of the transported object held by each transport vehicle is the same, so that the transported object can be loaded onto the loading location in the same orientation from either track, and by selectively using the first track and the second track, the transport distance can be shortened and the transport efficiency of the transported object can be improved.
　また、上記態様の搬送車システムにおいて、複数の搬送車が、第１軌道及び第２軌道の一方では前進により走行し、他方では後退により走行してもよい。この態様によれば、同じ構造を有する搬送車を各軌道で利用することができる。また、上記態様の搬送車システムにおいて、第２軌道が、第１軌道に対し下方に設けられてもよい。この態様によれば、搬送車システムのレイアウトを省スペースにおさめることができる。また、上記態様の搬送車システムにおいて、第１軌道と第２軌道とを接続し、搬送車が往来する乗り入れ軌道を有し、搬送車が、乗り入れ軌道に含まれる切り替え軌道において、前進による走行と後退による走行とを切り替えてもよい。この態様によれば、第１軌道と第２軌道との間で搬送車の台数のバランスをとりつつ、目的地までより速く到着する搬送車を利用することができる。また、上記態様の搬送車システムにおいて、切り替え軌道が、２以上の搬送車が一度に進入可能な長さを有し、コントローラが、第１軌道及び第２軌道の一方の軌道から２以上の搬送車を切り替え軌道に進入させ、より後から切り替え軌道に進入させた搬送車から順に他方の軌道に退出させてもよい。この態様によれば、第１軌道と第２軌道との間の搬送車の往来をより短時間で実現することができる。 In the transport vehicle system of the above aspect, the multiple transport vehicles may travel forward on one of the first track and the second track, and reverse on the other track. According to this aspect, transport vehicles having the same structure can be used on each track. In the transport vehicle system of the above aspect, the second track may be provided below the first track. According to this aspect, the layout of the transport vehicle system can be space-saving. In the transport vehicle system of the above aspect, the first track and the second track are connected to each other, and an access track along which the transport vehicles travel may be provided, and the transport vehicles may switch between traveling forward and traveling reverse on a switching track included in the access track. According to this aspect, transport vehicles that arrive at the destination faster can be used while balancing the number of transport vehicles between the first track and the second track. In addition, in the transport vehicle system of the above aspect, the switching track may have a length that allows two or more transport vehicles to enter at once, and the controller may cause two or more transport vehicles to enter the switching track from one of the first track and the second track, and cause the transport vehicles that entered the switching track last to exit to the other track in order. According to this aspect, it is possible to realize the movement of transport vehicles between the first track and the second track in a shorter time.
実施形態に係る搬送車システムの構成例を示す平面図。FIG. 1 is a plan view showing a configuration example of a guided vehicle system according to an embodiment. 実施形態に係る搬送車の構成例を示す正面図。FIG. 2 is a front view showing a configuration example of a transport vehicle according to an embodiment. 実施形態に係る搬送車によって搬送される被搬送物の向きを説明する図。5A and 5B are diagrams illustrating the orientation of an object transported by a transport vehicle according to the embodiment. 実施形態に係る搬送車による軌道間の往来の例を説明する図。FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment. 実施形態に係る搬送車による軌道間の往来の例を説明する図。FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment. 実施形態に係る搬送車による軌道間の往来の例を説明する図。FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment. 実施形態に係る搬送車による軌道間の往来の例を説明する図。FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment. 実施形態に係る搬送車による軌道間の往来の例を説明する図。FIG. 2 is a diagram illustrating an example of transportation vehicles traveling between tracks according to the embodiment. 実施形態に係る切り替え軌道の例を示す図である。FIG. 13 is a diagram illustrating an example of a switching trajectory according to the embodiment. 実施形態に係る軌道及び搬送車の構成例を示す正面図。FIG. 2 is a front view showing an example of the configuration of a track and a transport vehicle according to the embodiment. 実施形態に係る軌道及び搬送車の構成例を示す正面図。FIG. 2 is a front view showing an example of the configuration of a track and a transport vehicle according to the embodiment. 実施形態に係る被搬送物の受け渡しの例を説明する図。5A to 5C are diagrams illustrating an example of transfer of a transported object according to the embodiment.
　以下、実施形態について図面を参照して説明する。本発明は、以下で説明する形態に限定されない。図面では、実施形態を説明するために、一部分を拡大、縮小、又は強調して記載する等、縮尺を適宜変更して表現される場合がある。 The following describes the embodiments with reference to the drawings. The present invention is not limited to the embodiments described below. In the drawings, the scale may be changed as appropriate, such as enlarging, reducing, or emphasizing parts in order to explain the embodiments.
　図１は、実施形態に係る搬送車システムの構成例を示す平面図である。図１に示すように、搬送車システム１は、第１軌道１０Ａと、第２軌道１０Ｂと、複数の搬送車２０Ａと、複数の搬送車２０Ｂと、複数の保管棚４０と、コントローラ５０とを有する。例えば、搬送車システム１は、半導体デバイス等の製造工場に配設されるシステムである。なお、以下では、第１軌道１０Ａと第２軌道１０Ｂとを区別しない場合、単に「軌道１０」と記載する。同様に、以下では、搬送車２０Ａと搬送車２０Ｂとを区別しない場合、単に「搬送車２０」と記載する。また、実施形態では、第１軌道１０Ａを走行する搬送車２０を搬送車２０Ａと呼び、第２軌道１０Ｂを走行する搬送車２０を搬送車２０Ｂと呼ぶ。 1 is a plan view showing an example of the configuration of a transport vehicle system according to an embodiment. As shown in FIG. 1, the transport vehicle system 1 has a first track 10A, a second track 10B, a plurality of transport vehicles 20A, a plurality of transport vehicles 20B, a plurality of storage shelves 40, and a controller 50. For example, the transport vehicle system 1 is a system arranged in a manufacturing factory for semiconductor devices or the like. In the following, when the first track 10A and the second track 10B are not distinguished from each other, they are simply referred to as "track 10". Similarly, in the following, when the transport vehicles 20A and 20B are not distinguished from each other, they are simply referred to as "transport vehicles 20". In the embodiment, the transport vehicle 20 traveling on the first track 10A is referred to as transport vehicle 20A, and the transport vehicle 20 traveling on the second track 10B is referred to as transport vehicle 20B.
　軌道１０は、搬送車２０の走行領域であり、例えばクリーンルームの天井等に設けられる走行レールであり、処理装置１００（装置ポート１０１）や保管棚４０等に隣接して設けられる。例えば、第１軌道１０Ａ及び第２軌道１０Ｂは、被搬送物９０の載置場所（例、保管棚４０、装置ポート１０１）が下方に位置するように設けられる。また、実施形態では、より上方に設けられる軌道１０を第１軌道１０Ａとし、第２軌道１０Ｂは第１軌道１０Ａよりも下方に設けられることとする。なお、第１軌道１０Ａと第２軌道１０Ｂとは、一つの態様として、平面視で重なる位置に設けられる。図１等では、説明の便宜上、第１軌道１０Ａ（実線）と第２軌道１０Ｂ（破線）とをずらして図示する。 The track 10 is the travel area of the transport vehicle 20, and is, for example, a travel rail provided on the ceiling of a clean room, etc., and is provided adjacent to the processing device 100 (equipment port 101) and storage shelf 40. For example, the first track 10A and the second track 10B are provided so that the placement location of the transported object 90 (e.g., storage shelf 40, equipment port 101) is located below. In the embodiment, the track 10 provided higher is the first track 10A, and the second track 10B is provided below the first track 10A. In one embodiment, the first track 10A and the second track 10B are provided in a position where they overlap in a plan view. For convenience of explanation, in FIG. 1 and the like, the first track 10A (solid line) and the second track 10B (dashed line) are illustrated shifted.
　搬送車２０は、コントローラ５０からの指令をもとに軌道１０に沿って走行し、半導体デバイスの製造に用いられる半導体ウエハを収容したＦＯＵＰ、又はレチクル等の加工用部材を収容したレチクルポッド等の被搬送物９０（例、容器、物品）を搬送する天井搬送車である。搬送車２０は、軌道１０に吊り下げられた状態で軌道１０に沿って走行する。搬送車２０は、コントローラ５０に対して、自身の状態情報を適宜送信する。例えば、状態情報は、搬送車２０を識別する搬送車識別情報とともに、現在位置、目的地、走行状態、及び被搬送物９０の状態等に関する情報を含む。走行状態は、搬送車２０の現在の速度を示す情報である。被搬送物９０の状態は、被搬送物９０の有無や種類等を示す情報である。コントローラ５０は、搬送車２０からの状態情報をもとに、搬送車２０に対して指令を出力する。複数の搬送車２０は、第１軌道１０Ａ及び第２軌道１０Ｂの一方では前進により走行し、他方では後退により走行する。搬送車２０は前後方向を有し、図１等において、搬送車２０の前方向を先端が細い形状で表している。例えば、図１に示すように、搬送車２０Ａは前進（図中の実線矢印）により走行し、搬送車２０Ｂは後退（図中の破線矢印）により走行する。保管棚４０は、搬送車２０によって搬送される被搬送物９０の載置場所の一つであり、搬送車２０によって搬送された被搬送物９０を保管する。 The transport vehicle 20 is a ceiling transport vehicle that travels along the track 10 based on commands from the controller 50 and transports transported objects 90 (e.g., containers, objects), such as FOUPs that contain semiconductor wafers used in the manufacture of semiconductor devices, or reticle pods that contain processing materials such as reticles. The transport vehicle 20 travels along the track 10 while suspended from the track 10. The transport vehicle 20 transmits its own status information to the controller 50 as appropriate. For example, the status information includes information on the current position, destination, running status, and status of the transported object 90, along with transport vehicle identification information that identifies the transport vehicle 20. The running status is information indicating the current speed of the transport vehicle 20. The status of the transported object 90 is information indicating the presence or absence, type, etc. of the transported object 90. The controller 50 outputs commands to the transport vehicle 20 based on the status information from the transport vehicle 20. The multiple transport vehicles 20 travel forward on one of the first track 10A and the second track 10B, and travel backward on the other. The transport vehicle 20 has a forward and backward direction, and in FIG. 1 and other figures, the forward direction of the transport vehicle 20 is represented by a tapered tip. For example, as shown in FIG. 1, the transport vehicle 20A travels forward (solid arrow in the figure), and the transport vehicle 20B travels backward (dashed arrow in the figure). The storage shelf 40 is one of the locations where the transported object 90 transported by the transport vehicle 20 is placed, and stores the transported object 90 transported by the transport vehicle 20.
　コントローラ５０は、搬送車２０のそれぞれの動作を制御する。具体的には、コントローラ５０は、図示しない上位コントローラからの指示をもとに、１以上の島単位（図１では３つの島）で搬送車２０の動作を制御する。例えば、上位コントローラは、コントローラ５０に対して、搬送元（from）と搬送先（to）とを発行するとともに、第１軌道１０Ａと第２軌道１０Ｂとのいずれを使用するかまで決定する。コントローラ５０は、上位コントローラから、搬送元及び搬送先に関する情報と、第１軌道１０Ａと第２軌道１０Ｂとのいずれを使用するかを示す情報とを受け付ける。そして、コントローラ５０は、軌道１０の状況（例、混雑状況、使用可否）や搬送車２０の状態情報等をもとに、搬送元から搬送先へより速く到着する搬送車２０を特定し、特定した搬送車２０に対して搬送指令を出力する。 The controller 50 controls the operation of each of the transport vehicles 20. Specifically, the controller 50 controls the operation of the transport vehicles 20 in units of one or more islands (three islands in FIG. 1) based on instructions from a higher-level controller (not shown). For example, the higher-level controller issues the source (from) and destination (to) to the controller 50, and also determines whether the first track 10A or the second track 10B will be used. The controller 50 receives information on the source and destination from the higher-level controller, and information indicating whether the first track 10A or the second track 10B will be used. Then, based on the status of the track 10 (e.g., congestion, availability) and status information of the transport vehicles 20, the controller 50 identifies the transport vehicle 20 that will arrive faster from the source to the destination, and outputs a transport command to the identified transport vehicle 20.
　処理装置１００は、例えば、露光装置、コータディベロッパ、製膜装置、又はエッチング装置等であり、搬送車２０によって搬送される被搬送物９０内の半導体ウエハに各種処理を施す。装置ポート１０１は、搬送車２０によって搬送される被搬送物９０の載置場所の一つである。例えば、処理装置１００は、装置ポート１０１に載置された被搬送物９０が処理装置１００に移載されると、収容されている半導体ウエハに各種処理を施す。被搬送物９０は、処理装置１００によって半導体ウエハに処理された後に、装置ポート１０１に移載される。 The processing device 100 is, for example, an exposure device, a coater developer, a film forming device, or an etching device, and performs various processes on the semiconductor wafers in the transported object 90 transported by the transport vehicle 20. The equipment port 101 is one of the locations where the transported object 90 transported by the transport vehicle 20 is placed. For example, when the transported object 90 placed in the equipment port 101 is transferred to the processing device 100, the processing device 100 performs various processes on the semiconductor wafers contained therein. The transported object 90 is processed into a semiconductor wafer by the processing device 100 and then transferred to the equipment port 101.
　載置場所への被搬送物９０の載置と、載置場所からの被搬送物９０の取得とに関して、図２を用いて説明する。図２は、実施形態に係る搬送車の構成例を示す正面図である。図２に示すように、搬送車２０は、把持部２１と、昇降機構２２と、移動機構２３とを有する。把持部２１は、被搬送物９０を把持する。具体的には、把持部２１は、被搬送物９０のフランジ部９１を把持する及び解放する装置である。例えば、把持部２１は、搬送車２０によって保管棚４０や装置ポート１０１等の載置場所から被搬送物９０を取得する際に、被搬送物９０のフランジ部９１を把持する。例えば、把持部２１は、搬送車２０によって保管棚４０や装置ポート１０１等の載置場所に被搬送物９０を載置する際に、被搬送物９０のフランジ部９１を解放する。 The placement of the transported object 90 on the placement location and the retrieval of the transported object 90 from the placement location will be described with reference to FIG. 2. FIG. 2 is a front view showing an example of the configuration of a transport vehicle according to an embodiment. As shown in FIG. 2, the transport vehicle 20 has a gripping unit 21, a lifting mechanism 22, and a moving mechanism 23. The gripping unit 21 grips the transported object 90. Specifically, the gripping unit 21 is a device that grips and releases the flange portion 91 of the transported object 90. For example, the gripping unit 21 grips the flange portion 91 of the transported object 90 when the transport vehicle 20 retrieves the transported object 90 from a placement location such as the storage shelf 40 or the equipment port 101. For example, the gripping unit 21 releases the flange portion 91 of the transported object 90 when the transport vehicle 20 places the transported object 90 on a placement location such as the storage shelf 40 or the equipment port 101.
　移動機構２３は、載置場所の直上に把持部２１を移動させる。昇降機構２２は、載置場所の直上に位置する把持部２１を、載置場所に対して昇降させる。例えば、移動機構２３は、搬送車２０から両方の側方に対して把持部２１及び昇降機構２２を移動させる装置である。移動機構２３は、被搬送物９０を保管棚４０や装置ポート１０１等の載置場所に載置させる、又は、載置場所から取得することが可能な載置場所の直上に、把持部２１及び昇降機構２２を移動させる。例えば、昇降機構２２は、把持部２１を鉛直方向に昇降させる装置である。昇降機構２２は、巻上機構２２ａと、ベルト２２ｂとを有する。巻上機構２２ａは、移動機構２３によって保持され、ベルト２２ｂを鉛直方向に巻上げ及び巻下ろし可能である。ベルト２２ｂは、巻上機構２２ａから垂下され、その下端において把持部２１を保持する。昇降機構２２は、把持部２１によって把持された被搬送物９０が少なくとも保管棚４０や装置ポート１０１等の載置場所に達する距離を巻上げ及び巻下ろし可能である。 The moving mechanism 23 moves the gripping unit 21 to a position directly above the placement location. The lifting mechanism 22 raises and lowers the gripping unit 21, which is located directly above the placement location, relative to the placement location. For example, the moving mechanism 23 is a device that moves the gripping unit 21 and the lifting mechanism 22 to both sides from the transport vehicle 20. The moving mechanism 23 places the transported object 90 on a placement location such as a storage shelf 40 or an equipment port 101, or moves the gripping unit 21 and the lifting mechanism 22 to a position directly above a placement location where the transported object 90 can be retrieved from the placement location. For example, the lifting mechanism 22 is a device that raises and lowers the gripping unit 21 in the vertical direction. The lifting mechanism 22 has a hoisting mechanism 22a and a belt 22b. The hoisting mechanism 22a is held by the moving mechanism 23 and can vertically wind up and down the belt 22b. The belt 22b hangs down from the winding mechanism 22a and holds the gripping part 21 at its lower end. The lifting mechanism 22 can wind up and wind down the transported object 90 gripped by the gripping part 21 at least a distance to a placement location such as the storage shelf 40 or the equipment port 101.
　すなわち、搬送車２０は、図２中のブロック矢印に示すように、移動機構２３と昇降機構２２とを動作させ、把持部２１に把持されたフランジ部９１を解放することにより載置場所に被搬送物９０を載置し、把持部２１にフランジ部９１を把持させることにより載置場所から被搬送物９０を取得することが可能である。また、図２に示すように、搬送車２０Ａ及び搬送車２０Ｂは、双方から、被搬送物９０を保管棚４０や装置ポート１０１等の載置場所に載置させる、又は、載置場所から取得することが可能である。 In other words, as shown by the block arrows in FIG. 2, the transport vehicle 20 can place the transported object 90 at a placement location by operating the moving mechanism 23 and the lifting mechanism 22, and release the flange portion 91 gripped by the gripping portion 21, and can retrieve the transported object 90 from the placement location by having the gripping portion 21 grip the flange portion 91. Also, as shown in FIG. 2, both transport vehicles 20A and 20B can place the transported object 90 at a placement location such as the storage shelf 40 or equipment port 101, or retrieve it from the placement location.
　図３を用いて、被搬送物９０の向きについて説明する。図３は、実施形態に係る搬送車によって搬送される被搬送物の向きを説明する図である。図３に示すように、第１軌道１０Ａにおいて特定の載置場所に被搬送物９０を受け渡すための受渡し位置に存在する搬送車２０Ａと、第２軌道１０Ｂにおいて特定の載置場所に被搬送物９０を受け渡すための受渡し位置に存在する搬送車２０Ｂとは、走行方向が異なり、各搬送車２０によって把持される被搬送物９０の向きが同一である。上述したように、搬送車２０Ａは前進（図中の実線矢印）により走行し、搬送車２０Ｂは後退（図中の破線矢印）により走行する。被搬送物９０は、保管棚４０や装置ポート１０１等の載置場所に載置される場合、同一の向きに置かれることが好ましい。具体的には、処理装置１００によって半導体ウエハに処理が施される際、所定の向きに置かれていることを前提にしており、所定の向きに置かれていないまま処理を施すと、想定とは異なる処理結果となる。所定の向きに置かれていない場合、所定の向きに回転させるための機構が必要となってしまう。このため、本実施形態では、被搬送物９０を回転させる機構を要しない構成としている。 The orientation of the transported object 90 will be described using FIG. 3. FIG. 3 is a diagram for explaining the orientation of the transported object transported by the transport vehicle according to the embodiment. As shown in FIG. 3, the transport vehicle 20A present at the transfer position for transferring the transported object 90 to a specific placement location on the first track 10A and the transport vehicle 20B present at the transfer position for transferring the transported object 90 to a specific placement location on the second track 10B have different running directions, and the orientation of the transported object 90 held by each transport vehicle 20 is the same. As described above, the transport vehicle 20A travels forward (solid arrow in the figure), and the transport vehicle 20B travels backward (dashed arrow in the figure). When the transported object 90 is placed on a placement location such as the storage shelf 40 or the equipment port 101, it is preferable that the transported object 90 is placed in the same orientation. Specifically, when the semiconductor wafer is processed by the processing device 100, it is assumed that the wafer is placed in a specific orientation. If the wafer is not placed in the specific orientation when the wafer is processed, the processing result will be different from the expected result. If the transported object 90 is not placed in the specified orientation, a mechanism is required to rotate it to the specified orientation. For this reason, the present embodiment is configured so that a mechanism for rotating the transported object 90 is not required.
　また、搬送車２０について、第１軌道１０Ａと第２軌道１０Ｂとで、一方で前進させ、他方で後退させることにより、被搬送物９０の搬送効率を向上させている。例えば、搬送車２０Ａと搬送車２０Ｂとを前進させて被搬送物９０を搬送させる場合、いずれの軌道１０が使用されたとしても、搬送時間に大差はない（詳細には、上方に設けられた軌道１０を使用する場合の方が、被搬送物９０を昇降させる距離が長くなるため時間がかかる）。これに対して、搬送車２０Ａを前進により走行させ、搬送車２０Ｂを後退により走行させ、特定の載置場所（同一の載置場所）に被搬送物９０を受け渡すための受渡し位置に各搬送車２０が存在する場合、各搬送車２０によって把持される被搬送物９０の向きが同一であるため、搬送時間を短縮させることができる。例えば、図３に示す例において、図中の下方に設けられた保管棚４０から図中の上方に設けられた装置ポート１０１に被搬送物９０を搬送する場合、搬送車２０Ａによって搬送すれば搬送時間が短くなる。同様に、図中の上方に設けられた保管棚４０から図中の下方に設けられた装置ポート１０１に被搬送物９０を搬送する場合、搬送車２０Ｂによって搬送すれば搬送時間が短くなる。このように、各軌道１０を走行する搬送車２０の一方を前進により走行させ、他方を後退により走行させることで、被搬送物９０の搬送効率が向上する。 Furthermore, the transport vehicle 20 is moved forward on one of the first track 10A and the second track 10B, and backward on the other, thereby improving the transport efficiency of the transported object 90. For example, when the transport vehicle 20A and the transport vehicle 20B are moved forward to transport the transported object 90, the transport time does not differ significantly regardless of which track 10 is used (in detail, it takes more time to use the track 10 installed above, because the distance to raise and lower the transported object 90 is longer). In contrast, when the transport vehicle 20A is moved forward and the transport vehicle 20B is moved backward, and each transport vehicle 20 is at a transfer position for transferring the transported object 90 to a specific placement location (the same placement location), the orientation of the transported object 90 held by each transport vehicle 20 is the same, so the transport time can be shortened. For example, in the example shown in FIG. 3, when transporting the transported object 90 from the storage shelf 40 provided at the bottom of the figure to the equipment port 101 provided at the top of the figure, the transport time is shortened if the transported object 90 is transported by the transport vehicle 20A. Similarly, when transporting the transported object 90 from the storage shelf 40 provided at the top of the figure to the equipment port 101 provided at the bottom of the figure, the transport time is shortened if the transported object 90 is transported by the transport vehicle 20B. In this way, by having one of the transport vehicles 20 traveling on each track 10 travel forward and the other travel backward, the transport efficiency of the transported object 90 is improved.
　また、搬送車２０は、第１軌道１０Ａと第２軌道１０Ｂとの間を往来可能であってもよい。搬送車２０は、第１軌道１０Ａと第２軌道１０Ｂとの間を往来する場合、被搬送物９０を回転させる機構を使用しないことや、搬送効率の向上の観点から、前進による走行と後退による走行とを切り替える。図４Ａ～図４Ｅは、実施形態に係る搬送車による軌道間の往来の例を説明する図である。図４Ａ～図４Ｅに示すように、搬送車システム１は、第１軌道１０Ａと第２軌道１０Ｂとを接続し、搬送車２０が往来する乗り入れ軌道１５を有する。また、搬送車２０は、乗り入れ軌道１５に含まれる切り替え軌道１５ａにおいて、前進による走行と後退による走行とを切り替える。搬送車２０は、乗り入れ軌道１５の一部である切り替え軌道１５ａにおいて、スイッチバックにより走行することで、前進による走行と後退による走行とを切り替える。 The transport vehicle 20 may be able to travel between the first track 10A and the second track 10B. When the transport vehicle 20 travels between the first track 10A and the second track 10B, it switches between forward travel and reverse travel in order not to use a mechanism for rotating the transported object 90 and to improve transport efficiency. Figures 4A to 4E are diagrams for explaining an example of travel between tracks by the transport vehicle according to the embodiment. As shown in Figures 4A to 4E, the transport vehicle system 1 has an access track 15 that connects the first track 10A and the second track 10B and on which the transport vehicle 20 travels. The transport vehicle 20 switches between forward travel and reverse travel on a switching track 15a included in the access track 15. The transport vehicle 20 switches between forward travel and reverse travel by running by switchback on the switching track 15a, which is part of the access track 15.
　図４Ａ及び図４Ｂに示すように、搬送車２０（第１軌道１０Ａを前進により走行する搬送車２０Ａ）は、乗り入れ軌道１５に進入する。そして、図４Ｃに示すように、搬送車２０は、切り替え軌道１５ａまで走行すると、前進による走行から後退による走行へと切り替える。その後、図４Ｄ及び図４Ｅに示すように、搬送車２０は、後退により乗り入れ軌道１５を走行し、搬送車２０Ｂとして第２軌道１０Ｂを後退により走行する。このように、搬送車２０は、第１軌道１０Ａと第２軌道１０Ｂとを接続する乗り入れ軌道１５（切り替え軌道１５ａ）において、前進による走行と後退による走行とを切り替えることで、被搬送物９０を回転させる機構を使用することなく搬送効率の向上も担保する。図４Ａ～図４Ｅでは第１軌道１０Ａから第２軌道１０Ｂへ移動する搬送車２０を例に挙げたが、第２軌道１０Ｂから第１軌道１０Ａへ移動する場合も、同様にスイッチバックにより走行することで、後退による走行から前進による走行へと切り替えることとなる。なお、第１軌道１０Ａから第２軌道１０Ｂへ移動するために設けられた乗り入れ軌道１５と、第２軌道１０Ｂから第１軌道１０Ａへ移動するために設けられた乗り入れ軌道１５とは、別の場所に設けられ、併用されない。乗り入れ軌道１５（切り替え軌道１５ａ）を設ける場合、搬送車２０は、使用不可の軌道１０や渋滞している軌道１０を経由する走行経路について、これらの軌道１０を回避したうえでより速く目的地に到着する経路を選択してもよい。 As shown in Figures 4A and 4B, the transport vehicle 20 (transport vehicle 20A traveling forward on the first track 10A) enters the access track 15. Then, as shown in Figure 4C, when the transport vehicle 20 travels to the switching track 15a, it switches from traveling forward to traveling backward. Thereafter, as shown in Figures 4D and 4E, the transport vehicle 20 travels backward on the access track 15, and travels backward on the second track 10B as transport vehicle 20B. In this way, the transport vehicle 20 switches between traveling forward and traveling backward on the access track 15 (switching track 15a) connecting the first track 10A and the second track 10B, thereby ensuring improved transport efficiency without using a mechanism to rotate the transported object 90. 4A to 4E show an example of the transport vehicle 20 moving from the first track 10A to the second track 10B, but when moving from the second track 10B to the first track 10A, the vehicle also switches back from traveling backward to traveling forward. The access track 15 provided for moving from the first track 10A to the second track 10B and the access track 15 provided for moving from the second track 10B to the first track 10A are provided in different locations and are not used together. When the access track 15 (switching track 15a) is provided, the transport vehicle 20 may select a route that avoids unavailable tracks 10 or congested tracks 10 and arrives at the destination faster than the travel route that passes through these tracks 10.
　また、切り替え軌道１５ａは、２以上の搬送車２０が一度に進入可能な長さを有してもよい。このとき、コントローラ５０は、第１軌道１０Ａ及び第２軌道１０Ｂの一方の軌道１０から２以上の搬送車２０を切り替え軌道１５ａに進入させ、より後から切り替え軌道１５ａに進入させた搬送車２０から順に他方の軌道１０に退出させる。図５は、実施形態に係る切り替え軌道の例を示す図である。例えば、図５に示すように、切り替え軌道１５ａは、２以上の搬送車２０Ａが第１軌道１０Ａから一度に進入可能な長さを有する。２以上の搬送車２０が一度に進入可能な場合、コントローラ５０は、第１軌道１０Ａから２以上の搬送車２０Ａを切り替え軌道１５ａに進入させ、より後から切り替え軌道１５ａに進入させた搬送車２０Ａから順に、第２軌道１０Ｂに退出させる。搬送車システム１では、切り替え軌道１５ａに２以上の搬送車２０を一度に進入させることにより、軌道１０における渋滞の発生を抑制でき、搬送車２０による被搬送物９０の搬送効率を向上させることができる。 The switching track 15a may have a length that allows two or more transport vehicles 20 to enter at once. In this case, the controller 50 causes two or more transport vehicles 20 to enter the switching track 15a from one of the tracks 10, the first track 10A and the second track 10B, and causes the transport vehicles 20 that entered the switching track 15a later to exit to the other track 10 in order. FIG. 5 is a diagram showing an example of a switching track according to the embodiment. For example, as shown in FIG. 5, the switching track 15a has a length that allows two or more transport vehicles 20A to enter at once from the first track 10A. When two or more transport vehicles 20 can enter at once, the controller 50 causes two or more transport vehicles 20A to enter the switching track 15a from the first track 10A, and causes the transport vehicles 20A that entered the switching track 15a later to exit to the second track 10B in order. In the transport vehicle system 1, by allowing two or more transport vehicles 20 to enter the switching track 15a at once, congestion on the track 10 can be suppressed, and the efficiency of transporting the transported object 90 by the transport vehicles 20 can be improved.
　また、図１等では、第１軌道１０Ａと第２軌道１０Ｂとが平面視で重なる位置に設けられる場合を例に挙げた。本実施形態は、第１軌道１０Ａと第２軌道１０Ｂとが平面視で重なる位置に設けられていなくてもよい。図６は、実施形態に係る軌道及び搬送車の構成例を示す正面図である。図６に示すように、第１軌道１０Ａは、被搬送物９０の載置場所の一つである保管棚４０が直下に位置するように設けられる。かかる場合、搬送車２０Ａは、移動機構２３を動作させることなく、把持部２１及び昇降機構２２を動作させることで被搬送物９０を保管棚４０に載置する、又は、保管棚４０から取得する。また、第１軌道１０Ａは、被搬送物９０の載置場所の一つである装置ポート１０１が直下に位置するように設けられる。かかる場合、搬送車２０Ａは、移動機構２３を動作させることなく、把持部２１及び昇降機構２２を動作させることで被搬送物９０を装置ポート１０１に載置する、又は、装置ポート１０１から取得する。第２軌道１０Ｂは、図１等と同様に、被搬送物９０の載置場所である保管棚４０及び装置ポート１０１が下方に位置するように設けられる。搬送車２０Ｂは、把持部２１、移動機構２３、及び昇降機構２２を動作させ、載置場所の直上に把持部２１を移動させて、載置場所の直上に位置する把持部２１を載置場所に対して昇降させることにより、被搬送物９０を載置場所に載置させる、又は、載置場所から取得する。 1 and the like show an example in which the first track 10A and the second track 10B are arranged at a position where they overlap in a plan view. In this embodiment, the first track 10A and the second track 10B do not have to be arranged at a position where they overlap in a plan view. FIG. 6 is a front view showing an example of the configuration of the track and the transport vehicle according to the embodiment. As shown in FIG. 6, the first track 10A is arranged so that the storage shelf 40, which is one of the places where the transported object 90 is placed, is located directly below. In this case, the transport vehicle 20A places the transported object 90 on the storage shelf 40 or retrieves the transported object 90 from the storage shelf 40 by operating the gripping unit 21 and the lifting mechanism 22 without operating the moving mechanism 23. In addition, the first track 10A is arranged so that the device port 101, which is one of the places where the transported object 90 is placed, is located directly below. In this case, the transport vehicle 20A operates the gripper 21 and the lifting mechanism 22 to place the transported object 90 on the equipment port 101 or to retrieve it from the equipment port 101 without operating the moving mechanism 23. The second track 10B is provided so that the storage shelf 40 and the equipment port 101, which are the placement location of the transported object 90, are located below, as in FIG. 1 and other figures. The transport vehicle 20B operates the gripper 21, the moving mechanism 23, and the lifting mechanism 22 to move the gripper 21 to directly above the placement location and raise and lower the gripper 21 located directly above the placement location relative to the placement location, thereby placing the transported object 90 on the placement location or retrieving it from the placement location.
　図７は、実施形態に係る軌道及び搬送車の構成例を示す正面図である。図８は、図７における被搬送物の受け渡しの例を説明する図である。図７に示すように、第１軌道１０Ａは、被搬送物９０の載置場所の一つである保管棚４０が直下に位置するように設けられる。かかる場合、搬送車２０Ａは、移動機構２３を動作させることなく、把持部２１及び昇降機構２２を動作させることで被搬送物９０を保管棚４０に載置する、又は、保管棚４０から取得する。第２軌道１０Ｂは、被搬送物９０の載置場所である保管棚４０が下方に位置するように設けられる。搬送車２０Ｂは、把持部２１、移動機構２３、及び昇降機構２２を動作させ、載置場所の直上に把持部２１を移動させて、載置場所の直上に位置する把持部２１を載置場所に対して昇降させることにより、被搬送物９０を載置場所に載置させる、又は、載置場所から取得する。ここで、図８に示すように、第１軌道１０Ａの直下に設けられた保管棚４０について、対向する保管棚４０の一方を被搬送物９０の荷つかみを行う荷つかみゾーンとし、他方を被搬送物９０の荷下ろしを行う荷下ろしゾーンとする。また、搬送車２０Ａ及び搬送車２０Ｂは、荷つかみゾーン、荷下ろしゾーンの順に、第１軌道１０Ａ及び第２軌道１０Ｂを走行するものとする。すなわち、搬送車２０の上流側に荷つかみゾーンを設け、搬送車２０の下流側に荷下ろしゾーンを設ける。このような構成を設けることで、いずれの搬送車２０にとっても、被搬送物９０の向きを変えずに、被搬送物９０の効率のよい受け渡しを実現することができ、搬送車システム１全体として搬送効率の向上をはかることができる。 FIG. 7 is a front view showing an example of the configuration of the track and the transport vehicle according to the embodiment. FIG. 8 is a diagram for explaining an example of the transfer of the transported object in FIG. 7. As shown in FIG. 7, the first track 10A is provided so that the storage shelf 40, which is one of the storage locations for the transported object 90, is located directly below. In such a case, the transport vehicle 20A places the transported object 90 on the storage shelf 40 or retrieves it from the storage shelf 40 by operating the gripping unit 21 and the lifting mechanism 22 without operating the moving mechanism 23. The second track 10B is provided so that the storage shelf 40, which is the storage location for the transported object 90, is located below. The transport vehicle 20B operates the gripping unit 21, the moving mechanism 23, and the lifting mechanism 22 to move the gripping unit 21 directly above the placement location and raise and lower the gripping unit 21 located directly above the placement location relative to the placement location, thereby placing the transported object 90 on the placement location or retrieving it from the placement location. Here, as shown in FIG. 8, for the storage shelves 40 provided directly below the first track 10A, one of the opposing storage shelves 40 is a load grabbing zone for grabbing the transported object 90, and the other is a load unloading zone for unloading the transported object 90. The transport vehicles 20A and 20B run on the first track 10A and the second track 10B in the order of the load grabbing zone and the load unloading zone. That is, the load grabbing zone is provided on the upstream side of the transport vehicle 20, and the load unloading zone is provided on the downstream side of the transport vehicle 20. By providing such a configuration, the transported object 90 can be efficiently handed over to any of the transport vehicles 20 without changing the orientation of the transported object 90, and the transport efficiency of the transport vehicle system 1 as a whole can be improved.
　このように、実施形態に係る搬送車システム１によれば、特定の載置場所に被搬送物９０を受け渡すための受渡し位置に存在する搬送車２０Ａと搬送車２０Ｂとが、走行方向が異なり、各搬送車２０によって把持される被搬送物９０の向きが同一であるため、いずれの軌道１０からでも同じ向きで載置場所に被搬送物９０を載置することができ、第１軌道１０Ａと第２軌道１０Ｂとを使い分けることで搬送距離を短くし、被搬送物９０の搬送効率を向上させることができる。また、搬送車システム１によれば、第１軌道１０Ａ及び第２軌道１０Ｂの一方では搬送車２０を前進により走行させ、他方では後退により走行させるので、同じ構造を有する搬送車２０を各軌道１０で利用することができる。また、搬送車システム１によれば、第２軌道１０Ｂが第１軌道１０Ａに対し下方に設けられるので、搬送車システム１のレイアウトを省スペースにおさめることができる。また、搬送車システム１によれば、第１軌道１０Ａと第２軌道１０Ｂとを接続し、搬送車２０が往来する乗り入れ軌道１５に含まれ得る切り替え軌道１５ａにおいて、搬送車２０が、前進による走行と後退による走行とを切り替えるので、第１軌道１０Ａと第２軌道１０Ｂとの間で搬送車２０の台数のバランスをとりつつ、目的地までより速く到着する搬送車２０を利用することができる。また、搬送車システム１によれば、２以上の搬送車２０が一度に進入可能な長さを有する切り替え軌道１５ａを設けるので、第１軌道１０Ａと第２軌道１０Ｂとの間の搬送車２０の往来をより短時間で実現することができる。 In this way, according to the transport vehicle system 1 of the embodiment, the transport vehicles 20A and 20B present at the transfer position for transferring the transported object 90 to a specific placement location have different travel directions, and the orientation of the transported object 90 grasped by each transport vehicle 20 is the same, so the transported object 90 can be placed at the placement location in the same orientation from any track 10, and the transport distance can be shortened by using the first track 10A and the second track 10B appropriately, and the transport efficiency of the transported object 90 can be improved. In addition, according to the transport vehicle system 1, the transport vehicle 20 travels forward on one of the first track 10A and the second track 10B, and travels backward on the other, so that the transport vehicle 20 having the same structure can be used on each track 10. In addition, according to the transport vehicle system 1, the second track 10B is provided below the first track 10A, so the layout of the transport vehicle system 1 can be kept space-saving. In addition, according to the transport vehicle system 1, the transport vehicles 20 switch between forward and reverse travel on the switching track 15a that connects the first track 10A and the second track 10B and may be included in the entry track 15 on which the transport vehicles 20 travel, so that the number of transport vehicles 20 can be balanced between the first track 10A and the second track 10B and the transport vehicles 20 that arrive at the destination faster can be used. In addition, according to the transport vehicle system 1, the switching track 15a is provided with a length that allows two or more transport vehicles 20 to enter at once, so that the transport vehicles 20 can travel between the first track 10A and the second track 10B in a shorter time.
　なお、上記実施形態の説明に関して、さらに以下の付記を開示する。
（付記１）被搬送物の載置場所が下方に位置するように設けられる第１軌道と、
　前記載置場所が下方に位置するように設けられる第２軌道と、
　前記第１軌道及び前記第２軌道のそれぞれに沿って走行し、前記被搬送物を搬送する複数の搬送車と、
　前記複数の搬送車のそれぞれの動作を制御するコントローラと、を有し、
　前記搬送車は、
　前記被搬送物を把持する把持部と、
　前記載置場所の直上に前記把持部を移動させる移動機構と、
　前記載置場所の直上に位置する前記把持部を、前記載置場所に対して昇降させる昇降機構と、を備え、
　前記第１軌道において特定の載置場所に前記被搬送物を受け渡すための受渡し位置に存在する前記搬送車と、前記第２軌道において前記特定の載置場所に前記被搬送物を受け渡すための受渡し位置に存在する前記搬送車とは、走行方向が異なり、各搬送車によって把持される前記被搬送物の向きが同一である、搬送車システム。
（付記２）前記複数の搬送車は、前記第１軌道及び前記第２軌道の一方では前進により走行し、他方では後退により走行する、付記１に記載の搬送車システム。
（付記３）前記第２軌道は、前記第１軌道に対し下方に設けられる、付記１又は付記２に記載の搬送車システム。
（付記４）前記第１軌道と前記第２軌道とを接続し、前記搬送車が往来する乗り入れ軌道を有し、
　前記搬送車は、前記乗り入れ軌道に含まれる切り替え軌道において、前進による走行と後退による走行とを切り替える、付記２又は付記３に記載の搬送車システム。
（付記５）前記切り替え軌道は、２以上の前記搬送車が一度に進入可能な長さを有し、
　前記コントローラは、前記第１軌道及び前記第２軌道の一方の軌道から２以上の前記搬送車を前記切り替え軌道に進入させ、より後から前記切り替え軌道に進入させた前記搬送車から順に他方の軌道に退出させる、付記４又は付記５に記載の搬送車システム。 In addition, the following supplementary notes are disclosed in relation to the above-described embodiment.
(Note 1) A first track is provided so that a placement location for a transported object is located below the first track;
A second track is provided so that the placement location is located below the second track;
a plurality of transport vehicles that travel along the first track and the second track and transport the transported object;
A controller for controlling the operation of each of the plurality of transport vehicles,
The transport vehicle is
A gripping unit that grips the transported object;
A moving mechanism that moves the gripping unit to directly above the placement location;
a lifting mechanism for lifting and lowering the gripping unit located directly above the placement location relative to the placement location,
A transport vehicle system in which the transport vehicle located at a transfer position on the first track for transferring the transported object to a specific loading location and the transport vehicle located at a transfer position on the second track for transferring the transported object to the specific loading location have different traveling directions, and the orientation of the transported object held by each transport vehicle is the same.
(Supplementary Note 2) The multiple guided vehicles of the guided vehicle system described in Supplementary Note 1 travel forward on one of the first track and the second track, and travel backward on the other track.
(Supplementary Note 3) The transport vehicle system described in Supplementary Note 1 or Supplementary Note 2, wherein the second track is arranged below the first track.
(Additional Note 4) A track is provided that connects the first track and the second track and through which the transport vehicle travels,
The transport vehicle system according to claim 2 or 3, wherein the transport vehicle switches between forward travel and reverse travel on a switching track included in the entry track.
(Additional Note 5) The switching track has a length that allows two or more of the transport vehicles to enter at once,
The transport vehicle system of claim 4 or 5, wherein the controller causes two or more of the transport vehicles to enter the switching track from one of the first track and the second track, and causes the transport vehicles that entered the switching track last to exit the other track in order.
　以上、本発明の実施形態について説明したが、本発明の技術的範囲は、上述した実施形態に限定されない。上述した実施形態に、多様な変更又は改良を加えることが可能であることは当業者において明らかである。また、そのような変更又は改良を加えた形態も本発明の技術的範囲に含まれる。上述した実施形態等で説明した要件の１つ以上は、省略されることがある。また、上述した実施形態等で説明した要件は、適宜組み合わせることができる。また、法令で許容される限りにおいて、日本特許出願である特願２０２２－１９４２７０、及び上述した実施形態等で引用した全ての文献の開示を援用して本文の記載の一部とする。 The above describes the embodiments of the present invention, but the technical scope of the present invention is not limited to the above-described embodiments. It is clear to those skilled in the art that various modifications or improvements can be made to the above-described embodiments. Furthermore, forms with such modifications or improvements are also included in the technical scope of the present invention. One or more of the requirements described in the above-described embodiments may be omitted. Furthermore, the requirements described in the above-described embodiments may be combined as appropriate. Furthermore, to the extent permitted by law, the disclosures of Japanese Patent Application No. 2022-194270 and all documents cited in the above-described embodiments are incorporated by reference and made part of the description in this text.
１・・・搬送車システム
１０・・・軌道
１０Ａ・・・第１軌道
１０Ｂ・・・第２軌道
２０、２０Ａ、２０Ｂ・・・搬送車
４０・・・保管棚
５０・・・コントローラ
９０・・・被搬送物
１００・・・処理装置
１０１・・・装置ポート 1 ... Transport vehicle system 10 ... Track 10A ... First track 10B ... Second track 20, 20A, 20B ... Transport vehicle 40 ... Storage shelf 50 ... Controller 90 ... Transported object 100 ... Processing device 101 ... Equipment port

Claims (7)

  1. 　被搬送物の載置場所が下方に位置するように設けられる第１軌道と、
    　前記載置場所が下方に位置するように設けられる第２軌道と、
    　前記第１軌道及び前記第２軌道のそれぞれに沿って走行し、前記被搬送物を搬送する複数の搬送車と、
    　前記複数の搬送車のそれぞれの動作を制御するコントローラと、を有し、
    　前記搬送車は、
    　前記被搬送物を把持する把持部と、
    　前記載置場所の直上に前記把持部を移動させる移動機構と、
    　前記載置場所の直上に位置する前記把持部を、前記載置場所に対して昇降させる昇降機構と、を備え、
    　前記第１軌道において特定の載置場所に前記被搬送物を受け渡すための受渡し位置に存在する前記搬送車と、前記第２軌道において前記特定の載置場所に前記被搬送物を受け渡すための受渡し位置に存在する前記搬送車とは、走行方向が異なり、各搬送車によって把持される前記被搬送物の向きが同一である、搬送車システム。     a first track provided so that a placement location for the transported object is located below the first track;
    A second track is provided so that the placement location is located below the second track;
    a plurality of transport vehicles that travel along the first track and the second track and transport the transported object;
    A controller for controlling the operation of each of the plurality of transport vehicles,
    The transport vehicle is
    A gripping unit that grips the transported object;
    A moving mechanism that moves the gripping unit to directly above the placement location;
    a lifting mechanism for lifting and lowering the gripping unit located directly above the placement location relative to the placement location,
    A transport vehicle system in which the transport vehicle located at a transfer position on the first track for transferring the transported object to a specific loading location and the transport vehicle located at a transfer position on the second track for transferring the transported object to the specific loading location have different traveling directions, and the orientation of the transported object held by each transport vehicle is the same.
  2. 　前記複数の搬送車は、前記第１軌道及び前記第２軌道の一方では前進により走行し、他方では後退により走行する、請求項１に記載の搬送車システム。 The transport vehicle system according to claim 1, wherein the plurality of transport vehicles travel forward on one of the first track and the second track, and travel backward on the other track.
  3. 　前記第２軌道は、前記第１軌道に対し下方に設けられる、請求項１又は請求項２に記載の搬送車システム。 The transport vehicle system according to claim 1 or 2, wherein the second track is disposed below the first track.
  4. 　前記第１軌道と前記第２軌道とを接続し、前記搬送車が往来する乗り入れ軌道を有し、
    　前記搬送車は、前記乗り入れ軌道に含まれる切り替え軌道において、前進による走行と後退による走行とを切り替える、請求項２に記載の搬送車システム。     a track connecting the first track and the second track and through which the transport vehicle travels;
    The guided vehicle system according to claim 2 , wherein the guided vehicle switches between forward travel and reverse travel on a switching track included in the entry track.
  5. 　前記第１軌道と前記第２軌道とを接続し、前記搬送車が往来する乗り入れ軌道を有し、
    　前記搬送車は、前記乗り入れ軌道に含まれる切り替え軌道において、前進による走行と後退による走行とを切り替える、請求項３に記載の搬送車システム。     a track connecting the first track and the second track and through which the transport vehicle travels;
    The guided vehicle system according to claim 3 , wherein the guided vehicle switches between forward travel and reverse travel on a switching track included in the entry track.
  6. 　前記切り替え軌道は、２以上の前記搬送車が一度に進入可能な長さを有し、
    　前記コントローラは、前記第１軌道及び前記第２軌道の一方の軌道から２以上の前記搬送車を前記切り替え軌道に進入させ、より後から前記切り替え軌道に進入させた前記搬送車から順に他方の軌道に退出させる、請求項４に記載の搬送車システム。     The switching track has a length that allows two or more of the transport vehicles to enter at once,
    The transport vehicle system of claim 4, wherein the controller causes two or more of the transport vehicles to enter the switching track from one of the first track and the second track, and causes the transport vehicles that entered the switching track last to exit the other track in order.
  7. 　前記切り替え軌道は、２以上の前記搬送車が一度に進入可能な長さを有し、
    　前記コントローラは、前記第１軌道及び前記第２軌道の一方の軌道から２以上の前記搬送車を前記切り替え軌道に進入させ、より後から前記切り替え軌道に進入させた前記搬送車から順に他方の軌道に退出させる、請求項５に記載の搬送車システム。     The switching track has a length that allows two or more of the transport vehicles to enter at once,
    The transport vehicle system of claim 5, wherein the controller causes two or more of the transport vehicles to enter the switching track from one of the first track and the second track, and causes the transport vehicles that entered the switching track last to exit the other track in order.
PCT/JP2023/032503 2022-12-05 2023-09-06 Transport vehicle system WO2024122138A1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017029871A1 (en) * 2015-08-14 2017-02-23 村田機械株式会社 Conveyance system
WO2020153041A1 (en) * 2019-01-25 2020-07-30 村田機械株式会社 Transport system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017029871A1 (en) * 2015-08-14 2017-02-23 村田機械株式会社 Conveyance system
WO2020153041A1 (en) * 2019-01-25 2020-07-30 村田機械株式会社 Transport system

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