WO2024070630A1 - Conveyance device and storage device - Google Patents

Conveyance device and storage device Download PDF

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Publication number
WO2024070630A1
WO2024070630A1 PCT/JP2023/033029 JP2023033029W WO2024070630A1 WO 2024070630 A1 WO2024070630 A1 WO 2024070630A1 JP 2023033029 W JP2023033029 W JP 2023033029W WO 2024070630 A1 WO2024070630 A1 WO 2024070630A1
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WO
WIPO (PCT)
Prior art keywords
arm
drive unit
rotation
base
transfer mechanism
Prior art date
Application number
PCT/JP2023/033029
Other languages
French (fr)
Japanese (ja)
Inventor
宣之 伊藤
一馬 矢河
Original Assignee
村田機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2024070630A1 publication Critical patent/WO2024070630A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a transport device and a storage device.
  • a storage device that stores items on multiple shelves arranged in the vertical and horizontal directions is known.
  • This storage device is equipped with a transport device for transferring items.
  • This transport device uses, for example, a stacker crane, and is equipped with a traveling cart that travels along the shelves, a mast erected on the traveling cart, and a transfer mechanism that is arranged on the mast and transfers items.
  • the transfer mechanism is disclosed to have a configuration that includes a base that rises and falls along the mast, a first arm rotatably supported on the base, a second arm rotatably supported on the first arm, and an item holder rotatably supported on the second arm (see, for example, Patent Document 1).
  • a first drive unit that rotates the first arm and a second drive unit that rotates the second arm are each provided in a state where they protrude downward from the base.
  • the transfer mechanism becomes larger in the vertical direction, making it difficult to place the lowest shelf at a low position, which is a factor in reducing the storage efficiency of items.
  • the second drive unit on the first arm. In this case, if the second drive unit is provided hanging down from the underside of the first arm, it is not preferable because the second drive unit interferes with the base when the first arm rotates and restricts the rotation range of the first arm. Also, even if the second drive unit is provided protruding from the upper surface of the first arm, it is not preferable because the second drive unit interferes with the second arm.
  • the present invention aims to provide a transport device and storage device that can thin the transfer mechanism in the vertical direction.
  • the transport device comprises a traveling carriage, a mast erected on the traveling carriage, and a transfer mechanism arranged on the mast for transferring an item, the transfer mechanism having a base which rises and falls along the mast, a first arm rotatably supported on the base, a second arm rotatably supported on the first arm, an item holder which holds an item and is supported on the second arm, a first drive unit which rotates the first arm, and a second drive unit which rotates the second arm, the center of rotation of the second arm being arranged on one end side as viewed from the center of rotation of the first arm on the upper surface of the first arm, and the second drive unit being provided on the other end side of the first arm as viewed from the center of rotation of the first arm, at a position outside the rotation orbit of the second arm.
  • a storage device includes a shelf for storing items and a transport device according to the above aspect for transferring items between the shelf.
  • the second drive unit is provided on the other end side of the first arm as viewed from the center of rotation of the first arm, and is positioned outside the rotation orbit of the second arm, so that interference with the second drive unit can be avoided when the second arm rotates.
  • the second drive unit is provided on the first arm, the base does not need to be made larger than when the second drive unit is provided on the base.
  • the upper surface of the second drive unit may be higher than the lower surface of the second arm. According to this configuration, the height positions of the second drive unit and the second arm at least partially overlap, so that the transfer mechanism can be made thinner. Furthermore, in the transport device according to the above aspect, the item holding unit has a mounting surface on which an item is placed, and the upper surface of the second drive unit may be lower than the mounting surface of the item holding unit. According to this configuration, it is possible to prevent the item held on the mounting surface from interfering with the second drive unit. Furthermore, in the transport device according to the above aspect, the second drive unit may be stored inside a cover provided on the first arm, and the upper surface of the cover may be lower than the mounting surface. According to this configuration, it is possible to prevent interference between the cover storing the second drive unit and the item held on the mounting surface.
  • the transport device may further include a second reducer located near the second drive unit, which reduces the rotation transmitted from the second drive unit to the second arm. This configuration makes it possible to prevent the second reducer from interfering with the rotation of the second arm.
  • the transport device may further include a first drive unit below the first arm, and a first reducer located below the first arm, which reduces the rotation transmitted from the first drive unit to the first arm. This configuration makes it possible to prevent the first drive unit and the first reducer from interfering with the first arm when the first arm rotates.
  • the first drive unit and the first reducer may be provided at a position on the base spaced apart from the mast. This configuration makes it possible to reduce the thermal impact on the mast, since the first drive unit and the first reducer, which are heat sources, are spaced apart from the mast.
  • the base may have a rib along the vertical direction between the first drive unit and the mast.
  • the transfer mechanism may be capable of transferring items to both the left and right sides of the traveling direction of the traveling cart. With this configuration, the range over which items can be transferred can be expanded compared to a configuration in which transfer is only possible to one side, either left or right.
  • the item holding unit may be rotated relative to the second arm in synchronization with the rotation of the second arm. With this configuration, the item holding unit can be oriented in an appropriate direction when the second arm is rotated.
  • FIG. 2 is a front view illustrating an example of a transport device and a storage device according to an embodiment.
  • FIG. 2 is a side view illustrating an example of a transport device and a storage device according to an embodiment.
  • FIG. 4 is a front view showing an example of a transfer mechanism.
  • 11 is a plan view showing a state in which an article is placed above a base in the transfer mechanism.
  • FIG. 11 is a plan view showing a state in which an article is handed over in the transfer mechanism.
  • FIG. 5A and 5B are front and plan views showing the relationship between a base and a first arm in a transfer mechanism.
  • 4 is a plan view showing the relationship between a first arm and a second arm in the transfer mechanism.
  • FIG. 13 is a front view showing a state in which an article is held by an article holding section in the transfer mechanism.
  • FIG. 13 is a diagram illustrating a schematic diagram of a transmission path of a driving force to a first arm, a second arm, and an article holding portion.
  • FIG. 10 is an enlarged view of a portion of FIG. 9 .
  • 13 is a plan view showing another example in which an article is placed above a base in the transfer mechanism.
  • FIG. 13 is a plan view showing another example of the transfer mechanism for transferring an article.
  • FIG. 1 is a front view showing an example of a conveying device 1 and a storage device 2 according to an embodiment.
  • FIG. 2 is a side view showing an example of a conveying device 1 and a storage device 2 according to this embodiment.
  • the running direction of the conveying device 1 is the X direction
  • the conveying device 1 and the storage device 2 are viewed from the Y direction perpendicular to the X direction, respectively.
  • the conveying device 1 and the storage device 2 are viewed from the Y direction, respectively.
  • the storage device 2 includes a conveying device 1 that conveys items OB, and a plurality of shelves 3 on which the items OB are placed and stored.
  • the object OB is a storage container such as a FOUP that contains glass substrates, semiconductor wafers, etc.
  • the weight of the object OB may be 25 kg or more depending on the size of the glass substrates contained and the number of substrates contained.
  • the object OB may be another storage container other than a FOUP, such as a reticle case. This embodiment is also applicable even when the object OB is a heavy object weighing tens of kg.
  • the conveying device 1 conveys an item OB and transfers the item OB between any of the multiple shelves 3.
  • the conveying device 1 includes a transfer mechanism 4, a traveling cart 5, and a mast 6.
  • the transfer mechanism 4 will be described in detail later.
  • the traveling cart 5 includes a base frame 7 and drive wheels 8.
  • the base frame 7 includes a traveling drive unit (not shown), such as an electric motor, for driving the drive wheels 8 to rotate.
  • the drive wheels 8 are rotatably provided on the base frame 7 and are driven to rotate by a traveling drive unit (not shown).
  • the drive wheels 8 roll on rails 9 installed on the floor F. In this embodiment, there is one drive wheel 8, but multiple drive wheels 8 may be provided, or a driven wheel may be provided in addition to the drive wheels 8.
  • the rails 9 are laid on the floor F along the X direction.
  • the traveling cart 5 travels in the X direction by driving the drive wheels 8 to rotate by a traveling drive unit (not shown). That is, the conveying device 1 travels along the rails 9 in the +X direction or the -X direction.
  • the traveling carriage 5 may also be provided with a pair of rollers 8a on the underside of the base frame 7 that grip the sides of the rails 9. By providing a pair of rollers 8a, it is possible to prevent the drive wheels 8 from falling off the rails 9.
  • the mast 6 is erected on the traveling cart 5.
  • the mast 6 is provided so as to extend upward (in the +Z direction) from the upper surface of the base frame 7.
  • the mast 6 is set, for example, at a height that allows the transfer mechanism 4 to transfer the item OB to the top shelf 3.
  • An upper frame 10 is provided at the upper end of the mast 6.
  • the upper frame 10 has a pair of rollers 11 on the upper surface side.
  • the pair of rollers 11 are arranged so as to sandwich the sides of the ceiling rail 12 installed on the ceiling C.
  • the ceiling rail 12 is provided on the ceiling C along the X direction.
  • rollers 11 are rotated and driven in synchronization with the drive wheels 8 by a drive device (not shown), and move the upper frame 10, which is the upper end of the mast 6, in the traveling direction of the traveling cart 5.
  • the drive of the drive wheels 8 and the drive of the rollers 11 are controlled by a control device (not shown).
  • the rollers 11 are not limited to being drive rollers driven by a drive device, and may be driven rollers.
  • the shelves 3 are arranged in a line in the X direction and the vertical direction (Z direction) along the rails 9.
  • the shelves 3 store items OB.
  • Each shelf 3 is formed so that the item OB can be placed on it, and a space capable of accommodating the item OB is formed on the upper surface of each shelf 3.
  • Each shelf 3 has a cutout portion 3a and a pin 3b.
  • the cutout portion 3a is provided with a size that allows the item holding portion 23 of the transfer mechanism 4 described later to pass through in the vertical direction.
  • the pins 3b are provided, for example, in three pieces on the upper surface of the shelf 3, and position the item OB placed on the shelf 3 by entering a groove portion provided on the bottom surface of the item OB.
  • a positioning guide that guides the side of the item OB may be provided.
  • the shelf board 3 may be separated into left and right, and one pin 3b may be provided on each of the left and right shelf boards 3, and the item OB may be positioned by the two pins 3b.
  • a cutout 3a is formed between the left and right shelf boards 3, and the item holder 23 can pass through this cutout 3a in the vertical direction.
  • Each shelf 3 may be equipped with a gas supply device that supplies an inert gas into the placed item OB.
  • FIG. 2 a form in which multiple shelves 3 are provided on both sides of the conveying device 1 in the Y direction is shown, but this is not limited to this form.
  • a form in which multiple shelves 3 are arranged only on the +Y side or only on the -Y side of the conveying device 1 may also be used.
  • the transport device 1 of this embodiment shows a form in which the transfer mechanism 4 is provided on the -X side of one mast 6. In other words, the transfer mechanism 4 is supported by one mast 6.
  • the transport device 1 is not limited to the above form.
  • the transfer mechanism 4 may be provided between two masts 6 spaced apart in the X direction, and the transfer mechanism 4 may be supported by the two masts 6.
  • the overall length of the transport device 1 in the X direction can be shortened.
  • Figure 3 is a front view showing an example of the transfer mechanism 4.
  • Figure 3 shows a front view of the transfer mechanism 4 as seen from a direction (Y direction) perpendicular to the running direction (X direction) of the conveying device 1.
  • the transfer mechanism 4 has a base 20, a first arm 21, a second arm 22, an item holding unit 23, a first drive unit 31, and a second drive unit 32.
  • the base 20 is formed in an L shape having a horizontal portion 20a and a vertical portion 20b extending upward from one end of the horizontal portion 20a.
  • a guided portion 20c having a concave cross section and extending in the vertical direction is provided on the +X surface of the vertical portion 20b.
  • the guided portion 20c is provided on the -X surface of the mast 6 and fits into a linear guide 26 having a convex cross section and extending in the vertical direction.
  • the vertical portion 20b is guided in the vertical direction along the linear guide 26.
  • the transport device 1 is equipped with a lifting device (not shown) that raises and lowers the base 20. By driving this lifting device, the base 20 (transfer mechanism 4) is raised and lowered along the mast 6.
  • the lifting device has, for example, a drive unit such as an electric motor, a sprocket that is rotated by the drive unit, and a chain that is attached to the outer circumference of the sprocket.
  • the chain is stretched from the upper end to the lower end of the mast 6, and moves (or rotates) as the sprocket rotates.
  • the base 20 is connected to the chain, and rises or falls along the linear guide 26 as the chain moves.
  • the lifting device is not limited to the above configuration, and an endless belt may be used instead of the chain.
  • the lifting device is not limited to raising and lowering the base 20 by a chain or belt, and may use, for example, a rack gear installed along the mast 6 and a pinion gear installed on the base 20, and the pinion gear may be rotated to raise and lower the base 20.
  • the lifting and lowering operation and height position of the base 20 are controlled by a control device (not shown).
  • the first arm 21 is rotatably supported on the upper surface 20d side of the base 20.
  • the first arm 21 is a rod-shaped body extending in a straight line.
  • a first rotating shaft 27 extending downward is provided in the middle part (e.g., the center part) of the longitudinal direction of the first arm 21.
  • the first arm 21 is connected to the base 20 via the first rotating shaft 27.
  • the first arm 21 is rotatable around the first rotating shaft 27 relative to the base 20.
  • the vertical direction passing through the center of the first rotating shaft 27 is the rotation center P1 of the first arm 21.
  • the first arm 21 has a first end 21a and a second end 21b. In the first arm 21, one end seen from the rotation center P1 is the first end 21a, and the other end seen from the rotation center P1 is the second end 21b.
  • the second arm 22 is rotatably supported on the upper surface 21c side of the first arm 21.
  • the second arm 22 is supported at the first end 21a of the first arm 21.
  • the second arm 22 is a rod-shaped body extending in a straight line.
  • the longitudinal dimension of the second arm 22 is shorter than that of the first arm 21.
  • One longitudinal end of the second arm 22 is the base end 22a, and the other longitudinal end is the tip end 22b.
  • a second rotating shaft 28 extending downward is provided at the base end 22a of the second arm 22.
  • the second arm 22 is connected to the first arm 21 via the second rotating shaft 28.
  • the second arm 22 is rotatable around the second rotating shaft 28 relative to the first arm 21.
  • the vertical direction passing through the center of the second rotating shaft 28 is the rotation center P2 of the second arm 22.
  • the rotation center P2 of the second arm 22 is located on the upper surface 21c of the first arm 21, on the first end 21a side as viewed from the rotation center P1 of the first arm 21
  • the first arm 21 and the second arm 22 are capable of positioning the tip 22b of the second arm 22 anywhere within a predetermined range by adjusting their respective rotation angles. This predetermined range is determined by the lengths of the first arm 21 and the second arm 22 and the rotation angles of both.
  • the first arm 21 and the second arm 22 can control the direction of movement of the tip 22b of the second arm 22 by synchronously driving the respective drive units described below.
  • the item holding part 23 is rotatably supported on the upper surface 22c side of the second arm 22. It is supported on the tip portion 22b of the second arm 22.
  • the item holding part 23 is a plate-shaped body on which the item OB can be placed.
  • the item holding part 23 has a mounting surface 23a on the upper surface side.
  • the item holding part 23 supports the lower surface of the item OB on the mounting surface 23a.
  • the mounting surface 23a of the item holding part 23 is provided with, for example, three pins 23b.
  • the pins 23b can be inserted into grooves provided on the bottom surface of the item OB to position the item OB.
  • the item holding part 23 is provided with a third rotation shaft 29 extending downward.
  • the item holding part 23 is connected to the second arm 22 via the third rotation shaft 29.
  • the item holding part 23 is rotatable around the third rotation shaft 29 relative to the second arm 22.
  • the vertical direction passing through the center of the third rotation shaft 29 is the rotation center P3 of the item holding part 23.
  • the rotation center P3 of the item holding part 23 is located on the top surface 22c of the second arm 22, on the tip end 22b side of the second arm 22.
  • the transfer mechanism 4 includes a first drive unit 31 and a second drive unit 32.
  • a first drive unit 31 For example, an electric motor or the like is used for the first drive unit 31 and the second drive unit 32.
  • the first drive unit 31 rotates the first arm 21.
  • the first drive unit 31 is disposed on the horizontal portion 20a of the base 20 below the first arm 21.
  • the first drive unit 31 is disposed on the tip side of the horizontal portion 20a of the base 20 as viewed from the rotation center P1 of the first arm 21, that is, on the opposite side to the vertical portion 20b.
  • the first drive unit 31 may be configured to include a first reducer 33, which will be described later.
  • the second drive unit 32 drives the second arm 22 to rotate.
  • the second drive unit 32 is provided on the first arm 21.
  • the second drive unit 32 is provided on the second end 21b side of the first arm 21 when viewed from the rotation center P1.
  • the second drive unit 32 is arranged with a part of it protruding upward from the upper surface 21c of the first arm 21.
  • the second arm 22 is provided with a cover 25 for covering the protruding part of the second drive unit 32. Therefore, the cover 25 is provided in a state where it protrudes upward from the upper surface 21c of the first arm 21. It is optional whether or not to provide the cover 25. Therefore, the second arm 22 may be in a form without the cover 25. It is also possible for the second drive unit 32 to be configured to include a second reducer 34 described later.
  • Figure 4 is a plan view showing the state in which the item OB is placed above the base 20 in the transfer mechanism 4.
  • the item holding part 23 can be positioned above the base 20 by setting the first arm 21 and the second arm 22 to a predetermined angular position (standby position or item holding position). At this time, the item holding part 23 is separated from the shelf 3.
  • the transport device 1 can move in the X direction by the traveling cart 5, and the transfer mechanism 4 can be raised and lowered.
  • FIG. 5 is a plan view showing the state in which the transfer mechanism 4 transfers the article OB.
  • the first drive unit 31 and the second drive unit 32 are driven to set the first arm 21 and the second arm 22 to a predetermined angular position (transfer position), so that the article holding unit 23 can be inserted above or below the shelf 3.
  • the shelf 3 is provided with a cutout portion 3a through which the article holding unit 23 can pass in the vertical direction.
  • the article holding unit 23 is placed at a position higher than the shelf 3, and in this state, the article holding unit 23 (transfer mechanism 4) is lowered, so that the article OB is transferred from the article holding unit 23 to the shelf 3.
  • the article holding unit 23 is returned to the position shown in FIG. 4 (standby position), completing the operation of transferring the article OB to the shelf 3.
  • the item holding unit 23 When receiving an item OB from the shelf 3, the item holding unit 23 is positioned at a lower position than the shelf 3 on which the item OB is placed, and the item holding unit 23 (transfer mechanism 4) is raised in this state, whereby the item OB is transferred from the shelf 3 to the item holding unit 23. After the item OB is placed on the item holding unit 23, the item holding unit 23 is returned to the position shown in Figure 4 (item holding position), completing the operation of receiving the item OB by the transfer mechanism 4.
  • Figure 6 shows the relationship between the base 20 and the first arm 21 in the transfer mechanism 4, (A) being a front view and (B) being a plan view. In Figure 6, some components are omitted for ease of explanation.
  • the second drive unit 32 is stored inside the cover 25 of the first arm 21.
  • the cover 25 is disposed on the upper surface 21c of the first arm 21 and protrudes upward from the first arm 21.
  • the second drive unit 32 is disposed so as not to protrude downward from the first arm 21, and the cover 25 or the like is not provided on the underside of the first arm 21. In other words, there is no part that protrudes from the underside of the first arm 21.
  • the second drive unit 32 does not interfere with the base 20.
  • the rotation range of the first arm 21 is not restricted, and the first arm 21 can be rotated to any angle position.
  • FIG. 7 is a plan view showing the relationship between the first arm 21 and the second arm 22 in the transfer mechanism 4.
  • the rotation center P2 of the second arm 22 is disposed on the first end 21a side of the first arm 21 as viewed from the rotation center P1 of the first arm 21.
  • the second drive unit 32 is disposed on the first arm 21 as viewed from the second end 21b side of the first arm 21 as viewed from the rotation center P1 of the first arm 21.
  • the second arm 22 is provided such that the length from the base end 22a to the tip end 22b does not reach the cover 25 (the second drive unit 32 when the cover 25 is not present).
  • the cover 25 is provided with a distance L1 between the tip end 22b of the second arm 22.
  • the second arm 22 does not interfere with the second drive unit 32.
  • the rotation range of the second arm 22 is not restricted, and the second arm 22 can be rotated to any angle position.
  • the distance L1 can be set arbitrarily as long as the tip 22b of the second arm 22 does not reach the cover 25 (or the second drive unit 32 if there is no cover 25).
  • Figure 8 is a front view showing the state in which the item holding section 23 holds an item OB in the transfer mechanism 4.
  • the upper surface 25a of the cover 25 (or the upper surface 32c of the second drive section 32 when the cover 25 is not present) is set at a position higher than the lower surface 22d of the second arm 22.
  • the height positions of the cover 25 (second drive section 32) and the second arm 22 are formed so as to at least partially overlap. This makes it possible to make the transfer mechanism 4 thinner.
  • the upper surface 25a of the cover 25 is disposed at a lower position than the placement surface 23a of the item holding unit 23. Specifically, the upper surface 25a of the cover 25 is disposed at a distance L2 below the placement surface 23a of the item holding unit 23. Therefore, even when the first arm 21 and the second arm 22 are rotated with the item OB placed on the item holding unit 23, the item OB is prevented from interfering with the cover 25. Therefore, the rotation angle of the first arm 21 and the second arm 22 can be set arbitrarily with the item OB placed on the item holding unit 23.
  • the upper surface 32c of the second driving unit 32 is disposed at a lower position than the placement surface 23a by a distance L2 or more. Therefore, as described above, the item OB is prevented from interfering with the second driving unit 32, and the rotation angle of the first arm 21 and the second arm 22 can be set arbitrarily with the item OB placed on the item holding unit 23.
  • Figure 9 is a schematic diagram showing the path of transmission of driving force for the first arm 21, the second arm 22, and the item holding part 23.
  • Figure 10 is an enlarged view of a portion of Figure 9. To facilitate explanation, some components have been omitted from Figures 9 and 10.
  • the first drive unit 31 includes, for example, an electric motor and an encoder that detects the rotation of the electric motor. An electric motor that generates the torque required to rotate the first arm 21 is used.
  • the first drive unit 31 drives the first arm 21 to rotate via the first reduction gear 33, causing the first arm 21 to rotate relative to the base 20.
  • the rotation of the first drive unit 31 is controlled by a control device (not shown). This control device servo-controls the electric motor using the detection results of the encoder. Note that the control device may be the same as the control device that controls the traveling drive unit of the traveling cart 5, or may be a different control device.
  • the output of the first drive unit 31 is transmitted to the first rotating shaft 27.
  • the output shaft 31a of the first drive unit 31 is arranged to protrude downward from the first drive unit 31.
  • a pulley 31b is provided on the output shaft 31a.
  • a pulley 27a is provided on the first rotating shaft 27.
  • the first rotating shaft 27 is rotatably supported on the first arm 21.
  • An endless transmission belt 35 is stretched between the pulleys 31b and 27a, and the rotation of the pulley 31b is transmitted to the pulley 27a via the transmission belt 35.
  • the first reducer 33 is provided on the first rotating shaft 27.
  • the first reducer 33 reduces the speed of the rotation of the pulley 27a and transmits it to the rotation of the first arm 21.
  • the first drive unit 31 and the first reducer 33 are disposed below the first arm 21. This configuration makes it possible to prevent both the first drive unit 31 and the first reducer 33 from interfering with the first arm 21 when the first arm 21 rotates. Furthermore, the first drive unit 31 and the first reducer 33 are provided at a position on the base 20 away from the mast 6. With this configuration, the first drive unit 31 and the first reducer 33, which are heat sources, are separated from the mast 6, so that the thermal effects on the linear guide 26 of the mast 6, the guided portion 20c of the base 20, etc. can be reduced.
  • the speed is reduced by the first reducer 33 to rotate the output shaft 31a.
  • the pulley 31b rotates together with the output shaft 31a, moving the transmission belt 35 (circular movement).
  • This movement of the transmission belt 35 rotates the pulley 27a, which in turn rotates the first rotating shaft 27 integrated with the pulley 27a.
  • the first arm 21 integrated with the first rotating shaft 27 rotates around the axis of the rotation center P1 relative to the base 20.
  • the rotational position of the first arm 21 can be maintained by servo control of the first drive unit 31 (electric motor).
  • the amount of rotation of pulley 27a relative to the amount of rotation of pulley 31b is set by the ratio of the diameters of pulley 31b and pulley 27a. Therefore, by making the diameter of pulley 27a larger than the diameter of pulley 31b, the rotation of pulley 31b can be decelerated and transmitted to the rotation of pulley 27a. Therefore, as shown in FIG. 9, instead of providing the first reducer 33 in the first drive unit 31, it is possible to make the pulley 31b and pulley 27a function as a reducer by appropriately setting the diameters of the pulleys 31b and 27a. Note that sprockets may be used instead of pulley 31b and pulley 27a, and an endless chain may be used instead of the transmission belt 35.
  • the second drive unit 32 includes, for example, an electric motor and an encoder that detects the rotation of the electric motor.
  • An electric motor that generates the torque required to rotate the second arm 22 is used.
  • the electric motor of the first drive unit 31 and the electric motor of the second drive unit 32 may be the same or different.
  • the second drive unit 32 drives and rotates the second arm 22 via the second reducer 34, causing the second arm 22 to rotate relative to the first arm 21.
  • the rotation of the second drive unit 32 is controlled by the control device (not shown) described above. As with the above, the control device servo-controls the electric motor using the detection results of the encoder.
  • the output of the second drive unit 32 is output to the output shaft 32a after being reduced in speed via the second reducer 34.
  • the second reducer 34 reduces the speed of the rotation transmitted from the second drive unit 32 to the output shaft 32a.
  • the second reducer 34 is disposed in the vicinity of the second drive unit 32. With this configuration, it is possible to prevent the second reducer 34 from interfering with the second arm 22, allowing the second arm 22 to rotate without hindrance.
  • the output shaft 32a is provided so as to protrude downward from the second reducer 34.
  • a pulley 32b is provided on the output shaft 32a.
  • a pulley 28a is provided on the second rotating shaft 28.
  • the second rotating shaft 28 is rotatably supported on the first arm 21.
  • An endless transmission belt 36 is stretched between the pulleys 32b and 28a, and the rotation of the pulley 32b is transmitted to the pulley 28a via the transmission belt 35.
  • the second reducer 34 reduces the speed and rotates the output shaft 32a.
  • the pulley 32b rotates together with the output shaft 32a, moving (circulating) the transmission belt 36.
  • This movement of the transmission belt 36 rotates the pulley 28a, which in turn rotates the second rotating shaft 28 integral with the pulley 28a.
  • the second arm 22 integral with the second rotating shaft 28 rotates around the axis of the rotation center P2 relative to the first arm 21.
  • the rotation position of the second arm 22 can be maintained by servo control of the second drive unit 32 (electric motor).
  • the drive timing of the second drive unit 32 may be simultaneous with the drive timing of the first drive unit 31, or may be different.
  • the amount of rotation of pulley 28a relative to the amount of rotation of pulley 32b is set by the ratio of the diameters of pulley 32b and pulley 28a. Therefore, by making the diameter of pulley 28a larger than the diameter of pulley 32b, the rotation of pulley 32b can be reduced and transmitted to the rotation of pulley 28a. Therefore, as shown in FIG. 9, instead of providing a second reducer 34 in the second drive unit 32, it is possible to make the pulley 32b and pulley 28a function as a reducer by appropriately setting the diameters of the pulleys 32b and 28a. Note that sprockets may be used instead of pulley 32b and pulley 28a, and an endless chain may be used instead of the transmission belt 36.
  • the second rotating shaft 28 is formed in a cylindrical shape.
  • a support shaft 37 is provided inside the second rotating shaft 28 in a state where it is inserted through the second rotating shaft 28.
  • the support shaft 37 is fixed to the first arm 21 so as not to rotate around the axis of the rotation center P2. In other words, even if the second rotating shaft 28 rotates relative to the first arm 21, the support shaft 37 is configured not to rotate relative to the first arm 21.
  • a pulley 37a is provided at the upper end of the support shaft 37.
  • the pulley 37a is disposed within the second arm 22.
  • a pulley 29a is provided on a third rotating shaft 29 that is integral with the item holding section 23.
  • the third rotating shaft 29 is rotatably supported by the second arm 22.
  • An endless transmission belt 38 is stretched between the pulleys 37a and 29a, and the rotation of the pulley 37a is transmitted to the pulley 29a via the transmission belt 38.
  • the second drive unit 32 When the second drive unit 32 is driven to rotate the second arm 22, as described above, the second arm 22 and the second rotating shaft 28 rotate around the axis of the rotation center P2 relative to the first arm 21.
  • the support shaft 37 since the support shaft 37 is fixed to the first arm 21, the support shaft 37 and the pulley 37a rotate relative to the second arm 22. That is, when the second arm 22 rotates, the second rotating shaft 28 and the support shaft 37 rotate relatively.
  • the rotation of the pulley 37a moves (circulates) the transmission belt 38, rotating the pulley 29a and the third rotating shaft 29.
  • the item holding unit 23 integrated with the third rotating shaft 29 rotates around the axis of the rotation center P3 relative to the second arm 22. That is, the item holding unit 23 rotates relative to the second arm 22 in synchronization with the rotation of the second arm 22.
  • the rotational position of the article holding unit 23 is maintained by maintaining the rotational position of the second arm 22 relative to the first arm 21.
  • the orientation of the article holding unit 23 is set so that when the first arm 21 and the second arm 22 are rotated to a state where the article OB can be transferred to the shelf 3, the tip of the article holding unit 23 fits within the cutout portion 3a of the shelf 3 in a plan view (see FIG. 5).
  • the orientation of the article holding unit 23 is set by the rotation ratio of the pulley 37a and the pulley 29a.
  • the desired rotation ratio of the pulley 37a and the pulley 29a can be achieved by appropriately setting the diameter of the pulley 37a and the diameter of the pulley 29a. Note that a configuration in which sprockets are used instead of the pulleys 37a and 29a, and an endless chain is used instead of the transmission belt 38 may also be used.
  • the above-mentioned configuration is applied to rotate the item holding part 23 relative to the second arm 22, but this configuration is not limited to this.
  • a drive unit such as an electric motor may be used to rotate the item holding part 23.
  • the drive unit (electric motor, etc.) is arranged on the second end 21b side of the first arm 21, similar to the second drive unit 32, and a configuration may be applied in which the support shaft 37 is rotated around the axis of the rotation center P2 by a transmission belt, thereby rotating the item holding part 23 relative to the second arm 22.
  • FIG. 11 is a plan view showing another example in which the item OB is arranged above the base 20 in the transfer mechanism 4.
  • the first arm 21 and the second arm 22 can be respectively placed at a predetermined angular position (standby position or item holding position) to position the item holding section 23 above the base 20.
  • the first arm 21 is rotated 180 degrees from the position shown in FIG. 4.
  • the item holding section 23 is facing in the -Y direction.
  • the item OB is placed on the placement surface 23a and positioned above the base 20.
  • the transport device 1 can be moved in the X direction by the traveling cart 5, and the transfer mechanism 4 can be raised and lowered.
  • FIG. 12 is a plan view showing another example of transferring an item OB in the transfer mechanism 4.
  • the item holding unit 23 can be moved in the -Y direction and inserted above or below the shelf 3.
  • the operation of transferring an item OB to the shelf 3 is the same as that described above with reference to FIGS. 4 and 5.
  • the transfer mechanism 4 of this embodiment can transfer an item OB to the shelves 3 on the +Y side and -Y side, respectively.
  • Figure 13 is a view of the base 20 as seen from the back side.
  • the first drive unit 31 is provided at the tip side of the horizontal portion 20a (the opposite side to the vertical portion 20b).
  • no drive unit or the like is provided on the opposite side of the horizontal portion 20a to the first drive unit 31 across the first rotation shaft 27.
  • This portion can be used as a space to reduce the weight of the base 20, but if the object OB becomes heavy, the rigidity of the base 20 (especially the horizontal portion 20a) may be insufficient.
  • the horizontal part 20a of the base 20 is provided with a rib 41 along the vertical direction between the first drive unit 31 and the mast 6.
  • a plurality of ribs 41 are provided in the horizontal part 20a in the space between the first rotation shaft 27 and the vertical part 20b.
  • the load of the object OB acts on the first rotation shaft 27. Therefore, the rib 41 is provided so as to extend in the X direction, the Y direction, a direction obtained by combining the X direction and the Y direction, and a curved direction surrounding the first rotation shaft 27, taking into consideration the case where a large load acts on the first rotation shaft 27.
  • the rigidity of the base 20 can be increased while reducing the weight of the base 20.
  • the shape of the rib 41 shown in FIG. 13 is one example, and the shape of the rib 41 is arbitrary as long as it is possible to increase the rigidity of the base 20.
  • the second drive unit 32 is provided on the first arm 21 at a position on the second end 21b side as viewed from the rotation center P1 of the first arm 21 and away from the rotation path R2 of the second arm 22, so that interference with the second drive unit 32 when the second arm 22 rotates can be avoided. Therefore, there is no need to increase the vertical distance between the first arm 21 and the second arm 22, and a transfer mechanism 4 that is thin in the vertical direction can be realized. Also, because the second drive unit 32 is provided on the first arm 21, it is possible to avoid an increase in the size of the base 20.
  • the first drive unit 31 is arranged on the base 20, but the present invention is not limited to this.
  • the first drive unit 31 may be provided on the first arm 21.
  • the first drive unit 31 may be arranged on the second end 21b side of the first arm 21, similar to the second drive unit 32, and may be housed together with the second drive unit 32 within the cover 25.
  • the storage device 2 is described as having one transport device 1, but this is not limited to this.
  • the storage device 2 may have two or more transport devices 1.
  • the storage device 2 is described as having the transport device 1 and the shelf 3 of the storage device 2 installed on the floor F, but this is not limited to this.
  • One or both of the transport device 1 and the shelf 3 may be suspended from the ceiling C.

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Abstract

[Problem] To reduce the thickness of a transfer mechanism in the vertical direction. [Solution] A conveyance device 1 includes: a travel cart 5; a mast 6 erected on the travel cart 5; and a transfer mechanism 4 that is disposed on the mast 6 and transfers an object OB. The transfer mechanism 4 includes: a base 20 that moves vertically along the mast 6; a first arm 21 rotatably supported by the base 20; a second arm 22 rotatably supported by the first arm 21; an object holding part 23 that holds the object OB and is supported by the second arm 22; a first driving part 31 that rotates the first arm 21; and a second driving part 32 that rotates the second arm 22. The rotational center P2 of the second arm 22 is at, relative to the first arm 21, a first end 21a of the first arm 21. The second driving part 32 is provided on a second end 21b of the first arm 21 on an upper surface 21c of the first arm 21, at a position separated from a rotational orbit R2 of the second arm 22.

Description

搬送装置及び保管装置Transport and storage equipment
　本発明は、搬送装置及び保管装置に関する。 The present invention relates to a transport device and a storage device.
　上下方向及び左右方向に複数配置された棚に物品を保管する保管装置が知られている。この保管装置では物品を移載するために搬送装置を備えている。この搬送装置は、例えばスタッカクレーンが用いられ、棚に沿って走行する走行台車と、走行台車に立設されたマストと、マストに配置されて物品を移載する移載機構と、を備えている。移載機構は、マストに沿って昇降する基台と、基台に回転可能に支持された第１アームと、第１アームに回転可能に支持された第２アームと、第２アームに回転可能に支持された物品保持部とを備える構成が開示されている（例えば、特許文献１参照）。このスタッカクレーンでは、移載機構において、第１アームを回転駆動させる第１駆動部、及び第２アームを回転駆動させる第２駆動部が、それぞれ基台から下方に突出した状態で設けられている。 A storage device that stores items on multiple shelves arranged in the vertical and horizontal directions is known. This storage device is equipped with a transport device for transferring items. This transport device uses, for example, a stacker crane, and is equipped with a traveling cart that travels along the shelves, a mast erected on the traveling cart, and a transfer mechanism that is arranged on the mast and transfers items. The transfer mechanism is disclosed to have a configuration that includes a base that rises and falls along the mast, a first arm rotatably supported on the base, a second arm rotatably supported on the first arm, and an item holder rotatably supported on the second arm (see, for example, Patent Document 1). In this stacker crane, in the transfer mechanism, a first drive unit that rotates the first arm and a second drive unit that rotates the second arm are each provided in a state where they protrude downward from the base.
特許第６０２４７２０号公報Patent No. 6024720
　第１駆動部及び第２駆動部が基台から下方に突出して設けられる形態では、移載機構が上下方向に大型化し、最下段の棚を低い位置に配置することが困難となり、物品の保管効率を低下させる要因となる。また、第２駆動部を第１アームに配置することも考えられる。この場合、第２駆動部が第１アームの下面から垂下して設けられると、第１アームの回転時に第２駆動部が基台と干渉し、第１アームの回転範囲を規制するので好ましくない。また、第２駆動部が第１アームの上面に突出して設けられる場合でも、第２駆動部が第２アームと干渉するので好ましくない。このように、第２駆動部が第１アームに配置される場合、第２駆動部と基台との干渉、又は第２駆動部と第１アームとの干渉を避けるために、基台と第１アームとの間隔、第１アームと第２アームとの間隔を上下方向に拡げる必要があり、その結果、移載機構が上下方向に大型化することで、物品の保管効率を低下させる要因となる。 In a configuration in which the first drive unit and the second drive unit are provided protruding downward from the base, the transfer mechanism becomes larger in the vertical direction, making it difficult to place the lowest shelf at a low position, which is a factor in reducing the storage efficiency of items. It is also possible to arrange the second drive unit on the first arm. In this case, if the second drive unit is provided hanging down from the underside of the first arm, it is not preferable because the second drive unit interferes with the base when the first arm rotates and restricts the rotation range of the first arm. Also, even if the second drive unit is provided protruding from the upper surface of the first arm, it is not preferable because the second drive unit interferes with the second arm. In this way, when the second drive unit is arranged on the first arm, it is necessary to increase the distance between the base and the first arm and the distance between the first arm and the second arm in the vertical direction in order to avoid interference between the second drive unit and the base or between the second drive unit and the first arm, and as a result, the transfer mechanism becomes larger in the vertical direction, which is a factor in reducing the storage efficiency of items.
　本発明は、移載機構を上下方向に薄型化することが可能な搬送装置及び保管装置を提供することを目的とする。 The present invention aims to provide a transport device and storage device that can thin the transfer mechanism in the vertical direction.
　本発明の態様に係る搬送装置は、走行台車と、走行台車に立設されるマストと、マストに配置されて物品を移載する移載機構と、を備え、移載機構は、マストに沿って昇降する基台と、基台に回転可能に支持される第１アームと、第１アームに回転可能に支持される第２アームと、物品を保持しかつ第２アームに支持される物品保持部と、第１アームを回転させる第１駆動部と、第２アームを回転させる第２駆動部と、を有し、第２アームの回転中心は、第１アームの上面において第１アームの回転中心から見た一方の端部側に配置され、第２駆動部は、第１アームにおいて第１アームの回転中心から見た他方の端部側であって第２アームの回転軌道から外れた位置に設けられる。 The transport device according to this aspect of the present invention comprises a traveling carriage, a mast erected on the traveling carriage, and a transfer mechanism arranged on the mast for transferring an item, the transfer mechanism having a base which rises and falls along the mast, a first arm rotatably supported on the base, a second arm rotatably supported on the first arm, an item holder which holds an item and is supported on the second arm, a first drive unit which rotates the first arm, and a second drive unit which rotates the second arm, the center of rotation of the second arm being arranged on one end side as viewed from the center of rotation of the first arm on the upper surface of the first arm, and the second drive unit being provided on the other end side of the first arm as viewed from the center of rotation of the first arm, at a position outside the rotation orbit of the second arm.
　本発明の態様に係る保管装置は、物品を保管する棚と、棚との間で物品を移載する上記態様の搬送装置と、を備える。 A storage device according to this aspect of the present invention includes a shelf for storing items and a transport device according to the above aspect for transferring items between the shelf.
　上記態様に係る搬送装置及び保管装置によれば、第２駆動部が第１アームにおいて第１アームの回転中心から見た他方の端部側であって第２アームの回転軌道から外れた位置に設けられるため、第２アームが回転する際に第２駆動部と干渉することを回避できる。そのため、第１アームと第２アームとの上下方向の間隔を拡げる必要がなく、上下方向に薄型化した移載機構を実現できる。また、第２駆動部が第１アームに設けられるので、第２駆動部が基台に設けられる場合と比較して基台の大型化を回避できる。 In the transport device and storage device according to the above aspect, the second drive unit is provided on the other end side of the first arm as viewed from the center of rotation of the first arm, and is positioned outside the rotation orbit of the second arm, so that interference with the second drive unit can be avoided when the second arm rotates. This eliminates the need to increase the vertical distance between the first arm and the second arm, and allows for the realization of a transfer mechanism that is thin in the vertical direction. In addition, because the second drive unit is provided on the first arm, the base does not need to be made larger than when the second drive unit is provided on the base.
　また、上記態様に係る搬送装置において、第２駆動部の上面は、第２アームの下面よりも高くてもよい。この構成によれば、第２駆動部と第２アームとの高さ位置が少なくとも一部重複するため、移載機構の薄型化を図ることができる。また、上記態様に係る搬送装置において、物品保持部は、物品を載置する載置面を有し、第２駆動部の上面は、物品保持部の載置面よりも低くてもよい。この構成によれば、載置面に保持される物品が第２駆動部と干渉することを回避できる。また、上記態様に係る搬送装置において、第２駆動部は、第１アームに備えるカバーの内部に格納され、カバーの上面は、載置面よりも低くてもよい。この構成によれば、第２駆動部を格納したカバーと、載置面に保持される物品とが干渉することを回避できる。 Furthermore, in the transport device according to the above aspect, the upper surface of the second drive unit may be higher than the lower surface of the second arm. According to this configuration, the height positions of the second drive unit and the second arm at least partially overlap, so that the transfer mechanism can be made thinner. Furthermore, in the transport device according to the above aspect, the item holding unit has a mounting surface on which an item is placed, and the upper surface of the second drive unit may be lower than the mounting surface of the item holding unit. According to this configuration, it is possible to prevent the item held on the mounting surface from interfering with the second drive unit. Furthermore, in the transport device according to the above aspect, the second drive unit may be stored inside a cover provided on the first arm, and the upper surface of the cover may be lower than the mounting surface. According to this configuration, it is possible to prevent interference between the cover storing the second drive unit and the item held on the mounting surface.
　また、上記態様に係る搬送装置は、第２駆動部の近傍に、第２駆動部から第２アームに伝達する回転を減速させる第２減速機を備えてもよい。この構成によれば、第２減速機が第２アームの回転の支障となるのを回避できる。また、上記態様に係る搬送装置は、第１アームの下方に、第１駆動部、及び第１駆動部から第１アームに伝達する回転を減速させる第１減速機を備えてもよい。この構成によれば、第１アームの回転時に、第１駆動部及び第１減速機が第１アームと干渉するのを回避できる。また、上記態様に係る搬送装置において、第１駆動部及び第１減速機は、基台においてマストから離間した位置に設けられてもよい。この構成によれば、熱源となる第１駆動部及び第１減速機がマストから離れるので、マストに対する熱影響を軽減できる。 The transport device according to the above aspect may further include a second reducer located near the second drive unit, which reduces the rotation transmitted from the second drive unit to the second arm. This configuration makes it possible to prevent the second reducer from interfering with the rotation of the second arm. The transport device according to the above aspect may further include a first drive unit below the first arm, and a first reducer located below the first arm, which reduces the rotation transmitted from the first drive unit to the first arm. This configuration makes it possible to prevent the first drive unit and the first reducer from interfering with the first arm when the first arm rotates. In the transport device according to the above aspect, the first drive unit and the first reducer may be provided at a position on the base spaced apart from the mast. This configuration makes it possible to reduce the thermal impact on the mast, since the first drive unit and the first reducer, which are heat sources, are spaced apart from the mast.
　また、上記態様に係る搬送装置において、基台は、第１駆動部とマストとの間において、上下方向に沿ったリブを有してもよい。この構成によれば、基台の剛性を容易に高めることができる。また、上記態様に係る搬送装置において、移載機構は、走行台車の走行方向に対して左右両側に物品を移載可能であってもよい。この構成によれば、左右の片側のみに移載可能な構成に比べて、物品を移載できる範囲を広げることができる。また、上記態様に係る搬送装置において、物品保持部は、第２アームの回転に同期して、第２アームに対して回転させてもよい。この構成によれば、第２アーム回転させた際に物品保持部を適切な方向に向けることができる。 Furthermore, in the conveying device according to the above aspect, the base may have a rib along the vertical direction between the first drive unit and the mast. With this configuration, the rigidity of the base can be easily increased. Furthermore, in the conveying device according to the above aspect, the transfer mechanism may be capable of transferring items to both the left and right sides of the traveling direction of the traveling cart. With this configuration, the range over which items can be transferred can be expanded compared to a configuration in which transfer is only possible to one side, either left or right. Furthermore, in the conveying device according to the above aspect, the item holding unit may be rotated relative to the second arm in synchronization with the rotation of the second arm. With this configuration, the item holding unit can be oriented in an appropriate direction when the second arm is rotated.
実施形態に係る搬送装置及び保管装置の一例を示す正面図である。FIG. 2 is a front view illustrating an example of a transport device and a storage device according to an embodiment. 実施形態に係る搬送装置及び保管装置の一例を示す側面図である。FIG. 2 is a side view illustrating an example of a transport device and a storage device according to an embodiment. 移載機構の一例を示す正面図である。FIG. 4 is a front view showing an example of a transfer mechanism. 移載機構において、物品を基台の上方に配置した状態を示す平面図である。11 is a plan view showing a state in which an article is placed above a base in the transfer mechanism. FIG. 移載機構において、物品を受け渡す状態を示す平面図である。11 is a plan view showing a state in which an article is handed over in the transfer mechanism. FIG. 移載機構において、基台と第１アームとの関係を示し、（Ａ）は正面図、（Ｂ）は平面図である。5A and 5B are front and plan views showing the relationship between a base and a first arm in a transfer mechanism. 移載機構において、第１アームと第２アームとの関係を示す平面図である。4 is a plan view showing the relationship between a first arm and a second arm in the transfer mechanism. FIG. 移載機構において、物品保持部で物品を保持した状態を示す正面図である。13 is a front view showing a state in which an article is held by an article holding section in the transfer mechanism. FIG. 第１アーム、第２アーム、及び物品保持部に対して駆動力の伝達経路を模式的に示す図である。13 is a diagram illustrating a schematic diagram of a transmission path of a driving force to a first arm, a second arm, and an article holding portion. FIG. 図９の一部を拡大して示す図である。FIG. 10 is an enlarged view of a portion of FIG. 9 . 移載機構において、物品を基台の上方に配置した他の例を示す平面図である。13 is a plan view showing another example in which an article is placed above a base in the transfer mechanism. FIG. 移載機構において、物品を受け渡す他の例を示す平面図である。13 is a plan view showing another example of the transfer mechanism for transferring an article. FIG. 基台を裏面側から見た図である。FIG.
　以下、本発明の実施形態について図面を参照しながら説明する。ただし、本発明は以下に説明する内容に限定されない。また、図面においては実施形態を説明するため、一部分を大きく又は強調して記載するなど適宜縮尺を変更して表現しており、実際の製品とは寸法又は形状等が異なっている場合がある。以下の各図において、ＸＹＺ座標系を用いて図中の方向を説明する。このＸＹＺ座標系において、鉛直方向をＺ方向とし、水平方向の一方向をＸ方向とし、Ｘ方向に直交する方向をＹ方向とする。Ｘ方向、Ｙ方向、及びＺ方向のそれぞれは、図中の矢印の指す方向が＋方向であり、矢印の指す方向とは反対の方向が－方向であるとして説明する。 Below, an embodiment of the present invention will be described with reference to the drawings. However, the present invention is not limited to the contents described below. Furthermore, in order to explain the embodiment, the drawings are appropriately scaled, such as by enlarging or emphasizing some parts, and the dimensions or shape may differ from those of the actual product. In each of the figures below, the directions in the figures will be explained using an XYZ coordinate system. In this XYZ coordinate system, the vertical direction is the Z direction, one horizontal direction is the X direction, and the direction perpendicular to the X direction is the Y direction. The X, Y, and Z directions will be explained assuming that the direction indicated by the arrow in the figure is the + direction, and the direction opposite to the direction indicated by the arrow is the - direction.
　図１は、実施形態に係る搬送装置１及び保管装置２の一例を示す正面図である。図２は、本実施形態に係る搬送装置１及び保管装置２の一例を示す側面図である。本実施形態では、搬送装置１の走行方向をＸ方向とし、このＸ方向に直交するＹ方向から搬送装置１及び保管装置２を見たときを正面側とする。また、Ｙ方向から搬送装置１及び保管装置２を見たときを側面側とする。図１及び図２に示すように、保管装置２は、物品ＯＢを搬送する搬送装置１と、物品ＯＢを載置して保管する複数の棚３を備える。 FIG. 1 is a front view showing an example of a conveying device 1 and a storage device 2 according to an embodiment. FIG. 2 is a side view showing an example of a conveying device 1 and a storage device 2 according to this embodiment. In this embodiment, the running direction of the conveying device 1 is the X direction, and the conveying device 1 and the storage device 2 are viewed from the Y direction perpendicular to the X direction, respectively. Also, the conveying device 1 and the storage device 2 are viewed from the Y direction, respectively. As shown in FIGS. 1 and 2, the storage device 2 includes a conveying device 1 that conveys items OB, and a plurality of shelves 3 on which the items OB are placed and stored.
　物品ＯＢは、例えば、ガラス基板、半導体ウエハなどが収容されたフープ（ＦＯＵＰ）などの収容容器である。なお、物品ＯＢがフープである場合、収容するガラス基板のサイズ、収容枚数によって、物品ＯＢの重量が２５ｋｇ以上になる場合がある。なお、物品ＯＢは、フープ以外に、例えばレチクルケースなど他の収容容器であってもよい。本実施形態は、物品ＯＢが数十ｋｇとなるような重量物である場合でも適用可能である。 The object OB is a storage container such as a FOUP that contains glass substrates, semiconductor wafers, etc. When the object OB is a FOUP, the weight of the object OB may be 25 kg or more depending on the size of the glass substrates contained and the number of substrates contained. The object OB may be another storage container other than a FOUP, such as a reticle case. This embodiment is also applicable even when the object OB is a heavy object weighing tens of kg.
　搬送装置１は、物品ＯＢを搬送し、複数の棚３のいずれかとの間で物品ＯＢの受け渡しを行う。搬送装置１は、移載機構４と、走行台車５と、マスト６と、を備える。なお、移載機構４の詳細については後述する。走行台車５は、ベースフレーム７と、駆動輪８とを備える。ベースフレーム７は、駆動輪８を回転駆動するための電動モータ等の不図示の走行駆動部を備える。駆動輪８は、ベースフレーム７に回転可能に設けられ、不図示の走行駆動部により回転駆動する。駆動輪８は、床Ｆに設置されたレール９上を転動する。本実施形態では、駆動輪８は一輪であるが、駆動輪８が複数設けられてもよいし、駆動輪８の他に従動輪が設けられてもよい。レール９は、床ＦにおいてＸ方向に沿って敷設されている。走行台車５は、不図示の走行駆動部によって駆動輪８を回転駆動することでＸ方向に走行する。すなわち、搬送装置１は、レール９に沿って＋Ｘ方向又は－Ｘ方向に走行する。なお、走行台車５は、ベースフレーム７の下面に、レール９の側面を挟み込む一対のローラ８ａを備えてもよい。一対のローラ８ａを備えることで、駆動輪８がレール９から脱落することを防止できる。 The conveying device 1 conveys an item OB and transfers the item OB between any of the multiple shelves 3. The conveying device 1 includes a transfer mechanism 4, a traveling cart 5, and a mast 6. The transfer mechanism 4 will be described in detail later. The traveling cart 5 includes a base frame 7 and drive wheels 8. The base frame 7 includes a traveling drive unit (not shown), such as an electric motor, for driving the drive wheels 8 to rotate. The drive wheels 8 are rotatably provided on the base frame 7 and are driven to rotate by a traveling drive unit (not shown). The drive wheels 8 roll on rails 9 installed on the floor F. In this embodiment, there is one drive wheel 8, but multiple drive wheels 8 may be provided, or a driven wheel may be provided in addition to the drive wheels 8. The rails 9 are laid on the floor F along the X direction. The traveling cart 5 travels in the X direction by driving the drive wheels 8 to rotate by a traveling drive unit (not shown). That is, the conveying device 1 travels along the rails 9 in the +X direction or the -X direction. The traveling carriage 5 may also be provided with a pair of rollers 8a on the underside of the base frame 7 that grip the sides of the rails 9. By providing a pair of rollers 8a, it is possible to prevent the drive wheels 8 from falling off the rails 9.
　マスト６は、走行台車５に立設される。マスト６は、ベースフレーム７の上面から上方（＋Ｚ方向）に向けて延びるように設けられる。マスト６は、例えば、移載機構４が最上段の棚３に物品ＯＢを移載することが可能な高さに設定される。マスト６の上端部には、上部フレーム１０が設けられる。上部フレーム１０は、上面側に一対のローラ１１を備える。一対のローラ１１は、天井Ｃに設置された天井レール１２の側面を挟むように配置される。天井レール１２は、天井ＣにおいてＸ方向に沿って設けられている。ローラ１１は、不図示の駆動装置によって駆動輪８と同期して回転駆動し、マスト６の上端部である上部フレーム１０を走行台車５の進行方向に進行させる。駆動輪８の駆動、及びローラ１１の駆動は不図示の制御装置によって制御される。なお、ローラ１１は、駆動装置により駆動する駆動ローラであることに限定されず、従動ローラであってもよい。 The mast 6 is erected on the traveling cart 5. The mast 6 is provided so as to extend upward (in the +Z direction) from the upper surface of the base frame 7. The mast 6 is set, for example, at a height that allows the transfer mechanism 4 to transfer the item OB to the top shelf 3. An upper frame 10 is provided at the upper end of the mast 6. The upper frame 10 has a pair of rollers 11 on the upper surface side. The pair of rollers 11 are arranged so as to sandwich the sides of the ceiling rail 12 installed on the ceiling C. The ceiling rail 12 is provided on the ceiling C along the X direction. The rollers 11 are rotated and driven in synchronization with the drive wheels 8 by a drive device (not shown), and move the upper frame 10, which is the upper end of the mast 6, in the traveling direction of the traveling cart 5. The drive of the drive wheels 8 and the drive of the rollers 11 are controlled by a control device (not shown). Note that the rollers 11 are not limited to being drive rollers driven by a drive device, and may be driven rollers.
　複数の棚３は、レール９に沿ったＸ方向及び上下方向（Ｚ方向）に複数並んだ状態で配置される。複数の棚３は、それぞれ物品ＯＢが保管される。各棚３は、物品ＯＢを載置可能に形成され、各棚３の上面側には物品ＯＢを収容可能な空間が形成されている。各棚３は、切り欠き部３ａ及びピン３ｂを備えている。切り欠き部３ａは、後述する移載機構４の物品保持部２３が上下方向に通過可能な大きさに設けられる。ピン３ｂは、棚３の上面に例えば３本設けられており、物品ＯＢの底面に設けられた溝部に入り込むことで、棚３に載置された物品ＯＢを位置決めする。なお、ピン３ｂに代えて、物品ＯＢの側面をガイドする位置決めガイドが設けられる形態であってもよい。また、棚板３が左右に分離し、左右の棚板３のそれぞれに１本のピン３ｂが設けられ、２本のピン３ｂで物品ＯＢを位置決めする形態であってもよい。この場合、左右の棚板３の間に切り欠き部３ａが形成され、この切り欠き部３ａを介して物品保持部２３が上下方向に通過可能である。なお、各棚３は、載置された物品ＯＢ内に不活性ガスを供給するガス供給装置を備えていてもよい。本実施形態では、図２に示すように、複数の棚３が、搬送装置１を挟んだＹ方向の両側に設けられる形態を示しているが、この形態に限定されない。例えば、複数の棚３が、搬送装置１の＋Ｙ側のみ又は－Ｙ側のみに配置される形態であってもよい。 The shelves 3 are arranged in a line in the X direction and the vertical direction (Z direction) along the rails 9. The shelves 3 store items OB. Each shelf 3 is formed so that the item OB can be placed on it, and a space capable of accommodating the item OB is formed on the upper surface of each shelf 3. Each shelf 3 has a cutout portion 3a and a pin 3b. The cutout portion 3a is provided with a size that allows the item holding portion 23 of the transfer mechanism 4 described later to pass through in the vertical direction. The pins 3b are provided, for example, in three pieces on the upper surface of the shelf 3, and position the item OB placed on the shelf 3 by entering a groove portion provided on the bottom surface of the item OB. Note that instead of the pins 3b, a positioning guide that guides the side of the item OB may be provided. Alternatively, the shelf board 3 may be separated into left and right, and one pin 3b may be provided on each of the left and right shelf boards 3, and the item OB may be positioned by the two pins 3b. In this case, a cutout 3a is formed between the left and right shelf boards 3, and the item holder 23 can pass through this cutout 3a in the vertical direction. Each shelf 3 may be equipped with a gas supply device that supplies an inert gas into the placed item OB. In this embodiment, as shown in FIG. 2, a form in which multiple shelves 3 are provided on both sides of the conveying device 1 in the Y direction is shown, but this is not limited to this form. For example, a form in which multiple shelves 3 are arranged only on the +Y side or only on the -Y side of the conveying device 1 may also be used.
　なお、本実施形態の搬送装置１は、１本のマスト６の－Ｘ側に移載機構４が設けられる形態を示している。すなわち、移載機構４は、１本のマスト６で支持されている。ただし、搬送装置１は、上記した形態に限定されない。例えば、Ｘ方向に離間する２本のマスト６の間に移載機構４が設けられ、２本のマスト６で移載機構４を支持する形態であってもよい。なお、本実施形態では、１本のマスト６に移載機構４が設けられるため、搬送装置１のＸ方向の全長を短くすることができる。その結果、複数の棚３のうち最も－Ｘ側端部の棚３、又は最も＋Ｘ側端部の棚３に搬送装置１がアクセスする際、Ｘ方向にレール９を伸ばす必要がなく、保管装置２の設置面積が広くなるのを回避できる。 In addition, the transport device 1 of this embodiment shows a form in which the transfer mechanism 4 is provided on the -X side of one mast 6. In other words, the transfer mechanism 4 is supported by one mast 6. However, the transport device 1 is not limited to the above form. For example, the transfer mechanism 4 may be provided between two masts 6 spaced apart in the X direction, and the transfer mechanism 4 may be supported by the two masts 6. In addition, since the transfer mechanism 4 is provided on one mast 6 in this embodiment, the overall length of the transport device 1 in the X direction can be shortened. As a result, when the transport device 1 accesses the shelf 3 at the end closest to the -X side or the shelf 3 at the end closest to the +X side among the multiple shelves 3, there is no need to extend the rail 9 in the X direction, and the installation area of the storage device 2 can be prevented from becoming large.
　図３は、移載機構４の一例を示す正面図である。図３では、搬送装置１の走行方向（Ｘ方向）と直交する方向（Ｙ方向）から見た移載機構４の正面図を示している。図３に示すように、移載機構４は、基台２０と、第１アーム２１と、第２アーム２２と、物品保持部２３と、第１駆動部３１と、第２駆動部３２とを有する。 Figure 3 is a front view showing an example of the transfer mechanism 4. Figure 3 shows a front view of the transfer mechanism 4 as seen from a direction (Y direction) perpendicular to the running direction (X direction) of the conveying device 1. As shown in Figure 3, the transfer mechanism 4 has a base 20, a first arm 21, a second arm 22, an item holding unit 23, a first drive unit 31, and a second drive unit 32.
　基台２０は、水平部分２０ａと、水平部分２０ａの一端から上方に延びる鉛直部分２０ｂとを有するＬ状に形成されている。鉛直部分２０ｂの＋Ｘ面には、断面が凹状でかつ鉛直方向の被ガイド部２０ｃが設けられている。被ガイド部２０ｃは、マスト６の－Ｘ面に設けられ、断面が凸状でかつ鉛直方向のリニアガイド２６に嵌り合う。鉛直部分２０ｂは、リニアガイド２６に沿って鉛直方向にガイドされる。すなわち、基台２０は、マスト６に沿って昇降可能である。搬送装置１は、基台２０を昇降させる不図示の昇降装置を備えている。この昇降装置を駆動することで基台２０（移載機構４）をマスト６に沿って昇降させる。 The base 20 is formed in an L shape having a horizontal portion 20a and a vertical portion 20b extending upward from one end of the horizontal portion 20a. A guided portion 20c having a concave cross section and extending in the vertical direction is provided on the +X surface of the vertical portion 20b. The guided portion 20c is provided on the -X surface of the mast 6 and fits into a linear guide 26 having a convex cross section and extending in the vertical direction. The vertical portion 20b is guided in the vertical direction along the linear guide 26. In other words, the base 20 can be raised and lowered along the mast 6. The transport device 1 is equipped with a lifting device (not shown) that raises and lowers the base 20. By driving this lifting device, the base 20 (transfer mechanism 4) is raised and lowered along the mast 6.
　昇降装置は、例えば、電動モータなどの駆動部と、駆動部によって回転駆動されるスプロケットと、スプロケットの外周に掛けられたチェーンとを有する。このチェーンは、マスト６の上端部分から下端部分にわたって架け渡されており、スプロケットの回転に伴って移動（又は周回）する。基台２０は、チェーンに接続されており、チェーンの移動に伴ってリニアガイド２６に沿って上昇又は下降する。なお、昇降装置としては、上記した構成に限定されず、チェーンに代えて無端状のベルトが用いられてもよい。また、チェーンやベルトによって基台２０を昇降させることに限定されず、例えばマスト６に沿って設置されたラックギアと、基台２０に設置されたピニオンギアと、を用いて、このピニオンギアを回転させて基台２０を昇降させてもよい。なお、基台２０の昇降動作及び高さ位置は不図示の制御装置によって制御される。 The lifting device has, for example, a drive unit such as an electric motor, a sprocket that is rotated by the drive unit, and a chain that is attached to the outer circumference of the sprocket. The chain is stretched from the upper end to the lower end of the mast 6, and moves (or rotates) as the sprocket rotates. The base 20 is connected to the chain, and rises or falls along the linear guide 26 as the chain moves. The lifting device is not limited to the above configuration, and an endless belt may be used instead of the chain. Furthermore, the lifting device is not limited to raising and lowering the base 20 by a chain or belt, and may use, for example, a rack gear installed along the mast 6 and a pinion gear installed on the base 20, and the pinion gear may be rotated to raise and lower the base 20. The lifting and lowering operation and height position of the base 20 are controlled by a control device (not shown).
　第１アーム２１は、基台２０の上面２０ｄ側において回転可能に支持される。第１アーム２１は、直線方向に延びた棒状体が用いられる。第１アーム２１の長手方向の中間部分（例えば中央部）には、下方に延びる第１回転軸２７が設けられる。第１アーム２１は、第１回転軸２７を介して基台２０と接続される。第１アーム２１は、基台２０に対して第１回転軸２７の周りに回転可能である。第１回転軸２７の中心を通過する鉛直方向が、第１アーム２１の回転中心Ｐ１である。第１アーム２１は、第１端部２１ａ及び第２端部２１ｂを有する。第１アーム２１において、回転中心Ｐ１から見た一方の端部が第１端部２１ａであり、回転中心Ｐ１から見た他方の端部が第２端部２１ｂである。 The first arm 21 is rotatably supported on the upper surface 20d side of the base 20. The first arm 21 is a rod-shaped body extending in a straight line. A first rotating shaft 27 extending downward is provided in the middle part (e.g., the center part) of the longitudinal direction of the first arm 21. The first arm 21 is connected to the base 20 via the first rotating shaft 27. The first arm 21 is rotatable around the first rotating shaft 27 relative to the base 20. The vertical direction passing through the center of the first rotating shaft 27 is the rotation center P1 of the first arm 21. The first arm 21 has a first end 21a and a second end 21b. In the first arm 21, one end seen from the rotation center P1 is the first end 21a, and the other end seen from the rotation center P1 is the second end 21b.
　第２アーム２２は、第１アーム２１の上面２１ｃ側において回転可能に支持される。第２アーム２２は、第１アーム２１の第１端部２１ａに支持されている。第２アーム２２は、直線方向に延びた棒状体が用いられる。第２アーム２２は、長手方向の寸法が第１アーム２１よりも短い。第２アーム２２のうち、長手方向の一方の端部が基端部２２ａであり、他方の端部が先端部２２ｂである。第２アーム２２の基端部２２ａには、下方に延びる第２回転軸２８が設けられる。第２アーム２２は、第２回転軸２８を介して第１アーム２１と接続される。第２アーム２２は、第１アーム２１に対して第２回転軸２８の周りに回転可能である。第２回転軸２８の中心を通過する鉛直方向が、第２アーム２２の回転中心Ｐ２である。第２アーム２２の回転中心Ｐ２は、第１アーム２１の上面２１ｃにおいて第１アーム２１の回転中心Ｐ１から見た第１端部２１ａ側に配置される。 The second arm 22 is rotatably supported on the upper surface 21c side of the first arm 21. The second arm 22 is supported at the first end 21a of the first arm 21. The second arm 22 is a rod-shaped body extending in a straight line. The longitudinal dimension of the second arm 22 is shorter than that of the first arm 21. One longitudinal end of the second arm 22 is the base end 22a, and the other longitudinal end is the tip end 22b. A second rotating shaft 28 extending downward is provided at the base end 22a of the second arm 22. The second arm 22 is connected to the first arm 21 via the second rotating shaft 28. The second arm 22 is rotatable around the second rotating shaft 28 relative to the first arm 21. The vertical direction passing through the center of the second rotating shaft 28 is the rotation center P2 of the second arm 22. The rotation center P2 of the second arm 22 is located on the upper surface 21c of the first arm 21, on the first end 21a side as viewed from the rotation center P1 of the first arm 21.
　第１アーム２１及び第２アーム２２は、それぞれの回転角度によって第２アーム２２の先端部２２ｂを所定範囲内で任意に位置させることが可能となっている。この所定範囲は、第１アーム２１及び第２アーム２２の長さ、両者の回転角度によって規定される。また、第１アーム２１及び第２アーム２２は、後述する各駆動部の駆動を同期して行うことにより、第２アーム２２の先端部２２ｂの移動方向を制御することができる。 The first arm 21 and the second arm 22 are capable of positioning the tip 22b of the second arm 22 anywhere within a predetermined range by adjusting their respective rotation angles. This predetermined range is determined by the lengths of the first arm 21 and the second arm 22 and the rotation angles of both. In addition, the first arm 21 and the second arm 22 can control the direction of movement of the tip 22b of the second arm 22 by synchronously driving the respective drive units described below.
　物品保持部２３は、第２アーム２２の上面２２ｃ側において回転可能に支持される。第２アーム２２の先端部２２ｂに支持されている。物品保持部２３は、物品ＯＢを載置可能な板状体が用いられる。物品保持部２３は、上面側に載置面２３ａを有する。物品保持部２３は、載置面２３ａにおいて物品ＯＢの下面を支持する。物品保持部２３の載置面２３ａには、例えば３本のピン２３ｂが設けられる。ピン２３ｂが物品ＯＢの底面に設けられた溝部に入り込むことで、物品ＯＢを位置決めすることができる。物品保持部２３には、下方に延びる第３回転軸２９が設けられる。物品保持部２３は、第３回転軸２９を介して第２アーム２２と接続される。物品保持部２３は、第２アーム２２に対して第３回転軸２９の周りに回転可能である。第３回転軸２９の中心を通過する鉛直方向が、物品保持部２３の回転中心Ｐ３である。物品保持部２３の回転中心Ｐ３は、第２アーム２２の上面２２ｃにおいて第２アーム２２の先端部２２ｂ側に配置される。 The item holding part 23 is rotatably supported on the upper surface 22c side of the second arm 22. It is supported on the tip portion 22b of the second arm 22. The item holding part 23 is a plate-shaped body on which the item OB can be placed. The item holding part 23 has a mounting surface 23a on the upper surface side. The item holding part 23 supports the lower surface of the item OB on the mounting surface 23a. The mounting surface 23a of the item holding part 23 is provided with, for example, three pins 23b. The pins 23b can be inserted into grooves provided on the bottom surface of the item OB to position the item OB. The item holding part 23 is provided with a third rotation shaft 29 extending downward. The item holding part 23 is connected to the second arm 22 via the third rotation shaft 29. The item holding part 23 is rotatable around the third rotation shaft 29 relative to the second arm 22. The vertical direction passing through the center of the third rotation shaft 29 is the rotation center P3 of the item holding part 23. The rotation center P3 of the item holding part 23 is located on the top surface 22c of the second arm 22, on the tip end 22b side of the second arm 22.
　また、図３に示すように、移載機構４は、第１駆動部３１及び第２駆動部３２を備える。第１駆動部３１及び第２駆動部３２は、例えば、電動モータ等が用いられる。第１駆動部３１は、第１アーム２１を回転駆動する。第１駆動部３１は、第１アーム２１の下方である基台２０の水平部分２０ａに配置される。第１駆動部３１は、基台２０の水平部分２０ａにおいて第１アーム２１の回転中心Ｐ１から見た先端側、すなわち鉛直部分２０ｂとは反対側に設けられる。なお、第１駆動部３１は、後述する第１減速機３３を含んで構成されてもよい。 As shown in FIG. 3, the transfer mechanism 4 includes a first drive unit 31 and a second drive unit 32. For example, an electric motor or the like is used for the first drive unit 31 and the second drive unit 32. The first drive unit 31 rotates the first arm 21. The first drive unit 31 is disposed on the horizontal portion 20a of the base 20 below the first arm 21. The first drive unit 31 is disposed on the tip side of the horizontal portion 20a of the base 20 as viewed from the rotation center P1 of the first arm 21, that is, on the opposite side to the vertical portion 20b. The first drive unit 31 may be configured to include a first reducer 33, which will be described later.
　第２駆動部３２は、第２アーム２２を回転駆動する。第２駆動部３２は、第１アーム２１に設けられる。第２駆動部３２は、第１アーム２１において回転中心Ｐ１から見た第２端部２１ｂ側に設けられる。第２駆動部３２は、一部が第１アーム２１の上面２１ｃから上方に突出した状態で配置される。第２アーム２２は、第２駆動部３２の突出部分を覆うためのカバー２５を備える。従って、カバー２５は、第１アーム２１の上面２１ｃから上方に突出した状態で設けられる。なお、カバー２５を設けるか否かは任意である。従って、第２アーム２２は、カバー２５がない形態であってもよい。なお、第２駆動部３２は、後述する第２減速機３４を含んで構成されてもよい。 The second drive unit 32 drives the second arm 22 to rotate. The second drive unit 32 is provided on the first arm 21. The second drive unit 32 is provided on the second end 21b side of the first arm 21 when viewed from the rotation center P1. The second drive unit 32 is arranged with a part of it protruding upward from the upper surface 21c of the first arm 21. The second arm 22 is provided with a cover 25 for covering the protruding part of the second drive unit 32. Therefore, the cover 25 is provided in a state where it protrudes upward from the upper surface 21c of the first arm 21. It is optional whether or not to provide the cover 25. Therefore, the second arm 22 may be in a form without the cover 25. It is also possible for the second drive unit 32 to be configured to include a second reducer 34 described later.
　次に、移載機構４の動作について説明する。図４は、移載機構４において、物品ＯＢを基台２０の上方に配置した状態を示す平面図である。図４に示すように、第１アーム２１及び第２アーム２２をそれぞれ所定角度位置（待機位置又は物品保持位置）にすることで、物品保持部２３を基台２０の上方に位置させることができる。このとき、物品保持部２３は、棚３から離れている。この状態で載置面２３ａに物品ＯＢを載置している場合、物品ＯＢは、基台２０の上方に配置される。図４に示す状態で、搬送装置１は、走行台車５によってＸ方向に移動可能であり、また、移載機構４を昇降可能である。 Next, the operation of the transfer mechanism 4 will be described. Figure 4 is a plan view showing the state in which the item OB is placed above the base 20 in the transfer mechanism 4. As shown in Figure 4, the item holding part 23 can be positioned above the base 20 by setting the first arm 21 and the second arm 22 to a predetermined angular position (standby position or item holding position). At this time, the item holding part 23 is separated from the shelf 3. When the item OB is placed on the placement surface 23a in this state, the item OB is positioned above the base 20. In the state shown in Figure 4, the transport device 1 can move in the X direction by the traveling cart 5, and the transfer mechanism 4 can be raised and lowered.
　図５は、移載機構４において、物品ＯＢを受け渡す状態を示す平面図である。図５に示すように、第１駆動部３１及び第２駆動部３２を駆動して、第１アーム２１及び第２アーム２２をそれぞれ所定角度位置（受け渡し位置）にすることで、物品保持部２３を棚３の上方又は下方に差し込むことができる。棚３には、物品保持部２３を鉛直方向に通行可能な切り欠き部３ａが設けられている。棚３に物品ＯＢを渡す場合、物品保持部２３を棚３よりも高い位置に配置し、この状態で物品保持部２３（移載機構４）を下降させることにより、物品ＯＢは、物品保持部２３から棚３に渡される。物品ＯＢが棚３に載置された後、物品保持部２３を図４に示す位置（待機位置）に戻すことで、物品ＯＢを棚３に渡す動作が完了する。 FIG. 5 is a plan view showing the state in which the transfer mechanism 4 transfers the article OB. As shown in FIG. 5, the first drive unit 31 and the second drive unit 32 are driven to set the first arm 21 and the second arm 22 to a predetermined angular position (transfer position), so that the article holding unit 23 can be inserted above or below the shelf 3. The shelf 3 is provided with a cutout portion 3a through which the article holding unit 23 can pass in the vertical direction. When transferring the article OB to the shelf 3, the article holding unit 23 is placed at a position higher than the shelf 3, and in this state, the article holding unit 23 (transfer mechanism 4) is lowered, so that the article OB is transferred from the article holding unit 23 to the shelf 3. After the article OB is placed on the shelf 3, the article holding unit 23 is returned to the position shown in FIG. 4 (standby position), completing the operation of transferring the article OB to the shelf 3.
　また、棚３から物品ＯＢを受け取る場合、物品ＯＢが載置された棚３よりも低い位置に物品保持部２３を配置し、この状態で物品保持部２３（移載機構４）を上昇させることにより、物品ＯＢは、棚３から物品保持部２３に渡される。物品ＯＢが物品保持部２３に載置された後、物品保持部２３を図４に示す位置（物品保持位置）に戻すことで、移載機構４による物品ＯＢの受け取り動作が完了する。 When receiving an item OB from the shelf 3, the item holding unit 23 is positioned at a lower position than the shelf 3 on which the item OB is placed, and the item holding unit 23 (transfer mechanism 4) is raised in this state, whereby the item OB is transferred from the shelf 3 to the item holding unit 23. After the item OB is placed on the item holding unit 23, the item holding unit 23 is returned to the position shown in Figure 4 (item holding position), completing the operation of receiving the item OB by the transfer mechanism 4.
　上記のように、移載機構４により物品ＯＢの受け渡しを行う場合、第１アーム２１及び第２アーム２２の動作について説明する。図６は、移載機構４において、基台２０と第１アーム２１との関係を示し、（Ａ）は正面図、（Ｂ）は平面図である。図６では、説明を容易にするため、一部の部材を省略して表している。図６（Ａ）に示すように、第２駆動部３２は、第１アーム２１のカバー２５の内部に格納されている。カバー２５は、第１アーム２１の上面２１ｃに配置されており、第１アーム２１に対して上方に突出している。一方、第２駆動部３２は第１アーム２１に対して下方側には突出しないように配置されており、第１アーム２１の下面側にカバー２５等が設けられない。すなわち、第１アーム２１の下面側に突出する部分が設けられていない。 As described above, when transferring and receiving the article OB by the transfer mechanism 4, the operation of the first arm 21 and the second arm 22 will be described. Figure 6 shows the relationship between the base 20 and the first arm 21 in the transfer mechanism 4, (A) being a front view and (B) being a plan view. In Figure 6, some components are omitted for ease of explanation. As shown in Figure 6 (A), the second drive unit 32 is stored inside the cover 25 of the first arm 21. The cover 25 is disposed on the upper surface 21c of the first arm 21 and protrudes upward from the first arm 21. On the other hand, the second drive unit 32 is disposed so as not to protrude downward from the first arm 21, and the cover 25 or the like is not provided on the underside of the first arm 21. In other words, there is no part that protrudes from the underside of the first arm 21.
　従って、図６（Ｂ）に示すように、第１アーム２１が回転中心Ｐ１を中心として紙面上における時計回り又は反時計回りにいずれに回転しても、第２駆動部３２が基台２０に干渉しない。その結果、第１アーム２１の回転範囲が規制されず、第１アーム２１を任意の角度位置まで回転させることができる。 Therefore, as shown in FIG. 6(B), regardless of whether the first arm 21 rotates clockwise or counterclockwise around the rotation center P1 on the paper, the second drive unit 32 does not interfere with the base 20. As a result, the rotation range of the first arm 21 is not restricted, and the first arm 21 can be rotated to any angle position.
　図７は、移載機構４において、第１アーム２１と第２アーム２２との関係を示す平面図である。図７では、説明を容易にするため、一部の部材を省略して表している。図７に示すように、第２アーム２２の回転中心Ｐ２は、第１アーム２１において、第１アーム２１の回転中心Ｐ１から見た第１端部２１ａ側に配置されている。また、第２駆動部３２は、第１アーム２１において、第１アーム２１の回転中心Ｐ１から見た第２端部２１ｂ側に配置されている。さらに、第２アーム２２は、基端部２２ａから先端部２２ｂまでの長さが、カバー２５（カバー２５がない場合は第２駆動部３２）に達しない長さに設けられている。すなわち、カバー２５は、第２アーム２２の先端部２２ｂとの間に距離Ｌ１が設けられた状態となっている。 FIG. 7 is a plan view showing the relationship between the first arm 21 and the second arm 22 in the transfer mechanism 4. In FIG. 7, some components are omitted for ease of explanation. As shown in FIG. 7, the rotation center P2 of the second arm 22 is disposed on the first end 21a side of the first arm 21 as viewed from the rotation center P1 of the first arm 21. Also, the second drive unit 32 is disposed on the first arm 21 as viewed from the second end 21b side of the first arm 21 as viewed from the rotation center P1 of the first arm 21. Furthermore, the second arm 22 is provided such that the length from the base end 22a to the tip end 22b does not reach the cover 25 (the second drive unit 32 when the cover 25 is not present). In other words, the cover 25 is provided with a distance L1 between the tip end 22b of the second arm 22.
　従って、図７に示すように、第２アーム２２が回転中心Ｐ２を中心として紙面上における時計回り又は反時計回りのいずれに回転しても、第２アーム２２が第２駆動部３２に干渉しない。その結果、第２アーム２２の回転範囲が規制されず、第２アーム２２を任意の角度位置まで回転させることができる。なお、距離Ｌ１は、カバー２５（カバー２５がない場合は第２駆動部３２）に第２アーム２２の先端部２２ｂが達しなければ、任意に設定可能である。 Therefore, as shown in FIG. 7, whether the second arm 22 rotates clockwise or counterclockwise on the page around the rotation center P2, the second arm 22 does not interfere with the second drive unit 32. As a result, the rotation range of the second arm 22 is not restricted, and the second arm 22 can be rotated to any angle position. Note that the distance L1 can be set arbitrarily as long as the tip 22b of the second arm 22 does not reach the cover 25 (or the second drive unit 32 if there is no cover 25).
　図８は、移載機構４において、物品保持部２３で物品ＯＢを保持した状態を示す正面図である。図８に示すように、カバー２５の上面２５ａ（カバー２５がない場合は第２駆動部３２の上面３２ｃ）は、第２アーム２２の下面２２ｄよりも高い位置に設定されている。すなわち、カバー２５（第２駆動部３２）と第２アーム２２との高さ位置が少なくとも一部重複するように形成されている。そのため、移載機構４の薄型化が可能となっている。 Figure 8 is a front view showing the state in which the item holding section 23 holds an item OB in the transfer mechanism 4. As shown in Figure 8, the upper surface 25a of the cover 25 (or the upper surface 32c of the second drive section 32 when the cover 25 is not present) is set at a position higher than the lower surface 22d of the second arm 22. In other words, the height positions of the cover 25 (second drive section 32) and the second arm 22 are formed so as to at least partially overlap. This makes it possible to make the transfer mechanism 4 thinner.
　また、カバー２５の上面２５ａは、物品保持部２３の載置面２３ａよりも低い位置に配置されている。具体的には、カバー２５の上面２５ａは、物品保持部２３の載置面２３ａから下方に距離Ｌ２を空けて配置される。このため、物品ＯＢを物品保持部２３に載置した状態で第１アーム２１及び第２アーム２２を回転させる場合であっても、物品ＯＢがカバー２５と干渉するのを回避する。従って、物品ＯＢを物品保持部２３に載置した状態で第１アーム２１及び第２アーム２２の回転角度を任意に設定することができる。なお、カバー２５がない場合であっても、第２駆動部３２の上面３２ｃは、載置面２３ａよりも距離Ｌ２以上、低い位置に配置されている。従って、上記と同様に、物品ＯＢが第２駆動部３２と干渉するのを回避するので、物品ＯＢを物品保持部２３に載置した状態で第１アーム２１及び第２アーム２２の回転角度を任意に設定できる。 Also, the upper surface 25a of the cover 25 is disposed at a lower position than the placement surface 23a of the item holding unit 23. Specifically, the upper surface 25a of the cover 25 is disposed at a distance L2 below the placement surface 23a of the item holding unit 23. Therefore, even when the first arm 21 and the second arm 22 are rotated with the item OB placed on the item holding unit 23, the item OB is prevented from interfering with the cover 25. Therefore, the rotation angle of the first arm 21 and the second arm 22 can be set arbitrarily with the item OB placed on the item holding unit 23. Note that even if the cover 25 is not provided, the upper surface 32c of the second driving unit 32 is disposed at a lower position than the placement surface 23a by a distance L2 or more. Therefore, as described above, the item OB is prevented from interfering with the second driving unit 32, and the rotation angle of the first arm 21 and the second arm 22 can be set arbitrarily with the item OB placed on the item holding unit 23.
　次に、第１アーム２１、第２アーム２２、及び物品保持部２３をそれぞれ回転させるための駆動系（駆動力の伝達経路）について説明する。図９は、第１アーム２１、第２アーム２２、及び物品保持部２３に対して駆動力の伝達経路を模式的に示す図である。図１０は、図９の一部を拡大して示す図である。図９及び図１０では、説明を容易にするため、一部の部材を省略して表している。 Next, the drive system (path of transmission of driving force) for rotating the first arm 21, the second arm 22, and the item holding part 23 will be described. Figure 9 is a schematic diagram showing the path of transmission of driving force for the first arm 21, the second arm 22, and the item holding part 23. Figure 10 is an enlarged view of a portion of Figure 9. To facilitate explanation, some components have been omitted from Figures 9 and 10.
　まず、第１アーム２１の駆動系について説明する。第１駆動部３１は、例えば、電動モータと、電動モータの回転を検出するエンコーダとを備える。電動モータは、第１アーム２１を回転させるのに必要なトルクを発生するものが使用される。第１駆動部３１は、第１減速機３３を介して第１アーム２１を回転駆動し、第１アーム２１を基台２０に対して回転させる。第１駆動部３１は、不図示の制御装置によって、回転が制御される。この制御装置は、エンコーダの検出結果を用いて電動モータをサーボ制御する。なお、制御装置は、走行台車５の走行駆動部を制御する制御装置と同一であってもよいし、別の制御装置であってもよい。 First, the drive system of the first arm 21 will be described. The first drive unit 31 includes, for example, an electric motor and an encoder that detects the rotation of the electric motor. An electric motor that generates the torque required to rotate the first arm 21 is used. The first drive unit 31 drives the first arm 21 to rotate via the first reduction gear 33, causing the first arm 21 to rotate relative to the base 20. The rotation of the first drive unit 31 is controlled by a control device (not shown). This control device servo-controls the electric motor using the detection results of the encoder. Note that the control device may be the same as the control device that controls the traveling drive unit of the traveling cart 5, or may be a different control device.
　第１駆動部３１の出力は、第１回転軸２７に伝達される。第１駆動部３１の出力軸３１ａは、第１駆動部３１から下方に突出した状態で設けられる。出力軸３１ａには、プーリ３１ｂが設けられる。また、第１回転軸２７には、プーリ２７ａが設けられる。第１回転軸２７は、第１アーム２１において回転可能に支持されている。プーリ３１ｂとプーリ２７ａとの間には、無端状の伝達ベルト３５が架け渡され、プーリ３１ｂの回転が伝達ベルト３５を介してプーリ２７ａに伝達される。第１減速機３３は、第１回転軸２７に設けられる。第１減速機３３は、プーリ２７ａの回転を減速して第１アーム２１の回転へと伝達する。第１減速機３３が第１回転軸２７に設けられることで、第１駆動部３１と第１減速機３３とを上下方向に重ねることと比較して上方方向に省スペース化でき、その結果、基台２０を上下方向に薄くすることができる。 The output of the first drive unit 31 is transmitted to the first rotating shaft 27. The output shaft 31a of the first drive unit 31 is arranged to protrude downward from the first drive unit 31. A pulley 31b is provided on the output shaft 31a. A pulley 27a is provided on the first rotating shaft 27. The first rotating shaft 27 is rotatably supported on the first arm 21. An endless transmission belt 35 is stretched between the pulleys 31b and 27a, and the rotation of the pulley 31b is transmitted to the pulley 27a via the transmission belt 35. The first reducer 33 is provided on the first rotating shaft 27. The first reducer 33 reduces the speed of the rotation of the pulley 27a and transmits it to the rotation of the first arm 21. By providing the first reducer 33 on the first rotating shaft 27, space can be saved in the upward direction compared to stacking the first drive unit 31 and the first reducer 33 in the vertical direction, and as a result, the base 20 can be made thinner in the vertical direction.
　第１駆動部３１及び第１減速機３３は、第１アーム２１の下方に配置されている。この構成により、第１アーム２１の回転時に、第１駆動部３１及び第１減速機３３の双方が第１アーム２１と干渉するのを回避できる。また、第１駆動部３１及び第１減速機３３は、基台２０においてマスト６から離間した位置に設けられる。この構成によれば、熱源となる第１駆動部３１及び第１減速機３３がマスト６から離れるので、マスト６のリニアガイド２６、基台２０の被ガイド部２０ｃ等に対する熱影響を軽減することができる。 The first drive unit 31 and the first reducer 33 are disposed below the first arm 21. This configuration makes it possible to prevent both the first drive unit 31 and the first reducer 33 from interfering with the first arm 21 when the first arm 21 rotates. Furthermore, the first drive unit 31 and the first reducer 33 are provided at a position on the base 20 away from the mast 6. With this configuration, the first drive unit 31 and the first reducer 33, which are heat sources, are separated from the mast 6, so that the thermal effects on the linear guide 26 of the mast 6, the guided portion 20c of the base 20, etc. can be reduced.
　第１駆動部３１を駆動すると、第１減速機３３により減速されて出力軸３１ａを回転させる。出力軸３１ａとともにプーリ３１ｂが回転し、伝達ベルト３５を移動（周回移動）させる。この伝達ベルト３５の移動によりプーリ２７ａを回転させ、プーリ２７ａと一体の第１回転軸２７を回転させる。その結果、第１回転軸２７と一体の第１アーム２１は、基台２０に対して回転中心Ｐ１の軸まわりに回転する。なお、第１アーム２１の回転位置は、第１駆動部３１（電動モータ）のサーボ制御により保持可能である。 When the first drive unit 31 is driven, the speed is reduced by the first reducer 33 to rotate the output shaft 31a. The pulley 31b rotates together with the output shaft 31a, moving the transmission belt 35 (circular movement). This movement of the transmission belt 35 rotates the pulley 27a, which in turn rotates the first rotating shaft 27 integrated with the pulley 27a. As a result, the first arm 21 integrated with the first rotating shaft 27 rotates around the axis of the rotation center P1 relative to the base 20. The rotational position of the first arm 21 can be maintained by servo control of the first drive unit 31 (electric motor).
　なお、プーリ３１ｂの回転量に対するプーリ２７ａの回転量は、プーリ３１ｂ及びプーリ２７ａの直径の比により設定される。従って、プーリ２７ａの直径をプーリ３１ｂの直径より大きくすることで、プーリ３１ｂの回転を減速してプーリ２７ａの回転へと伝達できる。そのため、図９に示すように、第１駆動部３１に第１減速機３３を設けることに代えて、プーリ３１ｂ及びプーリ２７ａの直径を適宜設定することで減速機として機能させることが可能である。なお、プーリ３１ｂ及びプーリ２７ａに代えてスプロケットが用いられ、かつ伝達ベルト３５に代えて無端状のチェーンが用いられる形態であってもよい。 The amount of rotation of pulley 27a relative to the amount of rotation of pulley 31b is set by the ratio of the diameters of pulley 31b and pulley 27a. Therefore, by making the diameter of pulley 27a larger than the diameter of pulley 31b, the rotation of pulley 31b can be decelerated and transmitted to the rotation of pulley 27a. Therefore, as shown in FIG. 9, instead of providing the first reducer 33 in the first drive unit 31, it is possible to make the pulley 31b and pulley 27a function as a reducer by appropriately setting the diameters of the pulleys 31b and 27a. Note that sprockets may be used instead of pulley 31b and pulley 27a, and an endless chain may be used instead of the transmission belt 35.
　次に、第２アーム２２の駆動系について説明する。第２駆動部３２は、第１駆動部３１と同様に、例えば、電動モータと、電動モータの回転を検出するエンコーダとを備える。電動モータは、第２アーム２２を回転させるのに必要なトルクを発生するものが使用される。なお、第１駆動部３１の電動モータと第２駆動部３２の電動モータとは、同一であってもよいし、異なってもよい。第２駆動部３２は、第２減速機３４を介して第２アーム２２を回転駆動し、第２アーム２２を第１アーム２１に対して回転させる。第２駆動部３２は、上記した不図示の制御装置によって、回転が制御される。なお、制御装置が、エンコーダの検出結果を利用して、電動モータをサーボ制御する点は上記と同様である。 Next, the drive system of the second arm 22 will be described. As with the first drive unit 31, the second drive unit 32 includes, for example, an electric motor and an encoder that detects the rotation of the electric motor. An electric motor that generates the torque required to rotate the second arm 22 is used. The electric motor of the first drive unit 31 and the electric motor of the second drive unit 32 may be the same or different. The second drive unit 32 drives and rotates the second arm 22 via the second reducer 34, causing the second arm 22 to rotate relative to the first arm 21. The rotation of the second drive unit 32 is controlled by the control device (not shown) described above. As with the above, the control device servo-controls the electric motor using the detection results of the encoder.
　第２駆動部３２の出力は、第２減速機３４を介して減速された状態で出力軸３２ａに出力される。第２減速機３４は、第２駆動部３２から出力軸３２ａに伝達する回転を減速させる。第２減速機３４は、第２駆動部３２の近傍に配置される。この構成により、第２減速機３４が第２アーム２２と干渉するのを回避でき、第２アーム２２を支障なく回転させることができる。 The output of the second drive unit 32 is output to the output shaft 32a after being reduced in speed via the second reducer 34. The second reducer 34 reduces the speed of the rotation transmitted from the second drive unit 32 to the output shaft 32a. The second reducer 34 is disposed in the vicinity of the second drive unit 32. With this configuration, it is possible to prevent the second reducer 34 from interfering with the second arm 22, allowing the second arm 22 to rotate without hindrance.
　出力軸３２ａは、第２減速機３４から下方に突出した状態で設けられる。出力軸３２ａには、プーリ３２ｂが設けられる。また、第２回転軸２８には、プーリ２８ａが設けられる。第２回転軸２８は、第１アーム２１において回転可能に支持されている。プーリ３２ｂとプーリ２８ａとの間には、無端状の伝達ベルト３６が架け渡され、プーリ３２ｂの回転が伝達ベルト３５を介してプーリ２８ａに伝達される。 The output shaft 32a is provided so as to protrude downward from the second reducer 34. A pulley 32b is provided on the output shaft 32a. A pulley 28a is provided on the second rotating shaft 28. The second rotating shaft 28 is rotatably supported on the first arm 21. An endless transmission belt 36 is stretched between the pulleys 32b and 28a, and the rotation of the pulley 32b is transmitted to the pulley 28a via the transmission belt 35.
　第２駆動部３２を駆動すると、第２減速機３４により減速されて出力軸３２ａを回転させる。出力軸３２ａとともにプーリ３２ｂが回転し、伝達ベルト３６を移動（周回移動）させる。この伝達ベルト３６の移動によりプーリ２８ａを回転させ、プーリ２８ａと一体の第２回転軸２８を回転させる。その結果、第２回転軸２８と一体の第２アーム２２は、第１アーム２１に対して回転中心Ｐ２の軸まわりに回転する。なお、第２アーム２２の回転位置は、第２駆動部３２（電動モータ）のサーボ制御により保持可能である。また、第２駆動部３２の駆動タイミングは、第１駆動部３１の駆動タイミングと同時であってもよいし、異なるタイミングであってもよい。 When the second drive unit 32 is driven, the second reducer 34 reduces the speed and rotates the output shaft 32a. The pulley 32b rotates together with the output shaft 32a, moving (circulating) the transmission belt 36. This movement of the transmission belt 36 rotates the pulley 28a, which in turn rotates the second rotating shaft 28 integral with the pulley 28a. As a result, the second arm 22 integral with the second rotating shaft 28 rotates around the axis of the rotation center P2 relative to the first arm 21. The rotation position of the second arm 22 can be maintained by servo control of the second drive unit 32 (electric motor). The drive timing of the second drive unit 32 may be simultaneous with the drive timing of the first drive unit 31, or may be different.
　なお、プーリ３２ｂの回転量に対するプーリ２８ａの回転量は、プーリ３２ｂ及びプーリ２８ａの直径の比により設定される。従って、プーリ２８ａの直径をプーリ３２ｂの直径より大きくすることで、プーリ３２ｂの回転を減速してプーリ２８ａの回転へと伝達できる。そのため、図９に示すように、第２駆動部３２に第２減速機３４を設けることに代えて、プーリ３２ｂ及びプーリ２８ａの直径を適宜設定することで減速機として機能させることが可能である。なお、プーリ３２ｂ及びプーリ２８ａに代えてスプロケットが用いられ、かつ伝達ベルト３６に代えて無端状のチェーンが用いられる形態であってもよい。 The amount of rotation of pulley 28a relative to the amount of rotation of pulley 32b is set by the ratio of the diameters of pulley 32b and pulley 28a. Therefore, by making the diameter of pulley 28a larger than the diameter of pulley 32b, the rotation of pulley 32b can be reduced and transmitted to the rotation of pulley 28a. Therefore, as shown in FIG. 9, instead of providing a second reducer 34 in the second drive unit 32, it is possible to make the pulley 32b and pulley 28a function as a reducer by appropriately setting the diameters of the pulleys 32b and 28a. Note that sprockets may be used instead of pulley 32b and pulley 28a, and an endless chain may be used instead of the transmission belt 36.
　次に、物品保持部２３の駆動系について説明する。図９及び図１０に示すように、第２回転軸２８は、円筒状に形成されている。第２回転軸２８の内側には、支持軸３７が第２回転軸２８に対して挿通した状態で設けられる。支持軸３７は、回転中心Ｐ２の軸まわりに回転しないように、第１アーム２１に固定されている。つまり、第２回転軸２８が第１アーム２１に対して回転しても、支持軸３７は第１アーム２１に対して回転しないように構成されている。 Next, the drive system of the item holding unit 23 will be described. As shown in Figures 9 and 10, the second rotating shaft 28 is formed in a cylindrical shape. A support shaft 37 is provided inside the second rotating shaft 28 in a state where it is inserted through the second rotating shaft 28. The support shaft 37 is fixed to the first arm 21 so as not to rotate around the axis of the rotation center P2. In other words, even if the second rotating shaft 28 rotates relative to the first arm 21, the support shaft 37 is configured not to rotate relative to the first arm 21.
　支持軸３７の上端には、プーリ３７ａが設けられる。プーリ３７ａは、第２アーム２２内に配置される。物品保持部２３と一体の第３回転軸２９には、プーリ２９ａが設けられる。第３回転軸２９は、第２アーム２２において回転可能に支持されている。プーリ３７ａとプーリ２９ａとの間には、無端状の伝達ベルト３８が架け渡され、プーリ３７ａの回転が伝達ベルト３８を介してプーリ２９ａに伝達される。 A pulley 37a is provided at the upper end of the support shaft 37. The pulley 37a is disposed within the second arm 22. A pulley 29a is provided on a third rotating shaft 29 that is integral with the item holding section 23. The third rotating shaft 29 is rotatably supported by the second arm 22. An endless transmission belt 38 is stretched between the pulleys 37a and 29a, and the rotation of the pulley 37a is transmitted to the pulley 29a via the transmission belt 38.
　第２駆動部３２を駆動して第２アーム２２を回転させると、上記したように、第２アーム２２及び第２回転軸２８は、第１アーム２１に対して回転中心Ｐ２の軸まわりに回転する。このとき、支持軸３７が第１アーム２１に固定されているので、支持軸３７及びプーリ３７ａは、第２アーム２２に対して回転することになる。すなわち、第２アーム２２の回転時に、第２回転軸２８と支持軸３７とは相対的に回転する。プーリ３７ａが回転することで伝達ベルト３８を移動（周回移動）させ、プーリ２９ａ及び第３回転軸２９を回転させる。その結果、第３回転軸２９と一体の物品保持部２３は、第２アーム２２に対して回転中心Ｐ３の軸まわりに回転する。つまり、物品保持部２３は、第２アーム２２の回転に同期して、第２アーム２２に対して回転する。 When the second drive unit 32 is driven to rotate the second arm 22, as described above, the second arm 22 and the second rotating shaft 28 rotate around the axis of the rotation center P2 relative to the first arm 21. At this time, since the support shaft 37 is fixed to the first arm 21, the support shaft 37 and the pulley 37a rotate relative to the second arm 22. That is, when the second arm 22 rotates, the second rotating shaft 28 and the support shaft 37 rotate relatively. The rotation of the pulley 37a moves (circulates) the transmission belt 38, rotating the pulley 29a and the third rotating shaft 29. As a result, the item holding unit 23 integrated with the third rotating shaft 29 rotates around the axis of the rotation center P3 relative to the second arm 22. That is, the item holding unit 23 rotates relative to the second arm 22 in synchronization with the rotation of the second arm 22.
　物品保持部２３は、第１アーム２１に対する第２アーム２２の回転位置が保持されることで、その回転位置が保持される。物品保持部２３の向きは、棚３に対して物品ＯＢの受け渡しを行う状態まで第１アーム２１及び第２アーム２２を回転させた際、平面視において物品保持部２３の先端部分が棚３の切り欠き部３ａ内に収まるように設定される（図５参照）。物品保持部２３の向きは、プーリ３７ａとプーリ２９ａとの回転比により設定される。プーリ３７ａとプーリ２９ａとを所望の回転比とするには、プーリ３７ａの直径、及びプーリ２９ａの直径を適宜設定することで実現される。なお、プーリ３７ａ及びプーリ２９ａに代えてスプロケットが用いられ、かつ伝達ベルト３８に代えて無端状のチェーンが用いられる形態であってもよい。 The rotational position of the article holding unit 23 is maintained by maintaining the rotational position of the second arm 22 relative to the first arm 21. The orientation of the article holding unit 23 is set so that when the first arm 21 and the second arm 22 are rotated to a state where the article OB can be transferred to the shelf 3, the tip of the article holding unit 23 fits within the cutout portion 3a of the shelf 3 in a plan view (see FIG. 5). The orientation of the article holding unit 23 is set by the rotation ratio of the pulley 37a and the pulley 29a. The desired rotation ratio of the pulley 37a and the pulley 29a can be achieved by appropriately setting the diameter of the pulley 37a and the diameter of the pulley 29a. Note that a configuration in which sprockets are used instead of the pulleys 37a and 29a, and an endless chain is used instead of the transmission belt 38 may also be used.
　本実施形態では、物品保持部２３を第２アーム２２に対して回転させるために上記した形態を適用しているが、この形態に限定されない。物品保持部２３を回転させるために、例えば電動モータ等の駆動部が用いられてもよい。この場合、駆動部（電動モータ等）は、第２駆動部３２と同様に、第１アーム２１の第２端部２１ｂ側に配置され、伝達ベルトによって支持軸３７を回転中心Ｐ２の軸まわりに回転させることで、物品保持部２３を第２アーム２２に対して回転させる形態が適用されてもよい。 In this embodiment, the above-mentioned configuration is applied to rotate the item holding part 23 relative to the second arm 22, but this configuration is not limited to this. A drive unit such as an electric motor may be used to rotate the item holding part 23. In this case, the drive unit (electric motor, etc.) is arranged on the second end 21b side of the first arm 21, similar to the second drive unit 32, and a configuration may be applied in which the support shaft 37 is rotated around the axis of the rotation center P2 by a transmission belt, thereby rotating the item holding part 23 relative to the second arm 22.
　なお、上記した説明では、物品ＯＢを受け渡すために、物品保持部２３を＋Ｙ方向に移動させる場合について説明しているが、物品保持部２３を－Ｙ方向に移動させる場合についても同様である。すなわち、図２に示すように、搬送装置１の－Ｙ側に棚３が配置されている場合についても、この－Ｙ側の棚３に対して物品ＯＢを受け渡す場合、移載機構４の動作は、上記した説明と同様である。図１１は、移載機構４において、物品ＯＢを基台２０の上方に配置した他の例を示す平面図である。 Note that the above explanation describes the case where the item holding unit 23 is moved in the +Y direction to transfer the item OB, but the same applies to the case where the item holding unit 23 is moved in the -Y direction. That is, even if a shelf 3 is arranged on the -Y side of the transport device 1 as shown in Figure 2, when transferring an item OB to the shelf 3 on the -Y side, the operation of the transfer mechanism 4 is the same as that described above. Figure 11 is a plan view showing another example in which the item OB is arranged above the base 20 in the transfer mechanism 4.
　図１１に示すように、第１アーム２１及び第２アーム２２をそれぞれ所定角度位置（待機位置又は物品保持位置）にすることで、物品保持部２３を基台２０の上方に位置させることができる。このとき、第１アーム２１は、図４に示す位置から１８０度回転した状態となっている。物品保持部２３は、－Ｙ方向に向けられている。物品ＯＢは、載置面２３ａに載置されて基台２０の上方に配置される。なお、図１１に示す状態で、搬送装置１は、走行台車５によってＸ方向に移動可能であり、また、移載機構４を昇降可能である。 As shown in FIG. 11, the first arm 21 and the second arm 22 can be respectively placed at a predetermined angular position (standby position or item holding position) to position the item holding section 23 above the base 20. At this time, the first arm 21 is rotated 180 degrees from the position shown in FIG. 4. The item holding section 23 is facing in the -Y direction. The item OB is placed on the placement surface 23a and positioned above the base 20. In the state shown in FIG. 11, the transport device 1 can be moved in the X direction by the traveling cart 5, and the transfer mechanism 4 can be raised and lowered.
　図１２は、移載機構４において、物品ＯＢを受け渡す他の例を示す平面図である。図１２に示すように、第１駆動部３１及び第２駆動部３２を駆動して、第１アーム２１及び第２アーム２２をそれぞれ所定角度位置（受け渡し位置）にすることで、物品保持部２３を－Ｙ方向に移動させ、棚３の上方又は下方に差し込むことができる。棚３に対する物品ＯＢの受け渡しの動作は、上記した図４及び図５に関する説明と同様である。このように、本実施形態の移載機構４は、＋Ｙ側及び－Ｙ側の棚３に対してそれぞれ物品ＯＢを受け渡すことができる。 FIG. 12 is a plan view showing another example of transferring an item OB in the transfer mechanism 4. As shown in FIG. 12, by driving the first drive unit 31 and the second drive unit 32 to place the first arm 21 and the second arm 22 in a predetermined angular position (transfer position), the item holding unit 23 can be moved in the -Y direction and inserted above or below the shelf 3. The operation of transferring an item OB to the shelf 3 is the same as that described above with reference to FIGS. 4 and 5. In this way, the transfer mechanism 4 of this embodiment can transfer an item OB to the shelves 3 on the +Y side and -Y side, respectively.
　図１３は、基台２０を裏面側から見た図である。図１３に示すように、基台２０の水平部分２０ａでは、第１駆動部３１が水平部分２０ａの先端側（鉛直部分２０ｂとは反対側）に設けられている。一方、水平部分２０ａのうち第１回転軸２７を挟んで第１駆動部３１と反対側には駆動部等が設けられない。この部分は空間部分として基台２０の軽量化を図ることも可能であるが、物品ＯＢが重くなると基台２０（特に水平部分２０ａ）の剛性が不足する可能性がある。 Figure 13 is a view of the base 20 as seen from the back side. As shown in Figure 13, in the horizontal portion 20a of the base 20, the first drive unit 31 is provided at the tip side of the horizontal portion 20a (the opposite side to the vertical portion 20b). On the other hand, no drive unit or the like is provided on the opposite side of the horizontal portion 20a to the first drive unit 31 across the first rotation shaft 27. This portion can be used as a space to reduce the weight of the base 20, but if the object OB becomes heavy, the rigidity of the base 20 (especially the horizontal portion 20a) may be insufficient.
　従って、基台２０の水平部分２０ａには、第１駆動部３１とマスト６との間において、上下方向に沿ったリブ４１が設けられる、本実施形態では、水平部分２０ａにおいて、第１回転軸２７と鉛直部分２０ｂとの間の空間部分に複数のリブ４１が設けられる。物品ＯＢ等の荷重は、第１回転軸２７に作用する。従って、リブ４１は、第１回転軸２７に大きな荷重が作用した場合を考慮してＸ方向、Ｙ方向、Ｘ方向及びＹ方向を合成した方向、並びに第１回転軸２７を囲んだ曲線方向に延びるように設けられる。基台２０にリブ４１が設けられることで、基台２０の軽量化を図りつつ、基台２０の剛性を高めることができる。なお、図１３に示すリブ４１の形態は一例であり、基台２０の剛性を高めることが可能であれば、リブ４１の形態は任意である。 Therefore, the horizontal part 20a of the base 20 is provided with a rib 41 along the vertical direction between the first drive unit 31 and the mast 6. In this embodiment, a plurality of ribs 41 are provided in the horizontal part 20a in the space between the first rotation shaft 27 and the vertical part 20b. The load of the object OB acts on the first rotation shaft 27. Therefore, the rib 41 is provided so as to extend in the X direction, the Y direction, a direction obtained by combining the X direction and the Y direction, and a curved direction surrounding the first rotation shaft 27, taking into consideration the case where a large load acts on the first rotation shaft 27. By providing the rib 41 on the base 20, the rigidity of the base 20 can be increased while reducing the weight of the base 20. Note that the shape of the rib 41 shown in FIG. 13 is one example, and the shape of the rib 41 is arbitrary as long as it is possible to increase the rigidity of the base 20.
　このように、本実施形態によれば、第２駆動部３２が第１アーム２１において第１アーム２１の回転中心Ｐ１から見た第２端部２１ｂ側であって第２アーム２２の回転軌道Ｒ２から外れた位置に設けられるため、第２アーム２２が回転する際に第２駆動部３２と干渉することを回避できる。そのため、第１アーム２１と第２アーム２２との上下方向の間隔を拡げる必要がなく、上下方向に薄型化した移載機構４を実現できる。また、第２駆動部３２が第１アーム２１に設けられるので、基台２０の大型化を回避できる。 In this way, according to this embodiment, the second drive unit 32 is provided on the first arm 21 at a position on the second end 21b side as viewed from the rotation center P1 of the first arm 21 and away from the rotation path R2 of the second arm 22, so that interference with the second drive unit 32 when the second arm 22 rotates can be avoided. Therefore, there is no need to increase the vertical distance between the first arm 21 and the second arm 22, and a transfer mechanism 4 that is thin in the vertical direction can be realized. Also, because the second drive unit 32 is provided on the first arm 21, it is possible to avoid an increase in the size of the base 20.
　以上、本発明の実施形態について説明したが、本発明の技術的範囲は、上記した実施形態に限定されない。上記した実施形態に、多様な変更又は改良を加えることが可能であることは当業者において明らかである。また、そのような変更又は改良を加えた形態も本発明の技術的範囲に含まれる。上記した実施形態で説明した要件の１つ以上は、省略されることがある。また、上記した実施形態で説明した要件は、適宜組み合わせることができる。さらに、法律で許可される範囲内で、日本特許出願番号２０２２－１５３３４４および上記の実施形態で引用された全ての文献の開示は、本文の記載の一部として参照されることとする。 Although the embodiments of the present invention have been described above, the technical scope of the present invention is not limited to the above-mentioned embodiments. It will be clear to those skilled in the art that various modifications or improvements can be made to the above-mentioned embodiments. Furthermore, forms with such modifications or improvements are also included in the technical scope of the present invention. One or more of the requirements described in the above-mentioned embodiments may be omitted. Furthermore, the requirements described in the above-mentioned embodiments may be combined as appropriate. Furthermore, to the extent permitted by law, the disclosures of Japanese Patent Application No. 2022-153344 and all documents cited in the above-mentioned embodiments are incorporated by reference as part of the description in this text.
　上記した実施形態では、第１駆動部３１が基台２０に配置される形態を例に挙げて説明しているが、この形態に限定されない。例えば、第１駆動部３１は、第１アーム２１に設けられる形態であってもよい。この場合、第１駆動部３１は、第２駆動部３２と同様に、第１アーム２１の第２端部２１ｂ側に配置され、第２駆動部３２とともにカバー２５内に収容される形態であってもよい。 In the above embodiment, the first drive unit 31 is arranged on the base 20, but the present invention is not limited to this. For example, the first drive unit 31 may be provided on the first arm 21. In this case, the first drive unit 31 may be arranged on the second end 21b side of the first arm 21, similar to the second drive unit 32, and may be housed together with the second drive unit 32 within the cover 25.
　また、上記した実施形態では、保管装置２が１台の搬送装置１を備える形態を例に挙げて説明しているが、この形態に限定されない。例えば、保管装置２に２台以上の搬送装置１を備える形態であってもよい。また、上記した実施形態では、搬送装置１、及び保管装置２の棚３が床Ｆに設置された形態を例に挙げて説明しているが、この形態に限定されない。搬送装置１及び棚３のうちの一方又は双方が天井Ｃから吊り下げられて構成される形態であってもよい。 In addition, in the above embodiment, the storage device 2 is described as having one transport device 1, but this is not limited to this. For example, the storage device 2 may have two or more transport devices 1. In addition, in the above embodiment, the storage device 2 is described as having the transport device 1 and the shelf 3 of the storage device 2 installed on the floor F, but this is not limited to this. One or both of the transport device 1 and the shelf 3 may be suspended from the ceiling C.
ＯＢ・・・物品
Ｐ１、Ｐ２、Ｐ３・・・回転中心
１・・・搬送装置
２・・・保管装置
３・・・棚
４・・・移載機構
５・・・走行台車
６・・・マスト
２０・・・基台
２１・・・第１アーム
２１ａ・・・第１端部（一方の端部）
２１ｂ・・・第２端部（他方の端部）
２１ｃ・・・上面
２２・・・第２アーム
２２ａ・・・基端部
２２ｂ・・・先端部
２２ｃ・・・上面
２２ｄ・・・下面
２３・・・物品保持部
２３ａ・・・載置面
２５・・・カバー
２５ａ・・・上面
２７・・・第１回転軸
２８・・・第２回転軸
２９・・・第３回転軸
２７ａ、２８ａ、２９ａ、３１ｂ、３２ｂ、３７ａ・・・プーリ
３１・・・第１駆動部
３２・・・第２駆動部
３２ｃ・・・上面
３３・・・第１減速機
３４・・・第２減速機
３５、３６、３８・・・伝達ベルト
４１・・・リブ OB...Items P1, P2, P3...Center of rotation 1...Transportation device 2...Storage device 3...Shelf 4...Transfer mechanism 5...Traveling cart 6...Mast 20...Base 21...First arm 21a...First end (one end)
21b: Second end (the other end)
21c...upper surface 22...second arm 22a...base end 22b...tip end 22c...upper surface 22d...lower surface 23...article holding portion 23a...mounting surface 25...cover 25a...upper surface 27...first rotating shaft 28...second rotating shaft 29...third rotating shaft 27a, 28a, 29a, 31b, 32b, 37a...pulley 31...first drive portion 32...second drive portion 32c...upper surface 33...first reducer 34... second reducer 35, 36, 38...transmission belt 41...rib

Claims (11)

  1. 　走行台車と、前記走行台車に立設されるマストと、前記マストに配置されて物品を移載する移載機構と、を備え、
    　前記移載機構は、前記マストに沿って昇降する基台と、前記基台に回転可能に支持される第１アームと、前記第１アームに回転可能に支持される第２アームと、物品を保持しかつ前記第２アームに支持される物品保持部と、前記第１アームを回転させる第１駆動部と、前記第２アームを回転させる第２駆動部と、を有し、
    　前記第２アームの回転中心は、前記第１アームにおいて前記第１アームの回転中心から見た一方の端部側に配置され、
    　前記第２駆動部は、前記第１アームの上面において前記第１アームの回転中心から見た他方の端部側であって前記第２アームの回転軌道から外れた位置に設けられる、搬送装置。     The present invention relates to a transport vehicle, a mast that is erected on the transport vehicle, and a transfer mechanism that is disposed on the mast and transfers an article,
    the transfer mechanism includes a base that moves up and down along the mast, a first arm rotatably supported on the base, a second arm rotatably supported on the first arm, an article holding unit that holds an article and is supported by the second arm, a first drive unit that rotates the first arm, and a second drive unit that rotates the second arm;
    a rotation center of the second arm is disposed on one end side of the first arm as viewed from the rotation center of the first arm,
    A transport device, wherein the second drive unit is provided on the upper surface of the first arm at a position on the other end side of the first arm as viewed from the center of rotation of the first arm and away from the rotation orbit of the second arm.
  2. 　前記第２駆動部の上面は、前記第２アームの下面よりも高い、請求項１に記載の搬送装置。 The conveying device according to claim 1, wherein the upper surface of the second drive unit is higher than the lower surface of the second arm.
  3. 　前記物品保持部は、物品を載置する載置面を有し、
    　前記第２駆動部の上面は、前記物品保持部の前記載置面よりも低い、請求項１に記載の搬送装置。     The article holding portion has a placement surface on which an article is placed,
    The transport device according to claim 1 , wherein an upper surface of the second drive portion is lower than the placement surface of the article holder.
  4. 　前記第２駆動部は、前記第１アームに備えるカバーの内部に格納され、
    　前記カバーの上面は、前記載置面よりも低い、請求項３に記載の搬送装置。     The second driving unit is stored inside a cover provided on the first arm,
    The transport device according to claim 3 , wherein an upper surface of the cover is lower than the placement surface.
  5. 　前記第２駆動部の近傍に、前記第２駆動部から前記第２アームに伝達する回転を減速させる第２減速機を備える、請求項１に記載の搬送装置。 The conveying device according to claim 1, further comprising a second reducer disposed near the second drive unit to reduce the speed of rotation transmitted from the second drive unit to the second arm.
  6. 　前記第１アームの下方に、前記第１駆動部、及び前記第１駆動部から前記第１アームに伝達する回転を減速させる第１減速機を備える、請求項１に記載の搬送装置。 The conveying device according to claim 1, further comprising: a first drive unit below the first arm; and a first reducer that reduces the speed of rotation transmitted from the first drive unit to the first arm.
  7. 　前記第１駆動部及び第１減速機は、前記基台において前記マストから離間した位置に設けられる、請求項６に記載の搬送装置。 The conveying device according to claim 6, wherein the first drive unit and the first reducer are provided at a position on the base spaced apart from the mast.
  8. 　前記基台は、前記第１駆動部と前記マストとの間において、上下方向に沿ったリブを有する、請求項７に記載の搬送装置。 The conveying device according to claim 7, wherein the base has a rib extending in the vertical direction between the first drive unit and the mast.
  9. 　前記移載機構は、前記走行台車の走行方向に対して左右両側に物品を移載可能である、請求項１に記載の搬送装置。 The conveying device according to claim 1, wherein the transfer mechanism is capable of transferring objects to both the left and right sides of the traveling direction of the traveling carriage.
  10. 　前記物品保持部は、前記第２アームの回転に同期して、前記第２アームに対して回転する、請求項１に記載の搬送装置。 The conveying device according to claim 1, wherein the item holder rotates relative to the second arm in synchronization with the rotation of the second arm.
  11. 　物品を保管する棚と、
    　前記棚との間で物品を移載する請求項１から請求項１０のいずれか一項に記載の搬送装置と、を備える、保管装置。     Shelves for storing items;
    A storage device comprising: a conveying device according to any one of claims 1 to 10, which transfers an article between the shelf and the conveying device.
PCT/JP2023/033029 2022-09-27 2023-09-11 Conveyance device and storage device WO2024070630A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-153344 2022-09-27
JP2022153344 2022-09-27

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188193U (en) * 1982-06-10 1983-12-14 株式会社シマノ work robot
JPS60238286A (en) * 1984-05-10 1985-11-27 ダイキン工業株式会社 Robot for assembly operation
JPS6464787A (en) * 1987-09-04 1989-03-10 Nippon Seiko Kk Joint type robot
JPH02237783A (en) * 1989-03-13 1990-09-20 Hitachi Ltd Industrial robot
JP2004071925A (en) * 2002-08-08 2004-03-04 Nikon Corp Substrate loader and exposure system
JP2016055988A (en) * 2014-09-10 2016-04-21 村田機械株式会社 Transfer device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188193U (en) * 1982-06-10 1983-12-14 株式会社シマノ work robot
JPS60238286A (en) * 1984-05-10 1985-11-27 ダイキン工業株式会社 Robot for assembly operation
JPS6464787A (en) * 1987-09-04 1989-03-10 Nippon Seiko Kk Joint type robot
JPH02237783A (en) * 1989-03-13 1990-09-20 Hitachi Ltd Industrial robot
JP2004071925A (en) * 2002-08-08 2004-03-04 Nikon Corp Substrate loader and exposure system
JP2016055988A (en) * 2014-09-10 2016-04-21 村田機械株式会社 Transfer device

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