WO2023223732A1 - Capteur de détection de déformation et dispositif électronique - Google Patents

Capteur de détection de déformation et dispositif électronique Download PDF

Info

Publication number
WO2023223732A1
WO2023223732A1 PCT/JP2023/015142 JP2023015142W WO2023223732A1 WO 2023223732 A1 WO2023223732 A1 WO 2023223732A1 JP 2023015142 W JP2023015142 W JP 2023015142W WO 2023223732 A1 WO2023223732 A1 WO 2023223732A1
Authority
WO
WIPO (PCT)
Prior art keywords
deformation
base material
inhibiting member
piezoelectric film
main surface
Prior art date
Application number
PCT/JP2023/015142
Other languages
English (en)
Japanese (ja)
Inventor
譲仁 奥冨
勇希 橘
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Publication of WO2023223732A1 publication Critical patent/WO2023223732A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes

Definitions

  • the present invention relates to a deformation detection sensor and an electronic device including the deformation detection sensor.
  • a bending sensor described in Patent Document 1 As an invention related to a conventional deformation detection sensor, for example, a bending sensor described in Patent Document 1 is known.
  • This bending sensor consists of a piezoelectric element placed on a bendable base material, a voltage detection circuit that detects the voltage generated in the piezoelectric element, and a voltage detection circuit that integrates the voltage detected by the voltage detection circuit to calculate an integral value. and a calculation unit that associates the bending angle of the base material with the bending angle of the base material.
  • an object of the present invention is to provide a deformation detection sensor and an electronic device that can accurately detect the bending angle of a base material.
  • a deformation detection sensor includes: A flexible base material having an upper main surface and a lower main surface of the base material that are arranged in the vertical direction, and a curved section that curves when bent at a bending line; A first detection signal that outputs a first detection signal according to the deformation of the curved section, is provided on the upper main surface of the base material, and has a first upper main surface and a first lower main surface that are arranged in the vertical direction.
  • the first sensor is a first piezoelectric film having a first piezoelectric film upper main surface and a first piezoelectric film lower main surface arranged in the vertical direction; a first upper electrode provided on the upper main surface of the first piezoelectric film; a first lower electrode provided on the lower main surface of the first piezoelectric film; It contains The first deformation inhibiting member is provided on the first upper main surface or the first lower main surface, The first deformation inhibiting member has a first region that overlaps the first piezoelectric film when viewed in the vertical direction, The second deformation inhibiting member is provided on the first upper major surface or the first lower major surface on which the first deformation inhibiting member is provided of the first upper major surface and the first lower major surface, The second deformation inhibiting member has a second region that overlaps with the first piezoelectric film when viewed in the vertical direction, The first region and the second region have portions that do not touch each other when viewed
  • direction is defined as follows.
  • the direction in which the upper main surface US2 and the lower main surface LS2 of the flexible base material 2 are lined up is defined as the up-down direction.
  • the direction in which the long side of the main surface US2 of the base material extends is defined as the left-right direction.
  • the direction in which the short side of the main surface US2 of the base material extends when viewed in the vertical direction is defined as the front-back direction.
  • the up-down direction, the left-right direction, and the front-back direction are orthogonal to each other.
  • the direction in which the first piezoelectric film upper main surface US31 and the first piezoelectric film lower main surface LS31 of the first piezoelectric film 31 are lined up is piezoelectrically Defined as the vertical direction of the film. Furthermore, when viewed in the vertical direction of the piezoelectric film, the direction in which the long sides of the first piezoelectric film 31 extend is defined as the left-right direction of the piezoelectric film. The direction in which the short side of the first piezoelectric film 31 extends when viewed in the vertical direction of the piezoelectric film is defined as the front-rear direction of the piezoelectric film.
  • the vertical direction of the piezoelectric film, the horizontal direction of the piezoelectric film, and the front-back direction of the piezoelectric film are orthogonal to each other.
  • the definition of direction in this specification is an example. Therefore, the direction in which the deformation detection sensor 1 is actually used does not need to match the direction in this specification.
  • the vertical direction may be reversed in FIGS. 1 to 13, FIG. 18, FIGS. 21 to 25, and FIGS. 27 to 34.
  • the left and right directions may be reversed in FIGS. 1 to 13, 18, 21 to 25, and 27 to 34.
  • the front and rear directions may be reversed in FIGS. 1 to 13, 18, 21 to 25, and 27 to 34.
  • the vertical direction of the piezoelectric film may be reversed in FIGS. 1 to 3, FIGS.
  • FIGS. 1 to 3, 5 to 10, 12, 21 to 25, and 27 to 34 the left-right direction of the piezoelectric film may be reversed.
  • FIGS. 1 to 3, FIGS. 5 to 10, FIG. 12, FIGS. 21 to 25, and FIGS. 27 to 34 the front-rear direction of the piezoelectric film may be reversed.
  • X and Y are parts or members of the deformation detection sensor 1.
  • each part of X is defined as follows.
  • the upper part of X means the upper half of X.
  • the upper end of X means the upper end of X.
  • the upper end of X means the upper end of X and its vicinity. This definition also applies to directions other than the upward direction.
  • X is located above Y
  • X is located directly above Y. Therefore, when viewed in the vertical direction, X overlaps Y.
  • "X is located above Y” means that X is located directly above Y, and that X is located diagonally above Y. Therefore, when viewed in the vertical direction, X may or may not overlap Y. This definition also applies to directions other than the upward direction.
  • X and Y are electrically connected means that electricity is conducted between X and Y. Therefore, X and Y may be in contact with each other, or X and Y may not be in contact with each other. When X and Y are not in contact with each other, a conductive Z is placed between X and Y.
  • the bending angle ⁇ of the flexible base material 2 is defined as follows.
  • the bending angle ⁇ of the flexible base material 2 is such that the first portion P1 of the flexible base material 2 and the second portion P2 of the flexible base material 2 are formed when viewed in the direction in which the first bending line L1 extends. is defined as the angle.
  • the bending angle of the base material can be detected with high accuracy.
  • FIG. 1 is an exploded perspective view of a deformation detection sensor 1 according to the first embodiment.
  • FIG. 2 is a perspective view of the deformation detection sensor 1 according to the first embodiment.
  • FIG. 3 is a sectional view of the deformation detection sensor 1 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 0 degrees according to the first embodiment.
  • FIG. 4 is a sectional view of the deformation detection sensor 1 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 180 degrees according to the first embodiment.
  • FIG. 5 is a sectional view of the first sensor 3 according to the first embodiment, viewed from the front.
  • FIG. 6 is a plan view of the first sensor 3 according to the first embodiment viewed downward.
  • FIG. 7 is a plan view of the deformation detection sensor 1 according to the first embodiment, viewed from below.
  • FIG. 8 is a plan view of the deformation detection sensor 1 according to the first embodiment viewed from below.
  • FIG. 9 is an exploded perspective view of the electronic device 100 according to the first embodiment.
  • FIG. 10 is a sectional view of the electronic device 100 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 0 degrees according to the first embodiment.
  • FIG. 11 is a sectional view of the electronic device 100 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 180 degrees according to the first embodiment.
  • FIG. 10 is a sectional view of the electronic device 100 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 180 degrees according to the first embodiment.
  • FIG. 12 is a sectional view of the deformation detection sensor 10 according to the comparative example when the bending angle ⁇ of the flexible base material 2 according to the comparative example is 0 degrees, viewed from the front.
  • FIG. 13 is a sectional view of the deformation detection sensor 10 according to the comparative example when the bending angle ⁇ of the flexible base material 2 according to the comparative example is 180 degrees, viewed from the front.
  • FIG. 14 is an example of the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the comparative example is changed from 0 degrees to 180 degrees.
  • FIG. 15 is an example of the first integral value IV1 when the bending angle ⁇ of the flexible base material 2 according to the comparative example is changed from 0 degrees to 180 degrees.
  • FIG. 16 shows the first integral value IV1 when noise N is superimposed on the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the comparative example is changed from 0 degrees to 180 degrees.
  • FIG. 17 is an example of the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the first embodiment is changed from 0 degrees to 180 degrees.
  • FIG. 18 is a sectional view of the deformation detection sensor 1 and the flexible base material 2 viewed from the front when the bending angle ⁇ of the flexible base material 2 is ⁇ a according to the first embodiment.
  • FIG. 19 is an example of the first integral value IV1 when the bending angle ⁇ of the flexible base material 2 according to the first embodiment is changed from 0 degrees to 180 degrees.
  • FIG. 20 shows the first integral when noise N is superimposed on the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the first embodiment is changed from 0 degrees to 180 degrees. This is an example of the value IV1.
  • FIG. 21 is an exploded perspective view of a deformation detection sensor 1a according to a first modification.
  • FIG. 22 is a plan view of the deformation detection sensor 1b according to the second modification, viewed from below.
  • FIG. 23 is a plan view of the deformation detection sensor 1c according to the third modification, viewed from below.
  • FIG. 24 is an exploded perspective view of a deformation detection sensor 1d according to the second embodiment.
  • FIG. 25 is an exploded perspective view of an electronic device 100d according to the second embodiment.
  • FIG. 26 shows the second integral when the noise N is superimposed on the second detection signal SigD2 when the bending angle ⁇ of the flexible base material 2 according to the second embodiment is changed from 0 degrees to 180 degrees.
  • FIG. 27 is an exploded perspective view of a deformation detection sensor 1e according to a fourth modification.
  • FIG. 28 is an exploded perspective view of a deformation detection sensor 1f according to the third embodiment.
  • FIG. 29 is a plan view of the deformation detection sensor 1f according to the third embodiment, viewed from below.
  • FIG. 30 is an exploded perspective view of a deformation detection sensor 1g according to a fifth modification.
  • FIG. 31 is a plan view of a deformation detection sensor 1h according to a sixth modification, viewed from below.
  • FIG. 32 is a plan view of the deformation detection sensor 1i according to the seventh modification, viewed from below.
  • FIG. 33 is an exploded perspective view of a deformation detection sensor 1j according to the fourth embodiment.
  • FIG. 34 is an exploded perspective view of a deformation detection sensor 1k according to an eighth modification.
  • FIG. 1 is an exploded perspective view of a deformation detection sensor 1 according to the first embodiment.
  • FIG. 2 is a perspective view of the deformation detection sensor 1 according to the first embodiment.
  • FIG. 3 is a sectional view of the deformation detection sensor 1 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 0 degrees according to the first embodiment.
  • FIG. 4 is a sectional view of the deformation detection sensor 1 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 180 degrees according to the first embodiment.
  • FIG. 1 is an exploded perspective view of a deformation detection sensor 1 according to the first embodiment.
  • FIG. 2 is a perspective view of the deformation detection sensor 1 according to the first embodiment.
  • FIG. 3 is a sectional view of the deformation detection sensor 1 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 0 degrees according to the first embodiment.
  • FIG. 4 is a sectional view of the deformation detection sensor 1 viewed from the front
  • FIG. 5 is a sectional view of the first sensor 3 according to the first embodiment, viewed from the front.
  • FIG. 6 is a plan view of the first sensor 3 according to the first embodiment viewed downward.
  • FIG. 7 is a plan view of the deformation detection sensor 1 according to the first embodiment, viewed from below.
  • FIG. 8 is a plan view of the deformation detection sensor 1 according to the first embodiment viewed from below.
  • the deformation detection sensor 1 is used, for example, in a foldable smartphone. As shown in FIG. 1, the deformation detection sensor 1 includes a flexible base material 2, a first sensor 3, a first deformation inhibiting member 4, a second deformation inhibiting member 5, and an arithmetic circuit (not shown). .
  • the flexible base material 2 has a rectangular sheet shape when viewed in the vertical direction. Therefore, the flexible base material 2 has a base material upper main surface US2 and a base material lower main surface LS2 that are arranged in the vertical direction. The upper main surface US2 of the base material is located above the lower main surface LS2 of the base material. Furthermore, the flexible base material 2 has long sides extending in the left-right direction and short sides extending in the front-rear direction when viewed in the up-down direction.
  • the flexible base material 2 has flexibility. Therefore, the flexible base material 2 is bent at the first bending line L1 extending in the front-rear direction, as shown in FIGS. 3 and 4. As shown in FIG. 3, the flexible base material 2 has non-curved sections NCS1, NCS3 and a curved section CS2.
  • the non-curving sections NCS1 and NCS3 are sections that do not curve when the flexible base material 2 is bent at the first bending line L1.
  • the curved section CS2 is a section that curves when the flexible base material 2 is bent along the first bending line L1.
  • the non-curved section NCS1, the curved section CS2, and the non-curved section NCS3 are arranged in this order from left to right in a state where the flexible base material 2 is not bent.
  • the flexible base material 2 includes a first portion P1 and a second portion P2.
  • the first portion P1 is a portion located in the non-curved section NCS1.
  • the second portion P2 is a portion located in the non-curved section NCS3.
  • the second portion P2 can rotate relative to the first portion P1 by bending the flexible base material 2, as shown in FIG.
  • the flexible base material 2 is, for example, a display.
  • the flexible base material 2 is realized by, for example, one organic EL display.
  • the first sensor 3 outputs a first detection signal SigD1 according to the deformation of the curved section CS2 of the flexible base material 2.
  • the first sensor 3 is provided on the main surface US2 of the flexible base material 2, as shown in FIG. More specifically, as shown in FIG. 5, the first sensor 3 has a first upper main surface US3 and a first lower main surface LS3 that are arranged in the vertical direction.
  • the first upper main surface US3 is located above the first lower main surface LS3.
  • the first sensor 3 is arranged on the upper main surface of the flexible base material 2 such that the first lower main surface LS3 is in contact with the upper main surface US2 of the flexible base material 2. Located in US2.
  • the first sensor 3 has a rectangular shape with long sides extending in the left-right direction and short sides extending in the front-rear direction when viewed in the up-down direction.
  • the first sensor 3 includes a first piezoelectric film 31, a first upper electrode 32, and a first lower electrode 33, as shown in FIG.
  • the first piezoelectric film 31 has a sheet shape. Therefore, as shown in FIG. 5, the first piezoelectric film 31 has a first piezoelectric film upper main surface US31 and a first piezoelectric film lower main surface LS31 that are arranged in the vertical direction. The first piezoelectric film upper main surface US31 is located above the first piezoelectric film lower main surface LS31.
  • the first piezoelectric film 31 has a rectangular shape with long sides extending in the left-right direction and short sides extending in the front-rear direction when viewed in the up-down direction.
  • the first piezoelectric film 31 generates an electric charge according to the amount of deformation of the first piezoelectric film 31.
  • the first piezoelectric film 31 is a PLA film. Below, the first piezoelectric film 31 will be explained in more detail.
  • the first piezoelectric film 31 is configured such that the polarity of the charge generated when the first piezoelectric film 31 is stretched in the piezoelectric film left-right direction is different from the charge generated when the first piezoelectric film 31 is stretched in the piezoelectric film front-rear direction. It has the opposite polarity.
  • the first piezoelectric film 31 is a film made of chiral polymer.
  • the chiral polymer is, for example, polylactic acid (PLA), particularly L-type polylactic acid (PLLA).
  • PLLA which is a chiral polymer, has a main chain having a helical structure.
  • PLLA has piezoelectricity in which molecules are oriented by being uniaxially stretched.
  • the first piezoelectric film 31 has a piezoelectric constant of d14.
  • a clockwise direction with respect to a predetermined direction when viewed in the vertical direction (vertical direction) of the piezoelectric film is defined as a negative angle
  • the direction counterclockwise with respect to a predetermined direction is defined as a positive angle when viewed in the vertical direction (vertical direction) of the piezoelectric film.
  • the uniaxial stretching direction OD of the first piezoelectric film 31 forms an angle of 45 degrees with respect to the horizontal direction (horizontal direction) of the piezoelectric film when viewed in the vertical direction (vertical direction) of the piezoelectric film,
  • the piezoelectric film forms an angle of -45 degrees with respect to the front-back direction (the piezoelectric film front-back direction) when viewed in the vertical direction (up-down direction). Therefore, as shown in FIG. 6, the uniaxial stretching direction OD of the first piezoelectric film 31 is - with respect to the first bending line L1 when viewed in the vertical direction when the flexible base material 2 is not bent. It forms a 45 degree angle.
  • this -45 degrees includes, for example, an angle including about -45 degrees ⁇ 10 degrees. Further, this -45 degrees includes an angle including about 135 degrees ⁇ 10 degrees (about -225 degrees ⁇ 10 degrees). Thereby, the first piezoelectric film 31 generates an electric charge when the first piezoelectric film 31 is stretched in the piezoelectric film left-right direction or the piezoelectric film front-back direction.
  • the polarity of the charge generated in the first piezoelectric film 31 when the first piezoelectric film 31 is stretched in the piezoelectric film left-right direction is differs from the polarity of the generated charge.
  • the first piezoelectric film 31 generates negative charges when the piezoelectric film is stretched in the left-right direction.
  • the first piezoelectric film 31 generates a positive charge when stretched in the front-rear direction of the piezoelectric film.
  • the magnitude of the charge depends on the amount of deformation of the first piezoelectric film 31 due to expansion or compression. More precisely, the magnitude of the charge is proportional to the differential value of the amount of deformation of the first piezoelectric film 31 due to expansion or compression.
  • the first upper electrode 32 is a ground electrode.
  • the first upper electrode 32 has an upper main surface and a lower main surface that are arranged in the vertical direction.
  • the first upper electrode 32 is electrically connected to ground potential.
  • the first upper electrode 32 is provided on the first piezoelectric film upper main surface US31 of the first piezoelectric film 31, as shown in FIG.
  • the first upper electrode 32 covers the entire first piezoelectric film upper main surface US31 of the first piezoelectric film 31, as shown in FIG.
  • the first upper electrode 32 includes an adhesive layer (not shown).
  • the first upper electrode 32 is fixed to the first piezoelectric film upper main surface US31 of the first piezoelectric film 31 by this adhesive layer.
  • the upper main surface of the first upper electrode 32 is the first upper main surface US3 of the first sensor 3.
  • the first lower electrode 33 is a first signal electrode.
  • the first lower electrode 33 has an upper main surface and a lower main surface that are arranged in the vertical direction.
  • a first detection signal SigD1 corresponding to the deformation of the curved section CS2 of the flexible base material 2 is output from the first lower electrode 33.
  • the first lower electrode 33 is provided on the first piezoelectric film lower main surface LS31 of the first piezoelectric film 31, as shown in FIG.
  • the first lower electrode 33 covers the entire first piezoelectric film lower main surface LS31 of the first piezoelectric film 31, as shown in FIG.
  • the first lower electrode 33 includes an adhesive layer (not shown).
  • the first lower electrode 33 is fixed to the first piezoelectric film lower main surface LS31 of the first piezoelectric film 31 by this adhesive layer.
  • the lower main surface of the first lower electrode 33 is the first lower main surface LS3 of the first sensor 3.
  • such a first sensor 3 is provided on the main surface US2 of the flexible base material 2 so as to straddle the first bending line L1 when viewed in the vertical direction. That is, the first sensor 3 has a portion located to the left of the first bending line L1 and a portion located to the right of the first bending line L1.
  • the first deformation inhibiting member 4 and the second deformation inhibiting member 5 are lined up in this order from left to right with an interval between them. Moreover, the first deformation inhibiting member 4 is located to the left of the first bending line L1, as shown in FIG. The second deformation inhibiting member 5 is located to the right of the first bending line L1. Therefore, as shown in FIG. 1, the first deformation inhibiting member 4 and the second deformation inhibiting member 5 do not overlap each other when viewed in the vertical direction.
  • the first deformation inhibiting member 4 has a rectangular shape having short sides extending in the left-right direction and long sides extending in the front-rear direction when viewed in the vertical direction.
  • the material of the first deformation inhibiting member 4 is, for example, metal, resin, ceramic, or glass.
  • the first deformation inhibiting member 4 is harder than the first piezoelectric film 31 of the first sensor 3.
  • the Young's modulus of the first deformation inhibiting member 4 is greater than the Young's modulus of the first piezoelectric film 31 of the first sensor 3.
  • the first deformation inhibiting member 4 is provided on the first upper main surface US3 of the first sensor 3, as shown in FIG. Therefore, as shown in FIG. 7, the first deformation inhibiting member 4 has a first region A1 that overlaps with the first piezoelectric film 31 when viewed in the vertical direction.
  • the first region A1 is located to the left of the first bending line L1.
  • the first deformation inhibiting member 4 covers the entire left side surface, the left end portion of the front side surface, and the left end portion of the rear side surface of the first sensor 3, as shown in FIG.
  • the first deformation inhibiting member 4 is located in front of the first sensor 3, in the left front of the first sensor 3, in the left of the first sensor 3, in the left rear of the first sensor 3, and in the front left of the first sensor 3, when viewed in the vertical direction.
  • it is in contact with the main surface US2 of the flexible base material 2. That is, as shown in FIG. 7, the first deformation inhibiting member 4 is in contact with the main surface US2 of the flexible base material 2, and when viewed in the vertical direction, the first piezoelectric film of the first sensor 3. It has a third area A3 that does not overlap with 31.
  • the first deformation inhibiting member 4 is fixed to the main surface US2 of the base material in the third region A3.
  • the second deformation inhibiting member 5 has a rectangular shape having short sides extending in the left-right direction and long sides extending in the front-rear direction when viewed in the vertical direction.
  • the material of the second deformation inhibiting member 5 is, for example, metal, resin, ceramic, or glass.
  • the second deformation inhibiting member 5 is harder than the first piezoelectric film 31 of the first sensor 3.
  • the Young's modulus of the second deformation inhibiting member 5 is greater than the Young's modulus of the first piezoelectric film 31 of the first sensor 3.
  • the second deformation inhibiting member 5 is provided on the first upper main surface US3 of the first sensor 3, as shown in FIG. Therefore, as shown in FIG. 7, the second deformation inhibiting member 5 has a second region A2 that overlaps with the first piezoelectric film 31 when viewed in the vertical direction. In this embodiment, the second region A2 is located to the right of the first bending line L1.
  • the second deformation inhibiting member 5 covers the entire right side surface, the right end portion of the front side surface, and the right end portion of the rear side surface of the first sensor 3, as shown in FIG. Thereby, the second deformation inhibiting member 5 is located in front of the first sensor 3, right front of the first sensor 3, right of the first sensor 3, right rear of the first sensor 3, and the first sensor 3 when viewed in the vertical direction. After , it is in contact with the main surface US2 of the flexible base material 2. That is, as shown in FIG. 7, the second deformation inhibiting member 5 is in contact with the main surface US2 of the flexible base material 2, and when viewed in the vertical direction, the second deformation inhibiting member 5 is in contact with the first piezoelectric film of the first sensor 3. It has a fourth area A4 that does not overlap with 31. The second deformation inhibiting member 5 is fixed to the main surface US2 of the base material in the fourth region A4.
  • the first area A1 and the second area A2 are spaced apart from each other in the left-right direction. More specifically, the first area A1 is located to the left of the second area A2. Further, the first region A1 and the second region A2 do not touch each other when viewed in the vertical direction when the flexible base material 2 is not bent. Therefore, the first area A1 and the second area A2 do not overlap each other when viewed in the vertical direction. Further, the first piezoelectric film 31 has a tenth region A10 that does not overlap with the first deformation inhibiting member 4 and the second deformation inhibiting member 5 when viewed in the vertical direction.
  • a distance D1 in the left-right direction between the first area A1 and the second area A2 is defined.
  • the distance D1 in the left-right direction between the first area A1 and the second area A2 is the shortest distance in the left-right direction between the parts where the first area A1 and the second area A2 do not touch each other. be.
  • the right end of the first region A1 coincides with a part of the right side of the first deformation inhibiting member 4.
  • the right side of the first deformation inhibiting member 4 extends in the front-rear direction.
  • the left end of the second region A2 coincides with a part of the left side of the second deformation inhibiting member 5.
  • the left side of the second deformation inhibiting member 5 extends in the front-rear direction. Therefore, the distance D1 in the left-right direction between the first region A1 and the second region A2 is the distance between the right side of the first deformation inhibiting member 4 and the left side of the second deformation inhibiting member 5 when viewed in the vertical direction. be.
  • the distance D1 in the left-right direction between the first area A1 and the second area A2 is the distance D1 in the left-right direction of the first piezoelectric film 31 when the flexible base material 2 is not bent. Length shorter than DLR31.
  • the position in the left-right direction where the first region A1 exists is defined as a first position PO1, as shown in FIG. 8.
  • the position in the left-right direction where the second region A2 exists is defined as a second position PO2.
  • the length DFB4 of the first deformation inhibiting member 4 in the front-rear direction at the first position PO1 is the length DFB4 of the first piezoelectric film at the first position PO1 when the flexible base material 2 is not bent. 31 in the front-back direction is longer than the length DFB311. Note that the length DFB4 of the first deformation inhibiting member 4 in the front-rear direction at the first position PO1 is the length DFB4 of the first piezoelectric film 31 in the front-rear direction at the first position PO1 when the flexible base material 2 is not bent. It is sufficient that the first position PO1 longer than the length DFB311 exists.
  • the length DFB5 of the second deformation inhibiting member 5 in the front-rear direction at the second position PO2 is the length DFB5 of the first piezoelectric film at the second position PO2 when the flexible base material 2 is not bent. 31 in the front-back direction is longer than DFB312.
  • the maximum value of the length DFB5 in the front-rear direction of the second deformation inhibiting member 5 at the second position PO2 is the maximum value of the length DFB5 of the first piezoelectric film 31 at the second position PO2 when the flexible base material 2 is not bent. It is sufficient that the first position PO1 is longer than the length DFB312 in the front-rear direction.
  • the first detection signal SigD1 output from the first sensor 3 is input to the arithmetic circuit.
  • the arithmetic circuit calculates a first integral value IV1 by time-integrating the first detection signal SigD1. Further, the arithmetic circuit calculates the bending angle ⁇ of the flexible base material 2 by associating the first integral value IV1 with the bending angle ⁇ of the flexible base material 2.
  • the method of associating the first integral value IV1 with the bending angle ⁇ of the flexible base material 2 is, for example, when the first integral value IV1 is 0, the bending angle ⁇ of the flexible base material 2 is set to 0, Further, when the first integral value IV1 is ⁇ 180, the bending angle ⁇ of the flexible base material 2 is set to 180 degrees. Further, for example, when ⁇ 180 ⁇ first integral value IV1 ⁇ 0, the absolute value of the first integral value IV1 is set as the bending angle ⁇ (degrees) of the flexible base material 2. Note that the method of associating the first integral value IV1 with the bending angle ⁇ of the flexible base material 2 is merely an example, and other methods may be used.
  • the arithmetic circuit sets the bending angle ⁇ of the flexible base material 2 to ⁇ a when the value of the first detection signal SigD1 becomes discontinuous.
  • ⁇ a is the value of the flexible base material 2 at which the first deformation inhibiting member 4 and the second deformation inhibiting member 5 begin to contact each other when the bending angle ⁇ of the flexible base material 2 is changed from 0 degrees to 180 degrees.
  • the bending angle is ⁇ .
  • the arithmetic circuit corrects the first integral value IV1 to a value associated with ⁇ a.
  • FIG. 9 is an exploded perspective view of the electronic device 100 according to the first embodiment.
  • FIG. 10 is a sectional view of the electronic device 100 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 0 degrees according to the first embodiment.
  • FIG. 11 is a sectional view of the electronic device 100 viewed from the front when the bending angle ⁇ of the flexible base material 2 is 180 degrees according to the first embodiment.
  • the electronic device 100 includes a deformation detection sensor 1, a flexible base material 2, a first housing 6, and a second housing 7.
  • Electronic device 100 is, for example, a foldable smartphone.
  • the first housing 6 is provided on the lower main surface LS2 of the flexible base material 2, as shown in FIG.
  • the first housing 6 is a box, as shown in FIG.
  • the first housing 6 has a rectangular parallelepiped shape.
  • the second housing 7 is provided on the lower main surface LS2 of the flexible base material 2, as shown in FIG.
  • the second housing 7 is a box, as shown in FIG.
  • the second housing 7 has a rectangular parallelepiped shape.
  • the first housing 6 is located in the non-curved section NCS1 of the flexible base material 2 when viewed in the vertical direction.
  • the second housing 7 is located in the non-curved section NCS3 of the flexible base material 2 when viewed in the vertical direction.
  • the second housing 7 can rotate relative to the first housing 6 as shown in FIG. 11 by bending the flexible base material 2.
  • the first housing 6 is located to the left of the first bending line L1.
  • the second housing 7 is located to the right of the first bending line L1. That is, as shown in FIG. 9, the first bending line L1 is located between the first housing 6 and the second housing 7 when viewed in the vertical direction when the flexible base material 2 is not bent. Located in Moreover, the first housing 6 and the second housing 7 do not overlap each other when viewed in the vertical direction when the flexible base material 2 is not bent.
  • FIG. 12 is a sectional view of the deformation detection sensor 10 according to the comparative example when the bending angle ⁇ of the flexible base material 2 according to the comparative example is 0 degrees, viewed from the front.
  • FIG. 13 is a sectional view of the deformation detection sensor 10 according to the comparative example when the bending angle ⁇ of the flexible base material 2 according to the comparative example is 180 degrees, viewed from the front.
  • FIG. 14 is an example of the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the comparative example is changed from 0 degrees to 180 degrees.
  • FIG. 12 is a sectional view of the deformation detection sensor 10 according to the comparative example when the bending angle ⁇ of the flexible base material 2 according to the comparative example is 0 degrees, viewed from the front.
  • FIG. 13 is a sectional view of the deformation detection sensor 10 according to the comparative example when the bending angle ⁇ of the flexible base material 2 according to the comparative example is 180 degrees, viewed
  • the horizontal axis indicates the bending angle ⁇ of the flexible base material 2.
  • the vertical axis indicates the value of the first detection signal SigD1.
  • FIG. 15 is an example of the first integral value IV1 when the bending angle ⁇ of the flexible base material 2 according to the comparative example is changed from 0 degrees to 180 degrees.
  • the horizontal axis indicates time t.
  • the vertical axis indicates the first integral value IV1.
  • FIG. 16 shows the first integral value IV1 when noise N is superimposed on the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the comparative example is changed from 0 degrees to 180 degrees. This is an example.
  • FIG. 16 shows the first integral value IV1 when noise N is superimposed on the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the comparative example is changed from 0 degrees to 180 degrees. This is an example.
  • the horizontal axis indicates the bending angle ⁇ of the flexible base material 2 or the time t.
  • the vertical axis indicates the value of the first detection signal SigD1, the value of the noise N, and the first integral value IV1.
  • FIG. 17 is an example of the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the first embodiment is changed from 0 degrees to 180 degrees.
  • the horizontal axis indicates the bending angle ⁇ of the flexible base material 2.
  • the vertical axis indicates the value of the first detection signal SigD1.
  • FIG. 18 is a sectional view of the deformation detection sensor 1 and the flexible base material 2 viewed from the front when the bending angle ⁇ of the flexible base material 2 is ⁇ a according to the first embodiment.
  • FIG. 19 is an example of the first integral value IV1 when the bending angle ⁇ of the flexible base material 2 according to the first embodiment is changed from 0 degrees to 180 degrees.
  • the horizontal axis indicates time t.
  • the vertical axis indicates the first integral value IV1.
  • FIG. 20 shows the first integral when noise N is superimposed on the first detection signal SigD1 when the bending angle ⁇ of the flexible base material 2 according to the first embodiment is changed from 0 degrees to 180 degrees. This is an example of the value IV1.
  • the horizontal axis indicates the bending angle ⁇ of the flexible base material 2 or the time t.
  • the vertical axis indicates the value of the first detection signal SigD1, the value of the noise N, and the first integral value IV1.
  • the deformation detection sensor 10 according to the comparative example differs from the deformation detection sensor 1 in that it does not include the first deformation inhibiting member 4 and the second deformation inhibiting member 5.
  • the deformation detection sensor 10 according to the comparative example is the same as the deformation detection sensor 1 in other respects, so a description thereof will be omitted.
  • the first sensor 3 when the bending angle ⁇ of the flexible base material 2 is changed from 0 degrees (FIG. 12) to 180 degrees (FIG. 13) at a constant angular velocity, the first sensor 3 outputs The value of the first detection signal SigD1 is a constant negative value, as shown in FIG.
  • the reason why the first detection signal SigD1 is negative is that when the bending angle ⁇ of the flexible base material 2 is increased, the first piezoelectric film 31 is stretched in the piezoelectric film left-right direction. This is because negative charges are generated.
  • the reason why the value of the first detection signal SigD1 is a constant value is that the magnitude of the charge generated by the first piezoelectric film 31 is proportional to the differential value of the amount of deformation of the first piezoelectric film 31 due to stretching, and This is because the bending angle ⁇ of the flexible base material 2 was changed at a constant angular velocity.
  • the arithmetic circuit integrates the first detection signal SigD1 over time to calculate the first integral value IV1. Further, the arithmetic circuit calculates the bending angle ⁇ of the flexible base material 2 by associating the first integral value IV1 with the bending angle ⁇ of the flexible base material 2.
  • the deformation detection sensor 10 according to the comparative example detects the bending angle ⁇ of the flexible base material 2 by associating the first integral value IV1 calculated by the calculation circuit with the bending angle ⁇ of the flexible base material 2. . Therefore, noise N may enter the deformation detection sensor 10 according to the comparative example during deformation of the flexible base material 2, and due to repeated deformation of the flexible base material 2, etc., the actual flexible base material An error occurs between the bending angle ⁇ of the flexible base material 2 and the detected value of the bending angle ⁇ of the flexible base material 2.
  • the arithmetic circuit calculates the actual bending angle of the flexible base material 2 by determining that the first integral value IV1 is -180 when the angle is smaller than 180 degrees (referred to as ⁇ 1). Even though ⁇ is ⁇ 1, the bending angle ⁇ of the flexible base material 2 is calculated to be 180 degrees. Therefore, with the deformation detection sensor 10 according to the comparative example, it is difficult to accurately detect the bending angle ⁇ of the flexible base material 2.
  • the deformation detection sensor 1 when the bending angle ⁇ of the flexible base material 2 is changed from 0 degrees (FIG. 3) to 180 degrees (FIG. 4) at a constant angular velocity, the first sensor 3 outputs the first The value of the detection signal SigD1 has a discontinuous portion, as shown in FIG. The reason for this will be explained below.
  • the deformation detection sensor 1 when the bending angle ⁇ of the flexible base material 2 is changed from 0 degrees to 180 degrees at a constant angular velocity, the first deformation inhibiting member 4 and the second The deformation inhibiting members 5 do not contact each other. That is, as shown in FIG. 17, the value of the first detection signal SigD1 output by the first sensor 3 is a constant negative value in the range of 0 degrees ⁇ a.
  • the first deformation inhibiting member 4 and the second deformation inhibiting member 5 come into contact with each other, as shown in FIG. 18.
  • the first deformation inhibiting member 4 and the second deformation inhibiting member 5 contact each other.
  • the first deformation inhibiting member 4 and the second deformation inhibiting member 5 suppress the first piezoelectric film 31 from being stretched in the piezoelectric film left-right direction.
  • the absolute value of the first detection signal SigD1 in the range of ⁇ a ⁇ 180 degrees is the absolute value of the first detection signal SigD1 in the range of 0 degrees ⁇ a, as shown in FIG.
  • the first piezoelectric film 31 is stretched in the left-right direction of the piezoelectric film even in the range of ⁇ a ⁇ 180 degrees. Therefore, when the bending angle ⁇ of the flexible base material 2 is changed from ⁇ a (FIG. 18) to 180 degrees (FIG. 4) at a constant angular velocity, the first piezoelectric film 31 generates a negative charge. Therefore, as shown in FIG. 17, the value of the first detection signal SigD1 output by the first sensor 3 is a constant negative value in the range of ⁇ a ⁇ 180 degrees.
  • the arithmetic circuit calculates the first integral value IV1 by time-integrating the first detection signal SigD1. Further, the arithmetic circuit sets the bending angle ⁇ of the flexible base material 2 to ⁇ a when the value of the first detection signal SigD1 becomes discontinuous (time t1 in FIG. 19). At this time, the arithmetic circuit corrects the first integral value IV1 to - ⁇ a.
  • the arithmetic circuit sets the bending angle ⁇ of the flexible base material 2 to ⁇ a when the value of the first detection signal SigD1 becomes discontinuous (time t1 in FIG. 20). At this time, the arithmetic circuit corrects the first integral value IV1 to - ⁇ a. Therefore, the value of the first detection signal SigD1 in the range ⁇ a ⁇ 180 degrees is not affected by the superimposed noise N in the range 0 degrees ⁇ a. As a result, the deformation detection sensor 1 can accurately detect the bending angle ⁇ of the flexible base material 2.
  • the bending angle of the base material can be detected with high accuracy.
  • the first deformation inhibiting member 4 is provided on the first upper main surface US3 of the first sensor 3.
  • the second deformation inhibiting member 5 is provided on the first upper main surface US3 of the first sensor 3. That is, the first deformation inhibiting member 4 and the second deformation inhibiting member 5 are provided on the same surface of the first sensor 3.
  • the first deformation inhibiting member 4 is provided on the first upper main surface US3 of the first sensor 3, and thus has a first region A1 that overlaps with the first piezoelectric film 31.
  • the second deformation inhibiting member 5 is provided on the first upper main surface US3 of the first sensor 3 and has a second region A2 overlapping with the first piezoelectric film 31.
  • the first area A1 and the second area A2 do not touch each other when viewed in the vertical direction when the flexible base material 2 is not bent.
  • the first bending line L1 can be located between the first region A1 and the second region A2 when viewed in the vertical direction.
  • the flexible base material 2 is bent at the first bending line L1. At this time, the first deformation inhibiting member 4 and the second deformation inhibiting member 5 come into contact with each other.
  • the value of the first detection signal SigD1 output by the first sensor 3 becomes discontinuous when the bending angle ⁇ of the flexible base material 2 is ⁇ a.
  • ⁇ a is the value of the flexible base material 2 at which the first deformation inhibiting member 4 and the second deformation inhibiting member 5 begin to contact each other when the bending angle ⁇ of the flexible base material 2 is changed from 0 degrees to 180 degrees.
  • the bending angle is ⁇ . Therefore, the arithmetic circuit can set the bending angle ⁇ of the flexible base material 2 to ⁇ a when the value of the first detection signal SigD1 becomes discontinuous. At this time, the arithmetic circuit can correct the first integral value IV1 to a value associated with ⁇ a.
  • the deformation detection sensor 1 As a result, according to the deformation detection sensor 1, the value of the first detection signal SigD1 in the range of ⁇ a ⁇ 180 degrees is made such that it is not affected by the superimposed noise N in the range of 0 degrees ⁇ a. can do. Therefore, according to the deformation detection sensor 1, the bending angle ⁇ of the flexible base material 2 can be detected with high accuracy. As a result, the deformation detection sensor 1 can accurately detect the bending angle of the base material.
  • the deformation detection sensor 1 it is possible to suppress a decrease in reliability of the deformation detection sensor 1 due to positional deviation of the first deformation inhibition member 4 or the second deformation inhibition member 5.
  • the first deformation inhibiting member 4 has a third region A3 that is in contact with the main surface US2 of the flexible base material 2 and that does not overlap with the first piezoelectric film 31 when viewed in the vertical direction. have. Thereby, the first deformation inhibiting member 4 can be fixed to the main surface US2 of the flexible base material 2 in the third region A3. Therefore, according to the deformation detection sensor 1, the positional shift of the first deformation inhibiting member 4 can be suppressed.
  • the second deformation inhibiting member 5 also has a fourth region A4 that is in contact with the main surface US2 of the flexible base material 2 and that does not overlap with the first piezoelectric film 31 when viewed in the vertical direction. There is. Thereby, the second deformation inhibiting member 5 can be fixed to the main surface US2 of the flexible base material 2 in the fourth region A4. Therefore, according to the deformation detection sensor 1, the positional shift of the second deformation inhibiting member 5 can be suppressed. As a result, according to the deformation detection sensor 1, it is possible to suppress a decrease in reliability of the deformation detection sensor 1 due to positional deviation of the first deformation inhibition member 4 or the second deformation inhibition member 5.
  • the deformation detection sensor 1 it is possible to suppress the first piezoelectric film 31 from peeling off from the flexible base material 2 due to the deformation of the flexible base material 2.
  • the first sensor 3 is provided on the main surface US2 of the flexible base material 2.
  • the first deformation inhibiting member 4 is provided on the first upper main surface US3 of the first sensor 3.
  • the second deformation inhibiting member 5 is provided on the first upper main surface US3 of the first sensor 3. Deformation of the first sensor 3 is inhibited by the first deformation inhibiting member 4 and the second deformation inhibiting member 5.
  • peeling of the first piezoelectric film 31 from the flexible base material 2 due to the deformation of the flexible base material 2 can be suppressed.
  • the deformation detection sensor 1 peeling of the first piezoelectric film 31 from the flexible base material 2 due to deformation of the flexible base material 2 can be further suppressed. More specifically, the distance D1 in the left-right direction between the first region A1 and the second region A2 is longer than the length in the left-right direction of the first piezoelectric film 31 when the flexible base material 2 is not bent. short. Thereby, the area of the portion of the first piezoelectric film 31 exposed from the first deformation inhibiting member 4 or the second deformation inhibiting member 5 can be reduced when viewed in the vertical direction. As a result, according to the deformation detection sensor 1, peeling of the first piezoelectric film 31 from the flexible base material 2 due to deformation of the flexible base material 2 can be further suppressed.
  • the deformation detection sensor 1 peeling of the first piezoelectric film 31 from the flexible base material 2 due to deformation of the flexible base material 2 can be further suppressed. More specifically, the length of the first deformation inhibiting member 4 in the front-rear direction at the first position PO1 (the position in the left-right direction where the first region A1 exists) is the same as the length of the first deformation inhibiting member 4 in the front-rear direction when the flexible base material 2 is not bent. , there is a first position PO1 that is longer than the longitudinal length of the first piezoelectric film 31 at the first position PO1.
  • the main surface on the base material of the flexible base material 2 is in front or behind the first piezoelectric film 31. It can be fixed to US2. Therefore, the first piezoelectric film 31 can be more firmly fixed to the main surface US2 of the flexible base material 2.
  • the length of the second deformation inhibiting member 5 in the front-rear direction at the second position PO2 is the same as that of the second There is a second position PO2 that is longer than the length of the first piezoelectric film 31 in the front-rear direction at the position PO2.
  • the main surface on the base material of the flexible base material 2 is in front or behind the first piezoelectric film 31. It can be fixed to US2. Therefore, the first piezoelectric film 31 can be more firmly fixed to the main surface US2 of the flexible base material 2. As a result, according to the deformation detection sensor 1, peeling of the first piezoelectric film 31 from the flexible base material 2 due to the deformation of the flexible base material 2 can be suppressed.
  • the bending angle of the base material can be detected with higher accuracy.
  • the first upper electrode 32 of the first sensor 3 is provided on the first piezoelectric film upper main surface US31 of the first piezoelectric film 31.
  • the first upper electrode 32 is a ground electrode electrically connected to a ground potential. Therefore, the first upper electrode 32 serves as a shield against noise that enters the deformation detection sensor 1 from outside. Thereby, according to the deformation detection sensor 1, it becomes difficult for noise to enter from the outside of the deformation detection sensor 1. As a result, the deformation detection sensor 1 can detect the bending angle of the base material with higher accuracy.
  • FIG. 21 is an exploded perspective view of a deformation detection sensor 1a according to a first modification.
  • the deformation detection sensor 1a according to the first modification only the parts that are different from the deformation detection sensor 1 according to the first embodiment will be explained, and the rest will be omitted.
  • the deformation detection sensor 1a has the following features: the first deformation inhibiting member 4 is provided on the first lower main surface LS3 of the first sensor 3, and the second deformation inhibiting member 5 is provided on the first lower main surface of the first sensor 3. It differs from the deformation detection sensor 1 in that it is provided in the LS3.
  • the first sensor 3 is formed of a flexible base such that the first lower main surface LS3 is in contact with the upper main surface of the first deformation inhibiting member 4 and the upper main surface of the second deformation inhibiting member 5. It is provided on the main surface US2 of the base material 2.
  • the deformation detection sensor 1a as described above also has the same effects as the deformation detection sensor 1.
  • the second deformation inhibiting member 5 is arranged on the first upper major surface US3 or the first upper major surface US3 or the first lower major surface LS3, on which the first deformation inhibiting member 4 is provided, of the first upper major surface US3 and first lower major surface LS3 of the first sensor 3. It is sufficient if it is provided on the lower main surface LS3.
  • FIG. 22 is a plan view of the deformation detection sensor 1b according to the second modification, viewed from below.
  • the deformation detection sensor 1b according to the second modification only the parts that are different from the deformation detection sensor 1 according to the first embodiment will be explained, and the rest will be omitted.
  • the deformation detection sensor 1a is different from the deformation detection sensor 1 in that it has a fifth area A5 where the first area A1 of the first deformation inhibiting member 4 and the second area A2 of the second deformation inhibiting member 5 overlap each other. do.
  • the first area A1 and the second area A2 overlap each other in the fifth area A5. Moreover, the first area A1 and the second area A2 touch each other in the fifth area A5.
  • the first region A1 and the second region A2 have a third portion P3 that does not touch each other when viewed in the vertical direction when the flexible base material 2 is not bent. In this modification, the third portion P3 is located in front of the fifth area A5. Note that the first deformation inhibiting member 4 and the second deformation inhibiting member 5 have flexibility in the fifth region A5.
  • the deformation detection sensor 1b as described above also has the same effect as the deformation detection sensor 1.
  • the first region A1 and the second region A2 only need to have the third portion P3 that does not touch each other when viewed in the vertical direction when the flexible base material 2 is not bent.
  • FIG. 23 is a plan view of the deformation detection sensor 1c according to the third modification, viewed from below.
  • the deformation detection sensor 1c according to the third modification only the parts that are different from the deformation detection sensor 1b according to the second modification will be explained, and the rest will be omitted.
  • the deformation detection sensor 1c differs from the deformation detection sensor 1b in that the first deformation inhibiting member 4 and the second deformation inhibiting member 5 are included in a single member 8.
  • the left part of the member 8 and the right part of the member 8 are connected in the fifth area A5, as shown in FIG. Note that the member 8 has flexibility in the fifth region A5.
  • the deformation detection sensor 1c as described above also has the same effect as the deformation detection sensor 1b.
  • FIG. 24 is an exploded perspective view of a deformation detection sensor 1d according to the second embodiment.
  • FIG. 25 is an exploded perspective view of an electronic device 100d according to the second embodiment.
  • FIG. 26 shows the second integral when the noise N is superimposed on the second detection signal SigD2 when the bending angle ⁇ of the flexible base material 2 according to the second embodiment is changed from 0 degrees to 180 degrees. This is an example of the value IV2.
  • the horizontal axis indicates the bending angle ⁇ of the flexible base material 2 or the time t.
  • the vertical axis indicates the value of the second detection signal SigD2, the value of the noise N, and the second integral value IV2.
  • the deformation detection sensor 1d differs from the deformation detection sensor 1b in that it further includes a second sensor 11.
  • the second sensor 11 outputs a second detection signal SigD2 according to the deformation of the curved section CS2 of the flexible base material 2.
  • the second sensor 11 includes a second piezoelectric film 111, a second upper electrode 112, and a second lower electrode 113, as shown in FIG.
  • the second sensor 11 is provided on the main surface US2 of the flexible base material 2. More specifically, the second sensor 11 has a second upper main surface US11 and a second lower main surface LS11 that are arranged in the vertical direction.
  • the second upper main surface US11 is located above the second lower main surface LS11.
  • the second sensor 11 is provided on the upper main surface US2 of the flexible base material 2 such that the second lower main surface LS11 is in contact with the upper main surface US2 of the flexible base material 2.
  • the second sensor 11 has a rectangular shape with long sides extending in the left-right direction and short sides extending in the front-rear direction when viewed in the up-down direction.
  • the second piezoelectric film 111 has a sheet shape, as shown in FIG. Therefore, the second piezoelectric film 111 has a second piezoelectric film upper main surface US111 and a second piezoelectric film lower main surface LS111 that are arranged in the vertical direction.
  • the second piezoelectric film upper main surface US111 is located above the second piezoelectric film lower main surface LS111.
  • the second piezoelectric film 111 has a rectangular shape with long sides extending in the left-right direction and short sides extending in the front-rear direction when viewed in the up-down direction. Note that the second piezoelectric film 111 has the same structure as the first piezoelectric film 31, so a description thereof will be omitted.
  • the second upper electrode 112 is a ground electrode.
  • the second upper electrode 112 has an upper main surface and a lower main surface that are arranged in the vertical direction.
  • the second upper electrode 112 is electrically connected to ground potential.
  • the second upper electrode 112 is provided on the second piezoelectric film upper main surface US111 of the second piezoelectric film 111, as shown in FIG. Note that the second upper electrode 112 has the same structure as the first upper electrode 32, so a description thereof will be omitted.
  • the second lower electrode 113 is a second signal electrode.
  • the second lower electrode 113 has an upper main surface and a lower main surface that are arranged in the vertical direction.
  • a second detection signal SigD2 corresponding to the deformation of the curved section CS2 of the flexible base material 2 is output from the second lower electrode 113.
  • the second lower electrode 113 is provided on the second piezoelectric film lower main surface LS111 of the second piezoelectric film 111, as shown in FIG. Note that the second lower electrode 113 has the same structure as the first lower electrode 33, so a description thereof will be omitted.
  • such a second sensor 11 has a structure in which the first sensor 3, the first deformation inhibiting member 4, and the second It does not overlap with the deformation inhibiting member 5.
  • the electronic device 100a may include a deformation detection sensor 1d, a first housing 6, and a second housing 7, as shown in FIG.
  • the first detection signal SigD1 output from the first sensor 3 and the second detection signal SigD2 output from the second sensor 11 are input to the arithmetic circuit.
  • the arithmetic circuit calculates a second integral value IV2 by time-integrating the second detection signal SigD2. Further, the arithmetic circuit calculates the bending angle ⁇ of the flexible base material 2 by associating the second integral value IV2 with the bending angle ⁇ of the flexible base material 2. Further, the arithmetic circuit sets the bending angle ⁇ of the flexible base material 2 to ⁇ a when the value of the first detection signal SigD1 becomes discontinuous. At this time, the arithmetic circuit corrects the second integral value IV2 to a value associated with ⁇ a.
  • the value of the second detection signal SigD2 becomes a constant negative value, as shown in FIG. 26.
  • the reason why the second detection signal SigD2 is negative is the same as the reason why the first detection signal SigD1 according to the comparative example is negative, so the explanation will be omitted.
  • the arithmetic circuit sets the bending angle ⁇ of the flexible base material 2 to ⁇ a when the value of the first detection signal SigD1 becomes discontinuous (time t1 in FIG. 26). At this time, the arithmetic circuit corrects the second integral value IV2 to - ⁇ a. Therefore, the value of the second detection signal SigD2 in the range of ⁇ a ⁇ 180 degrees is not affected by the superimposed noise N in the range of 0 degrees ⁇ a. In this way, according to the deformation detection sensor 1d, by using the first detection signal SigD1 outputted by the first sensor 3, the detection accuracy of the bending angle ⁇ of the flexible base material 2 of the second sensor 11 is also improved. can do.
  • FIG. 27 is an exploded perspective view of a deformation detection sensor 1e according to a fourth modification.
  • the deformation detection sensor 1e according to the fourth modification only the parts that are different from the deformation detection sensor 1d according to the second embodiment will be explained, and the rest will be omitted.
  • the deformation detection sensor 1e differs from the deformation detection sensor 1d in that the second sensor 11 is provided on the lower main surface LS2 of the flexible base 2.
  • the second sensor 11 is arranged on the lower main surface of the flexible base material 2 such that the second upper main surface US11 is in contact with the lower main surface LS2 of the flexible base material 2. Provided in LS2.
  • the second upper electrode 112 is a second signal electrode.
  • a second detection signal SigD2 corresponding to the deformation of the curved section CS2 of the flexible base material 2 is output from the second upper electrode 112.
  • the second lower electrode 113 is a ground electrode.
  • the second lower electrode 113 is electrically connected to ground potential.
  • the deformation detection sensor 1e as described above also has the same effect as the deformation detection sensor 1d.
  • FIG. 28 is an exploded perspective view of a deformation detection sensor 1f according to the third embodiment.
  • FIG. 29 is a plan view of the deformation detection sensor 1f according to the third embodiment, viewed from below.
  • the deformation detection sensor 1f according to the third embodiment only the parts that are different from the deformation detection sensor 1 according to the first embodiment will be explained, and the rest will be omitted.
  • the deformation detection sensor 1f differs from the deformation detection sensor 1 in that it further includes a third deformation inhibiting member 12.
  • the third deformation inhibiting member 12 is provided on the first upper main surface US3 of the first sensor 3, as shown in FIG. Therefore, as shown in FIG. 29, the third deformation inhibiting member 12 has a sixth region A6 that overlaps with the first piezoelectric film 31 when viewed in the vertical direction.
  • the first deformation inhibiting member 4, the third deformation inhibiting member 12, and the second deformation inhibiting member 5 are arranged in this order from left to right at intervals. Therefore, as shown in FIG. 29, the first deformation inhibiting member 4, the second deformation inhibiting member 5, and the third deformation inhibiting member 12 do not overlap each other when viewed in the vertical direction.
  • the third deformation inhibiting member 12 has a rectangular shape with short sides extending in the left-right direction and long sides extending in the front-rear direction when viewed in the vertical direction.
  • the material of the third deformation inhibiting member 12 is, for example, metal, resin, ceramic, or glass.
  • the third deformation inhibiting member 12 is harder than the first piezoelectric film 31 of the first sensor 3.
  • the Young's modulus of the third deformation inhibiting member 12 is greater than the Young's modulus of the first piezoelectric film 31 of the first sensor 3.
  • the first area A1, the sixth area A6, and the second area A2 are lined up in this order from left to right at intervals. That is, the first area A1, the sixth area A6, and the second area A2 are arranged at intervals in the left-right direction. Therefore, the sixth region A6 is located between the first region A1 and the second region A2 when viewed in the vertical direction when the flexible base material 2 is not bent. Further, the sixth region A6 does not touch each of the first region A1 and the second region A2 when viewed in the vertical direction when the flexible base material 2 is not bent. Therefore, the first area A1, the second area A2, and the sixth area A6 do not overlap each other when viewed in the vertical direction. Moreover, the first piezoelectric film 31 has an eleventh region A11 that does not overlap with the first deformation inhibiting member 4, the second deformation inhibiting member 5, and the third deformation inhibiting member 12 when viewed in the vertical direction.
  • a distance D16 in the left-right direction between the first area A1 and the sixth area A6 is defined.
  • the distance D16 in the left-right direction between the first area A1 and the sixth area A6 is the shortest distance between the parts where the first area A1 and the sixth area A6 do not touch each other.
  • the right end of the first region A1 coincides with a part of the right side of the first deformation inhibiting member 4.
  • the right side of the first deformation inhibiting member 4 extends in the front-rear direction.
  • the left end of the sixth region A6 coincides with a part of the left side of the third deformation inhibiting member 12.
  • the left side of the third deformation inhibiting member 12 extends in the front-rear direction. Therefore, the distance D16 in the left-right direction between the first region A1 and the sixth region A6 is the distance D16 in the left-right direction between the right side of the first deformation inhibiting member 4 and the left side of the third deformation inhibiting member 12 when viewed in the vertical direction. is the distance.
  • a distance D26 in the left-right direction between the second area A2 and the sixth area A6 is defined.
  • the distance D26 in the left-right direction between the second area A2 and the sixth area A6 is the shortest distance between the parts where the second area A2 and the sixth area A6 do not touch each other.
  • the left end of the second region A2 coincides with a part of the left side of the second deformation inhibiting member 5.
  • the left side of the second deformation inhibiting member 5 extends in the front-rear direction.
  • the right end of the sixth region A6 coincides with a part of the right side of the third deformation inhibiting member 12.
  • the right side of the third deformation inhibiting member 12 extends in the front-rear direction. Therefore, the distance D26 in the left-right direction between the second region A2 and the sixth region A6 is the distance D26 in the left-right direction between the left side of the second deformation inhibiting member 5 and the right side of the third deformation inhibiting member 12 when viewed in the vertical direction. is the distance.
  • the distance D16 in the left-right direction between the first region A1 and the sixth region A6 is the distance D16 between the second region A2 and the sixth region A6 when the flexible base material 2 is not bent. It is different from the distance D26 in the left-right direction between the two. In this embodiment, the distance D16 in the left-right direction between the first area A1 and the sixth area A6 is shorter than the distance D26 in the left-right direction between the second area A2 and the sixth area A6.
  • the bending angle ⁇ of the flexible base material 2 at which the first deformation inhibiting member 4 and the third deformation inhibiting member 12 begin to contact each other when changed from 0 degrees to 180 degrees is defined as ⁇ a1.
  • the bending angle ⁇ of the flexible base material 2 at which the second deformation inhibiting member 5 and the third deformation inhibiting member 12 begin to contact each other when changed from 0 degrees to 180 degrees is defined as ⁇ a2.
  • ⁇ a1 is smaller than ⁇ a2 because the distance D16 in the left-right direction between the first area A1 and the sixth area A6 is shorter than the distance D26 in the left-right direction between the second area A2 and the sixth area A6. That is, in this embodiment, the value of the first detection signal SigD1 becomes discontinuous when the bending angle ⁇ of the flexible base material 2 is ⁇ a1 or ⁇ a2.
  • the arithmetic circuit sets the bending angle ⁇ of the flexible base material 2 to ⁇ a1 or ⁇ a2 when the value of the first detection signal SigD1 becomes discontinuous.
  • the arithmetic circuit associates the absolute value of the difference between the first integral value IV1 and the value associated with ⁇ a1 with the first integral value IV1 and ⁇ a2. Compare the absolute value of the difference with the given value. If the absolute value of the difference between the first integral value IV1 and the value associated with ⁇ a1 is smaller than the absolute value of the difference between the first integral value IV1 and the value associated with ⁇ a2, the arithmetic circuit Let the bending angle ⁇ of 2 be ⁇ a1. At this time, the arithmetic circuit corrects the first integral value IV1 to a value associated with ⁇ a1.
  • the arithmetic circuit determines the flexibility. Let the bending angle ⁇ of the base material 2 be ⁇ a2. At this time, the arithmetic circuit corrects the first integral value IV1 to a value associated with ⁇ a2.
  • the arithmetic circuit may set the bending angle ⁇ of the flexible base material 2 to ⁇ a1 or ⁇ a2 using another method. For example, the arithmetic circuit adjusts the bending angle ⁇ of the flexible base material 2 to either ⁇ a1 or ⁇ a2 based on the value of the first detection signal SigD1 immediately before and/or immediately after the value of the first detection signal SigD1 becomes discontinuous. You may decide whether to
  • the bending angle of the base material can be detected with higher accuracy. More specifically, the distance D16 in the left-right direction between the first region A1 and the sixth region A6 is the distance D16 between the second region A2 and the sixth region A6 when the flexible base material 2 is not bent. It is different from the distance D26 in the left-right direction between them. Thereby, the value of the first detection signal SigD1 output by the first sensor 3 becomes discontinuous when the bending angle ⁇ of the flexible base material 2 is ⁇ a1 or ⁇ a2.
  • ⁇ a1 is the value of the flexible base material 2 at which the first deformation inhibiting member 4 and the third deformation inhibiting member 12 begin to come into contact with each other when the bending angle ⁇ of the flexible base material 2 is changed from 0 degrees to 180 degrees.
  • the bending angle is ⁇ .
  • ⁇ a2 is the value of the flexible base material 2 at which the second deformation inhibiting member 5 and the third deformation inhibiting member 12 begin to come into contact with each other when the bending angle ⁇ of the flexible base material 2 is changed from 0 degrees to 180 degrees.
  • the bending angle is ⁇ . Therefore, the arithmetic circuit can set the bending angle ⁇ of the flexible base material 2 to ⁇ a1 or ⁇ a2 when the value of the first detection signal SigD1 becomes discontinuous.
  • the arithmetic circuit can correct the first integral value IV1 to a value associated with ⁇ a1 or ⁇ a2.
  • the value of the first detection signal SigD1 in the range of ⁇ a1 ⁇ 180 degrees is set so as not to be influenced by the superimposed noise N in the range of 0 degrees ⁇ a1. can do.
  • the value of the first detection signal SigD1 in the range of ⁇ a2 ⁇ 180 degrees is made not to be influenced by the superimposed noise N in the range of 0 degrees ⁇ a2. be able to. Therefore, according to the deformation detection sensor 1f, the bending angle ⁇ of the flexible base material 2 can be detected with higher accuracy. As a result, the deformation detection sensor 1f can detect the bending angle of the base material with higher accuracy.
  • FIG. 30 is an exploded perspective view of a deformation detection sensor 1g according to a fifth modification.
  • the deformation detection sensor 1g according to the fifth modification only the parts that are different from the deformation detection sensor 1f according to the third embodiment will be explained, and the rest will be omitted.
  • the deformation detection sensor 1g has the following features: the first deformation inhibiting member 4 is provided on the first lower main surface LS3 of the first sensor 3, and the second deformation inhibiting member 5 is provided on the first lower main surface LS3 of the first sensor 3. It is different from the deformation detection sensor 1f in that the third deformation inhibiting member 12 is provided on the first lower main surface LS3 of the first sensor 3.
  • the first sensor 3 has a first lower main surface LS3 on the upper main surface of the first deformation inhibiting member 4, the upper main surface of the second deformation inhibiting member 5, and the third deformation inhibiting member 12. It is provided on the main surface US2 of the flexible base material 2 so as to be in contact with the main surface.
  • the deformation detection sensor 1g as described above also has the same effect as the deformation detection sensor 1f.
  • the third deformation inhibiting member 12 is located at the first deformation inhibiting member 4 and the second deformation inhibiting member 5 of the first upper main surface US3 and the first lower main surface LS3 of the first sensor 3. It may be provided on the first upper main surface US3 or the first lower main surface LS3.
  • FIG. 31 is a plan view of a deformation detection sensor 1h according to a sixth modification, viewed from below.
  • the deformation detection sensor 1h according to the sixth modification only the parts that are different from the deformation detection sensor 1f according to the third embodiment will be explained, and the rest will be omitted.
  • the deformation detection sensor 1h has a seventh region A7 where the first region A1 of the first deformation inhibiting member 4 and the sixth region A6 of the third deformation inhibiting member 12 overlap with each other, and the second deformation inhibiting member It is different from the deformation detection sensor 1f in that it has an eighth region A8 in which the second region A2 of No. 5 and the sixth region A6 of the third deformation inhibiting member 12 overlap with each other.
  • the first area A1 and the sixth area A6 overlap each other in the seventh area A7. Moreover, the first area A1 and the sixth area A6 touch each other in the seventh area A7. However, the sixth region A6 has a fourth portion P4 that does not touch the first region A1 when viewed in the vertical direction when the flexible base material 2 is not bent. In this modification, the fourth portion P4 is located in front of the seventh area A7.
  • the second area A2 and the sixth area A6 overlap each other in the eighth area A8. Further, the second area A2 and the sixth area A6 touch each other in the eighth area A8. However, the sixth region A6 has a fifth portion P5 that does not touch the second region A2 when viewed in the vertical direction when the flexible base material 2 is not bent. In this modification, the fifth portion P5 is located in front of the eighth area A8.
  • the deformation detection sensor 1h as described above also has the same effect as the deformation detection sensor 1f.
  • the sixth region A6 includes the fourth portion P4 and the fourth portion P4 that are not in contact with the first region A1 and the second region A2, respectively, when viewed in the vertical direction. It suffices to have five portions P5.
  • FIG. 32 is a plan view of the deformation detection sensor 1i according to the seventh modification, viewed from below.
  • the deformation detection sensor 1i according to the seventh modification only the parts that are different from the deformation detection sensor 1h according to the sixth modification will be explained, and the rest will be omitted.
  • the deformation detection sensor 1i differs from the deformation detection sensor 1h in that the first deformation inhibition member 4, the second deformation inhibition member 5, and the third deformation inhibition member 12 are included in a single member 9.
  • the left part of the member 9 and the center part of the member 9 are connected in the seventh area A7, as shown in FIG. 32.
  • the center part of the member 9 and the right part of the member 9 are connected in the eighth area A8. Note that the member 9 has flexibility in the eighth region A8.
  • the deformation detection sensor 1i as described above also has the same effect as the deformation detection sensor 1h.
  • the first deformation inhibiting member 4, the second deformation inhibiting member 5, and the third deformation inhibiting member 12 are all included in the single member 9, but the first deformation inhibiting member It is sufficient that at least two of the member 4, the second deformation inhibiting member 5, and the third deformation inhibiting member 12 are included in the single member 9.
  • FIG. 33 is an exploded perspective view of a deformation detection sensor 1j according to the fourth embodiment.
  • the deformation detection sensor 1j according to the fourth embodiment only the parts that are different from the deformation detection sensor 1f according to the third embodiment will be explained, and the rest will be omitted.
  • the deformation detection sensor 1j has the following features: the first sensor 3 further includes a first electrode 34, the first upper electrode 32 is a first signal electrode, and the first lower electrode 33 is a ground electrode. , is different from the deformation detection sensor 1f in that the first upper electrode 32 does not cover the entire first piezoelectric film upper main surface US31 of the first piezoelectric film 31.
  • the flexible base material 2 is bent at each of the first bending line L1 and the second bending line L2 extending in the front-rear direction.
  • the first electrode 34 is provided on the first piezoelectric film upper main surface US31 of the first piezoelectric film 31, as shown in FIG.
  • the first electrode 34 is a third signal electrode.
  • the first electrode 34 has an upper main surface and a lower main surface that are arranged in the vertical direction.
  • a third detection signal SigD3 corresponding to the deformation of the curved section CS2 of the flexible base material 2 is output from the first electrode 34.
  • the first electrode 34 includes an adhesive layer (not shown).
  • the first electrode 34 is fixed to the first piezoelectric film upper main surface US31 of the first piezoelectric film 31 by this adhesive layer.
  • the upper main surface of the first electrode 34 is the first upper main surface US3 of the first sensor 3.
  • the first upper electrode 32 and the first electrode 34 are arranged in this order from left to right at intervals. Therefore, the first upper electrode 32 and the first electrode 34 are not in contact with each other when the flexible base material 2 is not bent. Note that the first upper electrode 32 and the first electrode 34 are arranged so as not to touch each other even when the flexible base material 2 is bent. That is, the first upper electrode 32 and the first electrode 34 do not touch each other.
  • the first upper electrode 32 is connected to each of the first deformation inhibiting member 4 and the third deformation inhibiting member 12 when viewed in the vertical direction. Overlap.
  • the first electrode 34 overlaps each of the first deformation inhibiting member 4 and the third deformation inhibiting member 12 when viewed in the vertical direction when the flexible base material 2 is not bent. .
  • the deformation detection sensor 1j it is possible to accurately detect the bending angle of a base material that is bent along a plurality of bending lines. More specifically, the flexible base material 2 is bent at each of the first bending line L1 and the second bending line L2.
  • the first upper electrode 32 overlaps each of the first deformation inhibiting member 4 and the third deformation inhibiting member 12 when viewed in the vertical direction when the flexible base material 2 is not bent.
  • the first detection signal SigD1 output from the first upper electrode 32 causes the flexible base material 2 to be bent.
  • the angle ⁇ can be detected with high precision.
  • the deformation detection sensor 1j when the flexible base material 2 is bent at the second bending line L2, the third detection signal SigD3 output from the first electrode 34 causes the flexible base material 2 to be bent.
  • the bending angle ⁇ can be detected with high accuracy.
  • the deformation detection sensor 1j can accurately detect the bending angle of the base material bent at a plurality of bending lines.
  • FIG. 34 is an exploded perspective view of a deformation detection sensor 1k according to an eighth modification.
  • the deformation detection sensor 1k according to the eighth modification only the parts different from the deformation detection sensor 1j according to the fourth embodiment will be explained, and the rest will be omitted.
  • the deformation detection sensor 1k has the following features: the first deformation inhibiting member 4 is provided on the first lower main surface LS3 of the first sensor 3, and the second deformation inhibiting member 5 is provided on the first lower main surface LS3 of the first sensor 3.
  • the third deformation inhibiting member 12 is provided on the first lower main surface LS3 of the first sensor 3, the first upper electrode 32 is a ground electrode, and the first lower electrode 33 is a ground electrode.
  • the first lower electrode 33 does not cover the entire first piezoelectric film lower main surface LS31 of the first piezoelectric film 31, and the first electrode 34 is a first signal electrode. It differs from the deformation detection sensor 1j in that it is provided on the first piezoelectric film lower main surface LS31.
  • the first electrode 34 includes an adhesive layer (not shown). With this adhesive layer, the first electrode 34 is fixed to the first piezoelectric film lower main surface LS31 of the first piezoelectric film 31, as shown in FIG.
  • the lower main surface of the first electrode 34 is the first lower main surface LS3 of the first sensor 3.
  • the first lower electrode 33 and the first electrode 34 are arranged in this order from left to right at intervals. Therefore, the first lower electrode 33 and the first electrode 34 are not in contact with each other when the flexible base material 2 is not bent. Note that the first lower electrode 33 and the first electrode 34 are arranged so as not to touch each other even when the flexible base material 2 is bent. That is, the first lower electrode 33 and the first electrode 34 do not touch each other.
  • the first lower electrode 33 is connected to each of the first deformation inhibiting member 4 and the third deformation inhibiting member 12 when viewed in the vertical direction. Overlap.
  • the first electrode 34 overlaps each of the first deformation inhibiting member 4 and the third deformation inhibiting member 12 when viewed in the vertical direction when the flexible base material 2 is not bent. .
  • the deformation detection sensor 1k as described above also has the same effect as the deformation detection sensor 1j.
  • the deformation detection sensor according to the present invention is not limited to the deformation detection sensors 1, 1a to 1k, and can be modified within the scope of the gist. Furthermore, the structures of the deformation detection sensors 1, 1a to 1k may be combined arbitrarily. Further, the electronic device according to the present invention is not limited to the electronic device 100, 100a to 100k equipped with the deformation detection sensors 1, 1a to 1k, and can be modified within the scope of the gist. Furthermore, the structures of the electronic devices 100, 100a to 100k may be combined arbitrarily.
  • the flexible base material 2 does not have to have a rectangular shape when viewed in the vertical direction.
  • the flexible base material 2 does not need to have long sides extending in the left-right direction and short sides extending in the front-rear direction when viewed in the up-down direction.
  • the flexible base material 2 is not limited to an organic EL display.
  • the flexible base material 2 only needs to have flexibility and have a base material upper main surface US2 and a base material lower main surface LS2 arranged in the vertical direction.
  • each of the first sensor 3 and the second sensor 11 does not have to have a rectangular shape when viewed in the vertical direction.
  • each of the first sensor 3 and the second sensor 11 does not need to have a long side extending in the left-right direction and a short side extending in the front-back direction when viewed in the up-down direction.
  • each of the first piezoelectric film 31 and the second piezoelectric film 111 does not have to have a rectangular shape when viewed in the vertical direction.
  • each of the first piezoelectric film 31 and the second piezoelectric film 111 does not need to have a long side extending in the left-right direction and a short side extending in the front-back direction when viewed in the up-down direction.
  • each of the first piezoelectric film 31 and the second piezoelectric film 111 may be a film containing polylactic acid stretched in at least one axis.
  • each of the first piezoelectric film 31 and the second piezoelectric film 111 does not need to have a piezoelectric constant of d14.
  • Each of the first piezoelectric film 31 and the second piezoelectric film 111 may have a piezoelectric constant of d31, for example.
  • Each of the first piezoelectric film 31 and the second piezoelectric film 111 having a piezoelectric constant of d31 is, for example, a PVDF (polyvinylidene fluoride) film.
  • each of the first piezoelectric film 31 and the second piezoelectric film 111 may be made of piezoelectric ceramic.
  • the polarity of the charge generated in each of the first piezoelectric film 31 and the second piezoelectric film 111 when each of the first piezoelectric film 31 and the second piezoelectric film 111 is stretched in the piezoelectric film left-right direction is different from that of the first piezoelectric film 111.
  • the polarity of the charge generated in the first piezoelectric film 31 and the second piezoelectric film 111 may be the same when each of the film 31 and the second piezoelectric film 111 is stretched in the front-rear direction of the piezoelectric film.
  • each of the first piezoelectric film 31 and the second piezoelectric film 111 is relative to the first bending line L1 when viewed in the vertical direction when the flexible base material 2 is not bent.
  • a 45 degree angle may also be formed. This 45 degrees includes, for example, an angle including approximately 45 degrees ⁇ 10 degrees. Further, this 45 degrees includes an angle including approximately 225 degrees ⁇ 10 degrees (approximately -135 degrees ⁇ 10 degrees).
  • the uniaxial stretching direction OD of each of the first piezoelectric film 31 and the second piezoelectric film 111 is relative to the first bending line L1 when viewed in the vertical direction.
  • the angle formed is not limited to a 45 degree or -45 degree angle.
  • first upper electrode 32 may be the first signal electrode
  • first lower electrode 33 may be the ground electrode
  • the first deformation inhibiting member 4 does not have to have a rectangular shape when viewed in the vertical direction.
  • the first deformation inhibiting member 4 does not need to have short sides extending in the left-right direction and long sides extending in the front-rear direction when viewed in the up-down direction.
  • first deformation inhibiting member 4 does not need to be in contact with the main surface US2 of the flexible base material 2.
  • the second deformation inhibiting member 5 does not have to have a rectangular shape when viewed in the vertical direction.
  • the second deformation inhibiting member 5 does not need to have short sides extending in the left-right direction and long sides extending in the front-rear direction when viewed in the up-down direction.
  • the second deformation inhibiting member 5 does not need to be in contact with the main surface US2 of the flexible base material 2.
  • first deformation inhibiting member 4 and the second deformation inhibiting member 5 do not need to be lined up with an interval in the left-right direction.
  • first region A1 does not need to be located to the left of the first bending line L1 when viewed in the vertical direction.
  • the second region A2 does not need to be located to the right of the first bending line L1 when viewed in the vertical direction.
  • first area A1 and the second area A2 do not need to be spaced apart from each other in the left-right direction.
  • the distance D1 in the left-right direction between the first region A1 and the second region A2 is shorter than the length DLR31 in the left-right direction of the first piezoelectric film 31 when the flexible base material 2 is not bent. You don't have to.
  • the first position PO1 is an arbitrary position among the positions in the left and right direction where the first area A1 exists.
  • the second position PO2 is any position in the left-right direction where the second area A2 exists.
  • the length DFB4 of the first deformation inhibiting member 4 in the front-rear direction at the first position PO1 is the length DFB4 of the first piezoelectric film 31 in the front-rear direction at the first position PO1 when the flexible base material 2 is not bent.
  • the length does not have to be longer than DFB311.
  • the length DFB5 of the second deformation inhibiting member 5 in the front-back direction at the second position PO2 is the length DFB5 in the front-back direction of the first piezoelectric film 31 at the second position PO2 when the flexible base material 2 is not bent.
  • the length does not have to be longer than DFB312.
  • the arithmetic circuit is not an essential component.
  • the electronic devices 100, 100a to 100k are not limited to foldable smartphones.
  • first housing 6 is not limited to a box. Further, the first housing 6 does not have to have a rectangular parallelepiped shape.
  • the second housing 7 is not limited to a box. Moreover, the second housing 7 does not have to have a rectangular parallelepiped shape.
  • the third portion P3 is not limited to being located in front of the fifth area A5.
  • the left part of the member 8 and the right part of the member 8 may be connected in a region that does not overlap with the first piezoelectric film 31 when viewed in the vertical direction.
  • the second upper electrode 112 may be the second signal electrode
  • the second lower electrode 113 may be the ground electrode.
  • the second upper electrode 112 may be a ground electrode
  • the second lower electrode 113 may be a second signal electrode
  • the third deformation inhibiting member 12 does not have to have a rectangular shape when viewed in the vertical direction.
  • the third deformation inhibiting member 12 does not need to have a short side extending in the left-right direction and a long side extending in the front-back direction when viewed in the up-down direction.
  • the third deformation inhibiting member 12 may be in contact with the main surface US2 of the flexible base material 2, or may be in contact with the main surface US2 of the flexible base material 2. It does not have to be in contact with
  • the first deformation inhibiting member 4, the third deformation inhibiting member 12, and the second deformation inhibiting member 5 do not have to be arranged in this order from left to right at intervals.
  • the first area A1, the sixth area A6, and the second area A2 do not have to be arranged in this order from left to right at intervals.
  • the distance D16 in the left-right direction between the first area A1 and the sixth area A6 may be longer than the distance D26 in the left-right direction between the second area A2 and the sixth area A6.
  • ⁇ a1 is smaller than ⁇ a2 because the distance D16 in the left-right direction between the first area A1 and the sixth area A6 is longer than the distance D26 in the left-right direction between the second area A2 and the sixth area A6. growing.
  • the bending angle of the base material can be detected with higher accuracy.
  • the fourth portion P4 is not limited to being located in front of the seventh area A7.
  • the fifth portion P5 is not limited to being located in front of the eighth area A8.
  • the left part of the member 9 and the center part of the member 9 may be connected in a region that does not overlap with the first piezoelectric film 31 when viewed in the vertical direction. Further, in the deformation detection sensor 1i, the center portion of the member 9 and the right portion of the member 9 may be connected in a region that does not overlap with the first piezoelectric film 31.
  • the first upper electrode 32 and the first electrode 34 may be arranged in this order from right to left with an interval between them.
  • the first lower electrode 33 and the first electrode 34 may be arranged in this order from right to left with an interval between them.
  • the first bending angle ⁇ 1 of the flexible base material 2 and the second bending angle ⁇ 2 of the flexible base material 2 may be defined as follows. That is, the first bending angle ⁇ 1 of the flexible base material 2 is defined by the first portion P1 of the flexible base material 2 and the second portion of the flexible base material 2 when viewed in the direction in which the first bending line L1 extends. It may also be defined as the angle formed by P2.
  • the second bending angle ⁇ 2 of the flexible base material 2 is defined by the first portion P1 of the flexible base material 2 and the second portion P2 of the flexible base material 2 when viewed in the direction in which the second bending line L2 extends.
  • the first bending angle ⁇ 1 of the flexible base material 2 is accurately detected by the first detection signal SigD1 output from the first upper electrode 32 or the first lower electrode 33. be able to. Further, the second bending angle ⁇ 2 of the flexible base material 2 can be detected with high accuracy by the third detection signal SigD3 output from the first electrode 34.
  • the present invention has the following structure.
  • a flexible base material having an upper main surface and a lower main surface of the base material that are arranged in the vertical direction, and a curved section that curves when bent at a bending line;
  • a first detection signal that outputs a first detection signal according to the deformation of the curved section, is provided on the upper main surface of the base material, and has a first upper main surface and a first lower main surface that are arranged in the vertical direction.
  • the first sensor is a first piezoelectric film having a first piezoelectric film upper main surface and a first piezoelectric film lower main surface arranged in the vertical direction; a first upper electrode provided on the upper main surface of the first piezoelectric film; a first lower electrode provided on the lower main surface of the first piezoelectric film; It contains The first deformation inhibiting member is provided on the first upper main surface or the first lower main surface, The first deformation inhibiting member has a first region that overlaps the first piezoelectric film when viewed in the vertical direction, The second deformation inhibiting member is provided on the first upper major surface or the first lower major surface on which the first deformation inhibiting member is provided of the first upper major surface and the first lower major surface, The second deformation inhibiting member has a second region that overlaps with the first piezoelectric film when viewed in the vertical direction, The first region and the second region have portions that do not touch each other when viewed
  • the first deformation inhibiting member has a third region that is in contact with the main surface of the base material and that does not overlap the first piezoelectric film when viewed in the vertical direction
  • the second deformation inhibiting member has a fourth region that is in contact with the main surface of the base material and that does not overlap the first piezoelectric film when viewed in the vertical direction.
  • the first deformation inhibiting member is provided on the first upper main surface
  • the second deformation inhibiting member is provided on the first upper main surface.
  • the deformation detection sensor according to (1) or (2).
  • the first region and the second region are spaced apart from each other in the left-right direction, The distance in the left-right direction between the first region and the second region is shorter than the length of the first piezoelectric film in the left-right direction when the flexible base material is not bent.
  • the deformation detection sensor according to any one of (1) to (3).
  • a position in the left-right direction where the first region exists is defined as a first position
  • the position in the left-right direction where the second area exists is defined as a second position
  • the length of the first deformation inhibiting member in the front-rear direction at the first position is greater than the length of the first piezoelectric film in the front-rear direction at the first position when the flexible base material is not bent.
  • the first position is long;
  • the maximum length of the second deformation inhibiting member in the longitudinal direction at the second position is the maximum length of the first piezoelectric film in the second position when the flexible base material is not bent.
  • the second position is longer than the length in the direction;
  • the deformation detection sensor according to any one of (1) to (4).
  • a third deformation inhibiting member Furthermore, we are equipped with The third deformation inhibiting member is arranged on the first upper major surface or the first deformation inhibiting member on which the first deformation inhibiting member and the second deformation inhibiting member of the first upper major surface and the first lower major surface are provided. Provided on the lower main surface, The third deformation inhibiting member has a fifth region that overlaps with the first piezoelectric film when viewed in the vertical direction, The fifth region is located between the first region and the second region when viewed in the vertical direction when the flexible base material is not bent, The fifth region has a portion that does not touch each of the first region and the second region when viewed in the vertical direction when the flexible base material is not bent.
  • the deformation detection sensor according to any one of (1) to (5).
  • the first region, the fifth region, and the second region are arranged at intervals in the left-right direction,
  • the distance in the left-right direction between the first region and the fifth region is the distance in the left-right direction between the second region and the fifth region when the flexible base material is not bent. different from the distance of The deformation detection sensor according to (6).
  • the third deformation inhibiting member is harder than the first piezoelectric film.
  • the first sensor includes a first electrode provided on the upper main surface of the first piezoelectric film, Furthermore, it includes The first upper electrode overlaps each of the first deformation inhibiting member and the third deformation inhibiting member when viewed in the vertical direction when the flexible base material is not bent, The first electrode overlaps each of the second deformation inhibiting member and the third deformation inhibiting member when viewed in the vertical direction when the flexible base material is not bent, the first electrode and the first upper electrode do not touch each other;
  • the deformation detection sensor according to any one of (6) to (8).
  • the first sensor includes a first electrode provided on the lower main surface of the first piezoelectric film, Furthermore, it includes The first lower electrode overlaps each of the first deformation inhibiting member and the third deformation inhibiting member when viewed in the vertical direction when the flexible base material is not bent, The first electrode overlaps each of the second deformation inhibiting member and the third deformation inhibiting member when viewed in the vertical direction when the flexible base material is not bent, the first electrode and the first lower electrode do not touch each other;
  • the deformation detection sensor according to any one of (6) to (8).
  • the first upper electrode is a ground electrode electrically connected to a ground potential.
  • the deformation detection sensor according to any one of (1) to (10).
  • the first piezoelectric film has a piezoelectric constant of d14.
  • the deformation detection sensor according to any one of (1) to (11).
  • the first piezoelectric film is a film having polylactic acid stretched in at least one axis,
  • the uniaxial stretching direction of the first piezoelectric film forms an angle of 45 degrees or -45 degrees with respect to the bending line when viewed in the vertical direction when the flexible base material is not bent.
  • the deformation detection sensor according to any one of (1) to (12).
  • the first deformation inhibiting member is harder than the first piezoelectric film
  • the second deformation inhibiting member is harder than the first piezoelectric film.
  • a second sensor that outputs a second detection signal according to deformation of the curved section, the second sensor being provided on the upper main surface of the base material or the lower main surface of the base material and arranged in the vertical direction; a second sensor having a surface and a second lower main surface; Furthermore, we are equipped with The second sensor is a second piezoelectric film having a second piezoelectric film upper main surface and a second piezoelectric film lower main surface arranged in the vertical direction; a second upper electrode provided on the upper main surface of the second piezoelectric film; a second lower electrode provided on the lower main surface of the second piezoelectric film; It contains The second sensor does not overlap the first sensor, the first deformation inhibiting member, and the second deformation inhibiting member when viewed in the vertical direction when the flexible base material is not bent.
  • the deformation detection sensor according to any one of (1) to (14).
  • the first deformation inhibiting member and the second deformation inhibiting member are included in a single member, The deformation detection sensor according to any one of (1) to (15).
  • At least two of the first deformation inhibiting member, the second deformation inhibiting member, and the third deformation inhibiting member are included in a single member;
  • the deformation detection sensor according to any one of (6) to (10).
  • Deformation detection sensor 2 Flexible base material 3: First sensor 4: First deformation inhibiting member 5: Second deformation inhibiting member 6: First housing 7: Second housing 8, 9: Member 11: Second sensor 12: Third deformation inhibiting member 31: First piezoelectric film 32: First upper electrode 33: First Lower electrode 34: First electrode 100, 100a, 100b, 100c, 100d, 100e, 100f, 100g, 100h, 100i, 100j, 100k: Electronic device 111: Second piezoelectric film 112: Second upper electrode 113: Second lower Electrode A1: First area A2: Second area A3: Third area A4: Fourth area A5: Fifth area A6: Sixth area A7: Seventh area A8: Eighth area CS2: Curved sections D1, D16, D26 : Distance IV1: First integral value IV2: Second integral value L1: First bending line L2: Second bending

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

Un capteur de détection de déformation selon la présente invention comprend : un substrat souple qui possède une surface principale supérieure de substrat et une section incurvée ; un premier capteur qui délivre un premier signal de détection correspondant à une déformation de la section incurvée, qui est disposé sur la surface principale supérieure du substrat et qui possède une première surface principale supérieure et une première surface principale inférieure ; un premier élément d'inhibition de la déformation ; et un second élément d'inhibition de la déformation. Le premier capteur comprend un premier film piézoélectrique. Le premier élément d'inhibition de la déformation comporte une première région qui chevauche le premier film piézoélectrique comme vu dans la direction verticale. Le second élément d'inhibition de la déformation comporte une seconde région qui chevauche le premier film piézoélectrique comme vu dans la direction verticale. La première région et la seconde région comportent des parties respectives qui ne sont pas en contact l'une avec l'autre comme vu dans la direction verticale, lorsque le substrat flexible n'est pas plié.
PCT/JP2023/015142 2022-05-17 2023-04-14 Capteur de détection de déformation et dispositif électronique WO2023223732A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022080929 2022-05-17
JP2022-080929 2022-05-17

Publications (1)

Publication Number Publication Date
WO2023223732A1 true WO2023223732A1 (fr) 2023-11-23

Family

ID=88835004

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2023/015142 WO2023223732A1 (fr) 2022-05-17 2023-04-14 Capteur de détection de déformation et dispositif électronique

Country Status (1)

Country Link
WO (1) WO2023223732A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014240842A (ja) * 2011-04-08 2014-12-25 株式会社村田製作所 操作デバイス
JP2017129417A (ja) * 2016-01-19 2017-07-27 ヤマハ株式会社 歪みセンサ素子
JP2021139691A (ja) * 2020-03-04 2021-09-16 グンゼ株式会社 積層型曲げセンサ及び機械電気変換装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014240842A (ja) * 2011-04-08 2014-12-25 株式会社村田製作所 操作デバイス
JP2017129417A (ja) * 2016-01-19 2017-07-27 ヤマハ株式会社 歪みセンサ素子
JP2021139691A (ja) * 2020-03-04 2021-09-16 グンゼ株式会社 積層型曲げセンサ及び機械電気変換装置

Similar Documents

Publication Publication Date Title
US10248232B2 (en) Press sensor and electronic device
US10113875B2 (en) Module and electronic apparatus
JP4830681B2 (ja) 角速度センサ
US8201450B2 (en) Angular velocity sensor
US8117914B2 (en) Inertia force sensor and composite sensor for detecting inertia force
US7363815B2 (en) Angular velocity sensor
US20140373626A1 (en) Inertial force sensor
US20070022827A1 (en) Angular velocity sensor
US8074517B2 (en) Inertia force sensor
WO2023223732A1 (fr) Capteur de détection de déformation et dispositif électronique
US9482533B2 (en) Vibrating reed, angular velocity sensor, electronic device, and moving object
JP4980063B2 (ja) 角速度センサ
US8418553B2 (en) Biaxial angular velocity sensor
US9488477B2 (en) Vibrating reed, angular velocity sensor, electronic device, moving object, and method for manufacturing vibrating reed
WO2021261548A1 (fr) Capteur piézoélectrique et dispositif électronique
US20100011859A1 (en) Angular velocity sensor
US9702696B2 (en) Angular velocity sensor
US20180129315A1 (en) Flexible substrate, piezoelectric device, and electronic apparatus
WO2023199838A1 (fr) Commutateur débitmétrique et procédé de fixation de commutateur débitmétrique
CN219916598U (zh) 可变装置
WO2023176426A1 (fr) Capteur de détection de déformation
US9389241B2 (en) Acceleration sensor
US20240068795A1 (en) Sensor unit
WO2022045228A1 (fr) Dispositif variable
US20240068796A1 (en) Sensor unit and sensor unit attachment method

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 23807345

Country of ref document: EP

Kind code of ref document: A1