WO2023123044A1 - Uniform light spot shaping system - Google Patents

Uniform light spot shaping system Download PDF

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Publication number
WO2023123044A1
WO2023123044A1 PCT/CN2021/142461 CN2021142461W WO2023123044A1 WO 2023123044 A1 WO2023123044 A1 WO 2023123044A1 CN 2021142461 W CN2021142461 W CN 2021142461W WO 2023123044 A1 WO2023123044 A1 WO 2023123044A1
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Prior art keywords
beam expander
trapezoidal
end cap
trapezoidal beam
face
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PCT/CN2021/142461
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French (fr)
Chinese (zh)
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陈明阳
沈放
王钊
葛倩倩
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江苏大学
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Publication of WO2023123044A1 publication Critical patent/WO2023123044A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/0977Reflective elements

Definitions

  • the invention relates to the field of laser shaping, in particular to a uniform light spot shaping system.
  • the laser spot emitted by the laser is generally a circular spot with Gaussian energy distribution, the energy is high in the middle, low at both ends, and the uniformity is very low, but not only in traditional laser thermal processing such as laser quenching, laser cladding, laser alloying and other applications , and in laser energy supply, optical information processing, storage, recording, laser medicine and other applications, there are great requirements on the uniformity of laser energy. In practical applications, especially the demand for spot homogenization of high-power lasers is increasing.
  • the circular spot not only does not match the size of the photocell in the laser energy supply, resulting in low photoelectric conversion efficiency, but also has the problem of mismatching the shape of the working surface in applications such as laser cladding and laser alloying, resulting in low processing efficiency.
  • the trapezoidal concentrator is commonly used in the concentrating photovoltaic system to improve the uniformity of the light spot and realize the concentrating. Square spot.
  • this system can only obtain a uniform light spot close to the exit of the trapezoidal concentrator, and even a few millimeters away from the exit of the trapezoidal concentrator, the uniformity of the light spot will drop greatly, so that the working surface has to leave the exit of the concentrator. less than a uniform spot; and the system will form a focal point in the trapezoidal concentrator.
  • this kind of trapezoidal concentrator has a concentrating effect, and the concentrating ratio is greater than 1, that is, the output spot size is smaller than the input spot size. If a large spot is to be obtained, the light input end of the concentrator must be designed larger, and the concentrator The length had to increase and the system became bulky and unwieldy.
  • the present invention provides a uniform light spot shaping system, which is suitable for high-power laser shaping, and can obtain rectangular uniform light spots within a range from the output end face to a certain distance.
  • the present invention achieves the above-mentioned technical purpose through the following technical means.
  • a uniform spot shaping system including a silica fiber, an end cap, and a trapezoidal beam expander;
  • the input end surface of the end cap is a plane
  • the output end surface includes a concave lens and an annular plane
  • the concave lens is located at the center of the output end surface
  • the annular plane surrounds the concave lens
  • the trapezoidal beam expander is spliced by four trapezoidal quartz plates to form a tubular structure, the upper bottom of the trapezoidal quartz plate forms the input end of the trapezoidal beam expander, and the lower bottom of the trapezoidal quartz plate forms the trapezoidal output of the beam expander;
  • the input end face of the end cap is fused with one end of the quartz optical fiber, and the annular plane is connected with the input end of the trapezoidal beam expander.
  • the end cap is made of pure quartz
  • the side shape of the end cap is a square truss
  • the narrow end face of the four prism is the input end face of the end cap
  • the wide end face of the four prism is the output end face of the end cap.
  • the diameter of the circular area of the concave lens on the output end surface of the end cap is larger than the diameter of the laser spot emitted on the output end surface of the end cap.
  • the trapezoidal beam expander is composed of four trapezoidal quartz plates, the inner and outer openings of the input end and the output end of the trapezoidal beam expander are square, and the inner opening edge of the input end of the trapezoidal beam expander
  • the length is D i
  • the diameter of the circular area of the concave lens on the output end face of the end cap is De
  • the inner surface of the trapezoidal beam expander is coated with a high reflection film.
  • the inclination angle ⁇ of the trapezoidal beam expander needs to satisfy:
  • the laser enters the end cap from the optical fiber, since there is no constraint of the fiber cladding, it can be transmitted in free space, effectively increasing the output end surface light field area, thereby reducing the optical power density, so it can effectively Solve the problem of damage to the fiber end face caused by high-power lasers;
  • the present invention uses concave lenses to replace the convex lenses used in conventional concentrating photovoltaic systems, so that the system of the present invention will not produce laser focus points, and air breakdown caused by high-power lasers can be avoided. Therefore, the present invention is suitable for shaping of high-power lasers.
  • the end cap of the present invention integrates the concave lens and the optical fiber end cap, which is easy to manufacture, and the end cap and the trapezoidal beam expander are directly connected together, the whole system is no longer a separate structure, that is, the system of the present invention is integrated , compact structure, small footprint.
  • the system of the present invention has a certain continuous working distance, and a uniform rectangular spot can be obtained at the maximum working distance and within it.
  • the system parameters can be adjusted according to the actual working distance and spot size, and the distance between the working surface and the trapezoidal beam expander can be set. The distance from the output end face of the device can be obtained to obtain the output spot that meets the requirements.
  • FIG. 1 is a schematic structural diagram of a uniform spot shaping system of the present invention.
  • Fig. 2 is a sectional view of the quadrangular truss structure of the end cap of the present invention.
  • Fig. 3 is a schematic diagram of the principle of laser propagation in the end cap of the present invention.
  • Fig. 4 is the light spot three-dimensional figure and the illuminance figure in the concrete embodiment 1 of the present invention, wherein (a) is the light spot figure after the end cap of the laser; , Spot diagram at 6cm.
  • Fig. 5 is the three-dimensional diagram and the illuminance diagram of the spot in the specific embodiment 2 of the present invention, wherein (a) is the spot diagram after the laser passes through the end cap; (b), (c) are that the distance from the output end of the trapezoidal beam expander is 0 cm respectively , Spot diagram at 5cm.
  • Fig. 6 is a three-dimensional diagram and an illuminance diagram of the light spot when the distance from the output end of the trapezoidal beam expander is 0 cm in Embodiment 3 of the present invention.
  • a uniform spot shaping system includes a quartz optical fiber 1 , an end cap 2 , and a trapezoidal beam expander 3 .
  • the end cap 2 is composed of pure quartz.
  • the input end face of the end cap 2 is a plane, and a spherical cap is missing in the center of the output end face to form a concave lens structure, so that the output end face includes a concave lens 4 and a ring plane.
  • the concave lens 4 is located at the center of the output end face, and the ring shape The plane surrounds the concave lens 4 around.
  • the diameter of the circular area of the concave lens 4 on the output end surface of the end cap 2 is larger than the diameter of the laser spot emitted on the output end surface of the end cap 2 .
  • the end cap 2 has a square truss structure, the narrow end face of the four prism is the input end face of the end cap 2 , and the wide end face of the four prism is the output end face of the end cap 2 .
  • the trapezoidal beam expander 3 is spliced by four trapezoidal quartz plates to form a tubular structure.
  • the upper bottom of the trapezoidal quartz plate forms the input end of the trapezoidal beam expander 3, and the lower bottom of the trapezoidal quartz plate forms the output end of the trapezoidal beam expander 3.
  • the inner and outer openings of the input end and the output end of the trapezoidal beam expander 3 are square, the width of the inner opening of the input end of the trapezoidal beam expander 3 is D i , and the diameter of the circular area of the concave lens 4 on the output end face of the end cap 2 is is D e , D i >D e .
  • the inner surface of the trapezoidal beam expander 3 is coated with a high-reflection film, which can effectively increase the reflectivity of the inner wall of the trapezoidal beam expander 3, thereby improving the shaping effect.
  • the input end surface of the end cap 2 is fused with one end of the quartz optical fiber 1 , and the annular plane of the end cap 2 is connected with the input end of the trapezoidal beam expander 3 .
  • the laser light diverges through the concave lens 4 in the end cap 2 and expands the beam through the trapezoidal beam expander 3 to realize the beam expansion function. At the same time, under the combined action of the two, a uniformly distributed square spot is formed.
  • the divergence angle of the laser after propagating in the end cap 2 is:
  • NA is the numerical aperture of the fiber
  • n 2 is the refractive index of the silica fiber 1 core and the fiber end cap
  • r core is the radius of the silica fiber 1 core
  • R is the curvature radius of the concave lens
  • ⁇ 1 is the edge light of the laser transmitted in the end cap 2 Incident to the angle of incidence of the concave lens 4
  • ⁇ 2 is the refraction angle
  • ⁇ 0 is the angle between the normal line and the horizontal line made by drawing analysis when the marginal light is incident on the concave lens 4
  • d is the spot radius when the laser light is transmitted to the concave lens 4
  • d 0 is The length from the input end of the end cap to the concave lens 4.
  • the inclination angle ⁇ of the trapezoidal beam expander 3 needs to satisfy:
  • is the divergence angle of the laser light after it propagates through the end cap 2;
  • i is the number of reflections of the laser light in the trapezoidal beam expander 3, which is a natural number greater than 1, and its value is determined artificially when the trapezoidal beam expander 3 is designed.
  • i 2, 3 the system has a higher uniformity of the spot, the larger i is set, the higher the uniformity of the spot, but the length of the trapezoidal beam expander 3 also increases correspondingly, therefore, its value needs to be selected Appropriate value.
  • Trapezoidal beam expander 3 has the side length of the inner port at the input end as D i , the side length of the inner port at the output port as D o , and the ratio of D o to D i is the gradient T, which needs to satisfy:
  • the right part of the inequality greater than or equal to the sign is the corresponding bottom aperture of the incident trapezoidal beam expander 3 when the edge light of the laser is reflected for the ith time (that is, the cross-sectional diameter at the reflection point on the inner wall of the trapezoidal beam expander 3 during the ith reflection) and
  • the gradient T is the same as the ratio, it just satisfies the i-time reflection condition of the marginal ray, and when the gradient T is greater than this ratio, there will be more Light rays at small angles within the marginal rays of the light participate in reflection, and the output spot is more uniform at this time.
  • a uniform spot shaping system of the present invention after the incident laser light is diverged by the concave lens 4, when the light traces, it can be regarded as the area within the divergence angle is divided into countless light rays, and the edge light rays and the small-angle light rays within the trapezoidal
  • the continuous reflection in the beam expander 3 readjusts the distribution of the light field, the uniformity of the spot is continuously improved, and the angles of each light are also constantly changing.
  • the overall light distribution can be approximated as that of the laser light, which is slightly larger than the inclination angle of the trapezoidal beam expander 3.
  • the system of the present invention has a continuous working distance, within the maximum working distance , the light is emitted in the form of filling the rectangular output port of the entire trapezoidal beam expander 3, so the output spot of the system is rectangular, and a uniform rectangular spot can be obtained. If the output port of the trapezoidal beam expander 3 is changed to other shapes, uniform light spots of corresponding shapes can also be obtained. The larger the number of reflections i is, the more uniform the rectangular uniform spot is obtained. The larger the length H of the trapezoidal beam expander 3, the higher the uniformity.
  • the gradient T and the inclination angle ⁇ are determined accordingly, and then the length of the inner port side of the output port D o is set according to the actual application spot size requirements, and the inner port side length of the input port is The length D i and the length H are determined accordingly.
  • FIG. 4 (a) is the three-dimensional diagram and the illuminance diagram of the light spot after the laser beam is refracted by the concave lens 4, it is obvious that the energy distribution is a Gaussian distribution
  • Fig. 4 (b) is the light spot receiving end surface and the trapezoid
  • the distance from the output end of the beam expander 3 is respectively the three-dimensional diagram and the illuminance diagram of the square uniform light spot of 0cm and 6cm.
  • the size of the light spot is respectively 4cm ⁇ 4cm and 5.2cm ⁇ 5.2cm. As the distance increases, the uniformity of the light spot decreases.
  • the uniformity of the light spot is 78.3%.
  • the distance between the receiving end face of the light spot and the output end of the trapezoidal beam expander 3 can be between Choose between 15cm.
  • the concave lens 4 has a curvature of 0.2 and a diameter of 8mm; trapezoidal
  • the length of the beam expander 3 is 400 mm, the thickness is 2 mm, the side length of the inner opening of the input end is 10 mm, and the side length of the inner opening of the output end is 100 mm.
  • FIG. 5 (a) is the three-dimensional diagram and the illuminance diagram of the light spot after the laser beam is refracted by the concave lens 4, and the energy distribution is a Gaussian distribution
  • Fig. 5 (b), (c) are the light spot receiving end face and the trapezoidal expansion
  • the distance between the output end of the beam device 3 is respectively 0cm, 5cm, and the three-dimensional map and the illumination map of the square uniform spot.
  • the uniformity of the spot decreases.
  • the uniformity of the spot is 79.4%. 3
  • the distance of the output end can be selected between 0-14cm.
  • the length of the beam expander 3 is 2.1m, the thickness is 2mm, the side length of the inner opening of the input end is 10mm, and the side length of the inner opening of the output end is 1m.
  • the spot size is 1.12m ⁇ 1.12m, and the distance between the receiving end face of the light spot and the output end of the trapezoidal beam expander 3 can be selected between 0-20cm.

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  • General Physics & Mathematics (AREA)
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Abstract

A uniform light spot shaping system, comprising a quartz optical fiber (1), an end cap (2) and a trapezoidal beam expander (3); an input end face of the end cap (2) is a plane, and an output end face comprises an inner concave lens (4) and an annular plane, the inner concave lens (4) being located at the center of the output end face, and the annular plane surrounding the periphery of the inner concave lens (4); the trapezoidal beam expander (3) is formed by splicing four trapezoidal quartz plates into a tubular structure, the upper bases of the trapezoidal quartz plates forming an input end of the trapezoidal beam expander (3), and the lower bases of the trapezoidal quartz plates forming an output end of the trapezoidal beam expander (3); and the input end face of the end cap (2) is welded to one end of the quartz optical fiber (1), and the annular plane is connected to the input end of the trapezoidal beam expander (3). The uniform light spot shaping system is suitable for shaping high-power laser light, and has a certain continuous operating distance, so that a rectangular uniform light spot may be obtained both at and within the maximum working distance.

Description

一种均匀光斑整形***A uniform light spot shaping system 技术领域technical field
本发明涉及激光整形领域,尤其涉及一种均匀光斑整形***。The invention relates to the field of laser shaping, in particular to a uniform light spot shaping system.
背景技术Background technique
激光研究及应用的一个重要研究方向就是激光整形。激光器发出的激光光斑一般为能量高斯分布的圆形光斑,能量中间高,两端低,均匀度很低,但不仅在传统的激光热加工如激光淬火、激光熔覆、激光合金化等应用中,而且在激光供能,光信息处理、储存、记录,激光医学等应用中都对激光能量均匀度有很大要求。实际应用中,尤其对高功率激光的光斑均匀化需求日益增加。圆形光斑则不仅在激光供能中与光电池尺寸不匹配造成光电转化效率低,并且同时在激光熔覆、激光合金化等应用中同样存在与工作面形状不匹配导致加工效率低的问题。An important research direction of laser research and application is laser shaping. The laser spot emitted by the laser is generally a circular spot with Gaussian energy distribution, the energy is high in the middle, low at both ends, and the uniformity is very low, but not only in traditional laser thermal processing such as laser quenching, laser cladding, laser alloying and other applications , and in laser energy supply, optical information processing, storage, recording, laser medicine and other applications, there are great requirements on the uniformity of laser energy. In practical applications, especially the demand for spot homogenization of high-power lasers is increasing. The circular spot not only does not match the size of the photocell in the laser energy supply, resulting in low photoelectric conversion efficiency, but also has the problem of mismatching the shape of the working surface in applications such as laser cladding and laser alloying, resulting in low processing efficiency.
在激光供能等场合的应用中,需要将激光光斑转换为均匀分布且具有与光电池尺寸相匹配的大光斑,即需要将激光光斑进行扩束并转换为均匀分布的光斑。在聚光光伏***中常用梯形聚光器以提高光斑均匀度和实现聚光,太阳光在聚光器中二次聚光,经多次反射后在聚光器出口处得到均匀度较高的方形光斑。但该***只能在贴近梯形聚光器的出口处得到均匀的光斑,即使离梯形聚光器出口几毫米处的光斑均匀度也会下降很大,以至于工作面离开聚光器出口就得不到均匀的光斑;并且该***会在梯形聚光器内形成聚光焦点,若激光功率过高则会导致空气击穿,***稳定性低,故不适合做高功率激光的整形;再者,这种梯形聚光器具有聚光作用,聚光比大于1,即输出光斑尺寸小于输入光斑尺寸,若要得到大光斑,则聚光器光输入端必须设计的更大,且聚光器长度必须增加,***变得庞大笨重。In applications such as laser power supply, it is necessary to convert the laser spot into a uniformly distributed large spot that matches the size of the photocell, that is, it is necessary to expand the laser spot and convert it into a uniformly distributed spot. The trapezoidal concentrator is commonly used in the concentrating photovoltaic system to improve the uniformity of the light spot and realize the concentrating. Square spot. However, this system can only obtain a uniform light spot close to the exit of the trapezoidal concentrator, and even a few millimeters away from the exit of the trapezoidal concentrator, the uniformity of the light spot will drop greatly, so that the working surface has to leave the exit of the concentrator. less than a uniform spot; and the system will form a focal point in the trapezoidal concentrator. If the laser power is too high, it will cause air breakdown and the system stability is low, so it is not suitable for high-power laser shaping; moreover , this kind of trapezoidal concentrator has a concentrating effect, and the concentrating ratio is greater than 1, that is, the output spot size is smaller than the input spot size. If a large spot is to be obtained, the light input end of the concentrator must be designed larger, and the concentrator The length had to increase and the system became bulky and unwieldy.
发明内容Contents of the invention
针对现有技术中存在不足,本发明提供了一种均匀光斑整形***,适用于高功率激光的整形,在输出端面至一定距离范围内都可以得到矩形的均匀光斑。Aiming at the deficiencies in the prior art, the present invention provides a uniform light spot shaping system, which is suitable for high-power laser shaping, and can obtain rectangular uniform light spots within a range from the output end face to a certain distance.
本发明是通过以下技术手段实现上述技术目的的。The present invention achieves the above-mentioned technical purpose through the following technical means.
一种均匀光斑整形***,包括石英光纤、端帽和梯形扩束器;A uniform spot shaping system, including a silica fiber, an end cap, and a trapezoidal beam expander;
所述端帽的输入端面为平面,输出端面包括内凹透镜和环形平面,所述内凹透镜位于所述输出端面的中心,所述环形平面围绕所述内凹透镜四周;The input end surface of the end cap is a plane, the output end surface includes a concave lens and an annular plane, the concave lens is located at the center of the output end surface, and the annular plane surrounds the concave lens;
所述梯形扩束器由四块梯形石英板拼接组成管状结构,所述梯形石英板的上底围成所述梯形扩束器的输入端,所述梯形石英板的下底围成所述梯形扩束器的输出端;The trapezoidal beam expander is spliced by four trapezoidal quartz plates to form a tubular structure, the upper bottom of the trapezoidal quartz plate forms the input end of the trapezoidal beam expander, and the lower bottom of the trapezoidal quartz plate forms the trapezoidal output of the beam expander;
所述端帽的输入端面与石英光纤的一端熔接,所述环形平面与所述梯形扩束器的输入端 连接。The input end face of the end cap is fused with one end of the quartz optical fiber, and the annular plane is connected with the input end of the trapezoidal beam expander.
优选的,所述端帽由纯石英组成,所述端帽的侧面形状为四棱台,所述四棱台的窄端面为所述端帽的输入端面,所述四棱台的宽端面为所述端帽的输出端面。Preferably, the end cap is made of pure quartz, the side shape of the end cap is a square truss, the narrow end face of the four prism is the input end face of the end cap, and the wide end face of the four prism is the output end face of the end cap.
优选的,所述内凹透镜在端帽输出端面上的圆形区直径大于出射到所述端帽输出端面上的激光光斑的直径。Preferably, the diameter of the circular area of the concave lens on the output end surface of the end cap is larger than the diameter of the laser spot emitted on the output end surface of the end cap.
优选的,所述梯形扩束器由四块梯形石英板拼接组成,所述梯形扩束器的输入端和输出端的内口和外口均为正方形,所述梯形扩束器输入端的内口边长为D i,所述内凹透镜在所述端帽的输出端面上的圆形区直径为D e,D i>D ePreferably, the trapezoidal beam expander is composed of four trapezoidal quartz plates, the inner and outer openings of the input end and the output end of the trapezoidal beam expander are square, and the inner opening edge of the input end of the trapezoidal beam expander The length is D i , the diameter of the circular area of the concave lens on the output end face of the end cap is De, and D i > D e .
优选的,所述梯形扩束器的内表面镀有高反射膜。Preferably, the inner surface of the trapezoidal beam expander is coated with a high reflection film.
优选的,所述梯形扩束器的倾斜角α,需满足:Preferably, the inclination angle α of the trapezoidal beam expander needs to satisfy:
Figure PCTCN2021142461-appb-000001
Figure PCTCN2021142461-appb-000001
且有
Figure PCTCN2021142461-appb-000002
and have
Figure PCTCN2021142461-appb-000002
其中,θ为激光经端帽传播后的发散角;i为激光光线在梯形扩束器内的反射次数,为大于1的自然数;梯形扩束器的输入端内口边长为D i,输出端内口边长为D o,D o与D i的比值为梯度T,需满足: Among them, θ is the divergence angle of the laser beam after propagating through the end cap; i is the number of reflections of the laser light in the trapezoidal beam expander, which is a natural number greater than 1; the input side of the trapezoidal beam expander is D i , and the output The side length of the inner port is D o , and the ratio of D o to D i is the gradient T, which needs to satisfy:
Figure PCTCN2021142461-appb-000003
Figure PCTCN2021142461-appb-000003
本发明的有益效果:Beneficial effects of the present invention:
1)本发明的端帽,激光从光纤进入端帽,由于没有光纤包层的束缚,能做自由空间的传输,有效的增大输出端面光场面积,从而降低了光功率密度,因此能够有效的解决大功率激光造成光纤端面损伤问题;其次本发明用凹透镜来代替常规聚光光伏***中使用的凸透镜,使得本发明***不会产生激光聚焦焦点,可避免大功率激光造成的空气击穿,故本发明适用于高功率激光的整形。1) In the end cap of the present invention, the laser enters the end cap from the optical fiber, since there is no constraint of the fiber cladding, it can be transmitted in free space, effectively increasing the output end surface light field area, thereby reducing the optical power density, so it can effectively Solve the problem of damage to the fiber end face caused by high-power lasers; secondly, the present invention uses concave lenses to replace the convex lenses used in conventional concentrating photovoltaic systems, so that the system of the present invention will not produce laser focus points, and air breakdown caused by high-power lasers can be avoided. Therefore, the present invention is suitable for shaping of high-power lasers.
2)本发明的端帽将凹透镜和光纤端帽整合在一起,易于制作,并将端帽与梯形扩束器直接连接在一起,整个***不再是分离的结构,即本发明***是一体化的,结构紧凑,占用空间小。2) The end cap of the present invention integrates the concave lens and the optical fiber end cap, which is easy to manufacture, and the end cap and the trapezoidal beam expander are directly connected together, the whole system is no longer a separate structure, that is, the system of the present invention is integrated , compact structure, small footprint.
3)本发明***具有一定的连续工作距离,在最大工作距离及其之内都可以得到矩形的均匀光斑,可根据实际需求的工作距离和光斑大小,调整***参数,设置工作面距梯形扩束器 输出端面的距离,得到满足要求的输出光斑。3) The system of the present invention has a certain continuous working distance, and a uniform rectangular spot can be obtained at the maximum working distance and within it. The system parameters can be adjusted according to the actual working distance and spot size, and the distance between the working surface and the trapezoidal beam expander can be set. The distance from the output end face of the device can be obtained to obtain the output spot that meets the requirements.
附图说明Description of drawings
图1为本发明的一种均匀光斑整形***的结构示意图。FIG. 1 is a schematic structural diagram of a uniform spot shaping system of the present invention.
图2为本发明的端帽四棱台结构的切面图。Fig. 2 is a sectional view of the quadrangular truss structure of the end cap of the present invention.
图3为本发明激光在端帽中传播原理示意图。Fig. 3 is a schematic diagram of the principle of laser propagation in the end cap of the present invention.
图4为本发明具体实施例1中的光斑三维图和照度图,其中(a)为激光经端帽后的光斑图;(b)、(c)分别为距离梯形扩束器输出端为0cm,6cm时的光斑图。Fig. 4 is the light spot three-dimensional figure and the illuminance figure in the concrete embodiment 1 of the present invention, wherein (a) is the light spot figure after the end cap of the laser; , Spot diagram at 6cm.
图5为本发明具体实施例2中的光斑三维图和照度图,其中(a)为激光经端帽后的光斑图;(b)、(c)分别为距离梯形扩束器输出端为0cm,5cm时的光斑图。Fig. 5 is the three-dimensional diagram and the illuminance diagram of the spot in the specific embodiment 2 of the present invention, wherein (a) is the spot diagram after the laser passes through the end cap; (b), (c) are that the distance from the output end of the trapezoidal beam expander is 0 cm respectively , Spot diagram at 5cm.
图6为本发明具体实施例3中的距离梯形扩束器输出端为0cm时的光斑三维图和照度图。Fig. 6 is a three-dimensional diagram and an illuminance diagram of the light spot when the distance from the output end of the trapezoidal beam expander is 0 cm in Embodiment 3 of the present invention.
图中:1-石英光纤,2-端帽,3-梯形扩束器,4-凹透镜In the figure: 1-silica fiber, 2-end cap, 3-trapezoidal beam expander, 4-concave lens
具体实施方式Detailed ways
下面详细描述本发明的实施例,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,旨在用于解释本发明,而不能理解为对本发明的限制。Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“轴向”、“径向”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。在本发明的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In describing the present invention, it is to be understood that the terms "central", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "axial", The orientation or positional relationship indicated by "radial", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description , rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operate in a particular orientation, and thus should not be construed as limiting the invention. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.
在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrally connected; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.
下面首先结合附图具体描述根据本发明实施例的一种均匀光斑整形***。A uniform spot shaping system according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.
请参阅图1至3,根据本发明实施例的一种均匀光斑整形***,包括石英光纤1,端帽2,梯形扩束器3。Referring to FIGS. 1 to 3 , a uniform spot shaping system according to an embodiment of the present invention includes a quartz optical fiber 1 , an end cap 2 , and a trapezoidal beam expander 3 .
端帽2由纯石英组成,端帽2的输入端面为平面,输出端面中心缺失一个球冠形成内凹 透镜结构,使得输出端面包括内凹透镜4和环形平面,内凹透镜4位于输出端面的中心,环形平面围绕内凹透镜4四周。作为优选,内凹透镜4在端帽2输出端面上的圆形区直径大于出射到端帽2输出端面上的激光光斑的直径。The end cap 2 is composed of pure quartz. The input end face of the end cap 2 is a plane, and a spherical cap is missing in the center of the output end face to form a concave lens structure, so that the output end face includes a concave lens 4 and a ring plane. The concave lens 4 is located at the center of the output end face, and the ring shape The plane surrounds the concave lens 4 around. Preferably, the diameter of the circular area of the concave lens 4 on the output end surface of the end cap 2 is larger than the diameter of the laser spot emitted on the output end surface of the end cap 2 .
进一步的,如图2所示,端帽2为四棱台结构,四棱台的窄端面为端帽2的输入端面,四棱台的宽端面为端帽2的输出端面。Further, as shown in FIG. 2 , the end cap 2 has a square truss structure, the narrow end face of the four prism is the input end face of the end cap 2 , and the wide end face of the four prism is the output end face of the end cap 2 .
梯形扩束器3由四块梯形石英板拼接组成管状结构,梯形石英板的上底围成梯形扩束器3的输入端,梯形石英板的下底围成梯形扩束器3的输出端,梯形扩束器3的输入端和输出端的内口和外口均为正方形,梯形扩束器3输入端的内口宽度为D i,内凹透镜4在端帽2的输出端面上的圆形区直径为D e,D i>D e。作为优选,梯形扩束器3的内表面镀有高反射膜,可以有效提高梯形扩束器3内壁反射率,从而提高整形效果。 The trapezoidal beam expander 3 is spliced by four trapezoidal quartz plates to form a tubular structure. The upper bottom of the trapezoidal quartz plate forms the input end of the trapezoidal beam expander 3, and the lower bottom of the trapezoidal quartz plate forms the output end of the trapezoidal beam expander 3. The inner and outer openings of the input end and the output end of the trapezoidal beam expander 3 are square, the width of the inner opening of the input end of the trapezoidal beam expander 3 is D i , and the diameter of the circular area of the concave lens 4 on the output end face of the end cap 2 is is D e , D i >D e . Preferably, the inner surface of the trapezoidal beam expander 3 is coated with a high-reflection film, which can effectively increase the reflectivity of the inner wall of the trapezoidal beam expander 3, thereby improving the shaping effect.
端帽2的输入端面与石英光纤1的一端熔接,端帽2的环形平面与梯形扩束器3的输入端连接。The input end surface of the end cap 2 is fused with one end of the quartz optical fiber 1 , and the annular plane of the end cap 2 is connected with the input end of the trapezoidal beam expander 3 .
激光在端帽2中经凹透镜4发散并经梯形扩束器3扩束,实现扩束功能,同时,在两者综合作用下,形成均匀分布的方形光斑。激光在端帽2中传播后的发散角为:The laser light diverges through the concave lens 4 in the end cap 2 and expands the beam through the trapezoidal beam expander 3 to realize the beam expansion function. At the same time, under the combined action of the two, a uniformly distributed square spot is formed. The divergence angle of the laser after propagating in the end cap 2 is:
θ=θ 20 θ=θ 20
其中:
Figure PCTCN2021142461-appb-000004
in:
Figure PCTCN2021142461-appb-000004
Figure PCTCN2021142461-appb-000005
Figure PCTCN2021142461-appb-000005
折射定律:sinθ 2=n 2sinθ 1 The law of refraction: sinθ 2 = n 2 sinθ 1
NA为光纤数值孔径,n 2为石英光纤1纤芯及光纤端帽折射率,r core为石英光纤1纤芯半径,R为凹透镜曲率半径,θ 1为端帽2中传输的激光的边缘光线入射至凹透镜4的入射角,θ 2为折射角,θ 0为边缘光线入射至凹透镜4时绘图分析所作的法线与水平线夹角,d为激光传输到凹透镜4时的光斑半径,d 0为端帽输入端到凹透镜4的长度。 NA is the numerical aperture of the fiber, n 2 is the refractive index of the silica fiber 1 core and the fiber end cap, r core is the radius of the silica fiber 1 core, R is the curvature radius of the concave lens, and θ 1 is the edge light of the laser transmitted in the end cap 2 Incident to the angle of incidence of the concave lens 4, θ 2 is the refraction angle, θ 0 is the angle between the normal line and the horizontal line made by drawing analysis when the marginal light is incident on the concave lens 4, d is the spot radius when the laser light is transmitted to the concave lens 4, and d 0 is The length from the input end of the end cap to the concave lens 4.
作为优选,梯形扩束器3的倾斜角α需满足:Preferably, the inclination angle α of the trapezoidal beam expander 3 needs to satisfy:
Figure PCTCN2021142461-appb-000006
Figure PCTCN2021142461-appb-000006
且有
Figure PCTCN2021142461-appb-000007
and have
Figure PCTCN2021142461-appb-000007
其中,θ为激光经端帽2传播后的发散角;i为激光光线在梯形扩束器3内的反射次数,为大于1的自然数,其数值由梯形扩束器3设计时人为确定,一般地,i=2,3时,***就具有较高均匀度的光斑,i设定得越大,光斑均匀度越高,但梯形扩束器3的长度也相应增加,因此,其值需要选择适当值。Among them, θ is the divergence angle of the laser light after it propagates through the end cap 2; i is the number of reflections of the laser light in the trapezoidal beam expander 3, which is a natural number greater than 1, and its value is determined artificially when the trapezoidal beam expander 3 is designed. Generally, when i=2, 3, the system has a higher uniformity of the spot, the larger i is set, the higher the uniformity of the spot, but the length of the trapezoidal beam expander 3 also increases correspondingly, therefore, its value needs to be selected Appropriate value.
梯形扩束器3的输入端内口边长为D i,输出端内口边长为D o,D o与D i的比值为梯度T,需满足: Trapezoidal beam expander 3 has the side length of the inner port at the input end as D i , the side length of the inner port at the output port as D o , and the ratio of D o to D i is the gradient T, which needs to satisfy:
Figure PCTCN2021142461-appb-000008
Figure PCTCN2021142461-appb-000008
其中不等式大于等于号右边部分为入射梯形扩束器3的激光边缘光线反射第i次时对应的底面口径(即第i次反射时,梯形扩束器3内壁反射点处的横截面口径)与梯形扩束器输入端内口径的比值,梯度T和该比值相同时,则刚好满足边缘光线i次反射条件,梯度T大于该比值时,在满足边缘光线i次反射条件下,会有更多的边缘光线以内的小角度光线参与反射,此时输出光斑更加均匀。Wherein, the right part of the inequality greater than or equal to the sign is the corresponding bottom aperture of the incident trapezoidal beam expander 3 when the edge light of the laser is reflected for the ith time (that is, the cross-sectional diameter at the reflection point on the inner wall of the trapezoidal beam expander 3 during the ith reflection) and When the ratio of the inner diameter of the input port of the trapezoidal beam expander, the gradient T is the same as the ratio, it just satisfies the i-time reflection condition of the marginal ray, and when the gradient T is greater than this ratio, there will be more Light rays at small angles within the marginal rays of the light participate in reflection, and the output spot is more uniform at this time.
本发明的一种均匀光斑整形***,入射激光经内凹透镜4发散后,光线追迹时,可看作发散角之内的区域分割成无数条光线,边缘光线及其以内的小角度光线在梯形扩束器3内不断的反射,重新调整了光场分布,光斑均匀度不断提高,同时各光线角度也不断的变化,最后总体光线分布可近似为激光以略大于梯形扩束器3的倾斜角α的发散角半角从梯形扩束器3的输出端口出射,故在距***输出端口一定距离内,光线都保持这种角度特性,因此,本发明***具有连续的工作距离,在最大工作距离以内,光线是以充满整个梯形扩束器3矩形形状的输出端口的形式出射,故***输出光斑为矩形,即可以获得均匀的矩形光斑。若将梯形扩束器3输出端口改成其他形状,同样可以得到相应形状的均匀光斑。反射次数i越大,则得到的矩形均匀光斑越均匀。梯形扩束器3长度H越大,均匀度越高。In a uniform spot shaping system of the present invention, after the incident laser light is diverged by the concave lens 4, when the light traces, it can be regarded as the area within the divergence angle is divided into countless light rays, and the edge light rays and the small-angle light rays within the trapezoidal The continuous reflection in the beam expander 3 readjusts the distribution of the light field, the uniformity of the spot is continuously improved, and the angles of each light are also constantly changing. Finally, the overall light distribution can be approximated as that of the laser light, which is slightly larger than the inclination angle of the trapezoidal beam expander 3. The half angle of the divergence angle of α emerges from the output port of the trapezoidal beam expander 3, so within a certain distance from the output port of the system, the light maintains this angular characteristic. Therefore, the system of the present invention has a continuous working distance, within the maximum working distance , the light is emitted in the form of filling the rectangular output port of the entire trapezoidal beam expander 3, so the output spot of the system is rectangular, and a uniform rectangular spot can be obtained. If the output port of the trapezoidal beam expander 3 is changed to other shapes, uniform light spots of corresponding shapes can also be obtained. The larger the number of reflections i is, the more uniform the rectangular uniform spot is obtained. The larger the length H of the trapezoidal beam expander 3, the higher the uniformity.
当对梯形扩束器3设计时,设定反射次数i之后,梯度T和倾斜角α随之确定,然后由实际应用光斑大小需求设定输出端内口边长D o,输入端内口边长D i及长度H随之确定。 When designing the trapezoidal beam expander 3, after setting the number of reflections i, the gradient T and the inclination angle α are determined accordingly, and then the length of the inner port side of the output port D o is set according to the actual application spot size requirements, and the inner port side length of the input port is The length D i and the length H are determined accordingly.
优选实施例1:选用20/400μm单模石英光纤1,NA=0.06,端帽2长度为20mm,输入端边长为2mm,输出端边长为10mm;凹透镜4曲率为0.6,直径3.2mm;梯形扩束器3长度为235mm,厚度为2mm,输入端内口边长为6mm,输出端内口边长为40mm。如附图4所示,图4(a)为激光经凹透镜4折射后的光斑的三维图及照度图,显而易见能量分布为高斯分布,图4(b)、(c)是光斑接收端面与梯形扩束器3输出端的距离分别为0cm、6cm方形均匀光斑的三维图及照度图,光斑大小分别为4cm×4cm、5.2cm×5.2cm,光斑均匀度分别为90%、 84.1%,随着工作距离的增加,光斑的均匀度下降,当光斑接收端面与梯形扩束器3输出端的距离为15cm时,光斑均匀度为78.3%,光斑接收端面与梯形扩束器3输出端的距离可在0-15cm之间选择。Preferred embodiment 1: select 20/400 μm single-mode silica fiber 1, NA=0.06, the length of end cap 2 is 20 mm, the side length of input end is 2 mm, the side length of output end is 10 mm; the curvature of concave lens 4 is 0.6, and the diameter is 3.2 mm; The length of the trapezoidal beam expander 3 is 235 mm, the thickness is 2 mm, the side length of the inner opening of the input end is 6 mm, and the side length of the inner opening of the output end is 40 mm. As shown in accompanying drawing 4, Fig. 4 (a) is the three-dimensional diagram and the illuminance diagram of the light spot after the laser beam is refracted by the concave lens 4, it is obvious that the energy distribution is a Gaussian distribution, Fig. 4 (b), (c) is the light spot receiving end surface and the trapezoid The distance from the output end of the beam expander 3 is respectively the three-dimensional diagram and the illuminance diagram of the square uniform light spot of 0cm and 6cm. The size of the light spot is respectively 4cm×4cm and 5.2cm×5.2cm. As the distance increases, the uniformity of the light spot decreases. When the distance between the receiving end face of the light spot and the output end of the trapezoidal beam expander 3 is 15cm, the uniformity of the light spot is 78.3%. The distance between the receiving end face of the light spot and the output end of the trapezoidal beam expander 3 can be between Choose between 15cm.
优选实施例2:选用100/360μm多模石英光纤1,NA=0.22,端帽2长度为14mm,输入端边长为2mm,输出端边长为14mm;凹透镜4曲率为0.2,直径8mm;梯形扩束器3长度为400mm,厚度为2mm,输入端内口边长为10mm,输出端内口边长为100mm。如附图5所示,图5(a)为激光经凹透镜4折射后的光斑的三维图及照度图,能量分布为高斯分布,图5(b)、(c)是光斑接收端面与梯形扩束器3输出端的距离分别为0cm、5cm方形均匀光斑的三维图及照度图,光斑大小分别为10.4cm×10.4cm、12cm×12cm,光斑均匀度分别为87.2%、84.3%,随着光斑接收端面与梯形扩束器3输出端距离的增加,光斑的均匀度下降,当光斑接收端面与梯形扩束3输出端的距离为14cm时,光斑均匀度为79.4%,光斑接收端面与梯形扩束器3输出端的距离可在0-14cm之间选择。Preferred embodiment 2: select 100/360 μm multimode silica fiber 1 for use, NA=0.22, the end cap 2 length is 14mm, the side length of the input end is 2mm, and the side length of the output end is 14mm; The concave lens 4 has a curvature of 0.2 and a diameter of 8mm; trapezoidal The length of the beam expander 3 is 400 mm, the thickness is 2 mm, the side length of the inner opening of the input end is 10 mm, and the side length of the inner opening of the output end is 100 mm. As shown in accompanying drawing 5, Fig. 5 (a) is the three-dimensional diagram and the illuminance diagram of the light spot after the laser beam is refracted by the concave lens 4, and the energy distribution is a Gaussian distribution, Fig. 5 (b), (c) are the light spot receiving end face and the trapezoidal expansion The distance between the output end of the beam device 3 is respectively 0cm, 5cm, and the three-dimensional map and the illumination map of the square uniform spot. As the distance between the end face and the output end of the trapezoidal beam expander 3 increases, the uniformity of the spot decreases. When the distance between the receiving end face of the light spot and the output end of the trapezoidal beam expander 3 is 14cm, the uniformity of the spot is 79.4%. 3 The distance of the output end can be selected between 0-14cm.
优选实施例3:选用100/360μm多模石英光纤1,NA=0.22,端帽2长度为14mm,输入端边长为2mm,输出端边长为14mm;凹透镜4曲率为0.2,直径8mm;梯形扩束器3长度为2.1m,厚度为2mm,输入端内口边长为10mm,输出端内口边长为1m。实施例3与实施例2所用端帽2结构大小及石英光纤1完全相同,故本实施例3激光经凹透镜4折射后的光斑的三维图及照度图如图5(a)所示。如附图6所示,光斑接收端面与梯形扩束器3输出端的距离为0cm时方形均匀光斑的三维图及照度图,得到了1m×1m的大尺寸方形均匀光斑,均匀度为81.3%,随着光斑接收端面与梯形扩束器3输出端的距离的增加,光斑的均匀度会下降,当光斑接收端面与梯形扩束器3输出端的距离为20cm时,光斑均匀度为80.4%,此时光斑大小为1.12m×1.12m,光斑接收端面与梯形扩束器3输出端的距离可在0-20cm之间选择。Preferred embodiment 3: select 100/360 μm multimode silica fiber 1 for use, NA=0.22, end cap 2 length is 14mm, input end side length is 2mm, output end side length is 14mm; concave lens 4 curvature is 0.2, diameter 8mm; trapezoidal The length of the beam expander 3 is 2.1m, the thickness is 2mm, the side length of the inner opening of the input end is 10mm, and the side length of the inner opening of the output end is 1m. The structure and size of the end cap 2 and the silica fiber 1 used in Embodiment 3 and Embodiment 2 are exactly the same, so the three-dimensional diagram and illuminance diagram of the light spot after the laser beam is refracted by the concave lens 4 in Embodiment 3 are shown in Figure 5(a). As shown in accompanying drawing 6, when the distance between the receiving end face of the light spot and the output end of the trapezoidal beam expander 3 is 0cm, the three-dimensional diagram and the illuminance diagram of the square uniform light spot have obtained a large-sized square uniform light spot of 1m * 1m, and the uniformity is 81.3%. Along with the increase of the distance between the receiving end face of the light spot and the output end of the trapezoidal beam expander 3, the uniformity of the light spot will decrease. The spot size is 1.12m×1.12m, and the distance between the receiving end face of the light spot and the output end of the trapezoidal beam expander 3 can be selected between 0-20cm.
在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or characteristic is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
尽管上面已经示出和描述了本发明的实施例,可以理解的是,上述实施例是示例性的,不能理解为对本发明的限制,本领域的普通技术人员在不脱离本发明的原理和宗旨的情况下在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be construed as limitations to the present invention. Variations, modifications, substitutions, and modifications to the above-described embodiments are possible within the scope of the present invention.

Claims (6)

  1. 一种均匀光斑整形***,其特征在于,包括石英光纤(1)、端帽(2)和梯形扩束器(3);A uniform spot shaping system, characterized in that it comprises a quartz optical fiber (1), an end cap (2) and a trapezoidal beam expander (3);
    所述端帽(2)的输入端面为平面,输出端面包括内凹透镜(4)和环形平面,所述内凹透镜(4)位于所述输出端面的中心,所述环形平面围绕所述内凹透镜(4)四周;The input end surface of the end cap (2) is a plane, and the output end surface includes a concave lens (4) and an annular plane, the concave lens (4) is located at the center of the output end surface, and the annular plane surrounds the concave lens ( 4) around;
    所述梯形扩束器(3)由四块梯形石英板拼接组成管状结构,所述梯形石英板的上底围成所述梯形扩束器(3)的输入端,所述梯形石英板的下底围成所述梯形扩束器(3)的输出端;The trapezoidal beam expander (3) is spliced by four trapezoidal quartz plates to form a tubular structure, the upper bottom of the trapezoidal quartz plate surrounds the input end of the trapezoidal beam expander (3), and the lower part of the trapezoidal quartz plate The bottom surrounds the output end of the trapezoidal beam expander (3);
    所述端帽(2)的输入端面与石英光纤(1)的一端熔接,所述环形平面与所述梯形扩束器(3)的输入端连接。The input end face of the end cap (2) is fused with one end of the quartz optical fiber (1), and the annular plane is connected with the input end of the trapezoidal beam expander (3).
  2. 根据权利要求1所述的均匀光斑整形***,其特征在于,所述端帽(2)由纯石英组成,所述端帽(2)的侧面形状为四棱台,所述四棱台的窄端面为所述端帽(2)的输入端面,所述四棱台的宽端面为所述端帽(2)的输出端面。The uniform spot shaping system according to claim 1, characterized in that, the end cap (2) is made of pure quartz, the side shape of the end cap (2) is a square truss, and the narrow side of the four prism is The end face is the input end face of the end cap (2), and the wide end face of the square truss is the output end face of the end cap (2).
  3. 根据权利要求1所述的均匀光斑整形***,其特征在于,所述内凹透镜(4)在端帽(2)输出端面上的圆形区直径大于出射到所述端帽(2)输出端面上的激光光斑的直径。The uniform light spot shaping system according to claim 1, characterized in that, the diameter of the circular area of the concave lens (4) on the output end surface of the end cap (2) is larger than that emitted to the output end surface of the end cap (2). The diameter of the laser spot.
  4. 根据权利要求1所述的均匀光斑整形***,其特征在于,所述梯形扩束器(3)由四块梯形石英板拼接组成,所述梯形扩束器(3)输入端的内口和外口以及输出端的内口和外口均为正方形,所述梯形扩束器(3)输入端的内口边长为D i,所述内凹透镜(4)在所述端帽(2)的输出端面上的圆形区直径为D e,D i>D eThe uniform spot shaping system according to claim 1, wherein the trapezoidal beam expander (3) is composed of four trapezoidal quartz plates spliced together, and the inner and outer ports of the input end of the trapezoidal beam expander (3) And the inner and outer openings of the output end are square, the inner opening side length of the input end of the trapezoidal beam expander (3) is D i , and the concave lens (4) is on the output end face of the end cap (2) The diameter of the circular area is D e , D i >D e .
  5. 根据权利要求1所述的均匀光斑整形***,其特征在于,所述梯形扩束器(3)的内表面镀有高反射膜。The uniform spot shaping system according to claim 1, characterized in that the inner surface of the trapezoidal beam expander (3) is coated with a high reflection film.
  6. 根据权利要求5所述的均匀光斑整形***,其特征在于,所述梯形扩束器(3)的倾斜角α,需满足:The uniform spot shaping system according to claim 5, wherein the tilt angle α of the trapezoidal beam expander (3) needs to satisfy:
    Figure PCTCN2021142461-appb-100001
    Figure PCTCN2021142461-appb-100001
    且有
    Figure PCTCN2021142461-appb-100002
    and have
    Figure PCTCN2021142461-appb-100002
    其中,θ为激光经端帽(2)传播后的发散角;i为激光光线在梯形扩束器(3)内的反射次数,为大于1的自然数;梯形扩束器(3)的输入端内口边长为D i,输出端内口边长为D o,D o与D i的比值为梯度T,需满足: Wherein, θ is the divergence angle after the laser beam propagates through the end cap (2); i is the number of reflections of the laser light in the trapezoidal beam expander (3), which is a natural number greater than 1; the input end of the trapezoidal beam expander (3) The side length of the inner port is D i , the side length of the inner port of the output port is D o , and the ratio of D o to D i is the gradient T, which needs to satisfy:
    Figure PCTCN2021142461-appb-100003
    Figure PCTCN2021142461-appb-100003
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