WO2023095943A1 - Plateforme pour miroir déformable - Google Patents

Plateforme pour miroir déformable Download PDF

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Publication number
WO2023095943A1
WO2023095943A1 PCT/KR2021/017400 KR2021017400W WO2023095943A1 WO 2023095943 A1 WO2023095943 A1 WO 2023095943A1 KR 2021017400 W KR2021017400 W KR 2021017400W WO 2023095943 A1 WO2023095943 A1 WO 2023095943A1
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WO
WIPO (PCT)
Prior art keywords
deformable mirror
horizontal
platform
deformable
base plate
Prior art date
Application number
PCT/KR2021/017400
Other languages
English (en)
Korean (ko)
Inventor
나자경
Original Assignee
나자경
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 나자경 filed Critical 나자경
Publication of WO2023095943A1 publication Critical patent/WO2023095943A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus

Definitions

  • the present invention relates to a platform for a deformable mirror, and more particularly, to a platform for a deformable mirror capable of increasing the tip-tilt range of the deformable mirror and reducing the size of the deformable mirror platform by using a horizontal driving means. It's about
  • Adaptive optics is a technology related to compensating for the distortion of the light wavefront caused by atmospheric turbulence or the distortion of the light wavefront that occurs in an optical system composed of optical elements, and is used in various cutting-edge fields such as astronomy, defense, optical communication, and bio optics.
  • An adaptive optics system usually consists of a deformable mirror, a light wavefront sensor, and a control system for controlling them. play a role in
  • the deformation of the deformable mirror can be achieved by controlling a plurality of actuators attached to the back of the mirror surface. Since the actuator for deformability of the deformable mirror must be capable of fast and fine driving, a piezoelectric element or a voice coil using electromagnetic driving force can be used as an actuator. can
  • Patent Document 1 KR10-1931959 B1
  • an object of the present invention is to solve such conventional problems, and to provide a platform for a deformable mirror that can be easily applied to existing deformable mirrors or large deformable mirrors and can prevent the configuration of an optical system from becoming complicated or enlarged. there is.
  • a horizontal base plate a plurality of drive modules bonded to an upper portion of the base plate and spaced apart along the circumference; and a deformable mirror cradle having a circumferential portion connected to each of the driving modules and disposed at a spaced position above the base plate, wherein each of the driving modules is fixed to the base plate and generates a horizontal movement, a horizontal actuator; and a conversion member that receives the horizontal movement of the horizontal actuator and converts it into a vertical movement and transfers it to the deformable mirror holder.
  • Three of the driving modules may be arranged at equal intervals along the circumference.
  • the horizontal driver may be formed of a piezoelectric element driver.
  • the shifting member may include a horizontal portion connected to the horizontal actuator and extending in a horizontal direction, a vertical portion extending upward from an end of the horizontal portion and connected to the deformable mirror holder, and a space between the horizontal portion and the vertical portion.
  • a reference portion connected to the horizontal portion and the vertical portion and serving as a rotation axis of the horizontal portion and the vertical portion may be provided.
  • the conversion member may be formed of an 'L'-shaped flexure in which the horizontal part, the vertical part, and the reference part are integrally formed.
  • the horizontal part may be connected to the horizontal actuator through a first auxiliary flexure, and the vertical part may be connected to the deformable mirror holder through a second auxiliary flexure.
  • the switching member a plurality of different sizes can be connected to each other to increase the movement in the vertical direction.
  • the driving module may further include an elastic member that pushes the horizontal portion toward the horizontal actuator.
  • a height at which the deformable mirror cradle and the driving module are connected may be formed to match a mirror surface height of a deformable mirror placed on the deformable mirror cradle.
  • the deformable mirror platform according to the present invention may further include a sensor for measuring the distortion of the light wavefront of the deformable mirror placed on the deformable mirror cradle, and a control unit for controlling each of the driving modules based on the sensing values of the sensor.
  • the platform for the deformable mirror of the present invention is smaller in size than the existing deformable mirror platform.
  • the degree of tip-tilt of the deformable mirror can be increased, and it can be applied to a large deformable mirror.
  • the platform for a deformable mirror according to the present invention can operate stably and easily.
  • FIG. 1 is a perspective view of a platform for a deformable mirror according to the present invention.
  • FIG. 2 is an explanatory view of a driving module constituting a platform for a deformable mirror according to the present invention
  • FIG. 3 is an explanatory view of a switching member constituting a platform for a deformable mirror according to the present invention.
  • FIG. 4 is an explanatory view of a case in which a plurality of switching members are provided in a driving module constituting a platform for a deformable mirror according to the present invention
  • FIG. 5 is an explanatory view of a height at which a deformable mirror cradle and a driving module are connected in a platform for a deformable mirror according to the present invention.
  • FIG. 1 shows a perspective view of a platform 1 for a deformable mirror according to the present invention.
  • a platform 1 for a deformable mirror according to the present invention includes a base plate 10, a plurality of driving modules 20, and a deformable mirror holder 30.
  • the base plate 10 is formed in a flat plate shape and is disposed horizontally.
  • the driving modules 20 are bonded to the upper portion of the base plate 10 and are spaced apart from each other along the circumference.
  • the driving module 20 may be disposed along the circumference of the base plate 10 . 1 shows an example in which three driving modules 20 are arranged at equal intervals on the base plate 10, but two or more driving modules 20 may be formed.
  • the deformable mirror holder 30 is a horizontal plate-shaped member spaced apart from the upper portion of the base plate 10 and has a circumferential portion connected to each of the driving modules 20 .
  • the deformable mirror holder 30 can maintain a state of being spaced apart from the base plate 10 by the driving module 20, and can be tip-tilted by the operation of each driving module 20. It is possible that the deformable mirror M placed on the deformable mirror cradle 30 is tip-tilted by the tip-tilt of the deformable mirror cradle 30 .
  • the deformable mirror M may be directly bonded to the deformable mirror cradle 30 or bonded to the deformable mirror cradle 30 through the joint plate 40 fixed to the lower surface of the deformable mirror M. .
  • the deformable mirror M can be more easily fixed to the deformable mirror cradle 30.
  • each of the driving modules 20 includes a horizontal actuator 21 and a switching member 22 .
  • 2 shows an explanatory view of the driving module 20 .
  • the position of the horizontal driver 21 is fixed with respect to the base plate 10 through the housing 23 of the driving module 20 and generates movement in the horizontal direction.
  • the horizontal actuator 21 may be disposed in a direction parallel to the tangential line of the deformable mirror M placed on the deformable mirror holder 30 .
  • the switching member 22 serves to receive the horizontal movement of the horizontal actuator 21 and convert it to vertical movement, and transmit the converted movement to the deformable mirror holder 30 .
  • This shifting member 22 it is possible to tip-tilt the deformable mirror holder 30 by the horizontal movement of the horizontal driver 21.
  • the horizontal actuator 21 and the shifting member 22 may be disposed within the housing 23 of the driving module 20 .
  • the platform 1 for the transforming mirror of the present invention since the horizontal actuator 21 generating horizontal movement is used for the tip-tilt of the transforming mirror M, the conventional actuator generating vertical movement is used. Unlike the platform for the deformable mirror in which the deformable mirror M was tip-tilted using the platform, the height is not high.
  • the existing deformable mirror M can also be tip-tilted if it can be fixed on the deformable mirror cradle 30. do.
  • three driving modules 20 are arranged at equal intervals along the circumference.
  • the three driving modules 20 can stably support the deformable mirror holder 30 and prevent the deformable mirror platform 1 according to the present invention from being too complicated.
  • the horizontal driver 21 of the driving module 20 may be made of a piezoelectric element driver. In this case, the driving module 20 can finely and quickly adjust the angle of the deformable mirror holder 30 .
  • the switching member 22 may include a horizontal portion 22a, a vertical portion 22b, and a reference portion 22c. 3 shows an explanatory view of such a switching member 22 .
  • the horizontal portion 22a is connected to the horizontal driver 21 and extends in the horizontal direction.
  • the horizontal part 22a is connected to the horizontal actuator 21 on the same axis.
  • the vertical portion 22b extends upward from the end of the horizontal portion 22a and is connected to the deformable mirror holder 30 . That is, the horizontal portion 22a and the vertical portion 22b have an approximate 'L' shape.
  • the reference portion 22c is located in a space between the horizontal portion 22a and the vertical portion 22b, and may be connected to a connection portion between the horizontal portion 22a and the vertical portion 22b.
  • the reference portion 22c may be a rotation axis of the horizontal portion 22a and the vertical portion 22b. That is, the horizontal portion 22a and the vertical portion 22b may rotate based on the reference portion 22c.
  • the reference portion 22c may be bonded to the wall of the housing 23 of the driving module 20 and fixed at a certain height from the upper surface of the base plate 10 .
  • this shifting member 22 when the horizontal actuator 21 generates a horizontal movement, the horizontal part 22a and the horizontal actuator 21 and the connected part moves. Since it is formed to be rotatable based on one point, the distal end of the horizontal portion 22a (the end connected to the vertical portion 22b) moves upward. The movement of the horizontal part 22a is transmitted to the vertical part 22b so that the vertical part 22b moves upward, and the circumference of the deformable mirror holder 30 connected to the vertical part 22b moves upward. will do When the movement size of the horizontal actuator 21 is differently adjusted in each driving module 20, the height of each part around the deformable mirror holder 30 is changed, so that the deformable mirror holder 30 can be tip-tilted.
  • the switching member 22 When the switching member 22 includes a horizontal portion 22a, a vertical portion 22b, and a reference portion 22c, the switching member 22 is made of a flexure having an approximate 'L' shape. can That is, the horizontal portion 22a, the vertical portion 22b, and the reference portion 22c are integrally formed, and the connection portion of the reference portion 22c to the horizontal portion 22a and the vertical portion 22b is thinner than other portions. It can be formed and deformably formed. In the conversion member 22, as the connection portion of the reference portion 22c to the horizontal portion 22a and the vertical portion 22b is bent, the horizontal portion 22a and the vertical portion 22b are connected to the reference portion 22c. can rotate
  • This 'L'-shaped flexure can change the direction of the driving force of the horizontal actuator 21 while being simply formed.
  • the switching member 22 may further include a first auxiliary flexure 22d and a second auxiliary flexure 22e.
  • the first auxiliary flexure 22d connects the horizontal part 22a and the horizontal actuator 21, and the second auxiliary flexure 22e serves to connect the vertical part 22b and the deformable mirror holder 30. do.
  • the angle formed by the horizontal part 22a and the horizontal driver 21, and the vertical part 22b and the deformable mirror holder 30 angle should be different.
  • the first auxiliary flexure 22d and the second auxiliary flexure 22e are deformed when the horizontal part 22a and the vertical part 22b rotate, so that the connection part between the horizontal part 22a and the horizontal actuator 21 and the vertical It is possible to prevent stress from being concentrated on the connection portion between the portion 22b and the deformable mirror holder 30.
  • the first auxiliary flexure 22d and the second auxiliary flexure 22e may be integrally formed together with the horizontal portion 22a, the vertical portion 22b, and the reference portion 22c to form one flexure. .
  • the conversion member 22 may be formed by connecting a plurality of different sizes. 4 shows an explanatory diagram for this case.
  • the smallest one is connected to the horizontal actuator 21, and the larger ones are arranged in order toward the deformable mirror holder 30. And adjacent ones are positioned so that their upper and lower sides are opposite to each other.
  • the plurality of shifting members 22 can increase the movement in the vertical direction. That is, the vertical movement increases according to the ratio of the rotation radii of the transition members 22 connected to each other.
  • the driving module 20 may further include an elastic member 24 .
  • the elastic member 24 serves to push the horizontal portion 22a of the switching member 22 toward the horizontal actuator 21 .
  • the elastic member 24 prevents the shifting member 22 from rotating due to the load of the deformable mirror M when the horizontal driver 21 is not driven, so that the deformable mirror holder 30 can be stably fixed.
  • the horizontal actuator 21 When the horizontal actuator 21 is driven to move the vertical portion 22b upward or downward, the horizontal actuator 21, which is a piezoelectric element that is vulnerable to tensile force during rapid expansion and contraction in balance with the driving force of the horizontal actuator 21 can be prevented from being damaged.
  • the height at which the deformable mirror cradle 30 and the driving module 20 are connected may be formed to match the mirror surface height of the deformable mirror M placed on the deformable mirror cradle 30. .
  • the central axis of the inclination by the driving modules 20 may be located at the center height of the mirror surface of the deformable mirror M, and therefore, the drive module 20 is used to some extent for tip-tilting of the deformable mirror M. It is possible to facilitate the process of calculating whether the movement of M should be generated.
  • the central axis of the inclination of the deformable mirror M is not located at the central height of the mirror surface, the central axis of the inclination when tip-tilted is Compared to the case where the beam is located at the center height of the mirror surface, the direction of the beam incident to the deformable mirror M is the same, but the position of the incident beam is deviated from the center according to the amount of tip-tilt on the mirror surface of the deformable mirror M, and as a result As a result, the moving path of the beam in the optical system may deviate from the desired position.
  • the deformable mirror cradle 30 includes a connecting member 32 having an 'L'-shaped cross section.
  • the lower end of the connecting member 32 is connected to the circumference of the flat body 31 of the deformable mirror holder 30 and the upper end is connected to the driving module 20 .
  • the height of the main body 31 of the deformable mirror cradle 30 is located lower than the height of the junction between the deformable mirror cradle 30 and the driving module 20, and is seated on the main body 31 of the deformable mirror cradle 30.
  • the height of the mirror surface of the deformable mirror M is aligned with the height of the connecting portion with the driving module 20.
  • the platform 1 for a deformable mirror according to the present invention may further include a sensor (not shown) and a controller (not shown).
  • the sensor serves to measure the optical wavefront distortion of the deformable mirror M placed on the deformable mirror holder 30, and the control unit controls each of the driving modules 20 based on the sensing values of the sensor. That is, the control unit calculates the tip-tilt value of the deformable mirror M for compensating for the distortion of the light wavefront of the deformable mirror M based on the sensing value of the sensor, and each drive to make the calculated tip-tilt value.
  • Each drive module 20 is driven by calculating the degree of operation of the module 20 .
  • the platform 1 for a deformable mirror according to the present invention can tip-tilt the deformable mirror M automatically.
  • reference portion 22d first auxiliary flexure

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

La présente invention concerne une plateforme pour un miroir déformable, comprenant : une plaque de base horizontale ; une pluralité de modules d'actionneur qui sont liés à la partie supérieure de la plaque de base et sont espacés le long de leur circonférence ; et un support de miroir déformable dont la partie circonférentielle est reliée à chacun des modules d'actionneur et qui est disposé à une position espacée sur la partie supérieure de la plaque de base, chacun des modules d'actionneur pouvant avoir un actionneur horizontal, qui est fixé à la plaque de base et qui génère un mouvement horizontal, et un élément de conversion, qui convertit le mouvement horizontal reçu de l'actionneur horizontal en un mouvement vertical et transfère celui-ci au support de miroir déformable.
PCT/KR2021/017400 2021-11-24 2021-11-24 Plateforme pour miroir déformable WO2023095943A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2021-0163164 2021-11-24
KR1020210163164A KR20230076337A (ko) 2021-11-24 2021-11-24 변형거울용 플랫폼

Publications (1)

Publication Number Publication Date
WO2023095943A1 true WO2023095943A1 (fr) 2023-06-01

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PCT/KR2021/017400 WO2023095943A1 (fr) 2021-11-24 2021-11-24 Plateforme pour miroir déformable

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KR (1) KR20230076337A (fr)
WO (1) WO2023095943A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05236595A (ja) * 1992-02-25 1993-09-10 Toshiba Corp 磁歪式変位発生装置
KR20030065892A (ko) * 2002-02-01 2003-08-09 엘지전자 주식회사 광스위치용 압전구동형 미소거울 및 그 제조방법
KR20070013043A (ko) * 2005-07-25 2007-01-30 삼성전기주식회사 렌즈 이송장치
KR20110107414A (ko) * 2010-03-25 2011-10-04 김창완 압전 초음파 모터
KR102061859B1 (ko) * 2018-11-23 2020-01-02 주식회사 한화 레이저 빔의 파면을 보정하는 장치 및 그 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101931959B1 (ko) 2018-07-02 2019-03-20 한화시스템 주식회사 변형 거울 장치 및 그 구동 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05236595A (ja) * 1992-02-25 1993-09-10 Toshiba Corp 磁歪式変位発生装置
KR20030065892A (ko) * 2002-02-01 2003-08-09 엘지전자 주식회사 광스위치용 압전구동형 미소거울 및 그 제조방법
KR20070013043A (ko) * 2005-07-25 2007-01-30 삼성전기주식회사 렌즈 이송장치
KR20110107414A (ko) * 2010-03-25 2011-10-04 김창완 압전 초음파 모터
KR102061859B1 (ko) * 2018-11-23 2020-01-02 주식회사 한화 레이저 빔의 파면을 보정하는 장치 및 그 방법

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