WO2023182359A1 - Interferometer and physical quantity measurement device - Google Patents
Interferometer and physical quantity measurement device Download PDFInfo
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- WO2023182359A1 WO2023182359A1 PCT/JP2023/011245 JP2023011245W WO2023182359A1 WO 2023182359 A1 WO2023182359 A1 WO 2023182359A1 JP 2023011245 W JP2023011245 W JP 2023011245W WO 2023182359 A1 WO2023182359 A1 WO 2023182359A1
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- Prior art keywords
- glass plate
- light
- interferometer
- glass
- physical quantity
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- 230000002269 spontaneous effect Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02097—Self-interferometers
- G01B9/02098—Shearing interferometers
Definitions
- the present invention relates to an interferometer and a physical quantity measuring device.
- an optical measurement system equipped with an interferometer having a wedge is known (for example, Patent Document 1, etc.).
- an optical measurement system such as that disclosed in Patent Document 1
- physical quantities such as pressure can be detected with high sensitivity by analyzing interference light output from an interferometer.
- An object of the present invention is to provide an interferometer and a physical quantity measuring device that can suppress the influence of environmental factors such as temperature on the detection accuracy of physical quantities.
- the interferometer of the present invention includes a wedge having a first glass plate portion made of a glass plate, and a second glass plate portion formed of a glass plate and arranged at an angle with respect to the first glass plate portion.
- an inclination of the second glass plate part with respect to the first glass plate part is defined between the first glass plate part and the second glass plate part.
- a support part is arranged to The support portion is formed using a member having a small coefficient of linear expansion.
- the support part is formed using low melting point glass.
- the support part is formed using low-melting glass with a small coefficient of linear expansion, even if environmental factors such as temperature and humidity change, changes in the inclination of the second glass plate part with respect to the first glass plate part can be avoided. It can be suppressed.
- a first reflective film made of a dielectric reflective film is disposed on a surface of the first glass plate facing the second glass plate, and the first glass plate in the second glass plate It is preferable that a second reflective film made of a dielectric reflective film is disposed on the surface facing the second reflective film.
- the first reflective film and the second reflective film made of dielectric reflective films are arranged on the first glass plate part and the second glass plate part, it is possible to increase the interference amplitude of the emitted light. can.
- the physical quantity measuring device of the present invention includes the above-mentioned interferometer, a light source, a first optical path into which light emitted from the light source enters, and a physical quantity measurement device of a measured object by inputting the light outputted from the first optical path.
- an optical sensor that outputs light according to the optical sensor
- a second optical path that receives the light output from the optical sensor and outputs it to the interferometer, and detects an interference signal from the interference light output from the interferometer.
- a photodetecting section The present invention can produce effects similar to those described above.
- the first plate glass part and the light detection part are bonded together with an adhesive member.
- the adhesive member since the first glass plate part and the photodetection part are directly bonded to each other by the adhesive member, it is possible to reduce the thermal influence acting between the first glass plate part and the photodetection part.
- the light detection unit receives interference light caused by a first reflected light reflected by the first plate glass part and a second reflected light reflected by the second plate glass part.
- the interfering signal is detected by detecting the interfering signal.
- the photodetector is configured to receive interference light caused by the first reflected light reflected by the first plate glass part and the second reflected light reflected by the second plate glass part. Therefore, there is no need to bond the photodetector and the first glass plate, and the degree of freedom in arranging the photodetector can be increased.
- the ratio of the light amount of the signal is theoretically higher than when measuring interference light through transmission, so the S/N ratio is Can be made larger.
- FIG. 1 is a diagram showing a schematic configuration of a physical quantity measuring device according to a first embodiment of the present invention.
- FIG. 3 is a cross-sectional view schematically showing the interferometer of the embodiment.
- FIG. 3 is a cross-sectional view showing a schematic configuration of the wedge of the embodiment.
- FIG. 2 is a cross-sectional view showing a schematic configuration of a wedge according to a second embodiment.
- FIG. 1 is a diagram showing a schematic configuration of a physical quantity measuring device 1 according to the first embodiment.
- the physical quantity measuring device 1 is configured to be able to measure physical quantities such as pressure, acceleration, displacement, inclination, and temperature.
- the physical quantity measuring device 1 includes a light source 10, an optical cable 20, an optical coupler 30, an optical sensor 40, and a light receiver 50.
- the light source 10 is a light source that emits first light L1 having a broadband wavelength.
- the light source 10 is, for example, an SC (Super Continuum) light source, and is configured to be able to emit the first light L1 in the wavelength range of 1200 nm to 1600 nm.
- the light source 10 is not limited to the above configuration, and may be a combination of an LED (Light Emitting Diode) light source, an ASE (Amplified Spontaneous Emission) light source, an SLD (Super Luminescent Diode) light source, an incandescent light bulb, etc.
- it may be a narrow band light source that sweeps a wide band, such as a tunable laser.
- the light source 10 may be configured to be able to emit the first light L1 in a wider wavelength range than the illustrated wavelength range, or may be configured to be able to emit the first light L1 in a wavelength range narrower than the illustrated wavelength range. It may be configured as follows.
- the optical cable 20 includes a so-called multimode optical fiber, a protection member, and the like.
- the optical cable 20 includes a first cable 21, a second cable 22, and a third cable 23.
- the first cable 21 transmits the first light L1 emitted from the light source 10 to the optical coupler 30.
- the second cable 22 transmits the first light L1 incident through the optical coupler 30 to the optical sensor 40, and also transmits the measurement light M1 and the first light L1 output from the optical sensor 40 to the optical coupler 30.
- the third cable 23 transmits the measurement light M1 and the first light L1 incident through the optical coupler 30 to the light receiver 50. That is, the first cable 21 and the second cable 22 constitute the first optical path of the present invention, and the second cable 22 and the third cable 23 constitute the second optical path of the present invention. Note that the first cable 21, second cable 22, and third cable 23 that constitute the optical cable 20 are not limited to those that include multimode optical fibers, but for example, they may include single mode optical fibers. It may be configured in advance.
- the optical coupler 30 is a so-called 2 ⁇ 2 coupler.
- the optical coupler 30 is provided on the optical cable 20.
- the optical coupler 30 is provided to optically connect the first cable 21, the second cable 22, and the third cable 23.
- the optical coupler 30 transmits the first light L1 emitted from the light source 10 to the optical sensor 40, and transmits the measurement light M1 and the first light L1 output from the optical sensor 40 to the light receiver 50.
- the optical sensor 40 is placed on an object to be measured (not shown), and is configured to be able to emit measurement light M1 according to a physical quantity acting on the object.
- the optical sensor 40 includes a measurement sensor element 41 that receives the first light L1 transmitted through the optical coupler 30 and outputs the reflected light to the optical coupler 30.
- the measurement sensor element 41 is composed of a pair of reflective elements arranged close to each other, and constitutes a Fabry-Perot interferometer. Specifically, a pair of reflective elements constituting the measurement sensor element 41 are formed apart from each other by a predetermined distance, and each functions as a mirror. The pair of reflecting elements reflects light in a predetermined wavelength range. Thereby, the pair of reflective elements constitute a Fabry-Perot interferometer. That is, the optical sensor 40 is configured as a Fabry-Perot interference type sensor. Therefore, the optical sensor 40 is configured to be able to output the measurement light M1 depending on the physical quantity acting on the object to be measured.
- the measurement sensor element 41 outputs the measurement light M1, which is reflected light, to the optical coupler 30.
- the measurement sensor element 41 reflects a portion of the first light L1 as is, along with the measurement light M1. That is, the optical sensor 40 outputs the measurement light M1 and the first light L1 to the optical coupler 30, as described above.
- the light receiver 50 receives the measurement light M1 and the first light L1 output from the optical sensor 40 and calculates a physical quantity acting on the object to be measured.
- the light receiver 50 includes an interferometer 60 and an MPU 70.
- FIG. 2 is a cross-sectional view schematically showing the interferometer 60
- FIG. 3 is a cross-sectional view schematically showing the wedge 62.
- the interferometer 60 is configured to interfere with the measurement light M1 output from the optical sensor 40 to emit a first interference light, and to detect the first interference light.
- the interferometer 60 includes a Fresnel cylindrical lens 61, a wedge 62, a photodetector 63, and a case 64.
- the Fresnel cylindrical lens 61 is an optical lens in which concentric grooves with different angles are formed in a resin sheet, and each groove acts as a curved surface, so that the incident measurement light M1 and the first The light L1 is focused toward the wedge 62.
- the wedge 62 interferes with the measurement light M1 incident through the Fresnel cylindrical lens 61 and emits interference light. Note that the first light L1 is emitted as is without interference.
- the wedge 62 includes a first glass plate portion 621 , a second glass plate portion 622 , a first support portion 623 , and a second support portion 624 .
- the first glass plate portion 621 is made of a flat glass plate, and a first reflective film 625 is disposed on the surface facing the second glass plate portion 622 .
- the second glass plate portion 622 is made of a flat glass plate, and a second reflective film 626 is disposed on the surface facing the first glass plate portion 621 .
- the second glass plate portion 622 is arranged to be inclined with respect to the first glass plate portion 621. Therefore, the measurement light M1 incident through the Fresnel cylindrical lens 61 is transmitted and reflected by the first reflective film 625 of the first plate glass part 621 and the second reflective film 626 of the second plate glass part 622, and is transmitted and reflected. The measured measurement lights M1 interfere with each other, and interference light is emitted.
- the first plate glass section 621 is bonded to the photodetector section 63 using an adhesive member 627.
- the first reflective film 625 and the second reflective film 626 are composed of dielectric reflective films.
- the first plate glass portion 621 and the first glass plate part 621 and the first plate glass part 621 transmit and reflect the measurement light M1 that has entered through the Fresnel cylindrical lens 61, while transmitting the first light L1 that has entered through the Fresnel cylindrical lens 61.
- the two-pane glass portion 622 can be easily configured. That is, since the first reflective film 625 and the second reflective film 626 are arranged on the first glass plate portion 621 and the second glass plate portion 622, the interference amplitude of the emitted light can be increased.
- the first support portion 623 and the second support portion 624 are arranged between the first glass plate portion 621 and the second glass plate portion 622, and define the inclination of the second glass plate portion 622 with respect to the first glass plate portion 621.
- the first support part 623 is arranged on one end side of the first glass plate part 621 and the second glass plate part 622
- the second support part 624 is arranged on the side of one end of the first glass plate part 621 and the second glass plate part 622. It is arranged on the other end side of the second plate glass section 622.
- the first support portion 623 is configured to have a longer length in the direction orthogonal to the first glass plate portion 621 than the second support portion 624 .
- the first glass plate portion 621, the second glass plate portion 622, the first support portion 623, and the second support portion 624 form a trapezoid.
- the first support portion 623 and the second support portion 624 are formed by, for example, screen printing technology. Thereby, the sizes of the first support portion 623 and the second support portion 624 can be easily controlled.
- the first support part 623 and the second support part 624 are formed using low melting point glass with a small coefficient of linear expansion.
- the sizes of the first support part 623 and the second support part 624, which are formed using low-melting glass do not easily change, so the first support part
- the inclination of the second glass plate portion 622 with respect to the first glass plate portion 621 defined by the second support portion 623 and the second support portion 624 also becomes difficult to change. Therefore, even if environmental factors such as temperature and humidity change, the intensity of the interference light that is transmitted and reflected by the first reflective film 625 of the first glass plate part 621 and the second reflective film 626 of the second glass plate part 622 is strong. Since the change can be made small, the influence of environmental factors on the interference light can be suppressed.
- the light detection unit 63 is configured to be able to detect interference light emitted from the wedge 62 and output a first signal corresponding to the interference light. Further, the light detection unit 63 is configured to be able to detect the first light L1 emitted from the wedge 62 and output a second signal corresponding to the first light L1. Note that the first signal is an example of an interference signal of the present invention.
- the photodetection section 63 is configured as a so-called line sensor that includes a plurality of photodetection elements arranged in an array on the back side of the first plate glass section 621.
- the photodetecting section 63 is a photodetecting element made of Si and detecting interference light in a short wavelength range, or a photodetecting element made of InGaAs and detecting interference light in a long wavelength range, or the like. A plurality of both are arranged in an array.
- the photodetecting section 63 is bonded to the first glass plate section 621 using an adhesive member 627.
- the first glass plate part 621 and the photodetector part 63 are directly bonded together by the adhesive member 627, so that the influence of heat acting between the first glass plate part 621 and the photodetector part 63 can be reduced. .
- the light detection unit 63 is not limited to the above configuration, and detects the interference light and the first light L1 emitted from the wedge 62, and generates a first signal and a signal corresponding to the first interference light and the first light L1. It suffices if it is configured to be able to output the second signal.
- the interferometer 60 is configured as a wedge shearing interferometer including the wedge 62.
- the interferometer 60 is not limited to the above configuration, and may, for example, include a cylindrical lens instead of the Fresnel cylindrical lens 61, or may not include a lens such as a Fresnel cylindrical lens or a cylindrical lens. Good too.
- the case 64 is a storage container that houses the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63.
- a ferrule 65 for connecting the case 64 and the third cable 23 is arranged outside the case 64.
- the measurement light M1 and the first light L1 emitted via the third cable 23 enter the inside of the case 64 via the ferrule 65.
- the configuration is not limited to the above configuration; for example, the third cable 23 and the case 64 may be connected via an optical connector, or the tip of the third cable 23 may be directly connected to the case 64. May be connected.
- the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63 are housed in the case 64, so that the influence of environmental factors on the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63 can be reduced. can be made smaller.
- the MPU 70 is a so-called Micro Processing Unit, receives the first signal and the second signal output from the photodetector 63, and calculates a physical quantity acting on the object to be measured.
- the MPU 70 obtains interference fringes according to the interference light included in the first signal, and calculates a phase change from periodic intensity changes of the interference fringes. Then, the MPU 70 calculates the physical quantity according to the phase change by calculating the correlation between this phase change and the physical quantity in advance. Furthermore, in this embodiment, the MPU 70 corrects the physical quantity calculated based on the first signal based on the second signal. Thereby, for example, even if the measurement light M1 changes due to deterioration of the light source 10, the change in the measurement light M1 can be corrected based on the second signal corresponding to the first light L1.
- the first glass plate part A first support portion 623 and a second support portion 624 that define the inclination of the second plate glass portion 622 with respect to the second glass plate portion 621 are arranged.
- the first support portion 623 and the second support portion 624 are formed using low melting point glass with a small coefficient of linear expansion.
- the first support part 623 and the second support part 624 which are formed using low-melting point glass, can support the second plate glass part 622 relative to the first glass plate part 621. Since the inclination is defined, a change in the inclination of the second glass plate portion 622 with respect to the first glass plate portion 621 can be suppressed. Therefore, the influence of environmental factors on interference light can be suppressed.
- the first glass plate portion 621 and the light detection portion 63 are directly bonded to each other by the adhesive member 627, so that the influence of heat acting between the first glass plate portion 621 and the light detection portion 63 is reduced. Can be made smaller.
- the photodetector 63A receives interference light caused by the first reflected light R1 reflected by the first glass plate 621A and the second reflected light R2 reflected by the second glass plate 622A.
- This embodiment differs from the first embodiment in that it is configured to detect an interference signal.
- the same components as those in the first embodiment are given the same reference numerals and the description thereof will be omitted.
- FIG. 4 is a cross-sectional view schematically showing the wedge 62A.
- the wedge 62A similarly to the first embodiment described above, the wedge 62A includes a first glass plate portion 621A, a second glass plate portion 622A, a first support portion 623A, and a second support portion 624A.
- a first reflective film 625A made of a dielectric reflective film is arranged on the first glass plate part 621A, and a second reflective film 626A made of a dielectric reflective film is arranged on the second glass plate part 622A. has been done.
- the wedge 62A is capable of outputting interference light formed by the first reflected light R1 reflected by the first glass plate portion 621A and the second reflected light R2 reflected by the second glass plate portion 622A. It is composed of
- the photodetecting section 63A is arranged at a position facing the second plate glass section 622A, and is configured as a so-called line sensor including a plurality of photodetecting elements arranged in an array. In this case, it is desirable that the photodetector 63A be at an appropriate position where it can receive the reflected light without interfering with the optical path of the incident light. Further, the photodetecting section 63A may be arranged parallel to the second glass plate section 622A, or may be arranged at a predetermined angle with respect to the second glass plate section 622A.
- the photodetector 63A detects interference light caused by the first reflected light R1 reflected by the first plate glass part 621A and the second reflected light R2 reflected by the second plate glass part 622A. is configured so that it can be input. Furthermore, the photodetector 63A is configured to be able to output a first signal according to the interference light.
- the light detection section 63A is arranged at a position facing the second plate glass section 622A. There is no need to glue and place it. Therefore, in this embodiment, the degree of freedom in arranging the photodetector 63A can be increased, and an adhesive can be made unnecessary.
- the ratio of the light amount of the signal is theoretically higher than when measuring interference light by transmission, so the S/N The ratio can be increased.
- the photodetector 63A detects interference light caused by the first reflected light R1 reflected by the first plate glass part 621A and the second reflected light R2 reflected by the second plate glass part 622A. Since the light detecting section 63A and the first plate glass section 621A are configured to be incident, there is no need to adhere the photo detecting section 63A and the first plate glass section 621A, and the degree of freedom in the arrangement of the photo detecting section 63A can be increased. In addition, when the photodetector section 63A is arranged to face the second glass plate section 622A, the ratio of the light amount of the signal is theoretically higher than when measuring interference light by transmission, so the S/N The ratio can be increased.
- the present invention is not limited to the above-described embodiments, and the present invention includes modifications, improvements, etc. within a range that can achieve the object of the present invention.
- the optical coupler 30 is used to combine and demultiplex optical paths, but the invention is not limited to this.
- a beam splitter may be used to combine and demultiplex optical paths.
- the physical quantity measuring device 1 was provided with one light source 10, but the present invention is not limited to this.
- the physical quantity measuring device may be provided with a light source for reference light in addition to a light source for measurement light.
- the optical sensor 40 is configured to include the measurement sensor element 41 that constitutes a Fabry-Perot etalon from a pair of reflective elements arranged close to each other, but the optical sensor 40 is not limited to this.
- the optical sensor may include a Fizeau interference type measurement sensor element.
- the physical quantity measuring device 1 is provided with one optical sensor 40, but the present invention is not limited to this.
- the physical quantity measuring device may be provided with a plurality of optical sensors each having a different wavelength peak center.
- the plurality of optical sensors may be provided at the same location on the object to be measured. With this configuration, it is possible to accurately measure changes in different physical quantities, such as pressure and temperature, at the same location on the object to be measured.
- the plurality of optical sensors may be provided at different locations on the object to be measured. With this configuration, changes in physical quantities at different positions of the object to be measured can be accurately measured.
- the wedges 62 and 62A were configured to include the first support portions 623 and 623A and the second support portions 624 and 624A, but the wedges are not limited thereto.
- it may be configured to include only a support portion disposed on one end side of the first glass plate portion and the second glass plate portion.
- the first glass plate part, the second glass plate part, and the support part may form a right triangle.
- the first reflective films 625, 625A and the second reflective films 626, 626A are composed of dielectric reflective films, but are not limited thereto.
- the first reflective film and the second reflective film may be formed of a metal film or the like, and may be configured to increase the interference amplitude between the measurement light and the first light.
- the first support portions 623, 623A and the second support portions 624, 624A are formed using low melting point glass, but are not limited to this.
- it may be formed using a resin adhesive or ceramic having a small coefficient of linear expansion.
- the first glass plate portion 621 and the light detection portion 63 are directly bonded to each other by the adhesive member 627, but the present invention is not limited thereto.
- the light detection section may be arranged to face the first plate glass section, or may be in direct contact with the first plate glass section without using any member.
- the photodetecting section 63A was arranged at a position facing the second plate glass section 622A, but the present invention is not limited thereto.
- the photodetecting section 63A may be arranged so as to be in contact with the second plate glass section 622A.
- SYMBOLS 1 Physical quantity measuring device, 10... Light source, 20... Optical cable, 21... First cable, 22... Second cable, 23... Third cable, 30... Optical coupler, 40... Optical sensor, 41... Sensor element for measurement, 50 ... Light receiver, 60... Interferometer, 61... Fresnel cylindrical lens, 62, 62A... Wedge, 63, 63A... Photodetector, 64... Case, 65... Ferrule, 70... MPU, 621, 621A... First plate glass section, 622, 622A... Second plate glass part, 623, 623A... First support part, 624, 624A... Second support part, 625, 625A... First reflective film, 626, 626A... Second reflective film, 627... Adhesive member.
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Abstract
This interferometer is characterized by comprising a wedge (62) having a first plate glass part (621) constituted from a glass plate, and a second plate glass part (622) arranged so as to be inclined with respect to the first plate glass part (621) and formed from a glass plate, a first support part (623) and a second support part (624) which are formed using members having a small coefficient of linear expansion and which prescribe the inclination of the first plate glass part (621) and the second plate glass part (622) being arranged between the first plate glass part (621) and the second plate glass part (622).
Description
本発明は、干渉計および物理量測定装置に関する。
The present invention relates to an interferometer and a physical quantity measuring device.
従来、ウェッジを有する干渉計を備えた光学測定システムが知られている(例えば、特許文献1等)。
特許文献1に開示されたような光学測定システムでは、干渉計から出力された干渉光を解析することにより、圧力等の物理量を高感度に検出できるようにしている。 Conventionally, an optical measurement system equipped with an interferometer having a wedge is known (for example,Patent Document 1, etc.).
In an optical measurement system such as that disclosed inPatent Document 1, physical quantities such as pressure can be detected with high sensitivity by analyzing interference light output from an interferometer.
特許文献1に開示されたような光学測定システムでは、干渉計から出力された干渉光を解析することにより、圧力等の物理量を高感度に検出できるようにしている。 Conventionally, an optical measurement system equipped with an interferometer having a wedge is known (for example,
In an optical measurement system such as that disclosed in
ところで、特許文献1に記載されたような、ウェッジを有する干渉計では、干渉計から出力される干渉光は、温度や湿度等の環境因子の影響を受けることが知られている。そのため、温度等の環境因子による干渉光の強度変化を予め測定し、環境因子による影響を補正することも考えられるが、温度等が急変する場合には、その変化分を補正することが難しいため、物理量の検出精度が低下してしまうといった問題があった。
Incidentally, in an interferometer having a wedge as described in Patent Document 1, it is known that the interference light output from the interferometer is affected by environmental factors such as temperature and humidity. Therefore, it is possible to measure the intensity change of the interference light due to environmental factors such as temperature in advance and compensate for the influence of environmental factors, but it is difficult to compensate for the change when the temperature etc. suddenly changes. , there was a problem that the detection accuracy of physical quantities decreased.
本発明の目的は、温度等の環境因子が物理量の検出精度に与える影響を抑制できる干渉計および物理量測定装置を提供することにある。
An object of the present invention is to provide an interferometer and a physical quantity measuring device that can suppress the influence of environmental factors such as temperature on the detection accuracy of physical quantities.
本発明の干渉計は、ガラス板にて構成された第1板ガラス部と、前記第1板ガラス部に対して傾けられて配置されガラス板にて形成された第2板ガラス部と、を有するウェッジを備え、前記第1板ガラス部と前記第2板ガラス部との間には、線膨張係数が小さい部材を用いて形成され、かつ、前記第1板ガラス部に対する前記第2板ガラス部の傾きを規定する支持部が配置されることを特徴とする。
The interferometer of the present invention includes a wedge having a first glass plate portion made of a glass plate, and a second glass plate portion formed of a glass plate and arranged at an angle with respect to the first glass plate portion. a support formed between the first glass plate part and the second glass plate part using a member having a small coefficient of linear expansion and defining the inclination of the second glass plate part with respect to the first glass plate part; It is characterized by that a section is arranged.
本発明では、第1板ガラス部と第2板ガラス部とを備えて構成されたウェッジにおいて、第1板ガラス部と第2板ガラス部との間に、第1板ガラス部に対する第2板ガラス部の傾きを規定する支持部が配置される。そして、当該支持部は、線膨張係数の小さい部材を用いて形成される。これにより、温度や湿度等の環境因子が変化しても、線膨張係数の小さい部材を用いて形成された支持部にて第1板ガラス部に対する第2板ガラス部の傾きが規定されているので、第1板ガラス部に対する第2板ガラス部の傾きの変化を抑制できる。そのため、環境因子による干渉光への影響を抑制できる。
In the present invention, in a wedge configured with a first glass plate part and a second glass plate part, an inclination of the second glass plate part with respect to the first glass plate part is defined between the first glass plate part and the second glass plate part. A support part is arranged to The support portion is formed using a member having a small coefficient of linear expansion. As a result, even if environmental factors such as temperature and humidity change, the inclination of the second glass plate part with respect to the first glass plate part is regulated by the support part formed using a member with a small coefficient of linear expansion. Changes in the inclination of the second glass plate portion relative to the first glass plate portion can be suppressed. Therefore, the influence of environmental factors on interference light can be suppressed.
本発明において、前記支持部は、低融点ガラスを用いて形成されることが好ましい。
この構成では、支持部が線膨張係数の小さい低融点ガラスを用いて形成されるので、温度や湿度等の環境因子が変化しても、第1板ガラス部に対する第2板ガラス部の傾きの変化を抑制できる。 In the present invention, it is preferable that the support part is formed using low melting point glass.
In this configuration, since the support part is formed using low-melting glass with a small coefficient of linear expansion, even if environmental factors such as temperature and humidity change, changes in the inclination of the second glass plate part with respect to the first glass plate part can be avoided. It can be suppressed.
この構成では、支持部が線膨張係数の小さい低融点ガラスを用いて形成されるので、温度や湿度等の環境因子が変化しても、第1板ガラス部に対する第2板ガラス部の傾きの変化を抑制できる。 In the present invention, it is preferable that the support part is formed using low melting point glass.
In this configuration, since the support part is formed using low-melting glass with a small coefficient of linear expansion, even if environmental factors such as temperature and humidity change, changes in the inclination of the second glass plate part with respect to the first glass plate part can be avoided. It can be suppressed.
本発明において、前記第1板ガラス部における前記第2板ガラス部に対向する面には、誘電体反射膜にて構成される第1反射膜が配置され、前記第2板ガラス部における前記第1板ガラス部に対向する面には、誘電体反射膜にて構成される第2反射膜が配置されることが好ましい。
この構成では、第1板ガラス部および第2板ガラス部に、誘電体反射膜にて構成される第1反射膜および第2反射膜を配置するので、出射される光の干渉振幅を大きくすることができる。 In the present invention, a first reflective film made of a dielectric reflective film is disposed on a surface of the first glass plate facing the second glass plate, and the first glass plate in the second glass plate It is preferable that a second reflective film made of a dielectric reflective film is disposed on the surface facing the second reflective film.
In this configuration, since the first reflective film and the second reflective film made of dielectric reflective films are arranged on the first glass plate part and the second glass plate part, it is possible to increase the interference amplitude of the emitted light. can.
この構成では、第1板ガラス部および第2板ガラス部に、誘電体反射膜にて構成される第1反射膜および第2反射膜を配置するので、出射される光の干渉振幅を大きくすることができる。 In the present invention, a first reflective film made of a dielectric reflective film is disposed on a surface of the first glass plate facing the second glass plate, and the first glass plate in the second glass plate It is preferable that a second reflective film made of a dielectric reflective film is disposed on the surface facing the second reflective film.
In this configuration, since the first reflective film and the second reflective film made of dielectric reflective films are arranged on the first glass plate part and the second glass plate part, it is possible to increase the interference amplitude of the emitted light. can.
本発明の物理量測定装置は、上記干渉計と、光源と、前記光源から放出される光が入射する第1光路と、前記第1光路から出力された光を入射して、被測定物の物理量に応じた光を出力する光学センサと、前記光学センサから出力された光を入射して、前記干渉計に出力する第2光路と、前記干渉計から出力される干渉光から干渉信号を検出する光検出部と、を備えることを特徴とする。
本発明では、上記と同様の効果を奏することができる。 The physical quantity measuring device of the present invention includes the above-mentioned interferometer, a light source, a first optical path into which light emitted from the light source enters, and a physical quantity measurement device of a measured object by inputting the light outputted from the first optical path. an optical sensor that outputs light according to the optical sensor, a second optical path that receives the light output from the optical sensor and outputs it to the interferometer, and detects an interference signal from the interference light output from the interferometer. A photodetecting section.
The present invention can produce effects similar to those described above.
本発明では、上記と同様の効果を奏することができる。 The physical quantity measuring device of the present invention includes the above-mentioned interferometer, a light source, a first optical path into which light emitted from the light source enters, and a physical quantity measurement device of a measured object by inputting the light outputted from the first optical path. an optical sensor that outputs light according to the optical sensor, a second optical path that receives the light output from the optical sensor and outputs it to the interferometer, and detects an interference signal from the interference light output from the interferometer. A photodetecting section.
The present invention can produce effects similar to those described above.
本発明の物理量測定装置において、前記第1板ガラス部と前記光検出部とは、接着部材により接着されていることが好ましい。
この構成では、第1板ガラス部と光検出部とが接着部材により直接接着されているので、第1板ガラス部と光検出部との間に作用する熱影響を小さくすることができる。 In the physical quantity measuring device of the present invention, it is preferable that the first plate glass part and the light detection part are bonded together with an adhesive member.
In this configuration, since the first glass plate part and the photodetection part are directly bonded to each other by the adhesive member, it is possible to reduce the thermal influence acting between the first glass plate part and the photodetection part.
この構成では、第1板ガラス部と光検出部とが接着部材により直接接着されているので、第1板ガラス部と光検出部との間に作用する熱影響を小さくすることができる。 In the physical quantity measuring device of the present invention, it is preferable that the first plate glass part and the light detection part are bonded together with an adhesive member.
In this configuration, since the first glass plate part and the photodetection part are directly bonded to each other by the adhesive member, it is possible to reduce the thermal influence acting between the first glass plate part and the photodetection part.
本発明の物理量測定装置において、前記光検出部は、前記第1板ガラス部にて反射された第1反射光と、前記第2板ガラス部にて反射された第2反射光とによる干渉光を入射して干渉信号を検出するように構成されていることが好ましい。
この構成では、光検出部は、第1板ガラス部にて反射された第1反射光と、第2板ガラス部にて反射された第2反射光とによる干渉光を入射するように構成されているので、光検出部と第1板ガラス部とを接着させる必要がなく、光検出部の配置の自由度を高くすることができる。
また、光検出部が第2板ガラス部と対向するよう配置されている場合は、干渉光を透過で測定する場合と比較して、理論上信号の光量の割合が多いため、S/N比を大きくすることができる。 In the physical quantity measuring device of the present invention, the light detection unit receives interference light caused by a first reflected light reflected by the first plate glass part and a second reflected light reflected by the second plate glass part. Preferably, the interfering signal is detected by detecting the interfering signal.
In this configuration, the photodetector is configured to receive interference light caused by the first reflected light reflected by the first plate glass part and the second reflected light reflected by the second plate glass part. Therefore, there is no need to bond the photodetector and the first glass plate, and the degree of freedom in arranging the photodetector can be increased.
In addition, when the photodetector is arranged to face the second glass plate, the ratio of the light amount of the signal is theoretically higher than when measuring interference light through transmission, so the S/N ratio is Can be made larger.
この構成では、光検出部は、第1板ガラス部にて反射された第1反射光と、第2板ガラス部にて反射された第2反射光とによる干渉光を入射するように構成されているので、光検出部と第1板ガラス部とを接着させる必要がなく、光検出部の配置の自由度を高くすることができる。
また、光検出部が第2板ガラス部と対向するよう配置されている場合は、干渉光を透過で測定する場合と比較して、理論上信号の光量の割合が多いため、S/N比を大きくすることができる。 In the physical quantity measuring device of the present invention, the light detection unit receives interference light caused by a first reflected light reflected by the first plate glass part and a second reflected light reflected by the second plate glass part. Preferably, the interfering signal is detected by detecting the interfering signal.
In this configuration, the photodetector is configured to receive interference light caused by the first reflected light reflected by the first plate glass part and the second reflected light reflected by the second plate glass part. Therefore, there is no need to bond the photodetector and the first glass plate, and the degree of freedom in arranging the photodetector can be increased.
In addition, when the photodetector is arranged to face the second glass plate, the ratio of the light amount of the signal is theoretically higher than when measuring interference light through transmission, so the S/N ratio is Can be made larger.
[第1実施形態]
本発明の第1実施形態の物理量測定装置1を図面に基づいて説明する。
図1は、第1実施形態の物理量測定装置1の概略構成を示す図である。なお、物理量測定装置1は、圧力、加速度、変位、傾斜、温度などの物理量を測定可能に構成されている。
図1に示すように、物理量測定装置1は、光源10と、光ケーブル20と、光カプラ30と、光学センサ40と、受光器50とを備える。 [First embodiment]
A physicalquantity measuring device 1 according to a first embodiment of the present invention will be described based on the drawings.
FIG. 1 is a diagram showing a schematic configuration of a physicalquantity measuring device 1 according to the first embodiment. Note that the physical quantity measuring device 1 is configured to be able to measure physical quantities such as pressure, acceleration, displacement, inclination, and temperature.
As shown in FIG. 1, the physicalquantity measuring device 1 includes a light source 10, an optical cable 20, an optical coupler 30, an optical sensor 40, and a light receiver 50.
本発明の第1実施形態の物理量測定装置1を図面に基づいて説明する。
図1は、第1実施形態の物理量測定装置1の概略構成を示す図である。なお、物理量測定装置1は、圧力、加速度、変位、傾斜、温度などの物理量を測定可能に構成されている。
図1に示すように、物理量測定装置1は、光源10と、光ケーブル20と、光カプラ30と、光学センサ40と、受光器50とを備える。 [First embodiment]
A physical
FIG. 1 is a diagram showing a schematic configuration of a physical
As shown in FIG. 1, the physical
[光源10]
光源10は、広帯域な波長の第1光L1を放出する光源である。光源10は、例えば、SC(Super Continuum)光源であり、1200nm~1600nmの波長領域の第1光L1を放出可能に構成されている。なお、光源10は、上記構成に限られるものではなく、LED(Light Emitting diode)光源やASE(Amplified Spontaneous Emission)光源やSLD(Super Luminescent Diode)光源や白熱電球等を組み合わせたものであってもよく、また、チューナブルレーザのように広帯域を掃引する狭帯域光源であってもよい。さらに、光源10は、例示した波長領域よりも広い波長領域の第1光L1を放出可能に構成されていてもよく、あるいは、例示した波長領域よりも狭い波長領域の第1光L1を放出可能に構成されていてもよい。 [Light source 10]
Thelight source 10 is a light source that emits first light L1 having a broadband wavelength. The light source 10 is, for example, an SC (Super Continuum) light source, and is configured to be able to emit the first light L1 in the wavelength range of 1200 nm to 1600 nm. Note that the light source 10 is not limited to the above configuration, and may be a combination of an LED (Light Emitting Diode) light source, an ASE (Amplified Spontaneous Emission) light source, an SLD (Super Luminescent Diode) light source, an incandescent light bulb, etc. Alternatively, it may be a narrow band light source that sweeps a wide band, such as a tunable laser. Furthermore, the light source 10 may be configured to be able to emit the first light L1 in a wider wavelength range than the illustrated wavelength range, or may be configured to be able to emit the first light L1 in a wavelength range narrower than the illustrated wavelength range. It may be configured as follows.
光源10は、広帯域な波長の第1光L1を放出する光源である。光源10は、例えば、SC(Super Continuum)光源であり、1200nm~1600nmの波長領域の第1光L1を放出可能に構成されている。なお、光源10は、上記構成に限られるものではなく、LED(Light Emitting diode)光源やASE(Amplified Spontaneous Emission)光源やSLD(Super Luminescent Diode)光源や白熱電球等を組み合わせたものであってもよく、また、チューナブルレーザのように広帯域を掃引する狭帯域光源であってもよい。さらに、光源10は、例示した波長領域よりも広い波長領域の第1光L1を放出可能に構成されていてもよく、あるいは、例示した波長領域よりも狭い波長領域の第1光L1を放出可能に構成されていてもよい。 [Light source 10]
The
[光ケーブル20]
光ケーブル20は、所謂マルチモード光ファイバや保護部材等を備えて構成される。本実施形態では、光ケーブル20は、第1ケーブル21と、第2ケーブル22と、第3ケーブル23とを有する。 [Optical cable 20]
Theoptical cable 20 includes a so-called multimode optical fiber, a protection member, and the like. In this embodiment, the optical cable 20 includes a first cable 21, a second cable 22, and a third cable 23.
光ケーブル20は、所謂マルチモード光ファイバや保護部材等を備えて構成される。本実施形態では、光ケーブル20は、第1ケーブル21と、第2ケーブル22と、第3ケーブル23とを有する。 [Optical cable 20]
The
第1ケーブル21は、光源10から出射された第1光L1を光カプラ30に伝送する。第2ケーブル22は、光カプラ30を介して入射された第1光L1を光学センサ40に伝送するとともに、光学センサ40から出力された測定光M1および第1光L1を光カプラ30に伝送する。第3ケーブル23は、光カプラ30を介して入射された測定光M1および第1光L1を受光器50に伝送する。すなわち、第1ケーブル21および第2ケーブル22は本発明の第1光路を構成し、第2ケーブル22および第3ケーブル23は、本発明の第2光路を構成する。
なお、光ケーブル20を構成する第1ケーブル21、第2ケーブル22、および、第3ケーブル23は、マルチモード光ファイバを備えて構成されるものに限られるものではなく、例えば、シングルモード光ファイバを備えて構成されていてもよい。 Thefirst cable 21 transmits the first light L1 emitted from the light source 10 to the optical coupler 30. The second cable 22 transmits the first light L1 incident through the optical coupler 30 to the optical sensor 40, and also transmits the measurement light M1 and the first light L1 output from the optical sensor 40 to the optical coupler 30. . The third cable 23 transmits the measurement light M1 and the first light L1 incident through the optical coupler 30 to the light receiver 50. That is, the first cable 21 and the second cable 22 constitute the first optical path of the present invention, and the second cable 22 and the third cable 23 constitute the second optical path of the present invention.
Note that thefirst cable 21, second cable 22, and third cable 23 that constitute the optical cable 20 are not limited to those that include multimode optical fibers, but for example, they may include single mode optical fibers. It may be configured in advance.
なお、光ケーブル20を構成する第1ケーブル21、第2ケーブル22、および、第3ケーブル23は、マルチモード光ファイバを備えて構成されるものに限られるものではなく、例えば、シングルモード光ファイバを備えて構成されていてもよい。 The
Note that the
[光カプラ30]
光カプラ30は、所謂2×2カプラである、本実施形態では、光カプラ30は、光ケーブル20に設けられている。具体的には、光カプラ30は、第1ケーブル21、第2ケーブル22、および、第3ケーブル23を光学的に接続させるように設けられている。これにより、光カプラ30は、光源10から出射された第1光L1を光学センサ40に伝送するとともに、光学センサ40から出力された測定光M1および第1光L1を受光器50に伝送する。 [Optical coupler 30]
Theoptical coupler 30 is a so-called 2×2 coupler. In this embodiment, the optical coupler 30 is provided on the optical cable 20. Specifically, the optical coupler 30 is provided to optically connect the first cable 21, the second cable 22, and the third cable 23. Thereby, the optical coupler 30 transmits the first light L1 emitted from the light source 10 to the optical sensor 40, and transmits the measurement light M1 and the first light L1 output from the optical sensor 40 to the light receiver 50.
光カプラ30は、所謂2×2カプラである、本実施形態では、光カプラ30は、光ケーブル20に設けられている。具体的には、光カプラ30は、第1ケーブル21、第2ケーブル22、および、第3ケーブル23を光学的に接続させるように設けられている。これにより、光カプラ30は、光源10から出射された第1光L1を光学センサ40に伝送するとともに、光学センサ40から出力された測定光M1および第1光L1を受光器50に伝送する。 [Optical coupler 30]
The
[光学センサ40]
光学センサ40は、図示略の被測定物に配置されており、被測定物に作用する物理量に応じた測定光M1を出射可能に構成されている。本実施形態では、光学センサ40は、光カプラ30を介して伝送された第1光L1を入射して、その反射光を光カプラ30に出力する測定用センサ素子41を有する。 [Optical sensor 40]
Theoptical sensor 40 is placed on an object to be measured (not shown), and is configured to be able to emit measurement light M1 according to a physical quantity acting on the object. In this embodiment, the optical sensor 40 includes a measurement sensor element 41 that receives the first light L1 transmitted through the optical coupler 30 and outputs the reflected light to the optical coupler 30.
光学センサ40は、図示略の被測定物に配置されており、被測定物に作用する物理量に応じた測定光M1を出射可能に構成されている。本実施形態では、光学センサ40は、光カプラ30を介して伝送された第1光L1を入射して、その反射光を光カプラ30に出力する測定用センサ素子41を有する。 [Optical sensor 40]
The
測定用センサ素子41は、互いに近接配置された一対の反射素子から構成され、ファブリペロー干渉計を構成する。具体的には、測定用センサ素子41を構成する一対の反射素子は、所定の距離を隔てて形成されており、それぞれミラーの役割を有する。そして、一対の反射素子は、所定の波長領域の光を反射する。これにより、当該一対の反射素子は、ファブリペロー干渉計を構成する。すなわち、光学センサ40は、ファブリペロー干渉型センサとして構成されている。そのため、光学センサ40は、被測定物に作用する物理量に応じて、測定光M1を出力可能に構成されている。
そして、本実施形態では、前述したように、測定用センサ素子41は、反射光である測定光M1を光カプラ30に出力する。なお、測定用センサ素子41は、測定光M1とともに、第1光L1の一部をそのまま反射する。すなわち、光学センサ40は、前述したように、測定光M1および第1光L1を光カプラ30に出力する。 Themeasurement sensor element 41 is composed of a pair of reflective elements arranged close to each other, and constitutes a Fabry-Perot interferometer. Specifically, a pair of reflective elements constituting the measurement sensor element 41 are formed apart from each other by a predetermined distance, and each functions as a mirror. The pair of reflecting elements reflects light in a predetermined wavelength range. Thereby, the pair of reflective elements constitute a Fabry-Perot interferometer. That is, the optical sensor 40 is configured as a Fabry-Perot interference type sensor. Therefore, the optical sensor 40 is configured to be able to output the measurement light M1 depending on the physical quantity acting on the object to be measured.
In this embodiment, as described above, themeasurement sensor element 41 outputs the measurement light M1, which is reflected light, to the optical coupler 30. Note that the measurement sensor element 41 reflects a portion of the first light L1 as is, along with the measurement light M1. That is, the optical sensor 40 outputs the measurement light M1 and the first light L1 to the optical coupler 30, as described above.
そして、本実施形態では、前述したように、測定用センサ素子41は、反射光である測定光M1を光カプラ30に出力する。なお、測定用センサ素子41は、測定光M1とともに、第1光L1の一部をそのまま反射する。すなわち、光学センサ40は、前述したように、測定光M1および第1光L1を光カプラ30に出力する。 The
In this embodiment, as described above, the
[受光器50]
受光器50は、光学センサ40から出力された測定光M1および第1光L1を入射して、被測定物に作用する物理量を演算する。本実施形態では、受光器50は、干渉計60と、MPU70とを有する。 [Photoreceiver 50]
Thelight receiver 50 receives the measurement light M1 and the first light L1 output from the optical sensor 40 and calculates a physical quantity acting on the object to be measured. In this embodiment, the light receiver 50 includes an interferometer 60 and an MPU 70.
受光器50は、光学センサ40から出力された測定光M1および第1光L1を入射して、被測定物に作用する物理量を演算する。本実施形態では、受光器50は、干渉計60と、MPU70とを有する。 [Photoreceiver 50]
The
[干渉計60]
図2は、干渉計60の概略を示す断面図であり、図3は、ウェッジ62の概略を示す断面図である。本実施形態では、干渉計60は、光学センサ40から出力された測定光M1を干渉させて第1干渉光を出射するとともに、当該第1干渉光を検出可能に構成されている。
図1~図3に示すように、干渉計60は、フレネルシリンドリカルレンズ61と、ウェッジ62と、光検出部63と、ケース64とを有する。 [Interferometer 60]
FIG. 2 is a cross-sectional view schematically showing theinterferometer 60, and FIG. 3 is a cross-sectional view schematically showing the wedge 62. In this embodiment, the interferometer 60 is configured to interfere with the measurement light M1 output from the optical sensor 40 to emit a first interference light, and to detect the first interference light.
As shown in FIGS. 1 to 3, theinterferometer 60 includes a Fresnel cylindrical lens 61, a wedge 62, a photodetector 63, and a case 64.
図2は、干渉計60の概略を示す断面図であり、図3は、ウェッジ62の概略を示す断面図である。本実施形態では、干渉計60は、光学センサ40から出力された測定光M1を干渉させて第1干渉光を出射するとともに、当該第1干渉光を検出可能に構成されている。
図1~図3に示すように、干渉計60は、フレネルシリンドリカルレンズ61と、ウェッジ62と、光検出部63と、ケース64とを有する。 [Interferometer 60]
FIG. 2 is a cross-sectional view schematically showing the
As shown in FIGS. 1 to 3, the
フレネルシリンドリカルレンズ61は、樹脂製のシートに対して、同心円状に全て角度の異なる溝が形成された光学レンズであり、各溝が屈曲面として作用することにより、入射した測定光M1および第1光L1をウェッジ62に向けて集光させる。
The Fresnel cylindrical lens 61 is an optical lens in which concentric grooves with different angles are formed in a resin sheet, and each groove acts as a curved surface, so that the incident measurement light M1 and the first The light L1 is focused toward the wedge 62.
ウェッジ62は、フレネルシリンドリカルレンズ61を介して入射された測定光M1を干渉させて干渉光を出射する。なお、第1光L1は干渉することなく、そのまま出射される。
本実施形態では、ウェッジ62は、第1板ガラス部621と、第2板ガラス部622と、第1支持部623と、第2支持部624と、を有する。 Thewedge 62 interferes with the measurement light M1 incident through the Fresnel cylindrical lens 61 and emits interference light. Note that the first light L1 is emitted as is without interference.
In this embodiment, thewedge 62 includes a first glass plate portion 621 , a second glass plate portion 622 , a first support portion 623 , and a second support portion 624 .
本実施形態では、ウェッジ62は、第1板ガラス部621と、第2板ガラス部622と、第1支持部623と、第2支持部624と、を有する。 The
In this embodiment, the
第1板ガラス部621は、平板状のガラス板にて構成され、第2板ガラス部622に対向する面に第1反射膜625が配置されている。同様に、第2板ガラス部622は、平板状のガラス板にて構成され、第1板ガラス部621に対向する面に第2反射膜626が配置されている。そして、断面視で、第2板ガラス部622は、第1板ガラス部621に対して傾けられて配置されている。そのため、フレネルシリンドリカルレンズ61を介して入射された測定光M1は、第1板ガラス部621の第1反射膜625と第2板ガラス部622の第2反射膜626とで透過・反射され、透過・反射された測定光M1同士が干渉して干渉光が出射される。
さらに、本実施形態では、第1板ガラス部621は、接着部材627により光検出部63と接着されている。 The firstglass plate portion 621 is made of a flat glass plate, and a first reflective film 625 is disposed on the surface facing the second glass plate portion 622 . Similarly, the second glass plate portion 622 is made of a flat glass plate, and a second reflective film 626 is disposed on the surface facing the first glass plate portion 621 . In cross-sectional view, the second glass plate portion 622 is arranged to be inclined with respect to the first glass plate portion 621. Therefore, the measurement light M1 incident through the Fresnel cylindrical lens 61 is transmitted and reflected by the first reflective film 625 of the first plate glass part 621 and the second reflective film 626 of the second plate glass part 622, and is transmitted and reflected. The measured measurement lights M1 interfere with each other, and interference light is emitted.
Furthermore, in this embodiment, the firstplate glass section 621 is bonded to the photodetector section 63 using an adhesive member 627.
さらに、本実施形態では、第1板ガラス部621は、接着部材627により光検出部63と接着されている。 The first
Furthermore, in this embodiment, the first
ここで、本実施形態では、第1反射膜625および第2反射膜626は誘電体反射膜にて構成される。これにより、フレネルシリンドリカルレンズ61を介して入射された測定光M1は透過・反射させる一方で、フレネルシリンドリカルレンズ61を介して入射された第1光L1は透過させるような第1板ガラス部621および第2板ガラス部622を容易に構成することができる。すなわち、第1板ガラス部621および第2板ガラス部622に第1反射膜625および第2反射膜626を配置するので、出射された光の干渉振幅を大きくすることができる。
Here, in this embodiment, the first reflective film 625 and the second reflective film 626 are composed of dielectric reflective films. As a result, the first plate glass portion 621 and the first glass plate part 621 and the first plate glass part 621 transmit and reflect the measurement light M1 that has entered through the Fresnel cylindrical lens 61, while transmitting the first light L1 that has entered through the Fresnel cylindrical lens 61. The two-pane glass portion 622 can be easily configured. That is, since the first reflective film 625 and the second reflective film 626 are arranged on the first glass plate portion 621 and the second glass plate portion 622, the interference amplitude of the emitted light can be increased.
第1支持部623および第2支持部624は、第1板ガラス部621と第2板ガラス部622との間に配置され、第1板ガラス部621に対する第2板ガラス部622の傾きを規定している。具体的には、断面視で、第1支持部623は、第1板ガラス部621および第2板ガラス部622の一方の端部側に配置され、第2支持部624は、第1板ガラス部621および第2板ガラス部622の他方の端部側に配置されている。そして、第1支持部623は、第1板ガラス部621と直交する方向に対する長さが、第2支持部624よりも大きくなるように構成されている。これにより、断面図で、第1板ガラス部621、第2板ガラス部622、第1支持部623、および、第2支持部624は、台形を構成している。
なお、第1支持部623および第2支持部624は、例えば、スクリーン印刷技術により形成される。これにより、第1支持部623および第2支持部624の大きさを制御しやすくすることができる。 Thefirst support portion 623 and the second support portion 624 are arranged between the first glass plate portion 621 and the second glass plate portion 622, and define the inclination of the second glass plate portion 622 with respect to the first glass plate portion 621. Specifically, in cross-sectional view, the first support part 623 is arranged on one end side of the first glass plate part 621 and the second glass plate part 622, and the second support part 624 is arranged on the side of one end of the first glass plate part 621 and the second glass plate part 622. It is arranged on the other end side of the second plate glass section 622. The first support portion 623 is configured to have a longer length in the direction orthogonal to the first glass plate portion 621 than the second support portion 624 . As a result, in the cross-sectional view, the first glass plate portion 621, the second glass plate portion 622, the first support portion 623, and the second support portion 624 form a trapezoid.
Note that thefirst support portion 623 and the second support portion 624 are formed by, for example, screen printing technology. Thereby, the sizes of the first support portion 623 and the second support portion 624 can be easily controlled.
なお、第1支持部623および第2支持部624は、例えば、スクリーン印刷技術により形成される。これにより、第1支持部623および第2支持部624の大きさを制御しやすくすることができる。 The
Note that the
ここで、本実施形態では、第1支持部623および第2支持部624は、線膨張係数の小さい低融点ガラスを用いて形成される。これにより、温度や湿度等の環境因子が変化しても、低融点ガラスを用いて形成された第1支持部623および第2支持部624の大きさは変化しにくいので、当該第1支持部623および第2支持部624にて規定された第1板ガラス部621に対する第2板ガラス部622の傾きも変化しにくくなる。そのため、温度や湿度等の環境因子が変化しても、第1板ガラス部621の第1反射膜625と第2板ガラス部622の第2反射膜626との透過・反射で干渉した干渉光の強度変化を小さくできるので、環境因子による干渉光への影響を抑制できる。
Here, in this embodiment, the first support part 623 and the second support part 624 are formed using low melting point glass with a small coefficient of linear expansion. As a result, even if environmental factors such as temperature and humidity change, the sizes of the first support part 623 and the second support part 624, which are formed using low-melting glass, do not easily change, so the first support part The inclination of the second glass plate portion 622 with respect to the first glass plate portion 621 defined by the second support portion 623 and the second support portion 624 also becomes difficult to change. Therefore, even if environmental factors such as temperature and humidity change, the intensity of the interference light that is transmitted and reflected by the first reflective film 625 of the first glass plate part 621 and the second reflective film 626 of the second glass plate part 622 is strong. Since the change can be made small, the influence of environmental factors on the interference light can be suppressed.
光検出部63は、ウェッジ62から出射された干渉光を検出し、当該干渉光に応じた第1信号を出力可能に構成されている。また、光検出部63は、ウェッジ62から出射された第1光L1を検出し、当該第1光L1に応じた第2信号を出力可能に構成されている。なお、第1信号は、本発明の干渉信号の一例である。
本実施形態では、光検出部63は、第1板ガラス部621の背面側に、アレイ状に複数配置された光検出素子を備えた、所謂ラインセンサとして構成される。例えば、光検出部63は、Siから形成され短波長の波長領域の干渉光を検出する光検出素子、または、InGaAsから形成され長波長の波長領域の干渉光を検出する光検出素子、あるいはその両方がアレイ状に複数配置されて構成される。そして、前述したように、光検出部63は、接着部材627により第1板ガラス部621に接着されている。これにより、第1板ガラス部621と光検出部63とが接着部材627により直接接着されるので、第1板ガラス部621と光検出部63との間に作用する熱の影響を小さくすることができる。
なお、光検出部63は、上記構成に限られるものではなく、ウェッジ62から出射された干渉光および第1光L1を検出し、第1干渉光および第1光L1に応じた第1信号および第2信号を出力可能に構成されていればよい。 Thelight detection unit 63 is configured to be able to detect interference light emitted from the wedge 62 and output a first signal corresponding to the interference light. Further, the light detection unit 63 is configured to be able to detect the first light L1 emitted from the wedge 62 and output a second signal corresponding to the first light L1. Note that the first signal is an example of an interference signal of the present invention.
In this embodiment, thephotodetection section 63 is configured as a so-called line sensor that includes a plurality of photodetection elements arranged in an array on the back side of the first plate glass section 621. For example, the photodetecting section 63 is a photodetecting element made of Si and detecting interference light in a short wavelength range, or a photodetecting element made of InGaAs and detecting interference light in a long wavelength range, or the like. A plurality of both are arranged in an array. As described above, the photodetecting section 63 is bonded to the first glass plate section 621 using an adhesive member 627. As a result, the first glass plate part 621 and the photodetector part 63 are directly bonded together by the adhesive member 627, so that the influence of heat acting between the first glass plate part 621 and the photodetector part 63 can be reduced. .
Note that thelight detection unit 63 is not limited to the above configuration, and detects the interference light and the first light L1 emitted from the wedge 62, and generates a first signal and a signal corresponding to the first interference light and the first light L1. It suffices if it is configured to be able to output the second signal.
本実施形態では、光検出部63は、第1板ガラス部621の背面側に、アレイ状に複数配置された光検出素子を備えた、所謂ラインセンサとして構成される。例えば、光検出部63は、Siから形成され短波長の波長領域の干渉光を検出する光検出素子、または、InGaAsから形成され長波長の波長領域の干渉光を検出する光検出素子、あるいはその両方がアレイ状に複数配置されて構成される。そして、前述したように、光検出部63は、接着部材627により第1板ガラス部621に接着されている。これにより、第1板ガラス部621と光検出部63とが接着部材627により直接接着されるので、第1板ガラス部621と光検出部63との間に作用する熱の影響を小さくすることができる。
なお、光検出部63は、上記構成に限られるものではなく、ウェッジ62から出射された干渉光および第1光L1を検出し、第1干渉光および第1光L1に応じた第1信号および第2信号を出力可能に構成されていればよい。 The
In this embodiment, the
Note that the
このように、本実施形態では、干渉計60は、ウェッジ62を備えるウェッジ・シアリング干渉計として構成されている。
なお、干渉計60は、上記構成に限られるものではなく、例えば、フレネルシリンドリカルレンズ61に替えてシリンドリカルレンズを備えていてもよく、また、フレネルシリンドリカルレンズやシリンドリカルレンズ等のレンズを備えていなくてもよい。 Thus, in this embodiment, theinterferometer 60 is configured as a wedge shearing interferometer including the wedge 62.
Note that theinterferometer 60 is not limited to the above configuration, and may, for example, include a cylindrical lens instead of the Fresnel cylindrical lens 61, or may not include a lens such as a Fresnel cylindrical lens or a cylindrical lens. Good too.
なお、干渉計60は、上記構成に限られるものではなく、例えば、フレネルシリンドリカルレンズ61に替えてシリンドリカルレンズを備えていてもよく、また、フレネルシリンドリカルレンズやシリンドリカルレンズ等のレンズを備えていなくてもよい。 Thus, in this embodiment, the
Note that the
ケース64は、フレネルシリンドリカルレンズ61、ウェッジ62、および、光検出部63を収納する収納容器である。そして、本実施形態では、ケース64と第3ケーブル23とを接続させるフェルール65が、ケース64の外側に配置されている。これにより、第3ケーブル23を介して出射された測定光M1および第1光L1は、フェルール65を介してケース64の内部に入射される。
なお、上記構成に限られるものではなく、例えば、第3ケーブル23とケース64とが光コネクタを介して接続されていてもよく、あるいは、第3ケーブル23の先端がケース64に直接接合されて接続されていてもよい。 Thecase 64 is a storage container that houses the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63. In this embodiment, a ferrule 65 for connecting the case 64 and the third cable 23 is arranged outside the case 64. As a result, the measurement light M1 and the first light L1 emitted via the third cable 23 enter the inside of the case 64 via the ferrule 65.
Note that the configuration is not limited to the above configuration; for example, thethird cable 23 and the case 64 may be connected via an optical connector, or the tip of the third cable 23 may be directly connected to the case 64. May be connected.
なお、上記構成に限られるものではなく、例えば、第3ケーブル23とケース64とが光コネクタを介して接続されていてもよく、あるいは、第3ケーブル23の先端がケース64に直接接合されて接続されていてもよい。 The
Note that the configuration is not limited to the above configuration; for example, the
このように、本実施形態では、フレネルシリンドリカルレンズ61、ウェッジ62、および、光検出部63をケース64に収納するので、フレネルシリンドリカルレンズ61、ウェッジ62、および、光検出部63に対する環境因子の影響を小さくできる。
In this way, in this embodiment, the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63 are housed in the case 64, so that the influence of environmental factors on the Fresnel cylindrical lens 61, the wedge 62, and the photodetector 63 can be reduced. can be made smaller.
[MPU70]
MPU70は、所謂Micro Processing Unitであり、光検出部63から出力される第1信号および第2信号を入力して、被測定物に作用する物理量を演算する。本実施形態では、MPU70は、第1信号に含まれる干渉光に応じた干渉縞を求め、その干渉縞の周期的な強度変化から、位相変化を算出する。そして、MPU70は、この位相変化と物理量との相関関係を予め求めておくことで、位相変化に応じた物理量を算出する。
また、本実施形態では、MPU70は、第1信号に基づいて算出した物理量を、第2信号に基づいて補正する。これにより、例えば、光源10の劣化により測定光M1が変化したとしても、当該測定光M1の変化を、第1光L1に応じた第2信号に基づいて補正することができる。 [MPU70]
TheMPU 70 is a so-called Micro Processing Unit, receives the first signal and the second signal output from the photodetector 63, and calculates a physical quantity acting on the object to be measured. In this embodiment, the MPU 70 obtains interference fringes according to the interference light included in the first signal, and calculates a phase change from periodic intensity changes of the interference fringes. Then, the MPU 70 calculates the physical quantity according to the phase change by calculating the correlation between this phase change and the physical quantity in advance.
Furthermore, in this embodiment, theMPU 70 corrects the physical quantity calculated based on the first signal based on the second signal. Thereby, for example, even if the measurement light M1 changes due to deterioration of the light source 10, the change in the measurement light M1 can be corrected based on the second signal corresponding to the first light L1.
MPU70は、所謂Micro Processing Unitであり、光検出部63から出力される第1信号および第2信号を入力して、被測定物に作用する物理量を演算する。本実施形態では、MPU70は、第1信号に含まれる干渉光に応じた干渉縞を求め、その干渉縞の周期的な強度変化から、位相変化を算出する。そして、MPU70は、この位相変化と物理量との相関関係を予め求めておくことで、位相変化に応じた物理量を算出する。
また、本実施形態では、MPU70は、第1信号に基づいて算出した物理量を、第2信号に基づいて補正する。これにより、例えば、光源10の劣化により測定光M1が変化したとしても、当該測定光M1の変化を、第1光L1に応じた第2信号に基づいて補正することができる。 [MPU70]
The
Furthermore, in this embodiment, the
[第1実施形態の効果]
以上のような本実施形態では、次の効果を奏することができる。
(1)本実施形態では、第1板ガラス部621と第2板ガラス部622とを備えて構成されたウェッジ62において、第1板ガラス部621と第2板ガラス部622との間に、第1板ガラス部621に対する第2板ガラス部622の傾きを規定する第1支持部623および第2支持部624が配置される。そして、当該第1支持部623および第2支持部624は、線膨張係数の小さい低融点ガラスを用いて形成される。これにより、温度や湿度等の環境因子が変化しても、低融点ガラスを用いて形成された第1支持部623および第2支持部624にて第1板ガラス部621に対する第2板ガラス部622の傾きが規定されているので、第1板ガラス部621に対する第2板ガラス部622の傾きの変化を抑制できる。そのため、環境因子による干渉光への影響を抑制できる。 [Effects of the first embodiment]
In this embodiment as described above, the following effects can be achieved.
(1) In the present embodiment, in thewedge 62 configured to include the first glass plate part 621 and the second glass plate part 622, the first glass plate part A first support portion 623 and a second support portion 624 that define the inclination of the second plate glass portion 622 with respect to the second glass plate portion 621 are arranged. The first support portion 623 and the second support portion 624 are formed using low melting point glass with a small coefficient of linear expansion. As a result, even if environmental factors such as temperature and humidity change, the first support part 623 and the second support part 624, which are formed using low-melting point glass, can support the second plate glass part 622 relative to the first glass plate part 621. Since the inclination is defined, a change in the inclination of the second glass plate portion 622 with respect to the first glass plate portion 621 can be suppressed. Therefore, the influence of environmental factors on interference light can be suppressed.
以上のような本実施形態では、次の効果を奏することができる。
(1)本実施形態では、第1板ガラス部621と第2板ガラス部622とを備えて構成されたウェッジ62において、第1板ガラス部621と第2板ガラス部622との間に、第1板ガラス部621に対する第2板ガラス部622の傾きを規定する第1支持部623および第2支持部624が配置される。そして、当該第1支持部623および第2支持部624は、線膨張係数の小さい低融点ガラスを用いて形成される。これにより、温度や湿度等の環境因子が変化しても、低融点ガラスを用いて形成された第1支持部623および第2支持部624にて第1板ガラス部621に対する第2板ガラス部622の傾きが規定されているので、第1板ガラス部621に対する第2板ガラス部622の傾きの変化を抑制できる。そのため、環境因子による干渉光への影響を抑制できる。 [Effects of the first embodiment]
In this embodiment as described above, the following effects can be achieved.
(1) In the present embodiment, in the
(2)本実施形態では、第1板ガラス部621および第2板ガラス部622に、誘電体反射膜にて構成される第1反射膜625および第2反射膜626を配置するので、出射される光の干渉振幅を大きくすることができる。
(2) In this embodiment, since the first reflective film 625 and the second reflective film 626 made of dielectric reflective films are disposed on the first glass plate portion 621 and the second glass plate portion 622, the emitted light The interference amplitude can be increased.
(3)本実施形態では、第1板ガラス部621と光検出部63とが接着部材627により直接接着されているので、第1板ガラス部621と光検出部63との間に作用する熱影響を小さくすることができる。
(3) In this embodiment, the first glass plate portion 621 and the light detection portion 63 are directly bonded to each other by the adhesive member 627, so that the influence of heat acting between the first glass plate portion 621 and the light detection portion 63 is reduced. Can be made smaller.
[第2実施形態]
次に、本発明の第2実施形態の物理量測定装置について図面に基づいて説明する。
第2実施形態では、光検出部63Aは、第1板ガラス部621Aにて反射された第1反射光R1と、第2板ガラス部622Aにて反射された第2反射光R2とによる干渉光を入射して干渉信号を検出するように構成される点で第1実施形態と異なる。第2実施形態の説明において、第1実施形態の構成と同一のものは、同一符号を付して説明を省略する。 [Second embodiment]
Next, a physical quantity measuring device according to a second embodiment of the present invention will be described based on the drawings.
In the second embodiment, thephotodetector 63A receives interference light caused by the first reflected light R1 reflected by the first glass plate 621A and the second reflected light R2 reflected by the second glass plate 622A. This embodiment differs from the first embodiment in that it is configured to detect an interference signal. In the description of the second embodiment, the same components as those in the first embodiment are given the same reference numerals and the description thereof will be omitted.
次に、本発明の第2実施形態の物理量測定装置について図面に基づいて説明する。
第2実施形態では、光検出部63Aは、第1板ガラス部621Aにて反射された第1反射光R1と、第2板ガラス部622Aにて反射された第2反射光R2とによる干渉光を入射して干渉信号を検出するように構成される点で第1実施形態と異なる。第2実施形態の説明において、第1実施形態の構成と同一のものは、同一符号を付して説明を省略する。 [Second embodiment]
Next, a physical quantity measuring device according to a second embodiment of the present invention will be described based on the drawings.
In the second embodiment, the
図4は、ウェッジ62Aの概略を示す断面図である。
本実施形態では、前述した第1実施形態と同様に、ウェッジ62Aは、第1板ガラス部621Aと、第2板ガラス部622Aと、第1支持部623Aと、第2支持部624Aと、を有する。そして、第1板ガラス部621Aには誘電体反射膜にて構成される第1反射膜625Aが配置され、第2板ガラス部622Aには誘電体反射膜にて構成される第2反射膜626Aが配置されている。 FIG. 4 is a cross-sectional view schematically showing thewedge 62A.
In this embodiment, similarly to the first embodiment described above, thewedge 62A includes a first glass plate portion 621A, a second glass plate portion 622A, a first support portion 623A, and a second support portion 624A. A first reflective film 625A made of a dielectric reflective film is arranged on the first glass plate part 621A, and a second reflective film 626A made of a dielectric reflective film is arranged on the second glass plate part 622A. has been done.
本実施形態では、前述した第1実施形態と同様に、ウェッジ62Aは、第1板ガラス部621Aと、第2板ガラス部622Aと、第1支持部623Aと、第2支持部624Aと、を有する。そして、第1板ガラス部621Aには誘電体反射膜にて構成される第1反射膜625Aが配置され、第2板ガラス部622Aには誘電体反射膜にて構成される第2反射膜626Aが配置されている。 FIG. 4 is a cross-sectional view schematically showing the
In this embodiment, similarly to the first embodiment described above, the
そして、本実施形態では、ウェッジ62Aは、第1板ガラス部621Aにて反射された第1反射光R1と、第2板ガラス部622Aにて反射された第2反射光R2とによる干渉光を出力可能に構成されている。
In this embodiment, the wedge 62A is capable of outputting interference light formed by the first reflected light R1 reflected by the first glass plate portion 621A and the second reflected light R2 reflected by the second glass plate portion 622A. It is composed of
また、本実施形態では、光検出部63Aは、第2板ガラス部622Aと対向する位置に配置され、アレイ状に複数配置された光検出素子を備えた所謂ラインセンサとして構成される。
この場合、光検出部63Aは、入射光の光路を妨げることなく、かつ、反射光を受光することができる適当な位置であることが望ましい。また、光検出部63Aは、第2板ガラス部622Aと平行になるように配置されていてもよく、あるいは、第2板ガラス部622Aに対して所定の角度に傾けられて配置されていてもよい。
これにより、本実施形態では、光検出部63Aは、第1板ガラス部621Aにて反射された第1反射光R1と、第2板ガラス部622Aにて反射された第2反射光R2とによる干渉光を入射可能に構成されている。さらに、光検出部63Aは、当該干渉光に応じた第1信号を出力可能に構成されている。 Further, in this embodiment, thephotodetecting section 63A is arranged at a position facing the second plate glass section 622A, and is configured as a so-called line sensor including a plurality of photodetecting elements arranged in an array.
In this case, it is desirable that thephotodetector 63A be at an appropriate position where it can receive the reflected light without interfering with the optical path of the incident light. Further, the photodetecting section 63A may be arranged parallel to the second glass plate section 622A, or may be arranged at a predetermined angle with respect to the second glass plate section 622A.
Accordingly, in the present embodiment, thephotodetector 63A detects interference light caused by the first reflected light R1 reflected by the first plate glass part 621A and the second reflected light R2 reflected by the second plate glass part 622A. is configured so that it can be input. Furthermore, the photodetector 63A is configured to be able to output a first signal according to the interference light.
この場合、光検出部63Aは、入射光の光路を妨げることなく、かつ、反射光を受光することができる適当な位置であることが望ましい。また、光検出部63Aは、第2板ガラス部622Aと平行になるように配置されていてもよく、あるいは、第2板ガラス部622Aに対して所定の角度に傾けられて配置されていてもよい。
これにより、本実施形態では、光検出部63Aは、第1板ガラス部621Aにて反射された第1反射光R1と、第2板ガラス部622Aにて反射された第2反射光R2とによる干渉光を入射可能に構成されている。さらに、光検出部63Aは、当該干渉光に応じた第1信号を出力可能に構成されている。 Further, in this embodiment, the
In this case, it is desirable that the
Accordingly, in the present embodiment, the
このように、本実施形態では、光検出部63Aは、第2板ガラス部622Aと対向する位置に配置されるので、前述した第1実施形態の光検出部63のように、第1板ガラス部621に接着して配置させる必要がない。そのため、本実施形態では、光検出部63Aの配置の自由度を高くすることができる上、接着剤を不要とすることができる。
また、光検出部63Aが第2板ガラス部622Aと対向するよう配置されている場合は、干渉光を透過で測定する場合と比較して、理論上信号の光量の割合が多いため、S/N比を大きくすることができる。 In this way, in the present embodiment, thelight detection section 63A is arranged at a position facing the second plate glass section 622A. There is no need to glue and place it. Therefore, in this embodiment, the degree of freedom in arranging the photodetector 63A can be increased, and an adhesive can be made unnecessary.
In addition, when thephotodetector section 63A is arranged to face the second glass plate section 622A, the ratio of the light amount of the signal is theoretically higher than when measuring interference light by transmission, so the S/N The ratio can be increased.
また、光検出部63Aが第2板ガラス部622Aと対向するよう配置されている場合は、干渉光を透過で測定する場合と比較して、理論上信号の光量の割合が多いため、S/N比を大きくすることができる。 In this way, in the present embodiment, the
In addition, when the
[第2実施形態の効果]
以上のような本実施形態では、次の効果を奏することができる。
(4)本実施形態では、光検出部63Aは、第1板ガラス部621Aにて反射された第1反射光R1と、第2板ガラス部622Aにて反射された第2反射光R2とによる干渉光を入射するように構成されているので、光検出部63Aと第1板ガラス部621Aとを接着させる必要がなく、光検出部63Aの配置の自由度を高くすることができる。
また、光検出部63Aが第2板ガラス部622Aと対向するよう配置されている場合は、干渉光を透過で測定する場合と比較して、理論上信号の光量の割合が多いため、S/N比を大きくすることができる。 [Effects of second embodiment]
In this embodiment as described above, the following effects can be achieved.
(4) In the present embodiment, thephotodetector 63A detects interference light caused by the first reflected light R1 reflected by the first plate glass part 621A and the second reflected light R2 reflected by the second plate glass part 622A. Since the light detecting section 63A and the first plate glass section 621A are configured to be incident, there is no need to adhere the photo detecting section 63A and the first plate glass section 621A, and the degree of freedom in the arrangement of the photo detecting section 63A can be increased.
In addition, when thephotodetector section 63A is arranged to face the second glass plate section 622A, the ratio of the light amount of the signal is theoretically higher than when measuring interference light by transmission, so the S/N The ratio can be increased.
以上のような本実施形態では、次の効果を奏することができる。
(4)本実施形態では、光検出部63Aは、第1板ガラス部621Aにて反射された第1反射光R1と、第2板ガラス部622Aにて反射された第2反射光R2とによる干渉光を入射するように構成されているので、光検出部63Aと第1板ガラス部621Aとを接着させる必要がなく、光検出部63Aの配置の自由度を高くすることができる。
また、光検出部63Aが第2板ガラス部622Aと対向するよう配置されている場合は、干渉光を透過で測定する場合と比較して、理論上信号の光量の割合が多いため、S/N比を大きくすることができる。 [Effects of second embodiment]
In this embodiment as described above, the following effects can be achieved.
(4) In the present embodiment, the
In addition, when the
[変形例]
なお、本発明は前述の各実施形態に限定されるものではなく、本発明の目的を達成できる範囲での変形、改良等は本発明に含まれるものである。
前記実施形態では、光カプラ30を用いて光路の合分波を行っていたが、これに限定されない。例えば、ビームスプリッタを用いて光路の合分波を行ってもよい。 [Modified example]
It should be noted that the present invention is not limited to the above-described embodiments, and the present invention includes modifications, improvements, etc. within a range that can achieve the object of the present invention.
In the embodiment, theoptical coupler 30 is used to combine and demultiplex optical paths, but the invention is not limited to this. For example, a beam splitter may be used to combine and demultiplex optical paths.
なお、本発明は前述の各実施形態に限定されるものではなく、本発明の目的を達成できる範囲での変形、改良等は本発明に含まれるものである。
前記実施形態では、光カプラ30を用いて光路の合分波を行っていたが、これに限定されない。例えば、ビームスプリッタを用いて光路の合分波を行ってもよい。 [Modified example]
It should be noted that the present invention is not limited to the above-described embodiments, and the present invention includes modifications, improvements, etc. within a range that can achieve the object of the present invention.
In the embodiment, the
前記各実施形態では、物理量測定装置1には光源10が1個設けられていたが、これに限定されない。例えば、物理量測定装置には、測定光用の光源に加えて、参照光用の光源を設けられていてもよい。
In each of the embodiments described above, the physical quantity measuring device 1 was provided with one light source 10, but the present invention is not limited to this. For example, the physical quantity measuring device may be provided with a light source for reference light in addition to a light source for measurement light.
前記各実施形態では、光学センサ40は、互いに近接配置された一対の反射素子からファブリペローエタロンを構成する測定用センサ素子41を有して構成されていたが、これに限定されない。例えば、光学センサは、フィゾー干渉型の測定用センサ素子を有して構成されていてもよい。
In each of the embodiments described above, the optical sensor 40 is configured to include the measurement sensor element 41 that constitutes a Fabry-Perot etalon from a pair of reflective elements arranged close to each other, but the optical sensor 40 is not limited to this. For example, the optical sensor may include a Fizeau interference type measurement sensor element.
前記各実施形態では、物理量測定装置1には、光学センサ40が1個設けられていたが、これに限定されない。例えば、物理量測定装置には、波長ピークの中心がそれぞれ異なる複数の光学センサが設けられていてもよい。
この場合、複数の光学センサは、被測定物における同じ箇所に設けられていてもよい。このように構成することで、被測定物の同じ箇所において、例えば、圧力および温度といった異なる物理量の変化を正確に測定することができる。
また、複数の光学センサは、被測定物における異なる箇所にそれぞれ設けられていてもよい。このように構成することで、被測定物の異なる位置での物理量の変化を正確に測定することができる。 In each of the embodiments described above, the physicalquantity measuring device 1 is provided with one optical sensor 40, but the present invention is not limited to this. For example, the physical quantity measuring device may be provided with a plurality of optical sensors each having a different wavelength peak center.
In this case, the plurality of optical sensors may be provided at the same location on the object to be measured. With this configuration, it is possible to accurately measure changes in different physical quantities, such as pressure and temperature, at the same location on the object to be measured.
Furthermore, the plurality of optical sensors may be provided at different locations on the object to be measured. With this configuration, changes in physical quantities at different positions of the object to be measured can be accurately measured.
この場合、複数の光学センサは、被測定物における同じ箇所に設けられていてもよい。このように構成することで、被測定物の同じ箇所において、例えば、圧力および温度といった異なる物理量の変化を正確に測定することができる。
また、複数の光学センサは、被測定物における異なる箇所にそれぞれ設けられていてもよい。このように構成することで、被測定物の異なる位置での物理量の変化を正確に測定することができる。 In each of the embodiments described above, the physical
In this case, the plurality of optical sensors may be provided at the same location on the object to be measured. With this configuration, it is possible to accurately measure changes in different physical quantities, such as pressure and temperature, at the same location on the object to be measured.
Furthermore, the plurality of optical sensors may be provided at different locations on the object to be measured. With this configuration, changes in physical quantities at different positions of the object to be measured can be accurately measured.
前記各実施形態では、ウェッジ62,62Aは、第1支持部623,623Aおよび第2支持部624,624Aを備えて構成されていたが、これに限定されない。例えば、第1板ガラス部および第2板ガラス部の一方の端部側に配置される支持部のみを備えて構成されていてもよい。この場合、断面図で、第1板ガラス部、第2板ガラス部、および、支持部は、直角三角形を構成していてもよい。
In each of the embodiments described above, the wedges 62 and 62A were configured to include the first support portions 623 and 623A and the second support portions 624 and 624A, but the wedges are not limited thereto. For example, it may be configured to include only a support portion disposed on one end side of the first glass plate portion and the second glass plate portion. In this case, in the cross-sectional view, the first glass plate part, the second glass plate part, and the support part may form a right triangle.
前記各実施形態では、第1反射膜625,625Aおよび第2反射膜626,626Aは誘電体反射膜にて構成されていたが、これに限定されない。第1反射膜および第2反射膜は、金属膜等によって構成されていてもよく、測定光および第1光の干渉振幅を大きくさせるように構成されていればよい。
In each of the embodiments described above, the first reflective films 625, 625A and the second reflective films 626, 626A are composed of dielectric reflective films, but are not limited thereto. The first reflective film and the second reflective film may be formed of a metal film or the like, and may be configured to increase the interference amplitude between the measurement light and the first light.
前記各実施形態では、第1支持部623,623Aおよび第2支持部624,624Aは、低融点ガラスを用いて形成されていたが、これに限定されない。例えば、線膨張係数の小さい樹脂接着剤やセラミック等を用いて形成されていてもよい。
In each of the embodiments described above, the first support portions 623, 623A and the second support portions 624, 624A are formed using low melting point glass, but are not limited to this. For example, it may be formed using a resin adhesive or ceramic having a small coefficient of linear expansion.
前記第1実施形態では、第1板ガラス部621と光検出部63とが接着部材627により直接接着されていたが、これに限定されない。光検出部は第1板ガラス部と対向するように配置されていてもよく、部材を介さず直接当接されていてもよい。
In the first embodiment, the first glass plate portion 621 and the light detection portion 63 are directly bonded to each other by the adhesive member 627, but the present invention is not limited thereto. The light detection section may be arranged to face the first plate glass section, or may be in direct contact with the first plate glass section without using any member.
前記第2実施形態では、光検出部63Aは、第2板ガラス部622Aと対向する位置に配置されていたが、これに限定されない。光検出部63Aは、第2板ガラス部622Aに当接するように配置されていてもよい。
In the second embodiment, the photodetecting section 63A was arranged at a position facing the second plate glass section 622A, but the present invention is not limited thereto. The photodetecting section 63A may be arranged so as to be in contact with the second plate glass section 622A.
1…物理量測定装置、10…光源、20…光ケーブル、21…第1ケーブル、22…第2ケーブル、23…第3ケーブル、30…光カプラ、40…光学センサ、41…測定用センサ素子、50…受光器、60…干渉計、61…フレネルシリンドリカルレンズ、62,62A…ウェッジ、63,63A…光検出部、64…ケース、65…フェルール、70…MPU、621,621A…第1板ガラス部、622,622A…第2板ガラス部、623,623A…第1支持部、624,624A…第2支持部、625,625A…第1反射膜、626,626A…第2反射膜、627…接着部材。
DESCRIPTION OF SYMBOLS 1... Physical quantity measuring device, 10... Light source, 20... Optical cable, 21... First cable, 22... Second cable, 23... Third cable, 30... Optical coupler, 40... Optical sensor, 41... Sensor element for measurement, 50 ... Light receiver, 60... Interferometer, 61... Fresnel cylindrical lens, 62, 62A... Wedge, 63, 63A... Photodetector, 64... Case, 65... Ferrule, 70... MPU, 621, 621A... First plate glass section, 622, 622A... Second plate glass part, 623, 623A... First support part, 624, 624A... Second support part, 625, 625A... First reflective film, 626, 626A... Second reflective film, 627... Adhesive member.
Claims (6)
- ガラス板にて構成された第1板ガラス部と、前記第1板ガラス部に対して傾けられて配置されガラス板にて形成された第2板ガラス部と、を有するウェッジを備え、
前記第1板ガラス部と前記第2板ガラス部との間には、線膨張係数が小さい部材を用いて形成され、かつ、前記第1板ガラス部に対する前記第2板ガラス部の傾きを規定する支持部が配置される
ことを特徴とする干渉計。 A wedge having a first glass plate part made of a glass plate, and a second glass plate part arranged tilted with respect to the first glass plate part and formed of a glass plate,
A support part is formed between the first glass plate part and the second glass plate part and is formed using a member having a small coefficient of linear expansion and defines the inclination of the second glass plate part with respect to the first glass plate part. An interferometer characterized by being arranged. - 請求項1に記載の干渉計において、
前記支持部は、低融点ガラスを用いて形成される
ことを特徴とする干渉計。 The interferometer according to claim 1,
The interferometer is characterized in that the support portion is formed using low melting point glass. - 請求項1または請求項2に記載の干渉計において、
前記第1板ガラス部における前記第2板ガラス部に対向する面には、誘電体反射膜にて構成される第1反射膜が配置され、
前記第2板ガラス部における前記第1板ガラス部に対向する面には、誘電体反射膜にて構成される第2反射膜が配置される
ことを特徴とする干渉計。 The interferometer according to claim 1 or 2,
A first reflective film made of a dielectric reflective film is disposed on a surface of the first glass plate portion facing the second glass plate portion,
An interferometer characterized in that a second reflective film made of a dielectric reflective film is disposed on a surface of the second glass plate facing the first glass plate. - 請求項1または請求項2に記載の干渉計と、
光源と、
前記光源から放出される光が入射する第1光路と、
前記第1光路から出力された光を入射して、被測定物の物理量に応じた光を出力する光学センサと、
前記光学センサから出力された光を入射して、前記干渉計に出力する第2光路と、
前記干渉計から出力される干渉光から干渉信号を検出する光検出部と、を備える
ことを特徴とする物理量測定装置。 An interferometer according to claim 1 or claim 2,
a light source and
a first optical path through which light emitted from the light source enters;
an optical sensor that receives the light output from the first optical path and outputs light according to a physical quantity of the object to be measured;
a second optical path that receives the light output from the optical sensor and outputs it to the interferometer;
A physical quantity measuring device comprising: a photodetector that detects an interference signal from interference light output from the interferometer. - 請求項4に記載の物理量測定装置において、
前記第1板ガラス部と前記光検出部とは、接着部材により接着されている
ことを特徴とする物理量測定装置。 The physical quantity measuring device according to claim 4,
The physical quantity measuring device, wherein the first glass plate portion and the light detection portion are bonded together with an adhesive member. - 請求項4に記載の物理量測定装置において、
前記光検出部は、前記第1板ガラス部にて反射された第1反射光と、前記第2板ガラス部にて反射された第2反射光とによる干渉光を入射して干渉信号を検出するように構成されている
ことを特徴とする物理量測定装置。 The physical quantity measuring device according to claim 4,
The light detection section detects an interference signal by receiving interference light caused by a first reflected light reflected by the first plate glass part and a second reflected light reflected by the second plate glass part. A physical quantity measuring device comprising:
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0315727A (en) * | 1989-01-18 | 1991-01-24 | Photonetics Sa | Photoelectric measuring device |
JPH07239208A (en) * | 1993-12-04 | 1995-09-12 | Renishaw Plc | Device for measuring application of interference |
US7046374B1 (en) * | 2002-03-14 | 2006-05-16 | Avanex Corporation | Interferometers for optical communications utilizing photo-sensitive materials |
US20080187011A1 (en) * | 2007-02-05 | 2008-08-07 | Palo Alto Research Center Incorporated | Tuning optical cavities |
JP2022003682A (en) * | 2020-05-29 | 2022-01-11 | Agc株式会社 | Seal-and-bonding package and organic electroluminescent device |
WO2022191201A1 (en) * | 2021-03-10 | 2022-09-15 | 長野計器株式会社 | Physical quantity measurement device |
-
2023
- 2023-03-22 WO PCT/JP2023/011245 patent/WO2023182359A1/en unknown
- 2023-03-22 JP JP2024509166A patent/JPWO2023182359A1/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0315727A (en) * | 1989-01-18 | 1991-01-24 | Photonetics Sa | Photoelectric measuring device |
JPH07239208A (en) * | 1993-12-04 | 1995-09-12 | Renishaw Plc | Device for measuring application of interference |
US7046374B1 (en) * | 2002-03-14 | 2006-05-16 | Avanex Corporation | Interferometers for optical communications utilizing photo-sensitive materials |
US20080187011A1 (en) * | 2007-02-05 | 2008-08-07 | Palo Alto Research Center Incorporated | Tuning optical cavities |
JP2022003682A (en) * | 2020-05-29 | 2022-01-11 | Agc株式会社 | Seal-and-bonding package and organic electroluminescent device |
WO2022191201A1 (en) * | 2021-03-10 | 2022-09-15 | 長野計器株式会社 | Physical quantity measurement device |
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