WO2024023875A1 - Temperature sensor - Google Patents

Temperature sensor Download PDF

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Publication number
WO2024023875A1
WO2024023875A1 PCT/JP2022/028579 JP2022028579W WO2024023875A1 WO 2024023875 A1 WO2024023875 A1 WO 2024023875A1 JP 2022028579 W JP2022028579 W JP 2022028579W WO 2024023875 A1 WO2024023875 A1 WO 2024023875A1
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WO
WIPO (PCT)
Prior art keywords
heat
heat receiving
temperature sensor
axial direction
holder
Prior art date
Application number
PCT/JP2022/028579
Other languages
French (fr)
Japanese (ja)
Inventor
厚 高橋
Original Assignee
株式会社芝浦電子
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社芝浦電子 filed Critical 株式会社芝浦電子
Priority to JP2023505678A priority Critical patent/JP7274676B1/en
Priority to PCT/JP2022/028579 priority patent/WO2024023875A1/en
Priority to CN202280007805.1A priority patent/CN116940815A/en
Publication of WO2024023875A1 publication Critical patent/WO2024023875A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
    • G01K1/143—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations for measuring surface temperatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16—Special arrangements for conducting heat from the object to the sensitive element
    • G01K1/18—Special arrangements for conducting heat from the object to the sensitive element for reducing thermal inertia
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor

Definitions

  • the present invention relates to a temperature sensor that can measure temperature by contacting the surface of an object to be measured.
  • Patent Document 1 falls under this category.
  • the temperature sensor disclosed in Patent Document 1 has a contact surface on the back surface that makes surface contact with the front surface of the object to be measured and receives heat from the object to be measured, and a housing portion for the thermistor element on the back surface.
  • a heat receiving component is provided, and a resin holder is formed to fit and hold the heat receiving component. According to the temperature sensor disclosed in Patent Document 1, the installation work is easy and the surface temperature of the object to be measured can be accurately measured.
  • an object of the present invention is to provide a temperature sensor that can accurately measure the surface temperature of an object to be measured and has improved thermal responsiveness.
  • the temperature sensor of the present invention includes a sensor element having a heat sensitive body extending in the axial direction, a pair of electric wires (15, 17) electrically connected to the heat sensitive body, and the heat sensitive body is housed along the axial direction,
  • the heat receiving body includes a storage chamber closed around the axial direction and a heat receiving surface that contacts the object to be measured and receives heat from the object to be measured.
  • the heat receiving body includes a base body having a heat receiving surface and a surface facing the heat receiving surface, and a holder provided on the side of the facing surface and integrally formed with the base body having a storage chamber.
  • the holding body has a shape in which the outer periphery in a cross section perpendicular to the axial direction is convex in a direction away from the opposing surface.
  • a height direction that is orthogonal to the axial direction and in which the base and the holding body are lined up, and a width direction that is orthogonal to both the axial direction and the height direction are defined.
  • the widthwise dimension W31 of the base body and the widthwise dimension W35 of the holder have a relationship of W31>W35.
  • the outer periphery of the holding body in a cross section perpendicular to the axial direction has an arch shape in which the central portion is convex in the direction away from the opposing surface.
  • the holder has a smaller heat capacity than the base.
  • the storage chamber is provided across the holding body and the base body. It is preferable that this storage chamber is formed so as to be recessed toward the heat receiving surface rather than the opposing surface.
  • the storage chamber is open on the side from which the pair of electric wires are pulled out, and closed on the opposite side.
  • the temperature sensor of the present invention since the heat receiving body contacts the object to be measured and receives heat from the object to be measured, the accuracy of the measured temperature is high.
  • the temperature sensor of the present invention since the holder has a shape in which the outer periphery in a cross section perpendicular to the axial direction is convex in a direction away from the opposing surface, the temperature sensor is housed in the holder.
  • the heat sensitive body has excellent thermal responsiveness.
  • FIG. 1 is a plan view and a partially enlarged sectional view showing a temperature sensor according to an embodiment.
  • FIG. 3 is a diagram showing a sensor element of a temperature sensor according to an embodiment.
  • FIG. 3 is a diagram showing a heat receiving body of a temperature sensor according to an embodiment. It is a figure which shows the heat receiving body produced in the process of obtaining the temperature sensor based on embodiment. It is a graph which shows the evaluation result of the thermal response in temperature measurement when a box-type heat receiving body is applied. It is a graph which shows the evaluation result of the thermal response in temperature measurement when an arch-shaped heat receiving body is applied.
  • FIG. 3 is a diagram showing the difference in heat transfer between an arch-shaped heat receiving body and a box-shaped heat receiving body. It is a figure which shows the modification of this embodiment. It is a figure which shows the other modification of this embodiment.
  • the temperature sensor 1 measures the temperature of the object to be measured 100 by having its heat receiving surface 32 in surface contact with the flat measurement surface 101 of the object to be measured 100 .
  • the temperature sensor 1 can realize temperature measurement with high thermal responsiveness by specifying the shape of the heat receiving body 30 including the heat receiving surface 32.
  • the temperature sensor 1 includes a sensor element 10 and a heat receiving body 30 that holds a heat sensitive body 11 of the sensor element 10 and receives heat from the measured object 100 by coming into contact with the measured object 100.
  • the heat receiving body 30 holds the heat sensitive body 11 of the sensor element 10 along the axial direction (C) of a holding body 35, which will be described later.
  • the temperature sensor 1 is placed parallel to the object to be measured 100, and this parallel arrangement is referred to as lateral placement of the temperature sensor 1 with respect to the object to be measured 100.
  • the side on which the heat sensitive body 11 is provided is defined as the front (F), and the opposite side is defined as the rear (R).
  • the definitions of front (F) and rear (R) have relative meanings.
  • the sensor element 10 includes a heat sensitive body 11, a glass coating layer 13 that covers the circumference of the heat sensitive body 11, a pair of first electric wires 15, 15 electrically connected to the heat sensitive body 11, and a first electric wire 15, 15, and second electric wires 17, 17 electrically connected to the other ends of the electric wires 15, respectively.
  • the first electric wires 15, 15 and the second electric wires 17, 17 that are electrically connected constitute a pair of electric wires in the present invention.
  • the heat sensitive body 11 has a spindle shape that is long in the axial direction C. It is preferable to use a thermistor as the heat sensitive body 11, for example.
  • a thermistor is an abbreviation for thermally sensitive resistor, and it is a metal oxide that detects temperature by utilizing the property that its electrical resistance changes with temperature.
  • platinum resistors, thermocouples, etc. can be used as other heat sensitive bodies.
  • Thermistors are classified into NTC (negative temperature coefficient) thermistors and PTC (positive temperature coefficient) thermistors, and the present embodiment can use either type of thermistor.
  • An oxide sintered body whose basic composition is manganese oxide (Mn 3 O 4 ) having a typical spinel structure as an NTC thermistor can be used for the heat sensitive body 11 .
  • An oxide sintered body having a composition of M x Mn 3-x O 4 which is obtained by adding M element (one or more of Ni, Co, Fe, Cu, Al, and Cr) to this basic composition, is used as a heat sensitive body 11. It can also be used for.
  • one or more of V, B, Ba, Bi, Ca, La, Sb, Sr, Ti, and Zr can be added.
  • a complex oxide having a perovskite structure typical of a PTC thermistor for example, an oxide sintered body having a basic structure of YCrO 3 can be used for the heat sensitive body 11 .
  • the coating layer 13 seals the heat sensitive body 11 and maintains it in an airtight state, thereby preventing the occurrence of chemical and physical changes in the heat sensitive body 11 due to the environmental conditions around which the temperature sensor 1 is used. , mechanically protects the heat sensitive body 11.
  • the covering layer 13 covers the entire heat sensitive body 11 as well as the front ends of the first electric wires 15, 15, and seals the first electric wires 15, 15. Note that providing the covering layer 13 is only a preferred form in the present invention, and it is sufficient to provide the heat sensitive body 11 without providing the covering layer 13.
  • the first electric wires 15, 15 are electrically connected to electrodes of the heat sensitive body 11, which are not shown. Since the first electric wires 15, 15 are sealed by the coating layer 13, Dumet wires having a linear expansion coefficient close to that of glass are preferably used. Note that a Dumet wire is an electric wire that uses an alloy mainly composed of iron and nickel as a conductor core wire, and covers the core wire with copper (JIS H4541).
  • the second electric wires 17, 17 include core wires 17A, 17A made of a conductor, and insulating coatings 17B, 17B that cover the core wires 17A, 17A.
  • the second electric wires 17, 17 are called two-core parallel wires or simply parallel wires.
  • the front ends of the core wires 17A, 17A of the second electric wires 17, 17 are electrically connected to the first electric wires 15, 15, respectively, by welding, soldering, conductive adhesive, or the like.
  • the core wires 17A, 17A of the pair of second electric wires 17, 17 are exposed at their front end portions, which are connected to the first electric wires 15, 15, and at their rear end portions, which are connected to the control equipment of the temperature sensor 1, which is not shown. It is said that The second electric wire 17 is not limited in linear expansion coefficient like the first electric wire 15, and can be made of any material as long as it has predetermined heat resistance and durability.
  • the insulating tubes 16, 16 cover the first electric wires 15, 15 and provide electrical insulation between the first electric wires 15, 15.
  • the insulating tube 16 is made of a highly heat-resistant resin material such as polyetheretherketone (PEEK) or polyimide (PI).
  • PEEK polyetheretherketone
  • PI polyimide
  • the protective tubes 18, 18 cover the insulating tubes 16, 16 and the second electric wires 17, 17, and protect the core wires 17A, 17A from oxidation, staining, etc. while ensuring insulation between the two wires.
  • the protective tubes 18, 18 are made of, for example, crosslinked fluoroelastomer.
  • the heat receiving body 30 includes a base body 31 that is placed on the measurement target, and a holder 35 that is connected to the base body 31 and accommodates and holds the front (F) portion of the sensor element 10 that includes the heat sensitive body 11 therein.
  • a base body 31 and the holding body 35 are integrally formed.
  • they may be produced as separate bodies, and then they may be joined and integrated.
  • the front (F) portion of the sensor element 10 is accommodated in the holder 35, and the surrounding area is sealed with a filler 41 to fix the portion.
  • the shape of the heat receiving body 30 including the base body 31 and the holding body 35 is sometimes referred to as an arch shape.
  • the arch shape is a curved line whose central portion is convex in the direction away from the facing surface 34.
  • an axial direction (C), a width direction (W), and a height direction (H) are defined.
  • FIG. 3 includes a perspective view, a partial plan sectional view (PV), a bottom view (BV), a front view (FV), and a rear view (RV) of the heat receiving body 30.
  • the base body 31 has a rectangular parallelepiped appearance and includes a rectangular heat receiving surface 32 that is in surface contact with the flat measurement surface 101 of the measurement object 100.
  • the base body 31 includes side surfaces 33A, 33B, 33C, and 33D that extend perpendicularly to the heat receiving surface 32 and are connected to each of the four sides of the heat receiving surface 32.
  • the base body 31 includes a facing surface 34 parallel to the heat receiving surface 32 and spaced apart from each other in the height direction (H).
  • the opposing surface 34 has a rectangular shape, and side surfaces 33A, 33B, 33C, and 33D are connected to each of its four sides.
  • the heat receiving surface 32 has a portion that protrudes outward from the holder 35 in the width direction (W). Therefore, the heat receiving surface 32 can secure a large area. Further, the heat receiving surface 32 of the heat receiving body 30 of the temperature sensor 1 in which the sensor element 10 is placed horizontally has a dimension in the axial direction (C) corresponding to the dimension of the heat sensitive body 11 and the coating layer 13 in the axial direction (C). There is a need. Therefore, compared to a temperature sensor in which the sensor element 10 is placed vertically, the heat receiving surface 32 inevitably has a larger area.
  • the holding body 35 is formed integrally with the base body 31 at the center of the base body 31 in the width direction (W).
  • the holder 35 rises from the opposing surface 34 in the height direction (H) and extends over the entire area of the opposing surface 34 in the axial direction (C).
  • the holding body 35 has a semi-cylindrical cross section perpendicular to the width direction (W) and along the height direction (H), and its outer periphery 36 has an arch shape, typically a circular arc shape. There is. If the outer periphery 36 has an arch shape in this way, the distance from the outer periphery 36 to the storage chamber 37 can be made approximately equal, so that the thermal influence in the circumferential direction inside the storage chamber 37 is equalized, so that measurement can be performed easily.
  • the dimension W31 in the width direction (W) of the base body 31 and the dimension W35 in the width direction (W) of the holder (35) have a relationship of W31>W35. Preferable for evenness. Ends 35F and 35R of the holder 35 in the axial direction (C) are flush with the side surfaces 33A and 33B, respectively. Since the holder 35 is disposed at the center of the base 31 in the width direction (W), opposing surfaces 34 are formed on both sides of the holder 35 in the width direction (W). Therefore, by applying a load toward the heat receiving surface 32 to the opposing surface 34, the heat receiving body 30 can be pressed against the measurement object 100.
  • the heat receiving body 30 can be fixed to the measurement object 100 by providing a fastening means so as to penetrate the opposing surface 34 or the base body 31.
  • the base body 31 having a portion wider in the width direction (W) than the holder 35 also contributes to attachment of the heat receiving body 30 to the measurement target 100.
  • the holding body 35 is formed in a semi-cylindrical shape, its volume is smaller than that of the base body 31. Since the base body 31 and the holder 35 are integrally formed and made of the same material, the heat capacity of the holder 35 is considerably smaller than that of the base body 31. Therefore, the thermal responsiveness of the holder 35 is higher than that of the base 31.
  • the holding body 35 is provided with a storage chamber 37 having a circular opening shape. Inside this housing chamber 37, the heat sensitive body 11 (coating layer 13) of the sensor element 10 and a portion of the first electric wires 15, 15 are housed along the axial direction C. Then, by filling the accommodating portion 37 with the filler 41, the heat sensitive body 11 of the sensor element 10 and a portion of the first electric wires 15, 15 are fixed and held inside the accommodating chamber 37. Therefore, the accommodation chamber 37 has a volume sufficient to accommodate the part and the amount of filler 41 necessary to fix and hold the part. Since the opening shape of the storage chamber 37 is circular, the distances of the heat sensitive elements 11 fixed to the storage chamber 37 from the outer periphery of the storage chamber 37 are approximately equal in the circumferential direction.
  • the heat transferred to the heat sensitive body 11 via the filler 41 and the coating layer 13 becomes approximately uniform in the circumferential direction, so that the accuracy of the measured temperature can be increased.
  • the heat sensitive body 11 held in the storage chamber 37 along the axial direction C is substantially parallel to the measurement surface 101 of the measurement target 100, and is connected to the heat sensitive body 11 by a pair of first electric wires 15, 15 and a pair of The second electric wires 17, 17 are also drawn out in a direction parallel to the measurement surface 101. Therefore, the first electric wires 15, 15 and the pair of second electric wires 17, 17 are arranged close to the measurement surface 101.
  • the storage chamber 37 is surrounded in its radial direction by the base body 31 and the holding body 35. Further, the storage chamber 37 is formed along the axial direction (C), and as a preferable form, the rear end portion 37R located at the rear (R) is open, while the rear end portion 37R located at the rear (R) is open, while the rear end portion 37R located at the rear (R) is open, while the rear end portion 37R located at the rear (R) The located front end 37F is closed.
  • the heat sensitive body 11 (coating layer 13) is arranged on the front end portion 37F side, and the first electric wires 15, 15 are drawn out from the rear end portion 37R side. In this way, the accommodation chamber 37 is a closed space except for the rear end portion 37R.
  • the filler 41 in a molten state is supplied to the storage chamber 37, and then the sensor element 10 is inserted into the storage chamber 37 from the heat sensitive body 11 side, and then the filler 41 is hardened. In this process, since the front end 37F is closed, the molten filler 41 can be easily stored inside the storage chamber 37 by turning the front end 37F downward.
  • Filler 41 is preferably composed of epoxy resin, but other materials can also be used.
  • the storage chamber 37 has a circular opening in a cross section perpendicular to the axial direction (C). Moreover, the accommodation chamber 37 is formed across the holding body 35 and the base body 31 in a cross section perpendicular to the axial direction (C) of the heat receiving body 30 . In other words, the accommodation chamber 37 extends beyond the boundary line BL between the holder 35 and the base body 31 and extends into the base body 31, and the accommodation chamber 37 reaches closer to the heat receiving surface 32 than the opposing surface 34.
  • the fact that the housing chamber 37 penetrates into the base body 31 is a factor that contributes to improving the thermal responsiveness of temperature measurement in the temperature sensor 1. This thermal responsiveness is evaluated by a thermal time constant, and the measurement results of the thermal time constant regarding the temperature sensor 1 will be described later.
  • the heat receiving body 30 includes a base body 31 having a relatively large heat capacity and a holding body 35 having a relatively small heat capacity.
  • the base body 31 has a heat receiving surface 32 in contact with the measuring surface 101 of the measuring object 100 and receives heat from the measuring object 100, and also receives heat from the measuring object 100 and directs the heat toward the heat sensitive element 11 and the holder 35 arranged inside the storage chamber 37. Transfer heat.
  • the base body 31 exhibits heat receiving and heat transfer functions.
  • the holding body 35 exhibits a heat transfer function of transferring heat transferred from the base body 31 toward the heat sensitive body 11 disposed inside the storage chamber 37 .
  • the spindle-shaped heat sensitive body 11 has a dimension in the axial direction C that is larger than a dimension in the radial direction. Therefore, in the temperature sensor 1 in which the heat sensitive body 11 is placed horizontally, the dimensions of the accommodation chamber 37 and, by extension, the base body 31 in the axial direction C inevitably become large, and the area of the heat receiving surface 32 also becomes large.
  • the heat receiving body 30 is preferably formed by integrally forming the base body 31 and the holding body 35, and the material thereof is selected depending on the measurement object 100 to which the temperature sensor 1 is applied, particularly depending on the measured temperature. Ru.
  • the heat receiving body 30 can be formed from ceramics, metal materials, and resin materials.
  • Aluminum nitride (AlN), silicon nitride (Si 3 N 4 ), aluminum oxide (Al 2 O 3 ), zirconium oxide (ZrO 2 ), and silicon carbide (SiC) are known as ceramics, but they have poor thermal conductivity.
  • Aluminum nitride, aluminum oxide, and silicon carbide, which have excellent properties, are preferably used for the heat receiving body 30.
  • a molded body having a similar shape to the heat receiving body 30 is produced by press molding from raw material powder having a predetermined composition, and then the molded body is sintered.
  • the heat receiving body 30 made of a metal material may be a cast body formed using a mold having a cavity of the same shape as the heat receiving body 30, a body cut out of the heat receiving body 30 from a block made of a metal material, or a molded body made of metal powder. There are sintered bodies obtained by sintering bodies.
  • the resin material polyphenylene sulfide (PPS), polyetheretherketone (PEEK), polyimide (PI), polyamideimide (PAI), etc., which have heat resistance exceeding 200°C, can be used.
  • the heat receiving body 30 made of a resin material is produced as an injection molded body.
  • FIG. 4 shows the heat receiving body 130 used in this analysis.
  • the heat receiving body 130 is entirely formed in the shape of a rectangular parallelepiped, and has a heat receiving surface 132, side surfaces 133A, 133B, 133C, and 133D, and an opposing surface 134, and a holding chamber 137 is formed therein. Inside the holding chamber 137, as in the case of the heat receiving body 30 shown in FIG. It is fixed and held inside the holding chamber 137 by the filler 41 . Note that in order to distinguish it from the arch-shaped heat receiving body 30, the heat receiving body 130 is sometimes referred to as a box type.
  • the dimension T indicates the length from the side surface 133B to the front end 137F of the holding chamber 137, and the dimension t indicates the length from the heat receiving surface 132 to the holding chamber 137.
  • the dimension t has a greater influence on the thermal response than the dimension T.
  • the heat receiving body 130 subjected to evaluation is an integral molded body made of an aluminum alloy (JIS A2017).
  • the material constituting the heat receiving body 130 aluminum alloy, aluminum oxide sintered body (Al 2 O 3 ), polyphenylene sulfide (PPS) resin, etc. can be used.
  • Thermal responsiveness corresponds to the magnitude of thermal conductivity, and if an aluminum alloy or the like having high thermal conductivity is used, high thermal responsiveness can be obtained.
  • a material having lower thermal conductivity than aluminum alloy or the like such as a ceramic material or a resin material, is used.
  • the thermal conductivity of each material is shown below.
  • the level of this thermal response corresponds to the time it takes for the heat received by the heat receiving surface 32 from the measurement surface 101 of the measurement object 100 to be transmitted to the holding chamber 137.
  • the thermal response of the temperature sensor 1 using the arch-shaped heat receiving body 30 was analyzed based on the Taguchi design in the same manner as above.
  • Several factors were varied in this analysis as well. That is, as in patterns X, Y, and Z shown in FIG. 6, the dimension L in the height direction (H) was changed, and the position of the storage chamber 37 in the height direction (H) was changed.
  • pattern Y follows the form of the heat receiving body 30, and the accommodation chamber 37 extends over the holder 35 and the base 31, but in patterns X and Z, the accommodation chamber 37 is within the range of the holder 35. It fits and does not reach the base body 31.
  • the heat receiving body 30 was made of two types of materials: an aluminum alloy (JIS A2017) and an aluminum oxide sintered body (Al 2 O 3 : 96 vol.%).
  • JIS A2017 JIS A2017
  • Al 2 O 3 aluminum oxide sintered body
  • the thermal time constant when epoxy resin is used as the filler 41 is as follows, and extremely excellent thermal response can be obtained.
  • Aluminum alloy JIS A2017: 0.5 seconds
  • Aluminum oxide sintered body Al 2 O 3 : 96 vol.%): 0.7 seconds
  • the heat receiving body 30 includes the base body 31 and the holder 35, and as described above, the heat capacity C31 of the base body 31 and the heat capacity C35 of the holder 35 have a relationship of heat capacity C31>heat capacity C35. Then, heat is transferred to the base 31 from the measurement target 100, and the heat received by the base 31 is transferred to the holder 35.
  • the thermal response of the holder 35 due to the transferred heat is faster than that of the base 31. Therefore, the thermal response of the storage chamber 37 provided inside the holding body 35 also becomes relatively fast.
  • the base body 31 of the arch-shaped heat receiving body 30 is considered to be continuous to the end in the height direction (H). That is, since the heat receiving body 130 does not have a portion having a small heat capacity like the heat receiving body 30, the thermal response of the holding chamber 137 is relatively slow compared to that of the storage chamber 37.
  • FIG. 7 An illustration of the accommodation chamber 37 straddling the holding body 35 and the base body 31: FIG. 7]
  • the accommodation chamber 37 straddles the holding body 35 and the base body 31, so that the distance of the accommodation chamber 37 to the measuring object 100 with which the heat receiving surface 32 is in contact is small. Therefore, the heat responsiveness of the heat receiving body 30 is superior to that of a heat receiving body 30 of the same size in which the accommodation chamber 37 is provided only inside the holding body 35.
  • heat is transmitted to the accommodation chamber 37 that has entered the base body 31 from both sides in the width direction (W), so that the thermal response is even more excellent.
  • the reason why heat is transferred to the storage chamber 37 from both sides in the width direction (W) is as follows.
  • the heat received by the base 31 is transmitted away from the heat receiving surface 32 and upward in the height direction (H), reaching the opposing surface 34.
  • the opposing surface 34 has a portion continuous to the holder 35 and a portion opened to the outside and directly in contact with air.
  • the heat reaching the portion connected to the holder 35 and its vicinity is transmitted to the holder 35.
  • the heat conductivity of the air is poor in the portion directly in contact with the air, the heat is transmitted toward the center in the width direction (W), in other words, toward the storage chamber 37. Since the storage chamber 37 receives heat transfer from both sides of the storage chamber 37 in the width direction (W), the thermal response in the storage chamber 37 is excellent.
  • a temperature sensor in which the axial direction C of the sensor element is perpendicular to the measurement surface 101 of the measurement target 100 is referred to as a vertically mounted temperature sensor.
  • the horizontally placed temperature sensor 1 can reduce the height dimension (H) of the heat receiving body 30 compared to the vertically placed temperature sensor, so it can reduce heat dissipation (heat removal) from the heat receiving body 30 to the surroundings. Can be reduced.
  • the first electric wire 15 and the second electric wire 17 are drawn out parallel to the measurement surface 101 and are arranged close to the measurement surface 101, so that the temperature sensor 1 is placed close to the measurement surface 101.
  • heat radiation from the first electric wire 15 and the second electric wire 17 can be reduced.
  • the heat receiving surface 32 of the heat receiving body 30 of the horizontally placed temperature sensor 1 has a portion that protrudes outward from the holding body 35 in the width direction (W), its area can be increased.
  • the heat receiving surface 32 of the heat receiving body 30 has a larger area than the heat receiving surface of a vertically placed heat receiving body in order to correspond to the dimensions of the heat sensitive body 11 and the coating layer 13 in the axial direction (C). In this way, by making the heat receiving surface 32 wider, the heat receiving body 30 receives a larger amount of heat, so that the temperature sensor 1 can have high thermal responsiveness.
  • the heat receiving body 30A in FIG. 8 shows an example in which the accommodation chamber 37 may be provided only in the holder 35, as shown by the broken line, or the accommodation chamber 37 may be brought closer to the heat receiving surface 32.
  • the heat receiving body 30B in FIG. 8 shows an example in which the accommodation chamber 37 can be provided offset from the center of the holder 35 in the width direction (W), as shown by the broken line.
  • the heat receiving body 30C in FIG. 8 shows an example in which the holding body 35C has a rectangular cross section.
  • the present invention has the possibility of being applied to a holder having a polygonal shape other than a semicircular or rectangular shape, for example.
  • the heat receiving body 30D in FIG. 8 shows an example in which the opening shape of the storage chamber 37D is rectangular.
  • the present invention can be applied to an opening shape of the storage chamber 37D other than a circular or rectangular shape, for example, a polygonal shape.
  • the dimension of the holder 35E in the axial direction (C) is smaller than that of the base body 31, and conversely, in the heat receiving body 30F of FIG. is larger than the base body 31.
  • the heat receiving body 30G in FIG. 9 shows an example in which the planar shape of the base body 31G is circular.
  • the present invention can be applied to a planar shape of the base 31G other than circular or rectangular, for example, having a polygonal shape.
  • the heat receiving body 30H in FIG. 9 shows an example in which the planar shape of the holding body 35H is circular.
  • the present invention has the applicability of the planar shape of the holder 35 having, for example, a polygonal shape other than circular and rectangular.
  • Temperature sensor 10 Sensor element 11 Heat sensitive body 13 Covering layer 15 First electric wire 16 Insulation tube 17 Second electric wire 17A, 17A Core wire 17B, 17B Insulation coating 18 Protective tube 30, 30A, 30B, 30C, 30D, 30E, 30F, 30G , 30H, 130 Heat receiving body 31, 31G Base body 32, 132 Heat receiving surface 33A, 33B, 33C, 33D, 133A, 133B, 133C, 133D Side surface 34, 134 Opposing surface 35, 35C, 35E, 35H Holding body 36 Outer periphery 37, 37D , 137 Storage chamber 37F Front end 37R Rear end 41 Filler 100 Measurement object 101 Measurement surface BL Boundary line

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  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

This temperature sensor is provided with: a sensor element (10) comprising a heat-sensitive body (11) which extends in the axial direction (C), and a pair of electric wires (15, 17) which are electrically connected to the heat-sensitive body (11); and a heat receiving body (30) comprising an accommodation chamber (37) in which the heat-sensitive body (11) is accommodated along the axial direction (C) and which is enclosed around the axial direction (C), and a heat receiving surface (32) which comes into contact with a measurement object (100) and receives heat from the measurement object (100). The heat receiving body (30) comprises: a substrate (31) that includes the heat receiving surface (32) and an opposite surface (34) opposite to the heat receiving surface (32); and a holding body (35) that is provided on the opposite surface (34) side, has the accommodation chamber (37) therein, and is formed integrally with the substrate (31). The holding body (35) has a shape in which the outer circumference at a cross section perpendicular to the axial direction (C) projects in directions away from the opposite surface (34).

Description

温度センサtemperature sensor
　本発明は、測定対象物の表面に接触して温度を測定できる温度センサに関する。 The present invention relates to a temperature sensor that can measure temperature by contacting the surface of an object to be measured.
　測定対象物の表面温度を測定する温度センサとして、測定対象物の平面に面で接触する検知面または受熱面を備えるものがある。例えば、特許文献１がこれに該当する。
　特許文献１に開示される温度センサは、測定対象物のおもて面に面接触して測定対象物からの熱を受熱する接触面をうら面に備えるとともにサーミスタ素子の収納部をうら面に備える受熱部品と、受熱部品を嵌合保持するように形成され樹脂ホルダと、を備える。特許文献１の温度センサによれば、取り付け作業が簡単で、測定対象物の表面温度を正確に測定ができる、とされている。 2. Description of the Related Art Some temperature sensors that measure the surface temperature of an object are equipped with a sensing surface or a heat-receiving surface that makes surface contact with the flat surface of the object. For example, Patent Document 1 falls under this category.
The temperature sensor disclosed in Patent Document 1 has a contact surface on the back surface that makes surface contact with the front surface of the object to be measured and receives heat from the object to be measured, and a housing portion for the thermistor element on the back surface. A heat receiving component is provided, and a resin holder is formed to fit and hold the heat receiving component. According to the temperature sensor disclosed in Patent Document 1, the installation work is easy and the surface temperature of the object to be measured can be accurately measured.
特開２０１２－１４５５２７号公報Japanese Patent Application Publication No. 2012-145527
　温度センサは、測定温度の正確性に加えて、測定対象物の温度変化に対する熱応答性が速いことが望まれる。ところが、特許文献１の温度センサは、熱応答性の点で改善の余地があった。
　そこで本発明は、測定対象物の表面温度を正確に測定ができるとともに、熱応答性が改善された温度センサを提供することを目的とする。 In addition to accuracy in measuring temperature, temperature sensors are desired to have quick thermal response to temperature changes of the object to be measured. However, the temperature sensor of Patent Document 1 has room for improvement in terms of thermal responsiveness.
SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a temperature sensor that can accurately measure the surface temperature of an object to be measured and has improved thermal responsiveness.
　本発明の温度センサは、軸線方向に延びる感熱体と、感熱体に電気的に接続される一対の電線（１５，１７）とを有するセンサ素子と、感熱体が軸線方向に沿って納められ、軸線方向の周りに閉じられた収容室と、測定対象物に接触して測定対象物から熱を受ける受熱面と、を有する受熱体とを備える。
　受熱体は、受熱面と、受熱面に対する対向面とを有する基体と、対向面の側に設けられ、収容室を有する基体と一体的に形成される保持体と、を備える。
　保持体は、軸線方向に直交する横断面における外周が、対向面から離れる向きに凸となる形状を有している。 The temperature sensor of the present invention includes a sensor element having a heat sensitive body extending in the axial direction, a pair of electric wires (15, 17) electrically connected to the heat sensitive body, and the heat sensitive body is housed along the axial direction, The heat receiving body includes a storage chamber closed around the axial direction and a heat receiving surface that contacts the object to be measured and receives heat from the object to be measured.
The heat receiving body includes a base body having a heat receiving surface and a surface facing the heat receiving surface, and a holder provided on the side of the facing surface and integrally formed with the base body having a storage chamber.
The holding body has a shape in which the outer periphery in a cross section perpendicular to the axial direction is convex in a direction away from the opposing surface.
　受熱体において、軸線方向に直交し基体と保持体とが並ぶ高さ方向と、軸線方向と高さ方向の両方に直交する幅方向と、が定義される。対向面において、基体の幅方向の寸法Ｗ３１と、保持体の幅方向の寸法Ｗ３５とが、Ｗ３１＞Ｗ３５の関係を有することが好ましい。 In the heat receiving body, a height direction that is orthogonal to the axial direction and in which the base and the holding body are lined up, and a width direction that is orthogonal to both the axial direction and the height direction are defined. On the opposing surface, it is preferable that the widthwise dimension W31 of the base body and the widthwise dimension W35 of the holder have a relationship of W31>W35.
　保持体は、軸線方向に直交する横断面における外周が、対向面から離れる向きに中央部が凸となるアーチ型を有していることが好ましい。 It is preferable that the outer periphery of the holding body in a cross section perpendicular to the axial direction has an arch shape in which the central portion is convex in the direction away from the opposing surface.
　保持体は、基体よりも熱容量か小さいことが好ましい。 It is preferable that the holder has a smaller heat capacity than the base.
　収容室は、保持体と基体に跨って設けられることが好ましい。
　この収容室は、対向面よりも受熱面に向けて凹んで形成されていることが好ましい。 It is preferable that the storage chamber is provided across the holding body and the base body.
It is preferable that this storage chamber is formed so as to be recessed toward the heat receiving surface rather than the opposing surface.
　収容室は、一対の電線が引き出される側が開口し、その逆側が閉じられていることが好ましい。 It is preferable that the storage chamber is open on the side from which the pair of electric wires are pulled out, and closed on the opposite side.
　本発明の温度センサによれば、受熱体が測定対象物に接触して測定対象物から熱を受けるので、測定温度の精度が高い。加えて、本発明の温度センサによれば、保持体が、軸線方向に直交する横断面における外周が、対向面から離れる向きに凸となる形状を有しているので、保持体に収容される感熱体の熱応答性が優れる。 According to the temperature sensor of the present invention, since the heat receiving body contacts the object to be measured and receives heat from the object to be measured, the accuracy of the measured temperature is high. In addition, according to the temperature sensor of the present invention, since the holder has a shape in which the outer periphery in a cross section perpendicular to the axial direction is convex in a direction away from the opposing surface, the temperature sensor is housed in the holder. The heat sensitive body has excellent thermal responsiveness.
実施形態に係る温度センサを示す平面図および部分拡大断面図である。FIG. 1 is a plan view and a partially enlarged sectional view showing a temperature sensor according to an embodiment. 実施形態に係る温度センサのセンサ素子を示す図である。FIG. 3 is a diagram showing a sensor element of a temperature sensor according to an embodiment. 実施形態に係る温度センサの受熱体を示す図である。FIG. 3 is a diagram showing a heat receiving body of a temperature sensor according to an embodiment. 実施形態に係る温度センサを得る過程で作製した受熱体を示す図である。It is a figure which shows the heat receiving body produced in the process of obtaining the temperature sensor based on embodiment. ボックス型の受熱体を適用した場合の温度測定における熱応答性の評価結果を示すグラフである。It is a graph which shows the evaluation result of the thermal response in temperature measurement when a box-type heat receiving body is applied. アーチ型の受熱体を適用した場合の温度測定における熱応答性の評価結果を示すグラフである。It is a graph which shows the evaluation result of the thermal response in temperature measurement when an arch-shaped heat receiving body is applied. アーチ型の受熱体とボックス型の受熱体の熱伝達の違いを示す図である。FIG. 3 is a diagram showing the difference in heat transfer between an arch-shaped heat receiving body and a box-shaped heat receiving body. 本実施形態の変形例を示す図である。It is a figure which shows the modification of this embodiment. 本実施形態の他の変形例を示す図である。It is a figure which shows the other modification of this embodiment.
　以下、添付図面を参照しながら、本発明の実施形態について説明する。
　実施形態に係る温度センサ１は、一例として、その受熱面３２が測定対象物１００の平坦な測定面１０１に面で接触して測定対象物１００の温度を測定する。温度センサ１は、受熱面３２を備える受熱体３０の形状を特定することにより、高熱応答性を有する温度測定を実現できる。 Embodiments of the present invention will be described below with reference to the accompanying drawings.
As an example, the temperature sensor 1 according to the embodiment measures the temperature of the object to be measured 100 by having its heat receiving surface 32 in surface contact with the flat measurement surface 101 of the object to be measured 100 . The temperature sensor 1 can realize temperature measurement with high thermal responsiveness by specifying the shape of the heat receiving body 30 including the heat receiving surface 32.
［温度センサ１の全体構成：図１］
　温度センサ１は、センサ素子１０と、センサ素子１０の感熱体１１を保持するとともに、測定対象物１００と接触して測定対象物１００からの熱を受ける受熱体３０と、を備える。受熱体３０は、後述する保持体３５の軸線方向（Ｃ）に沿ってセンサ素子１０の感熱体１１を保持する。温度センサ１は測定対象物１００と平行に配置されるが、この平行な配置のことを、温度センサ１が測定対象物１００に対する横置き、と称する。
　なお、温度センサ１において、図１などに示すように、感熱体１１が設けられる側を前（Ｆ）と定義し、その逆の側を後（Ｒ）と定義する。この前（Ｆ）、後（Ｒ）の定義は相対的な意味を有するものとする。 [Overall configuration of temperature sensor 1: Figure 1]
The temperature sensor 1 includes a sensor element 10 and a heat receiving body 30 that holds a heat sensitive body 11 of the sensor element 10 and receives heat from the measured object 100 by coming into contact with the measured object 100. The heat receiving body 30 holds the heat sensitive body 11 of the sensor element 10 along the axial direction (C) of a holding body 35, which will be described later. The temperature sensor 1 is placed parallel to the object to be measured 100, and this parallel arrangement is referred to as lateral placement of the temperature sensor 1 with respect to the object to be measured 100.
In the temperature sensor 1, as shown in FIG. 1 and the like, the side on which the heat sensitive body 11 is provided is defined as the front (F), and the opposite side is defined as the rear (R). The definitions of front (F) and rear (R) have relative meanings.
［センサ素子１０：図１，図２］
　センサ素子１０は、感熱体１１と、感熱体１１の周囲を覆うガラス製の被覆層１３と、感熱体１１に電気的に接続される一対の第１電線１５，１５と、第１電線１５，１５のそれぞれの他端に電気的に接続される第２電線１７，１７と、を備えている。電気的に接続される第１電線１５，１５と第２電線１７，１７により本発明における一対の電線が構成される。 [Sensor element 10: Figures 1 and 2]
The sensor element 10 includes a heat sensitive body 11, a glass coating layer 13 that covers the circumference of the heat sensitive body 11, a pair of first electric wires 15, 15 electrically connected to the heat sensitive body 11, and a first electric wire 15, 15, and second electric wires 17, 17 electrically connected to the other ends of the electric wires 15, respectively. The first electric wires 15, 15 and the second electric wires 17, 17 that are electrically connected constitute a pair of electric wires in the present invention.
［感熱体１１］
　感熱体１１は、軸線方向Ｃに長い紡錘形状を有している。感熱体１１は、例えば、サーミスタを用いることが好ましい。サーミスタはthermally sensitive resistorの略称であり、温度によって電気抵抗が変化する性質を利用して温度を検出する金属酸化物である。他の感熱体として、白金抵抗体、熱電対などを使用できる。
　サーミスタは、ＮＴＣ（negative temperature coefficient）サーミスタとＰＴＣ（positive temperature coefficient）に区分されるが、本実施形態はいずれのサーミスタをも使用できる。 [Thermosensitive body 11]
The heat sensitive body 11 has a spindle shape that is long in the axial direction C. It is preferable to use a thermistor as the heat sensitive body 11, for example. A thermistor is an abbreviation for thermally sensitive resistor, and it is a metal oxide that detects temperature by utilizing the property that its electrical resistance changes with temperature. As other heat sensitive bodies, platinum resistors, thermocouples, etc. can be used.
Thermistors are classified into NTC (negative temperature coefficient) thermistors and PTC (positive temperature coefficient) thermistors, and the present embodiment can use either type of thermistor.
　ＮＴＣサーミスタとして典型的なスピネル構造を有するマンガン酸化物（Ｍｎ３Ｏ４）を基本組成とする酸化物焼結体を感熱体１１に用いることができる。この基本構成にＭ元素（Ｎｉ、Ｃｏ、Ｆｅ、Ｃｕ、ＡｌおよびＣｒの１種又は２種以上）を加えたＭｘＭｎ３－ｘＯ４の組成を有する酸化物焼結体を感熱体１１に用いることもできる。さらに、Ｖ、Ｂ、Ｂａ、Ｂｉ、Ｃａ、Ｌａ、Ｓｂ、Ｓｒ、ＴｉおよびＺｒの１種又は２種以上を加えることができる。
　また、ＰＴＣサーミスタとして典型的なペロブスカイト構造を有する複合酸化物、例えばＹＣｒＯ３を基本構成とする酸化物焼結体を感熱体１１に用いることができる。 An oxide sintered body whose basic composition is manganese oxide (Mn 3 O 4 ) having a typical spinel structure as an NTC thermistor can be used for the heat sensitive body 11 . An oxide sintered body having a composition of M x Mn 3-x O 4 , which is obtained by adding M element (one or more of Ni, Co, Fe, Cu, Al, and Cr) to this basic composition, is used as a heat sensitive body 11. It can also be used for. Furthermore, one or more of V, B, Ba, Bi, Ca, La, Sb, Sr, Ti, and Zr can be added.
Further, a complex oxide having a perovskite structure typical of a PTC thermistor, for example, an oxide sintered body having a basic structure of YCrO 3 can be used for the heat sensitive body 11 .
［被覆層１３：図１，図２］
　被覆層１３は、感熱体１１を封止して気密状態に保持することによって、温度センサ１が用いられる周囲の環境条件に由来する感熱体１１の化学的、物理的変化の発生を防止するとともに、感熱体１１を機械的に保護する。被覆層１３は、感熱体１１の全体に加えて第１電線１５，１５の前端を覆い、第１電線１５，１５を封着する。
　なお、被覆層１３を設けることは、本発明において好ましい形態にすぎず、被覆層１３を設けることなく感熱体１１だけでも足りる。 [Coating layer 13: Figures 1 and 2]
The coating layer 13 seals the heat sensitive body 11 and maintains it in an airtight state, thereby preventing the occurrence of chemical and physical changes in the heat sensitive body 11 due to the environmental conditions around which the temperature sensor 1 is used. , mechanically protects the heat sensitive body 11. The covering layer 13 covers the entire heat sensitive body 11 as well as the front ends of the first electric wires 15, 15, and seals the first electric wires 15, 15.
Note that providing the covering layer 13 is only a preferred form in the present invention, and it is sufficient to provide the heat sensitive body 11 without providing the covering layer 13.
［第１電線１５：図１、図２］
　第１電線１５，１５は、図示を省略する感熱体１１の電極に電気的に接続される。
　第１電線１５，１５は、被覆層１３により封着されるため、線膨張係数がガラスと近いジュメット線（Dumet wires）が好適に用いられる。なお、ジュメット線は、鉄とニッケルを主成分とする合金を導電体である芯線として用い、そのまわりを銅で覆った電線である（ＪＩＳ　Ｈ４５４１）。 [First electric wire 15: Figures 1 and 2]
The first electric wires 15, 15 are electrically connected to electrodes of the heat sensitive body 11, which are not shown.
Since the first electric wires 15, 15 are sealed by the coating layer 13, Dumet wires having a linear expansion coefficient close to that of glass are preferably used. Note that a Dumet wire is an electric wire that uses an alloy mainly composed of iron and nickel as a conductor core wire, and covers the core wire with copper (JIS H4541).
［第２電線１７：図１、図２］
　第２電線１７，１７は、導電体からなる芯線１７Ａ，１７Ａと、芯線１７Ａ，１７Ａを覆う絶縁被覆１７Ｂ，１７Ｂと、を備える。第２電線１７，１７は、２芯平行線、または単に平行線と称されている。第２電線１７，１７は、芯線１７Ａ，１７Ａの前端が第１電線１５，１５とそれぞれが溶接、半田や導電性接着剤などにより電気的に接続される。一対の第２電線１７，１７の芯線１７Ａ，１７Ａは、第１電線１５，１５と接続される前端部分、および、図示が省略される温度センサ１の制御機器と接続される後端部分が剥き出しとされている。
　第２電線１７は、第１電線１５のように線膨張係数の制約がなく、所定の耐熱性、耐久性を備えている限り、任意の材質を選択できる。 [Second electric wire 17: Figures 1 and 2]
The second electric wires 17, 17 include core wires 17A, 17A made of a conductor, and insulating coatings 17B, 17B that cover the core wires 17A, 17A. The second electric wires 17, 17 are called two-core parallel wires or simply parallel wires. The front ends of the core wires 17A, 17A of the second electric wires 17, 17 are electrically connected to the first electric wires 15, 15, respectively, by welding, soldering, conductive adhesive, or the like. The core wires 17A, 17A of the pair of second electric wires 17, 17 are exposed at their front end portions, which are connected to the first electric wires 15, 15, and at their rear end portions, which are connected to the control equipment of the temperature sensor 1, which is not shown. It is said that
The second electric wire 17 is not limited in linear expansion coefficient like the first electric wire 15, and can be made of any material as long as it has predetermined heat resistance and durability.
［絶縁チューブ１６，保護チューブ１８：図１，図２］
　絶縁チューブ１６，１６は、第１電線１５，１５を被覆し、第１電線１５，１５の相互の電気的絶縁性を図る。絶縁チューブ１６は、例えばポリエーテルエーテルケトン（ＰＥＥＫ）、ポリイミド（ＰＩ）などの耐熱性の高い樹脂材料から構成される。
　保護チューブ１８，１８は、絶縁チューブ１６，１６および第２電線１７，１７を被覆し、２線間の絶縁性を担保しつつ芯線１７Ａ，１７Ａを酸化や汚損等から保護する。保護チューブ１８，１８は、例えば架橋フッ素エラストマなどから構成される。 [Insulating tube 16, protective tube 18: Figures 1 and 2]
The insulating tubes 16, 16 cover the first electric wires 15, 15 and provide electrical insulation between the first electric wires 15, 15. The insulating tube 16 is made of a highly heat-resistant resin material such as polyetheretherketone (PEEK) or polyimide (PI).
The protective tubes 18, 18 cover the insulating tubes 16, 16 and the second electric wires 17, 17, and protect the core wires 17A, 17A from oxidation, staining, etc. while ensuring insulation between the two wires. The protective tubes 18, 18 are made of, for example, crosslinked fluoroelastomer.
［受熱体３０：図１，図３］
　次に、図１および図３を参照して、受熱体３０を説明する。
　受熱体３０は、測定対象物に載せられる基体３１と、基体３１に連なり、感熱体１１を含むセンサ素子１０の前方（Ｆ）の部分を内部に収容し、保持する保持体３５と、を備える。ここでは基体３１と保持体３５とが一体的に形成されている例が示されているが、それぞれを別体として作製し、その後に両者を接合して一体化してもよい。センサ素子１０の前方（Ｆ）の部分は、保持体３５に収容され、充填剤４１により周囲が封止されて当該部分が固定される。なお、基体３１と保持体３５を備える受熱体３０の形態をアーチ型と称することがある。アーチ型とは、対向面３４から離れる向きに中央部が凸となる曲線からなる。
　受熱体３０において、図３に示すように、軸線方向（Ｃ）、幅方向（Ｗ）および高さ方向（Ｈ）が定義される。また、図３は、受熱体３０の斜視図、部分平断面図（ＰＶ）、底面図（ＢＶ）、正面図（ＦＶ）および背面図（ＲＶ）を含んでいる。 [Heat receiving body 30: Figures 1 and 3]
Next, the heat receiving body 30 will be explained with reference to FIGS. 1 and 3.
The heat receiving body 30 includes a base body 31 that is placed on the measurement target, and a holder 35 that is connected to the base body 31 and accommodates and holds the front (F) portion of the sensor element 10 that includes the heat sensitive body 11 therein. . Although an example in which the base body 31 and the holding body 35 are integrally formed is shown here, they may be produced as separate bodies, and then they may be joined and integrated. The front (F) portion of the sensor element 10 is accommodated in the holder 35, and the surrounding area is sealed with a filler 41 to fix the portion. Note that the shape of the heat receiving body 30 including the base body 31 and the holding body 35 is sometimes referred to as an arch shape. The arch shape is a curved line whose central portion is convex in the direction away from the facing surface 34.
In the heat receiving body 30, as shown in FIG. 3, an axial direction (C), a width direction (W), and a height direction (H) are defined. Further, FIG. 3 includes a perspective view, a partial plan sectional view (PV), a bottom view (BV), a front view (FV), and a rear view (RV) of the heat receiving body 30.
　基体３１は、好適な一例として、直方体状の外観を有し、測定対象物１００の平坦な測定面１０１と面接触する矩形状の受熱面３２を備える。基体３１は、受熱面３２の四つの辺のそれぞれに連なり受熱面３２に対して垂直に立ち上がる側面３３Ａ，３３Ｂ，３３Ｃ，３３Ｄを備える。また、基体３１は、受熱面３２と高さ方向（Ｈ）に間隔を隔てて平行な対向面３４を備える。対向面３４は矩形状をなしており、その四つの辺のそれぞれには側面３３Ａ，３３Ｂ，３３Ｃ，３３Ｄが連なっている。 As a preferred example, the base body 31 has a rectangular parallelepiped appearance and includes a rectangular heat receiving surface 32 that is in surface contact with the flat measurement surface 101 of the measurement object 100. The base body 31 includes side surfaces 33A, 33B, 33C, and 33D that extend perpendicularly to the heat receiving surface 32 and are connected to each of the four sides of the heat receiving surface 32. Further, the base body 31 includes a facing surface 34 parallel to the heat receiving surface 32 and spaced apart from each other in the height direction (H). The opposing surface 34 has a rectangular shape, and side surfaces 33A, 33B, 33C, and 33D are connected to each of its four sides.
　受熱面３２は、幅方向（Ｗ）において、保持体３５から外側に突き出す部分がある。そのために、受熱面３２は面積を広く確保できる。また、センサ素子１０が横置きされる温度センサ１の受熱体３０の受熱面３２は、軸線方向（Ｃ）における感熱体１１および被覆層１３の寸法に対応する軸線方向（Ｃ）の寸法を有する必要がある。そのために、センサ素子１０が縦置きとされる温度センサに比べて、受熱面３２は必然的にその面積が広くなる。 The heat receiving surface 32 has a portion that protrudes outward from the holder 35 in the width direction (W). Therefore, the heat receiving surface 32 can secure a large area. Further, the heat receiving surface 32 of the heat receiving body 30 of the temperature sensor 1 in which the sensor element 10 is placed horizontally has a dimension in the axial direction (C) corresponding to the dimension of the heat sensitive body 11 and the coating layer 13 in the axial direction (C). There is a need. Therefore, compared to a temperature sensor in which the sensor element 10 is placed vertically, the heat receiving surface 32 inevitably has a larger area.
　保持体３５は、基体３１の幅方向（Ｗ）の中央に基体３１と一体的に形成される。保持体３５は、対向面３４から高さ方向（Ｈ）に立ち上がり、かつ、対向面３４の軸線方向（Ｃ）の全域に亘って延設されている。保持体３５は、幅方向（Ｗ）に直交しかつ高さ方向（Ｈ）に沿う横断面が半円筒形状を有しており、その外周３６がアーチ型、典型的には円弧形状をなしている。このように外周３６がアーチ型をなしていれば、外周３６から収容室３７までの距離を略均等にできるので、収容室３７の内部における周方向の熱的な影響が均等になるため、測定温度の精度を高くできる。対向面３４において、基体３１の幅方向（Ｗ）の寸法Ｗ３１と、保持体（３５）の幅方向（Ｗ）の寸法Ｗ３５とが、Ｗ３１＞Ｗ３５の関係を有することが、熱的な影響が均等になるために好ましい。

　保持体３５の軸方向（Ｃ）の端部３５Ｆ，３５Ｒは、それぞれ側面３３Ａ，３３Ｂと面一になっている。保持体３５は、基体３１の幅方向（Ｗ）の中央に配置されているため、保持体３５の幅方向（Ｗ）の両脇には、対向面３４が形成される。このため、対向面３４に対して受熱面３２に向けた荷重を加えることで、受熱体３０を測定対象物１００に押し付けることができる。そうすれば、受熱面３２と測定面１０１との確実な面接触状態を得ることができる。また、例えば、対向面３４か基体３１を貫通するように締結手段を設けることで、受熱体３０を測定対象物１００に固定することもできる。このように、保持体３５よりも幅方向（Ｗ）に広がる部分を備える基体３１は、受熱体３０の測定対象物１００への取り付けにも寄与する。 The holding body 35 is formed integrally with the base body 31 at the center of the base body 31 in the width direction (W). The holder 35 rises from the opposing surface 34 in the height direction (H) and extends over the entire area of the opposing surface 34 in the axial direction (C). The holding body 35 has a semi-cylindrical cross section perpendicular to the width direction (W) and along the height direction (H), and its outer periphery 36 has an arch shape, typically a circular arc shape. There is. If the outer periphery 36 has an arch shape in this way, the distance from the outer periphery 36 to the storage chamber 37 can be made approximately equal, so that the thermal influence in the circumferential direction inside the storage chamber 37 is equalized, so that measurement can be performed easily. Temperature accuracy can be increased. On the opposing surface 34, the dimension W31 in the width direction (W) of the base body 31 and the dimension W35 in the width direction (W) of the holder (35) have a relationship of W31>W35. Preferable for evenness.

Ends 35F and 35R of the holder 35 in the axial direction (C) are flush with the side surfaces 33A and 33B, respectively. Since the holder 35 is disposed at the center of the base 31 in the width direction (W), opposing surfaces 34 are formed on both sides of the holder 35 in the width direction (W). Therefore, by applying a load toward the heat receiving surface 32 to the opposing surface 34, the heat receiving body 30 can be pressed against the measurement object 100. In this way, reliable surface contact between the heat receiving surface 32 and the measurement surface 101 can be obtained. Further, for example, the heat receiving body 30 can be fixed to the measurement object 100 by providing a fastening means so as to penetrate the opposing surface 34 or the base body 31. In this way, the base body 31 having a portion wider in the width direction (W) than the holder 35 also contributes to attachment of the heat receiving body 30 to the measurement target 100.
　また、保持体３５は、半円筒状に形成されているので、基体３１に比べて体積が小さい。基体３１と保持体３５は一体的に形成されており同じ材料で構成されているので、保持体３５は基体３１よりも熱容量が相当程度に小さい。したがって、基体３１に比べて保持体３５の熱応答性が高い。 Furthermore, since the holding body 35 is formed in a semi-cylindrical shape, its volume is smaller than that of the base body 31. Since the base body 31 and the holder 35 are integrally formed and made of the same material, the heat capacity of the holder 35 is considerably smaller than that of the base body 31. Therefore, the thermal responsiveness of the holder 35 is higher than that of the base 31.
　保持体３５には、開口形状が円形の収容室３７が設けられている。この収容室３７の内部には、センサ素子１０の感熱体１１（被覆層１３）および第１電線１５，１５の一部が軸線方向Ｃに沿って収容される。そして、収容部３７に充填剤４１が充填されることで、センサ素子１０の感熱体１１および第１電線１５，１５の一部は、収容室３７の内部に固定、保持される。したがって、収容室３７は、当該一部および当該一部を固定、保持するのに必要な量の充填剤４１を収容するのに足りる容積を有している。収容室３７の開口形状が円形をなしているので、収容室３７に固定される感熱体１１は収容室３７の外周からの距離が周方向において略均等である。したがって、充填剤４１、被覆層１３を介して感熱体１１に伝えられる熱が周方向において略均等になるので、測定温度の精度を高くできる。軸線方向Ｃに沿って収容室３７に保持される感熱体１１は、測定対象物１００の測定面１０１と略平行をなし、感熱体１１に接続される一対の第１電線１５，１５および一対の第２電線１７，１７も測定面１０１と平行な方向に引き出される。したがって、第１電線１５，１５、一対の第２電線１７，１７は測定面１０１から近い位置に配置される。 The holding body 35 is provided with a storage chamber 37 having a circular opening shape. Inside this housing chamber 37, the heat sensitive body 11 (coating layer 13) of the sensor element 10 and a portion of the first electric wires 15, 15 are housed along the axial direction C. Then, by filling the accommodating portion 37 with the filler 41, the heat sensitive body 11 of the sensor element 10 and a portion of the first electric wires 15, 15 are fixed and held inside the accommodating chamber 37. Therefore, the accommodation chamber 37 has a volume sufficient to accommodate the part and the amount of filler 41 necessary to fix and hold the part. Since the opening shape of the storage chamber 37 is circular, the distances of the heat sensitive elements 11 fixed to the storage chamber 37 from the outer periphery of the storage chamber 37 are approximately equal in the circumferential direction. Therefore, the heat transferred to the heat sensitive body 11 via the filler 41 and the coating layer 13 becomes approximately uniform in the circumferential direction, so that the accuracy of the measured temperature can be increased. The heat sensitive body 11 held in the storage chamber 37 along the axial direction C is substantially parallel to the measurement surface 101 of the measurement target 100, and is connected to the heat sensitive body 11 by a pair of first electric wires 15, 15 and a pair of The second electric wires 17, 17 are also drawn out in a direction parallel to the measurement surface 101. Therefore, the first electric wires 15, 15 and the pair of second electric wires 17, 17 are arranged close to the measurement surface 101.
　収容室３７は、その径方向の周囲が基体３１と保持体３５とにより取り囲まれている。また、収容室３７は、軸線方向（Ｃ）に沿って形成されるが、好ましい形態として、後方（Ｒ）に位置する後端部３７Ｒは開口する一方、その逆側である前方（Ｆ）に位置する前端部３７Ｆは閉じられている。センサ素子１０は、感熱体１１（被覆層１３）が前端部３７Ｆの側に配置され、第１電線１５，１５が後端部３７Ｒの側から外部に引き出される。このように、収容室３７は、後端部３７Ｒを除いて、閉じられた空間をなしている。 The storage chamber 37 is surrounded in its radial direction by the base body 31 and the holding body 35. Further, the storage chamber 37 is formed along the axial direction (C), and as a preferable form, the rear end portion 37R located at the rear (R) is open, while the rear end portion 37R located at the rear (R) is open, while the rear end portion 37R located at the rear (R) is open, while the rear end portion 37R located at the rear (R) The located front end 37F is closed. In the sensor element 10, the heat sensitive body 11 (coating layer 13) is arranged on the front end portion 37F side, and the first electric wires 15, 15 are drawn out from the rear end portion 37R side. In this way, the accommodation chamber 37 is a closed space except for the rear end portion 37R.
　収容室３７には溶融状態の充填剤４１が供給され、その後にセンサ素子１０が感熱体１１の側から収容室３７に挿入され、その後、充填剤４１は硬化される。この過程において、前端部３７Ｆが閉じられているため、前端部３７Ｆを下向きにすれば、溶融状態の充填剤４１を収容室３７の内部に容易に蓄えることができる。充填剤４１は、好ましくはエポキシ樹脂から構成されるが、他の材料を用いることもできる。 The filler 41 in a molten state is supplied to the storage chamber 37, and then the sensor element 10 is inserted into the storage chamber 37 from the heat sensitive body 11 side, and then the filler 41 is hardened. In this process, since the front end 37F is closed, the molten filler 41 can be easily stored inside the storage chamber 37 by turning the front end 37F downward. Filler 41 is preferably composed of epoxy resin, but other materials can also be used.
　収容室３７は、軸線方向（Ｃ）に直交する横断面における開口形状が円形をなしている。
　また、収容室３７は、受熱体３０の軸線方向（Ｃ）に直交する横断面において、保持体３５と基体３１に跨って形成される。つまり、収容室３７は保持体３５と基体３１の境界線ＢＬを越えて基体３１まで入り込んでおり、収容室３７は対向面３４よりも受熱面３２の近くまで達している。収容室３７が基体３１まで入り込んでいることは、温度センサ１における温度測定の熱応答性向上に寄与する要素である。この熱応答性は熱時定数により評価されるが、温度センサ１に関する熱時定数の測定結果については後述する。 The storage chamber 37 has a circular opening in a cross section perpendicular to the axial direction (C).
Moreover, the accommodation chamber 37 is formed across the holding body 35 and the base body 31 in a cross section perpendicular to the axial direction (C) of the heat receiving body 30 . In other words, the accommodation chamber 37 extends beyond the boundary line BL between the holder 35 and the base body 31 and extends into the base body 31, and the accommodation chamber 37 reaches closer to the heat receiving surface 32 than the opposing surface 34. The fact that the housing chamber 37 penetrates into the base body 31 is a factor that contributes to improving the thermal responsiveness of temperature measurement in the temperature sensor 1. This thermal responsiveness is evaluated by a thermal time constant, and the measurement results of the thermal time constant regarding the temperature sensor 1 will be described later.
　受熱体３０は、相対的に熱容量の大きい基体３１と相対的に熱容量の小さい保持体３５を備える。
　基体３１は受熱面３２が測定対象物１００の測定面１０１に接して、測定対象物１００からの熱を受けるとともに、収容室３７の内部に配置される感熱体１１および保持体３５に向けて当該熱を伝達する。つまり、基体３１は受熱および熱伝達の機能を発揮する。
　また、保持体３５は、基体３１から伝達される熱を収容室３７の内部に配置される感熱体１１に向けて伝える熱伝達の機能を発揮する。 The heat receiving body 30 includes a base body 31 having a relatively large heat capacity and a holding body 35 having a relatively small heat capacity.
The base body 31 has a heat receiving surface 32 in contact with the measuring surface 101 of the measuring object 100 and receives heat from the measuring object 100, and also receives heat from the measuring object 100 and directs the heat toward the heat sensitive element 11 and the holder 35 arranged inside the storage chamber 37. Transfer heat. In other words, the base body 31 exhibits heat receiving and heat transfer functions.
Further, the holding body 35 exhibits a heat transfer function of transferring heat transferred from the base body 31 toward the heat sensitive body 11 disposed inside the storage chamber 37 .
　紡錘形状を有する感熱体１１は、軸線方向Ｃの寸法が径方向の寸法よりも大きい。したがって、感熱体１１が横置きとされる温度センサ１においては、軸線方向Ｃにおける収容室３７、ひいては基体３１の寸法が必然的に大きくなり、受熱面３２の面積も大きくなる。 The spindle-shaped heat sensitive body 11 has a dimension in the axial direction C that is larger than a dimension in the radial direction. Therefore, in the temperature sensor 1 in which the heat sensitive body 11 is placed horizontally, the dimensions of the accommodation chamber 37 and, by extension, the base body 31 in the axial direction C inevitably become large, and the area of the heat receiving surface 32 also becomes large.
　受熱体３０は、好ましくは、基体３１と保持体３５とが一体的に形成されるが、その材質は温度センサ１が適用される測定対象物１００に応じて、特に測定温度に応じて選択される。具体的には、受熱体３０は、セラミックス、金属材料、樹脂材料から形成できる。 The heat receiving body 30 is preferably formed by integrally forming the base body 31 and the holding body 35, and the material thereof is selected depending on the measurement object 100 to which the temperature sensor 1 is applied, particularly depending on the measured temperature. Ru. Specifically, the heat receiving body 30 can be formed from ceramics, metal materials, and resin materials.
　セラミックスとしては、窒化アルミニウム（ＡｌＮ）、窒化ケイ素（Ｓｉ３Ｎ４）、酸化アルミニウム（Ａｌ２Ｏ３）、酸化ジルコニウム（ＺｒＯ２）および炭化ケイ素（ＳｉＣ）などが知られているが、熱伝導性の優れる窒化アルミニウム、酸化アルミニウムおよび炭化ケイ素が受熱体３０に好適に用いられる。
　セラミックスからなる受熱体３０を得るには、所定組成を有する原料粉末から受熱体３０と相似形の成形体をプレス成形により作製し、次いで、成形体を焼結すればよい。 Aluminum nitride (AlN), silicon nitride (Si 3 N 4 ), aluminum oxide (Al 2 O 3 ), zirconium oxide (ZrO 2 ), and silicon carbide (SiC) are known as ceramics, but they have poor thermal conductivity. Aluminum nitride, aluminum oxide, and silicon carbide, which have excellent properties, are preferably used for the heat receiving body 30.
To obtain the heat receiving body 30 made of ceramics, a molded body having a similar shape to the heat receiving body 30 is produced by press molding from raw material powder having a predetermined composition, and then the molded body is sintered.
　熱伝導率の高い金属材料として、銀（Ａｇ）、銅（Ｃｕ）およびアルミニウム（Ａｌ）が知られるが、価格の点からアルミニウムが受熱体３０に好適に用いられる。
　金属材料からなる受熱体３０は、受熱体３０と同じ形状のキャビティを有する金型を用いて形成される鋳造体、金属材料製のブロックからの受熱体３０の削出体、金属粉末からなる成形体を焼結して得られる焼結体などがある。 Although silver (Ag), copper (Cu), and aluminum (Al) are known as metal materials with high thermal conductivity, aluminum is preferably used for the heat receiving body 30 from the viewpoint of cost.
The heat receiving body 30 made of a metal material may be a cast body formed using a mold having a cavity of the same shape as the heat receiving body 30, a body cut out of the heat receiving body 30 from a block made of a metal material, or a molded body made of metal powder. There are sintered bodies obtained by sintering bodies.
　樹脂材料としては、耐熱性が２００℃を越えるポリフェニレンスルファイド（ＰＰＳ）、ポリエーテルエーテルケトン（ＰＥＥＫ）、ポリイミド（ＰＩ）およびポリアミドイミド（ＰＡＩ）などを用いることができる。樹脂材料からなる受熱体３０は、射出成形体として作製される。 As the resin material, polyphenylene sulfide (PPS), polyetheretherketone (PEEK), polyimide (PI), polyamideimide (PAI), etc., which have heat resistance exceeding 200°C, can be used. The heat receiving body 30 made of a resin material is produced as an injection molded body.
［各要素による熱応答性への影響：図４，図５，図６］
　本発明者は、温度センサ１をなす過程において、熱応答性に影響を及ぼすものと推測されるいくつかの要素を変動させて、タグチ計画に基づいて熱応答性の解析を行った。この解析に用いられた受熱体１３０を図４に示す。この受熱体１３０は、全体が直方体状に形成され、受熱面１３２、側面１３３Ａ，１３３Ｂ，１３３Ｃ，１３３Ｄおよび対向面１３４を有するとともに、保持室１３７が形成されている。保持室１３７の内部には、図３に示す受熱体３０の場合と同様に、センサ素子１０の感熱体１１および第１電線１５，１５の一部が軸線方向Ｃに沿って収容されるとともに、充填剤４１により保持室１３７の内部に固定、保持される。なお、アーチ型の受熱体３０との区別をするために、受熱体１３０をボックス型と称することがある。 [Influence of each element on thermal response: Figure 4, Figure 5, Figure 6]
In the process of making the temperature sensor 1, the inventor varied several elements that are presumed to affect thermal responsiveness, and analyzed thermal responsiveness based on the Taguchi design. FIG. 4 shows the heat receiving body 130 used in this analysis. The heat receiving body 130 is entirely formed in the shape of a rectangular parallelepiped, and has a heat receiving surface 132, side surfaces 133A, 133B, 133C, and 133D, and an opposing surface 134, and a holding chamber 137 is formed therein. Inside the holding chamber 137, as in the case of the heat receiving body 30 shown in FIG. It is fixed and held inside the holding chamber 137 by the filler 41 . Note that in order to distinguish it from the arch-shaped heat receiving body 30, the heat receiving body 130 is sometimes referred to as a box type.
［各部の熱応答性への影響：図５］
　　図５に示される評価結果は、図４に示される寸法Ｔ（Ｔ＝０．５ｍｍ）と寸法ｔ（ｔ＝０．５ｍｍ）である。寸法Ｔは側面１３３Ｂから保持室１３７の前端部１３７Ｆまでの長さを示し、寸法ｔは受熱面１３２から保持室１３７までの長さを示している。
　図５に示すように、寸法ｔのほうが寸法Ｔよりも熱応答性に及ぼす影響が大きいことが分かる。なお、評価に供された受熱体１３０は、アルミニウム合金（ＪＩＳ　Ａ２０１７）からなる一体的な成形体である。 [Influence on thermal response of each part: Figure 5]
The evaluation results shown in FIG. 5 are the dimension T (T=0.5 mm) and the dimension t (t=0.5 mm) shown in FIG. 4. The dimension T indicates the length from the side surface 133B to the front end 137F of the holding chamber 137, and the dimension t indicates the length from the heat receiving surface 132 to the holding chamber 137.
As shown in FIG. 5, it can be seen that the dimension t has a greater influence on the thermal response than the dimension T. Note that the heat receiving body 130 subjected to evaluation is an integral molded body made of an aluminum alloy (JIS A2017).
［材料による熱応答性への影響：図６］
　受熱体１３０を構成する材料には、アルミニウム合金や酸化アルミニウム焼結体（Ａｌ２Ｏ３）、ポリフェニレンスルファイド（ＰＰＳ）樹脂等を用いることができる。熱応答性は、熱伝導率の大小に対応するが、熱伝導率の高いアルミニウム合金等を用いてしまうと、高い熱応答性を得ることができる。高い熱応答性が要求されない場合には、アルミニウム合金等よりも熱伝導性の小さい材料、例えば、セラミックス材や樹脂材料が用いられる。それぞれの材料の熱伝導率を以下に示しておく。
　アルミニウム合金（ＪＩＳ　Ａ２０１７）：１３４Ｗ／ｍ・Ｋ
　酸化アルミニウム焼結体（Ａｌ２Ｏ３：９６ｖｏｌ.％）：２１．８Ｗ／ｍ・Ｋ
　ＰＰＳ樹脂：０．２９Ｗ／ｍ・Ｋ [Influence of materials on thermal response: Figure 6]
As the material constituting the heat receiving body 130, aluminum alloy, aluminum oxide sintered body (Al 2 O 3 ), polyphenylene sulfide (PPS) resin, etc. can be used. Thermal responsiveness corresponds to the magnitude of thermal conductivity, and if an aluminum alloy or the like having high thermal conductivity is used, high thermal responsiveness can be obtained. When high thermal responsiveness is not required, a material having lower thermal conductivity than aluminum alloy or the like, such as a ceramic material or a resin material, is used. The thermal conductivity of each material is shown below.
Aluminum alloy (JIS A2017): 134W/m・K
Aluminum oxide sintered body (Al 2 O 3 : 96 vol.%): 21.8 W/m・K
PPS resin: 0.29W/m・K
　受熱面１３２から保持室１３７までの寸法ｔは小さく設定するほど、熱応答性を高くすることができる。この熱応答性の高低は、測定対象物１００の測定面１０１から受熱面３２で受けた熱が保持室１３７まで伝わる時間に対応する。なお、熱時定数（τ）は温度変化に対する熱応答性の度合いを表した定数であり、一般的には、初期の温度差の６３.２％変化するまでの時間を熱時定数τ(ｓｅｃ.)として定義され、エポキシ樹脂を充填剤としたときの熱時定数の平均（ｎ＝９）は０．９４であった。 The smaller the dimension t from the heat receiving surface 132 to the holding chamber 137 is set, the higher the thermal response can be. The level of this thermal response corresponds to the time it takes for the heat received by the heat receiving surface 32 from the measurement surface 101 of the measurement object 100 to be transmitted to the holding chamber 137. Note that the thermal time constant (τ) is a constant that represents the degree of thermal responsiveness to temperature changes, and generally the time required for the initial temperature difference to change by 63.2% is defined as the thermal time constant τ(sec ), and the average thermal time constant (n=9) when epoxy resin was used as a filler was 0.94.
　以上の結果を踏まえて、アーチ型の受熱体３０を用いた温度センサ１について、上記と同様にタグチ計画に基づいて熱応答性の解析を行った。この解析においても、いくつかの要素を変動させた。つまり、図６に示すパターンＸ、パターンＹおよびパターンＺのように高さ方向（Ｈ）の寸法Ｌを変えるとともに、収容室３７の高さ方向（Ｈ）の位置を変えた。なお、パターンＹは受熱体３０の形態を踏襲しており、収容室３７が保持体３５と基体３１とに跨っているが、パターンＸおよびパターンＺは収容室３７が保持体３５の範囲内に収まり、基体３１まで至っていない。パターンＸ、パターンＹおよびパターンＺともに、受熱体３０はアルミニウム合金（ＪＩＳ　Ａ２０１７）および酸化アルミニウム焼結体（Ａｌ２Ｏ３：９６ｖｏｌ.％）の２種類の材料で作製した。図６にその結果が示されているが、パターンＹ、つまり収容室３７が基体３１と保持体３５に跨って形成される受熱体３０が適用される温度センサ１の温度測定に対する熱応答性が優れていることが解る。 Based on the above results, the thermal response of the temperature sensor 1 using the arch-shaped heat receiving body 30 was analyzed based on the Taguchi design in the same manner as above. Several factors were varied in this analysis as well. That is, as in patterns X, Y, and Z shown in FIG. 6, the dimension L in the height direction (H) was changed, and the position of the storage chamber 37 in the height direction (H) was changed. Note that pattern Y follows the form of the heat receiving body 30, and the accommodation chamber 37 extends over the holder 35 and the base 31, but in patterns X and Z, the accommodation chamber 37 is within the range of the holder 35. It fits and does not reach the base body 31. In all of the patterns X, Y, and Z, the heat receiving body 30 was made of two types of materials: an aluminum alloy (JIS A2017) and an aluminum oxide sintered body (Al 2 O 3 : 96 vol.%). The results are shown in FIG. 6, and the thermal response to temperature measurement of the temperature sensor 1 to which the heat receiving body 30 in which the accommodation chamber 37 is formed spanning the base body 31 and the holder 35 is applied is pattern Y. I understand that it is excellent.
　パターンＹの受熱体３０において、充填剤４１にエポキシ樹脂を用いたときの熱時定数は以下の通りであり、極めて優れる熱応答性が得られる。
　アルミニウム合金（ＪＩＳ　Ａ２０１７）：０．５秒
　酸化アルミニウム焼結体（Ａｌ２Ｏ３：９６ｖｏｌ.％）：０．７秒 In the heat receiving body 30 of pattern Y, the thermal time constant when epoxy resin is used as the filler 41 is as follows, and extremely excellent thermal response can be obtained.
Aluminum alloy (JIS A2017): 0.5 seconds Aluminum oxide sintered body (Al 2 O 3 : 96 vol.%): 0.7 seconds
［温度センサ１による効果］
　以上説明した温度センサ１が奏する効果を説明する。
　温度センサ１は、アーチ型の受熱体３０を採用しているために、測定温度の熱応答性が優れる。特に、収容室３７が基体３１に入り込むことにより、熱応答性をより向上できる。 [Effects of temperature sensor 1]
The effects of the temperature sensor 1 described above will be explained.
Since the temperature sensor 1 employs the arch-shaped heat receiving body 30, the thermal responsiveness of the measured temperature is excellent. In particular, by allowing the storage chamber 37 to enter the base body 31, thermal responsiveness can be further improved.
［アーチ型受熱体３０の優位性：図７］
　アーチ型の受熱体３０はボックス型の受熱体１３０に比べて温度測定における熱応答性が優れる理由を、図７を参照して説明する。
　受熱体３０は、基体３１と保持体３５を備え、前述したように、基体３１の熱容量Ｃ３１と保持体３５の熱容量Ｃ３５とが、熱容量Ｃ３１＞熱容量Ｃ３５の関係を有する。そして、基体３１が測定対象物１００から熱を伝達されるとともに、基体３１が受けた熱は保持体３５に伝達される。このとき、保持体３５は受熱体３５を構成する材料よりも熱伝導性の劣る空気で取り囲まれているので、基体３１が受けた熱は専ら保持体３５に伝達される。保持体３５は熱容量Ｃ３５が基体３１の熱容量Ｃ３１よりも小さいので、保持体３５の伝達熱による熱応答性は基体３１よりも速くなる。したがって、保持体３５の内部に設けられる収容室３７の熱応答性も相対的に速くなる。
　以上に対して、ボックス型の受熱体１３０は、アーチ型の受熱体３０の基体３１が高さ方向（Ｈ）の端部まで連なっているものとみなされる。つまり、受熱体１３０は、受熱体３０のように熱容量が小さい部分が存在しないために、保持室１３７の熱応答性は収容室３７に比べて相対的に遅くなる。 [Advantages of arch-shaped heat receiving body 30: Fig. 7]
The reason why the arch-shaped heat receiving body 30 has better thermal response in temperature measurement than the box-shaped heat receiving body 130 will be explained with reference to FIG. 7.
The heat receiving body 30 includes the base body 31 and the holder 35, and as described above, the heat capacity C31 of the base body 31 and the heat capacity C35 of the holder 35 have a relationship of heat capacity C31>heat capacity C35. Then, heat is transferred to the base 31 from the measurement target 100, and the heat received by the base 31 is transferred to the holder 35. At this time, since the holder 35 is surrounded by air whose thermal conductivity is lower than that of the material constituting the heat receiving body 35, the heat received by the base 31 is exclusively transferred to the holder 35. Since the heat capacity C35 of the holder 35 is smaller than the heat capacity C31 of the base 31, the thermal response of the holder 35 due to the transferred heat is faster than that of the base 31. Therefore, the thermal response of the storage chamber 37 provided inside the holding body 35 also becomes relatively fast.
In contrast to the above, in the box-shaped heat receiving body 130, the base body 31 of the arch-shaped heat receiving body 30 is considered to be continuous to the end in the height direction (H). That is, since the heat receiving body 130 does not have a portion having a small heat capacity like the heat receiving body 30, the thermal response of the holding chamber 137 is relatively slow compared to that of the storage chamber 37.
［収容室３７が保持体３５と基体３１とに跨ることの優位性：図７］
　受熱体３０は、アーチ型を有するのに加えて、収容室３７が保持体３５と基体３１とに跨ることにより、収容室３７は、受熱面３２が接する測定対象物１００までの距離が小さい。したがって、収容室３７が保持体３５の内部だけに設けられている同じ寸法の受熱体３０に比べて、受熱体３０の熱応答性が優れる。加えて、基体３１に入り込んでいる収容室３７には、幅方向（Ｗ）の両側からも熱が伝えられるために、熱応答性がより一層優れる。幅方向（Ｗ）の両側からも収容室３７に熱が伝えられるのは以下の理由による。 [Advantages of the accommodation chamber 37 straddling the holding body 35 and the base body 31: FIG. 7]
In addition to the heat receiving body 30 having an arch shape, the accommodation chamber 37 straddles the holding body 35 and the base body 31, so that the distance of the accommodation chamber 37 to the measuring object 100 with which the heat receiving surface 32 is in contact is small. Therefore, the heat responsiveness of the heat receiving body 30 is superior to that of a heat receiving body 30 of the same size in which the accommodation chamber 37 is provided only inside the holding body 35. In addition, heat is transmitted to the accommodation chamber 37 that has entered the base body 31 from both sides in the width direction (W), so that the thermal response is even more excellent. The reason why heat is transferred to the storage chamber 37 from both sides in the width direction (W) is as follows.
　基体３１で受けた熱は、受熱面３２から離れる向き、高さ方向（Ｈ）の上向きに伝えられ、対向面３４に至る。対向面３４は、保持体３５に連なる部分と、外部に開放され空気に直に接する部分とがある。保持体３５に連なる部分およびその近傍に達した熱は保持体３５に伝えられる。しかし、空気に直に接する部分は、空気の熱伝導性が劣るために、幅方向（Ｗ）の中央に向けて、換言すると、収容室３７に向けて伝えられる。この収容室３７の幅方向（Ｗ）の両側からの熱伝達を収容室３７が受けることにより、収容室３７における熱応答性が優れる。 The heat received by the base 31 is transmitted away from the heat receiving surface 32 and upward in the height direction (H), reaching the opposing surface 34. The opposing surface 34 has a portion continuous to the holder 35 and a portion opened to the outside and directly in contact with air. The heat reaching the portion connected to the holder 35 and its vicinity is transmitted to the holder 35. However, since the heat conductivity of the air is poor in the portion directly in contact with the air, the heat is transmitted toward the center in the width direction (W), in other words, toward the storage chamber 37. Since the storage chamber 37 receives heat transfer from both sides of the storage chamber 37 in the width direction (W), the thermal response in the storage chamber 37 is excellent.
［温度センサ１が測定対象物１００に対して横置きされることの優位性］
　温度センサ１が測定対象物１００に対して横置きされることにより以下の効果を奏する。なお、センサ素子の軸線方向Ｃが測定対象物１００の測定面１０１に対して垂直な温度センサは、縦置きと称される。
　横置きの温度センサ１は、縦置きの温度センサに比べて、受熱体３０の高さ方向（Ｈ）の寸法を抑えることができるので、受熱体３０からの周囲への放熱（熱引き）を低減できる。また、横置きの温度センサ１によれば、第１電線１５および第２電線１７は測定面１０１に対して平行に引き出されるために測定面１０１から近い位置に配置されるので、縦置きの温度センサに比べて、第１電線１５および第２電線１７からの放熱を低減できる。これらの放熱の低減によって、高応答の温度測定ができる。なお、第１電線１５および第２電線１７が測定面１０１から近い位置に配置されることにより、温度センサ１は高さ方向（Ｈ）における測定対象物１００の省スペース化に寄与する。 [Advantages of placing the temperature sensor 1 horizontally with respect to the measurement object 100]
By placing the temperature sensor 1 horizontally with respect to the object to be measured 100, the following effects are achieved. Note that a temperature sensor in which the axial direction C of the sensor element is perpendicular to the measurement surface 101 of the measurement target 100 is referred to as a vertically mounted temperature sensor.
The horizontally placed temperature sensor 1 can reduce the height dimension (H) of the heat receiving body 30 compared to the vertically placed temperature sensor, so it can reduce heat dissipation (heat removal) from the heat receiving body 30 to the surroundings. Can be reduced. In addition, according to the horizontally placed temperature sensor 1, the first electric wire 15 and the second electric wire 17 are drawn out parallel to the measurement surface 101 and are arranged close to the measurement surface 101, so that the temperature sensor 1 is placed close to the measurement surface 101. Compared to the sensor, heat radiation from the first electric wire 15 and the second electric wire 17 can be reduced. These reductions in heat dissipation allow for highly responsive temperature measurements. Note that by arranging the first electric wire 15 and the second electric wire 17 at a position close to the measurement surface 101, the temperature sensor 1 contributes to space saving of the measurement target 100 in the height direction (H).
　また、横置きの温度センサ１の受熱体３０の受熱面３２は、幅方向（Ｗ）において、保持体３５から外側に突き出す部分があるために、その面積を広くできる。加えて、受熱体３０の受熱面３２は、軸線方向（Ｃ）における感熱体１１および被覆層１３の寸法に対応するために、縦置きの受熱体の受熱面に比べその面積が広くなる。このように、受熱面３２を広くできることにより、受熱体３０はより多くの熱量を受けるので、温度センサ１は高い熱応答性を備えることができる。 Furthermore, since the heat receiving surface 32 of the heat receiving body 30 of the horizontally placed temperature sensor 1 has a portion that protrudes outward from the holding body 35 in the width direction (W), its area can be increased. In addition, the heat receiving surface 32 of the heat receiving body 30 has a larger area than the heat receiving surface of a vertically placed heat receiving body in order to correspond to the dimensions of the heat sensitive body 11 and the coating layer 13 in the axial direction (C). In this way, by making the heat receiving surface 32 wider, the heat receiving body 30 receives a larger amount of heat, so that the temperature sensor 1 can have high thermal responsiveness.
　以上、本発明の好適な温度センサ１を説明したが、本発明はこれに限定されずに種々の変更を伴うことができる。
　例えば、図８の受熱体３０Ａは、破線に示すように、収容室３７を保持体３５だけに設けるようにしてもよいし、収容室３７をさらに受熱面３２に近づけることができる例を示している。
　図８の受熱体３０Ｂは、破線で示すように、収容室３７を保持体３５の幅方向（Ｗ）の中央からずらして設けることができる例を示している。
　図８の受熱体３０Ｃは、保持体３５Ｃが矩形状の横断面を有する例を示している。本発明は、半円形、矩形以外の例えば多角形を有する保持体の適用可能性を有している。
　図８の受熱体３０Ｄは、収容室３７Ｄの開口形状が矩形である例を示している。本発明は、円形および矩形以外の例えば多角形を有する収容室３７Ｄの開口形状の適用可能性を有している。
　図８の受熱体３０Ｅは、前述したＷ３１およびＷ３５がＷ３１＝Ｗ３５の関係を有している。 Although the preferred temperature sensor 1 of the present invention has been described above, the present invention is not limited thereto and can be accompanied by various modifications.
For example, the heat receiving body 30A in FIG. 8 shows an example in which the accommodation chamber 37 may be provided only in the holder 35, as shown by the broken line, or the accommodation chamber 37 may be brought closer to the heat receiving surface 32. There is.
The heat receiving body 30B in FIG. 8 shows an example in which the accommodation chamber 37 can be provided offset from the center of the holder 35 in the width direction (W), as shown by the broken line.
The heat receiving body 30C in FIG. 8 shows an example in which the holding body 35C has a rectangular cross section. The present invention has the possibility of being applied to a holder having a polygonal shape other than a semicircular or rectangular shape, for example.
The heat receiving body 30D in FIG. 8 shows an example in which the opening shape of the storage chamber 37D is rectangular. The present invention can be applied to an opening shape of the storage chamber 37D other than a circular or rectangular shape, for example, a polygonal shape.
In the heat receiving body 30E of FIG. 8, W31 and W35 described above have a relationship of W31=W35.
　また、図９の受熱体３０Ｅは保持体３５Ｅの軸線方向（Ｃ）の寸法が基体３１よりも小さく、またこの逆に、図９の受熱体３０Ｆは保持体３５Ｅの軸線方向（Ｃ）の寸法が基体３１よりも大きい。
　図９の受熱体３０Ｇは基体３１Ｇの平面形状が円形である例を示している。本発明は、円形および矩形以外の例えば多角形を有する基体３１Ｇの平面形状の適用可能性を有している。また、図９の受熱体３０Ｈは保持体３５Ｈの平面形状が円形である例を示している。本発明は、円形および矩形以外の例えば多角形を有する保持体３５の平面形状の適用可能性を有している。 In addition, in the heat receiving body 30E of FIG. 9, the dimension of the holder 35E in the axial direction (C) is smaller than that of the base body 31, and conversely, in the heat receiving body 30F of FIG. is larger than the base body 31.
The heat receiving body 30G in FIG. 9 shows an example in which the planar shape of the base body 31G is circular. The present invention can be applied to a planar shape of the base 31G other than circular or rectangular, for example, having a polygonal shape. Further, the heat receiving body 30H in FIG. 9 shows an example in which the planar shape of the holding body 35H is circular. The present invention has the applicability of the planar shape of the holder 35 having, for example, a polygonal shape other than circular and rectangular.
１　　　温度センサ
１０　　センサ素子
１１　　感熱体
１３　　被覆層
１５　　第１電線
１６　　絶縁チューブ
１７　　第２電線
１７Ａ，１７Ａ　芯線
１７Ｂ，１７Ｂ　絶縁被覆
１８　　保護チューブ
３０，３０Ａ，３０Ｂ，３０Ｃ，３０Ｄ，３０Ｅ，３０Ｆ，３０Ｇ，３０Ｈ，１３０　受熱体
３１，３１Ｇ　基体
３２，１３２　受熱面
３３Ａ，３３Ｂ，３３Ｃ，３３Ｄ，１３３Ａ，１３３Ｂ，１３３Ｃ，１３３Ｄ　側面
３４，１３４　対向面
３５，３５Ｃ，３５Ｅ，３５Ｈ　保持体
３６　　外周
３７，３７Ｄ，１３７　収容室
３７Ｆ　前端部
３７Ｒ　後端部
４１　　充填剤
１００　測定対象物
１０１　測定面
ＢＬ　　境界線 1 Temperature sensor 10 Sensor element 11 Heat sensitive body 13 Covering layer 15 First electric wire 16 Insulation tube 17 Second electric wire 17A, 17A Core wire 17B, 17B Insulation coating 18 Protective tube 30, 30A, 30B, 30C, 30D, 30E, 30F, 30G , 30H, 130 Heat receiving body 31, 31G Base body 32, 132 Heat receiving surface 33A, 33B, 33C, 33D, 133A, 133B, 133C, 133D Side surface 34, 134 Opposing surface 35, 35C, 35E, 35H Holding body 36 Outer periphery 37, 37D , 137 Storage chamber 37F Front end 37R Rear end 41 Filler 100 Measurement object 101 Measurement surface BL Boundary line

Claims (7)

  1. 　軸線方向に延びる感熱体と、前記感熱体に電気的に接続される一対の電線とを有するセンサ素子と、
    　前記感熱体が前記軸線方向に沿って納められる、前記軸線方向の周りに閉じられた収容室と、測定対象物に接触して測定対象物から熱を受ける受熱面と、を有する受熱体とを備え、
    　前記受熱体は、
    　前記受熱面と、前記受熱面に対する対向面とを有する基体と、
    　前記対向面の側に設けられ、前記収容室を有する、前記基体と一体的に形成される保持体と、を備え、
    　前記保持体は、前記軸線方向に直交する横断面における外周が、前記対向面から離れる向きに凸となる形状を有している、温度センサ。     a sensor element having a heat sensitive body extending in an axial direction and a pair of electric wires electrically connected to the heat sensitive body;
    A heat receiving body having a storage chamber closed around the axial direction in which the heat sensitive body is housed along the axial direction, and a heat receiving surface that contacts a measurement object and receives heat from the measurement object. Prepare,
    The heat receiving body is
    a base having the heat receiving surface and a surface opposite to the heat receiving surface;
    a holder integrally formed with the base body, provided on the side of the opposing surface and having the storage chamber;
    In the temperature sensor, the holding body has a shape in which an outer periphery in a cross section perpendicular to the axial direction is convex in a direction away from the opposing surface.
  2. 　前記受熱体において、前記軸線方向に直交し前記基体と前記保持体とが並ぶ高さ方向と、前記軸線方向と前記高さ方向の両方に直交する幅方向と、が定義され、
    　前記対向面において、前記基体の前記幅方向の寸法Ｗ３１と、前記保持体の前記幅方向の寸法Ｗ３５とが、Ｗ３１＞Ｗ３５の関係を有する、
    請求項１に記載の温度センサ。     In the heat receiving body, a height direction that is orthogonal to the axial direction and in which the base body and the holder are lined up, and a width direction that is orthogonal to both the axial direction and the height direction are defined;
    On the opposing surface, the widthwise dimension W31 of the base and the widthwise dimension W35 of the holder have a relationship of W31>W35;
    The temperature sensor according to claim 1.
  3. 　前記保持体は、前記軸線方向に直交する横断面における外周が、前記対向面から離れる向きに中央部が凸となるアーチ型をなしている、
    請求項２に記載の温度センサ。     The holding body has an arch shape in which the outer periphery in a cross section perpendicular to the axial direction is convex at the center in a direction away from the opposing surface.
    The temperature sensor according to claim 2.
  4. 　前記保持体は前記基体よりも熱容量が小さい、
    請求項１に記載の温度センサ。     The holding body has a smaller heat capacity than the base body.
    The temperature sensor according to claim 1.
  5. 　前記収容室は、前記保持体と前記基体に跨って設けられる、
    請求項１または請求項２に記載の温度センサ。     The storage chamber is provided across the holding body and the base body,
    The temperature sensor according to claim 1 or claim 2.
  6. 　前記収容室は、前記対向面よりも前記受熱面に向けて凹んで形成されている、
    請求項５に記載の温度センサ。     The storage chamber is formed to be recessed toward the heat receiving surface rather than the opposing surface.
    The temperature sensor according to claim 5.
  7. 　前記収容室は、
    　一対の前記電線が引き出される側が開口し、その逆側が閉じられている、
    請求項１または請求項２に記載の温度センサ。     The storage room is
    The side from which the pair of electric wires are drawn out is open, and the opposite side is closed.
    The temperature sensor according to claim 1 or claim 2.
PCT/JP2022/028579 2022-07-25 2022-07-25 Temperature sensor WO2024023875A1 (en)

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Citations (2)

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Publication number Priority date Publication date Assignee Title
JPS6035234U (en) * 1983-08-19 1985-03-11 石塚電子株式会社 temperature detection device
US20170023415A1 (en) * 2015-07-23 2017-01-26 Abb Schweiz Ag Surface temperature probe

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JP4760558B2 (en) * 2006-06-09 2011-08-31 株式会社デンソー Temperature sensor
JP6035234B2 (en) 2013-12-27 2016-11-30 本田技研工業株式会社 Transmission control device
CN105318977B (en) * 2015-12-04 2018-03-30 华帝股份有限公司 Novel temperature sensor
EP3431944B1 (en) * 2017-01-16 2020-04-01 Shibaura Electronics Co., Ltd. Temperature sensor
JP6992442B2 (en) * 2017-11-24 2022-01-13 株式会社デンソー Temperature sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6035234U (en) * 1983-08-19 1985-03-11 石塚電子株式会社 temperature detection device
US20170023415A1 (en) * 2015-07-23 2017-01-26 Abb Schweiz Ag Surface temperature probe

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