WO2024103850A1

WO2024103850A1 - Device for increasing temperature of melt in middle of crucible in artificial crystal furnace

Info

Publication number: WO2024103850A1
Application number: PCT/CN2023/110931
Authority: WO
Inventors: 朱振业
Original assignee: 洛阳长缨新能源科技有限公司
Priority date: 2022-11-16
Filing date: 2023-08-03
Publication date: 2024-05-23

Abstract

A device for increasing the temperature of a melt in the middle of a crucible in an artificial crystal furnace, relating to the field of artificial crystal material preparation. A heat preservation plate capable of moving up and down is arranged below a lower heater (9), so that heat loss of the lower heater is effectively reduced; further, it is ensured that the purpose of constant temperature of a melt in a crucible (18) can be achieved without increasing the heating power of a side heater (5) or of the lower heater, energy consumption during heating is reduced, and the crystal drawing efficiency is improved. The device has the characteristics of a simple structure, stable operation and the like, and is suitable for large-scale promotion and application.

Description

提高人工晶体炉中坩埚中部熔液温度的装置Device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace

相关申请的引用Citation of Related Applications

本申请要求于2022年11月16日向中华人民共和国国家知识产权局提交的第202211552639.1号中国专利申请、2022年11月16日提交的第202223195520.1号中国专利申请以及2022年11月16日提交的第202223195518.4号中国专利申请的权益，在此将其全部内容以援引的方式整体并入本文中。This application claims the rights and interests of Chinese Patent Application No. 202211552639.1 filed with the State Intellectual Property Office of the People's Republic of China on November 16, 2022, Chinese Patent Application No. 202223195520.1 filed on November 16, 2022, and Chinese Patent Application No. 202223195518.4 filed on November 16, 2022, the entire contents of which are hereby incorporated by reference into this document in their entirety.

技术领域Technical Field

本发明涉及人工晶体材料制备领域，具体涉及一种提高人工晶体炉中坩埚中部熔液温度的装置。The invention relates to the field of preparation of artificial crystal materials, and in particular to a device for increasing the temperature of a melt in the middle of a crucible in an artificial crystal furnace.

背景技术Background technique

人工晶体炉是制备人工晶体材料时的专用设备，其中人工晶体炉的核心技术为如何控制坩埚内熔液的温度梯度，也就是说在人工晶体材料制备时如何提供一个合适的热场是其中的关键技术之一。The artificial crystal furnace is a special equipment for preparing artificial crystal materials. The core technology of the artificial crystal furnace is how to control the temperature gradient of the melt in the crucible. In other words, how to provide a suitable thermal field when preparing artificial crystal materials is one of the key technologies.

发明人通过检索发现，采用直拉法拉制硅棒的技术已经非常成熟，并在人工晶体制备领域得到了广泛的应用，但是现有直拉法在拉制硅棒时，首先将硅料放置在坩埚内，然后启动加热器对坩埚内的硅料进行加热，此时，由于现有结构的环状加热器套接在坩埚的***，在对坩埚加热时，热量是从坩埚的埚壁向坩埚的中心传递，坩埚的埚壁因靠近加热器，坩埚的中心部位远离加热器，因此坩埚的温度分布为自坩埚的内侧壁至坩埚的中心部位逐渐降低(这是本领域的技术常识)，也就是说离加热器越近，温度越高，待坩埚内的硅料熔化后，设置在坩埚中心部位上方的上提拉机构带动一根籽晶下降，当籽晶的下端头与坩埚内的熔液接触并熔为一体，此时为了确保熔液能跟随籽晶上升，通过降低加热器的加热功率，增大熔液的粘稠度(因直拉法只在坩埚的中心部位进行引晶并拉制硅棒，由于坩埚中心部位的温度本身就低于坩埚周边的温度，正利于所拉制硅棒的结晶)，然后上提拉机构带动籽晶缓慢上升，此时，熔液跟随籽晶同时上升，当粘附在籽晶上的熔液逐渐脱离坩埚内的熔液后，随着温度的降低，粘附在籽晶上的熔液逐渐结晶，进而形成所需的新的硅棒。比如中国发明专利，专利号为201320678696.4，申请日为2013年10月30日，公告号为CN203639604U，专利名称为一种软轴提拉型单晶炉；中国发明专利，专利号为202011063763.2，申请日为2020年9月30日，公告号为CN112176400A，专利名称为一种直拉法单晶炉及其熔体温度梯度控制方法。The inventors have found through searching that the technology of drawing silicon rods by the Czochralski method is already very mature and has been widely used in the field of artificial crystal preparation. However, when drawing silicon rods by the existing Czochralski method, the silicon material is first placed in a crucible, and then the heater is started to heat the silicon material in the crucible. At this time, since the annular heater of the existing structure is sleeved on the outer periphery of the crucible, when the crucible is heated, the heat is transferred from the wall of the crucible to the center of the crucible. Since the wall of the crucible is close to the heater and the center of the crucible is far away from the heater, the temperature distribution of the crucible is gradually reduced from the inner wall of the crucible to the center of the crucible (this is technical common sense in the field). That is to say, the closer to the heater, the higher the temperature. When the silicon material in the crucible is melted, the temperature is gradually reduced. After fusion, the upper pulling mechanism arranged above the center of the crucible drives a seed crystal down. When the lower end of the seed crystal contacts the melt in the crucible and melts into one, in order to ensure that the melt can rise with the seed crystal, the heating power of the heater is reduced to increase the viscosity of the melt (because the direct pulling method only carries out seeding and pulling silicon rods in the center of the crucible, and the temperature in the center of the crucible is lower than the temperature around the crucible, it is conducive to the crystallization of the pulled silicon rod). Then the upper pulling mechanism drives the seed crystal to rise slowly. At this time, the melt rises with the seed crystal. When the melt adhered to the seed crystal gradually separates from the melt in the crucible, as the temperature decreases, the melt adhered to the seed crystal gradually crystallizes, thereby forming the required new silicon rod. For example, the Chinese invention patent, patent number is 201320678696.4, the application date is October 30, 2013, the announcement number is CN203639604U, and the patent name is a soft shaft pulling single crystal furnace; the Chinese invention patent, patent number is 202011063763.2, the application date is September 30, 2020, the announcement number is CN112176400A, and the patent name is a direct pulling single crystal furnace and The invention discloses a melt temperature gradient control method.

另外，现有技术中还存在坩埚通过下传动机构进行上升和旋转的技术方案，如中国专利，专利申请号为CN201710293347.3，申请日为2017年04月28日，公开(公告)号为CN106987897A，公开(公告)日为2017年07月28日，专利名称为一种改进的单晶炉结构及其应用，该专利公开了一种单晶炉的结构，其包括一底座，该底座上设置有主炉室，所述主炉室的下方设置有立柱，该立柱设置在底座上，所述立柱的顶部设置有维修平台，其中间部分通过机架固定有副炉室，所述副炉室的底部设置有第二隔离阀，所述副炉室的上部设置有上传动机构。该专利说明书第【0023】段公开了一底座，该底座起到设备炉体的支撑作用，其上是设置有主炉室，所述主炉室的下方设置有下传动机构；进一步，说明书第【0024】段还公开了炉盖，设置在主炉室的上方，所述主炉室设置有热场和坩埚，所述坩埚与主炉室的下方设置的下传动机构对接，所述下传动机构为坩埚的升降及旋转装置；该专利公开的下传动机构只能实现坩埚的升降和旋转。In addition, there are technical solutions in the prior art for the crucible to rise and rotate through a lower transmission mechanism, such as a Chinese patent, the patent application number is CN201710293347.3, the application date is April 28, 2017, the publication (announcement) number is CN106987897A, the publication (announcement) date is July 28, 2017, and the patent name is an improved single crystal furnace structure and its application. The patent discloses a structure of a single crystal furnace, which includes a base, a main furnace chamber is arranged on the base, a column is arranged below the main furnace chamber, the column is arranged on the base, a maintenance platform is arranged on the top of the column, an auxiliary furnace chamber is fixed to the middle part through a frame, a second isolation valve is arranged at the bottom of the auxiliary furnace chamber, and an upper transmission mechanism is arranged on the upper part of the auxiliary furnace chamber. Paragraph [0023] of the patent specification discloses a base, which serves as a support for the furnace body of the equipment, on which a main furnace chamber is arranged, and a lower transmission mechanism is arranged below the main furnace chamber; further, paragraph [0024] of the specification also discloses a furnace cover, which is arranged above the main furnace chamber, and the main furnace chamber is provided with a heat field and a crucible, and the crucible is connected to the lower transmission mechanism arranged below the main furnace chamber, and the lower transmission mechanism is a lifting and rotating device for the crucible; the lower transmission mechanism disclosed in the patent can only realize the lifting and rotating of the crucible.

通过进一步检索发现，本领域技术人员发现上述专利在实际应用中存在温度场温度分布不均匀的现象，为了改善因整个温度场温度分布不均匀，温度梯度大，气流紊乱，导致坩埚内材料熔化不完全的现象，提出了在坩埚的底部增加底部加热器的技术方案，如中国专利，申请号为CN201820981578.3，申请日为2018年06月25日，公开(公告)号为CN208869724U，公开(公告)日为2019年05月17日，专利名称为一种半导体单晶炉大尺寸温场，其具体公开了在所述炉腔室内设有一坩埚，所述坩埚的外壁设有一侧加热器，所述坩埚的下方还固定设有下加热器的技术方案，如说明书第【0030】段中公开的“增加了下加热器，使坩埚底部的硅料能充分受热熔化完全，使整个温场加热均匀”等。Through further searching, it was found that the technical personnel in this field found that the above patent had the phenomenon of uneven temperature distribution in the temperature field in actual application. In order to improve the phenomenon of incomplete melting of the material in the crucible due to uneven temperature distribution of the entire temperature field, large temperature gradient and turbulent airflow, a technical solution of adding a bottom heater at the bottom of the crucible was proposed, such as the Chinese patent, application number CN201820981578.3, application date June 25, 2018, publication (announcement) number CN208869724U, publication (announcement) date May 17, 2019, and the patent name is a large-size temperature field of a semiconductor single crystal furnace, which specifically discloses a crucible provided in the furnace chamber, a side heater provided on the outer wall of the crucible, and a lower heater fixedly provided under the crucible, such as the technical solution disclosed in paragraph [0030] of the specification, "a lower heater is added so that the silicon material at the bottom of the crucible can be fully heated and melted completely, so that the entire temperature field is heated evenly".

上述专利公开的技术方案均是采用直拉法拉制硅棒的技术方案，但上述技术方案只能实现一根硅棒的同时拉制，无法实现多根硅棒的同时拉制。The technical solutions disclosed in the above patents all use the direct pulling method to draw silicon rods. However, the above technical solutions can only achieve the simultaneous drawing of one silicon rod, and cannot achieve the simultaneous drawing of multiple silicon rods.

此时，发明人经过分析发现，因坩埚中心区域范围较小，此方法只能同时拉制一根硅棒，无法实现多根硅棒的同时拉制，为了实现更多根数硅棒的同时拉制，只能将硅棒的拉制区域由现有的坩埚中心部位移到坩埚中心部位的外侧(避开坩埚的中心位置)，越靠近坩埚的内壁，同时拉制硅棒的根数越多，通过反复试验发现，简单的将硅棒的拉制区域由现有的坩埚中心部位移到坩埚中心部位的外侧在硅棒拉制时主要存在如下弊端：At this time, the inventors found through analysis that, due to the small range of the central area of the crucible, this method can only pull one silicon rod at a time, and cannot achieve the simultaneous pulling of multiple silicon rods. In order to achieve the simultaneous pulling of more silicon rods, the pulling area of the silicon rod can only be moved from the existing center of the crucible to the outside of the center of the crucible (avoiding the center of the crucible). The closer to the inner wall of the crucible, the more silicon rods can be pulled at the same time. Through repeated experiments, it was found that simply moving the pulling area of the silicon rod from the existing center of the crucible to the outside of the center of the crucible has the following disadvantages when pulling silicon rods:

1、在拉制时，坩埚中心部位的熔液会随着加热功率的降低而结晶，具体为：实施时，首先将硅料放置在坩埚内，然后通过加热器对坩埚加热将坩埚内的硅料进行熔化，待坩埚内的硅料熔化后，上提拉机构带动籽晶下降，当籽晶的下端头与坩埚内的熔液接触并熔为一体后，上提拉机构带动籽晶缓慢上升，此时，为了保证熔液能跟随籽晶上升，只能通过降低加热功率的方式来增加熔液的粘稠度，而此时当坩埚中心部位***拉制区域的温度降低至达到拉制要求的温度时，坩埚中心部位的温度本身就低于中心区域***的温度，再降低加热器的加热功率，坩埚中心部位的熔液极易因温度达到结晶温度而发生结晶，严重时还会因坩埚中部的熔液结晶导致拉制中断等。1. During the drawing process, the molten metal in the center of the crucible will crystallize as the heating power decreases. During the operation, the silicon material is first placed in the crucible, and then the crucible is heated by the heater to melt the silicon material in the crucible. After the silicon material in the crucible is melted, the upper pulling mechanism drives the seed crystal to descend. When the lower end of the seed crystal contacts the melt in the crucible and melts into one, the upper pulling mechanism drives the seed crystal to rise slowly. At this time, in order to ensure that the melt can rise with the seed crystal, the viscosity of the melt can only be increased by reducing the heating power. At this time, when the temperature of the drawing area outside the center of the crucible is reduced to the temperature required for drawing, the temperature of the center of the crucible is lower than the temperature of the periphery of the center area. If the heating power of the heater is reduced again, the melt in the center of the crucible is very likely to crystallize due to the temperature reaching the crystallization temperature. In severe cases, the crystallization of the melt in the middle of the crucible may cause the interruption of drawing.

2、为了避免坩埚中心部位的熔液结晶，只能始终保持坩埚中心部位熔液的温度在结晶温度以上，此时处于坩埚中心部位***的熔液温度更加高于结晶温度，为了保证硅棒的顺利拉制，只能通过降低提拉的速度来实现，最终导致硅棒拉制效率的降低。2. In order to prevent the crystallization of the melt in the center of the crucible, the temperature of the melt in the center of the crucible can only be kept above the crystallization temperature. At this time, the temperature of the melt outside the center of the crucible is higher than the crystallization temperature. In order to ensure the smooth drawing of the silicon rod, it can only be achieved by reducing the pulling speed, which ultimately leads to a decrease in the efficiency of silicon rod drawing.

3、无法实现坩埚中心部位与坩埚中心部位***熔液的温度均匀等。3. It is impossible to achieve uniform temperature of the melt in the center of the crucible and outside the center of the crucible.

4、现有的下加热器均为固定式设置，下加热器无法跟随坩埚进行升降，同时还无法调整下加热器与坩埚之间的距离，在实际应用过程中，当坩埚逐渐上升并远离下加热时，下加热器就减弱了对坩埚的加热作用，进而造成能耗的增加，也就是说当坩埚上升到一定高度后，下加热器就减弱了对坩埚的加热作用。此时，为了保证坩埚内熔液的温度不变，需要通过提高侧加热器或下加热器的加热功率，进而造成能耗的增加等。另外，由于下加热器为固定式设置，无法调整下加热器与坩埚底部之间的距离，造成坩埚所处热场内的温度梯度无法调整等。4. The existing lower heaters are all fixed. The lower heater cannot rise or fall with the crucible, and the distance between the lower heater and the crucible cannot be adjusted. In actual application, when the crucible gradually rises and moves away from the lower heater, the lower heater weakens the heating effect on the crucible, which in turn causes an increase in energy consumption. That is to say, when the crucible rises to a certain height, the lower heater weakens the heating effect on the crucible. At this time, in order to ensure that the temperature of the melt in the crucible remains unchanged, it is necessary to increase the heating power of the side heater or the lower heater, which in turn causes an increase in energy consumption. In addition, since the lower heater is fixed, the distance between the lower heater and the bottom of the crucible cannot be adjusted, resulting in the inability to adjust the temperature gradient in the heat field where the crucible is located.

因此，如何提供一种提高人工晶体炉中坩埚中部熔液温度的装置就成了本领域技术人员的长期技术诉求，另外，如何提供一种在不提高侧加热器或下加热器加热功率就能实现坩埚内熔液温度不变，且能实时调整热场内温度梯度的装置就成了亟待解决的技术问题。Therefore, how to provide a device to increase the temperature of the melt in the middle of the crucible in an artificial crystal furnace has become a long-term technical demand of technical personnel in this field. In addition, how to provide a device that can maintain the temperature of the melt in the crucible without increasing the heating power of the side heater or the lower heater and can adjust the temperature gradient in the thermal field in real time has become a technical problem that needs to be solved urgently.

发明内容Summary of the invention

为了克服背景技术中存在的问题，本发明提供了一种提高人工晶体炉中坩埚中部熔液温度的装置，本发明在下加热器的下方设置可以上下升降的保温板，有效的降低了下加热器热量的散失；另外，本发明通过设置升降装置，实现了下加热器与坩埚同时升降的目的，即在坩埚升降时，始终保持下加热器与坩埚之间的距离不变，另外还能实时调整下加热器与坩埚之间的距离，从而在不提高侧加热器或下加热器加热功率就能实现坩埚内熔液温度不变，且能实时调整热场内温度梯度的目的等。 In order to overcome the problems existing in the background technology, the present invention provides a device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace. The present invention arranges an insulation plate that can be raised and lowered below the lower heater, thereby effectively reducing the heat loss of the lower heater. In addition, the present invention achieves the purpose of simultaneously lifting and lowering the lower heater and the crucible by arranging a lifting device, that is, when the crucible is lifted and lowered, the distance between the lower heater and the crucible is always kept unchanged, and the distance between the lower heater and the crucible can be adjusted in real time, thereby achieving the purpose of keeping the temperature of the melt in the crucible unchanged without increasing the heating power of the side heater or the lower heater, and adjusting the temperature gradient in the thermal field in real time.

为实现上述发明目的，本发明采用如下技术方案：In order to achieve the above-mentioned invention object, the present invention adopts the following technical scheme:

本发明提供一种提高人工晶体炉中坩埚中部熔液温度的装置，包括侧加热器、保温板、下加热器、下加热器升降电极、下轴、坩埚和侧加热器电极，所述坩埚设置在炉体内，坩埚的下面连接下轴，在坩埚的***设有侧加热器，所述侧加热器连接侧加热器电极，在坩埚的下方设有下加热器，所述下加热器连接下加热器升降电极，在下加热器的下方设有上下升降的保温板。The present invention provides a device for increasing the temperature of the melt in the middle of a crucible in an artificial crystal furnace, comprising a side heater, a heat preservation plate, a lower heater, a lower heater lifting electrode, a lower shaft, a crucible and a side heater electrode. The crucible is arranged in a furnace body, the lower side of the crucible is connected to the lower shaft, a side heater is arranged on the periphery of the crucible, the side heater is connected to the side heater electrode, a lower heater is arranged below the crucible, the lower heater is connected to the lower heater lifting electrode, and a heat preservation plate that can be lifted up and down is arranged below the lower heater.

优选地，通过保温板隔离下加热器的热量散失形成所述的提高人工晶体炉中坩埚中部熔液温度的装置。注意，保温板具有保温和隔热等作用，其不仅可以隔离下加热器的热量散失，还可以隔离侧加热器等的热量散失，从而方便更准确地控制温度。Preferably, the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace is formed by isolating the heat loss of the lower heater with a heat preservation plate. Note that the heat preservation plate has the functions of heat preservation and heat insulation, and it can not only isolate the heat loss of the lower heater, but also isolate the heat loss of the side heater, so as to facilitate more accurate temperature control.

为了保证所需的温度梯度，所述保温板的外径与炉体的内壁或炉体内壁上的保温筒接近将炉体分割为上下两个腔体。In order to ensure the required temperature gradient, the outer diameter of the insulation board is close to the inner wall of the furnace body or the insulation tube on the inner wall of the furnace body to divide the furnace body into two upper and lower cavities.

根据实际情况，所述保温板的直径小于所述炉体的内壁的直径；或者，所述保温板的直径小于所述炉体内壁上的保温筒的直径。According to actual conditions, the diameter of the heat-insulating plate is smaller than the diameter of the inner wall of the furnace body; or, the diameter of the heat-insulating plate is smaller than the diameter of the heat-insulating tube on the inner wall of the furnace body.

为了提高稳定性，所述坩埚的下面连接坩埚托盘，坩埚托盘的下端面连接下轴。In order to improve stability, the bottom of the crucible is connected to a crucible tray, and the lower end surface of the crucible tray is connected to a lower shaft.

为了进一步提高保温效果，所述坩埚托盘的下面设有至少一层向下延伸的上保温筒。In order to further improve the heat preservation effect, at least one layer of upper heat preservation tube extending downward is provided below the crucible tray.

或者，所述坩埚的下面设有至少一层向下延伸的上保温筒Alternatively, at least one layer of upper insulation tube extending downward is provided below the crucible.

为了进一步提高保温效果，所述保温板的上面设有至少一层向上延伸的下保温筒，下加热器处于下保温筒内。In order to further improve the heat preservation effect, at least one layer of a lower heat preservation tube extending upward is provided on the heat preservation plate, and the lower heater is located in the lower heat preservation tube.

为了实现保温板的升降，所述下加热器升降电极的外缘面上套接有保温板支撑管，在下加热器下方的保温板支撑管上设有保温板；In order to realize the lifting and lowering of the insulation board, an insulation board support pipe is sleeved on the outer edge surface of the lifting electrode of the lower heater, and an insulation board is arranged on the insulation board support pipe below the lower heater;

或者，所述保温板的下面连接升降杆。Alternatively, a lifting rod is connected to the bottom of the insulation board.

为了隔离保温板支撑管与下加热器升降电极，所述保温板支撑管下端头的内缘面与下加热器升降电极外缘面之间设有绝缘隔套。In order to isolate the insulation board support tube from the lower heater lifting electrode, an insulating sleeve is provided between the inner edge surface of the lower end of the insulation board support tube and the outer edge surface of the lower heater lifting electrode.

优选地，所述保温板包括保温盘体、盖板和保温材料，在所述保温盘体的上面设有下轴穿孔，在所述下轴穿孔的***设有下加热器升降电极穿孔，在保温盘体的开口端设有盖板，在保温盘体内的腔体内设有保温材料。Preferably, the insulation plate includes an insulation disk body, a cover plate and insulation material. A lower shaft through hole is provided on the top of the insulation disk body, a lower heater lifting electrode through hole is provided on the periphery of the lower shaft through hole, a cover plate is provided at the open end of the insulation disk body, and insulation material is provided in the cavity inside the insulation disk body.

或者，所述保温板为至少一层石墨板、石墨毡或碳碳复合板，在保温板的上面设有下轴穿孔，在所述下轴穿孔的***设有下加热器升降电极穿孔。Alternatively, the insulation plate is at least one layer of graphite plate, graphite felt or carbon-carbon composite plate, a lower shaft through hole is provided on the insulation plate, and a lower heater lifting electrode through hole is provided on the periphery of the lower shaft through hole.

为了提高炉体的保温性能，所述炉体的内壁设有侧壁保温层，在侧壁保温层的内缘面设有保温筒，在炉体的炉底上设有底部保温层，在底部保温层的上面设有底部石墨板。In order to improve the thermal insulation performance of the furnace body, the inner wall of the furnace body is provided with a side wall thermal insulation layer, the inner edge surface of the side wall thermal insulation layer is provided with a thermal insulation tube, the bottom of the furnace body is provided with a bottom thermal insulation layer, and a bottom stone is provided on the top of the bottom thermal insulation layer. Ink board.

优选地，所述炉体设置在机架的上面，在所述机架内设有用于下加热器升降电极升降和下轴升降及旋转的升降装置。Preferably, the furnace body is arranged on the frame, and a lifting device for lifting and lowering the lower heater, lifting and lowering the electrode, and lifting and rotating the lower shaft is arranged in the frame.

优选地，所述下加热器升降电极及下轴的下端头分别连接设置在炉体下方升降装置中的升降板。Preferably, the lower heater lifting electrode and the lower end of the lower shaft are respectively connected to a lifting plate in a lifting device disposed below the furnace body.

优选地，所述升降装置包括下加热器升降电极、导向件、升降支撑座、升降板、升降机构、下轴和升降滑块，在所述升降支撑座的立板上设有至少一根导向件，在每根导向件上分别设有升降滑块，在升降支撑座的底板上设有升降机构，升降机构中的升降器连接升降板形成升降单元，所述升降单元连接升降滑块，在升降板上设有下轴，在下轴***的升降板上设有至少两个下加热器升降电极，所述下轴及两下加热器升降电极的上端头穿过炉底分别连接坩埚和下加热器形成所述的用于人工晶体炉中下加热器与下轴的升降装置。Preferably, the lifting device includes a lower heater lifting electrode, a guide member, a lifting support seat, a lifting plate, a lifting mechanism, a lower shaft and a lifting slider. At least one guide member is provided on the vertical plate of the lifting support seat, and a lifting slider is provided on each guide member. A lifting mechanism is provided on the bottom plate of the lifting support seat. The lifter in the lifting mechanism is connected to the lifting plate to form a lifting unit. The lifting unit is connected to the lifting slider. A lower shaft is provided on the lifting plate. At least two lower heater lifting electrodes are provided on the lifting plate outside the lower shaft. The upper ends of the lower shaft and the two lower heater lifting electrodes pass through the furnace bottom and are respectively connected to the crucible and the lower heater to form the lifting device for the lower heater and the lower shaft in the artificial crystal furnace.

优选地，所述导向件为导轨或导向光柱。Preferably, the guide member is a guide rail or a guide light column.

优选地，所述升降机构为螺旋升降机或电动推杆。Preferably, the lifting mechanism is a screw lift or an electric push rod.

优选地，所述螺旋升降机为丝杠升降型螺旋升降机或螺母升降型螺旋升降机。Preferably, the screw jack is a screw jacking type screw jack or a nut jacking type screw jack.

优选地，所述螺旋升降机设置为丝杠升降型螺旋升降机时，螺旋升降机中的升降器为升降箱体，升降箱体的动力输入轴连接升降电机。Preferably, when the spiral elevator is configured as a screw-lift type spiral elevator, the elevator in the spiral elevator is a lifting box, and the power input shaft of the lifting box is connected to the lifting motor.

优选地，所述螺旋升降机设置为螺母升降型螺旋升降机时，螺旋升降机中的升降器为升降螺母，所述螺旋升降机的第一动力输入轴连接快速升降电机，螺旋升降机的第二动力输入轴连接慢速升降减速机的动力输出轴，所述慢速升降减速机的动力输入轴连接慢速升降电机。Preferably, when the spiral elevator is configured as a nut-lifting type spiral elevator, the elevator in the spiral elevator is a lifting nut, the first power input shaft of the spiral elevator is connected to a fast lifting motor, the second power input shaft of the spiral elevator is connected to a power output shaft of a slow lifting reducer, and the power input shaft of the slow lifting reducer is connected to a slow lifting motor.

优选地，所述螺旋升降机的上端头连接上端板，所述上端板固设在升降支撑座的上端面。Preferably, the upper end of the spiral elevator is connected to an upper end plate, and the upper end plate is fixed to the upper end surface of the lifting support seat.

为了使下轴13具有旋转功能，所述下轴下端头的外缘面上设有从动带轮，所述从动带轮通过皮带连接设置在升降板侧板上下轴旋转减速机动力输出轴上的主动带轮，下轴旋转减速机的动力输入轴连接下轴旋转电机。In order to make the lower shaft 13 have a rotation function, a driven pulley is provided on the outer edge surface of the lower end of the lower shaft, and the driven pulley is connected to the driving pulley on the power output shaft of the upper and lower shaft rotation reducer arranged on the side plate of the lifting plate through a belt, and the power input shaft of the lower shaft rotation reducer is connected to the lower shaft rotation motor.

为了提高制造人工晶体时的密封性，所述下加热器升降电极的***套接有电极升降波纹管，所述电极升降波纹管的下端头连接升降板的上面，电极升降波纹管的上端头连接炉底的下面。In order to improve the sealing performance when manufacturing artificial lenses, the outer periphery of the lower heater lifting electrode is sleeved with an electrode lifting bellows, the lower end of the electrode lifting bellows is connected to the top of the lifting plate, and the upper end of the electrode lifting bellows is connected to the bottom of the furnace.

优选地，所述下轴的***套接有下轴升降波纹管，所述下轴升降波纹管的下端头连接升降板的上面，下轴升降波纹管的上端头连接炉底的下面。 Preferably, a lower shaft lifting bellows is sleeved on the periphery of the lower shaft, the lower end of the lower shaft lifting bellows is connected to the top of the lifting plate, and the upper end of the lower shaft lifting bellows is connected to the bottom of the furnace bottom.

优选地，所述升降板与下轴升降波纹管之间设有磁流体，在磁流体的上面设有支撑板，在支撑板两端头的下面分别设有电极接头，两电极接头分别连接下加热器升降电极。Preferably, a magnetic fluid is provided between the lifting plate and the lower shaft lifting bellows, a support plate is provided on the magnetic fluid, electrode connectors are provided below the two ends of the support plate, and the two electrode connectors are respectively connected to the lower heater lifting electrodes.

可选择地，所述升降装置包括下加热器升降电极、电极升降板、下轴升降板、导向件、升降机构、升降支撑座、下轴和升降箱体，在所述升降支撑座的立板上设有至少一根导向件，在每根导向件上分别设有电极升降滑块和下轴升降滑块，在升降支撑座的底板上设有升降机构，在所述升降机构中升降器上方或下方的丝杠上设有升降箱体，所述电极升降板连接升降箱体或升降器形成电极升降机构，所述下轴升降板连接升降器或升降箱体形成下轴升降机构，所述电极升降机构与下轴升降机构分别连接电极升降滑块和下轴升降滑块，在电极升降板上设有至少两个下加热器升降电极，在下轴升降板上设有下轴，下加热器升降电极和下轴的上端头分别穿过炉底连接下加热器和坩埚形成所述的提高人工晶体炉中坩埚中部熔液温度的装置。Optionally, the lifting device includes a lower heater lifting electrode, an electrode lifting plate, a lower shaft lifting plate, a guide, a lifting mechanism, a lifting support seat, a lower shaft and a lifting box. At least one guide is provided on the vertical plate of the lifting support seat, and an electrode lifting slider and a lower shaft lifting slider are respectively provided on each guide. A lifting mechanism is provided on the bottom plate of the lifting support seat. A lifting box is provided on the lead screw above or below the lifter in the lifting mechanism. The electrode lifting plate is connected to the lifting box or the lifter to form the electrode lifting mechanism. The lower shaft lifting plate is connected to the lifter or the lifting box to form the lower shaft lifting mechanism. The electrode lifting mechanism and the lower shaft lifting mechanism are respectively connected to the electrode lifting slider and the lower shaft lifting slider. At least two lower heater lifting electrodes are provided on the electrode lifting plate. A lower shaft is provided on the lower shaft lifting plate. The upper ends of the lower heater lifting electrode and the lower shaft respectively pass through the furnace bottom to connect the lower heater and the crucible to form the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace.

优选地，所述螺旋升降机设置为螺母升降型螺旋升降机时，螺旋升降机中的升降器为升降螺母，螺旋升降机中固定箱体的第一动力输入轴连接快速升降电机，固定箱体的第二动力输入轴连接慢速升降减速机的动力输出轴，所述慢速升降减速机的动力输入轴连接慢速升降电机。Preferably, when the spiral elevator is configured as a nut-lifting type spiral elevator, the elevator in the spiral elevator is a lifting nut, the first power input shaft of the fixed box in the spiral elevator is connected to the fast lifting motor, the second power input shaft of the fixed box is connected to the power output shaft of the slow lifting reducer, and the power input shaft of the slow lifting reducer is connected to the slow lifting motor.

为了保证晶体炉的密闭性，所述下加热器升降电极的***套接有电极升降波纹管，所述电极升降波纹管的下端头连接电极升降板的上面，电极升降波纹管的上端头连接炉底的下面。In order to ensure the airtightness of the crystal furnace, the outer periphery of the lower heater lifting electrode is sleeved with an electrode lifting bellows, the lower end of the electrode lifting bellows is connected to the top of the electrode lifting plate, and the upper end of the electrode lifting bellows is connected to the bottom of the furnace.

优选地，所述下轴的***套接有下轴升降波纹管，所述下轴升降波纹管的下端头连接下轴升降板的上面，下轴升降波纹管的上端头连接炉底的下面。Preferably, a lower shaft lifting bellows is sleeved on the periphery of the lower shaft, the lower end of the lower shaft lifting bellows is connected to the upper side of the lower shaft lifting plate, and the upper end of the lower shaft lifting bellows is connected to the lower side of the furnace bottom.

优选地，所述下轴升降板与下轴升降波纹管之间设有磁流体。Preferably, a magnetic fluid is provided between the lower shaft lifting plate and the lower shaft lifting bellows.

为了使下轴13具有旋转功能，所述下轴下端头穿过下轴升降板的下面并向下延伸，下轴下端头的外缘面上设有从动带轮，所述从动带轮通过皮带连接设置在下轴升降板侧板上下轴旋转减速机动力输出轴上的主动带轮，下轴旋转减速机的动力输入轴连接下轴旋转电机。 In order to make the lower shaft 13 have a rotation function, the lower end of the lower shaft passes through the bottom of the lower shaft lifting plate and extends downward. A driven pulley is provided on the outer edge surface of the lower end of the lower shaft. The driven pulley is connected to the driving pulley on the power output shaft of the upper and lower shaft rotation reducer on the side plate of the lower shaft lifting plate through a belt. The power input shaft of the lower shaft rotation reducer is connected to the lower shaft rotation motor.

优选地，所述螺旋升降机的上端头连接顶板，所述顶板固设在升降支撑座的上端面。Preferably, the upper end of the spiral elevator is connected to a top plate, and the top plate is fixed to the upper end surface of the lifting support seat.

由于采用如上所述的技术方案，本发明具有如下有益效果：Due to the adoption of the above-mentioned technical solution, the present invention has the following beneficial effects:

本发明通过在下加热器的下方设置可以上下升降的保温板，有效的降低了下加热器热量的散失；另外，通过在螺旋升降机的升降器上设置升降板，在升降板上同时设置下轴与下加热器升降电极，当升降板升降时，带动下轴与下加热器升降电极同时升降，即实现了坩埚与下加热器的同时升降；通过在螺旋升降机的丝杠上同时设置升降器及升降箱体形成两套升降单元，升降器及升降箱体在丝杠上同步升降，当需要升降器与升降箱体实现差动升降时，通过升降箱体连接的升降电机驱动升降箱体上的箱体升降螺母旋转，实现升降箱体的升降，进而实现实时调整下加热器与坩埚之间的距离，从而在不提高侧加热器或下加热器加热功率的同时就能实现坩埚内熔液温度不变，且能实时调整热场内温度梯度的目的，进而实现了降低加热时能耗，提高了晶体的拉制效率等，本发明具有结构简便，运行稳定等特点，适合大范围的推广和应用。The present invention effectively reduces the heat loss of the lower heater by arranging a heat preservation plate that can be lifted up and down under the lower heater; in addition, a lifting plate is arranged on the lifter of the spiral lifter, and a lower shaft and a lower heater lifting electrode are arranged on the lifting plate at the same time. When the lifting plate is lifted, the lower shaft and the lower heater lifting electrode are driven to lift and lower at the same time, that is, the crucible and the lower heater are lifted and lowered at the same time; two sets of lifting units are formed by arranging a lifter and a lifting box on the lead screw of the spiral lifter at the same time, and the lifter and the lifting box are lifted and lowered synchronously on the lead screw. When the lifter and the lifting box need to be lifted and lowered differentially, the lifting motor connected to the lifting box drives the box lifting nut on the lifting box to rotate, so as to lift and lower the lifting box, thereby achieving real-time adjustment of the distance between the lower heater and the crucible, so that the temperature of the melt in the crucible can be kept constant without increasing the heating power of the side heater or the lower heater, and the temperature gradient in the thermal field can be adjusted in real time, thereby reducing the energy consumption during heating, improving the crystal pulling efficiency, etc. The present invention has the characteristics of simple structure and stable operation, and is suitable for large-scale promotion and application.

下面结合附图和具体实施例，对本发明的技术方案进行详细地说明。The technical solution of the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是本发明提高人工晶体炉中坩埚中部熔液温度的装置的主视结构的剖视示意图；1 is a schematic cross-sectional view of the front structure of a device for increasing the temperature of a melt in the middle of a crucible in an artificial crystal furnace according to the present invention;

图2是本发明提高人工晶体炉中坩埚中部熔液温度的装置的左视结构的剖视示意图；2 is a schematic cross-sectional view of the left side structure of the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to the present invention;

图3是本发明提高人工晶体炉中坩埚中部熔液温度的装置的实施例中坩埚处于上升状态时的结构示意图；3 is a schematic structural diagram of an embodiment of the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to the present invention when the crucible is in an ascending state;

图4是本发明升降装置的第一实施例的立体结构示意图；FIG4 is a schematic diagram of the three-dimensional structure of the first embodiment of the lifting device of the present invention;

图5是本发明升降装置的第一实施例的主视结构示意图；5 is a schematic diagram of the front view of the structure of the first embodiment of the lifting device of the present invention;

图6是本发明升降装置的第一实施例的左视结构示意图；6 is a left side structural schematic diagram of the first embodiment of the lifting device of the present invention;

图7是本发明升降装置的第一实施例的俯视结构示意图；7 is a schematic top view of the structure of the first embodiment of the lifting device of the present invention;

图8是本发明升降装置的第二实施例的立体结构示意图；FIG8 is a schematic diagram of the three-dimensional structure of a second embodiment of a lifting device of the present invention;

图9是本发明升降装置的第二实施例的主视结构示意图；9 is a front structural schematic diagram of a second embodiment of the lifting device of the present invention;

图10是本发明升降装置的第二实施例的左视结构示意图；10 is a left side structural schematic diagram of a second embodiment of the lifting device of the present invention;

图11是本发明升降装置的第二实施例的俯视结构示意图。 FIG. 11 is a schematic top view of the structure of the second embodiment of the lifting device of the present invention.

具体实施方式Detailed ways

通过下面的实施例可以更详细的解释本发明，公开本发明的目的旨在保护本发明范围内的一切变化和改进，本发明并不局限于下面的实施例；The present invention can be explained in more detail by the following examples. The purpose of disclosing the present invention is to protect all changes and improvements within the scope of the present invention. The present invention is not limited to the following examples.

在本发明的描述中，需要理解的是，术语“中心”、“侧向”、“长度”、“宽度”、“高度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“侧”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的设备或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。In the description of the present invention, it is to be understood that the terms “center”, “lateral”, “length”, “width”, “height”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “side”, etc., indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

在本发明的描述中，还需要说明的是，除非另有明确的规定和限定，术语“设置”、“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

结合附图1至图4中所述的一种提高人工晶体炉中坩埚中部熔液温度的装置，包括侧加热器5、保温板、下加热器9、下加热器升降电极10、下轴13、坩埚18和侧加热器电极20。所述坩埚18设置在炉体内，为了提高炉体的保温性能，所述炉体的内壁可以设有侧壁保温层4，在侧壁保温层4的内缘面可以设有保温筒3，在炉体的炉底上可以设有底部保温层1，在底部保温层1的上面可以设有底部石墨板2。所述炉体设置在机架的上面，在机架内设有用于下加热器升降电极10的升降和下轴13的升降及旋转的升降装置，坩埚18的下面连接下轴13，坩埚18与下轴13可以直接连接或者间接连接，例如，如图1至图3所示，所述坩埚18的下面连接坩埚托盘14，在坩埚18的外缘面上设有埚邦17，坩埚托盘14的下端面连接下轴13，即坩埚18通过坩埚托盘14与下轴13间接连接。A device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace described in conjunction with Figures 1 to 4 includes a side heater 5, a heat preservation plate, a lower heater 9, a lower heater lifting electrode 10, a lower shaft 13, a crucible 18 and a side heater electrode 20. The crucible 18 is arranged in the furnace body. In order to improve the heat preservation performance of the furnace body, the inner wall of the furnace body can be provided with a side wall heat preservation layer 4, and a heat preservation tube 3 can be provided on the inner edge surface of the side wall heat preservation layer 4. A bottom heat preservation layer 1 can be provided on the bottom of the furnace body, and a bottom graphite plate 2 can be provided on the bottom heat preservation layer 1. The furnace body is arranged on the top of the frame, and a lifting device for lifting and lowering the lower heater lifting electrode 10 and lifting and rotating the lower shaft 13 is provided in the frame. The lower side of the crucible 18 is connected to the lower shaft 13, and the crucible 18 and the lower shaft 13 can be directly connected or indirectly connected. For example, as shown in Figures 1 to 3, the lower side of the crucible 18 is connected to the crucible tray 14, and a crucible bond 17 is provided on the outer edge surface of the crucible 18. The lower end surface of the crucible tray 14 is connected to the lower shaft 13, that is, the crucible 18 is indirectly connected to the lower shaft 13 through the crucible tray 14.

进一步，在坩埚18的***设有侧加热器5，所述侧加热器5可以通过侧加热器连接螺栓19连接侧加热器电极20，侧加热器电极20的下端头穿过炉体的炉底后连接电源。Furthermore, a side heater 5 is provided on the periphery of the crucible 18, and the side heater 5 can be connected to a side heater electrode 20 via a side heater connecting bolt 19, and the lower end of the side heater electrode 20 passes through the bottom of the furnace body and is connected to a power source.

在坩埚18的下方设有下加热器9，实施时，在下加热器9中设有下轴穿孔。为了提高下轴13与坩埚托盘14连接的稳定性，在下轴13的上端头还可以设置过渡连接座，下轴13通过过渡连接座连接坩埚托盘14，这样可以增加下轴13与坩埚托盘14的连接接触面积。 A lower heater 9 is provided below the crucible 18. In practice, a lower shaft through hole is provided in the lower heater 9. In order to improve the stability of the connection between the lower shaft 13 and the crucible tray 14, a transition connection seat can be provided at the upper end of the lower shaft 13, and the lower shaft 13 is connected to the crucible tray 14 through the transition connection seat, so that the connection contact area between the lower shaft 13 and the crucible tray 14 can be increased.

本发明并不限制所述下轴穿孔的大小，本领域技术人员可以根据实际情况进行设计选择。具体来说，例如，设置在下加热器9中的下轴穿孔的直径可以略大于过渡连接座的直径，从而使得过渡连接座位于下轴穿孔内(具体如图1和图2所示)，这样可以使下加热器9更加靠近坩埚18，并且由于下轴穿孔的直径较大，过渡连接座可穿过下轴穿孔上下移动。或者，设置在下加热器9上的下轴穿孔的直径还可以设置为略大于下轴13的直径，这样下加热器9的上面可以位于过渡连接座的下方，换句话说，此时下轴13贯穿下轴穿孔，而过渡连接座始终位于下加热器9上方。The present invention does not limit the size of the lower shaft perforation, and those skilled in the art can make a design and selection according to actual conditions. Specifically, for example, the diameter of the lower shaft perforation provided in the lower heater 9 can be slightly larger than the diameter of the transition seat, so that the transition seat is located in the lower shaft perforation (as shown in Figures 1 and 2), so that the lower heater 9 can be closer to the crucible 18, and because the diameter of the lower shaft perforation is larger, the transition seat can move up and down through the lower shaft perforation. Alternatively, the diameter of the lower shaft perforation provided on the lower heater 9 can also be set to be slightly larger than the diameter of the lower shaft 13, so that the upper side of the lower heater 9 can be located below the transition seat. In other words, at this time, the lower shaft 13 passes through the lower shaft perforation, and the transition seat is always located above the lower heater 9.

进一步，所述下加热器9可以通过下加热器连接螺栓21连接下加热器升降电极10，下加热器9由下加热器升降电极10驱动实现上下升降，实施时，通过下加热器9的升降，可以实现在坩埚18升降时下加热器9也随之一起升降，这样可以实现下加热器9始终对坩埚18进行加热，进而保证坩埚18内熔液的温度不因坩埚18升降而发生变化。Furthermore, the lower heater 9 can be connected to the lower heater lifting electrode 10 via the lower heater connecting bolt 21, and the lower heater 9 is driven by the lower heater lifting electrode 10 to achieve up and down movement. During implementation, by lifting and lowering the lower heater 9, the lower heater 9 can be lifted and lowered together with the crucible 18. In this way, the lower heater 9 can always heat the crucible 18, thereby ensuring that the temperature of the melt in the crucible 18 does not change due to the lifting and lowering of the crucible 18.

需要补充的是，即便实现了下加热器与坩埚一并升降，当下加热器上升时，随着下加热器下面与炉底之间的距离不断增大，下加热器的加热热量会向下散失，此时，为了保证坩埚内熔液的温度不变，需要通过提高侧加热器或下加热器的加热功率，进而造成能耗的增加等。It should be added that even if the lower heater and the crucible are raised and lowered together, when the lower heater rises, as the distance between the bottom of the lower heater and the furnace bottom continues to increase, the heating heat of the lower heater will be dissipated downward. At this time, in order to ensure that the temperature of the melt in the crucible remains unchanged, it is necessary to increase the heating power of the side heater or the lower heater, which will increase energy consumption.

为了解决上述问题，在下加热器9的下方设有上下升降的保温板，通过保温板隔离下加热器9的热量散失。可以使用多种方式实现保温板的升降，例如，保温板的升降方式可以设置为在所述下加热器升降电极10的外缘面上套接有保温板支撑管11，保温板支撑管11随下加热器升降电极10一起升降，在下加热器9下方的保温板支撑管11上设有保温板，所述保温板支撑管11下端头的内缘面与下加热器升降电极10外缘面之间设有绝缘隔套12，实施时，绝缘隔套12的材质为陶瓷，这样通过绝缘隔套12将保温板支撑管11与下加热器升降电极10隔离开；通过保温板支撑管11带动保温板实现上下升降。或者，保温板的升降方式还可以设置为保温板的下面连接升降杆，升降杆的下端穿过炉底连接设置在炉体下方升降装置22中的升降板，在升降杆与炉底之间设置密封机构。In order to solve the above problem, an insulation plate that can be lifted up and down is provided below the lower heater 9, and the heat loss of the lower heater 9 is isolated by the insulation plate. The lifting and lowering of the insulation plate can be realized in a variety of ways. For example, the lifting and lowering method of the insulation plate can be set to be a insulation plate support tube 11 sleeved on the outer edge surface of the lower heater lifting electrode 10, and the insulation plate support tube 11 is lifted and lowered together with the lower heater lifting electrode 10. An insulation plate is provided on the insulation plate support tube 11 below the lower heater 9, and an insulating spacer 12 is provided between the inner edge surface of the lower end of the insulation plate support tube 11 and the outer edge surface of the lower heater lifting electrode 10. During implementation, the insulating spacer 12 is made of ceramic, so that the insulation plate support tube 11 is separated from the lower heater lifting electrode 10 by the insulating spacer 12; the insulation plate is driven by the insulation plate support tube 11 to achieve lifting and lowering. Alternatively, the lifting and lowering method of the insulation plate can also be set to be a lifting rod connected to the bottom of the insulation plate, and the lower end of the lifting rod passes through the furnace bottom to connect the lifting plate in the lifting device 22 set below the furnace body, and a sealing mechanism is provided between the lifting rod and the furnace bottom.

进一步，所述下加热器升降电极10及下轴13的下端头分别连接设置在炉体下方升降装置22中的升降板形成下加热器升降电极10及下轴13随动的结构形式，或者下加热器升降电极10及下轴13的下端头分别连接设置在炉体下方升降装置22中的两套升降板，两套升降板可以实现随动，也可以实现差动等。换句话说，通过采用不同的升降装置，可以分别实现加热器升降电极10和下轴13的升降，二者可以同步升降，也可以不同步升降。Furthermore, the lower ends of the lower heater lifting electrode 10 and the lower shaft 13 are respectively connected to the lifting plates in the lifting device 22 below the furnace body to form a structure in which the lower heater lifting electrode 10 and the lower shaft 13 follow the movement, or the lower ends of the lower heater lifting electrode 10 and the lower shaft 13 are respectively connected to two sets of lifting plates in the lifting device 22 below the furnace body, and the two sets of lifting plates can achieve follow-up or differential movement. In other words, by adopting different lifting devices, the lifting and lowering of the heater lifting electrode 10 and the lower shaft 13 can be realized respectively, and the two can be lifted and lowered synchronously. It can also be raised and lowered asynchronously.

具体实施时，保温板的直径可以设置为略大于下加热器9的直径，也可以设置为下加热器9的外径靠近但不接触炉体的内壁或炉体内壁上的保温筒3，同样也可以设置为保温板9的直径小于下加热器9的直径，也就是说在下加热器9的下方设置上下升降的保温板是本发明保护的重点，而在实施过程中，优选下加热器9的外径靠近但不接触炉体的内壁或炉体内壁上的保温筒3，当所述保温板的外径与炉体的内壁或炉体内壁上的保温筒3接近将炉体分割为上下两个腔体，实施时，由于坩埚18及下加热器9的高度上升，保温板也随之上升，此时，保温板与炉底的距离也越来越大，工作时保温板与炉底之间的空腔为无功腔体，即该腔体的温度变化不会对晶体的拉制造成任何影响，保温板上方的腔体为有功腔体，该腔体的温场变化才会对坩埚内熔液的温度产生影响，因此，通过保温板的设置可以将腔体分割开，此时由于有功腔体的体积缩小，便可以实现在不增加功率的同时，就可以保证所需的温度梯度。In specific implementation, the diameter of the insulation board can be set to be slightly larger than the diameter of the lower heater 9, or it can be set so that the outer diameter of the lower heater 9 is close to but not in contact with the inner wall of the furnace body or the insulation tube 3 on the inner wall of the furnace body. Similarly, it can also be set so that the diameter of the insulation board 9 is smaller than the diameter of the lower heater 9. That is to say, setting an insulation board that rises and falls below the lower heater 9 is the focus of protection of the present invention. In the implementation process, it is preferred that the outer diameter of the lower heater 9 is close to but not in contact with the inner wall of the furnace body or the insulation tube 3 on the inner wall of the furnace body. When the outer diameter of the insulation board is close to the inner wall of the furnace body or the insulation tube 3 on the inner wall of the furnace body, the furnace body is divided into When the upper and lower cavities are implemented, as the height of the crucible 18 and the lower heater 9 rises, the insulation plate also rises accordingly. At this time, the distance between the insulation plate and the furnace bottom becomes larger and larger. During operation, the cavity between the insulation plate and the furnace bottom is a reactive cavity, that is, the temperature change of the cavity will not have any effect on the drawing of the crystal. The cavity above the insulation plate is an active cavity, and the temperature field change of the cavity will affect the temperature of the melt in the crucible. Therefore, the cavity can be divided by the setting of the insulation plate. At this time, since the volume of the active cavity is reduced, the required temperature gradient can be guaranteed without increasing the power.

需要补充的是，由于炉体被保温板分割为两个腔体，因此，保温板可以隔离两个腔体内的热量，减少下加热器9和侧加热器5等的热量散失，从而有利于控制温度。It should be added that, since the furnace body is divided into two cavities by the insulation plate, the insulation plate can isolate the heat in the two cavities, reduce the heat loss of the lower heater 9 and the side heater 5, etc., and thus help control the temperature.

换句话说，本发明并不限制保温板的直径，在保证保温板位于炉体内且保温板不与炉体接触的情况下(即保温板的直径小于炉体的内壁的直径，当本发明还包括保温筒3时，所述保温板的直径小于保温筒3的直径)，本领域技术人员可以根据实际情况进行设计选择。当保温板的直径较大时，其有利于腔体的温度控制，当保温板的直径较小时，升降装置的负载小，较为节能。In other words, the present invention does not limit the diameter of the insulation board. Under the condition that the insulation board is located in the furnace body and does not contact the furnace body (i.e., the diameter of the insulation board is smaller than the diameter of the inner wall of the furnace body, and when the present invention also includes the insulation tube 3, the diameter of the insulation board is smaller than the diameter of the insulation tube 3), those skilled in the art can make design choices according to actual conditions. When the diameter of the insulation board is larger, it is beneficial to the temperature control of the cavity. When the diameter of the insulation board is smaller, the load of the lifting device is small, which is more energy-saving.

进一步，为了进一步提高保温效果，如图1至图3所示，在所述坩埚托盘14的下面设有至少一层向下延伸的上保温筒15，或者在所述保温板的上面设有至少一层向上延伸的下保温筒16，下加热器9处于下保温筒16内；或者在所述坩埚托盘14的下面设有至少一层向下延伸的上保温筒15，在所述保温板的上面设有至少一层向上延伸的下保温筒16，下加热器9处于下保温筒16内，当同时设置上保温筒15及下保温筒16时，上保温筒15处于下保温筒16的外侧或者上保温筒15处于下保温筒16的内侧均可，具体应用时，下保温筒16的下端连接保温板，下保温筒16的上端头靠近坩埚18或坩埚托盘14但不能接触坩埚18或坩埚托盘14，也就是说，下保温筒16与坩埚18或坩埚托盘14之间在竖直方向上设置有间隙。由于在工作过程中，坩埚18是需要旋转的，不接触坩埚18或坩埚托盘14是为了不影响坩埚18或坩埚托盘14的旋转，同理，上保温筒15的上端连接坩埚18或坩埚托盘14，上保温筒15的下端头不能接触保温板，也就是说，上保温筒15与保温板之间在竖直方向上设置有间隙，这样就可以保证坩埚18或坩埚托盘14在旋转时，上保温筒15不会与保温板发生摩擦等，实施时，若不设置坩埚托盘14，上保温筒15可以直接连接坩埚18，同样可以实现上述技术效果。Further, in order to further improve the heat preservation effect, as shown in Figures 1 to 3, at least one layer of upper heat preservation tube 15 extending downward is provided under the crucible tray 14, or at least one layer of lower heat preservation tube 16 extending upward is provided on the heat preservation plate, and the lower heater 9 is located in the lower heat preservation tube 16; or at least one layer of upper heat preservation tube 15 extending downward is provided under the crucible tray 14, and at least one layer of lower heat preservation tube 16 extending upward is provided on the heat preservation plate, and the lower heater 9 is located in the lower heat preservation tube 16. In the lower insulation tube 16, when the upper insulation tube 15 and the lower insulation tube 16 are arranged at the same time, the upper insulation tube 15 can be located on the outside of the lower insulation tube 16 or the upper insulation tube 15 can be located on the inside of the lower insulation tube 16. In specific applications, the lower end of the lower insulation tube 16 is connected to the insulation plate, and the upper end of the lower insulation tube 16 is close to the crucible 18 or the crucible tray 14 but cannot contact the crucible 18 or the crucible tray 14. In other words, a gap is provided between the lower insulation tube 16 and the crucible 18 or the crucible tray 14 in the vertical direction. Since the crucible 18 needs to rotate during operation, not contacting the crucible 18 or the crucible tray 14 is to avoid affecting the rotation of the crucible 18 or the crucible tray 14. Similarly, the upper end of the upper insulation tube 15 is connected to the crucible 18 or the crucible tray 14, and the lower end of the upper insulation tube 15 cannot contact the insulation plate. In other words, a gap is provided between the upper insulation tube 15 and the insulation plate in the vertical direction. It can be ensured that when the crucible 18 or the crucible tray 14 rotates, the upper insulation tube 15 will not rub against the insulation plate. During implementation, if the crucible tray 14 is not provided, the upper insulation tube 15 can be directly connected to the crucible 18, and the above technical effects can also be achieved.

进一步，如图1至图3所示，所述保温板包括保温盘体6、盖板7和保温材料8，在所述保温盘体6的上面设有下轴穿孔，在所述下轴穿孔的***设有下加热器升降电极穿孔，在保温盘体6的开口端设有盖板7，在保温盘体6内的腔体内设有保温材料8，实施时，所述保温材料8可以选用石墨毡、石墨、石英棉、氧化锆、碳碳复合材料或氧化铝棉等材料。Further, as shown in Figures 1 to 3, the insulation plate includes an insulation disk body 6, a cover plate 7 and an insulation material 8. A lower shaft through hole is provided on the upper surface of the insulation disk body 6, and a lower heater lifting electrode through hole is provided on the periphery of the lower shaft through hole. A cover plate 7 is provided at the open end of the insulation disk body 6, and an insulation material 8 is provided in the cavity inside the insulation disk body 6. During implementation, the insulation material 8 can be selected from materials such as graphite felt, graphite, quartz wool, zirconium oxide, carbon-carbon composite material or alumina wool.

进一步，本发明并不限制保温板的具体结构，例如，保温板还可以为至少一层石墨板、石墨毡或碳碳复合板，当石墨板、石墨毡或碳碳复合板设置为多层时，多层石墨板、石墨毡或碳碳复合板叠加设置；或者。保温板也可以为石墨板与石墨毡的复合板，或者设置为石墨板与碳碳复合板的复合板，或者石墨毡与碳碳复合板的复合板，或者石墨板与石墨毡及碳碳复合板的复合板，在保温板的上面设有下轴穿孔，在所述下轴穿孔的***设有下加热器升降电极穿孔。换句话说，所述保温板可以包括石墨板、石墨毡和碳碳复合板中的一种或几种，并且本发明并不限制保温板中石墨板、石墨毡或碳碳复合板的层数，多层石墨板、石墨毡或碳碳复合板可以彼此层叠。Furthermore, the present invention does not limit the specific structure of the insulation board. For example, the insulation board can also be at least one layer of graphite board, graphite felt or carbon-carbon composite board. When the graphite board, graphite felt or carbon-carbon composite board is set as multiple layers, the multiple layers of graphite board, graphite felt or carbon-carbon composite board are stacked; or. The insulation board can also be a composite board of graphite board and graphite felt, or a composite board of graphite board and carbon-carbon composite board, or a composite board of graphite felt and carbon-carbon composite board, or a composite board of graphite board, graphite felt and carbon-carbon composite board, and a lower shaft perforation is provided on the upper surface of the insulation board, and a lower heater lifting electrode perforation is provided on the periphery of the lower shaft perforation. In other words, the insulation board can include one or more of graphite board, graphite felt and carbon-carbon composite board, and the present invention does not limit the number of layers of graphite board, graphite felt or carbon-carbon composite board in the insulation board, and multiple layers of graphite board, graphite felt or carbon-carbon composite board can be stacked on each other.

对于升降装置22，其可以使用现有的升降装置结构，只要是能实现坩埚18升降和旋转的升降装置均可，在此不对现有技术的升降装置结构作赘述，根据选用升降装置22的结构不同，下加热器9及保温板可以随坩埚18同步移动，或者，下加热器9及保温板也可以与坩埚18实现差动，进而调整坩埚18与下加热器9之间的距离等。For the lifting device 22, the existing lifting device structure can be used, as long as it can realize the lifting and rotating of the crucible 18. The lifting device structure of the prior art is not described in detail here. Depending on the structure of the lifting device 22, the lower heater 9 and the insulation plate can move synchronously with the crucible 18, or the lower heater 9 and the insulation plate can also achieve differential movement with the crucible 18, thereby adjusting the distance between the crucible 18 and the lower heater 9, etc.

升降装置的第一实施例First embodiment of the lifting device

为了更好的实现多个部件的升降，本发明还提供一种升降装置22，如图4所示，所述升降支撑22包括导轨、升降支撑座、升降板、螺旋升降机和升降滑块，在所述升降支撑座的立板上设有至少一根导轨，在每根导轨上分别设有升降滑块，在升降支撑座的底板上设有螺旋升降机，螺旋升降机中的升降器连接升降板形成升降单元，所述升降单元连接升降滑块，升降板连接下轴13及下加热器升降电极10的下端头。In order to better realize the lifting and lowering of multiple components, the present invention also provides a lifting device 22, as shown in Figure 4, the lifting support 22 includes a guide rail, a lifting support seat, a lifting plate, a spiral elevator and a lifting slider. At least one guide rail is provided on the vertical plate of the lifting support seat, and a lifting slider is provided on each guide rail. A spiral elevator is provided on the bottom plate of the lifting support seat. The elevator in the spiral elevator is connected to the lifting plate to form a lifting unit. The lifting unit is connected to the lifting slider, and the lifting plate is connected to the lower shaft 13 and the lower end of the lower heater lifting electrode 10.

升降支撑22的工作过程为螺旋升降机中的升降器为升降螺母，其中升降螺母通过螺栓连接升降板，在升降板上设置磁流体，在磁流体上设置下轴升降波纹管，所述下轴升降波纹管的上端面连接炉底，下轴13的下端头穿过磁流***于升降板的下方，在磁流体的上面设置支撑板，在支撑板上设置两个电极升降波纹管，两电极升降波纹管的上端面连接炉底，两下加热器升降电极10分别位于电极升降波纹管内，下加热器升降电极10的下端头固定在支撑板上，下加热器升降电极10的下端头穿过支撑板连接位于支撑板下面的电极接头在支撑板上对应下轴升降波纹管的位置设置穿孔，此时下轴升降波纹管在穿孔内并可以在穿孔内上下移动，螺旋升降机中固定箱体的第一动力输入轴连接快速升降电机，由快速升降电机驱动丝杠进行快速旋转，固定箱体的第二动力输入轴连接慢速升降减速机的动力输出轴，所述慢速升降减速机的动力输入轴连接慢速升降电机，由慢速升降电机驱动丝杠进行慢速旋转，实施时，可以在慢速升降减速机的动力输出轴与固定箱体的第二动力输入轴之间设置电磁离合器，当快速升降电机直接驱动固定箱体时，通过电磁离合器断开慢速升降减速机的动力输出轴与固定箱体的第二动力输入轴的连接，当慢速升降电机工作时，电磁离合器吸合，快速升降电机断电，快速升降电机的主轴处于空转状态，无论是快速升降还是慢速升降，由于连接下加热器的下加热器升降电极与连接坩埚的下轴同时设置在升降板，当升降板升降时，坩埚18与下加热器9同时升降，使下加热器9与坩埚18的距离始终保持不变，实现在不提高侧加热器或下加热器加热功率就能实现坩埚内熔液温度不变的目的。The working process of the lifting support 22 is that the lifter in the spiral lifter is a lifting nut, wherein the lifting nut is connected to the lifting plate by bolts, a magnetic fluid is arranged on the lifting plate, a lower shaft lifting bellows is arranged on the magnetic fluid, the upper end surface of the lower shaft lifting bellows is connected to the furnace bottom, the lower end of the lower shaft 13 passes through the magnetic fluid and is located below the lifting plate, a support plate is arranged on the magnetic fluid, two electrode lifting bellows are arranged on the support plate, the upper end surfaces of the two electrode lifting bellows are connected to the furnace bottom, the two lower heater lifting electrodes 10 are respectively located in the electrode lifting bellows, and the lower The lower end of the heater lifting electrode 10 is fixed on the support plate, and the lower end of the lower heater lifting electrode 10 passes through the support plate to connect to the electrode connector located below the support plate. A through hole is set on the support plate at a position corresponding to the lower shaft lifting bellows. At this time, the lower shaft lifting bellows is in the through hole and can move up and down in the through hole. The first power input shaft of the fixed box in the spiral elevator is connected to the fast lifting motor, and the fast lifting motor drives the screw to rotate rapidly. The second power input shaft of the fixed box is connected to the power output shaft of the slow lifting reducer. The power input shaft of the slow lifting reducer is connected to the slow lifting motor, and the slow lifting motor drives the screw to rotate slowly. During implementation, the power output shaft of the slow lifting reducer and the first power input shaft of the fixed box can be connected. An electromagnetic clutch is arranged between the two power input shafts. When the fast lifting motor directly drives the fixed box, the electromagnetic clutch is used to disconnect the power output shaft of the slow lifting reducer from the second power input shaft of the fixed box. When the slow lifting motor is working, the electromagnetic clutch is engaged, the fast lifting motor is powered off, and the main shaft of the fast lifting motor is in an idling state. Regardless of fast lifting or slow lifting, since the lower heater lifting electrode connected to the lower heater and the lower shaft connected to the crucible are both arranged on the lifting plate, when the lifting plate is lifted or lowered, the crucible 18 and the lower heater 9 are lifted or lowered at the same time, so that the distance between the lower heater 9 and the crucible 18 remains unchanged, thereby achieving the purpose of keeping the temperature of the melt in the crucible constant without increasing the heating power of the side heater or the lower heater.

具体来说，图4至图7示出了升降装置22的第一实施例，如图4至图7所示，在升降装置22的第一实施例中，本发明提供的用于人工晶体炉中下加热器9与下轴13的升降装置22包括下加热器升降电极10、导向件(例如，导轨2213或导向光柱等，在图中以导轨2213为例进行说明)、升降支撑座2214、升降板2215、升降机构(如螺旋升降机2216等)、下轴13和升降滑块22115，在所述升降支撑座2214的立板上设有至少一根用于导向的导向件，在每根导向件上分别设有升降滑块22115，实施时，当导向件设置为多根时，多根导向件彼此平行设置。Specifically, Figures 4 to 7 show a first embodiment of the lifting device 22. As shown in Figures 4 to 7, in the first embodiment of the lifting device 22, the lifting device 22 provided by the present invention for the lower heater 9 and the lower shaft 13 in the artificial crystal furnace includes a lower heater lifting electrode 10, a guide member (for example, a guide rail 2213 or a guide light column, etc., and the guide rail 2213 is taken as an example in the figure), a lifting support seat 2214, a lifting plate 2215, a lifting mechanism (such as a spiral lift 2216, etc.), a lower shaft 13 and a lifting slider 22115. At least one guide member for guiding is provided on the vertical plate of the lifting support seat 2214, and a lifting slider 22115 is provided on each guide member. During implementation, when a plurality of guide members are provided, the plurality of guide members are arranged parallel to each other.

需要说明的是，这里将下加热器升降电极10和下轴13限定为升降装置22中的组件，但下加热器升降电极10和下轴13也可以被限定为提高人工晶体炉中坩埚中部熔液温度的装置的组件，或者说将其限定为不属于升降装置22中的组件，这种限定仅为了方便描述，其没有改变设备的结构。It should be noted that the lower heater lifting electrode 10 and the lower shaft 13 are defined here as components in the lifting device 22, but the lower heater lifting electrode 10 and the lower shaft 13 can also be defined as components of a device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace, or in other words, they can be defined as components that do not belong to the lifting device 22. This definition is only for the convenience of description and does not change the structure of the equipment.

进一步，如图4所示，在升降支撑座2214的底板上设有升降机构。在本实施例中，以升降机构为螺旋升降机2216为例进行说明，实施时，升降机构还可以使用电动推杆，比如意大利Servomech公司生产的梯形齿丝杠电动推杆或滚珠丝杠电动推杆。实施时，优选螺旋升降机2216，所述螺旋升降机2216的上端头连接上端板22114，所述上端板22114固设在升降支撑座2214的上端面；螺旋升降机2216中的升降器连接升降板2215形成升降单元，实施时，所述螺旋升降机2216为丝杠升降型螺旋升降机或螺母升降型螺旋升降机，所述升降器为升降螺母或升降箱体，具体升降器的设置形式取决于螺旋升降机2216的结构形式，螺旋升降机2216为本领域中的标准件，可以在市场上直接采购获得，比如力姆泰克(北京)传动设备有限公司生产的螺旋升降机2216，具体实施时，螺旋升降机2216优选为螺母升降型螺旋升降机。Further, as shown in FIG4 , a lifting mechanism is provided on the bottom plate of the lifting support seat 2214. In the present embodiment, the lifting mechanism is taken as a spiral elevator 2216 as an example for explanation. During implementation, the lifting mechanism may also use an electric push rod, such as a trapezoidal gear screw electric push rod or a ball screw electric push rod produced by Servomech of Italy. During implementation, a spiral elevator 2216 is preferred, wherein the upper end of the spiral elevator 2216 is connected to an upper end plate 22114, and the upper end plate 22114 is fixedly mounted on the upper end surface of the lifting support seat 2214; the lifter in the spiral elevator 2216 is connected to the lifting plate 2215 to form a lifting unit. During implementation, the spiral elevator 2216 is a screw lifting type spiral elevator. A spiral elevator or a nut lifting type spiral elevator, the elevator is a lifting nut or a lifting box, the specific setting form of the elevator depends on the structural form of the spiral elevator 2216, the spiral elevator 2216 is a standard part in this field, and can be purchased directly on the market, such as the spiral elevator 2216 produced by Lim-Tek (Beijing) Transmission Equipment Co., Ltd. In specific implementation, the spiral elevator 2216 is preferably a nut lifting type spiral elevator.

具体来说，所述螺旋升降机2216设置为丝杠升降型螺旋升降机时，螺旋升降机2216中的升降器为升降箱体，升降箱体的动力输入轴连接升降电机，由升降电机驱动升降箱体在丝杠上升降，具体实施时，螺旋升降机2216中丝杠的上下两端头分别固定在升降支撑座2214的上端板22114及底板上且不能旋转，螺旋升降机2216中升降箱体连接升降板2215，当升降箱体连接的电机旋转时，升降箱体内的螺母在丝杠上旋转，进而实现上下升降的目的。Specifically, when the spiral elevator 2216 is set as a screw-lifting type spiral elevator, the elevator in the spiral elevator 2216 is a lifting box, and the power input shaft of the lifting box is connected to the lifting motor, and the lifting motor drives the lifting box to lift and lower on the screw. During implementation, the upper and lower ends of the screw in the spiral elevator 2216 are respectively fixed on the upper end plate 22114 and the bottom plate of the lifting support seat 2214 and cannot rotate. The lifting box in the spiral elevator 2216 is connected to the lifting plate 2215. When the motor connected to the lifting box rotates, the nut in the lifting box rotates on the screw, thereby achieving the purpose of up and down lifting.

当所述螺旋升降机2216设置为螺母升降型螺旋升降机时，螺旋升降机2216中的升降器为升降螺母，螺旋升降机2216中的固定箱体固设在升降支撑座2214的底板上，螺旋升降机2216中丝杠的上端头连接上端板22114，实施时，可以在上端板22114与丝杠的上端头之间设置轴承，套接在丝杠上的升降螺母连接升降板2215，升降螺母带动升降板2215实现升降，螺旋升降机2216中固定箱体的第一动力输入轴连接快速升降电机2217实现升降板2215的快速升降功能，固定箱体的第二动力输入轴连接慢速升降减速机22116的动力输出轴，所述慢速升降减速机22116的动力输入轴连接慢速升降电机22117实现升降板2215的慢速升降功能。实施时，还可以在慢速升降减速机22116的动力输出轴与固定箱体的第二动力输入轴之间设置电磁离合器，通过电磁离合器来实现慢速升降减速机22116的动力输出轴与固定箱体的第二动力输入轴的断开与吸合。When the spiral elevator 2216 is set as a nut lifting type spiral elevator, the lifter in the spiral elevator 2216 is a lifting nut, and the fixed box in the spiral elevator 2216 is fixedly arranged on the bottom plate of the lifting support seat 2214. The upper end of the screw in the spiral elevator 2216 is connected to the upper end plate 22114. During implementation, a bearing can be arranged between the upper end plate 22114 and the upper end of the screw, and the lifting nut sleeved on the screw is connected to the lifting plate 2215, and the lifting nut drives the lifting plate 2215 to achieve lifting and lowering. The first power input shaft of the fixed box in the spiral elevator 2216 is connected to the fast lifting motor 2217 to realize the fast lifting function of the lifting plate 2215, and the second power input shaft of the fixed box is connected to the power output shaft of the slow lifting reducer 22116, and the power input shaft of the slow lifting reducer 22116 is connected to the slow lifting motor 22117 to realize the slow lifting function of the lifting plate 2215. During implementation, an electromagnetic clutch can also be set between the power output shaft of the slow lifting reducer 22116 and the second power input shaft of the fixed box, and the electromagnetic clutch can be used to achieve the disconnection and attraction of the power output shaft of the slow lifting reducer 22116 and the second power input shaft of the fixed box.

进一步，所述升降单元连接升降滑块22115，在升降板2215上设有下轴13，在下轴13***的升降板2215上设有至少两个下加热器升降电极10，所述下轴13及两下加热器升降电极10的上端头穿过炉底分别连接坩埚和下加热器形成所述的用于人工晶体炉中下加热器与下轴的升降装置。Furthermore, the lifting unit is connected to the lifting slider 22115, a lower shaft 13 is provided on the lifting plate 2215, and at least two lower heater lifting electrodes 10 are provided on the lifting plate 2215 outside the lower shaft 13, and the upper ends of the lower shaft 13 and the two lower heater lifting electrodes 10 pass through the furnace bottom and are respectively connected to the crucible and the lower heater to form the lifting device for the lower heater and the lower shaft in the artificial crystal furnace.

进一步，为了使下轴13具有旋转功能，如图4和图6所示，在所述下轴13下端头的外缘面上设有从动带轮，所述从动带轮通过皮带22118连接设置在升降板2215侧板上下轴旋转减速机22119动力输出轴上的主动带轮，下轴旋转减速机22119的动力输入轴连接下轴旋转电机2218，实施时，在下轴13的下端头设有旋转水盒，旋转水盒连接水源，通过旋转水盒为下轴13提供冷却水。Furthermore, in order to enable the lower shaft 13 to have a rotation function, as shown in Figures 4 and 6, a driven pulley is provided on the outer edge surface of the lower end of the lower shaft 13, and the driven pulley is connected to the driving pulley on the power output shaft of the upper and lower shaft rotation reducer 22119 arranged on the side plate of the lifting plate 2215 through a belt 22118. The power input shaft of the lower shaft rotation reducer 22119 is connected to the lower shaft rotation motor 2218. During implementation, a rotating water box is provided at the lower end of the lower shaft 13, and the rotating water box is connected to a water source to provide cooling water for the lower shaft 13 through the rotating water box.

进一步，为了提高制造人工晶体时的密封性，在所述下加热器升降电极10的外围套接有电极升降波纹管2212，所述电极升降波纹管2212的下端头连接升降板2215的上面，电极升降波纹管2212的上端头连接炉底的下面，在所述下轴13的***套接有下轴升降波纹管22112，所述下轴升降波纹管22112的下端头连接升降板2215的上面，下轴升降波纹管22112的上端头连接炉底的下面。Furthermore, in order to improve the sealing performance during the manufacture of the intraocular lens, the outer surface of the lower heater lifting electrode 10 is An electrode lifting bellows 2212 is sleeved around the lower shaft 13, the lower end of which is connected to the top of the lifting plate 2215, and the upper end of which is connected to the bottom of the furnace bottom. A lower shaft lifting bellows 22112 is sleeved around the outer periphery of the lower shaft 13, the lower end of which is connected to the top of the lifting plate 2215, and the upper end of which is connected to the bottom of the furnace bottom.

进一步，还可以在所述升降板2215与下轴升降波纹管22112之间设有磁流体22110(即磁流体组件，简称为磁流体)，所述磁流体22110为人工晶体炉中常用的用于密封的标准件。在磁流体22110的上面设有支撑板22111，在支撑板22111两端头的下面分别设有电极接头2219，两电极接头2219分别连接下加热器升降电极10。实施时，下轴13的下端头穿过磁流体22110并延伸至升降板2215的下方，然后在磁流体22110的上面设置支撑板22111，在支撑板22111上设置穿孔，确保下轴13或下轴升降波纹管22112在穿孔内能顺利移动，即穿孔的直径应大于下轴13或下轴升降波纹管22112的外径，然后在支撑板22111上设置两根下加热器升降电极10，两下加热器升降电极10的下端头分别连接电极接头2219，在两下加热器升降电极10的***分别套接电极升降波纹管2212，两电极升降波纹管2212的下端面分别连接支撑板22111。将两电极升降波纹管2212由设置在升降板2215更换到设置支撑板22111上，这样可以减小升降板2215的尺寸，在实际应用时，两电极升降波纹管2212可以直接设置在升降板2215上，同时还可以采用上述方案设置在支撑板22111上。Furthermore, a magnetic fluid 22110 (i.e., a magnetic fluid assembly, referred to as magnetic fluid for short) may be provided between the lifting plate 2215 and the lower shaft lifting bellows 22112. The magnetic fluid 22110 is a standard component commonly used for sealing in an artificial crystal furnace. A support plate 22111 is provided above the magnetic fluid 22110, and electrode connectors 2219 are provided below the two ends of the support plate 22111. The two electrode connectors 2219 are respectively connected to the lower heater lifting electrode 10. During implementation, the lower end of the lower shaft 13 passes through the magnetic fluid 22110 and extends to the bottom of the lifting plate 2215, then a support plate 22111 is arranged on the top of the magnetic fluid 22110, and a through hole is arranged on the support plate 22111 to ensure that the lower shaft 13 or the lower shaft lifting bellows 22112 can move smoothly in the through hole, that is, the diameter of the through hole should be larger than the outer diameter of the lower shaft 13 or the lower shaft lifting bellows 22112, and then two lower heater lifting electrodes 10 are arranged on the support plate 22111, the lower ends of the two lower heater lifting electrodes 10 are respectively connected to the electrode connector 2219, and the electrode lifting bellows 2212 are respectively sleeved on the periphery of the two lower heater lifting electrodes 10, and the lower end surfaces of the two electrode lifting bellows 2212 are respectively connected to the support plate 22111. The two-electrode lifting bellows 2212 are replaced from being set on the lifting plate 2215 to being set on the support plate 22111, so that the size of the lifting plate 2215 can be reduced. In actual application, the two-electrode lifting bellows 2212 can be directly set on the lifting plate 2215, and can also be set on the support plate 22111 using the above solution.

进一步，可以在所述升降板2215上方及下方的升降支撑座2214上分别设有限位器支架22120，在限位器支架22120分别设有限位器，通过限位器来限制升降行程。Furthermore, a limiter bracket 22120 may be provided on the lifting support seat 2214 above and below the lifting plate 2215, and a limiter may be provided on the limiter bracket 22120, so that the lifting stroke can be limited by the limiter.

本实施例在具体实施时，以螺旋升降机2216设置为螺母升降型螺旋升降机为例，如图4所示，螺旋升降机2216中的升降器为升降螺母，其中升降螺母通过螺栓连接升降板2215，在升降板2215上设置磁流体22110，在磁流体22110上设置下轴升降波纹管22112，所述下轴升降波纹管22112的上端面连接炉底，下轴13的下端头穿过磁流体22110位于升降板2215的下方，在磁流体22110的上面设置支撑板22111，在支撑板22111上设置两个电极升降波纹管2212，两电极升降波纹管2212的上端面连接炉底，两下加热器升降电极10分别位于电极升降波纹管2212内，下加热器升降电极10的下端头固定在支撑板22111上，下加热器升降电极10的下端头穿过支撑板22111连接位于支撑板22111下面的电极接头2219，在支撑板22111上对应下轴升降波纹管22112的位置设置穿孔，此时下轴升降波纹管22112在穿孔内并可以在穿孔内上下移动，螺旋升降机2216中固定箱体的第一动力输入轴连接快速升降电机2217，由快速升降电机2217驱动丝杠进行快速旋转，固定箱体的第二动力输入轴连接慢速升降减速机22116的动力输出轴，所述慢速升降减速机22116的动力输入轴连接慢速升降电机22117，由慢速升降电机22117驱动丝杠进行慢速旋转，实施时，可以在慢速升降减速机22116的动力输出轴与固定箱体的第二动力输入轴之间设置电磁离合器，当快速升降电机2217直接驱动固定箱体时，通过电磁离合器断开慢速升降减速机22116的动力输出轴与固定箱体的第二动力输入轴的连接，当慢速升降电机22117工作时，电磁离合器吸合，快速升降电机2217断电，快速升降电机2217的主轴处于空转状态，无论是快速升降还是慢速升降，由于连接下加热器的下加热器升降电极10与连接坩埚的下轴13同时设置在升降板2215，当升降板2215升降时，坩埚与下加热器同时升降，使下加热器与坩埚的距离始终保持不变，实现在不提高侧加热器或下加热器加热功率就能实现坩埚内熔液温度不变的目的。In the specific implementation of this embodiment, the spiral elevator 2216 is set as a nut lifting type spiral elevator as an example, as shown in Figure 4, the elevator in the spiral elevator 2216 is a lifting nut, wherein the lifting nut is connected to the lifting plate 2215 by bolts, a magnetic fluid 22110 is set on the lifting plate 2215, and a lower shaft lifting bellows 22112 is set on the magnetic fluid 22110, and the upper end surface of the lower shaft lifting bellows 22112 is connected to the furnace bottom, and the lower end of the lower shaft 13 passes through the magnetic fluid 22110 and is located below the lifting plate 2215, a support plate 22111 is set on the magnetic fluid 22110, and two electrode lifting bellows 2212 are set on the support plate 22111, and the upper end surface of the two electrode lifting bellows 2212 is connected to the furnace bottom, and the lower end of the lower shaft 13 passes through the magnetic fluid 22110 and is located below the lifting plate 2215. The end faces are connected to the furnace bottom, and the two lower heater lifting electrodes 10 are respectively located in the electrode lifting bellows 2212. The lower end of the lower heater lifting electrode 10 is fixed on the support plate 22111, and the lower end of the lower heater lifting electrode 10 passes through the support plate 22111 to connect to the electrode connector 2219 located below the support plate 22111. A through hole is set on the support plate 22111 at a position corresponding to the lower shaft lifting bellows 22112. At this time, the lower shaft lifting bellows 22112 is in the through hole and can move up and down in the through hole. The first power input shaft of the fixed box in the spiral elevator 2216 is connected to the fast lifting motor 2217, and the fast lifting motor 2217 drives the screw to rotate rapidly. The second power input shaft of the fixed box is connected to the slow The power output shaft of the lifting reducer 22116, the power input shaft of the slow lifting reducer 22116 is connected to the slow lifting motor 22117, and the slow lifting motor 22117 drives the lead screw to rotate slowly. During implementation, an electromagnetic clutch can be set between the power output shaft of the slow lifting reducer 22116 and the second power input shaft of the fixed box. When the fast lifting motor 2217 directly drives the fixed box, the electromagnetic clutch is used to disconnect the power output shaft of the slow lifting reducer 22116 from the second power input shaft of the fixed box. When the fast lifting motor 22117 is working, the electromagnetic clutch is energized, the fast lifting motor 2217 is powered off, and the spindle of the fast lifting motor 2217 is in an idling state. Regardless of fast lifting or slow lifting, since the lower heater lifting electrode 10 connected to the lower heater and the lower shaft 13 connected to the crucible are both arranged on the lifting plate 2215, when the lifting plate 2215 is lifted or lowered, the crucible and the lower heater are lifted or lowered at the same time, so that the distance between the lower heater and the crucible remains unchanged, thereby achieving the purpose of keeping the temperature of the melt in the crucible constant without increasing the heating power of the side heater or the lower heater.

本发明具体实施时，当下轴13带动坩埚18上升时，下加热器9随坩埚18同时上升，且保证坩埚18与下加热器9之间的距离不发生改变，在下加热器9上升时，下加热器升降电极10带动保温板支撑管11同步上升，此时，保温板支撑管11驱动保温板上升，保温板实现了防止下加热器9的热量向下散失，进一步，通过设置上保温筒15和或/下保温筒16，将下加热器9封闭在一个体积相对较小的腔体内，在避免下加热器9的热量向下散失的同时，还避免了下加热器9的热量向周边的散失等。When the present invention is implemented, when the lower shaft 13 drives the crucible 18 to rise, the lower heater 9 rises simultaneously with the crucible 18, and ensures that the distance between the crucible 18 and the lower heater 9 does not change. When the lower heater 9 rises, the lower heater lifting electrode 10 drives the insulation board support tube 11 to rise synchronously. At this time, the insulation board support tube 11 drives the insulation board to rise, and the insulation board prevents the heat of the lower heater 9 from being lost downward. Furthermore, by arranging the upper insulation tube 15 and/or the lower insulation tube 16, the lower heater 9 is enclosed in a relatively small cavity, which prevents the heat of the lower heater 9 from being lost downward and the heat of the lower heater 9 from being lost to the surrounding area.

升降装置的第二实施例Second embodiment of the lifting device

具体来说，图8至图11示出了升降装置22的第二实施例，如图8至图11所示，在升降装置22的第二实施例中，一种用于人工晶体炉的下加热器与下轴的升降装置包括下加热器升降电极10、电极升降板2224、下轴升降板2226、导向件(例如，导轨22216或导向光柱等，在图中以导轨22216为例进行说明)、升降机构(如螺旋升降机22217等)、升降支撑座22218、下轴22222和升降箱体22224，在升降支撑座22218的立板上设有至少一根用于导向的导向件，在每根导向件上分别设有电极升降滑块22215和下轴升降滑块22211，实施时，当导向件设置为多根时，多根导向件为平行设置。Specifically, Figures 8 to 11 show a second embodiment of the lifting device 22. As shown in Figures 8 to 11, in the second embodiment of the lifting device 22, a lifting device for the lower heater and the lower shaft of an artificial crystal furnace includes a lower heater lifting electrode 10, an electrode lifting plate 2224, a lower shaft lifting plate 2226, a guide member (for example, a guide rail 22216 or a guide light column, etc., in the figure, the guide rail 22216 is used as an example for explanation), a lifting mechanism (such as a spiral elevator 22217, etc.), a lifting support seat 22218, a lower shaft 22222 and a lifting box 22224. At least one guide member for guiding is provided on the vertical plate of the lifting support seat 22218, and an electrode lifting slider 22215 and a lower shaft lifting slider 22211 are respectively provided on each guide member. During implementation, when a plurality of guide members are provided, the plurality of guide members are arranged in parallel.

如图8至图10所示，在所述升降支撑座22218的底板上设有升降机构。在本实施例中，以升降机构为螺旋升降机22217为例进行说明，实施时，升降机构还可以使用电动推杆，比如意大利Servomech公司生产的梯形齿丝杠电动推杆或滚珠丝杠电动推杆。实施时，优选螺旋升降机22217，在所述螺旋升降机22217中升降器上方或下方的丝杠上设有升降箱体22224，即在丝杠上同时设置两套升降单元，升降器及升降箱体22224在丝杠上同步升降，当需要升降器与升降箱体22224实现差动升降时，通过升降箱体22224连接的升降电机22214驱动升降箱体22224上的箱体升降螺母2223旋转，实现升降箱体22224的二次升降，进而实现实时调整下加热器与坩埚之间的距离，通过调整下加热器与坩埚之间的距离，实现在不提高侧加热器或下加热器加热功率就能实现坩埚内熔液温度不变，且能实时调整热场内温度梯度的目的。As shown in FIGS. 8 to 10 , a lifting mechanism is provided on the bottom plate of the lifting support seat 22218. In the present embodiment, the lifting mechanism is taken as a spiral lift 22217 as an example for explanation. During implementation, the lifting mechanism may also use an electric push rod, such as a trapezoidal gear screw electric push rod or a ball screw electric push rod produced by Servomech of Italy. During implementation, a spiral lift 22217 is preferred. In the spiral lift 22217, a lifting box 22224 is provided on the screw above or below the lifter, that is, two sets of lifting units are provided on the screw at the same time, and the lifter and the lifting box 22224 are lifted and lowered synchronously on the screw. When the lifter and the lifting box 22224 need to achieve differential lifting, the lifting box 22224 is lifted and lowered synchronously by The lifting motor 22214 connected to the lifting box 22224 drives the box lifting nut 2223 on the lifting box 22224 to rotate, thereby realizing the secondary lifting of the lifting box 22224, and then realizing real-time adjustment of the distance between the lower heater and the crucible. By adjusting the distance between the lower heater and the crucible, the temperature of the melt in the crucible can be kept constant without increasing the heating power of the side heater or the lower heater, and the temperature gradient in the hot field can be adjusted in real time.

与第一实施例类似，实施时，所述升降器为升降螺母22213或升降箱体(例如，其可以采用与升降箱体22224相同的升降箱体，但并不以此为限，下面以升降箱体为升降箱体22224为例进行说明)，具体升降器的设置形式取决于螺旋升降机22217的结构形式，所述螺旋升降机22217为丝杠升降型螺旋升降机或螺母升降型螺旋升降机，螺旋升降机22217为本领域中的标准件，可以在市场上直接采购获得，比如力姆泰克(北京)传动设备有限公司生产的螺旋升降机22217，具体实施时，螺旋升降机22217优选为螺母升降型螺旋升降机。Similar to the first embodiment, during implementation, the lifter is a lifting nut 22213 or a lifting box (for example, it can adopt the same lifting box as the lifting box 22224, but it is not limited to this. The following description takes the lifting box as the lifting box 22224 as an example). The specific setting form of the lifter depends on the structural form of the spiral lift 22217. The spiral lift 22217 is a screw-lifting type spiral lift or a nut-lifting type spiral lift. The spiral lift 22217 is a standard part in this field and can be directly purchased on the market, such as the spiral lift 22217 produced by Lim-Tek (Beijing) Transmission Equipment Co., Ltd. During specific implementation, the spiral lift 22217 is preferably a nut-lifting type spiral lift.

具体来说，当所述螺旋升降机22217设置为丝杠升降型螺旋升降机时，螺旋升降机22217中的升降器为升降箱体22224，升降箱体22224的动力输入轴连接升降电机22214。Specifically, when the spiral elevator 22217 is configured as a screw-lift type spiral elevator, the elevator in the spiral elevator 22217 is a lifting box 22224 , and the power input shaft of the lifting box 22224 is connected to the lifting motor 22214 .

当所述螺旋升降机22217设置为螺母升降型螺旋升降机时，螺旋升降机22217中的升降器为升降螺母22213，螺旋升降机22217中固定箱体22226的第一动力输入轴连接快速升降电机22220，固定箱体22226的第二动力输入轴连接慢速升降减速机2229的动力输出轴，所述慢速升降减速机2229的动力输入轴连接慢速升降电机22210。When the spiral elevator 22217 is set as a nut lifting type spiral elevator, the lifter in the spiral elevator 22217 is a lifting nut 22213, the first power input shaft of the fixed box 22226 in the spiral elevator 22217 is connected to the fast lifting motor 22220, the second power input shaft of the fixed box 22226 is connected to the power output shaft of the slow lifting reducer 2229, and the power input shaft of the slow lifting reducer 2229 is connected to the slow lifting motor 22210.

进一步，所述螺旋升降机22217中丝杠的上端头连接顶板22219，所述顶板22219固设在升降支撑座22218的上端面；实施时，丝杠的上端头与顶板22219之间设有轴承。Furthermore, the upper end of the lead screw in the spiral elevator 22217 is connected to the top plate 22219, and the top plate 22219 is fixed on the upper end surface of the lifting support seat 22218; during implementation, a bearing is provided between the upper end of the lead screw and the top plate 22219.

进一步，所述电极升降板2224连接升降箱体22224和升降器中的一个形成电极升降机构(即电极升降单元)，所述下轴升降板2226连接升降箱体22224和升降器中的另一个形成下轴升降机构(即下轴升降单元)，实施时，电极升降板2224位于下轴升降板2226的上方，或者电极升降板2224位于下轴升降板2226的下方，应用时优选电极升降板2224位于下轴升降板2226的上方。Furthermore, the electrode lifting plate 2224 is connected to the lifting box 22224 and one of the lifters to form an electrode lifting mechanism (i.e., an electrode lifting unit), and the lower shaft lifting plate 2226 is connected to the lifting box 22224 and the other of the lifters to form a lower shaft lifting mechanism (i.e., a lower shaft lifting unit). During implementation, the electrode lifting plate 2224 is located above the lower shaft lifting plate 2226, or the electrode lifting plate 2224 is located below the lower shaft lifting plate 2226. When applied, the electrode lifting plate 2224 is preferably located above the lower shaft lifting plate 2226.

进一步，所述电极升降机构与下轴升降机构分别连接电极升降滑块22215和下轴升降滑块22211，在电极升降板2224上设有至少两个下加热器升降电极10，在下轴升降板2226上设有下轴22222，下加热器升降电极10和下轴22222的上端头分别穿过炉底连接下加热器和坩埚形成所述的用于人工晶体炉的下加热器与下轴的升降装置。 Furthermore, the electrode lifting mechanism and the lower shaft lifting mechanism are respectively connected to the electrode lifting slider 22215 and the lower shaft lifting slider 22211, at least two lower heater lifting electrodes 10 are provided on the electrode lifting plate 2224, and a lower shaft 22222 is provided on the lower shaft lifting plate 2226, and the upper ends of the lower heater lifting electrode 10 and the lower shaft 22222 respectively pass through the furnace bottom to connect the lower heater and the crucible to form the lifting device of the lower heater and the lower shaft for the artificial crystal furnace.

具体实施时，为了保证晶体炉的密闭性，在所述下加热器升降电极10的***套接有电极升降波纹管2222，所述电极升降波纹管2222的下端头连接电极升降板2224的上面，电极升降波纹管2222的上端头连接炉底的下面。During specific implementation, in order to ensure the airtightness of the crystal furnace, an electrode lifting bellows 2222 is sleeved on the periphery of the lower heater lifting electrode 10, the lower end of the electrode lifting bellows 2222 is connected to the top of the electrode lifting plate 2224, and the upper end of the electrode lifting bellows 2222 is connected to the bottom of the furnace.

进一步，所述下轴22222的***套接有下轴升降波纹管22221，所述下轴升降波纹管22221的下端头连接下轴升降板2226的上面，下轴升降波纹管22221的上端头连接炉底的下面。Furthermore, the outer periphery of the lower shaft 22222 is sleeved with a lower shaft lifting bellows 22221, the lower end of the lower shaft lifting bellows 22221 is connected to the upper side of the lower shaft lifting plate 2226, and the upper end of the lower shaft lifting bellows 22221 is connected to the lower side of the furnace bottom.

进一步，在所述下轴升降板2226与下轴升降波纹管22221之间设有磁流体2225(即磁流体组件，简称为磁流体)，所述磁流体2225可以为人工晶体炉中常用的用于密封的标准件。Furthermore, a magnetic fluid 2225 (i.e., a magnetic fluid assembly, referred to as magnetic fluid for short) is provided between the lower shaft lifting plate 2226 and the lower shaft lifting bellows 22221 . The magnetic fluid 2225 may be a standard component commonly used for sealing in an artificial crystal furnace.

进一步，所述下轴22222下端头穿过下轴升降板2226的下面并向下延伸，下轴22222下端头的外缘面上设有从动带轮，所述从动带轮通过皮带22223连接设置在下轴升降板2226侧板上下轴旋转减速机2228动力输出轴上的主动带轮，下轴旋转减速机2228的动力输入轴连接下轴旋转电机2227，在下轴22222的下端头设有旋转水盒，旋转水盒连接水源，通过旋转水盒为下轴22222提供冷却水。Furthermore, the lower end of the lower shaft 22222 passes through the bottom of the lower shaft lifting plate 2226 and extends downward. A driven pulley is provided on the outer edge surface of the lower end of the lower shaft 22222. The driven pulley is connected to the driving pulley on the power output shaft of the upper and lower shaft rotation reducer 2228 arranged on the side plate of the lower shaft lifting plate 2226 through a belt 22223. The power input shaft of the lower shaft rotation reducer 2228 is connected to the lower shaft rotation motor 2227. A rotating water box is provided at the lower end of the lower shaft 22222. The rotating water box is connected to a water source, and cooling water is provided to the lower shaft 22222 through the rotating water box.

进一步，如图8、图11所示，所述电极升降板2224的上面设有下轴升降波纹管穿孔，在下轴升降波纹管穿孔***的电极升降板2224下面设有两个电极接头22212，两电极接头22212分别连接下加热器升降电极10。Further, as shown in Figures 8 and 11, a lower shaft lifting bellows perforation is provided on the top of the electrode lifting plate 2224, and two electrode connectors 22212 are provided under the electrode lifting plate 2224 outside the lower shaft lifting bellows perforation, and the two electrode connectors 22212 are respectively connected to the lower heater lifting electrode 10.

进一步，所述电极升降板2224上方及下轴升降板2226下方的升降支撑座22218上分别设有限位器支架22225，在限位器支架22225设有限位器，通过限位器来限制升降行程。Furthermore, a limiter bracket 22225 is provided on the lifting support seat 22218 above the electrode lifting plate 2224 and below the lower shaft lifting plate 2226, respectively. A limiter is provided on the limiter bracket 22225 to limit the lifting stroke.

本实施例在具体实施时，当螺旋升降机22217设置为螺母升降型螺旋升降机时，如图8所示，螺旋升降机22217中的升降器为升降螺母22213，且在升降螺母22213上方的丝杠上设置升降箱体22224，由升降螺母22213及升降箱体22224形成两套升降单元，其中升降螺母22213通过螺栓连接下轴升降板2226，升降箱体22224通过螺栓连接电极升降板2224，此时电极升降板2224位于下轴升降板2226的上方，然后在电极升降板2224上设置穿孔，然后在电极升降板2224及下轴升降板2226上分别设置下加热器升降电极10及下轴22222，此时下轴22222穿过设置在电极升降板2224上的穿孔内并可以在穿孔内上下移动，螺旋升降机22217中固定箱体22226的第一动力输入轴连接快速升降电机22220，由快速升降电机22220驱动丝杠进行快速旋转，固定箱体22226的第二动力输入轴连接慢速升降减速机2229的动力输出轴，所述慢速升降减速机2229的动力输入轴连接慢速升降电机22210，由慢速升降电机22210驱动丝杠进行慢速旋转，实施时，可以在慢速升降减速机2229的动力输出轴与固定箱体22226的第二动力输入轴之间设置电磁离合器，当快速升降电机22220直接驱动固定箱体22226时，通过电磁离合器断开慢速升降减速机2229的动力输出轴与固定箱体22226的第二动力输入轴的连接，当慢速升降电机22210工作时，电磁离合器吸合，快速升降电机22220断电，快速升降电机22220的主轴处于空转状态，升降箱体22224的动力输入轴连接升降电机22214，当下加热器升降电极10与下轴22222需要同步升降时，快速升降电机22220或慢速升降电机22210直接驱动丝杠旋转，升降箱体22224连接的升降电机22214断电，此时，升降螺母22213及升降箱体22224实现同步升降，当需要下加热器升降电极10与下轴22222实现差动升降时，在快速升降电机22220或慢速升降电机22210驱动丝杠旋转时，启动升降电机22214，由升降电机22214驱动升降箱体22224上的箱体升降螺母2223旋转，进而实现下加热器升降电极10与下轴22222的差动升降，当需要单独升降下加热器升降电极10时，快速升降电机22220和慢速升降电机22210均断电，只需要通过升降电机22214驱动升降箱体22224上的箱体升降螺母2223旋转既可实现下加热器升降电极10的单独升降。In the specific implementation of this embodiment, when the spiral elevator 22217 is set as a nut lifting type spiral elevator, as shown in Figure 8, the elevator in the spiral elevator 22217 is a lifting nut 22213, and a lifting box 22224 is set on the screw above the lifting nut 22213, and the lifting nut 22213 and the lifting box 22224 form two sets of lifting units, wherein the lifting nut 22213 is connected to the lower shaft lifting plate 2226 by bolts, and the lifting box 22224 is connected to the electrode lifting plate 2224 by bolts. At this time, the electrode lifting plate 2224 is located above the lower shaft lifting plate 2226, and then a perforation is set on the electrode lifting plate 2224, and then in the electrode lifting The lower heater lifting electrode 10 and the lower shaft 22222 are respectively arranged on the descending plate 2224 and the lower shaft lifting plate 2226. At this time, the lower shaft 22222 passes through the through hole arranged on the electrode lifting plate 2224 and can move up and down in the through hole. The first power input shaft of the fixed box 22226 in the spiral elevator 22217 is connected to the fast lifting motor 22220, and the fast lifting motor 22220 drives the lead screw to rotate rapidly. The second power input shaft of the fixed box 22226 is connected to the power output shaft of the slow lifting reducer 2229. The power input shaft of the slow lifting reducer 2229 is connected to the slow lifting motor 22210, and the slow lifting motor 22210 drives the lead screw to rotate rapidly. The lever rotates slowly. During implementation, an electromagnetic clutch can be set between the power output shaft of the slow lifting reducer 2229 and the second power input shaft of the fixed box 22226. When the fast lifting motor 22220 directly drives the fixed box 22226, the connection between the power output shaft of the slow lifting reducer 2229 and the second power input shaft of the fixed box 22226 is disconnected by the electromagnetic clutch. When the slow lifting motor 22210 is working, the electromagnetic clutch is engaged, the fast lifting motor 22220 is powered off, the main shaft of the fast lifting motor 22220 is in an idling state, and the power input shaft of the lifting box 22224 is connected to the lifting motor 22214. When the lower heater lifting electrode 10 and the lower shaft 22222 need to be lifted synchronously, the fast lifting motor 22220 or the slow lifting motor 22210 directly drives the screw to rotate, and the lifting box 222 24 connected to the lifting motor 22214 is powered off. At this time, the lifting nut 22213 and the lifting box 22224 are lifted synchronously. When the lower heater lifting electrode 10 and the lower shaft 22222 need to be lifted differentially, when the fast lifting motor 22220 or the slow lifting motor 22210 drives the lead screw to rotate, the lifting motor 22214 is started, and the lifting motor 22214 drives the box lifting nut 2223 on the lifting box 22224 to rotate, thereby realizing the differential lifting of the lower heater lifting electrode 10 and the lower shaft 22222. When the lower heater lifting electrode 10 needs to be lifted separately, both the fast lifting motor 22220 and the slow lifting motor 22210 are powered off. Only the lifting motor 22214 needs to drive the box lifting nut 2223 on the lifting box 22224 to rotate to realize the separate lifting of the lower heater lifting electrode 10.

实施时，升降螺母22213与升降箱体22224在螺旋升降机22217中丝杠上的位置可以互换，即将升降箱体22224设置在升降螺母22213的下方，此时，升降箱体22224通过螺栓连接下轴升降板2226，升降螺母22213通过螺栓连接电极升降板2224，同样可以实现上述功能。During implementation, the positions of the lifting nut 22213 and the lifting box 22224 on the screw in the spiral lift 22217 can be interchanged, that is, the lifting box 22224 is set below the lifting nut 22213. At this time, the lifting box 22224 is connected to the lower shaft lifting plate 2226 by bolts, and the lifting nut 22213 is connected to the electrode lifting plate 2224 by bolts, which can also achieve the above functions.

当所述螺旋升降机22217设置为丝杠升降型螺旋升降机时，螺旋升降机22217中的升降器为升降箱体22224，使用时，将丝杠的上下两端分别固定在升降支撑座22218上顶板22219及底板上且不能旋转，也就是说丝杠固定不动，升降箱体22224在丝杠上进行上下升降，在升降箱体22224上方或下方的丝杠上再设置一个升降箱体22224，即在丝杠上间隔设置两个升降箱体22224，由两个升降箱体22224分别形成两套升降单元，两升降箱体22224中上方的升降箱体22224通过螺栓连接电极升降板2224，两升降箱体22224中下方的升降箱体22224通过螺栓连接下轴升降板2226，此时电极升降板2224位于下轴升降板2226的上方，然后在电极升降板2224上设置穿孔，在电极升降板2224及下轴升降板2226上分别设置下加热器升降电极10及下轴22222，此时下轴22222穿过设置在电极升降板2224上的穿孔内并可以在穿孔内上下移动，两升降箱体22224的动力输入轴分别连接一个升降电机22214，当下加热器升降电极10与下轴22222需要同步升降时，两升降电机22214同时驱动各自连接的升降箱体22224，在两升降电机22214转速相同的情况下，两升降箱体22224上的箱体升降螺母2223旋转速度也相同，此时，下加热器升降电极10与下轴22222实现同步升降，当需要下加热器升降电极10与下轴22222实现差动升降时，通过调整两升降电机22214的转速，使其转速不同即可实现下加热器升降电极10与下轴22222的差动升降，当需要单独升降下加热器升降电极10时，只需要启动驱动下加热器升降电极10升降的升降电机22214既可实现下加热器升降电极10的单独升降。When the spiral elevator 22217 is configured as a screw-lifting type spiral elevator, the elevator in the spiral elevator 22217 is a lifting box 22224. When in use, the upper and lower ends of the screw are respectively fixed to the top plate 22219 and the bottom plate of the lifting support seat 22218 and cannot rotate, that is, the screw is fixed, and the lifting box 22224 is lifted up and down on the screw. Another lifting box 22224 is arranged on the screw above or below the lifting box 22224, that is, two lifting boxes 22224 are arranged at intervals on the screw, and two sets of lifting units are formed by the two lifting boxes 22224 respectively. The upper lifting box 22224 of the two lifting boxes 22224 is connected to the electrode lifting plate 2224 by bolts, and the lower lifting box 22224 of the two lifting boxes 22224 is connected to the electrode lifting plate 2224 by bolts. 24 is connected to the lower shaft lifting plate 2226 by bolts. At this time, the electrode lifting plate 2224 is located above the lower shaft lifting plate 2226, and then a through hole is set on the electrode lifting plate 2224. The lower heater lifting electrode 10 and the lower shaft 22222 are respectively set on the electrode lifting plate 2224 and the lower shaft lifting plate 2226. At this time, the lower shaft 22222 passes through the through hole set on the electrode lifting plate 2224 and can move up and down in the through hole. The power input shafts of the two lifting boxes 22224 are respectively connected to a lifting motor 22214. When the lower heater lifting electrode 10 and the lower shaft 22222 need to be lifted synchronously, the two lifting motors 22214 simultaneously drive the lifting boxes 22224 connected to them. When the rotation speeds of the two lifting motors 22214 are the same, the box lifts on the two lifting boxes 22224 The rotation speed of the lowering nut 2223 is also the same. At this time, the lower heater lifting electrode 10 and the lower shaft 22222 are lifted synchronously. When the lower heater lifting electrode 10 and the lower shaft 22222 need to be lifted differentially, the rotation speeds of the two lifting motors 22214 are adjusted to make their rotation speeds different to achieve differential lifting of the lower heater lifting electrode 10 and the lower shaft 22222. When the lower heater lifting electrode 10 needs to be lifted alone, it is only necessary to start the lifting motor 22214 that drives the lower heater lifting electrode 10 to lift and lower the lower heater lifting electrode 10 to achieve independent lifting.

实施时，还可以将电极升降板2224与下轴升降板2226的位置互换，即将下轴升降板2226设置在电极升降板2224的上方，同样可以实现实时调整下加热器与坩埚之间距离的目的。During implementation, the positions of the electrode lifting plate 2224 and the lower shaft lifting plate 2226 can also be interchanged, that is, the lower shaft lifting plate 2226 is set above the electrode lifting plate 2224, which can also achieve the purpose of real-time adjustment of the distance between the lower heater and the crucible.

以上内容中未细述部份为现有技术，故未做细述。The parts not described in detail in the above content are prior art, so they are not described in detail.

为了公开本发明的目的而在本文中选用的实施例，当前认为是适宜的，但是，应了解的是，本发明旨在包括一切属于本构思和发明范围内的实施例的所有变化和改进。 The embodiments selected herein for the purpose of disclosing the present invention are those presently considered suitable, but it should be understood that the present invention is intended to include all changes and modifications of the embodiments that fall within the scope of the present concept and invention.

Claims

一种提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，包括侧加热器(5)、保温板、下加热器(9)、下加热器升降电极(10)、下轴(13)、坩埚(18)和侧加热器电极(20)，所述坩埚(18)设置在炉体内，坩埚(18)的下面连接下轴(13)，在坩埚(18)的***设有侧加热器(5)，所述侧加热器(5)连接侧加热器电极(20)，在坩埚(18)的下方设有下加热器(9)，所述下加热器(9)连接下加热器升降电极(10)，在下加热器(9)的下方设有上下升降的保温板。A device for increasing the temperature of the melt in the middle of a crucible in an artificial crystal furnace, characterized in that it comprises a side heater (5), a heat preservation plate, a lower heater (9), a lower heater lifting electrode (10), a lower shaft (13), a crucible (18) and a side heater electrode (20), wherein the crucible (18) is arranged in a furnace body, the lower side of the crucible (18) is connected to the lower shaft (13), a side heater (5) is arranged on the periphery of the crucible (18), the side heater (5) is connected to the side heater electrode (20), a lower heater (9) is arranged below the crucible (18), the lower heater (9) is connected to the lower heater lifting electrode (10), and a heat preservation plate that can be lifted up and down is arranged below the lower heater (9).
根据权利要求1所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，通过保温板隔离下加热器(9)的热量散失形成所述的提高人工晶体炉中坩埚中部熔液温度的装置。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 1 is characterized in that the heat loss of the lower heater (9) is isolated by a heat preservation plate to form the device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace.
根据权利要求1或2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述保温板的外径与炉体的内壁或炉体内壁上的保温筒(3)接近将炉体分割为上下两个腔体。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 1 or 2 is characterized in that the outer diameter of the insulation plate is close to the inner wall of the furnace body or the insulation tube (3) on the inner wall of the furnace body to divide the furnace body into two upper and lower cavities.
根据权利要求1或2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述保温板的直径小于所述炉体的内壁的直径；或者，所述保温板的直径小于所述炉体内壁上的保温筒(3)的直径。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 1 or 2 is characterized in that the diameter of the insulation plate is smaller than the diameter of the inner wall of the furnace body; or the diameter of the insulation plate is smaller than the diameter of the insulation tube (3) on the inner wall of the furnace body.
根据权利要求2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述坩埚(18)的下面连接坩埚托盘(14)，坩埚托盘(14)的下端面连接下轴(13)。The device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 2 is characterized in that the bottom of the crucible (18) is connected to the crucible tray (14), and the lower end surface of the crucible tray (14) is connected to the lower shaft (13).
根据权利要求5所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述坩埚托盘(14)的下面设有至少一层向下延伸的上保温筒(15)。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 5 is characterized in that at least one layer of an upper heat-insulating cylinder (15) extending downward is provided below the crucible tray (14).
根据权利要求2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述坩埚(18)的下面设有至少一层向下延伸的上保温筒(15)。The device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 2 is characterized in that at least one layer of upper insulation cylinder (15) extending downward is provided below the crucible (18).
根据权利要求1、2、6或7中任一项所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述保温板的上面设有至少一层向上延伸的下保温筒(16)，下加热器(9)处于下保温筒(16)内。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to any one of claims 1, 2, 6 or 7 is characterized in that at least one layer of upwardly extending lower insulation tube (16) is provided on the insulation plate, and the lower heater (9) is located in the lower insulation tube (16).
根据权利要求1或2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下加热器升降电极(10)的外缘面上套接有保温板支撑管(11)，在下加热器(9)下方的保温板支撑管(11)上设有保温板；The device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 1 or 2 is characterized in that a heat preservation plate support tube (11) is sleeved on the outer edge surface of the lower heater lifting electrode (10), and a heat preservation plate is provided on the heat preservation plate support tube (11) below the lower heater (9);

或者，所述保温板的下面连接升降杆。Alternatively, a lifting rod is connected to the bottom of the insulation board.
根据权利要求9所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述保温板支撑管(11)下端头的内缘面与下加热器升降电极(10)外缘面之间设有绝缘隔套(12)。The device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 9 is characterized in that The invention is characterized in that an insulating sleeve (12) is provided between the inner edge surface of the lower end of the insulation board support tube (11) and the outer edge surface of the lower heater lifting electrode (10).
根据权利要求1或2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述保温板包括保温盘体(6)、盖板(7)和保温材料(8)，在所述保温盘体(6)的上面设有下轴穿孔，在所述下轴穿孔的***设有下加热器升降电极穿孔，在保温盘体(6)的开口端设有盖板(7)，在保温盘体(6)内的腔体内设有保温材料(8)。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace as described in claim 1 or 2, it is characterized in that the insulation plate includes an insulation disk body (6), a cover plate (7) and an insulation material (8), a lower shaft through hole is provided on the upper surface of the insulation disk body (6), a lower heater lifting electrode through hole is provided on the periphery of the lower shaft through hole, a cover plate (7) is provided at the open end of the insulation disk body (6), and an insulation material (8) is provided in the cavity inside the insulation disk body (6).
根据权利要求1或2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述保温板为至少一层石墨板、石墨毡或碳碳复合板，在保温板的上面设有下轴穿孔，在所述下轴穿孔的***设有下加热器升降电极穿孔。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 1 or 2 is characterized in that the insulation plate is at least one layer of graphite plate, graphite felt or carbon-carbon composite plate, a lower shaft through-hole is provided on the upper surface of the insulation plate, and a lower heater lifting electrode through-hole is provided on the periphery of the lower shaft through-hole.
根据权利要求1或2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述炉体的内壁设有侧壁保温层(4)，在侧壁保温层(4)的内缘面设有保温筒(3)，在炉体的炉底上设有底部保温层(1)，在底部保温层(1)的上面设有底部石墨板(2)。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 1 or 2 is characterized in that the inner wall of the furnace body is provided with a side wall insulation layer (4), an insulation tube (3) is provided on the inner edge surface of the side wall insulation layer (4), a bottom insulation layer (1) is provided on the bottom of the furnace body, and a bottom graphite plate (2) is provided on the top of the bottom insulation layer (1).
根据权利要求1或2所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述炉体设置在机架的上面，在所述机架内设有用于下加热器升降电极(10)升降和下轴(13)升降及旋转的升降装置(22)。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 1 or 2 is characterized in that the furnace body is arranged on the top of the frame, and a lifting device (22) is provided in the frame for lifting and lowering the lower heater lifting electrode (10) and lifting and rotating the lower shaft (13).
根据权利要求14所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下加热器升降电极(10)及下轴(13)的下端头分别连接设置在炉体下方升降装置(22)中的升降板。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 14, it is characterized in that the lower ends of the lower heater lifting electrode (10) and the lower shaft (13) are respectively connected to the lifting plates arranged in the lifting device (22) below the furnace body.
根据权利要求14所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述升降装置(22)包括下加热器升降电极(10)、导向件、升降支撑座(2214)、升降板(2215)、升降机构、下轴(13)和升降滑块(22115)，在所述升降支撑座(2214)的立板上设有至少一根导向件，在每根导向件上分别设有升降滑块(22115)，在升降支撑座(2214)的底板上设有升降机构，升降机构中的升降器连接升降板(2215)形成升降单元，所述升降单元连接升降滑块(22115)，在升降板(2215)上设有下轴(13)，在下轴(13)***的升降板(2215)上设有至少两个下加热器升降电极(10)，所述下轴(13)及两下加热器升降电极(10)的上端头穿过炉底分别连接坩埚和下加热器形成所述的用于人工晶体炉中下加热器与下轴的升降装置。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 14, it is characterized in that the lifting device (22) includes a lower heater lifting electrode (10), a guide, a lifting support seat (2214), a lifting plate (2215), a lifting mechanism, a lower shaft (13) and a lifting slider (22115), at least one guide is provided on the vertical plate of the lifting support seat (2214), and a lifting slider (22115) is provided on each guide, and a lifting slider (22115) is provided on the bottom plate of the lifting support seat (2214). A lifting mechanism is provided, wherein a lifter in the lifting mechanism is connected to a lifting plate (2215) to form a lifting unit, the lifting unit is connected to a lifting slider (22115), a lower shaft (13) is provided on the lifting plate (2215), at least two lower heater lifting electrodes (10) are provided on the lifting plate (2215) outside the lower shaft (13), and the upper ends of the lower shaft (13) and the two lower heater lifting electrodes (10) pass through the furnace bottom and are respectively connected to the crucible and the lower heater to form the lifting device for the lower heater and the lower shaft in the artificial crystal furnace.
根据权利要求16所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述导向件为导轨(2213)或导向光柱。 The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 16, is characterized in that the guide member is a guide rail (2213) or a guide light column.
根据权利要求16所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述升降机构为螺旋升降机(2216)或电动推杆。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 16 is characterized in that the lifting mechanism is a spiral lift (2216) or an electric push rod.
根据权利要求18所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述螺旋升降机(2216)为丝杠升降型螺旋升降机或螺母升降型螺旋升降机。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 18, it is characterized in that the spiral elevator (2216) is a screw-lifting type spiral elevator or a nut-lifting type spiral elevator.
根据权利要求19所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述螺旋升降机(2216)设置为丝杠升降型螺旋升降机时，螺旋升降机(2216)中的升降器为升降箱体，升降箱体的动力输入轴连接升降电机。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 19, it is characterized in that when the spiral elevator (2216) is set as a screw-lifting type spiral elevator, the elevator in the spiral elevator (2216) is a lifting box, and the power input shaft of the lifting box is connected to the lifting motor.
根据权利要求19所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述螺旋升降机(2216)设置为螺母升降型螺旋升降机时，螺旋升降机(2216)中的升降器为升降螺母，所述螺旋升降机(2216)的第一动力输入轴连接快速升降电机(2217)，螺旋升降机(2216)的第二动力输入轴连接慢速升降减速机(22116)的动力输出轴，所述慢速升降减速机(22116)的动力输入轴连接慢速升降电机(22117)。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace as described in claim 19, it is characterized in that when the spiral elevator (2216) is set as a nut lifting type spiral elevator, the elevator in the spiral elevator (2216) is a lifting nut, and the first power input shaft of the spiral elevator (2216) is connected to the fast lifting motor (2217), and the second power input shaft of the spiral elevator (2216) is connected to the power output shaft of the slow lifting reducer (22116), and the power input shaft of the slow lifting reducer (22116) is connected to the slow lifting motor (22117).
根据权利要求18所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述螺旋升降机(2216)的上端头连接上端板(22114)，所述上端板(22114)固设在升降支撑座(2214)的上端面。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 18, it is characterized in that the upper end of the spiral elevator (2216) is connected to the upper end plate (22114), and the upper end plate (22114) is fixed on the upper end surface of the lifting support seat (2214).
根据权利要求16所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下轴(13)下端头的外缘面上设有从动带轮，所述从动带轮通过皮带(22118)连接设置在升降板(2215)侧板上下轴旋转减速机(22119)动力输出轴上的主动带轮，下轴旋转减速机(22119)的动力输入轴连接下轴旋转电机(2218)。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace as described in claim 16, it is characterized in that a driven pulley is provided on the outer edge surface of the lower end of the lower shaft (13), and the driven pulley is connected to the driving pulley on the power output shaft of the upper and lower shaft rotation reducer (22119) arranged on the side plate of the lifting plate (2215) through a belt (22118), and the power input shaft of the lower shaft rotation reducer (22119) is connected to the lower shaft rotation motor (2218).
根据权利要求16所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下加热器升降电极(10)的***套接有电极升降波纹管(2212)，所述电极升降波纹管(2212)的下端头连接升降板(2215)的上面，电极升降波纹管(2212)的上端头连接炉底的下面。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 16, it is characterized in that the outer periphery of the lower heater lifting electrode (10) is sleeved with an electrode lifting bellows (2212), the lower end of the electrode lifting bellows (2212) is connected to the top of the lifting plate (2215), and the upper end of the electrode lifting bellows (2212) is connected to the bottom of the furnace.
根据权利要求16所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下轴(13)的***套接有下轴升降波纹管(22112)，所述下轴升降波纹管(22112)的下端头连接升降板(2215)的上面，下轴升降波纹管(22112)的上端头连接炉底的下面。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 16, it is characterized in that the outer periphery of the lower shaft (13) is sleeved with a lower shaft lifting bellows (22112), the lower end of the lower shaft lifting bellows (22112) is connected to the top of the lifting plate (2215), and the upper end of the lower shaft lifting bellows (22112) is connected to the bottom of the furnace.
根据权利要求25所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述升降板(2215)与下轴升降波纹管(22112)之间设有磁流体(22110)，在磁流体(22110)的上面设有支撑板(22111)，在支撑板(22111)两端头的下面分别设有电极接头(2219)，两电极接头(2219)分别连接下加热器升降电极(10)。 According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace as described in claim 25, it is characterized in that a magnetic fluid (22110) is provided between the lifting plate (2215) and the lower shaft lifting bellows (22112), a support plate (22111) is provided on the magnetic fluid (22110), and electrode connectors (2219) are respectively provided under the two ends of the support plate (22111), and the two electrode connectors (2219) are respectively connected to the lower heater lifting electrode (10).
根据权利要求14所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述升降装置(22)包括下加热器升降电极(10)、电极升降板(2224)、下轴升降板(2226)、导向件、升降机构、升降支撑座(22218)、下轴(22222)和升降箱体(22224)，在所述升降支撑座(22218)的立板上设有至少一根导向件，在每根导向件上分别设有电极升降滑块(22215)和下轴升降滑块(22211)，在升降支撑座(22218)的底板上设有升降机构，在所述升降机构中升降器上方或下方的丝杠上设有升降箱体(22224)，所述电极升降板(2224)连接升降箱体(22224)或升降器形成电极升降机构，所述下轴升降板(2226)连接升降器或升降箱体(22224)形成下轴升降机构，所述电极升降机构与下轴升降机构分别连接电极升降滑块(22215)和下轴升降滑块(22211)，在电极升降板(2224)上设有至少两个下加热器升降电极(10)，在下轴升降板(2226)上设有下轴(22222)，下加热器升降电极(10)和下轴(22222)的上端头分别穿过炉底连接下加热器和坩埚形成所述的提高人工晶体炉中坩埚中部熔液温度的装置。According to claim 14, the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace is characterized in that the lifting device (22) includes a lower heater lifting electrode (10), an electrode lifting plate (2224), a lower shaft lifting plate (2226), a guide, a lifting mechanism, a lifting support seat (22218), a lower shaft (22222) and a lifting box (22224), at least one guide is provided on the vertical plate of the lifting support seat (22218), and an electrode lifting slider (22215) and a lower shaft lifting slider (22211) are respectively provided on each guide, a lifting mechanism is provided on the bottom plate of the lifting support seat (22218), and a lifting box (222 24), the electrode lifting plate (2224) is connected to the lifting box (22224) or the lifter to form an electrode lifting mechanism, the lower shaft lifting plate (2226) is connected to the lifter or the lifting box (22224) to form a lower shaft lifting mechanism, the electrode lifting mechanism and the lower shaft lifting mechanism are respectively connected to the electrode lifting slider (22215) and the lower shaft lifting slider (22211), at least two lower heater lifting electrodes (10) are arranged on the electrode lifting plate (2224), and the lower shaft lifting plate (2226) is provided with a lower shaft (22222), and the upper ends of the lower heater lifting electrode (10) and the lower shaft (22222) respectively pass through the furnace bottom to connect the lower heater and the crucible to form the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace.
根据权利要求27所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述导向件为导轨(22216)或导向光柱。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 27 is characterized in that the guide member is a guide rail (22216) or a guide light column.
根据权利要求27所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述升降机构为螺旋升降机(22217)或电动推杆。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 27 is characterized in that the lifting mechanism is a spiral lift (22217) or an electric push rod.
根据权利要求29所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述螺旋升降机(22217)为丝杠升降型螺旋升降机或螺母升降型螺旋升降机。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 29, it is characterized in that the spiral elevator (22217) is a screw-lifting type spiral elevator or a nut-lifting type spiral elevator.
根据权利要求30所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述螺旋升降机(22217)设置为丝杠升降型螺旋升降机时，螺旋升降机(22217)中的升降器为升降箱体(22224)，升降箱体(22224)的动力输入轴连接升降电机(22214)。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace as described in claim 30, it is characterized in that when the spiral elevator (22217) is set as a screw-lifting type spiral elevator, the elevator in the spiral elevator (22217) is a lifting box (22224), and the power input shaft of the lifting box (22224) is connected to the lifting motor (22214).
根据权利要求30所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述螺旋升降机(22217)设置为螺母升降型螺旋升降机时，螺旋升降机(22217)中的升降器为升降螺母(22213)，螺旋升降机(22217)中固定箱体(22226)的第一动力输入轴连接快速升降电机(22220)，固定箱体(22226)的第二动力输入轴连接慢速升降减速机(2229)的动力输出轴，所述慢速升降减速机(2229)的动力输入轴连接慢速升降电机(22210)。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace as described in claim 30, it is characterized in that when the spiral elevator (22217) is set as a nut lifting type spiral elevator, the elevator in the spiral elevator (22217) is a lifting nut (22213), and the first power input shaft of the fixed box (22226) in the spiral elevator (22217) is connected to the fast lifting motor (22220), and the second power input shaft of the fixed box (22226) is connected to the power output shaft of the slow lifting reducer (2229), and the power input shaft of the slow lifting reducer (2229) is connected to the slow lifting motor (22210).
根据权利要求27所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下加热器升降电极(10)的***套接有电极升降波纹管(2222)，所述电极升降波纹管(2222)的下端头连接电极升降板(2224)的上面，电极升降波纹管(2222)的上端头连接炉底的下面。The device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 27, wherein The feature is that the outer periphery of the lower heater lifting electrode (10) is sleeved with an electrode lifting bellows (2222), the lower end of the electrode lifting bellows (2222) is connected to the top of the electrode lifting plate (2224), and the upper end of the electrode lifting bellows (2222) is connected to the bottom of the furnace.
根据权利要求27所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下轴(22222)的***套接有下轴升降波纹管(22221)，所述下轴升降波纹管(22221)的下端头连接下轴升降板(2226)的上面，下轴升降波纹管(22221)的上端头连接炉底的下面。According to the device for increasing the temperature of the melt in the middle of the crucible in the artificial crystal furnace according to claim 27, it is characterized in that the outer periphery of the lower shaft (22222) is sleeved with a lower shaft lifting bellows (22221), the lower end of the lower shaft lifting bellows (22221) is connected to the top of the lower shaft lifting plate (2226), and the upper end of the lower shaft lifting bellows (22221) is connected to the bottom of the furnace.
根据权利要求27所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下轴升降板(2226)与下轴升降波纹管(22221)之间设有磁流体(2225)。The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 27 is characterized in that a magnetic fluid (2225) is provided between the lower shaft lifting plate (2226) and the lower shaft lifting bellows (22221).
根据权利要求27所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述下轴(22222)下端头穿过下轴升降板(2226)的下面并向下延伸，下轴(22222)下端头的外缘面上设有从动带轮，所述从动带轮通过皮带(22223)连接设置在下轴升降板(2226)侧板上下轴旋转减速机(2228)动力输出轴上的主动带轮，下轴旋转减速机(2228)的动力输入轴连接下轴旋转电机(2227)。According to the device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace as described in claim 27, it is characterized in that the lower end of the lower shaft (22222) passes through the bottom of the lower shaft lifting plate (2226) and extends downward, and a driven pulley is provided on the outer edge surface of the lower end of the lower shaft (22222), and the driven pulley is connected to the driving pulley on the power output shaft of the upper and lower shaft rotation reducer (2228) arranged on the side plate of the lower shaft lifting plate (2226) through a belt (22223), and the power input shaft of the lower shaft rotation reducer (2228) is connected to the lower shaft rotation motor (2227).
根据权利要求29所述的提高人工晶体炉中坩埚中部熔液温度的装置，其特征在于，所述螺旋升降机(22217)的上端头连接顶板(22219)，所述顶板(22219)固设在升降支撑座(22218)的上端面。 The device for increasing the temperature of the melt in the middle of the crucible in an artificial crystal furnace according to claim 29 is characterized in that the upper end of the spiral elevator (22217) is connected to the top plate (22219), and the top plate (22219) is fixed on the upper end surface of the lifting support seat (22218).