WO2023127336A1 - Packaging body, packaging method for sealed storage container, and transportation method - Google Patents

Packaging body, packaging method for sealed storage container, and transportation method Download PDF

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Publication number
WO2023127336A1
WO2023127336A1 PCT/JP2022/042636 JP2022042636W WO2023127336A1 WO 2023127336 A1 WO2023127336 A1 WO 2023127336A1 JP 2022042636 W JP2022042636 W JP 2022042636W WO 2023127336 A1 WO2023127336 A1 WO 2023127336A1
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Prior art keywords
storage container
sealed storage
container
cushioning material
lid
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PCT/JP2022/042636
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French (fr)
Japanese (ja)
Inventor
聖二 佐藤
敦 佐藤
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信越半導体株式会社
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Publication of WO2023127336A1 publication Critical patent/WO2023127336A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/50—Reuse, recycling or recovery technologies
    • Y02W30/80—Packaging reuse or recycling, e.g. of multilayer packaging

Definitions

  • the present invention relates to a package used when further storing and packing a closed storage container for storing wafers such as semiconductor wafers, a packing method for the closed storage container, and a transportation method.
  • the wafers are stored in sealed storage containers such as FOSB (Front Opening Shipping Box) or FOUP (Front Opening Unified Pod), and these sealed storage containers are further used as container boxes. Store in outer packaging and transport.
  • FOSB Front Opening Shipping Box
  • FOUP Front Opening Unified Pod
  • the sealed storage container has a structure that is not affected by the outside air due to the structure that has a lid, a container body, and a resin packing between them.
  • These airtight storage containers are hermetically stored in a polyethylene bag or a moisture-proof bag laminated with an aluminum layer.
  • the sealed storage container is sandwiched between a structure made of molded resin sheets and cushioning material made of resin foam, and stored in a container box with an outer frame made of paper or resin cardboard ( Patent Documents 1 to 3).
  • the present invention has been made in view of such problems. It is an object of the present invention to provide a package that minimizes the impact, a method of packing a closed storage container, and a method of transporting the closed storage container.
  • the present invention provides a package for packing a sealed storage container comprising a container body and a lid in which wafers are stored, comprising: a container box having a housing in which the sealed storage container is stored and a cover of the housing; a cushioning material arranged in the container box and holding the sealed storage container, In the package, the cushioning material has a plurality of projection-like holding portions for holding the peripheral edge portion of the upper surface of the lid of the sealed storage container.
  • a first vibration absorbing material made of a foamed urethane sheet disposed between the cushioning material and the cover, and a structure between the cushioning material and the bottom of the housing. and a second vibration absorber consisting of a gel-like sheet disposed therebetween.
  • a method for packing a sealed storage container comprising a container main body and a lid body in which wafers are stored, comprising: a container box having a housing in which the sealed storage container is stored and a cover of the housing; Prepare a cushioning material that is arranged in the container box and holds the sealed storage container, Provided is a method for packing a closed storage container in which the peripheral edge of the upper surface of the lid of the closed storage container is held by a plurality of projecting holding portions of the cushioning material and packed in the container box.
  • a first vibration absorbing material made of a urethane foam sheet is arranged between the cushioning material and the cover in the container box,
  • a second vibration absorbing material made of a gel sheet is preferably arranged between the cushioning material and the bottom of the housing.
  • a method for transporting a sealed storage container comprising a container body and a lid body in which wafers are stored, comprising: There is provided a method for transporting a sealed storage container, wherein the sealed storage container is packed by the packing method described above, and the packed sealed storage container is transported.
  • the protrusion-shaped holding portion of the cushioning material is arranged at a position to hold the peripheral edge of the sealed storage container, so that the wafers are stored in the sealed storage container and further sealed in the container box.
  • FIG. 4 is a cross-sectional view of the vicinity of the side holding portion of the cushioning material of the package of the present invention
  • FIG. 3 is an explanatory diagram showing a positional relationship between a projecting holding portion and a side holding portion viewed from a viewpoint P in FIGS. 1 and 2; It is a figure which shows an example of an airtight storage container.
  • It is a flowchart which shows an example of the packing method of the package of an Example, and a transportation method.
  • It is a graph which shows wafer surface defect evaluation. 10 is a graph showing wafer edge defect evaluation; It is a longitudinal cross-sectional view of the conventional package.
  • a package and a sealed storage container that minimize the impact on the wafers of the impact on the container box when the wafers are stored in the sealed storage container and the sealed storage container is packed and transported in the container box.
  • the inventors of the present invention have found that the cushioning material in the container box has a plurality of projecting holding portions for holding the periphery of the upper surface of the lid of the sealed storage container.
  • the inventors have found that the impact on the wafer can be suppressed if the material is a body, and have completed the present invention.
  • Fig. 5 shows a general sealed storage container (FOSB or FOUP) to be packed with the packing material of the present invention.
  • the sealed storage container 5 consists of a container body 5a in which wafers are stored and a lid 5b.
  • FIG. 1 shows a package 10 according to the invention.
  • 1 is a vertical cross-sectional view of a package 10, in which a sealed storage container 5 to be packaged is also illustrated.
  • the package 10 shown in FIG. 1 is a package 10 for packing the sealed storage container 5, and is a container having a housing 3b in which the sealed storage container 5 is stored and a cover 3a of the housing 3b.
  • a box 2 and a cushioning material 1 arranged in the container box 2 and holding a sealed storage container 5 are provided.
  • the cushioning material 1 has a plurality of projecting holding portions 6a for holding the peripheral portion of the upper surface of the lid of the sealed storage container 5. As shown in FIG.
  • the container box 2 between the first vibration absorbing material 4b made of a foamed urethane sheet arranged between the cushioning material 1 and the cover 3a, and between the cushioning material 1 and the bottom of the housing 3b A second vibration absorbing material 4a made of a gel-like sheet is preferably provided.
  • the cushioning material 1 used in the package 10 of the present invention only needs to have the projecting holding portion at the location where the lid of the sealed storage container 5 is held.
  • the first cushioning material 1a having a plurality of projecting holding portions for the sealed storage container 5 in the upper stage, and the sealed storage container in the lower stage.
  • the second cushioning material 1b has a plurality of projecting holding portions for holding the opposite wall of the lid of the upper sealed storage container (the bottom wall of the container body, which is on the lower side when packed), and the lower sealed storage container.
  • the third cushioning material 1c that holds the opposing wall of the lid can be provided, and is sandwiched and held from above and below.
  • the effectiveness of the projection-shaped holding portion of the cushioning material 1 in the present invention will be described in detail while explaining the conventional package and its problems.
  • the inventors of the present invention have found that when wafers manufactured at a wafer manufacturer are transported to a shipping destination, damage such as cracks, chipping, groove deviation, and particles on the wafer surface are generated in the sealed storage container due to impact due to dropping or collision.
  • damage such as cracks, chipping, groove deviation, and particles on the wafer surface are generated in the sealed storage container due to impact due to dropping or collision.
  • a conventional package 110 is shown in FIG.
  • the conventional package 110 includes a closed storage container 15, a housing 13 in which the closed storage container 15 is stored, a container box having a cover 12 of the housing 13, a cushioning material 11, a cushioning material 11 and a cover 12. and a second vibration absorbing material 14a disposed between the cushioning material 11 and the bottom of the housing 13.
  • FIG. 9 when the holding portion of the cushioning material 11 is arranged on the entire surface of the lid of the closed storage container 15 or on the central side of the lid, the impact described above causes the lid to collapse. When the vicinity of the central portion is pressed, the resin lid deforms and bends.
  • the sealing structure is formed by the packing between the lid of the closed container 15 and the container body.
  • a holding member made of resin is provided inside the lid of the sealed storage container 15 so that the wafers to be stored do not move, and the wafers are held down by this holding member made of resin. It was found that the above-described shock deforms and bends the resin lid of the sealed storage container 15, and the resin presser presses the wafer, causing the resin to stick to the holding portion of the wafer edge.
  • FIG. 2 is an explanatory diagram of the cushioning material 1a (cushioning material 1b) viewed from below. With respect to the cushioning material, oblique lines are drawn only on the lowermost surface thereof, the protruding holding portion 6a for holding the peripheral portion of the lid of the closed storage container, and the side surface holding portion 6b for holding the side surface of the container body and the lid, which will be described later.
  • the part into which the lid of the sealed storage container is inserted is a recess (white in FIG. 2), and the black part at the center of the recess is a hollowed out space to reduce the material and weight of the cushioning material. be.
  • a line representing the position of the side surface of the container body during packing is also shown so that the positional relationship with the closed storage container can be easily understood.
  • the resin presser on the door portion of the closed storage container does not excessively press the wafers, and the sticking of the resin of the presser to the wafer edge portion is reduced.
  • the cushioning material on the door (upper side) of the sealed storage container, the position (outside) where the protrusion-shaped holding part holds the door (inner side), but the peripheral edge (container body side) of the closed storage container ), the impact is not transmitted to the vicinity of the center of the door of the closed storage container, so the door will not be pushed and returned, so the inside of the closed storage container generated by pushing the door Since air does not flow in and out due to pressure fluctuations, adhesion of particles to the wafers housed in the sealed storage container is reduced.
  • the projection-like holding portion of the cushioning material is positioned so as to hold the peripheral edge of the upper surface of the lid of the sealed storage container. It is characterized by placing Therefore, other configurations are not particularly limited, and conventionally known configurations can be used.
  • the number of projecting holding portions 6a is not particularly limited as long as it is plural, but in the example shown in FIG. is provided. It can be determined according to the size of the closed storage container, etc., and the upper limit number is not determined. Furthermore, the size and shape of the projecting holding portion 6a are not limited, and can be determined as appropriate. Further details including other components will be described below.
  • the cushioning material 1 used in the package of the present invention may have a plurality of side holding portions 6b (projections) for holding the side surfaces of the sealed storage container 5.
  • FIG. 3 is a cross-sectional view of the vicinity of the side holding portion of the cushioning material 1a.
  • the container body of the closed container is also shown for reference.
  • FIG. 4 shows the positional relationship between the projecting holding portion 6a and the side holding portion 6b.
  • FIG. 4 is an explanatory view seen from the viewpoint P in FIGS. 1 and 2.
  • a projecting holding portion 6a for holding the peripheral edge of the upper surface of the lid of the closed storage container 5, and a side surface for holding the peripheral edge of the side surface of the container body 5a and the lid 5b of the closed storage container 5.
  • a holding portion 6b is provided.
  • FIG. 1 corresponds to a vertical cross-sectional view of the projecting holding portion 6a1 in FIG. 2. Actually, as shown in FIG.
  • the housing and cover of a container box for transportation can be formed into a box shape from a plastic cardboard made by bonding a flat sheet (liner) and a corrugated sheet (medium) with a resin such as polypropylene.
  • the cover of the container box may have a structure in which a groove is formed and fitted into the housing.
  • the cover may be formed with a slightly larger size than the housing, and at the same time the hook-and-loop fastener is attached to the outer surface of the housing and the inside of the cover. You can place it.
  • the cover of the container box and the housing may be tied with a string or a resin belt.
  • the cushioning material is a sealed storage container and a member that mitigates the impact on the wafer.
  • a member molded from a foamed material made from a resin such as polyethylene or polystyrene can be used.
  • the first vibration absorber and the second vibration absorber are members that absorb vibrations to the closed container and to the wafers.
  • a member made of a foamed material made from a resin such as polyurethane, or a member made of a gel-like vibration absorbing material formed into a sheet can be used.
  • Gel-type vibration absorbing materials include rubber-based gels such as viscoelastic rubber and silicone rubber, silicone gels in which quartz particles, glass particles, alumina particles, etc. are mixed and dispersed in silicone oil, and cellulose in water, oil, or silicone oil. A cellulose gel or the like in which fibers are mixed and dispersed can be used.
  • the second vibration absorbing material is formed by forming a gel-like vibration absorbing material into a sheet, and it is possible to reduce the thickness due to its high vibration absorbing property. It is preferably placed between the bottom of the body and the cushioning material.
  • the first vibration absorbing material is made of polyurethane material, especially foamed urethane sheet, and is placed between the cover and the cushioning material due to the lightness of the material, reducing the work involved in storing and taking out the sealed storage container. The effect of is exhibited and is preferable. These vibration-absorbing materials absorb vibrations, thereby suppressing an abnormal increase in particles and sticking of resin to the wafer holding portion at the edge.
  • the thickness of the polyurethane or gel-like vibration absorbing material is preferably 5 mm or more.
  • the area of the vibration absorbing material that contacts the cushioning material and the container box is preferably half or more the area of the cushioning material, the bottom part of the housing, and the cover (upper surface), and more preferably the same area.
  • the height of the first vibration absorbing material sandwiched by the cushioning material may change with respect to the height of the housing, depending on the type of closed storage container used. Therefore, by appropriately combining vibration absorbing materials with different thicknesses and appropriately adjusting the thickness of the entire vibration absorbing material, it is possible to eliminate gaps and protrusions.
  • the type and number of sealed storage containers to be packed in the package according to the present invention, and the number of wafers stored in the sealed storage container are not particularly limited.
  • the wafer may be a silicon wafer with a diameter of 300 mm.
  • FIG. 1-4 a container box having a housing and a cover and cushioning materials 1a to 1c are prepared. At this time, it is preferable to prepare a first vibration absorbing material and a second vibration absorbing material.
  • a first vibration absorbing material is arranged between the cushioning material and the cover, and a second vibration absorbing material made of a gel-like sheet is arranged between the cushioning material and the bottom of the housing.
  • the sealed storage container is packed while the periphery of the upper surface of the lid of the container is held by a plurality of projecting holding portions 6a of the cushioning materials 1a and 1b.
  • the sealed storage container can be packed by the packing method described above, and the packed sealed storage container can be transported.
  • the means of transporting the closed storage container is not particularly limited, and for example, trucks and aircraft can be used.
  • the manufactured wafers were stored in a closed storage container, and the closed storage container was packed. Specifically, 300 silicon wafers with a diameter of 300 mm were prepared, 25 wafers were stored in one closed storage container (FOSB), and a total of 300 wafers were stored in a total of 12 closed storage containers. A second vibration absorbing material 4a and a third cushioning material 1c were arranged in the housing of the container box, and six closed storage containers were arranged thereon as a lower stage.
  • the second cushioning material 1b having a thickness of 25 mm or more, six sealed storage containers are arranged as the upper stage, and further the first cushioning material 1a and the first vibration absorbing material 4b are arranged.
  • a total of 12 closed storage containers were housed and packed as shown in FIG. 1 by covering the housing 3b with the cover 3a.
  • a cushioning material having a structure in which a plurality of projecting holding portions for supporting the lid of the closed storage container is arranged at the peripheral edge of the closed storage container was used. Specifically, as shown in FIG. 2, one having four projecting holding portions 6a was used.
  • the second vibration absorbing material 4a between the bottom of the housing of the container box and the cushioning material is a gel-like sheet member
  • the first vibration absorbing material between the cover and the cushioning material is urethane foam
  • the cushioning material is styrene foam.
  • the housing of the container box was made of polypropylene plastic cardboard.
  • the second vibration absorbing material between the bottom of the housing of the container box and the cushioning material was composed of a silicone rubber gel sheet with a thickness of 30 mm and an area equal to that of the bottom of the housing.
  • the first vibration absorbing material between the cover and the cushioning material was made of a foamed urethane sheet (polyurethane) with a thickness of 45 mm and the same area as the cover.
  • FIG. 7 shows the results of wafer surface defect evaluation. The results were compared by indexing the average value of the increased number of surface particles of 300 sheets of the example on the basis of the average value of the increased number of surface particles of 300 sheets of the comparative example.
  • FIG. 8 shows the results of wafer edge defect evaluation. The results were compared by indexing the average value of the defect increased area (difference) of 300 sheets of the example with the average value of the defect increased area (difference) of 300 sheets of the comparative example as a reference.
  • the increase (difference) in the number of wafer surface particles before and after the transport test was smaller than in the comparative example.
  • the example had a smaller wafer edge area defect increase area (difference) than the comparative example.
  • the present invention is not limited to the above embodiments.
  • the above-described embodiment is an example, and any device having substantially the same configuration as the technical idea described in the claims of the present invention and exhibiting the same effect is the present invention. included in the technical scope of

Abstract

The present invention is a packaging body for packaging a sealed storage container comprising a lid and a container in which a wafer is stored. The packaging body is characterized by including: a container box that includes a housing in which the sealed storage container is stored, and a cover for the housing; and a cushioning material that is disposed in the container box and that holds the sealed storage container, the cushioning material including a plurality of protrusion-like holding parts for holding a peripheral section of the upper surface of the lid of the sealed storage container. Due to this configuration, provided are a packaging body, a packaging method for a sealed storage container, and a transportation method for the sealed storage container, whereby, when storing a wafer in the sealed storage container and further packaging and transporting the sealed storage container in the container box, the effects on the wafer of impacts applied to the container box are minimized.

Description

梱包体、密閉収納容器の梱包方法、及び輸送方法Package, packaging method for sealed storage container, and transportation method
　本発明は、半導体ウェーハ等のウェーハを収納する密閉収納容器をさらに収納して梱包する際に使用される梱包体、密閉収納容器の梱包方法、及び輸送方法に関する。 The present invention relates to a package used when further storing and packing a closed storage container for storing wafers such as semiconductor wafers, a packing method for the closed storage container, and a transportation method.
　例えばシリコン等の半導体ウェーハを輸送する際には、密閉収納容器であるＦＯＳＢ（Ｆｒｏｎｔ　Ｏｐｅｎｉｎｇ　Ｓｈｉｐｐｉｎｇ　Ｂｏｘ）やＦＯＵＰ（Ｆｒｏｎｔ　Ｏｐｅｎｉｎｇ　Ｕｎｉｆｉｅｄ　Ｐｏｄ）にウェーハを収納し、これらの密閉収納容器をさらにコンテナボックスなどの外包材に収納して輸送する。 For example, when transporting semiconductor wafers such as silicon, the wafers are stored in sealed storage containers such as FOSB (Front Opening Shipping Box) or FOUP (Front Opening Unified Pod), and these sealed storage containers are further used as container boxes. Store in outer packaging and transport.
　密閉収納容器は、蓋体と容器本体とこれらの間に樹脂製のパッキンを有する構成により外気の影響を受けない構造となっている。これらの密閉収納容器をポリエチレン製の袋や、さらにアルミ層をラミネート加工した防湿機能を有する袋で密閉収納する。密閉収納容器は、樹脂製シートを成型加工した構造体や樹脂発泡材で成形した緩衝材にて挟み込み、これらを紙製や樹脂製の段ボールで外枠を形成したコンテナボックスに収納している（特許文献１～３）。 The sealed storage container has a structure that is not affected by the outside air due to the structure that has a lid, a container body, and a resin packing between them. These airtight storage containers are hermetically stored in a polyethylene bag or a moisture-proof bag laminated with an aluminum layer. The sealed storage container is sandwiched between a structure made of molded resin sheets and cushioning material made of resin foam, and stored in a container box with an outer frame made of paper or resin cardboard ( Patent Documents 1 to 3).
　従来のコンテナボックスによる輸送の問題点としては、輸送手段として、航空機、船、トラックなどの手段を組み合わせており、これらの輸送中に、衝撃や振動が加わることである。実際に顧客に到着して、これら密閉収納容器に収納された半導体ウェーハを確認すると、ウェーハが一部破損したり、密閉収納容器内の所定の溝から外れていることがあり、これらはコンテナボックスが、衝突や落下などの強い衝撃を受けた可能性がある。また密閉収納容器内の半導体ウェーハの表面のパーティクルなどの個数が出荷時に比べて異常に増加している場合や、ウェーハのエッジ部には密閉収納容器のウェーハ保持部の樹脂がこびり付いていることがあった。 The problem with transportation using conventional container boxes is that they combine means of transportation such as aircraft, ships, and trucks, and shock and vibration are added during transportation. When we actually arrive at the customer and check the semiconductor wafers stored in these sealed storage containers, we find that the wafers are partially damaged or out of the specified grooves in the sealed storage containers. However, it may have been subjected to a strong impact such as a collision or drop. In addition, when the number of particles on the surface of the semiconductor wafers in the sealed storage container has increased abnormally compared to the time of shipment, or the edge of the wafer is stuck with the resin of the wafer holding part of the sealed storage container. there were.
特開２０１９－０５５７９４号公報JP 2019-055794 A 特開２０１１－０１６５４９号公報JP 2011-016549 A 国際公開第２０１５／０３７１３６号WO2015/037136
　本発明は、このような問題点に鑑みてなされたもので、密閉収納容器にウェーハを収納し、さらにコンテナボックスに密閉収納容器を梱包し輸送する際に、コンテナボックスにかかる衝撃のウェーハへの影響を最小限に抑える梱包体、密閉収納容器の梱包方法、及び密閉収納容器の輸送方法を提供することを目的としたものである。 The present invention has been made in view of such problems. It is an object of the present invention to provide a package that minimizes the impact, a method of packing a closed storage container, and a method of transporting the closed storage container.
　上記課題を解決するために、本発明では、ウェーハが収納される容器本体と蓋体からなる密閉収納容器を梱包するための梱包体であって、
　前記密閉収納容器が収納される筐体と、該筐体のカバーとを有するコンテナボックスと、
　該コンテナボックス内に配置され、前記密閉収納容器を保持する緩衝材と、を備えており、
　前記緩衝材は、前記密閉収納容器の蓋体の上面の周縁部を保持するための突起状保持部を複数有するものである梱包体を提供する。 In order to solve the above-mentioned problems, the present invention provides a package for packing a sealed storage container comprising a container body and a lid in which wafers are stored, comprising:
a container box having a housing in which the sealed storage container is stored and a cover of the housing;
a cushioning material arranged in the container box and holding the sealed storage container,
In the package, the cushioning material has a plurality of projection-like holding portions for holding the peripheral edge portion of the upper surface of the lid of the sealed storage container.
　このような梱包体であれば、密閉収納容器にウェーハを収納し、さらにコンテナボックスに密閉収納容器を梱包し輸送する際に、コンテナボックスにかかる衝撃のウェーハへの影響を最小限に抑えることができる。そのため、ウェーハの破損や溝外れを防いだり、出荷時と比べてウェーハ表面のパーティクルの異常増加や、ウェーハエッジ部へのウェーハ保持部の樹脂のこびりつきを低減できる。 With such a package, when the wafers are stored in the sealed storage container, and the sealed storage container is packed and transported in the container box, the impact on the wafers due to the impact on the container box can be minimized. can. Therefore, it is possible to prevent the wafer from being damaged or out of the groove, and to reduce the abnormal increase in particles on the wafer surface and the adhesion of the resin of the wafer holder to the edge of the wafer compared to the time of shipment.
　また、本発明では、更に、前記コンテナボックス内において、前記緩衝材と前記カバーとの間に配置された発泡ウレタンシートからなる第１振動吸収材と、前記緩衝材と前記筐体の底部との間に配置されたゲル状のシートからなる第２振動吸収材と、を備えているものであることが好ましい。 Further, in the present invention, further, in the container box, a first vibration absorbing material made of a foamed urethane sheet disposed between the cushioning material and the cover, and a structure between the cushioning material and the bottom of the housing. and a second vibration absorber consisting of a gel-like sheet disposed therebetween.
　このような梱包体であれば、密閉収納容器にウェーハを収納し、さらにコンテナボックスに密閉収納容器を梱包し輸送する際に、コンテナボックスにかかる振動のウェーハへの影響を最小限に抑えることができる。 With such a package, when the wafers are stored in the sealed storage container, and the sealed storage container is packed in the container box and transported, the influence of vibrations applied to the container box on the wafers can be minimized. can.
　また、本発明では、ウェーハが収納される容器本体と蓋体からなる密閉収納容器の梱包方法であって、
　前記密閉収納容器が収納される筐体と、該筐体のカバーとを有するコンテナボックスと、
　該コンテナボックス内に配置され、前記密閉収納容器を保持する緩衝材とを用意して、
　前記コンテナボックス内において、前記密閉収納容器の蓋体の上面の周縁部を前記緩衝材の複数の突起状保持部で保持して梱包する密閉収納容器の梱包方法を提供する。 Further, in the present invention, there is provided a method for packing a sealed storage container comprising a container main body and a lid body in which wafers are stored, comprising:
a container box having a housing in which the sealed storage container is stored and a cover of the housing;
Prepare a cushioning material that is arranged in the container box and holds the sealed storage container,
Provided is a method for packing a closed storage container in which the peripheral edge of the upper surface of the lid of the closed storage container is held by a plurality of projecting holding portions of the cushioning material and packed in the container box.
　このような密閉収納容器の梱包方法であれば、密閉収納容器にウェーハを収納し、さらにコンテナボックスに密閉収納容器を梱包し輸送する際に、コンテナボックスにかかる衝撃のウェーハへの影響を最小限に抑えることができる。そして、ウェーハの破損や溝外れを防いだり、出荷時と比べてウェーハ表面のパーティクルの異常増加や、ウェーハエッジ部へのウェーハ保持部の樹脂のこびりつきを低減できる。 With such a sealed storage container packing method, when the wafers are stored in the sealed storage container, and the sealed storage container is packed in the container box and transported, the impact on the wafers due to the impact on the container box is minimized. can be reduced to In addition, it is possible to prevent wafer breakage and groove misalignment, to reduce an abnormal increase in particles on the wafer surface compared to those at the time of shipment, and to reduce adhesion of the resin of the wafer holder to the wafer edge.
　また、本発明では、更に、前記コンテナボックス内において、前記緩衝材と前記カバーとの間に発泡ウレタンシートからなる第１振動吸収材を配置し、
　前記緩衝材と前記筐体の底部との間にゲル状のシートからなる第２振動吸収材を配置することが好ましい。 Further, in the present invention, a first vibration absorbing material made of a urethane foam sheet is arranged between the cushioning material and the cover in the container box,
A second vibration absorbing material made of a gel sheet is preferably arranged between the cushioning material and the bottom of the housing.
　このような密閉収納容器の梱包方法であれば、密閉収納容器にウェーハを収納し、さらにコンテナボックスに密閉収納容器を梱包し輸送する際に、コンテナボックスにかかる振動のウェーハへの影響を最小限に抑えることができる。 With such a sealed storage container packing method, when the wafers are stored in the sealed storage container, and the sealed storage container is packed in the container box and transported, the influence of the vibrations applied to the container box to the wafers is minimized. can be reduced to
　また、本発明では、ウェーハが収納される容器本体と蓋体からなる密閉収納容器の輸送方法であって、
　前記密閉収納容器を上記に記載の梱包方法により梱包し、該梱包した密閉収納容器を輸送する密閉収納容器の輸送方法を提供する。 Further, in the present invention, there is provided a method for transporting a sealed storage container comprising a container body and a lid body in which wafers are stored, comprising:
There is provided a method for transporting a sealed storage container, wherein the sealed storage container is packed by the packing method described above, and the packed sealed storage container is transported.
　このような密閉収納容器の輸送方法であれば、密閉収納容器を輸送する際に、コンテナボックスにかかる衝撃と振動のウェーハへの影響を最小限に抑えることができる密閉収納容器の輸送方法となる。 With such a method for transporting a sealed storage container, it is a method for transporting a sealed storage container that can minimize the impact on the wafers of the impact and vibration applied to the container box when the sealed storage container is transported. .
　本発明の梱包体であれば、緩衝材の突起状保持部が密閉収納容器の周縁部を保持する位置に配置されていることにより、密閉収納容器にウェーハを収納し、さらにコンテナボックスに密閉収納容器を梱包し輸送する際に、コンテナボックスにかかる衝撃のウェーハへの影響を最小限に抑えることができ、ウェーハの破損や溝外れ、パーティクルの異常増加やウェーハエッジ部への樹脂のこびりつきを防止できる。 In the package of the present invention, the protrusion-shaped holding portion of the cushioning material is arranged at a position to hold the peripheral edge of the sealed storage container, so that the wafers are stored in the sealed storage container and further sealed in the container box. When packing and transporting a container, it is possible to minimize the impact on the wafer from the impact on the container box, preventing wafer breakage, groove misalignment, abnormal increase in particles, and resin sticking to the wafer edge. can.
本発明の梱包体の縦断面図である。It is a longitudinal section of the package of the present invention. 本発明の梱包体の緩衝材を下側から見た説明図である。It is explanatory drawing which looked at the cushioning material of the package of this invention from the lower side. 本発明の梱包体の緩衝材の側面保持部付近の横断面図である。FIG. 4 is a cross-sectional view of the vicinity of the side holding portion of the cushioning material of the package of the present invention; 図１、２の視点Ｐから見た突起状保持部と側面保持部の位置関係を示す説明図である。FIG. 3 is an explanatory diagram showing a positional relationship between a projecting holding portion and a side holding portion viewed from a viewpoint P in FIGS. 1 and 2; 密閉収納容器の一例を示す図である。It is a figure which shows an example of an airtight storage container. 実施例の梱包体の梱包方法と輸送方法の一例を示すフロー図である。It is a flowchart which shows an example of the packing method of the package of an Example, and a transportation method. ウェーハ表面欠陥評価を示すグラフである。It is a graph which shows wafer surface defect evaluation. ウェーハエッジ欠陥評価を示すグラフである。10 is a graph showing wafer edge defect evaluation; 従来の梱包体の縦断面図である。It is a longitudinal cross-sectional view of the conventional package.
　上述のように、密閉収納容器にウェーハを収納し、さらにコンテナボックスに密閉収納容器を梱包し輸送する際に、コンテナボックスにかかる衝撃のウェーハへの影響を最小限に抑える梱包体、密閉収納容器の梱包方法、及び密閉収納容器の輸送方法の開発が求められていた。 As described above, there is provided a package and a sealed storage container that minimize the impact on the wafers of the impact on the container box when the wafers are stored in the sealed storage container and the sealed storage container is packed and transported in the container box. There has been a demand for development of a packaging method for the product and a transportation method for the sealed storage container.
　本発明者らは、上記課題について鋭意検討を重ねた結果、コンテナボックス内の緩衝材が密閉収納容器の蓋体の上面の周縁部を保持するための突起状保持部を複数有するものである梱包体であればウェーハへの衝撃を抑えられることを見出し、本発明を完成させた。 As a result of intensive studies on the above problems, the inventors of the present invention have found that the cushioning material in the container box has a plurality of projecting holding portions for holding the periphery of the upper surface of the lid of the sealed storage container. The inventors have found that the impact on the wafer can be suppressed if the material is a body, and have completed the present invention.
　以下、図面を参照して本発明における実施の形態を詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
　図５は、本発明の梱包体で梱包する対象となる一般的な密閉収納容器（ＦＯＳＢ又はＦＯＵＰ）である。密閉収納容器５はウェーハが収納される容器本体５ａと蓋体５ｂとからなる。 Fig. 5 shows a general sealed storage container (FOSB or FOUP) to be packed with the packing material of the present invention. The sealed storage container 5 consists of a container body 5a in which wafers are stored and a lid 5b.
［梱包体］
　図１は、本発明による梱包体１０を示している。梱包体１０の縦断面図であり、ここでは梱包対象の密閉収納容器５も併せて図示してある。図１に示した梱包体１０は、密閉収納容器５を梱包するための梱包体１０であって、密閉収納容器５が収納される筐体３ｂと、該筐体３ｂのカバー３ａとを有するコンテナボックス２と、該コンテナボックス２内に配置され、密閉収納容器５を保持する緩衝材１と、を備えている。緩衝材１は、密閉収納容器５の蓋体の上面の周縁部を保持するための突起状保持部６ａを複数有するものである。ここで、更に、コンテナボックス２内において、緩衝材１とカバー３ａとの間に配置された発泡ウレタンシートからなる第１振動吸収材４ｂと、緩衝材１と筐体３ｂの底部との間に配置されたゲル状のシートからなる第２振動吸収材４ａと、を備えているものであることが好ましい。 [Package]
FIG. 1 shows a package 10 according to the invention. 1 is a vertical cross-sectional view of a package 10, in which a sealed storage container 5 to be packaged is also illustrated. The package 10 shown in FIG. 1 is a package 10 for packing the sealed storage container 5, and is a container having a housing 3b in which the sealed storage container 5 is stored and a cover 3a of the housing 3b. A box 2 and a cushioning material 1 arranged in the container box 2 and holding a sealed storage container 5 are provided. The cushioning material 1 has a plurality of projecting holding portions 6a for holding the peripheral portion of the upper surface of the lid of the sealed storage container 5. As shown in FIG. Here, further, in the container box 2, between the first vibration absorbing material 4b made of a foamed urethane sheet arranged between the cushioning material 1 and the cover 3a, and between the cushioning material 1 and the bottom of the housing 3b A second vibration absorbing material 4a made of a gel-like sheet is preferably provided.
　本発明の梱包体１０に用いられる緩衝材１としては、密閉収納容器５の蓋体を保持する箇所において、上記突起状保持部を有していればよい。例えば図１に示す通り、上下２段の密閉収納容器５の梱包配置に対して、上段の密閉収納容器５のための突起状保持部を複数有する第１緩衝材１ａ、下段の密閉収納容器のための突起状保持部を複数有し、かつ上段の密閉収納容器の蓋体の対向壁（梱包時に下側になる容器本体の底壁）を保持する第２緩衝材１ｂ、下段の密閉収納容器の蓋体の対向壁を保持する第３緩衝材１ｃを備えたものとすることができ、これで上下から挟んで保持している。 The cushioning material 1 used in the package 10 of the present invention only needs to have the projecting holding portion at the location where the lid of the sealed storage container 5 is held. For example, as shown in FIG. 1, with respect to the packing arrangement of the sealed storage container 5 in two stages, the first cushioning material 1a having a plurality of projecting holding portions for the sealed storage container 5 in the upper stage, and the sealed storage container in the lower stage. The second cushioning material 1b has a plurality of projecting holding portions for holding the opposite wall of the lid of the upper sealed storage container (the bottom wall of the container body, which is on the lower side when packed), and the lower sealed storage container. The third cushioning material 1c that holds the opposing wall of the lid can be provided, and is sandwiched and held from above and below.
　ここで、本発明における緩衝材１の突起状保持部の有効性について、従来の梱包体やその問題点を説明しつつ、詳述する。
　本発明者らは、ウェーハ製造元で製造したウェーハを出荷先に輸送する際に、落下や衝突による衝撃により、密閉収納容器内でウェーハの割れ、欠けなどの破損や溝外れ、ウェーハ表面のパーティクルの増加、密閉収納容器の樹脂製ウェーハ押えによる保持部との接触摩擦による樹脂こびりつきを防止する方途について鋭意検討を行った。 Here, the effectiveness of the projection-shaped holding portion of the cushioning material 1 in the present invention will be described in detail while explaining the conventional package and its problems.
The inventors of the present invention have found that when wafers manufactured at a wafer manufacturer are transported to a shipping destination, damage such as cracks, chipping, groove deviation, and particles on the wafer surface are generated in the sealed storage container due to impact due to dropping or collision. In addition, we have made intensive studies on how to prevent resin sticking due to contact friction with the holding part by holding resin wafers in the sealed storage container.
　ウェーハ輸送時に、密閉収納容器内でウェーハの割れ、欠けなどの破損や溝外れの原因となる衝撃は、密閉収納容器の、上下左右前後の全面（６面）方向から力を受けることが考えられる。これにより密閉収納容器を緩衝材で保持することにより（特には、緩衝材で上下から挟み込み、上下左右前後の６面を保持することにより）、上下左右前後６面から衝撃を受けても、緩衝材が衝撃を吸収することができる。 When transporting wafers, it is conceivable that impacts that cause breakage such as cracks, chipping, or deviation of the wafers in the sealed storage container will be applied from all directions (6 surfaces) of the sealed storage container, up, down, left, right, front and back. . As a result, by holding the sealed storage container with cushioning materials (in particular, by sandwiching it from above and below with cushioning materials and holding the 6 sides of top, bottom, left, right, front and back), even if it receives impacts from six sides, top, bottom, left, right, front and back, it will not absorb shocks. The material can absorb impact.
　図９に従来の梱包体１１０を示す。従来の梱包体１１０は、密閉収納容器１５と、密閉収納容器１５が収納される筐体１３と、筐体１３のカバー１２とを有するコンテナボックスと、緩衝材１１と、緩衝材１１とカバー１２との間に配置された第１振動吸収材１４ｂと、緩衝材１１と筐体１３の底部との間に配置された第２振動吸収材１４ａを備えている。図９に示した従来の梱包体１１０においては、密閉収納容器１５の蓋体の全面または蓋体の中央側に緩衝材１１の保持部が配置されていた場合に、前述の衝撃により蓋体の中心部付近が押されることにより、樹脂製の蓋体が変形し撓む。密閉収納容器１５の蓋体と容器本体との間のパッキンで密閉構造を形成しているが、蓋体が押されて撓むことで、密閉収納容器１５内の圧力が変動することで空気の出入りが発生し、ウェーハ表面のパーティクル増加が発生していることが分かった。さらに密閉収納容器１５の蓋体の内側には収納するウェーハが移動しないように、樹脂製の押えが保持部として具備されており、この樹脂製の押えによってウェーハは押さえられる構造となっている。前述の衝撃で密閉収納容器１５の樹脂製の蓋体が変形し撓むことで、樹脂製の押えがウェーハを押すことによりウェーハエッジ部の保持部に樹脂のこびりつきが発生することがわかった。 A conventional package 110 is shown in FIG. The conventional package 110 includes a closed storage container 15, a housing 13 in which the closed storage container 15 is stored, a container box having a cover 12 of the housing 13, a cushioning material 11, a cushioning material 11 and a cover 12. and a second vibration absorbing material 14a disposed between the cushioning material 11 and the bottom of the housing 13. As shown in FIG. In the conventional package 110 shown in FIG. 9, when the holding portion of the cushioning material 11 is arranged on the entire surface of the lid of the closed storage container 15 or on the central side of the lid, the impact described above causes the lid to collapse. When the vicinity of the central portion is pressed, the resin lid deforms and bends. The sealing structure is formed by the packing between the lid of the closed container 15 and the container body. It was found that there was an ingress and egress and an increase in particles on the wafer surface. Further, a holding member made of resin is provided inside the lid of the sealed storage container 15 so that the wafers to be stored do not move, and the wafers are held down by this holding member made of resin. It was found that the above-described shock deforms and bends the resin lid of the sealed storage container 15, and the resin presser presses the wafer, causing the resin to stick to the holding portion of the wafer edge.
　これに対して本発明においては、図２のように、密閉収納容器のドア（蓋体の上面）を支持する複数の突起状保持部６ａは、密閉収納容器５の蓋体の周縁部に配置されている（詳しくは後述する図４を用いた説明を参照）。図２は緩衝材１ａ（緩衝材１ｂ）を下側から見た説明図である。緩衝材に関して、その最下面と、密閉収納容器の蓋体の周縁部を保持する突起状保持部６ａと、後述する容器本体及び蓋体の側面を保持する側面保持部６ｂにのみ斜線を引いている。密閉収納容器の蓋体付近が挿入される部分は凹部（図２で白色）となっており、該凹部の中心の黒色部は緩衝材の材料と重量を削減するための、刳り抜かれた空間である。密閉収納容器との位置関係が分かりやすいように梱包時の容器本体の側面の位置を表す線も図示してある。 On the other hand, in the present invention, as shown in FIG. 2, a plurality of projecting holding portions 6a for supporting the door (upper surface of the lid) of the closed storage container are arranged on the periphery of the lid of the closed storage container 5. (For details, see the explanation using FIG. 4, which will be described later). FIG. 2 is an explanatory diagram of the cushioning material 1a (cushioning material 1b) viewed from below. With respect to the cushioning material, oblique lines are drawn only on the lowermost surface thereof, the protruding holding portion 6a for holding the peripheral portion of the lid of the closed storage container, and the side surface holding portion 6b for holding the side surface of the container body and the lid, which will be described later. there is The part into which the lid of the sealed storage container is inserted is a recess (white in FIG. 2), and the black part at the center of the recess is a hollowed out space to reduce the material and weight of the cushioning material. be. A line representing the position of the side surface of the container body during packing is also shown so that the positional relationship with the closed storage container can be easily understood.
　このように密閉収納容器のドア（蓋体）の上面を保持する複数の突起状保持部６ａは、蓋体の周縁部を保持することで、密閉収納容器の樹脂製のドアが変形し撓むことが無くなり、密閉収納容器のドア部の樹脂製の押えがウェーハを過剰に押すことが無くなり、ウェーハエッジ部にその押さえの樹脂のこびりつきが低減される。 The plurality of projecting holding portions 6a that hold the upper surface of the door (lid) of the sealed storage container in this way hold the peripheral edge of the lid, so that the resin door of the sealed storage container is deformed and bent. As a result, the resin presser on the door portion of the closed storage container does not excessively press the wafers, and the sticking of the resin of the presser to the wafer edge portion is reduced.
　さらに、緩衝材において、密閉収納容器のドア（上側）面において、突起状保持部がドアを保持する位置（内側）でなく、密閉収納容器の周縁部（容器本体側）を保持する位置（外側）に配置されているので、衝撃が密閉収納容器のドアの中心部付近に伝わらないため、ドアが押されたり戻ったりすることが無くなることから、ドアが押されることで発生する密閉収納容器内の圧力変動による空気の出入りが無くなることより、密閉収納容器に収容されたウェーハへのパーティクルの付着が低減される。 Furthermore, in the cushioning material, on the door (upper side) of the sealed storage container, the position (outside) where the protrusion-shaped holding part holds the door (inner side), but the peripheral edge (container body side) of the closed storage container ), the impact is not transmitted to the vicinity of the center of the door of the closed storage container, so the door will not be pushed and returned, so the inside of the closed storage container generated by pushing the door Since air does not flow in and out due to pressure fluctuations, adhesion of particles to the wafers housed in the sealed storage container is reduced.
　以上の説明から明らかなように、本発明の梱包体は、密閉収納容器の蓋体の上面において、緩衝材の突起状保持部が、密閉収納容器の蓋体上面の周縁部を保持する位置に配置することを特徴としている。よってその他の構成は特に限定されず、従来公知の構成を用いることができる。 As is clear from the above description, in the package of the present invention, on the upper surface of the lid of the sealed storage container, the projection-like holding portion of the cushioning material is positioned so as to hold the peripheral edge of the upper surface of the lid of the sealed storage container. It is characterized by placing Therefore, other configurations are not particularly limited, and conventionally known configurations can be used.
　なお、突起状保持部６ａの数は複数であれば良く、特に限定されないが、図２に示す例では蓋体の上面の四辺の各辺付近に１つずつ（合計４つ）当接するように設けられている。密閉収納容器のサイズ等に応じて決定することができ、上限数は決められない。さらには、突起状保持部６ａのサイズや形状も限定されるものではなく、適宜決定することができる。
　以下、その他の構成部品を含め、さらに詳述する。 The number of projecting holding portions 6a is not particularly limited as long as it is plural, but in the example shown in FIG. is provided. It can be determined according to the size of the closed storage container, etc., and the upper limit number is not determined. Furthermore, the size and shape of the projecting holding portion 6a are not limited, and can be determined as appropriate.
Further details including other components will be described below.
　図２、３に示すように、本発明の梱包体に用いられる緩衝材１は、密閉収納容器５の側面を保持するための側面保持部６ｂ（突起状）を複数備えていてもよい。図３は緩衝材１ａの側面保持部付近の横断面図である。密閉収納容器の容器本体も参考として図示している。ここでは側面保持部６ｂは一側面あたり２つずつ（合計８つ）であるが、その数やサイズ、形状は特に限定されない。この側面保持部での保持により、密閉収納容器が水平方向に動くのを抑制することができる。 As shown in FIGS. 2 and 3, the cushioning material 1 used in the package of the present invention may have a plurality of side holding portions 6b (projections) for holding the side surfaces of the sealed storage container 5. FIG. 3 is a cross-sectional view of the vicinity of the side holding portion of the cushioning material 1a. The container body of the closed container is also shown for reference. Here, there are two side holding portions 6b per side (8 in total), but the number, size, and shape are not particularly limited. By holding the side holding portion, it is possible to suppress the horizontal movement of the sealed storage container.
　突起状保持部６ａと側面保持部６ｂの位置関係を図４に示す。図４は図１、２の視点Ｐから見た説明図である。より具体的には、視点Ｐから見た、突起状保持部６ａの一例（６ａ１）と側面保持部６ｂの一例（６ｂ１）付近（図２の楕円で囲ってある箇所）の拡大図である。図４に示されるとおり、密閉収納容器５の蓋体の上面の周縁部を保持する突起状保持部６ａと、密閉収納容器５の容器本体５ａ及び蓋体５ｂの側面の周縁部を保持する側面保持部６ｂを備える。 Fig. 4 shows the positional relationship between the projecting holding portion 6a and the side holding portion 6b. FIG. 4 is an explanatory view seen from the viewpoint P in FIGS. 1 and 2. FIG. More specifically, it is an enlarged view of the vicinity of an example (6a1) of the projecting holding portion 6a and an example (6b1) of the side holding portion 6b (the portion surrounded by the ellipse in FIG. 2) viewed from the viewpoint P. As shown in FIG. 4, a projecting holding portion 6a for holding the peripheral edge of the upper surface of the lid of the closed storage container 5, and a side surface for holding the peripheral edge of the side surface of the container body 5a and the lid 5b of the closed storage container 5. A holding portion 6b is provided.
　なお、図１では突起状保持部が蓋体の中央部を保持する位置にあるように見える。しかしながら、これは蓋体の手前側の周縁部を保持しているものである。即ち、図１は図２での突起状保持部６ａ１の箇所の縦断面図に相当するものであり、実際には図２に示すように蓋体の上面の周縁部を保持する位置にある。 In addition, in FIG. 1, it seems that the projecting holding portion is positioned to hold the central portion of the lid. However, this is what holds the peripheral edge on the front side of the lid. That is, FIG. 1 corresponds to a vertical cross-sectional view of the projecting holding portion 6a1 in FIG. 2. Actually, as shown in FIG.
　輸送用のコンテナボックスの筐体及びカバーは、例えばポリプロピレンなどの樹脂により、平らなシート（ライナー）と波状のシート（メディアム）を接着したプラスチックダンボールで箱状に形成することができる。コンテナボックスのカバーは、溝を形成し筐体に嵌め込む構造としても良いし、カバーを筐体より若干大きい寸法で形成し、被せると同時に筐体の外面とカバーの内側に接着した面ファスナーを配置しても良い。また、衝撃などが加わった際に、コンテナボックスのカバーが外れることを防ぐため、紐や樹脂製のベルトにてコンテナボックスのカバーと筐体を捕縛しても良い。 The housing and cover of a container box for transportation can be formed into a box shape from a plastic cardboard made by bonding a flat sheet (liner) and a corrugated sheet (medium) with a resin such as polypropylene. The cover of the container box may have a structure in which a groove is formed and fitted into the housing. Alternatively, the cover may be formed with a slightly larger size than the housing, and at the same time the hook-and-loop fastener is attached to the outer surface of the housing and the inside of the cover. You can place it. Further, in order to prevent the cover of the container box from coming off when a shock or the like is applied, the cover of the container box and the housing may be tied with a string or a resin belt.
　緩衝材は密閉収納容器、さらにウェーハへの衝撃を緩和する部材である。緩衝材としては、ポリエチレンやポリスチレンなどの樹脂を原料とした発泡材で成形した部材を用いることができる。 　The cushioning material is a sealed storage container and a member that mitigates the impact on the wafer. As the cushioning material, a member molded from a foamed material made from a resin such as polyethylene or polystyrene can be used.
　第１振動吸収材及び第２振動吸収材は、密閉収納容器、さらにウェーハへの振動を吸収する部材である。第１振動吸収材及び第２振動吸収材としてはポリウレタンなどの樹脂を原料とした発泡材で形成した部材や、ゲル状の振動吸収材をシート状に形成した部材を用いることができる。ゲル状の振動吸収材は、粘弾性ゴムやシリコーンゴムなどのゴム系ゲルや、シリコーンオイルに石英粒子やガラス粒子、アルミナ粒子などを混合分散させたシリコーンゲルや、水や油あるいはシリコーンオイルにセルロース繊維を混合分散させたセルロースゲルなどを用いることができる。また、第２振動吸収材はゲル状の振動吸収材をシート状に形成し、その振動吸収性の高さから、厚みを薄くすることが可能であるが、比重がポリウレタンより大きく重いため、筐体の底部と緩衝材との間に配置することが好ましい。第１振動吸収材は、ポリウレタン部材、特に発泡ウレタンシートとすることで、その部材の軽さからカバーと緩衝材との間に配置することにより、密閉収納容器を収納、取り出しの際に作業軽減の効果が発揮され好ましい。これらの振動吸収材により振動を吸収し、パーティクルなどの異常増加や、エッジ部のウェーハ保持部に樹脂がこびり付くことを抑制することができる。 The first vibration absorber and the second vibration absorber are members that absorb vibrations to the closed container and to the wafers. As the first vibration absorbing member and the second vibration absorbing member, a member made of a foamed material made from a resin such as polyurethane, or a member made of a gel-like vibration absorbing material formed into a sheet can be used. Gel-type vibration absorbing materials include rubber-based gels such as viscoelastic rubber and silicone rubber, silicone gels in which quartz particles, glass particles, alumina particles, etc. are mixed and dispersed in silicone oil, and cellulose in water, oil, or silicone oil. A cellulose gel or the like in which fibers are mixed and dispersed can be used. In addition, the second vibration absorbing material is formed by forming a gel-like vibration absorbing material into a sheet, and it is possible to reduce the thickness due to its high vibration absorbing property. It is preferably placed between the bottom of the body and the cushioning material. The first vibration absorbing material is made of polyurethane material, especially foamed urethane sheet, and is placed between the cover and the cushioning material due to the lightness of the material, reducing the work involved in storing and taking out the sealed storage container. The effect of is exhibited and is preferable. These vibration-absorbing materials absorb vibrations, thereby suppressing an abnormal increase in particles and sticking of resin to the wafer holding portion at the edge.
　また、ポリウレタン、ゲル状の振動吸収材の厚みは、５ｍｍ以上であることが好ましい。また、振動吸収材において緩衝材及びコンテナボックスと接触する面積は、緩衝材、筐体の底部及びカバー（上面）の面積の半分以上が好ましく、同じ面積であることがさらに好ましい。 Also, the thickness of the polyurethane or gel-like vibration absorbing material is preferably 5 mm or more. Also, the area of the vibration absorbing material that contacts the cushioning material and the container box is preferably half or more the area of the cushioning material, the bottom part of the housing, and the cover (upper surface), and more preferably the same area.
　特に、緩衝材とカバーの間に配置する第１振動吸収材については、使用する密閉収納容器の種類により、緩衝材で挟み込んだ高さが、筐体の高さに対して、変わることがあるので、振動吸収材の厚みを変えたものを適宜組み合わせ、全体の振動吸収材の厚さを適宜調整することで、隙間やはみ出しが無い状態にすることが可能である。 In particular, for the first vibration absorbing material placed between the cushioning material and the cover, the height of the first vibration absorbing material sandwiched by the cushioning material may change with respect to the height of the housing, depending on the type of closed storage container used. Therefore, by appropriately combining vibration absorbing materials with different thicknesses and appropriately adjusting the thickness of the entire vibration absorbing material, it is possible to eliminate gaps and protrusions.
　梱包体において、図１に示すように、緩衝材と各振動吸収材との間、各振動吸収材と筐体（底部）及びカバーとの間、緩衝材と筐体側面部との間に空間（隙間）が設けられていないことが好ましい。これにより、密閉収納容器ひいてはウェーハへの衝撃や振動をより抑制することができる。 In the package, as shown in FIG. 1, there are spaces between the cushioning material and each vibration absorbing material, between each vibration absorbing material and the housing (bottom) and cover, and between the cushioning material and the side surface of the housing. (Gap) is preferably not provided. As a result, it is possible to further suppress impact and vibration on the closed storage container and thus on the wafers.
　本発明による梱包体に梱包する密閉収納容器の種類や個数、密閉収納容器に収納されるウェーハは特に限定されず、例えば、図５のように、密閉収納容器はＦＯＳＢとし、収納する個数は１２個とすることができ、ウェーハは直径３００ｍｍのシリコンウェーハとすることができる。 The type and number of sealed storage containers to be packed in the package according to the present invention, and the number of wafers stored in the sealed storage container are not particularly limited. For example, as shown in FIG. and the wafer may be a silicon wafer with a diameter of 300 mm.
［密閉収納容器の梱包方法］
　また、本発明の密閉収納容器の梱包方法について説明する。
　まず、図１－４に示すような、筐体とカバーとを有するコンテナボックスと、緩衝材１ａ～１ｃとを用意する。この時、更に、第１振動吸収材と第２振動吸収材を用意すると良い。
　そして、コンテナボックス内において、緩衝材とカバーとの間に第１振動吸収材、緩衝材と筐体の底部との間にゲル状のシートからなる第２振動吸収材を配置しつつ、密閉収納容器の蓋体の上面の周縁部を緩衝材１ａ、１ｂの複数の突起状保持部６ａで保持した状態で密閉収納容器を梱包する。 [Packing method for sealed storage container]
Also, a method for packing the closed storage container of the present invention will be described.
First, as shown in FIG. 1-4, a container box having a housing and a cover and cushioning materials 1a to 1c are prepared. At this time, it is preferable to prepare a first vibration absorbing material and a second vibration absorbing material.
In the container box, a first vibration absorbing material is arranged between the cushioning material and the cover, and a second vibration absorbing material made of a gel-like sheet is arranged between the cushioning material and the bottom of the housing. The sealed storage container is packed while the periphery of the upper surface of the lid of the container is held by a plurality of projecting holding portions 6a of the cushioning materials 1a and 1b.
［密閉収納容器の輸送方法］
　また、本発明の密閉収納容器の輸送方法について説明する。
　密閉収納容器を上記に記載の梱包方法により梱包し、該梱包した密閉収納容器を輸送することができる。 [Method of transporting closed storage container]
Also, a method for transporting the sealed storage container of the present invention will be described.
The sealed storage container can be packed by the packing method described above, and the packed sealed storage container can be transported.
　密閉収納容器の輸送手段としては特に限定されず、例えば、トラックや航空機を用いることができる。 The means of transporting the closed storage container is not particularly limited, and for example, trucks and aircraft can be used.
　以下、実施例及び比較例を用いて本発明を具体的に説明するが、本発明はこれらに限定されるものではない。 The present invention will be specifically described below using Examples and Comparative Examples, but the present invention is not limited to these.
［実施例］
　図６に示したフローチャートに基づいて、製造したウェーハを密閉収納容器に収納し、密閉収納容器を梱包した。具体的には、直径３００ｍｍのシリコンウェーハを３００枚準備し、密閉収納容器（ＦＯＳＢ）１個に２５枚のウェーハを収納し、計１２個の密閉収納容器に計３００枚のウェーハを収納した。コンテナボックスの筐体内に第２振動吸収材４ａ、第３緩衝材１ｃを配置しその上に下段として６個の密閉収納容器を配置した。そして、厚みが２５ｍｍ以上の構造である第２緩衝材１ｂの構造体上に、上段として６個の密閉収納容器を配置し、さらに第１緩衝材１ａ、第１振動吸収材４ｂを配置して、合計１２個の密閉収納容器を収納し、カバー３ａを筐体３ｂ上にかぶせることで図１のように梱包した。密閉収納容器の蓋体を支持する複数の突起状保持部が、密閉収納容器の周縁部に配置される構造の緩衝材を用いた。具体的には図２にように４つの突起状保持部６ａを有するものを用いた。さらに、コンテナボックスの筐体の底部と緩衝材の間の第２振動吸収材４ａは、ゲル状シート部材、カバーと緩衝材の間の第１振動吸収材は、発泡ウレタン、緩衝材は発泡スチレン、コンテナボックスの筐体はポリプロピレンのプラスチックダンボールでそれぞれ構成した。コンテナボックスの筐体の底部と緩衝材との間の第２振動吸収材についてはシリコーンゴムのゲル状シートで構成し厚みは３０ｍｍとし、面積は筐体の底部と同じ面積とした。カバーと緩衝材の間の第１振動吸収材としては発泡ウレタンシート（ポリウレタン）で構成し厚みを４５ｍｍとし、面積は、カバーと同じ面積とした。 [Example]
Based on the flow chart shown in FIG. 6, the manufactured wafers were stored in a closed storage container, and the closed storage container was packed. Specifically, 300 silicon wafers with a diameter of 300 mm were prepared, 25 wafers were stored in one closed storage container (FOSB), and a total of 300 wafers were stored in a total of 12 closed storage containers. A second vibration absorbing material 4a and a third cushioning material 1c were arranged in the housing of the container box, and six closed storage containers were arranged thereon as a lower stage. Then, on the structure of the second cushioning material 1b having a thickness of 25 mm or more, six sealed storage containers are arranged as the upper stage, and further the first cushioning material 1a and the first vibration absorbing material 4b are arranged. , a total of 12 closed storage containers were housed and packed as shown in FIG. 1 by covering the housing 3b with the cover 3a. A cushioning material having a structure in which a plurality of projecting holding portions for supporting the lid of the closed storage container is arranged at the peripheral edge of the closed storage container was used. Specifically, as shown in FIG. 2, one having four projecting holding portions 6a was used. Furthermore, the second vibration absorbing material 4a between the bottom of the housing of the container box and the cushioning material is a gel-like sheet member, the first vibration absorbing material between the cover and the cushioning material is urethane foam, and the cushioning material is styrene foam. , The housing of the container box was made of polypropylene plastic cardboard. The second vibration absorbing material between the bottom of the housing of the container box and the cushioning material was composed of a silicone rubber gel sheet with a thickness of 30 mm and an area equal to that of the bottom of the housing. The first vibration absorbing material between the cover and the cushioning material was made of a foamed urethane sheet (polyurethane) with a thickness of 45 mm and the same area as the cover.
［比較例］
　実施例と同様に、製造したウェーハを梱包した。但し、密閉収納容器の蓋体を支持する保持部が、図９のように密閉収納容器の蓋体全面を保持する構造の緩衝材を用いた。その他の条件は実施例と全て同じである。 [Comparative example]
The manufactured wafers were packaged in the same manner as in the Examples. However, the holding portion for supporting the lid of the closed storage container used a cushioning material structured to hold the entire surface of the closed storage container as shown in FIG. All other conditions are the same as in the example.
［輸送テスト］
　上述のように用意した実施例、比較例に対して、トラック、航空機を使用して、工場と羽田空港間を往復するトラック輸送と、羽田空港と那覇空港間を往復する航空輸送を行った。 [Transportation test]
For the examples and comparative examples prepared as described above, trucks and aircraft were used for truck transportation between the factory and Haneda Airport, and air transportation between Haneda Airport and Naha Airport.
［ウェーハ表面欠陥評価］
　実施例と比較例のために用意したウェーハについて、３００枚ずつ、輸送テスト前後の表面欠陥数を、ＫＬＡ製パーティクルカウンターＳＰ５にて、２２ｎｍ以上の粒径サイズの欠陥個数を測定し、欠陥個数差分の平均値を算出して比較した。図７にウェーハ表面欠陥評価の結果を示す。結果は、比較例の表面パーティクル増加数の３００枚の平均値を基準として、実施例の表面パーティクル増加個数の３００枚の平均値を指数化して比較した。 [Wafer surface defect evaluation]
For the wafers prepared for Examples and Comparative Examples, the number of surface defects before and after the transportation test was measured for 300 wafers each, and the number of defects with a particle size of 22 nm or more was measured using a particle counter SP5 manufactured by KLA. was calculated and compared. FIG. 7 shows the results of wafer surface defect evaluation. The results were compared by indexing the average value of the increased number of surface particles of 300 sheets of the example on the basis of the average value of the increased number of surface particles of 300 sheets of the comparative example.
［ウェーハエッジ欠陥（付着物）評価］
　実施例と比較例のために用意したウェーハについて、３００枚ずつ、輸送テスト前後のエッジ部欠陥数を、ナノシステムソリューション製エッジ部欠陥検査装置ＲＸＭにて、エッジ欠陥個数及び面積を測定し、欠陥面積の平均値の差分を算出して比較した。図８にウェーハエッジ欠陥評価の結果を示す。結果は、比較例の欠陥増加面積（差分）の３００枚の平均値を基準として、実施例の欠陥増加面積（差分）の３００枚の平均値を指数化して比較した。 [Wafer edge defect (attachment) evaluation]
For the wafers prepared for Examples and Comparative Examples, the number of edge defects before and after the transportation test was measured by using the edge defect inspection device RXM manufactured by Nano System Solution to measure the number of edge defects and the area of each 300 wafers. Differences in the average values of the areas were calculated and compared. FIG. 8 shows the results of wafer edge defect evaluation. The results were compared by indexing the average value of the defect increased area (difference) of 300 sheets of the example with the average value of the defect increased area (difference) of 300 sheets of the comparative example as a reference.
　図７から明らかなように、実施例は、比較例に比べて、ウェーハ表面パーティクルの輸送テスト前後の増加数（差分）が少なかった。また、図８から明らかなように、実施例は、比較例に比べて、ウェーハエッジ部欠陥増加面積（差分）が少なかった。 As is clear from FIG. 7, in the example, the increase (difference) in the number of wafer surface particles before and after the transport test was smaller than in the comparative example. Moreover, as is clear from FIG. 8, the example had a smaller wafer edge area defect increase area (difference) than the comparative example.
　本発明によれば、製造したウェーハを輸送する際に、コンテナボックスに梱包された密閉収納容器、さらにウェーハに、輸送中に加わる衝撃が伝わることを抑制することができるため、ウェーハ製造業に有用である。 INDUSTRIAL APPLICABILITY According to the present invention, when transporting manufactured wafers, it is possible to suppress the transmission of shocks during transportation to the sealed storage container packed in the container box and to the wafers, which is useful in the wafer manufacturing industry. is.
　なお、本発明は、上記実施形態に限定されるものではない。上記実施形態は例示であり、本発明の特許請求の範囲に記載された技術的思想と実質的に同一な構成を有し、同様な作用効果を奏するものは、いかなるものであっても本発明の技術的範囲に包含される。 The present invention is not limited to the above embodiments. The above-described embodiment is an example, and any device having substantially the same configuration as the technical idea described in the claims of the present invention and exhibiting the same effect is the present invention. included in the technical scope of

Claims (5)

  1. 　ウェーハが収納される容器本体と蓋体からなる密閉収納容器を梱包するための梱包体であって、
    　前記密閉収納容器が収納される筐体と、該筐体のカバーとを有するコンテナボックスと、
    　該コンテナボックス内に配置され、前記密閉収納容器を保持する緩衝材と、を備えており、
    　前記緩衝材は、前記密閉収納容器の蓋体の上面の周縁部を保持するための突起状保持部を複数有するものであることを特徴とする梱包体。     A package for packing a sealed storage container comprising a container body and a lid for storing wafers,
    a container box having a housing in which the sealed storage container is stored and a cover of the housing;
    a cushioning material arranged in the container box and holding the sealed storage container,
    A package, wherein the cushioning material has a plurality of projection-like holding portions for holding a peripheral portion of an upper surface of the lid of the sealed storage container.
  2. 　更に、前記コンテナボックス内において、前記緩衝材と前記カバーとの間に配置された発泡ウレタンシートからなる第１振動吸収材と、前記緩衝材と前記筐体の底部との間に配置されたゲル状のシートからなる第２振動吸収材と、を備えているものであることを特徴とする請求項１に記載の梱包体。 Further, in the container box, a first vibration absorbing material made of a foamed urethane sheet is arranged between the cushioning material and the cover, and a gel is arranged between the cushioning material and the bottom of the housing. 2. The package according to claim 1, further comprising a second vibration absorbing material made of a shaped sheet.
  3. 　ウェーハが収納される容器本体と蓋体からなる密閉収納容器の梱包方法であって、
    　前記密閉収納容器が収納される筐体と、該筐体のカバーとを有するコンテナボックスと、
    　該コンテナボックス内に配置され、前記密閉収納容器を保持する緩衝材とを用意して、
    　前記コンテナボックス内において、前記密閉収納容器の蓋体の上面の周縁部を前記緩衝材の複数の突起状保持部で保持して梱包することを特徴とする密閉収納容器の梱包方法。     A method for packing a sealed storage container comprising a container body and a lid for storing wafers,
    a container box having a housing in which the sealed storage container is stored and a cover of the housing;
    Prepare a cushioning material that is arranged in the container box and holds the sealed storage container,
    A method of packing a closed storage container, wherein the peripheral edge of the upper surface of the lid of the closed storage container is held in the container box by a plurality of projecting holding portions of the cushioning material.
  4. 　更に、前記コンテナボックス内において、前記緩衝材と前記カバーとの間に発泡ウレタンシートからなる第１振動吸収材を配置し、
    　前記緩衝材と前記筐体の底部との間にゲル状のシートからなる第２振動吸収材を配置することを特徴とする請求項３に記載の密閉収納容器の梱包方法。     Furthermore, in the container box, a first vibration absorbing material made of a foamed urethane sheet is arranged between the cushioning material and the cover,
    4. A method of packing a closed storage container according to claim 3, wherein a second vibration absorbing material made of a gel sheet is arranged between said cushioning material and the bottom of said housing.
  5. 　ウェーハが収納される容器本体と蓋体からなる密閉収納容器の輸送方法であって、
    　前記密閉収納容器を請求項３又は請求項４に記載の梱包方法により梱包し、該梱包した密閉収納容器を輸送することを特徴とする密閉収納容器の輸送方法。     A method for transporting a closed storage container comprising a container body and a lid for storing wafers,
    A method for transporting a sealed storage container, comprising the steps of packing the sealed storage container by the packing method according to claim 3 or 4, and transporting the packed sealed storage container.
PCT/JP2022/042636 2021-12-28 2022-11-17 Packaging body, packaging method for sealed storage container, and transportation method WO2023127336A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005041503A (en) * 2003-07-24 2005-02-17 Sumitomo Mitsubishi Silicon Corp Cushioning body for use in transporting semiconductor wafer
JP2010132331A (en) * 2008-12-05 2010-06-17 Miraial Kk Packaging box for semiconductor housing container
JP2015209222A (en) * 2014-04-25 2015-11-24 信越ポリマー株式会社 Packaging material
JP2019112109A (en) * 2017-12-25 2019-07-11 株式会社Sumco Cushion body for packaging of storage container of semiconductor wafer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005041503A (en) * 2003-07-24 2005-02-17 Sumitomo Mitsubishi Silicon Corp Cushioning body for use in transporting semiconductor wafer
JP2010132331A (en) * 2008-12-05 2010-06-17 Miraial Kk Packaging box for semiconductor housing container
JP2015209222A (en) * 2014-04-25 2015-11-24 信越ポリマー株式会社 Packaging material
JP2019112109A (en) * 2017-12-25 2019-07-11 株式会社Sumco Cushion body for packaging of storage container of semiconductor wafer

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