WO2023139634A1 - Suction stage and method for holding workpiece - Google Patents

Suction stage and method for holding workpiece Download PDF

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Publication number
WO2023139634A1
WO2023139634A1 PCT/JP2022/001563 JP2022001563W WO2023139634A1 WO 2023139634 A1 WO2023139634 A1 WO 2023139634A1 JP 2022001563 W JP2022001563 W JP 2022001563W WO 2023139634 A1 WO2023139634 A1 WO 2023139634A1
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WO
WIPO (PCT)
Prior art keywords
suction
stage
holes
sealing
workpiece
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PCT/JP2022/001563
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French (fr)
Japanese (ja)
Inventor
哲弥 歌野
啓且 村松
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ヤマハロボティクスホールディングス株式会社
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Application filed by ヤマハロボティクスホールディングス株式会社 filed Critical ヤマハロボティクスホールディングス株式会社
Priority to PCT/JP2022/001563 priority Critical patent/WO2023139634A1/en
Priority to TW112101616A priority patent/TW202346018A/en
Publication of WO2023139634A1 publication Critical patent/WO2023139634A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders

Definitions

  • This specification discloses a suction stage that sucks and holds a work, and a work holding method that sucks and holds a work.
  • the suction stage is formed with a plurality of suction holes communicating with a suction source (for example, a suction pump or the like).
  • a suction source for example, a suction pump or the like.
  • one suction stage handles workpieces of various shapes. Therefore, depending on the shape of the work, it may not be possible to cover all the suction holes with the work. If a part of the suction system is not covered with the work and communicates with the atmosphere, the suction holding power of the work is greatly reduced.
  • Patent Document 1 a flat mask is separately prepared to cover the suction holes located outside the workpiece, and the mask covers the suction holes on the outside. According to this technique, it is possible to prevent a reduction in the work suction holding force. However, in the case of the technique of Patent Document 1, it is necessary to prepare a mask having a shape corresponding to the workpiece in advance, which is very troublesome.
  • Patent Literatures 2 to 4 disclose a suction stage in which a valve body, which is a ball or a plate material, and a valve opening that is opened and closed by the valve body are provided in the middle of a communication path that connects each suction hole and a suction source.
  • the valve body when the suction source is stopped or the suction hole is blocked by the work, the valve body opens the valve opening by gravity or elastic restoring force, and when the suction source is driven while the suction hole is not blocked by the work, the valve body seals the valve opening to prevent leakage.
  • Patent Documents 2 to 4 even if the workpiece has a complicated shape, it can be easily handled.
  • the pressure design for opening and closing the valve body was complicated.
  • the valve opening corresponding to the suction hole may be sealed before the work is sucked depending on the amount of leakage between the work and the suction hole.
  • there is a risk of erroneous sealing in which a suction hole that does not need to be sealed is erroneously sealed. When erroneous sealing occurs, the force for holding the workpiece by suction is reduced. Further, in Patent Documents 2 to 4, such a valve mechanism is provided inside the suction stage, so it is difficult for the operator to find such erroneous sealing.
  • this specification discloses a suction stage and a work holding method that can appropriately and easily hold works of various shapes by suction.
  • the suction stage disclosed in this specification is characterized by comprising a stage main body on which a work is placed, a plurality of suction holes extending downward from the surface of the stage main body and communicating with a suction source and having a circular cross-sectional shape, and one or more sealing balls that are inserted into one or more suction holes arbitrarily selected from the plurality of suction holes from above to seal the suction holes.
  • the upper end opening of the suction hole may be larger than the spherical diameter of the sealing ball, and a valve seat portion may be present in the middle of the suction hole that is smaller than the spherical diameter and contacts the introduced sealing ball.
  • valve seat portion may have a sealing member that is in close contact with the sealing ball.
  • the sealing sphere may have an elastic body at least on its surface.
  • the sealing sphere may contain a ferromagnetic material.
  • the suction hole may have a size that completely accommodates the sealing ball that is thrown into the suction hole.
  • an auxiliary plate that is placed on the stage main body before the sealing balls are inserted and is removed from the stage main body after the suction holes are inserted, the auxiliary plate having guide holes that are through holes communicating with the plurality of suction holes.
  • the guide hole may have a tapered shape that increases in diameter as it progresses upward.
  • a cover plate may be provided that is detachably fixed on the suction stage main body after the sealing balls have been thrown in, and the cover plate may be formed with communication holes that, when fixed to the stage main body, communicate with the plurality of suction holes and have a diameter smaller than that of the sealing balls.
  • the work holding method disclosed in this specification is a work holding method for sucking and holding a work by means of a stage body having a plurality of suction holes with a circular cross-sectional shape formed therein.
  • a suction source communicating with the plurality of suction holes is driven to hold the work by suction.
  • one or more through-holes may be formed in the work.
  • FIG. 2 is a schematic diagram showing the configuration of a suction stage 10;
  • FIG. 3 is a plan view of the suction stage 10;
  • FIG. It is a sectional view around a suction hole.
  • FIG. 4 is a cross-sectional view showing another example of a sealing ball;
  • FIG. 11 is a cross-sectional view showing another example of the periphery of the suction hole;
  • FIG. 4 is a cross-sectional view showing a state using a cover plate;
  • FIG. 4 is a cross-sectional view showing a state using an auxiliary plate;
  • FIG. 5 is a cross-sectional view showing how an auxiliary plate is prepared;
  • 1 is a cross-sectional view showing an example of a conventional technique;
  • FIG. 11 is a cross-sectional view showing an example of another conventional technique;
  • FIG. 1 is a schematic diagram showing the configuration of the suction stage 10.
  • FIG. 2 is a plan view of the suction stage 10.
  • FIG. 1 and 2 the workpiece 100 having a plurality of through holes 100a is placed on the upper surface of the stage main body 11. As shown in FIG.
  • This suction stage 10 suction-holds the placed work 100 .
  • a suction stage 10 is incorporated into various devices.
  • the suction stage 10 can be incorporated in an inspection device that inspects the quality of the work 100, a manufacturing device that performs a predetermined process on the work 100 to manufacture electronic components, a transport device that transports the work 100, and the like.
  • the suction stage 10 has a stage main body 11 and a plurality of sealing balls 30.
  • the stage main body 11 has a substantially flat plate-like first element 11a and a second element 11b having a recess formed on the upper surface thereof.
  • the first element 11a and the second element 11b are stacked on top of each other and fixed.
  • the concave portion formed in the second element 11b functions as a relay space 16 existing inside the stage main body 11 .
  • the intermediate space 16 communicates with a suction pump 20 as a suction source.
  • a plurality of suction holes 14 extending from the upper surface of the stage body 11 to the relay space 16 are formed in the stage body 11 .
  • Each suction hole 14 is a hole with a circular cross-sectional shape.
  • the suction hole 14 has a stepped shape such that its lower portion has a smaller diameter than its upper portion.
  • a tapered portion 40b whose diameter decreases downward is interposed between the large-diameter portion 40a, which is the upper portion of the suction hole 14, and the small-diameter portion 40c, which is the lower portion of the suction hole 14, a tapered portion 40b whose diameter decreases downward is interposed.
  • the tapered portion 40b functions as a valve seat portion 42 with which a sealing ball 30, which will be described later, is in close contact, which will be described later.
  • the number and arrangement of the suction holes 14 are not particularly limited, but in this example, as shown in FIG.
  • the suction pump 20 communicates with the intermediate space 16 via the pipe 18 .
  • the suction pump 20 sucks air by being driven.
  • an atmospheric pressure release valve 22 is provided in the pipe 18 that communicates the suction pump 20 and the intermediate space 16 .
  • the suction pump 20 By driving the suction pump 20 with the atmospheric pressure release valve 22 closed, the workpiece 100 placed on the stage main body 11 is held by suction.
  • the atmospheric pressure release valve 22 By stopping the driving of the suction pump 20 and then opening the atmospheric pressure release valve 22, the work 100 is released from being held by suction.
  • the atmospheric pressure release valve 22 may be eliminated and the suction pump 20 may be reversely driven to release the suction.
  • a sealing ball 30 is inserted into some of the plurality of suction holes 14 .
  • the sealing ball 30 is a sphere for sealing the suction hole 14 .
  • the diameter of the sealing ball 30 is smaller than the diameter of the large diameter portion 40a of the suction hole 14 and larger than the diameter of the small diameter portion 40c. Therefore, when the sealing ball 30 is thrown into the suction hole 14, the sealing ball 30 stays in close contact with the tapered portion 40b. Accordingly, it is possible to prevent air from leaking from the suction hole 14 into which the sealing ball 30 is inserted.
  • the sealing balls 30 prior to the start of suction of the work 100, the sealing balls 30 are introduced into some of the suction holes 14 selected based on the shape of the work 100 from among the plurality of suction holes 14. The reason for such configuration will be described.
  • the suction stage 10 must hold workpieces 100 of various shapes. Some of such workpieces 100 have complicated shapes, for example, a shape in which a plurality of through holes 100a are formed as shown in FIG. When such a work 100 is placed on the suction stage 10 , part of the suction holes 14 are naturally not covered with the work 100 .
  • suction hole 14 that is not covered with the workpiece 100 If the suction hole 14 that is not covered with the workpiece 100 is left open, air leaks and the suction force of the workpiece 100 is greatly reduced. Therefore, in order to suck and hold the work 100 appropriately, the suction holes 14 that are not covered with the work 100 must be closed in advance.
  • FIG. 9 it is conceivable to place a mask member 110 on a location not covered by the workpiece 100 and cover the suction hole 14 with the mask member 110 .
  • the mask member 110 having a shape corresponding to the shape of the workpiece 100 must be prepared every time the type of the workpiece 100 changes, which is very troublesome.
  • the workpiece 100 has a plurality of through holes 100a, it is necessary to arrange the mask member 110 also in the through holes 100a.
  • FIG. 9 it is conceivable to place a mask member 110 on a location not covered by the workpiece 100 and cover the suction hole 14 with the mask member 110 .
  • FIG. 10 is a diagram showing an example of such conventional technology.
  • a steel ball moving portion 122 through which the steel ball 120 moves is formed between the suction hole 14 and the suction pump 20 .
  • the steel ball moving part 122 is arranged so that the flow direction of the sucked air is opposite to the direction of gravity.
  • the upper portion 122a of the steel ball moving portion 122 is in close contact with the steel ball 120, and the lower portion 122b has a shape that creates a gap between the steel ball 120 and the steel ball 120. As shown in FIG.
  • the suction hole 14 is sealed with the steel ball 120 only when the suction hole 14 is not covered with the workpiece 100 .
  • the suction hole 14 covered with the work 100 may be closed by the steel ball 120 depending on the amount of leakage between the work 100 and the suction hole 14 . That is, erroneous sealing occurs in which the suction holes 14 that should not be sealed are erroneously sealed. In this case, since the work 100 cannot be sucked by the erroneously sealed suction hole 14, the holding force of the work 100 is reduced. Further, once erroneous sealing occurs, the erroneous sealing cannot be released unless the suction pump 20 is stopped and the vacuum is broken. Therefore, it takes time and effort to release the erroneous sealing.
  • a sealing ball 30 is put into an arbitrary suction hole 14 among the plurality of suction holes 14 in order to more easily and reliably suction-hold the workpiece 100 having a complicated shape.
  • the “arbitrary suction hole 14 ” into which the sealing ball 30 is thrown is the suction hole 14 that is not completely covered with the work 100 when the work 100 is placed on the stage main body 11 .
  • the suction hole 14 is reliably sealed when the suction pump 20 is driven.
  • the suction holes 14 that are completely covered with the work 100 do not have the sealing balls 30 , the work 100 can be reliably and strongly sucked and held by these suction holes 14 .
  • black circles indicate the suction holes 14 into which the sealing balls 30 are inserted, and white circles indicate the suction holes 14 into which the sealing balls 30 are not inserted.
  • the surface of the sealing ball 30 may be covered with an elastic film 34 as shown in FIG.
  • an elastic body may be provided on both the surface of the valve seat portion 42 and the surface of the sealing ball 30 .
  • the sealing ball 30 may contain a ferromagnetic material (such as steel). With such a configuration, the sealing ball 30 thrown into the suction hole 14 can be attracted by the magnet, so that the sealing ball 30 can be easily taken out from the suction hole 14 .
  • a ferromagnetic material such as steel
  • the suction hole 14 may have a size that can completely accommodate the introduced sealing ball 30 . That is, the height position of the valve seat portion 42 is set so that the top height of the sealing ball 30 thrown into the suction hole 14 is lower than the height of the upper surface of the stage main body 11 . By completely accommodating the sealing ball 30 in the suction hole 14 , it is possible to reliably prevent interference between the workpiece 100 placed on the stage body 11 and the sealing ball 30 thrown into the suction hole 14 .
  • the sealing ball 30 may have an appearance that makes it easy to visually recognize its presence even when it is thrown into the suction hole 14 . That is, it is difficult for light to reach the inside of the suction hole 14 and it is dark. Therefore, when the sealing ball 30 is dark, it is difficult to visually recognize the sealing ball 30 thrown into the suction hole 14 . Therefore, the sealing sphere 30 may be colored with a color with high brightness (for example, white). Alternatively, the sealing sphere 30 may be colored with fluorescent paint or phosphorescent paint. With such a configuration, the operator can easily visually recognize which suction hole 14 the sealing ball 30 has been inserted into. And thereby, sealing leakage and erroneous sealing can be effectively prevented.
  • a cover plate 50 may be fixed on the upper side of the stage main body 11 to prevent the sealing ball 30 from coming off.
  • the cover plate 50 is a plate having substantially the same planar shape as the stage main body 11 and is a plate that is detachably fixed on the stage main body 11 .
  • a communication hole 52 is formed in the cover plate 50 at a location facing the suction hole 14 in the vertical direction. The communication hole 52 is smaller than the diameter of the sealing ball 30 . Therefore, by fixing the cover plate 50 to the stage main body 11 , the separation of the sealing ball 30 from the suction hole 14 is prevented.
  • a seal member 54 may be provided between the cover plate 50 and the stage main body 11 to seal the gap therebetween.
  • FIG. FIG. 7 is a diagram showing an example of the auxiliary plate 60.
  • a guide hole 62 is formed at a portion of the auxiliary plate 60 that vertically faces the suction hole 14 .
  • the guide hole 62 has a tapered shape that increases in diameter as it progresses upward.
  • the diameter of the lower end of the guide hole 62 is smaller than the diameter of the upper end of the suction hole 14 , and the diameter of the upper end of the guide hole 62 is sufficiently larger than the sealing ball 30 . Therefore, the sealing ball 30 tends to enter the guide hole 62 relatively easily.
  • the sealing ball 30 that has entered the guide hole 62 is guided by the guide hole 62 and led to the suction hole 14 . That is, by using the auxiliary plate 60 , the sealing ball 30 can be easily thrown into the suction hole 14 .
  • the distance D2 from the apex of the sealing ball 30 thrown into the suction hole 14 to the upper surface of the auxiliary plate 60 may be less than the radius of the sealing ball 30.
  • the sealing ball 30 can be put into the necessary suction hole 14 using the auxiliary plate 60 , the auxiliary plate 60 is removed from the stage main body 11 and the workpiece 100 is placed on the stage main body 11 .
  • the guide hole 62 corresponding to the suction hole 14 that does not need to be sealed may be closed with an adhesive tape 64 in advance.
  • the adhesive tape 64 may be attached to the stage main body 11 instead of the auxiliary plate 60 . That is, it is conceivable to attach the adhesive tape 64 to the stage main body 11 so as to block the suction holes 14 that do not need to be sealed. However, when the adhesive tape 64 is attached directly to the stage main body 11, the adhesive component remains even after the adhesive tape 64 is removed, and there is a risk of contamination of the workpiece 100 placed thereon. On the other hand, the auxiliary plate 60 is only temporarily placed on the stage main body 11 before the workpiece 100 is sucked. In other words, the auxiliary plate 60 does not come into contact with the workpiece 100 .
  • the auxiliary plate 60 is a plate material that can be easily separated from the stage main body 11 . Therefore, the auxiliary plate 60 can be easily washed and the adhesive components can be easily removed. That is, by attaching the adhesive tape 64 to the auxiliary plate 60 instead of the stage main body 11, it is possible to prevent deterioration in quality of the workpiece 100 and also prevent erroneous sealing.
  • a reference member 70 indicating the shape of the workpiece 100 is prepared, and the reference member 70 and the auxiliary plate 60 are superimposed one on top of the other to check the suction holes 14 to be sealed.
  • the reference member 70 may be the workpiece 100 itself, or may be an actual size drawing, a captured image, or the like of the workpiece 100 .
  • the reference member 70 is a sheet material from which the outer shape of the workpiece 100 and the shape of the through-hole 100a can be grasped.
  • the suction hole 14 to be sealed with the sealing ball 30 and the guide hole 62 to be closed with the adhesive tape 64 can be easily grasped. Based on this observation result, the operator may apply the adhesive tape 64 to the guide hole 62 corresponding to the suction hole 14 to be opened.
  • the configuration described so far is only an example, and other configurations may be changed as appropriate as long as it includes at least the stage main body 11 in which a plurality of suction holes 14 are formed, and one or more sealing balls 30 that seal the suction holes 14 by being inserted into one or more arbitrarily selected suction holes 14 from above.
  • the number and arrangement of the suction holes 14 may be changed as appropriate.
  • a plurality of suction holes 14 may be arranged in a zigzag pattern.
  • suction stage 10 suction stage, 11 stage body, 14 suction hole, 16 relay space, 18 piping, 20 suction pump, 22 atmospheric pressure release valve, 30 sealing ball, 34 elastic film, 42 valve seat, 44 O-ring, 50 cover plate, 52 communication hole, 54 sealing body, 60 auxiliary plate, 62 guide hole, 64 adhesive tape, 70 reference member, 100 workpiece, 100 a through hole, 110 mask member, 120 steel ball, 122 steel ball moving part.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Jigs For Machine Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A suction stage (10) comprises: a stage body (11) on which a workpiece (100) is placed; a plurality of suction holes (14) extending downward from a surface of the stage body (11) and communicating with a suction pump (20), the plurality of suction holes (14) each having a circular lateral cross-sectional shape; and at least one sealing ball (30) thrown from above into at least one suction hole (14), arbitrarily selected from the plurality of suction holes (14), to seal the suction hole (14).

Description

吸引ステージおよびワーク保持方法Suction stage and workpiece holding method
　本明細書は、ワークを吸引保持する吸引ステージ、および、ワークを吸引保持するワーク保持方法を開示する。 This specification discloses a suction stage that sucks and holds a work, and a work holding method that sucks and holds a work.
　従来から、対象物を吸引保持する吸引ステージが広く知られている。かかる吸引ステージには、吸引源（例えば吸引ポンプ等）に連通された吸引孔が複数形成されている。そして、この複数の吸引孔を塞ぐようにワークを吸引ステージに載置したうえで、吸引源を駆動することでワークが吸引ステージに吸引保持される。 Conventionally, a suction stage that sucks and holds an object has been widely known. The suction stage is formed with a plurality of suction holes communicating with a suction source (for example, a suction pump or the like). A workpiece is placed on the suction stage so as to block the plurality of suction holes, and the suction source is driven to suck and hold the workpiece on the suction stage.
　ここで、通常、一つの吸引ステージで、様々な形状のワークを取り扱う。そのため、ワークの形状によっては、当該ワークで全ての吸引孔を覆えない場合がある。一部の吸引工がワークで覆われず、大気と連通していると、ワークの吸引保持力が大幅に低下する。 Here, usually one suction stage handles workpieces of various shapes. Therefore, depending on the shape of the work, it may not be possible to cover all the suction holes with the work. If a part of the suction system is not covered with the work and communicates with the atmosphere, the suction holding power of the work is greatly reduced.
　そこで、特許文献１では、ワークの外側に位置する吸引孔を覆う平板状のマスクを別途用意し、当該マスクで外側の吸引孔を覆っている。かかる技術によれば、ワークの吸引保持力の低下を防止できる。しかし、特許文献１の技術の場合、ワークに応じた形状のマスクを予め作成しておく必要があり、非常に手間であった。 Therefore, in Patent Document 1, a flat mask is separately prepared to cover the suction holes located outside the workpiece, and the mask covers the suction holes on the outside. According to this technique, it is possible to prevent a reduction in the work suction holding force. However, in the case of the technique of Patent Document 1, it is necessary to prepare a mask having a shape corresponding to the workpiece in advance, which is very troublesome.
特開平２０１０－２６０３１８号公報JP-A-2010-260318 特許第３２４８９３０号公報Japanese Patent No. 3248930 特許第４８９２０３５号公報Japanese Patent No. 4892035 特許第６８１７６５８号公報Japanese Patent No. 6817658
　そこで、一部では、ワークの形状に応じて、不要な吸引孔を自動的に塞ぐ機構が提案されている。例えば、特許文献２～４には、各吸引孔と吸引源とを連通する連通経路の途中に、球または板材である弁体と、当該弁体により開閉される弁開口と、を設けた吸引ステージが開示されている。特許文献２～４では、吸引源が停止している、または、吸引孔がワークで塞がれている場合には、重力、または、弾性復元力により、弁体は弁開口を開放しており、吸引孔がワークで塞がれていない状態で吸引源が駆動した場合には、弁体が弁開口を封止してリークを防止する。 Therefore, some have proposed a mechanism that automatically closes unnecessary suction holes according to the shape of the workpiece. For example, Patent Literatures 2 to 4 disclose a suction stage in which a valve body, which is a ball or a plate material, and a valve opening that is opened and closed by the valve body are provided in the middle of a communication path that connects each suction hole and a suction source. In Patent Documents 2 to 4, when the suction source is stopped or the suction hole is blocked by the work, the valve body opens the valve opening by gravity or elastic restoring force, and when the suction source is driven while the suction hole is not blocked by the work, the valve body seals the valve opening to prevent leakage.
　特許文献２～４の技術によれば、ワークが複雑な形状であっても、容易に対応できる。しかし、特許文献２～４の場合、弁体を開閉するための圧力設計が複雑であった。また、ワークで覆われた吸引孔であっても、当該ワークと吸引孔との間のリーク量によっては、ワークが吸引される前に当該吸引孔に対応する弁開口が封止される場合があった。すなわち、特許文献２～４では、本来、封止する必要のない吸引孔が誤って封止される誤封止が発生するおそれがあった。誤封止が発生した場合、ワークを吸引保持する力が低下する。また、特許文献２～４は、こうした弁機構が吸引ステージの内部に設けられているため、オペレータは、こうした誤封止を発見しにくい。 According to the techniques of Patent Documents 2 to 4, even if the workpiece has a complicated shape, it can be easily handled. However, in Patent Documents 2 to 4, the pressure design for opening and closing the valve body was complicated. Moreover, even if the suction hole is covered with a work, the valve opening corresponding to the suction hole may be sealed before the work is sucked depending on the amount of leakage between the work and the suction hole. In other words, in Patent Documents 2 to 4, there is a risk of erroneous sealing in which a suction hole that does not need to be sealed is erroneously sealed. When erroneous sealing occurs, the force for holding the workpiece by suction is reduced. Further, in Patent Documents 2 to 4, such a valve mechanism is provided inside the suction stage, so it is difficult for the operator to find such erroneous sealing.
　そこで、本明細書では、様々な形状のワークを適切かつ簡易に吸引保持できる吸引ステージ、および、ワーク保持方法を開示する。 Therefore, this specification discloses a suction stage and a work holding method that can appropriately and easily hold works of various shapes by suction.
　本明細書で開示する吸引ステージは、ワークが載置されるステージ本体と、前記ステージ本体の表面から下方に延び、吸引源に連通される複数の吸引孔であって、横断面形状が円形の複数の吸引孔と、前記複数の吸引孔の中から任意に選択された１以上の吸引孔に上側から投入されることで、当該吸引孔を封止する１以上の封止球と、を備えることを特徴とする。 The suction stage disclosed in this specification is characterized by comprising a stage main body on which a work is placed, a plurality of suction holes extending downward from the surface of the stage main body and communicating with a suction source and having a circular cross-sectional shape, and one or more sealing balls that are inserted into one or more suction holes arbitrarily selected from the plurality of suction holes from above to seal the suction holes.
　この場合、前記吸引孔の上端開口は、前記封止球の球径より大きく、前記吸引孔の途中には、前記球径より小さく、投入された前記封止球と接触する弁座部が存在してもよい。 In this case, the upper end opening of the suction hole may be larger than the spherical diameter of the sealing ball, and a valve seat portion may be present in the middle of the suction hole that is smaller than the spherical diameter and contacts the introduced sealing ball.
　この場合、前記弁座部は、前記封止球と密着するシール部材を有してもよい。 In this case, the valve seat portion may have a sealing member that is in close contact with the sealing ball.
　また、前記封止球は、少なくとも表面に、弾性体を有してもよい。 Also, the sealing sphere may have an elastic body at least on its surface.
　また、前記封止球は、強磁性体を含んでもよい。 Also, the sealing sphere may contain a ferromagnetic material.
　また、前記吸引孔は、当該吸引孔に投入された前記封止球を完全に収容するサイズであってもよい。 Also, the suction hole may have a size that completely accommodates the sealing ball that is thrown into the suction hole.
　さらに、前記封止球の投入前に、前記ステージ本体に載置され、前記吸引孔の投入後に、前記ステージ本体から取り外される補助プレートであって、複数の前記吸引孔と連通する貫通孔であるガイド孔が形成された補助プレートを備えてもよい。 Further, there may be provided an auxiliary plate that is placed on the stage main body before the sealing balls are inserted and is removed from the stage main body after the suction holes are inserted, the auxiliary plate having guide holes that are through holes communicating with the plurality of suction holes.
　この場合、前記ガイド孔は、上方に進むにつれて大径となるテーパ形状を含んでもよい。 In this case, the guide hole may have a tapered shape that increases in diameter as it progresses upward.
　また、さらに、前記封止球が投入された後の前記吸引ステージ本体の上に着脱自在に固定されるカバープレートを備え、前記カバープレートには、前記ステージ本体に固定された際に前記複数の吸引孔に連通するとともに前記封止球より小径の連通孔が形成されていてもよい。 Further, a cover plate may be provided that is detachably fixed on the suction stage main body after the sealing balls have been thrown in, and the cover plate may be formed with communication holes that, when fixed to the stage main body, communicate with the plurality of suction holes and have a diameter smaller than that of the sealing balls.
　本明細書で開示するワーク保持方法は、横断面形状が円形の複数の吸引孔が形成されたステージ本体でワークを吸引保持するワーク保持方法であって、前記複数の吸引孔のうち、前記ワークを前記ステージ本体に載置した際に当該ワークで覆われない１以上の吸引孔に、当該吸引孔を封止する１以上の封止球を投入したうえで、前記ワークを前記ステージ本体に載置し、前記複数の吸引孔に連通する吸引源を駆動して、前記ワークを吸引保持する、ことを特徴とする。 The work holding method disclosed in this specification is a work holding method for sucking and holding a work by means of a stage body having a plurality of suction holes with a circular cross-sectional shape formed therein. Among the plurality of suction holes, one or more sealing balls for sealing the suction holes are inserted into one or more of the plurality of suction holes that are not covered by the work when the work is placed on the stage body, the work is placed on the stage body, and a suction source communicating with the plurality of suction holes is driven to hold the work by suction. and
　この場合、前記ワークは、１以上の貫通孔が形成されていてもよい。 In this case, one or more through-holes may be formed in the work.
　本明細書で開示する技術によれば、任意の吸引孔に封止球を投入して、当該吸引孔を封止するため、様々な形状のワークを適切かつ簡易に吸引保持できる。 According to the technology disclosed in this specification, since a sealing ball is thrown into an arbitrary suction hole to seal the suction hole, works of various shapes can be appropriately and easily held by suction.
吸引ステージ１０の構成を示す模式図である。2 is a schematic diagram showing the configuration of a suction stage 10; FIG. 吸引ステージ１０の平面図である。3 is a plan view of the suction stage 10; FIG. 吸引孔周辺の断面図である。It is a sectional view around a suction hole. 封止球の他の一例を示す断面図である。FIG. 4 is a cross-sectional view showing another example of a sealing ball; 吸引孔周辺の他の一例を示す断面図である。FIG. 11 is a cross-sectional view showing another example of the periphery of the suction hole; カバープレートを用いた様子を示す断面図である。FIG. 4 is a cross-sectional view showing a state using a cover plate; 補助プレートを用いた様子を示す断面図である。FIG. 4 is a cross-sectional view showing a state using an auxiliary plate; 補助プレートの準備の様子を示す断面図である。FIG. 5 is a cross-sectional view showing how an auxiliary plate is prepared; 従来技術の一例を示す断面図である。1 is a cross-sectional view showing an example of a conventional technique; FIG. 他の従来技術の一例を示す断面図である。FIG. 11 is a cross-sectional view showing an example of another conventional technique;
　以下、図面を参照して吸引ステージ１０の構成を説明する。図１は、吸引ステージ１０の構成を示す模式図である。また、図２は、吸引ステージ１０の平面図である。なお、図１、図２では、複数の貫通孔１００ａが形成されたワーク１００をステージ本体１１の上面に載置している。 The configuration of the suction stage 10 will be described below with reference to the drawings. FIG. 1 is a schematic diagram showing the configuration of the suction stage 10. As shown in FIG. 2 is a plan view of the suction stage 10. FIG. 1 and 2, the workpiece 100 having a plurality of through holes 100a is placed on the upper surface of the stage main body 11. As shown in FIG.
　この吸引ステージ１０は、載置されたワーク１００を吸引保持する。かかる吸引ステージ１０は、様々な装置に組み込まれる。例えば、吸引ステージ１０は、ワーク１００の品質を検査する検査装置や、ワーク１００に対して所定の処理を施して電子部品を製造する製造装置、ワーク１００を搬送する搬送装置等に組み込むことができる。 This suction stage 10 suction-holds the placed work 100 . Such a suction stage 10 is incorporated into various devices. For example, the suction stage 10 can be incorporated in an inspection device that inspects the quality of the work 100, a manufacturing device that performs a predetermined process on the work 100 to manufacture electronic components, a transport device that transports the work 100, and the like.
　吸引ステージ１０は、ステージ本体１１と、複数の封止球３０と、を有する。ステージ本体１１は、略平板状の第一要素１１ａと、上面に凹部が形成された第二要素１１ｂと、を有する。第一要素１１ａおよび第二要素１１ｂは、上下に重ねられ、固定される。この場合、第二要素１１ｂに形成された凹部は、ステージ本体１１の内部に存在する中継空間１６として機能する。中継空間１６は、吸引源である吸引ポンプ２０に連通している。 The suction stage 10 has a stage main body 11 and a plurality of sealing balls 30. The stage main body 11 has a substantially flat plate-like first element 11a and a second element 11b having a recess formed on the upper surface thereof. The first element 11a and the second element 11b are stacked on top of each other and fixed. In this case, the concave portion formed in the second element 11b functions as a relay space 16 existing inside the stage main body 11 . The intermediate space 16 communicates with a suction pump 20 as a suction source.
　ステージ本体１１には、当該ステージ本体１１の上面から中継空間１６まで延びる吸引孔１４が複数形成されている。各吸引孔１４は、横断面形状が円形の孔である。吸引孔１４は、その下部が、その上部より、小径になるような段付き形状である。吸引孔１４の上部である大径部４０ａと、吸引孔１４の下部である小径部４０ｃと、の間には、下方に進むにつれて縮径するテーパ部４０ｂが介在している。このテーパ部４０ｂは、後述する封止球３０が密着する弁座部４２として機能するが、これについては、後述する。吸引孔１４の数および配置は、特に限定されてないが、本例では、図２に示すように、複数の吸引孔１４を、ステージ本体１１の全面に、等間隔で、マトリクス状に配置している。 A plurality of suction holes 14 extending from the upper surface of the stage body 11 to the relay space 16 are formed in the stage body 11 . Each suction hole 14 is a hole with a circular cross-sectional shape. The suction hole 14 has a stepped shape such that its lower portion has a smaller diameter than its upper portion. Between the large-diameter portion 40a, which is the upper portion of the suction hole 14, and the small-diameter portion 40c, which is the lower portion of the suction hole 14, a tapered portion 40b whose diameter decreases downward is interposed. The tapered portion 40b functions as a valve seat portion 42 with which a sealing ball 30, which will be described later, is in close contact, which will be described later. The number and arrangement of the suction holes 14 are not particularly limited, but in this example, as shown in FIG.
　吸引ポンプ２０は、配管１８を介して中継空間１６に連通している。吸引ポンプ２０は、駆動することで、エアを吸い込む。また、吸引ポンプ２０と中継空間１６とを連通する配管１８には、大気圧開放弁２２が設けられている。この大気圧開放弁２２を閉鎖した状態で吸引ポンプ２０を駆動することで、ステージ本体１１に載置されたワーク１００が吸引保持される。また、吸引ポンプ２０の駆動を停止したうえで、大気圧開放弁２２を開放することで、ワーク１００の吸引保持が解除される。なお、大気圧開放弁２２を無くし、吸引ポンプ２０を逆駆動することで、吸引解除する構成としてもよい。 The suction pump 20 communicates with the intermediate space 16 via the pipe 18 . The suction pump 20 sucks air by being driven. Further, an atmospheric pressure release valve 22 is provided in the pipe 18 that communicates the suction pump 20 and the intermediate space 16 . By driving the suction pump 20 with the atmospheric pressure release valve 22 closed, the workpiece 100 placed on the stage main body 11 is held by suction. By stopping the driving of the suction pump 20 and then opening the atmospheric pressure release valve 22, the work 100 is released from being held by suction. Alternatively, the atmospheric pressure release valve 22 may be eliminated and the suction pump 20 may be reversely driven to release the suction.
　複数の吸引孔１４の一部には、封止球３０が投入されている。封止球３０は、吸引孔１４を封止するための球体である。封止球３０の直径は、吸引孔１４の大径部４０ａの直径より小さく、小径部４０ｃの直径より大きい。そのため、吸引孔１４に投入された場合、封止球３０は、テーパ部４０ｂに密着して留まる。そして、これにより、封止球３０が投入された吸引孔１４からのエアのリークを防止できる。本例では、ワーク１００の吸引開始に先立って、複数の吸引孔１４の中から、ワーク１００の形状に基づいて選択された一部の吸引孔１４に、この封止球３０を投入している。かかる構成とする理由について説明する。 A sealing ball 30 is inserted into some of the plurality of suction holes 14 . The sealing ball 30 is a sphere for sealing the suction hole 14 . The diameter of the sealing ball 30 is smaller than the diameter of the large diameter portion 40a of the suction hole 14 and larger than the diameter of the small diameter portion 40c. Therefore, when the sealing ball 30 is thrown into the suction hole 14, the sealing ball 30 stays in close contact with the tapered portion 40b. Accordingly, it is possible to prevent air from leaking from the suction hole 14 into which the sealing ball 30 is inserted. In this example, prior to the start of suction of the work 100, the sealing balls 30 are introduced into some of the suction holes 14 selected based on the shape of the work 100 from among the plurality of suction holes 14. The reason for such configuration will be described.
　通常、吸引ステージ１０は、様々な形状のワーク１００を保持しなければならない。そうしたワーク１００の中には、複雑な形状、例えば、図２に示すように、複数の貫通孔１００ａが形成されたような形状のものもある。かかるワーク１００を吸引ステージ１０に載置した場合、当然ながら、一部の吸引孔１４は、ワーク１００で覆われないことになる。 Normally, the suction stage 10 must hold workpieces 100 of various shapes. Some of such workpieces 100 have complicated shapes, for example, a shape in which a plurality of through holes 100a are formed as shown in FIG. When such a work 100 is placed on the suction stage 10 , part of the suction holes 14 are naturally not covered with the work 100 .
　ワーク１００で覆われない吸引孔１４を、開放した状態のままとすると、エアのリークが生じ、ワーク１００の吸引力が大幅に低下する。そのため、ワーク１００を適切に吸引保持するためには、ワーク１００で覆われない吸引孔１４を、予め閉鎖しておく必要がある。 If the suction hole 14 that is not covered with the workpiece 100 is left open, air leaks and the suction force of the workpiece 100 is greatly reduced. Therefore, in order to suck and hold the work 100 appropriately, the suction holes 14 that are not covered with the work 100 must be closed in advance.
　そこで、図９に示すように、ワーク１００で覆われない箇所に、マスク部材１１０を載置し、当該マスク部材１１０で、吸引孔１４を覆うことも考えられる。かかる構成とすれば、エアのリークをある程度、防止できる。しかし、この場合、ワーク１００の形状に応じた形状のマスク部材１１０を、ワーク１００の種類が変わるたびに、作成しなければならず、非常に手間であった。また、ワーク１００が、複数の貫通孔１００ａを有する場合、この貫通孔１００ａ内にもマスク部材１１０を配置する必要がある。しかし、貫通孔１００ａに対応する複数のマスク部材１１０を、ワーク１００と干渉させずに配置することは、非常に難しく、手間であった。 Therefore, as shown in FIG. 9, it is conceivable to place a mask member 110 on a location not covered by the workpiece 100 and cover the suction hole 14 with the mask member 110 . With such a configuration, air leakage can be prevented to some extent. However, in this case, the mask member 110 having a shape corresponding to the shape of the workpiece 100 must be prepared every time the type of the workpiece 100 changes, which is very troublesome. Moreover, when the workpiece 100 has a plurality of through holes 100a, it is necessary to arrange the mask member 110 also in the through holes 100a. However, it is very difficult and troublesome to arrange the plurality of mask members 110 corresponding to the through holes 100a without interfering with the workpiece 100. FIG.
　そこで、一部では、ステージ本体１１の内部に、ワーク１００の有無に応じて、自動的に開閉するバルブを設けることが提案されている。図１０は、こうした従来技術の一例を示す図である。図１０の従来技術では、吸引孔１４と吸引ポンプ２０との間に、鋼球１２０が移動する鋼球移動部１２２が形成されている。鋼球移動部１２２は、吸引されるエアの流れ方向が重力と逆方向になるように配置されている。また、鋼球移動部１２２の上部１２２ａは、鋼球１２０と密着し、下部１２２ｂは、鋼球１２０との間に隙間が生じる形状となっている。かかる従来技術において、吸引孔１４がワーク１００で覆われている場合には、鋼球１２０と鋼球移動部１２２との隙間を通じてワーク１００が吸引される。一方、吸引孔１４がワーク１００で覆われていない場合、鋼球１２０が、吸引力により上方に移動し、鋼球移動部１２２の上部１２２ａを封鎖する。これにより、エアのリークが防止される。 Therefore, some have proposed to provide a valve inside the stage body 11 that automatically opens and closes according to the presence or absence of the workpiece 100 . FIG. 10 is a diagram showing an example of such conventional technology. In the prior art of FIG. 10, a steel ball moving portion 122 through which the steel ball 120 moves is formed between the suction hole 14 and the suction pump 20 . The steel ball moving part 122 is arranged so that the flow direction of the sucked air is opposite to the direction of gravity. Further, the upper portion 122a of the steel ball moving portion 122 is in close contact with the steel ball 120, and the lower portion 122b has a shape that creates a gap between the steel ball 120 and the steel ball 120. As shown in FIG. In such conventional technology, when the suction hole 14 is covered with the work 100 , the work 100 is sucked through the gap between the steel ball 120 and the steel ball moving portion 122 . On the other hand, when the suction hole 14 is not covered with the workpiece 100 , the steel ball 120 moves upward due to the suction force and blocks the upper portion 122 a of the steel ball moving portion 122 . This prevents air leakage.
　図１０に示すような従来技術によれば、理論上、吸引孔１４がワーク１００で覆われていない場合にのみ、当該吸引孔１４が鋼球１２０で封止される。その結果、マスク部材１１０を用意しなくても、複雑な形状のワーク１００をある程度、適切に、吸引保持できる。しかし、実際には、ワーク１００と吸引孔１４とのリーク量によっては、ワーク１００で覆われている吸引孔１４が、鋼球１２０により閉鎖される場合がある。すなわち、本来、封止すべきでない吸引孔１４が、誤って封止される誤封止が生じる。この場合、誤封止された吸引孔１４でワーク１００を吸引できないため、ワーク１００の保持力が低下する。また、一度、誤封止が発生すると、吸引ポンプ２０の駆動を停止し、真空破壊しない限り、誤封止を解除できない。そのため、誤封止を解除するためには、手間と時間がかかっていた。 According to the prior art as shown in FIG. 10, theoretically, the suction hole 14 is sealed with the steel ball 120 only when the suction hole 14 is not covered with the workpiece 100 . As a result, even if the mask member 110 is not prepared, the work 100 having a complicated shape can be properly sucked and held to some extent. Actually, however, the suction hole 14 covered with the work 100 may be closed by the steel ball 120 depending on the amount of leakage between the work 100 and the suction hole 14 . That is, erroneous sealing occurs in which the suction holes 14 that should not be sealed are erroneously sealed. In this case, since the work 100 cannot be sucked by the erroneously sealed suction hole 14, the holding force of the work 100 is reduced. Further, once erroneous sealing occurs, the erroneous sealing cannot be released unless the suction pump 20 is stopped and the vacuum is broken. Therefore, it takes time and effort to release the erroneous sealing.
　そこで、本明細書では、複雑な形状のワーク１００を、より簡易かつ確実に吸引保持するために、複数の吸引孔１４のうち任意の吸引孔１４に、封止球３０を投入している。封止球３０が投入される「任意の吸引孔１４」とは、ステージ本体１１にワーク１００を載置した際、当該ワーク１００で完全に覆われない吸引孔１４のことである。かかる吸引孔１４に、予め、封止球３０を投入しておくことで、吸引ポンプ２０を駆動した際、当該吸引孔１４が確実に封止される。その一方で、ワーク１００で完全に覆われる吸引孔１４には、封止球３０が存在しないため、これらの吸引孔１４でワーク１００を確実かつ強力に吸引保持できる。なお、図２において、黒塗りの円は、封止球３０が投入された吸引孔１４を示しており、白抜きの円は、封止球３０が投入されていない吸引孔１４を示している。 Therefore, in this specification, a sealing ball 30 is put into an arbitrary suction hole 14 among the plurality of suction holes 14 in order to more easily and reliably suction-hold the workpiece 100 having a complicated shape. The “arbitrary suction hole 14 ” into which the sealing ball 30 is thrown is the suction hole 14 that is not completely covered with the work 100 when the work 100 is placed on the stage main body 11 . By inserting the sealing ball 30 into the suction hole 14 in advance, the suction hole 14 is reliably sealed when the suction pump 20 is driven. On the other hand, since the suction holes 14 that are completely covered with the work 100 do not have the sealing balls 30 , the work 100 can be reliably and strongly sucked and held by these suction holes 14 . In FIG. 2, black circles indicate the suction holes 14 into which the sealing balls 30 are inserted, and white circles indicate the suction holes 14 into which the sealing balls 30 are not inserted.
　なお、吸引孔１４の弁座部４２と封止球３０との間でリークが生じることを防止するために、図３に示すように、弁座部４２に弾性体、例えば、Ｏリング４４等を配置してもよい。また、別の形態として、図４に示すように、封止球３０の表面を弾性被膜３４で覆ってもよい。また、当然ながら、弁座部４２および封止球３０の表面の双方に弾性体を設けてもよい。 In order to prevent leakage between the valve seat portion 42 of the suction hole 14 and the sealing ball 30, as shown in FIG. As another form, the surface of the sealing ball 30 may be covered with an elastic film 34 as shown in FIG. Moreover, of course, an elastic body may be provided on both the surface of the valve seat portion 42 and the surface of the sealing ball 30 .
　また、封止球３０は、強磁性体（例えば鋼等）を含んでもよい。かかる構成とすることで、吸引孔１４に投入された封止球３０を、磁石で吸い寄せることができるため、吸引孔１４から封止球３０を容易に取り出せる。 Also, the sealing ball 30 may contain a ferromagnetic material (such as steel). With such a configuration, the sealing ball 30 thrown into the suction hole 14 can be attracted by the magnet, so that the sealing ball 30 can be easily taken out from the suction hole 14 .
　また、吸引孔１４は、投入された封止球３０を完全に収容できるサイズとしてもよい。すなわち、吸引孔１４に投入された封止球３０の頂点高さが、ステージ本体１１の上面高さより低くなるように、弁座部４２の高さ位置を設定する。封止球３０を吸引孔１４に完全に収容することで、ステージ本体１１に載置されるワーク１００と、吸引孔１４に投入された封止球３０との干渉を確実に防止できる。 Also, the suction hole 14 may have a size that can completely accommodate the introduced sealing ball 30 . That is, the height position of the valve seat portion 42 is set so that the top height of the sealing ball 30 thrown into the suction hole 14 is lower than the height of the upper surface of the stage main body 11 . By completely accommodating the sealing ball 30 in the suction hole 14 , it is possible to reliably prevent interference between the workpiece 100 placed on the stage body 11 and the sealing ball 30 thrown into the suction hole 14 .
　この場合、図３に示すように、封止球３０の頂点高さからステージ本体１１の上面高さまでの距離Ｄ１は、封止球３０の半径未満としてもよい。かかる構成とすることで、一つの吸引孔１４に２以上の封止球３０が入り込んだとしても、二つ目（上側）の封止球３０は、当該吸引孔１４から容易に転がり出ることができる。結果として、一つの吸引孔１４に、複数の封止球３０が入り込むことを容易に防止できる。なお、当然ながら、ワーク１００との干渉を防止できるのであれば、図５に示すように、封止球３０の一部が、吸引孔１４の上端から突出してもよい。 　In this case, as shown in FIG. With such a configuration, even if two or more sealing balls 30 enter one suction hole 14 , the second (upper) sealing ball 30 can easily roll out from the suction hole 14 . As a result, it is possible to easily prevent a plurality of sealing balls 30 from entering one suction hole 14 . Of course, as long as interference with the workpiece 100 can be prevented, a portion of the sealing ball 30 may protrude from the upper end of the suction hole 14 as shown in FIG.
　また、封止球３０は、吸引孔１４に投入された場合でも、その存在を視認しやすい外観としてもよい。すなわち、吸引孔１４の内部は、光が届きにくく、暗い。そのため、封止球３０が暗色の場合、吸引孔１４に投入された封止球３０を視認しにくい。そこで、封止球３０は、明度の高い色（例えば白色等）で着色されてもよい。また、別の形態として、封止球３０は、蛍光塗料または蓄光塗料で着色されてもよい。かかる構成とすることで、いずれの吸引孔１４に封止球３０が投入されたかを、作業者が、容易に、視認できる。そして、これにより、封止漏れや誤封止を効果的に防止できる。 Also, the sealing ball 30 may have an appearance that makes it easy to visually recognize its presence even when it is thrown into the suction hole 14 . That is, it is difficult for light to reach the inside of the suction hole 14 and it is dark. Therefore, when the sealing ball 30 is dark, it is difficult to visually recognize the sealing ball 30 thrown into the suction hole 14 . Therefore, the sealing sphere 30 may be colored with a color with high brightness (for example, white). Alternatively, the sealing sphere 30 may be colored with fluorescent paint or phosphorescent paint. With such a configuration, the operator can easily visually recognize which suction hole 14 the sealing ball 30 has been inserted into. And thereby, sealing leakage and erroneous sealing can be effectively prevented.
　また、別の形態として、図６に示すように、ステージ本体１１の上側に、封止球３０の離脱を防止するカバープレート５０を固定してもよい。この場合、ワーク１００は、カバープレート５０の上に載置され、保持される。カバープレート５０は、ステージ本体１１とほぼ同じ平面形状のプレートであり、ステージ本体１１の上に着脱自在に固定されるプレートである。カバープレート５０のうち、吸引孔１４と上下方向に対向する箇所には、連通孔５２が形成されている。連通孔５２は、封止球３０の直径より小さい。そのため、ステージ本体１１にカバープレート５０が固定されることで、封止球３０の吸引孔１４からの離脱が防止される。なお、カバープレート５０とステージ本体１１との間には、両者の隙間をシールするシール体５４を設けてもよい。 As another form, as shown in FIG. 6, a cover plate 50 may be fixed on the upper side of the stage main body 11 to prevent the sealing ball 30 from coming off. In this case, the workpiece 100 is placed on the cover plate 50 and held. The cover plate 50 is a plate having substantially the same planar shape as the stage main body 11 and is a plate that is detachably fixed on the stage main body 11 . A communication hole 52 is formed in the cover plate 50 at a location facing the suction hole 14 in the vertical direction. The communication hole 52 is smaller than the diameter of the sealing ball 30 . Therefore, by fixing the cover plate 50 to the stage main body 11 , the separation of the sealing ball 30 from the suction hole 14 is prevented. A seal member 54 may be provided between the cover plate 50 and the stage main body 11 to seal the gap therebetween.
　ところで、これまでの説明で明らかな通り、本例では、ワーク１００で完全に覆われない吸引孔１４に封止球３０を投入する必要がある。この封止球３０の投入作業を容易にするために、封止球３０の投入作業の期間中だけ、ステージ本体１１の上面に補助プレート６０を載置してもよい。図７は、補助プレート６０の一例を示す図である。補助プレート６０のうち、吸引孔１４と上下方向に対向する箇所にはガイド孔６２が形成されている。ガイド孔６２は、上方に進むにつれて拡径するテーパ形状を含む。このガイド孔６２の下端の直径は、吸引孔１４の上端の直径以下であり、ガイド孔６２の上端の直径は、封止球３０よりも十分に大きい。そのため、封止球３０は、比較的容易に、ガイド孔６２に入り込みやすい。そして、ガイド孔６２に入り込んだ封止球３０は、当該ガイド孔６２に案内されて、吸引孔１４に導かれる。つまり、補助プレート６０を用いることで、封止球３０を吸引孔１４に容易に投入できる。なお、吸引孔１４およびガイド孔６２に、２以上の封止球３０が入り込むことを防止するために、吸引孔１４に投入された封止球３０の頂点から、補助プレート６０の上面までの距離Ｄ２は、封止球３０の半径未満としてもよい。いずれにしても、補助プレート６０を利用して必要な吸引孔１４に封止球３０を投入できれば、補助プレート６０をステージ本体１１から取り外し、当該ステージ本体１１の上にワーク１００を載置する。 By the way, as is clear from the explanation so far, in this example, it is necessary to throw the sealing ball 30 into the suction hole 14 that is not completely covered with the workpiece 100 . In order to facilitate the operation of inserting the sealing balls 30, the auxiliary plate 60 may be placed on the upper surface of the stage main body 11 only during the operation of inserting the sealing balls 30. FIG. FIG. 7 is a diagram showing an example of the auxiliary plate 60. As shown in FIG. A guide hole 62 is formed at a portion of the auxiliary plate 60 that vertically faces the suction hole 14 . The guide hole 62 has a tapered shape that increases in diameter as it progresses upward. The diameter of the lower end of the guide hole 62 is smaller than the diameter of the upper end of the suction hole 14 , and the diameter of the upper end of the guide hole 62 is sufficiently larger than the sealing ball 30 . Therefore, the sealing ball 30 tends to enter the guide hole 62 relatively easily. The sealing ball 30 that has entered the guide hole 62 is guided by the guide hole 62 and led to the suction hole 14 . That is, by using the auxiliary plate 60 , the sealing ball 30 can be easily thrown into the suction hole 14 . In order to prevent two or more sealing balls 30 from entering the suction hole 14 and the guide hole 62, the distance D2 from the apex of the sealing ball 30 thrown into the suction hole 14 to the upper surface of the auxiliary plate 60 may be less than the radius of the sealing ball 30. In any case, if the sealing ball 30 can be put into the necessary suction hole 14 using the auxiliary plate 60 , the auxiliary plate 60 is removed from the stage main body 11 and the workpiece 100 is placed on the stage main body 11 .
　ここで、封止が不要な吸引孔１４に誤って封止球３０が投入されることを防止するために、封止が不要な吸引孔１４に対応するガイド孔６２は、接着テープ６４で予め塞いでいてもよい。かかる構成とすることで、本来、開放すべき吸引孔１４を誤って封止する誤封止を確実に防止できる。 Here, in order to prevent the sealing ball 30 from being accidentally thrown into the suction hole 14 that does not need to be sealed, the guide hole 62 corresponding to the suction hole 14 that does not need to be sealed may be closed with an adhesive tape 64 in advance. With such a configuration, it is possible to reliably prevent erroneous sealing in which the suction hole 14 that should be opened is erroneously sealed.
　なお、誤封止を防止するためだけであれば、補助プレート６０ではなく、ステージ本体１１に、接着テープ６４を貼付することも考えられる。すなわち、封止が不要な吸引孔１４を塞ぐように、ステージ本体１１に接着テープ６４を貼付することも考えられる。しかし、ステージ本体１１に直接、接着テープ６４を貼付した場合、当該接着テープ６４を剥がした後も、接着成分が残存し、その上に載置されるワーク１００の汚染等を招く恐れがある。一方、補助プレート６０は、ワーク１００の吸引前、一時的に、ステージ本体１１に載置されるだけである。換言すれば、補助プレート６０はワーク１００と接触しない。そのため、補助プレート６０に接着成分が残存したとしても、ワーク１００の品質低下を招くことはない。また、補助プレート６０は、ステージ本体１１と容易に分離できる板材である。そのため、補助プレート６０は、容易に洗浄でき、接着成分を容易に除去できる。つまり、ステージ本体１１ではなく、補助プレート６０に接着テープ６４を貼付することで、ワーク１００の品質低下を防止しつつ、誤封止も防止できる。 If it is just to prevent erroneous sealing, the adhesive tape 64 may be attached to the stage main body 11 instead of the auxiliary plate 60 . That is, it is conceivable to attach the adhesive tape 64 to the stage main body 11 so as to block the suction holes 14 that do not need to be sealed. However, when the adhesive tape 64 is attached directly to the stage main body 11, the adhesive component remains even after the adhesive tape 64 is removed, and there is a risk of contamination of the workpiece 100 placed thereon. On the other hand, the auxiliary plate 60 is only temporarily placed on the stage main body 11 before the workpiece 100 is sucked. In other words, the auxiliary plate 60 does not come into contact with the workpiece 100 . Therefore, even if the adhesive component remains on the auxiliary plate 60, the quality of the workpiece 100 is not deteriorated. Further, the auxiliary plate 60 is a plate material that can be easily separated from the stage main body 11 . Therefore, the auxiliary plate 60 can be easily washed and the adhesive components can be easily removed. That is, by attaching the adhesive tape 64 to the auxiliary plate 60 instead of the stage main body 11, it is possible to prevent deterioration in quality of the workpiece 100 and also prevent erroneous sealing.
　また、吸引孔１４の数が多く、ワーク１００の形状が複雑な場合、いずれの吸引孔１４を封止すべきか、区別が難しい場合がある。この場合、図８に示すように、ワーク１００の形状を示すリファレンス部材７０を用意し、このリファレンス部材７０と、補助プレート６０とを上下に重ね合わせて、封止対象の吸引孔１４を確認するようにしてもよい。リファレンス部材７０は、ワーク１００そのものでもよいし、ワーク１００の実寸大の図面や撮像画像等でもよい。いずれにしても、リファレンス部材７０は、ワーク１００の外形および貫通孔１００ａの形状が把握できるシート材である。かかるリファレンス部材７０の上側に、補助プレート６０を配置したうえで、当該補助プレート６０を真上から観察すれば、封止球３０で封止すべき吸引孔１４、ひいては、接着テープ６４で塞ぐべきガイド孔６２を容易に把握できる。作業者は、この観察結果に基づいて、開放すべき吸引孔１４に対応するガイド孔６２に接着テープ６４を貼付してもよい。 Also, when there are many suction holes 14 and the workpiece 100 has a complicated shape, it may be difficult to distinguish which suction hole 14 should be sealed. In this case, as shown in FIG. 8, a reference member 70 indicating the shape of the workpiece 100 is prepared, and the reference member 70 and the auxiliary plate 60 are superimposed one on top of the other to check the suction holes 14 to be sealed. The reference member 70 may be the workpiece 100 itself, or may be an actual size drawing, a captured image, or the like of the workpiece 100 . In any case, the reference member 70 is a sheet material from which the outer shape of the workpiece 100 and the shape of the through-hole 100a can be grasped. By arranging the auxiliary plate 60 on the upper side of the reference member 70 and observing the auxiliary plate 60 from directly above, the suction hole 14 to be sealed with the sealing ball 30 and the guide hole 62 to be closed with the adhesive tape 64 can be easily grasped. Based on this observation result, the operator may apply the adhesive tape 64 to the guide hole 62 corresponding to the suction hole 14 to be opened.
　また、これまで説明した構成は、一例であり、少なくとも、複数の吸引孔１４が形成されたステージ本体１１と、任意に選択された１以上の吸引孔１４に上側から投入されることで、当該吸引孔１４を封止する１以上の封止球３０と、を備えるのであれば、その他の構成は、適宜、変更されてもよい。例えば、吸引孔１４の数や配置は、適宜、変更されてもよく、例えば、複数の吸引孔１４を千鳥状に配置してもよい。 In addition, the configuration described so far is only an example, and other configurations may be changed as appropriate as long as it includes at least the stage main body 11 in which a plurality of suction holes 14 are formed, and one or more sealing balls 30 that seal the suction holes 14 by being inserted into one or more arbitrarily selected suction holes 14 from above. For example, the number and arrangement of the suction holes 14 may be changed as appropriate. For example, a plurality of suction holes 14 may be arranged in a zigzag pattern.
　１０　吸引ステージ、１１　ステージ本体、１４　吸引孔、１６　中継空間、１８　配管、２０　吸引ポンプ、２２　大気圧開放弁、３０　封止球、３４　弾性被膜、４２　弁座部、４４　Ｏリング、５０　カバープレート、５２　連通孔、５４　シール体、６０　補助プレート、６２　ガイド孔、６４　接着テープ、７０　リファレンス部材、１００　ワーク、１００ａ　貫通孔、１１０　マスク部材、１２０　鋼球、１２２　鋼球移動部。 10 suction stage, 11 stage body, 14 suction hole, 16 relay space, 18 piping, 20 suction pump, 22 atmospheric pressure release valve, 30 sealing ball, 34 elastic film, 42 valve seat, 44 O-ring, 50 cover plate, 52 communication hole, 54 sealing body, 60 auxiliary plate, 62 guide hole, 64 adhesive tape, 70 reference member, 100 workpiece, 100 a through hole, 110 mask member, 120 steel ball, 122 steel ball moving part.

Claims (11)

  1. 　ワークが載置されるステージ本体と、
    　前記ステージ本体の表面から下方に延び、吸引源に連通される複数の吸引孔であって、横断面形状が円形の複数の吸引孔と、
    　前記複数の吸引孔の中から任意に選択された１以上の吸引孔に上側から投入されることで、当該吸引孔を封止する１以上の封止球と、
    　を備えることを特徴とする吸引ステージ。     a stage body on which the workpiece is placed;
    a plurality of suction holes extending downward from the surface of the stage body and communicating with a suction source, the plurality of suction holes having a circular cross-sectional shape;
    one or more sealing balls that are inserted into one or more suction holes arbitrarily selected from the plurality of suction holes to seal the suction holes;
    A suction stage comprising:
  2. 　請求項１に記載の吸引ステージであって、
    　前記吸引孔の上端開口は、前記封止球の球径より大きく、
    　前記吸引孔の途中には、前記球径より小さく、投入された前記封止球と接触する弁座部が存在する、
    　ことを特徴とする吸引ステージ。     The suction stage of claim 1, wherein
    The upper end opening of the suction hole is larger than the spherical diameter of the sealing ball,
    In the middle of the suction hole, there is a valve seat portion which is smaller than the ball diameter and contacts the introduced sealing ball.
    A suction stage characterized by:
  3. 　請求項２に記載の吸引ステージであって、
    　前記弁座部は、前記封止球と密着するシール部材を有する、ことを特徴とする吸引ステージ。     3. The suction stage according to claim 2,
    The suction stage, wherein the valve seat portion has a sealing member that is in close contact with the sealing ball.
  4. 　請求項１から３のいずれか１項に記載の吸引ステージであって、
    　前記封止球は、少なくとも表面に、弾性体を有する、ことを特徴とする吸引ステージ。     The suction stage according to any one of claims 1 to 3,
    A suction stage, wherein the sealing ball has an elastic body at least on its surface.
  5. 　請求項１から４のいずれか１項に記載の吸引ステージであって、
    　前記封止球は、強磁性体を含む、ことを特徴とする吸引ステージ。     A suction stage according to any one of claims 1 to 4,
    The attraction stage, wherein the sealing ball contains a ferromagnetic material.
  6. 　請求項１から５のいずれか１項に記載の吸引ステージであって、
    　前記吸引孔は、当該吸引孔に投入された前記封止球を完全に収容するサイズである、ことを特徴とする吸引ステージ。     A suction stage according to any one of claims 1 to 5,
    The suction stage, wherein the suction hole has a size that completely accommodates the sealing ball inserted into the suction hole.
  7. 　請求項１から６のいずれか１項に記載の吸引ステージであって、
    　さらに、前記封止球の投入前に、前記ステージ本体に載置され、前記吸引孔の投入後に、前記ステージ本体から取り外される補助プレートであって、複数の前記吸引孔と連通する貫通孔であるガイド孔が形成された補助プレートを備える、ことを特徴とする吸引ステージ。     A suction stage according to any one of claims 1 to 6,
    The suction stage further comprises an auxiliary plate which is mounted on the stage main body before the sealing balls are inserted and is removed from the stage main body after the suction holes are inserted, the auxiliary plate having guide holes, which are through holes communicating with the plurality of suction holes.
  8. 　請求項１から７のいずれか１項に記載の吸引ステージであって、
    　前記ガイド孔は、上方に進むにつれて大径となるテーパ形状を含む、ことを特徴とする吸引ステージ。     A suction stage according to any one of claims 1 to 7,
    The suction stage, wherein the guide hole includes a tapered shape that increases in diameter as it progresses upward.
  9. 　請求項１から８のいずれか１項に記載の吸引ステージであって、
    　さらに、前記封止球が投入された後の前記ステージ本体の上に着脱自在に固定されるカバープレートを備え、
    　前記カバープレートには、前記ステージ本体に固定された際に前記複数の吸引孔に連通するとともに前記封止球より小径の連通孔が形成されている、
    ことを特徴とする吸引ステージ。     A suction stage according to any one of claims 1 to 8,
    further comprising a cover plate detachably fixed on the stage main body after the sealing ball is introduced,
    The cover plate is formed with communication holes that communicate with the plurality of suction holes when fixed to the stage main body and have a smaller diameter than the sealing ball.
    A suction stage characterized by:
  10. 　横断面形状が円形の複数の吸引孔が形成されたステージ本体でワークを吸引保持するワーク保持方法であって、
    　前記複数の吸引孔のうち、前記ワークを前記ステージ本体に載置した際に当該ワークで覆われない１以上の吸引孔に、当該吸引孔を封止する１以上の封止球を投入したうえで、前記ワークを前記ステージ本体に載置し、前記複数の吸引孔に連通する吸引源を駆動して、前記ワークを吸引保持する、ワーク保持方法。     A workpiece holding method for sucking and holding a workpiece on a stage body having a plurality of suction holes having a circular cross-sectional shape, comprising:
    A workpiece holding method comprising: inserting one or more sealing balls for sealing the suction holes into one or more of the plurality of suction holes that are not covered by the work when the work is placed on the stage main body; placing the work on the stage body; and driving a suction source communicating with the plurality of suction holes to suck and hold the work.
  11. 　請求項１０に記載のワーク保持方法であって、
    　前記ワークは、１以上の貫通孔が形成されている、ことを特徴とするワーク保持方法。     The workpiece holding method according to claim 10,
    A workpiece holding method, wherein the workpiece is formed with one or more through holes.
PCT/JP2022/001563 2022-01-18 2022-01-18 Suction stage and method for holding workpiece WO2023139634A1 (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63109934A (en) * 1986-10-24 1988-05-14 Fuji Jikou Kk Vacuum chuck
JPH09277134A (en) * 1996-04-11 1997-10-28 Sony Corp Vacuum-attracting work fixing device and method
KR20130046751A (en) * 2011-10-28 2013-05-08 임권현 The structure of an adsorption for vacuum-chuck

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63109934A (en) * 1986-10-24 1988-05-14 Fuji Jikou Kk Vacuum chuck
JPH09277134A (en) * 1996-04-11 1997-10-28 Sony Corp Vacuum-attracting work fixing device and method
KR20130046751A (en) * 2011-10-28 2013-05-08 임권현 The structure of an adsorption for vacuum-chuck

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